CN113670702A - Gas mixing system and gas mixing method for SF6 decomposed gas - Google Patents
Gas mixing system and gas mixing method for SF6 decomposed gas Download PDFInfo
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- CN113670702A CN113670702A CN202110930854.XA CN202110930854A CN113670702A CN 113670702 A CN113670702 A CN 113670702A CN 202110930854 A CN202110930854 A CN 202110930854A CN 113670702 A CN113670702 A CN 113670702A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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Abstract
The invention relates to a gas mixing system and a gas mixing method for SF6 decomposed gas, wherein the gas mixing system comprises a first gas path, a second gas path and a gas mixing box, the first gas path and the second gas path are both provided with mass flow controllers, the output ends of the first gas path and the second gas path are both connected to the gas inlet of the gas mixing box, the input end of the first gas path is connected to a first container filled with an SF6 gas source, the input end of the second gas path is connected to a second container, the second gas path is provided with a plurality of gas mixing boxes, and each second gas circuit input end is connected to different second containers, and the gas mixing box includes the body, the sensor that awaits measuring, fan, pressure measurement unit, heating unit and vacuum pump, and the gas outlet of gas mixing box is connected to the vacuum pump, and the sensor that awaits measuring, pressure measurement unit, fan and heating unit are all arranged in this internally, still are equipped with on the body and insert by plane, and insert by plane and be connected to the sensor that awaits measuring. Compared with the prior art, the method has the advantages of improving the sample accuracy and the like.
Description
Technical Field
The invention relates to the field of synthesis of SF6 decomposed gas, in particular to a gas mixing system and a gas mixing method for SF6 decomposed gas.
Background
In the electrical industry, SF6 decomposed gas needs to be detected, the calibration of the sensor needs to use sample gas decomposed by standard SF6, and in the prior art, SF6 decomposed gas mixing operation is complex, the mixing precision is low, and various gases cannot be simply and accurately mixed.
Although some prior arts, for example, chinese patent CN108119749A discloses an SF6 and N2 mixed gas inflator and a precise inflation method, which includes an SF6 inflation gas circuit and an N2 inflation gas circuit arranged in parallel, a constant temperature heater connected to the SF6 inflation gas circuit and the N2 inflation gas circuit through pipelines, a gas mixing device connected to an outlet end of the constant temperature heater through a pipeline, a gas storage buffer tank connected to an outlet end of the gas mixing device through a pipeline, a gas component monitoring and feedback control device connected to an outlet end of the gas storage buffer tank through a pipeline, and a pressurization filling device connected to the gas component monitoring and feedback control device through a pipeline. But it has the following drawbacks:
1. only one mixed gas is supported, and the decomposed gases with different components cannot be obtained by mixing multiple components.
2. The gas can not be directly used for measurement, the gas can be used for measurement after being transferred, and the transferring process can bring more uncontrollable performance, so that the accuracy of the sample is reduced.
Disclosure of Invention
The invention aims to provide a gas mixing system and a gas mixing method for decomposing gas by SF 6.
The purpose of the invention can be realized by the following technical scheme:
a gas mixing system for decomposing gas by SF6 comprises a first gas path, a second gas path and a gas mixing box, wherein the first gas path and the second gas path are both provided with a mass flow controller, the output ends of the first air path and the second air path are both connected to the air inlet of the air mixing box, the input end of the first air path is connected to a first container filled with an SF6 air source, the input end of the second air path is connected to the second container, the second air path is provided with a plurality of air paths, and the input ends of the second gas paths are connected to different second containers, the gas mixing box comprises a body, a sensor to be measured, a fan, a pressure measuring unit, a heating unit and a vacuum pump, the gas outlet of gas mixing box is connected to the vacuum pump, this internal is all arranged in to the sensor that awaits measuring, pressure measurement unit, fan and heating unit, still be equipped with on the body and insert by plane, insert by plane and be connected to the sensor that awaits measuring.
The output end of the first container is provided with a first pressure reducing valve, and the output end of the second container is provided with a second pressure reducing valve.
The gas mixing system further comprises a gas inlet main pipe, the output ends of the first gas circuit and the second gas circuit are connected to the input end of the gas inlet main pipe, the output end of the gas inlet main pipe is connected to the gas inlet of the gas mixing box, and a main pipe electromagnetic valve is arranged on the gas inlet main pipe.
The first air path is provided with a first electromagnetic valve, and the second air path is provided with a second electromagnetic valve.
And the first electromagnetic valve and the second electromagnetic valve are both positioned on one side of the output end of the mass flow controller corresponding to the gas circuit.
The heating unit includes an insulating heating plate and a thermocouple for detecting temperature.
The pressure measuring unit is a pressure gauge.
And an air outlet valve is arranged between the vacuum pump and the air outlet of the air mixing box.
And the number of the second air passages is three.
A gas mixing method of the gas mixing system comprises the following steps:
step S1: closing the solenoid valve of the main pipe, vacuumizing the gas mixing box by using a vacuum pump, closing the vacuum pump and the gas outlet valve, standing for 30min, observing whether the indication number of the pressure measurement unit changes, and if not, executing the step S2;
step S2: opening a first electromagnetic valve to enable SF6 gas to fill the whole gas mixing box, opening a gas outlet valve, and closing the first electromagnetic valve, a main pipe electromagnetic valve and the gas outlet valve after ventilating for one minute;
step S3: opening a vacuum pump and an air outlet valve, pumping out SF6 gas in the gas mixing box, and closing the vacuum pump and the air outlet valve;
step S4: and opening the fan and the insulating heating plate to control the temperature of the gas, opening the mass flow controller, adjusting the flow rate ratio, then simultaneously opening the first electromagnetic valve, the main line electromagnetic valve and the corresponding second electromagnetic valve, enabling the gas to flow into the gas mixing box at different flow rates, increasing the pressure in the gas mixing box, and simultaneously closing the first electromagnetic valve, the main line electromagnetic valve and the corresponding second electromagnetic valve when the gas returns to one atmospheric pressure.
Compared with the prior art, the invention has the following beneficial effects:
1) the gas mixing box can be used for conveniently and accurately mixing various gases, can be used for mixing single gas or various mixed gases with different concentrations, and can be directly used as a test box, so that the accuracy of a sample is greatly improved.
2) The first electromagnetic valve and the second electromagnetic valve are configured, so that the flexibility of proportioning is improved.
3) And the sample is inflated to a standard atmospheric pressure, so that the accuracy of the sample can be improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
wherein: 1. the gas-liquid separator comprises a first gas circuit, a first container, a first pipeline, a first pressure reducing valve, a second gas circuit, a second pressure reducing valve, a second gas circuit, a first electromagnetic valve, a second gas circuit, a second container and a second pipeline, wherein the first gas circuit 2, the first container 3, the first pipeline 4, the first pressure reducing valve 5, the mass flow controller 6, the first electromagnetic valve 7, the second gas circuit 8, the second container 9 and the second pipeline. 10. The device comprises a second pressure reducing valve 11, a mass flow controller 12, a second electromagnetic valve 13, a gas mixing box 14, a body 15, a main line electromagnetic valve 16, a vacuum pump 17, a fan 18, a pressure gauge 19, an insulating heating plate 20, a thermocouple 21, an air plug 22 and an air outlet valve.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments. The present embodiment is implemented on the premise of the technical solution of the present invention, and a detailed implementation manner and a specific operation process are given, but the scope of the present invention is not limited to the following embodiments.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In one embodiment, as shown in fig. 1, a gas mixing system for decomposing a gas with SF6 includes,
a first air circuit 1, which comprises,
a first vessel 2 containing SF6 gas, having a first gas outlet connected to the first line 3,
a first pressure reducing valve 4 connected with the first pipeline 3 and positioned behind the first air outlet,
a mass flow controller 5 connected to the first pipe 3 and located behind the first pressure reducing valve 4,
a first electromagnetic valve 6 connected to the first pipe 3 and located behind the mass flow controller 5;
at least one second air passage 7, the second air passage 7 comprising,
a second vessel 8, containing a second gas different from SF6 gas, having a second gas outlet connected to a second line 9,
a second pressure reducing valve 10 connected to the second pipeline 9 and located behind the second air outlet,
a mass flow controller 11 connected to the second line 9 and located behind the second pressure reducing valve,
a second electromagnetic valve 12 connected to the second line 9 and located behind the mass flow controller 11;
the gas mixing tank 13, which comprises,
a body 14, which is a closed structure,
an air inlet 15 provided in the body 14 and communicating the first air path 1 and the at least one second air path 7,
an air outlet, which is arranged on the body 14,
a vacuum pump 16 connected to the air outlet,
a fan 17 provided at the bottom inside the body 14,
a heating unit provided to the body 14 to heat the mixed gas in the body 14 and generate temperature data,
a pressure measuring unit provided to the body 14 to measure the mixed gas in the body 14 and to generate pressure data.
In a preferred embodiment of the gas mixing system for decomposing a gas with SF6, the second gas comprises sulfur dioxide, hydrogen sulfide and carbon monoxide.
In a preferred embodiment of a mixing system for SF6 decomposition of gases, mass flow controller 5 has a flow rate per minute of at least 10 times that of mass flow controller 11, and mass flow controller 5 and/or mass flow controller 11 have a precision on the ppm level.
In a preferred embodiment of the mixing system for SF6 decomposition gas, the mass flow controller 5 has a flow rate of 5L/mim and the mass flow controller 11 has a flow rate of at least 5 ml/min.
In a preferred embodiment of the gas mixing system for decomposition of a gas by SF6, the gas mixing system further comprises a control unit connected to and controlling the flow rate ratio of mass flow controller 5 and mass flow controller 11.
In a preferred embodiment of the gas mixing system for decomposition of SF6, the control unit is further connected to the heating unit and the pressure measuring unit, and in response to the temperature data and the pressure data the control unit activates and deactivates the gas mixing tank 13.
In a preferred embodiment of the gas mixing system for decomposing gas by SF6, the controller is further connected with the first solenoid valve 6 and the second solenoid valve 12, and the control unit is used for communicating or closing the first gas circuit 1 and the second gas circuit 7 in response to the temperature data and the pressure data.
In a preferred embodiment of the mixing system for SF6 decomposition of gases, the controller is further connected to the fan 17 and the control unit adjusts the speed of the fan 17 based on the temperature data and the pressure data.
In a preferred embodiment of a gas mixing system for decomposing gas with SF6, the pressure measuring unit comprises a pressure gauge 18.
In a preferred embodiment of a gas mixing system for decomposing gas with SF6, the heating unit comprises an insulated heating plate 19 and a thermocouple 20 for detecting temperature.
In one embodiment, the gas mixing system for decomposing the gas by using the SF6 can be used for preparing single gas or a plurality of mixed gases with different concentrations, and the system takes the SF6 as background gas and is used for preparing three gases of SO2, H2S and CO. That is, the mass flow controller 5 and the corresponding mass flow controller 11 are used to configure the concentration gas in the ppm range. The volume of the gas mixing box 13 and the volume of the target gas introduced into the gas mixing box 13 do not need to be calculated, the actually selected measuring ranges of the mass flow controllers are different, and the concentration ranges of the configurable gas are different.
In one embodiment, the gas pressure of the gas cylinder in the first pressure reducing valve 4 and the second pressure reducing valve 10 is too high, and the gas pressure must be reduced through the pressure reducing valves to provide low-pressure gas for mixing.
In one embodiment, the mass flow controllers 5 and 11 control the gas flow rate, and when the mass flow controllers are turned on and off simultaneously, the ratio of the flow rates is the ratio of the gas concentrations, thereby realizing the concentration configuration
In one embodiment, the first solenoid valve 6 and the second solenoid valve 12: because the gas distribution system needs high reaction speed when controlling the gas path to be simultaneously opened and closed, the electromagnetic valve is selected to replace the conventional valve.
In one embodiment, the pressure gauge 18 monitors the pressure in the gas mixing tank 13, and since the gas mixing tank 13 needs to be purged and vacuumized during the gas distribution process, the actual pressure needs to be known, and when the gas pressure is restored to an atmospheric pressure, the gas is stopped.
In one embodiment, the thermocouple 20 monitors the temperature of the gas within the gas mixing box 13, providing temperature monitoring.
In one embodiment, dielectric heating is used to heat the temperature of the gas in the gas mixing box 13, providing a temperature controlled gas.
In one embodiment, in the mixed gas fan 17, the gas is repeatedly mixed by the fan 17 to ensure the accuracy of the gas concentration, considering that the gas has different molecular mass fractions and can generate a layering phenomenon during standing.
In one embodiment, the aviation plug is used for the circulation of the electric circuit and the sealing of the gas mixing box 13, and the mixed gas fan 17 and the insulated heating plate 19 are powered through the aviation plug.
In one embodiment, the vacuum pump 16 is used to detect the airtightness of the gas mixing box 13 and evacuate the gas mixing box 13 in advance when gas is dispensed.
In one embodiment, the operational flow of the soul machine system is:
the first step is as follows: air tightness detection
And (3) closing the air inlet valve, vacuumizing the air mixing box 13 by using the vacuum pump 16, displaying the pressure intensity in the air mixing box 13 through the pressure gauge 18, closing the vacuum pump 16 and the air outlet valve when the pressure gauge 18 displays negative atmospheric pressure, standing for 30min, observing whether the indication number of the pressure gauge 18 changes, and if the indication number does not change, ensuring that the air mixing box 13 has good sealing property.
The second step is that: the background gas SF6 flushes the gas mixing box 13
The SF6 gas circuit is opened, the gas outlet valve is opened after the SF6 fills the whole gas mixing box 13, all valves on the SF6 gas circuit are closed after one minute of ventilation, and the gas inlet valve and the gas outlet valve of the vacuum pump 16 are closed.
The third step: start of gas distribution
1. Vacuumizing: the vacuum pump 16 is opened, the air inlet valve is closed, and SF6 background gas in the gas lock is pumped out
2. Turning on the mixed gas fan 17 and the insulated heating plate 19 controls the temperature of the gas
3. And (3) gas distribution: the gas mass flow controller is opened, the flow rate is adjusted, the flow rate ratio is controlled according to the gas concentration of the desired ratio, then the electromagnetic valves are simultaneously opened, at the moment, the gas flows into the gas mixing box 13 from different flow rates, the pressure in the gas rises, the electromagnetic valves on different gas paths are simultaneously closed when the pressure in the gas is recovered to an atmospheric pressure, namely, when the reading of the pressure gauge 18 is zero, and at the moment, the ratio of the gas flow rates is the ratio of the gas concentrations. The single gas concentration configuration is as follows, and the operation flow and principle of the multiple gas concentration configurations are the same.
Finally, it should be noted that: the embodiments described are only a part of the embodiments of the present application, and not all embodiments, and all other embodiments obtained by those skilled in the art without making creative efforts based on the embodiments in the present application belong to the protection scope of the present application.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.
Claims (10)
1. The utility model provides a gas mixing system of SF6 decomposition gas, includes first gas circuit, second gas circuit and gas mixing box (13), all be equipped with mass flow controller in first gas circuit (1) and the second gas circuit (7), just the output of first gas circuit (1) and second gas circuit (7) all is connected to gas inlet (15) of gas mixing box (13), the input of first gas circuit (1) is connected to first container (2) that is filled with SF6 air supply, the input of second gas circuit (7) is connected to second container (8), its characterized in that, the second gas circuit is equipped with a plurality ofly altogether, and each second gas circuit input is connected to different second container (8), gas mixing box (13) includes body (14), the sensor that awaits measuring, fan, pressure measurement unit, heating unit and vacuum pump (16), the gas outlet of gas mixing box (13) is connected to vacuum pump (16), the sensor to be tested, the pressure measuring unit, the fan and the heating unit are all arranged in the body (14), the body (14) is further provided with an aerial plug (21), and the aerial plug (21) is connected to the sensor to be tested.
2. A gas mixing system for SF6 decomposition gas according to claim 1, wherein said first container (2) is provided with a first pressure relief valve (4) at an output and said second container (8) is provided with a second pressure relief valve (10) at an output.
3. The gas mixing system for decomposing gas with SF6 of claim 1, further comprising a gas inlet trunk, wherein the output ends of said first and second gas paths are connected to the input end of said gas inlet trunk, the output ends of said gas inlet trunk are connected to the gas inlet (15) of the gas mixing box (13), and a trunk solenoid valve is disposed on said gas inlet trunk.
4. The gas mixing system for SF6 decomposition gas according to claim 3, wherein said first gas path is equipped with a first solenoid valve (6), and said second gas path (7) is equipped with a second solenoid valve (12).
5. A gas mixing system for SF6 decomposition gas according to claim 4, wherein said first solenoid valve (6) and said second solenoid valve (12) are both located at output side of mass flow controller of corresponding gas path.
6. A gas mixing system for SF6 decomposition gas according to claim 1, wherein said heating unit comprises an insulated heating plate (19) and a thermocouple (20) to detect temperature.
7. The gas mixing system for SF6 decomposition gas according to claim 1, wherein the pressure measuring unit is a pressure gauge (18).
8. An SF6 gas mixing system as in claim 5, wherein an air outlet valve (22) is set between the vacuum pump (16) and the air outlet of the gas mixing box (13).
9. The gas mixing system for SF6 decomposition gas according to claim 1, wherein there are three of said second gas paths (7).
10. A gas mixing method of the gas mixing system according to claim 8, comprising:
step S1: closing the solenoid valve of the main pipe, vacuumizing the gas mixing box (13) by using a vacuum pump (16), closing the vacuum pump (16) and the gas outlet valve (22), standing for 30min, observing whether the indication number of the pressure measuring unit changes, and if not, executing the step S2;
step S2: opening a first electromagnetic valve (6), after filling the whole gas mixing box (13) with SF6 gas, opening a gas outlet valve (22), and closing the first electromagnetic valve (6), a main pipe electromagnetic valve and the gas outlet valve (22) after ventilating for one minute;
step S3: opening a vacuum pump (16) and an air outlet valve (22), exhausting SF6 gas in the gas mixing box (13), and closing the vacuum pump (16) and the air outlet valve (22);
step S4: and opening a fan (17) and an insulating heating plate (19) to control the temperature of the gas, opening a mass flow controller, adjusting the flow rate ratio, then simultaneously opening a first electromagnetic valve (6), a main line electromagnetic valve (22) and a corresponding second electromagnetic valve (12), wherein the gas flows into the gas mixing box (13) at different flow rates, the pressure in the gas mixing box (13) rises, and when the gas returns to an atmospheric pressure, simultaneously closing the first electromagnetic valve (6), the main line electromagnetic valve (22) and the corresponding second electromagnetic valve (12).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110930854.XA CN113670702A (en) | 2021-08-13 | 2021-08-13 | Gas mixing system and gas mixing method for SF6 decomposed gas |
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| CN202110930854.XA CN113670702A (en) | 2021-08-13 | 2021-08-13 | Gas mixing system and gas mixing method for SF6 decomposed gas |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112934014A (en) * | 2021-01-30 | 2021-06-11 | 河南省奥瑞环保科技有限公司 | Multi-gas dynamic distribution control device and system |
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2021
- 2021-08-13 CN CN202110930854.XA patent/CN113670702A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112934014A (en) * | 2021-01-30 | 2021-06-11 | 河南省奥瑞环保科技有限公司 | Multi-gas dynamic distribution control device and system |
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