CN111999008B - Batch nondestructive leakage detection method and device for airtight packaged integrated circuits - Google Patents
Batch nondestructive leakage detection method and device for airtight packaged integrated circuits Download PDFInfo
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- CN111999008B CN111999008B CN202011066535.0A CN202011066535A CN111999008B CN 111999008 B CN111999008 B CN 111999008B CN 202011066535 A CN202011066535 A CN 202011066535A CN 111999008 B CN111999008 B CN 111999008B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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- Examining Or Testing Airtightness (AREA)
Abstract
A batch nondestructive leakage detection method and device for an airtight packaged integrated circuit comprises a closed operation box, a nitrogen input pipeline, a helium or mixed gas input pipeline, a gas flow direction arrow, an excess gas outflow pipeline and a gas circulation purification system. Before the product is sealed, helium and nitrogen are respectively filled into the sealed operation box, the helium and nitrogen are mixed in the sealed operation box by controlling the flow of the helium and the nitrogen, the mixed gas with the required helium content is obtained, then the product is sealed under a certain pressure, the helium-containing mixed gas in the sealed operation box is directly sealed in the inner cavity of the product in the sealing process, and the helium mass spectrum leak detection test can be directly carried out without pressurization after the product is sealed. The method has the characteristics of simple implementation, stability and reliability, quick leak detection of the sealed shell, effective improvement of the circulation cycle and the airtightness level of the product, convenience for subsequent RGA calculation of the product and the like, and can be widely applied to the seal leak detection of various airtight integrated circuits or devices.
Description
Technical Field
The invention relates to the technical field of sealing tightness detection in the semiconductor industry, in particular to the technical field of treatment before detection, and particularly relates to the technical field of non-pressurized helium mass spectrum leakage detection.
Background
In the semiconductor industry, products with higher quality grades have air tightness assessment indexes, and the size of the air tightness indexes directly influences the qualification rate of the products. The common gas tightness detection means of the product mainly comprise fine leakage detection and coarse leakage detection, wherein the fine leakage detection is performed by a helium mass spectrometry detection method, and the coarse leakage detection is performed by a fluorine oil detection method. In the fine leakage detection process, the processed integrated circuit needs to be pressurized with helium for a certain pressure and time in a closed environment, so that the helium enters into a product with poor air tightness and is detected in helium mass spectrum detection. When the airtight packaged product is sealed, the sealing operation is often carried out in an operation box with a closed space due to the control requirement of the internal atmosphere, and after the sealing of the product is finished, the product is sent into a pressurizing tank for pressurizing, and then fine leakage detection is carried out. This process has several drawbacks: 1. the quantity of product detection depends on the volume of the pressurizing tank, and under the condition of huge quantity of product detection requirements, a large quantity of pressurizing devices are required to be configured to meet the circulation requirements. 2. In the pressurizing process, the product is easy to collide and scratch, thereby causing damage. 3. For the products with larger volumes, the weak parts of the products are easy to deform and damage due to stress under the action of pressurizing pressure.
In view of this, the present invention has been made.
Disclosure of Invention
The invention mainly aims to solve the problems that a large number of pressurizing devices are needed to be configured for batch product detection in the prior art, the products are easy to collide and scratch, and the weak parts of the packaging shells of the products are easy to deform and stress damage due to pressurizing pressure.
In order to achieve the above purpose, the invention provides a batch nondestructive leak detection method for an airtight packaged integrated circuit, which uses a closed operation box body with a pressure adjusting function to adjust box pressure and gas flow by applying related theoretical methods such as Avgalde Luo Dinglv, dalton law, gas flow theory and the like, and performs gas control by replacing and mixing control gas proportion, so that helium-containing mixed gas with a certain box pressure and a certain proportion is arranged in the closed operation box body, and the helium-containing mixed gas is sealed inside a product along with a sealing process during sealing operation, thereby realizing pressurization-free mass spectrum leak detection test.
The basic steps are as follows: before the product is sealed, helium and nitrogen are respectively filled into an operation box with a sealed space, the flow of the helium and the flow of the nitrogen are controlled, the helium and the nitrogen are mixed in the sealed space of the operation box to obtain mixed gas with required helium content, then the product is sealed under a certain pressure, the helium-containing mixed gas in the operation box is directly sealed into an inner cavity of the product in the sealing process, and the conventional helium mass spectrum leak detection test can be performed after the sealing is completed, so that the problem of the product after the sealing is avoided, and the problem of pressurized helium filling is solved.
The device for implementing the batch nondestructive leakage detection method of the air-tightness packaged integrated circuit comprises, as shown in a schematic diagram of fig. 1: a closed operation box body, a nitrogen input pipeline 1, a helium or mixed gas input pipeline 2, a gas flow direction arrow 3, an excessive gas outflow pipeline 5, a gas circulation purifying system 7 and the like.
The closed operation box body comprises an operation bin 4, an inlet transfer bin 8 and an outlet transfer bin 6;
the nitrogen gas input pipeline 1, the helium gas or the mixed gas input pipeline 2 are positioned on the upper side of the operation bin 4, the inlet transfer bin 8 is positioned on the left side of the operation bin 4, the outlet transfer bin 6 is positioned on the right side of the operation bin 4, the gas circulation purifying system 7 is positioned on the bottom side of the operation bin 4, and the redundant gas outflow pipeline 5 is positioned on the upper right side of the operation bin 4.
The device is also provided with a gas circulation purifying system and detection probes for oxygen, hydrogen, helium, water vapor, carbon dioxide and the like.
The closed operation box body is provided with a pressure adjusting device and a gas flow adjusting device.
The pressure regulating device or the gas flow regulating device is a computer automatic control device.
The computer automatic control device can control the filling and discharging of the operation bin, the inlet transmission bin and the outlet transmission bin and the outside air.
The leakage rate of the closed operation box body is less than or equal to 0.05VoL%/h.
The helium is high purity helium.
The nitrogen is high-purity nitrogen.
The mixed gas is a mixed gas of high-purity nitrogen and high-purity helium, preferably a mixed gas of high-purity helium with the content of 10-15% and high-purity nitrogen with the content of 90-85%.
The gas pressure is less than 1 standard atmospheric pressure.
Firstly, a closed operation box body with low leakage rate, adjustability, multi-bin intercommunication, gas content detection and gas circulation purification is selected, inert gases such as helium gas and nitrogen gas with certain concentration are used for mixing and filling the gases through calculation and operation box body setting, if the subsequent RGA calculation is needed, helium-containing inert mixed gas which is mixed by a partial pressure method is directly used for filling the operation box body, after the helium content in the operation box body is ensured, the product sealing processing is carried out, and the processed product is directly subjected to helium mass spectrum leakage detection test.
Compared with the prior art, the invention has the beneficial effects that:
according to the process method disclosed by the invention, helium mass spectrum leak detection test can be directly carried out without pressurization after the product is sealed. The method has the characteristics of simple implementation, stability and reliability, quick leak detection of the sealed shell, effective improvement of the circulation cycle and the tightness level of the product, convenience for subsequent RGA calculation of the product and the like. After the mixed gas is proportioned according to the required proportion by the process technology, the purity, proportion and content of the gas in the operation box body can be maintained by only carrying out a small amount of gas supplementing, the effects of saving gas and saving gas are achieved, and the process has good economic value and practicability. The method realizes low-cost and mass-producible gas use and recycling, and can use related theory to carry out RGA analysis after the product is sealed. The process method can be widely applied to the sealing leakage detection of various airtight integrated circuits or devices.
Drawings
FIG. 1 is a schematic view of the structure of the operation box and the gas flow.
In the figure: 1 is a nitrogen input pipeline, 2 is a helium or mixed gas input pipeline, 3 is a full-graph arrow representing the inflow and outflow direction of gas, and 4 is an operation bin; 5 is an excess gas outflow pipeline; 6 is an outlet delivery bin; 7 is a gas circulation purifying system; 8 is an inlet delivery bin.
Detailed Description
Referring to fig. 1, a specific embodiment of the process of the present invention is as follows:
the first step: selecting a proper closed operation box body, wherein the leakage rate of the operation box body is required to be less than or equal to 0.05Vol%/h, the box body consists of an inlet transmission bin, an outlet transmission bin and an operation bin, the three bins can be mutually controlled by a computer and are used for filling and discharging gas to the outside, in addition, the operation box body is required to be provided with a gas circulation purification system and an oxygen, hydrogen, helium, water vapor and carbon dioxide detection probe, and the pressure resistance of the box body is within +/-12 mbar;
and a second step of: selecting bottled mixed gas of 99.999% purity bottled helium and 85% nitrogen with 15% helium content, and selecting 99.999% purity nitrogen;
and a third step of: no subsequent RGA calculation analysis is required: filling 99.999% nitrogen and 99.999% helium into the operation box respectively, and performing gas content adjustment by corresponding calculation by using a flowmeter and an operation box gas flow control system, wherein the content of helium in the mixed gas in the operation box is between 10% and 15%. Subsequent RGA calculation analysis is needed: introducing bottled mixed gas containing 15% helium and 85% nitrogen into an operation box body, and continuously introducing 4000L;
fourth step: opening an operation box gas circulation purification system, opening an oxygen, hydrogen, helium, water vapor and carbon dioxide detection probe, observing that the content proportion of each atmosphere is 10% -15%, and adjusting the box pressure of the operation box body to maintain the box pressure at 5mbar;
fifth step: and sealing by using the product, taking out the product normally after sealing, standing for 30s in the environment, and then performing helium mass spectrum leak detection test.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments disclosed herein. It will be understood by those skilled in the art that various changes in detail may be effected therein without departing from the scope of the invention as defined by the claims appended hereto.
Claims (9)
1. The leak detection method of the batch nondestructive leak detection device using the airtight packaged integrated circuit is characterized in that the nondestructive leak detection device comprises a closed operation box body, a nitrogen input pipeline, a helium or mixed gas input pipeline, a gas flow direction arrow, an excessive gas outflow pipeline and a gas circulation purification system;
the closed operation box body comprises an operation bin, an inlet transfer bin and an outlet transfer bin;
the nitrogen input pipeline and the helium or mixed gas input pipeline are positioned on the upper side of the operation bin, the inlet transfer bin is positioned on the left side of the operation bin, the outlet transfer bin is positioned on the right side of the operation bin, the gas circulation purification system is positioned on the bottom side of the operation bin, and the redundant gas outflow pipeline is positioned on the upper right side of the operation bin;
the device is also provided with a gas circulation purifying system and an oxygen, hydrogen, helium, water vapor and carbon dioxide detection probe;
the leak detection method comprises the following steps:
(1) Before the product is sealed, helium and nitrogen or mixed gas are respectively filled into the sealed operation box body;
(2) Controlling the flow of helium and nitrogen, and mixing the helium and the nitrogen in a closed operation box body to obtain mixed gas with required helium content;
(3) Then sealing the product under a certain pressure, and directly sealing helium-containing mixed gas in a sealed operation box body into an inner cavity of the product in the sealing process;
(4) And after the sealing is finished, performing a conventional helium mass spectrum leak detection test.
2. A leak detection method using a hermetically sealed integrated circuit batch non-destructive leak detection apparatus according to claim 1, wherein the method employs avogalde Luo Dinglv, dalton's law, gas flow related theory methods.
3. The leak detection method using a batch type nondestructive leak detection apparatus for hermetically sealed integrated circuits according to claim 1, wherein the sealed operation box is provided with a pressure adjusting means and a gas flow rate adjusting means.
4. The leak detection method using a batch non-destructive leak detection apparatus for hermetically sealed integrated circuits according to claim 1, wherein the leak rate of the closed operation box is not more than 0.05vol%/h.
5. A leak detection method using a batch non-destructive leak detection apparatus for hermetically sealed integrated circuits according to claim 1, wherein said helium is high purity helium with a purity of 99.999%.
6. The method of leak detection using a batch non-destructive leak detection apparatus for hermetically sealed integrated circuits of claim 1, wherein the nitrogen is high purity nitrogen having a purity of 99.999%.
7. The leak detection method using the airtight packaged integrated circuit batch nondestructive leak detection device according to claim 1, wherein the mixed gas is a mixture of high-purity nitrogen and high-purity helium, and the content of the high-purity helium is 10% -15% and the content of the high-purity nitrogen is 90% -85%.
8. A method of leak detection using a batch non-destructive leak detection apparatus for hermetically sealed integrated circuits according to claim 1, wherein said gas pressure is less than 1 standard atmosphere.
9. A leak detection method using a batch non-destructive leak detection apparatus for hermetically packaged integrated circuits as in claim 1, comprising the steps of:
(1) Selecting a proper closed operation box body, wherein the leakage rate of the closed operation box body is required to be less than or equal to 0.05VoL%/h, and the inlet transfer bin, the outlet transfer bin and the operation bin of the closed operation box body control the filling and the discharging of gas through a computer; the closed operation box body is provided with a gas circulation purification system and an oxygen, hydrogen, helium, water vapor and carbon dioxide detection probe, and the pressure resistance of the closed operation box body is +/-12 mbar;
(2) Selecting bottled mixed gas of 99.999% purity bottled helium and 85% nitrogen with 15% helium content, and selecting 99.999% purity nitrogen;
(3) Without subsequent RGA calculation analysis: filling 99.999% nitrogen and 99.999% helium into the operation box respectively, and performing gas content allocation by corresponding calculation by using a flowmeter and an operation box gas flow control system, wherein the content of helium in the mixed gas in the operation box is between 10% and 15%; when RGA calculation analysis is needed to be carried out subsequently: introducing bottled mixed gas containing 15% helium and 85% nitrogen into an operation box body, and continuously introducing 4000L;
(4) Opening a closed operation box body gas circulation purification system, opening an oxygen, hydrogen, helium, water vapor and carbon dioxide detection probe, observing the content proportion of each atmosphere to ensure that the content of helium accounts for 10% -15%, and adjusting the box pressure of the closed operation box body to ensure that the box pressure is maintained at 5mbar;
(5) And (5) sealing the product, taking out the product after sealing, standing for 30s in the environment, and then performing helium mass spectrum leak detection test.
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| CN202011066535.0A CN111999008B (en) | 2020-09-30 | 2020-09-30 | Batch nondestructive leakage detection method and device for airtight packaged integrated circuits |
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| CN111999008B true CN111999008B (en) | 2023-09-19 |
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Address after: 550018 No. 238, north section of Xintian Avenue, Wudang District, Guiyang City, Guizhou Province Applicant after: Guizhou Zhenhua Fengguang Semiconductor Co.,Ltd. Address before: 550018 No. 238, north section of Xintian Avenue, Wudang District, Guiyang City, Guizhou Province Applicant before: GUIZHOU ZHENHUA FENGGUANG SEMICONDUCTOR Co.,Ltd. |
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