CN113549869A - Vacuum coating method with antique grain effect - Google Patents

Vacuum coating method with antique grain effect Download PDF

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Publication number
CN113549869A
CN113549869A CN202110827097.3A CN202110827097A CN113549869A CN 113549869 A CN113549869 A CN 113549869A CN 202110827097 A CN202110827097 A CN 202110827097A CN 113549869 A CN113549869 A CN 113549869A
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vacuum coating
vacuum
layer
coating machine
antique
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夏白杨
明松
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Shenzhen Zhichuanggu Technology Co ltd
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Shenzhen Zhichuanggu Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/028Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5873Removal of material
    • C23C14/588Removal of material by mechanical treatment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a vacuum coating method with antique grain effect, which adopts a medium-frequency deposited pure chromium layer as a transition layer, can effectively improve the binding force between a film layer and a substrate, and enables the surface of a product to achieve consistency; the mixed coating of chromium and graphite is deposited by adopting medium-frequency sputtering, so that the adhesive force between the foundation and the film layer can be effectively adjusted, and the original color of the base material leaked from the film layer can be better removed during subsequent vibration grinding to show the effect of ancient veins; the graphite surface color layer is deposited by adopting medium-frequency sputtering, so that the hardness and the internal stress of the film layer can be effectively adjusted, and the phenomena of flake falling and incapability of falling can not occur during subsequent vibration grinding; a silicon dioxide transparent film layer is deposited on the outermost layer by adopting intermediate frequency sputtering, so that fingerprint prints can be effectively reduced, a certain waterproof effect can be achieved, and the coating and the base material can be obtained.

Description

Vacuum coating method with antique grain effect
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating method with an antique grain effect.
Background
It is known that the surface of some materials can be coated with a thin film to provide the materials with many new and good physical and chemical properties. In the 70 s of the 20 th century, the methods for plating films on the surfaces of objects mainly include electroplating methods and chemical plating methods. In the former method, an electrolytic solution is electrolyzed by applying current, and the electrolyzed ions are plated on the surface of a substrate as the other electrode, so that the conditions for such plating are that the substrate must be a good electrical conductor and the film thickness is difficult to control. The latter adopts chemical reduction method, the film material must be prepared into solution, and can quickly take part in reduction reaction, and the film-plating method not only has poor bonding strength of the film, but also can not uniformly and easily control the film plating, and at the same time, can produce a large amount of waste liquor to cause serious pollution. Therefore, these two coating processes, which are called wet coating processes, are greatly limited.
Vacuum coating is a new coating technique developed in comparison with the above-mentioned wet coating method, and is generally called dry coating technique. Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated (referred to as a substrate, a substrate or a base) is called vacuum coating.
Vacuum coating techniques generally fall into two broad categories, namely Physical Vapor Deposition (PVD) techniques and Chemical Vapor Deposition (CVD) techniques.
The physical vapor deposition technique is a method of directly depositing a plating material on the surface of a substrate by gasifying the plating material into atoms or molecules or ionizing the atoms or molecules into ions by various physical methods under a vacuum condition. The hard reaction film is prepared by physical vapor deposition method, which utilizes some physical process, such as thermal evaporation of material or sputtering of material surface atoms when being bombarded by ions, to realize the controllable transfer process of material atoms from source material to film. The physical vapor deposition technology has the advantages of good film/substrate binding force, uniform and compact film, good controllability of film thickness, wide application of target materials, wide sputtering range, capability of depositing thick films, capability of preparing alloy films with stable components, good repeatability and the like.
In the current popular products, such as mobile phone middle frames, hardware ornaments, clocks, glasses, locks and the like, ornamentation (such as antique lines) is required to be added on the outer surface of the products so as to improve the aesthetic property, the invention provides a technical scheme which has the antique line effect on the outer surface of the products by a vacuum coating method. Meanwhile, the product has the characteristics of bright color of the film layer, diversified color, wear-resistant quality of the film layer, high hardness, corrosion resistance, environment-friendly process (no waste water or waste gas discharge) and the like.
Disclosure of Invention
In order to solve the problems, the invention provides a vacuum coating method with the antique grain effect.
The invention is realized by the following technical scheme:
the invention provides a vacuum coating method with antique grain effect, which sequentially comprises the following steps:
(1) processing and molding a part A by using an alloy material;
(2) carrying out polishing or wire drawing process treatment on the part A to obtain a part B;
(3) carrying out vacuum hydrocarbon cleaning on the part B to obtain a part C;
(4) uniformly hanging the part C on a hanger of a vacuum coating machine;
(5) placing the hanger carrying the part C into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(6) filling 100 plus 200sccm of argon into the vacuum coating machine to ensure that the vacuum reaches 3.0-5.0E-1Pa, opening the bias voltage of 100 plus 150V, and depositing pure chromium as a bottom layer by intermediate frequency sputtering for 5-10 minutes, wherein the thickness of the bottom layer is 50-80 nm;
(7) filling 100 plus 200sccm argon gas to ensure that the vacuum in the vacuum coating machine reaches 3.0-5.0E-1Pa, setting the bias voltage to be 50-100V, sputtering the chromium and the graphite for 10-15 minutes by using 2 pairs of intermediate frequency, setting the current to be 12A, and depositing a transition layer, wherein the thickness of the transition layer is 80-120 nm;
(8) filling 200 plus 300sccm argon gas and 300 plus 400sccm acetylene to ensure that the vacuum in the vacuum coating machine reaches 6.0-7.0E-1Pa, setting the bias voltage at 30-50V, sputtering 2 pairs of intermediate frequency for 60-80 minutes graphite, setting the current at 25A, and depositing a black surface layer with the thickness of 500 plus 800 nm;
(9) and taking out the part C from the vacuum coating machine, cooling, and then putting into a vibration grinding barrel filled with ceramic particles for vibration for 20-40 minutes, wherein the black surface layer on the surface of the part C is removed by 10-30% so as to generate the antique grain effect.
Further, the vacuum coating method with the antique grain effect further comprises the following steps:
(10) vacuum hydrocarbon cleaning is carried out on the parts processed in the step (9), and then the parts are placed into a hanging tool again;
(11) placing the hanger carrying the parts into a vacuum coating machine for heating to 100-150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(12) filling 50-100sccm argon gas, 200-300sccm oxygen gas to make the vacuum in the vacuum coating machine reach 2.0-3.0E-1Pa, setting the bias voltage at 100-150V, sputtering 2 pairs of intermediate frequencies for 10-20 minutes to form silicon dioxide, setting the current at 20A, and depositing a transparent protective surface layer with the thickness of 50-80 nm.
The invention has the beneficial effects that:
1. the vacuum coating method with the antique grain effect adopts the intermediate frequency to deposit a layer of pure chromium as a transition layer, so that the binding force between the film layer and the substrate can be effectively improved, and the surface of the product can reach consistency;
2. according to the vacuum coating method with the antique grain effect, the chromium and graphite mixed coating is deposited by adopting medium-frequency sputtering, so that the adhesive force between a foundation and a film layer can be effectively adjusted, and the original color of a base material leaked from the film layer can be better removed during subsequent vibration grinding to show the antique grain effect;
3. according to the vacuum coating method with the antique grain effect, the graphite surface color layer is deposited by adopting medium-frequency sputtering, the hardness and the internal stress of the film layer can be effectively adjusted, and the phenomena of flake falling and incapability of falling can not occur during subsequent vibration grinding;
4. the vacuum coating method with the antique grain effect adopts intermediate frequency sputtering to deposit a silicon dioxide transparent film layer on the outermost layer, so that fingerprint prints can be effectively reduced, and the coating and the base material can have a certain waterproof effect.
Detailed Description
In order to more clearly and completely illustrate the technical solution of the present invention, the present invention is further described below.
The invention provides a vacuum coating method with antique grain effect, which sequentially comprises the following steps:
(1) processing and molding a part A by using an alloy material;
(2) carrying out polishing or wire drawing process treatment on the part A to obtain a part B;
(3) carrying out vacuum hydrocarbon cleaning on the part B to obtain a part C;
(4) uniformly hanging the part C on a hanger of a vacuum coating machine;
(5) placing the hanger carrying the part C into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(6) filling 100 plus 200sccm of argon into the vacuum coating machine to ensure that the vacuum reaches 3.0-5.0E-1Pa, opening the bias voltage of 100 plus 150V, and depositing pure chromium as a bottom layer by intermediate frequency sputtering for 5-10 minutes, wherein the thickness of the bottom layer is 50-80 nm;
(7) filling 100 plus 200sccm argon gas to ensure that the vacuum in the vacuum coating machine reaches 3.0-5.0E-1Pa, setting the bias voltage to be 50-100V, sputtering the chromium and the graphite for 10-15 minutes by using 2 pairs of intermediate frequency, setting the current to be 12A, and depositing a transition layer, wherein the thickness of the transition layer is 80-120 nm;
(8) filling 200 plus 300sccm argon gas and 300 plus 400sccm acetylene to ensure that the vacuum in the vacuum coating machine reaches 6.0-7.0E-1Pa, setting the bias voltage at 30-50V, sputtering 2 pairs of intermediate frequency for 60-80 minutes graphite, setting the current at 25A, and depositing a black surface layer with the thickness of 500 plus 800 nm;
(9) and taking out the part C from the vacuum coating machine, cooling, and then putting into a vibration grinding barrel filled with ceramic particles for vibration for 20-40 minutes, wherein the black surface layer on the surface of the part C is removed by 10-30% so as to generate the antique grain effect.
(10) Vacuum hydrocarbon cleaning is carried out on the parts processed in the step (9), and then the parts are placed into a hanging tool again;
(11) placing the hanger carrying the parts into a vacuum coating machine for heating to 100-150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(12) filling 50-100sccm argon gas, 200-300sccm oxygen gas to make the vacuum in the vacuum coating machine reach 2.0-3.0E-1Pa, setting the bias voltage at 100-150V, sputtering 2 pairs of intermediate frequencies for 10-20 minutes to form silicon dioxide, setting the current at 20A, and depositing a transparent protective surface layer with the thickness of 50-80 nm.
In the embodiment, the vacuum coating method with the antique grain effect adopts the intermediate frequency to deposit a layer of pure chromium as the transition layer, so that the bonding force between the film layer and the substrate can be effectively improved, and the surface of the product can reach consistency;
in the embodiment, the vacuum coating method with the antique grain effect adopts the medium-frequency sputtering deposition of the chromium and graphite mixed coating, so that the adhesive force between the foundation and the film layer can be effectively adjusted, and the original color of the substrate leaked from the film layer can be better removed during subsequent vibration grinding to show the antique grain effect;
in the embodiment, the vacuum coating method with the antique grain effect adopts the intermediate-frequency sputtering deposition of the graphite surface color layer, so that the hardness and the internal stress of the film layer can be effectively adjusted, and the phenomena of flake falling and incapability of falling during subsequent vibration grinding can be avoided;
in the embodiment, the vacuum coating method with the antique grain effect adopts intermediate frequency sputtering to deposit a silicon dioxide transparent film layer on the outermost layer, so that fingerprint prints can be effectively reduced, a certain waterproof effect can be achieved, and the coating and the base material can be obtained.
Compared with the prior art, the product produced by the vacuum coating method with the antique grain effect has the characteristics of simple process, less metal consumption, no waste gas and waste water discharge, capability of meeting the requirements of future economic development on energy conservation and environmental protection, bright film color, diversified color, wear-resistant film quality, high hardness, corrosion resistance and the like.
Of course, the present invention may have other embodiments, and based on the embodiments, those skilled in the art can obtain other embodiments without any creative effort, and all of them are within the protection scope of the present invention.

Claims (2)

1. A vacuum coating method with antique grain effect is characterized by sequentially comprising the following steps:
(1) processing and molding a part A by using an alloy material;
(2) carrying out polishing or wire drawing process treatment on the part A to obtain a part B;
(3) carrying out vacuum hydrocarbon cleaning on the part B to obtain a part C;
(4) uniformly hanging the part C on a hanger of a vacuum coating machine;
(5) placing the hanging tool carrying the part C into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E- 3Pa;
(6) Filling 100sccm argon into the vacuum coating machine to make the vacuum reach 3.0-5.0E-1Pa, opening the bias voltage of 100-150V, and depositing pure chromium as a bottom layer by intermediate frequency sputtering for 5-10 minutes, wherein the thickness of the bottom layer is 50-80 nm;
(7) 100 plus 200sccm argon is filled to make the vacuum in the vacuum coating machine reach 3.0-5.0E-1Pa, setting the bias voltage to be 50-100V, sputtering the chromium and the graphite for 10-15 minutes by using 2 pairs of intermediate frequency, setting the current to be 12A, and depositing a transition layer, wherein the thickness of the transition layer is 80-120 nm;
(8) filling 200 plus 300sccm argon gas and 300 plus 400sccm acetylene gas to make the vacuum in the vacuum coating machine reach 6.0-7.0E-1Pa, setting the bias voltage at 30-50V, sputtering graphite for 60-80 minutes by using 2 pairs of intermediate frequency, setting the current at 25A, and depositing a black surface layer with the thickness of 500-800 nm;
(9) and taking out the part C from the vacuum coating machine, cooling, and then putting into a vibration grinding barrel filled with ceramic particles for vibration for 20-40 minutes, wherein the black surface layer on the surface of the part C is removed by 10-30% so as to generate the antique grain effect.
2. The vacuum coating method with antique grain effect according to claim 1, further comprising the following steps:
(10) vacuum hydrocarbon cleaning is carried out on the parts processed in the step (9), and then the parts are placed into a hanging tool again;
(11) placing the hanger carrying the parts into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E- 3Pa;
(12) Filling 50-100sccm argon gas and 200-300sccm oxygen gas to make the vacuum in the vacuum coating machine reach 2.0-3.0E-1Pa, bias voltage is set to be 100-150V, 2 pairs of intermediate frequency are used for sputtering silicon dioxide for 10-20 minutes, the current is set to be 20A, a transparent protective surface layer is deposited, and the thickness of the transparent protective surface layer is 50-80 nm.
CN202110827097.3A 2021-07-21 2021-07-21 Vacuum coating method with antique grain effect Pending CN113549869A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115287587A (en) * 2022-07-21 2022-11-04 厦门建霖健康家居股份有限公司 Method for plating wire drawing film on plastic substrate

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001295039A (en) * 2000-04-13 2001-10-26 Nippon Sheet Glass Co Ltd Water-repellent article, and method of water-repellent thin film coating
US20040129313A1 (en) * 2003-01-07 2004-07-08 Aharonov Robert R. Article having a hard lubricious coating
CN102806516A (en) * 2011-05-30 2012-12-05 比亚迪股份有限公司 Metal casing and manufacturing method thereof
CN102899610A (en) * 2011-07-29 2013-01-30 鸿富锦精密工业(深圳)有限公司 Film-coated component and manufacturing method thereof
CN106086790A (en) * 2016-06-08 2016-11-09 宁波威霖住宅设施有限公司 A kind of kirsite antique copper vacuum coating method
CN108799127A (en) * 2018-05-25 2018-11-13 广东美芝制冷设备有限公司 The preparation method of compressor sliding blade, compressor and compressor sliding blade

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001295039A (en) * 2000-04-13 2001-10-26 Nippon Sheet Glass Co Ltd Water-repellent article, and method of water-repellent thin film coating
US20040129313A1 (en) * 2003-01-07 2004-07-08 Aharonov Robert R. Article having a hard lubricious coating
CN102806516A (en) * 2011-05-30 2012-12-05 比亚迪股份有限公司 Metal casing and manufacturing method thereof
CN102899610A (en) * 2011-07-29 2013-01-30 鸿富锦精密工业(深圳)有限公司 Film-coated component and manufacturing method thereof
CN106086790A (en) * 2016-06-08 2016-11-09 宁波威霖住宅设施有限公司 A kind of kirsite antique copper vacuum coating method
CN108799127A (en) * 2018-05-25 2018-11-13 广东美芝制冷设备有限公司 The preparation method of compressor sliding blade, compressor and compressor sliding blade

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115287587A (en) * 2022-07-21 2022-11-04 厦门建霖健康家居股份有限公司 Method for plating wire drawing film on plastic substrate

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