CN113648806B - Device for purifying fluoride in waste gas of semiconductor manufacturing process - Google Patents
Device for purifying fluoride in waste gas of semiconductor manufacturing process Download PDFInfo
- Publication number
- CN113648806B CN113648806B CN202110919202.6A CN202110919202A CN113648806B CN 113648806 B CN113648806 B CN 113648806B CN 202110919202 A CN202110919202 A CN 202110919202A CN 113648806 B CN113648806 B CN 113648806B
- Authority
- CN
- China
- Prior art keywords
- purifying
- purifying box
- box body
- fixedly connected
- purifying chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/685—Halogens or halogen compounds by treating the gases with solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/81—Solid phase processes
- B01D53/83—Solid phase processes with moving reactants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/40—Alkaline earth metal or magnesium compounds
- B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/60—Inorganic bases or salts
- B01D2251/604—Hydroxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2047—Hydrofluoric acid
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Abstract
The invention discloses a fluoride purifying device in semiconductor manufacturing process waste gas, which structurally comprises a purifying box body, wherein an alarm, a sealing cover plate, an air inlet pipe, a liquid discharge valve, a driving motor and a controller are arranged outside the purifying box body, the alarm is fixedly connected to the middle of the upper end of the purifying box body, the sealing cover plate is hermetically connected to the upper part right in front of the purifying box body, the air inlet pipe is fixedly connected to the upper part right of the purifying box body, the liquid discharge valve is fixedly connected to the lower part right of the purifying box body, and the driving motor is fixedly connected to the upper part left of the purifying box body. The invention realizes automatic detection of the amount of the reactant in the purification device, and gives an alarm to the reactant, thereby avoiding the phenomenon that the reactant in the purification device is lack of an operator to find and replace in time, increasing the contact area between the reactant and waste gas, and preventing the reactant from reacting insufficiently.
Description
Technical Field
The invention relates to the technical field of semiconductor production, in particular to a device for purifying fluoride in waste gas in a semiconductor manufacturing process.
Background
According to patent 201810747069.9, a device for purifying fluoride in waste gas of semiconductor manufacturing process relates to the technical field of purifying devices. The fluoride purifying device in the semiconductor manufacturing process waste gas comprises a frame, wherein the left end of the frame is communicated with a waste output end through a waste gas pipe, a flame reaction cavity is fixedly arranged at the top end of the frame, a hollow pipe is fixedly arranged at the bottom end of the inner wall of the flame reaction cavity, a gas reaction device is fixedly arranged at the top of the hollow pipe and comprises a gas reaction box, the flame reaction cavity is communicated with a gas output end through a gas inlet, and a flame spray nozzle is fixedly arranged on the outer surface of the gas reaction box. This purifier of fluoride in semiconductor manufacturing process waste gas, the fluoride that purifies in the waste gas is more thorough, and is more high-efficient, has practiced thrift the purifying time, adopts the cyclic utilization energy saving of heat energy simultaneously, and is more environmental protection for combine high temperature reaction and water reaction, save reaction time and energy saving.
Currently, there are some disadvantages in the existing devices for purifying fluoride in exhaust gas of semiconductor manufacturing process, such as; the existing purification device for fluoride in the waste gas of the semiconductor manufacturing process cannot automatically detect the amount of reactants in the purification device, and gives an alarm to prompt that the reactants in the purification device lack of phenomena that an operator cannot find and replace the reactants in time, the contact area of the reactants and the waste gas is smaller, the reactant is easy to react insufficiently, the speed of the operator in processing reaction products and replacing the reactants is slower, the labor intensity of the operator in processing the reaction products and replacing the reactants is improved, and the convenience in assembling and disassembling the purification device is reduced.
Disclosure of Invention
The invention aims to provide a device for purifying fluoride in waste gas of semiconductor manufacturing process, which solves the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a purifier of fluoride in semiconductor manufacturing process waste gas, includes the purification box, the outside of purification box is provided with alarm, sealed apron, intake pipe, fluid-discharge valve, driving motor and controller, alarm fixed connection is in the centre department of purification box upper end, sealed apron sealing connection is in the top in the direct front of the purification box, intake pipe fixed connection is in the top of purification box right-hand member, fluid-discharge valve fixed connection is in the below of purification box right-hand member, driving motor fixed connection is in the top of purification box left end, controller fixed connection is in the below in the direct front of the purification box;
the purifying device is characterized in that a purifying chamber and a water collecting tank are arranged in the purifying box body, the purifying chamber is located above the purifying box body, the water collecting tank is located below the purifying box body, the purifying chamber is connected with the water collecting tank through an electromagnetic valve, a collecting net frame, a bearing, a fan, an air jet pipe and a hydrogen fluoride gas detector are arranged on the purifying chamber, the collecting net frame is movably connected to the bottom of the purifying chamber, the bearing is fixedly connected to the inside of the purifying chamber, the fan is fixedly connected to the upper side of the inside of the purifying chamber, the air jet pipe is hermetically connected to the right upper side of the inside of the purifying chamber, the hydrogen fluoride gas detector is fixedly connected to the left upper side of the inside of the purifying chamber, a net roller is fixedly connected to the inner ring of the bearing, a net cover plate is fixedly connected to the middle of the net roller through a bolt, and the right end of the air jet pipe is connected to the left end of the air inlet pipe through an electromagnetic flow valve;
the controller is electrically connected with an electromagnetic switch through a wire, the electromagnetic switch is electrically connected with the driving motor and the fan through wires respectively, and the alarm, the electromagnetic valve, the electromagnetic flow valve and the hydrogen fluoride gas detector are electrically connected with the controller through wires respectively.
As a preferred embodiment of the present invention, the left end of the drain valve passes through the outside of the purification tank and is hermetically connected to the lower right side of the water collection tank.
As a preferred embodiment of the present invention, the output end of the driving motor is fixedly connected with the left end of the mesh drum through bearings, and the bearings are symmetrically arranged at the left and right sides of the purifying chamber.
As a preferred embodiment of the present invention, the upper end of the electromagnetic valve is hermetically connected to the bottom of the purification chamber, and the lower end of the electromagnetic valve is hermetically connected to the upper end of the water collection tank.
As a preferred embodiment of the present invention, the left end of the electromagnetic flow valve is connected to the right end of the air injection pipe in a sealing manner, and the right end of the electromagnetic flow valve is connected to the left end of the air intake pipe in a sealing manner.
As a preferred embodiment of the present invention, the position of the sealing cover corresponds to the position of the purifying chamber and coincides with the size of the purifying chamber.
As a preferred embodiment of the invention, the bottom of the gas injection tube is uniformly provided with gas injection holes.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, through the combination of the alarm, the liquid discharge valve, the driving motor, the controller, the electromagnetic valve, the bearing, the fan, the air ejector, the hydrogen fluoride gas detector, the reticular roller, the reticular cover plate, the electromagnetic flow valve, the electromagnetic switch and the air ejector, the automatic detection of the amount of reactants in the purifying device is effectively realized, the alarm prompt is carried out, the phenomenon that the reactants in the purifying device are lack of operators to find and replace in time is avoided, the contact area of the reactants and waste gas is increased, and the phenomenon that the reactants react insufficiently is prevented.
2. According to the invention, through the combination of the sealing cover plate, the collecting net frame, the net-shaped roller and the net-shaped cover plate, the speed of an operator for treating reaction products and replacing reactants is effectively increased, the labor intensity of the operator for treating the reaction products and replacing the reactants is reduced, and the convenience of the purification device in disassembly and assembly is improved.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of a device for purifying fluoride in exhaust gas of semiconductor manufacturing process according to the present invention;
FIG. 2 is a cross-sectional view of a device for purifying fluoride in exhaust gas from semiconductor manufacturing process according to the present invention;
FIG. 3 is a schematic diagram of the structure of a gas nozzle of a device for purifying fluoride in exhaust gas from semiconductor manufacturing process according to the present invention;
FIG. 4 is a control flow chart of a device for purifying fluoride in exhaust gas of semiconductor manufacturing process according to the present invention.
In the figure: the purifying box body 1, the alarm 2, the sealing cover plate 3, the air inlet pipe 4, the liquid discharge valve 5, the driving motor 6, the controller 7, the purifying chamber 8, the water collecting tank 9, the electromagnetic valve 10, the collecting net frame 11, the bearing 12, the fan 13, the air injection pipe 14, the hydrogen fluoride gas detector 15, the net roller 16, the net cover plate 17, the electromagnetic flow valve 18, the electromagnetic switch 19 and the air injection hole 20.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
In the description of the present invention, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: the utility model provides a purifier of fluoride in semiconductor manufacturing process waste gas, including purifying box 1, purifying box 1's outside is provided with alarm 2, sealed apron 3, intake pipe 4, flowing back valve 5, driving motor 6 and controller 7, alarm 2 fixed connection is in the centre department of purifying box 1 upper end, sealed apron 3 sealing connection is in the top in the dead ahead of purifying box 1, intake pipe 4 fixed connection is in the top of purifying box 1 right-hand member, flowing back valve 5 fixed connection is in the below of purifying box 1 right-hand member, driving motor 6 fixed connection is in the top of purifying box 1 left end, controller 7 fixed connection is in the below in the dead ahead of purifying box 1;
the purifying box 1 is internally provided with a purifying chamber 8 and a water collecting tank 9, the purifying chamber 8 is positioned above the purifying box 1, the water collecting tank 9 is positioned below the purifying box 1, the purifying chamber 8 is connected with the water collecting tank 9 through an electromagnetic valve 10, the purifying chamber 8 is provided with a collecting net frame 11, a bearing 12, a fan 13, an air jet pipe 14 and a hydrogen fluoride gas detector 15, the collecting net frame 11 is movably connected to the bottom of the purifying chamber 8, the bearing 12 is fixedly connected to the inside of the purifying chamber 8, the fan 13 is fixedly connected to the upper side of the inside of the purifying chamber 8, the air jet pipe 14 is hermetically connected to the right upper side of the inside of the purifying chamber 8, the hydrogen fluoride gas detector 15 is fixedly connected to the left upper side of the inside of the purifying chamber 8, a net drum 16 is fixedly connected to the inner ring of the bearing 12, the middle of the net drum 16 is fixedly connected with a net cover plate 17 through bolts, and the right end of the air jet pipe 14 is connected to the left end of the air inlet pipe 4 through an electromagnetic flow valve 18;
the controller 7 is electrically connected with an electromagnetic switch 19 through a wire, the electromagnetic switch 19 is respectively electrically connected with the driving motor 6 and the fan 13 through wires, and the alarm 2, the electromagnetic valve 10, the electromagnetic flow valve 18 and the hydrogen fluoride gas detector 15 are respectively electrically connected with the controller 7 through wires.
In the invention, when the purification device is used, firstly, calcium hydroxide is put into the interior of the reticular roller 16, then the reticular cover plate 17 is sealed outside the reticular roller 16, then the sealing cover plate 3 is sealed outside the purification box body 1, then the electromagnetic flow valve 18 is controlled to be opened by the controller 7, and the electromagnetic valve 10 is controlled to be closed, at the moment, waste gas containing hydrogen fluoride enters the interior of the electromagnetic flow valve 18 from the air inlet pipe 4, then the electromagnetic flow valve 18 conveys the gas into the interior of the air jet pipe 14, then the air jet pipe 14 sprays the gas into the interior of the purification chamber 8 from the air jet hole 20, then the driving motor 6 drives the reticular roller 16 to rotate through the bearing 12, at the moment, the hydrogen fluoride reacts with calcium hydroxide in the interior of the reticular roller 16, the fan 13 operates, so as to mix the gas in the interior during purification, the process, the hydrogen fluoride gas detector 15 can detect the hydrogen fluoride gas quantity in the purification chamber 8, when the hydrogen fluoride gas quantity is larger than the detection range of the hydrogen fluoride gas detector 15, the controller 7 can control the alarm 2, and at the same time, the electromagnetic flow valve 18 is controlled to be closed, the gas is blown into the interior of the purification chamber 8 from the air jet pipe 14, the air jet hole 20 is sprayed into the interior of the purification chamber 8 from the air jet hole 20, then the reaction chamber is opened, the reaction chamber is also opened through the electromagnetic valve 5, the reaction chamber is opened, and the water is discharged into the reaction chamber 11 through the reaction chamber through the electromagnetic valve, and the reaction chamber 11 is discharged into the reaction chamber, and then the reaction chamber is discharged into the reaction chamber, and the reaction chamber 11, and finally, the reaction chamber is separated into the reaction chamber, and the reaction chamber is finally, and the reaction chamber is separated from the reaction chamber, and is finally the reaction chamber is cooled.
In an alternative embodiment, the left end of the drain valve 5 passes through the outside of the purge bin 1 and is sealingly connected to the lower right side of the sump 9.
It is convenient to let the drain valve 5 drain the water collected in the water collecting tank 9.
In an alternative embodiment, the output end of the driving motor 6 is fixedly connected with the left end of the mesh drum 16 through a bearing 12, and the bearings 12 are symmetrically arranged at the left and right sides of the purifying chamber 8.
It should be noted that it is convenient to let the driving motor 6 drive the mesh drum 16 to rotate through the bearing 12.
In an alternative embodiment, the upper end of the solenoid valve 10 is sealingly connected to the bottom of the clean room 8, and the lower end of the solenoid valve 10 is sealingly connected to the upper end of the sump 9.
It is convenient to let the electromagnetic valve 10 discharge the water inside the purification chamber 8 to the inside of the water collection tank 9.
In an alternative embodiment, the left end of the electromagnetic flow valve 18 is sealingly connected to the right end of the gas lance 14, and the right end of the electromagnetic flow valve 18 is sealingly connected to the left end of the gas inlet pipe 4.
It is convenient to allow the electromagnetic flow valve 18 to detect and control the amount of ventilation.
In an alternative embodiment, the position of the sealing cover plate 3 corresponds to the position of the clean room 8 and corresponds to the size of the clean room 8.
It should be noted that the sealing cover plate 3 is convenient to be detached from the clean room 8.
In an alternative embodiment, the bottom of the gas lance 14 is uniformly provided with gas injection holes 20.
It is convenient to let the gas inside the gas lance 14 be ejected from the gas ejection holes 20.
While the fundamental and principal features of the invention and advantages of the invention have been shown and described, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (7)
1. The utility model provides a purifier of fluoride in semiconductor manufacturing process waste gas, includes purifying box (1), its characterized in that: the novel purifying device is characterized in that an alarm (2), a sealing cover plate (3), an air inlet pipe (4), a liquid discharge valve (5), a driving motor (6) and a controller (7) are arranged outside the purifying box body (1), the alarm (2) is fixedly connected to the middle of the upper end of the purifying box body (1), the sealing cover plate (3) is hermetically connected to the upper part right in front of the purifying box body (1), the air inlet pipe (4) is fixedly connected to the upper part right of the purifying box body (1), the liquid discharge valve (5) is fixedly connected to the lower part right of the purifying box body (1), the driving motor (6) is fixedly connected to the upper part left of the purifying box body (1), and the controller (7) is fixedly connected to the lower part right in front of the purifying box body (1).
The inside of purifying box (1) is provided with purifying chamber (8) and water collecting tank (9), purifying chamber (8) are located purifying box (1) inside top, water collecting tank (9) are located purifying box (1) inside below, purifying chamber (8) pass through solenoid valve (10) with water collecting tank (9) are connected, purifying chamber (8) are last to be provided with and collect net frame (11), bearing (12), fan (13), fumarole (14) and hydrogen fluoride gas detector (15), collecting net frame (11) swing joint is in purifying chamber (8) inside bottom, bearing (12) fixed connection is in purifying chamber (8) inside, fan (13) fixed connection is in purifying chamber (8) inside top, fumarole (14) sealing connection is in purifying chamber (8) inside upper right side, hydrogen fluoride gas detector (15) fixed connection is in purifying chamber (8) inside upper left side, net shape ring (12) fixed connection has net shape in net shape (16) through net shape ring (16) fixed connection has net shape in cylinder (16), the right end of the air jet pipe (14) is connected with the left end of the air inlet pipe (4) through an electromagnetic flow valve (18);
the controller (7) is electrically connected with an electromagnetic switch (19) through a wire, the electromagnetic switch (19) is respectively and electrically connected with the driving motor (6) and the fan (13) through wires, and the alarm (2), the electromagnetic valve (10), the electromagnetic flow valve (18) and the hydrogen fluoride gas detector (15) are respectively and electrically connected with the controller (7) through wires.
2. The apparatus of claim 1, wherein the apparatus further comprises: the left end of the liquid discharge valve (5) passes through the outside of the purifying box body (1) and is connected with the right lower part of the water collecting tank (9) in a sealing way.
3. The apparatus of claim 1, wherein the apparatus further comprises: the output end of the driving motor (6) is fixedly connected with the left end of the reticular roller (16) through a bearing (12), and the bearing (12) is symmetrically arranged at the left side and the right side of the purifying chamber (8).
4. The apparatus of claim 1, wherein the apparatus further comprises: the upper end of the electromagnetic valve (10) is connected with the bottom of the purifying chamber (8) in a sealing way, and the lower end of the electromagnetic valve (10) is connected with the upper end of the water collecting tank (9) in a sealing way.
5. The apparatus of claim 1, wherein the apparatus further comprises: the left end of the electromagnetic flow valve (18) is connected with the right end of the air spraying pipe (14) in a sealing mode, and the right end of the electromagnetic flow valve (18) is connected with the left end of the air inlet pipe (4) in a sealing mode.
6. The apparatus of claim 1, wherein the apparatus further comprises: the position of the sealing cover plate (3) corresponds to the position of the purifying chamber (8) and is matched with the size of the purifying chamber (8).
7. The apparatus of claim 1, wherein the apparatus further comprises: the bottom of the gas spraying pipe (14) is uniformly provided with gas spraying holes (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110919202.6A CN113648806B (en) | 2021-08-11 | 2021-08-11 | Device for purifying fluoride in waste gas of semiconductor manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110919202.6A CN113648806B (en) | 2021-08-11 | 2021-08-11 | Device for purifying fluoride in waste gas of semiconductor manufacturing process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113648806A CN113648806A (en) | 2021-11-16 |
| CN113648806B true CN113648806B (en) | 2023-09-22 |
Family
ID=78491381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110919202.6A Active CN113648806B (en) | 2021-08-11 | 2021-08-11 | Device for purifying fluoride in waste gas of semiconductor manufacturing process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113648806B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1043546A (en) * | 1996-07-31 | 1998-02-17 | Kazuteru Shinohara | Absorbing and removing method of harmful component |
| JPH11169663A (en) * | 1997-12-09 | 1999-06-29 | Kanken Techno Kk | Harm removing device for hot corrosive gaseous body and its method |
| JP2000254438A (en) * | 1999-03-12 | 2000-09-19 | Showa Denko Kk | Treatment, treating agent and treating device for halogen fluoride-containing waste gas |
| CN1913955A (en) * | 2004-01-29 | 2007-02-14 | 大阳日酸株式会社 | Exhaust gas treating agent, method for treating exhaust gas and apparatus for treating exhaust gas |
| CN1913956A (en) * | 2004-01-29 | 2007-02-14 | 大阳日酸株式会社 | Method and apparatus for treating exhaust gas |
| CN101007237A (en) * | 2006-01-26 | 2007-08-01 | 高化环保技术有限公司 | Cleaning apparatus of exhaust gas produced from semiconductor production process and method thereof |
| JP2007237047A (en) * | 2006-03-07 | 2007-09-20 | Taiyo Nippon Sanso Corp | Waste gas treatment method and treatment apparatus |
| CN108619876A (en) * | 2018-07-09 | 2018-10-09 | 安徽京仪自动化装备技术有限公司 | The purifier of fluoride in a kind of manufacture of semiconductor exhaust gas |
| CN208678766U (en) * | 2018-07-09 | 2019-04-02 | 安徽京仪自动化装备技术有限公司 | The purification device of fluoride in a kind of manufacture of semiconductor exhaust gas |
| CN212770201U (en) * | 2020-06-28 | 2021-03-23 | 广东新之蓝环保科技有限公司 | Efficient fluorine removal device for boiler |
| CN212790469U (en) * | 2020-06-10 | 2021-03-26 | 锦洋高新材料股份有限公司 | Tail gas processing apparatus is used in high-purity aluminium fluoride production |
| CN213492865U (en) * | 2020-10-23 | 2021-06-22 | 广东博地环境工程有限公司 | A environmental protection adsorption equipment for VOC waste gas |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI599395B (en) * | 2015-11-26 | 2017-09-21 | Orient Service Co Ltd | Method and device for purifying fluoride in semiconductor process exhaust gas |
-
2021
- 2021-08-11 CN CN202110919202.6A patent/CN113648806B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1043546A (en) * | 1996-07-31 | 1998-02-17 | Kazuteru Shinohara | Absorbing and removing method of harmful component |
| JPH11169663A (en) * | 1997-12-09 | 1999-06-29 | Kanken Techno Kk | Harm removing device for hot corrosive gaseous body and its method |
| JP2000254438A (en) * | 1999-03-12 | 2000-09-19 | Showa Denko Kk | Treatment, treating agent and treating device for halogen fluoride-containing waste gas |
| CN1913955A (en) * | 2004-01-29 | 2007-02-14 | 大阳日酸株式会社 | Exhaust gas treating agent, method for treating exhaust gas and apparatus for treating exhaust gas |
| CN1913956A (en) * | 2004-01-29 | 2007-02-14 | 大阳日酸株式会社 | Method and apparatus for treating exhaust gas |
| CN101007237A (en) * | 2006-01-26 | 2007-08-01 | 高化环保技术有限公司 | Cleaning apparatus of exhaust gas produced from semiconductor production process and method thereof |
| JP2007237047A (en) * | 2006-03-07 | 2007-09-20 | Taiyo Nippon Sanso Corp | Waste gas treatment method and treatment apparatus |
| CN108619876A (en) * | 2018-07-09 | 2018-10-09 | 安徽京仪自动化装备技术有限公司 | The purifier of fluoride in a kind of manufacture of semiconductor exhaust gas |
| CN208678766U (en) * | 2018-07-09 | 2019-04-02 | 安徽京仪自动化装备技术有限公司 | The purification device of fluoride in a kind of manufacture of semiconductor exhaust gas |
| CN212790469U (en) * | 2020-06-10 | 2021-03-26 | 锦洋高新材料股份有限公司 | Tail gas processing apparatus is used in high-purity aluminium fluoride production |
| CN212770201U (en) * | 2020-06-28 | 2021-03-23 | 广东新之蓝环保科技有限公司 | Efficient fluorine removal device for boiler |
| CN213492865U (en) * | 2020-10-23 | 2021-06-22 | 广东博地环境工程有限公司 | A environmental protection adsorption equipment for VOC waste gas |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113648806A (en) | 2021-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103785642B (en) | Parts automatically clean, dry and sterilizing installation | |
| CN212167033U (en) | Spray tower for waste gas treatment and purification | |
| CN212383409U (en) | Flue gas treatment device for metallurgy | |
| CN208553653U (en) | A kind of Horizental showering tower for pickling exhaust-gas treatment | |
| CN110479067A (en) | A kind of industry exhaust-gas efficient processing equipment ozoniferous | |
| CN208406628U (en) | A kind of injection molding machine waste gas treatment equipment | |
| CN113648806B (en) | Device for purifying fluoride in waste gas of semiconductor manufacturing process | |
| CN212869827U (en) | A gas cleaning device for hazardous waste handles | |
| CN116116182A (en) | Flue gas desulfurization dust remover | |
| CN110787555A (en) | Waste gas treatment device for chemical plant | |
| CN115920583A (en) | Active carbon exhaust treatment device | |
| CN216062729U (en) | Waste gas treatment device for concrete preparation | |
| CN213790895U (en) | Industrial waste gas treatment device | |
| CN207071313U (en) | A kind of new acid-fume absorber | |
| CN216726470U (en) | Low-energy-consumption dust removal system | |
| CN217154299U (en) | Household oil smoke decarbonization treatment equipment | |
| CN206701055U (en) | A kind of cesspool waste gas purification apparatus using solar disinfection | |
| CN216825551U (en) | Activated carbon injection device for heavy metal adsorption in household garbage combustion flue gas | |
| CN218077114U (en) | Tail gas treatment device for innocent treatment | |
| CN212790430U (en) | Deodorization device for sewage treatment tank | |
| CN215462028U (en) | Separator for hexamethyldisilazane | |
| CN209076320U (en) | A kind of wet line Peculiar Odor Treatment System of throwing humidity discharging | |
| CN219091491U (en) | Acid mist purifying mechanism | |
| CN219272479U (en) | Multifunctional absorption tower for sulfuric acid tail gas treatment | |
| CN216584603U (en) | Spray water recovery device for deodorization and sterilization |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |