CN113549869A - Vacuum coating method with antique grain effect - Google Patents
Vacuum coating method with antique grain effect Download PDFInfo
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- CN113549869A CN113549869A CN202110827097.3A CN202110827097A CN113549869A CN 113549869 A CN113549869 A CN 113549869A CN 202110827097 A CN202110827097 A CN 202110827097A CN 113549869 A CN113549869 A CN 113549869A
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 43
- 230000000694 effects Effects 0.000 title claims abstract description 29
- 238000004544 sputter deposition Methods 0.000 claims abstract description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 12
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 12
- 239000011651 chromium Substances 0.000 claims abstract description 12
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 12
- 239000010439 graphite Substances 0.000 claims abstract description 12
- 238000000227 grinding Methods 0.000 claims abstract description 9
- 230000007704 transition Effects 0.000 claims abstract description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 6
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 claims description 32
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 15
- 229910052786 argon Inorganic materials 0.000 claims description 12
- 239000002344 surface layer Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 239000004215 Carbon black (E152) Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 238000005491 wire drawing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 14
- 238000000576 coating method Methods 0.000 abstract description 11
- 239000000758 substrate Substances 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 8
- 239000000853 adhesive Substances 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 3
- 210000003462 vein Anatomy 0.000 abstract 1
- 239000010408 film Substances 0.000 description 27
- 238000007747 plating Methods 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002912 waste gas Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
- C23C14/588—Removal of material by mechanical treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a vacuum coating method with antique grain effect, which adopts a medium-frequency deposited pure chromium layer as a transition layer, can effectively improve the binding force between a film layer and a substrate, and enables the surface of a product to achieve consistency; the mixed coating of chromium and graphite is deposited by adopting medium-frequency sputtering, so that the adhesive force between the foundation and the film layer can be effectively adjusted, and the original color of the base material leaked from the film layer can be better removed during subsequent vibration grinding to show the effect of ancient veins; the graphite surface color layer is deposited by adopting medium-frequency sputtering, so that the hardness and the internal stress of the film layer can be effectively adjusted, and the phenomena of flake falling and incapability of falling can not occur during subsequent vibration grinding; a silicon dioxide transparent film layer is deposited on the outermost layer by adopting intermediate frequency sputtering, so that fingerprint prints can be effectively reduced, a certain waterproof effect can be achieved, and the coating and the base material can be obtained.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating method with an antique grain effect.
Background
It is known that the surface of some materials can be coated with a thin film to provide the materials with many new and good physical and chemical properties. In the 70 s of the 20 th century, the methods for plating films on the surfaces of objects mainly include electroplating methods and chemical plating methods. In the former method, an electrolytic solution is electrolyzed by applying current, and the electrolyzed ions are plated on the surface of a substrate as the other electrode, so that the conditions for such plating are that the substrate must be a good electrical conductor and the film thickness is difficult to control. The latter adopts chemical reduction method, the film material must be prepared into solution, and can quickly take part in reduction reaction, and the film-plating method not only has poor bonding strength of the film, but also can not uniformly and easily control the film plating, and at the same time, can produce a large amount of waste liquor to cause serious pollution. Therefore, these two coating processes, which are called wet coating processes, are greatly limited.
Vacuum coating is a new coating technique developed in comparison with the above-mentioned wet coating method, and is generally called dry coating technique. Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated (referred to as a substrate, a substrate or a base) is called vacuum coating.
Vacuum coating techniques generally fall into two broad categories, namely Physical Vapor Deposition (PVD) techniques and Chemical Vapor Deposition (CVD) techniques.
The physical vapor deposition technique is a method of directly depositing a plating material on the surface of a substrate by gasifying the plating material into atoms or molecules or ionizing the atoms or molecules into ions by various physical methods under a vacuum condition. The hard reaction film is prepared by physical vapor deposition method, which utilizes some physical process, such as thermal evaporation of material or sputtering of material surface atoms when being bombarded by ions, to realize the controllable transfer process of material atoms from source material to film. The physical vapor deposition technology has the advantages of good film/substrate binding force, uniform and compact film, good controllability of film thickness, wide application of target materials, wide sputtering range, capability of depositing thick films, capability of preparing alloy films with stable components, good repeatability and the like.
In the current popular products, such as mobile phone middle frames, hardware ornaments, clocks, glasses, locks and the like, ornamentation (such as antique lines) is required to be added on the outer surface of the products so as to improve the aesthetic property, the invention provides a technical scheme which has the antique line effect on the outer surface of the products by a vacuum coating method. Meanwhile, the product has the characteristics of bright color of the film layer, diversified color, wear-resistant quality of the film layer, high hardness, corrosion resistance, environment-friendly process (no waste water or waste gas discharge) and the like.
Disclosure of Invention
In order to solve the problems, the invention provides a vacuum coating method with the antique grain effect.
The invention is realized by the following technical scheme:
the invention provides a vacuum coating method with antique grain effect, which sequentially comprises the following steps:
(1) processing and molding a part A by using an alloy material;
(2) carrying out polishing or wire drawing process treatment on the part A to obtain a part B;
(3) carrying out vacuum hydrocarbon cleaning on the part B to obtain a part C;
(4) uniformly hanging the part C on a hanger of a vacuum coating machine;
(5) placing the hanger carrying the part C into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(6) filling 100 plus 200sccm of argon into the vacuum coating machine to ensure that the vacuum reaches 3.0-5.0E-1Pa, opening the bias voltage of 100 plus 150V, and depositing pure chromium as a bottom layer by intermediate frequency sputtering for 5-10 minutes, wherein the thickness of the bottom layer is 50-80 nm;
(7) filling 100 plus 200sccm argon gas to ensure that the vacuum in the vacuum coating machine reaches 3.0-5.0E-1Pa, setting the bias voltage to be 50-100V, sputtering the chromium and the graphite for 10-15 minutes by using 2 pairs of intermediate frequency, setting the current to be 12A, and depositing a transition layer, wherein the thickness of the transition layer is 80-120 nm;
(8) filling 200 plus 300sccm argon gas and 300 plus 400sccm acetylene to ensure that the vacuum in the vacuum coating machine reaches 6.0-7.0E-1Pa, setting the bias voltage at 30-50V, sputtering 2 pairs of intermediate frequency for 60-80 minutes graphite, setting the current at 25A, and depositing a black surface layer with the thickness of 500 plus 800 nm;
(9) and taking out the part C from the vacuum coating machine, cooling, and then putting into a vibration grinding barrel filled with ceramic particles for vibration for 20-40 minutes, wherein the black surface layer on the surface of the part C is removed by 10-30% so as to generate the antique grain effect.
Further, the vacuum coating method with the antique grain effect further comprises the following steps:
(10) vacuum hydrocarbon cleaning is carried out on the parts processed in the step (9), and then the parts are placed into a hanging tool again;
(11) placing the hanger carrying the parts into a vacuum coating machine for heating to 100-150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(12) filling 50-100sccm argon gas, 200-300sccm oxygen gas to make the vacuum in the vacuum coating machine reach 2.0-3.0E-1Pa, setting the bias voltage at 100-150V, sputtering 2 pairs of intermediate frequencies for 10-20 minutes to form silicon dioxide, setting the current at 20A, and depositing a transparent protective surface layer with the thickness of 50-80 nm.
The invention has the beneficial effects that:
1. the vacuum coating method with the antique grain effect adopts the intermediate frequency to deposit a layer of pure chromium as a transition layer, so that the binding force between the film layer and the substrate can be effectively improved, and the surface of the product can reach consistency;
2. according to the vacuum coating method with the antique grain effect, the chromium and graphite mixed coating is deposited by adopting medium-frequency sputtering, so that the adhesive force between a foundation and a film layer can be effectively adjusted, and the original color of a base material leaked from the film layer can be better removed during subsequent vibration grinding to show the antique grain effect;
3. according to the vacuum coating method with the antique grain effect, the graphite surface color layer is deposited by adopting medium-frequency sputtering, the hardness and the internal stress of the film layer can be effectively adjusted, and the phenomena of flake falling and incapability of falling can not occur during subsequent vibration grinding;
4. the vacuum coating method with the antique grain effect adopts intermediate frequency sputtering to deposit a silicon dioxide transparent film layer on the outermost layer, so that fingerprint prints can be effectively reduced, and the coating and the base material can have a certain waterproof effect.
Detailed Description
In order to more clearly and completely illustrate the technical solution of the present invention, the present invention is further described below.
The invention provides a vacuum coating method with antique grain effect, which sequentially comprises the following steps:
(1) processing and molding a part A by using an alloy material;
(2) carrying out polishing or wire drawing process treatment on the part A to obtain a part B;
(3) carrying out vacuum hydrocarbon cleaning on the part B to obtain a part C;
(4) uniformly hanging the part C on a hanger of a vacuum coating machine;
(5) placing the hanger carrying the part C into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(6) filling 100 plus 200sccm of argon into the vacuum coating machine to ensure that the vacuum reaches 3.0-5.0E-1Pa, opening the bias voltage of 100 plus 150V, and depositing pure chromium as a bottom layer by intermediate frequency sputtering for 5-10 minutes, wherein the thickness of the bottom layer is 50-80 nm;
(7) filling 100 plus 200sccm argon gas to ensure that the vacuum in the vacuum coating machine reaches 3.0-5.0E-1Pa, setting the bias voltage to be 50-100V, sputtering the chromium and the graphite for 10-15 minutes by using 2 pairs of intermediate frequency, setting the current to be 12A, and depositing a transition layer, wherein the thickness of the transition layer is 80-120 nm;
(8) filling 200 plus 300sccm argon gas and 300 plus 400sccm acetylene to ensure that the vacuum in the vacuum coating machine reaches 6.0-7.0E-1Pa, setting the bias voltage at 30-50V, sputtering 2 pairs of intermediate frequency for 60-80 minutes graphite, setting the current at 25A, and depositing a black surface layer with the thickness of 500 plus 800 nm;
(9) and taking out the part C from the vacuum coating machine, cooling, and then putting into a vibration grinding barrel filled with ceramic particles for vibration for 20-40 minutes, wherein the black surface layer on the surface of the part C is removed by 10-30% so as to generate the antique grain effect.
(10) Vacuum hydrocarbon cleaning is carried out on the parts processed in the step (9), and then the parts are placed into a hanging tool again;
(11) placing the hanger carrying the parts into a vacuum coating machine for heating to 100-150 ℃, and vacuumizing to 6.0-8.0E-3 Pa;
(12) filling 50-100sccm argon gas, 200-300sccm oxygen gas to make the vacuum in the vacuum coating machine reach 2.0-3.0E-1Pa, setting the bias voltage at 100-150V, sputtering 2 pairs of intermediate frequencies for 10-20 minutes to form silicon dioxide, setting the current at 20A, and depositing a transparent protective surface layer with the thickness of 50-80 nm.
In the embodiment, the vacuum coating method with the antique grain effect adopts the intermediate frequency to deposit a layer of pure chromium as the transition layer, so that the bonding force between the film layer and the substrate can be effectively improved, and the surface of the product can reach consistency;
in the embodiment, the vacuum coating method with the antique grain effect adopts the medium-frequency sputtering deposition of the chromium and graphite mixed coating, so that the adhesive force between the foundation and the film layer can be effectively adjusted, and the original color of the substrate leaked from the film layer can be better removed during subsequent vibration grinding to show the antique grain effect;
in the embodiment, the vacuum coating method with the antique grain effect adopts the intermediate-frequency sputtering deposition of the graphite surface color layer, so that the hardness and the internal stress of the film layer can be effectively adjusted, and the phenomena of flake falling and incapability of falling during subsequent vibration grinding can be avoided;
in the embodiment, the vacuum coating method with the antique grain effect adopts intermediate frequency sputtering to deposit a silicon dioxide transparent film layer on the outermost layer, so that fingerprint prints can be effectively reduced, a certain waterproof effect can be achieved, and the coating and the base material can be obtained.
Compared with the prior art, the product produced by the vacuum coating method with the antique grain effect has the characteristics of simple process, less metal consumption, no waste gas and waste water discharge, capability of meeting the requirements of future economic development on energy conservation and environmental protection, bright film color, diversified color, wear-resistant film quality, high hardness, corrosion resistance and the like.
Of course, the present invention may have other embodiments, and based on the embodiments, those skilled in the art can obtain other embodiments without any creative effort, and all of them are within the protection scope of the present invention.
Claims (2)
1. A vacuum coating method with antique grain effect is characterized by sequentially comprising the following steps:
(1) processing and molding a part A by using an alloy material;
(2) carrying out polishing or wire drawing process treatment on the part A to obtain a part B;
(3) carrying out vacuum hydrocarbon cleaning on the part B to obtain a part C;
(4) uniformly hanging the part C on a hanger of a vacuum coating machine;
(5) placing the hanging tool carrying the part C into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E- 3Pa;
(6) Filling 100sccm argon into the vacuum coating machine to make the vacuum reach 3.0-5.0E-1Pa, opening the bias voltage of 100-150V, and depositing pure chromium as a bottom layer by intermediate frequency sputtering for 5-10 minutes, wherein the thickness of the bottom layer is 50-80 nm;
(7) 100 plus 200sccm argon is filled to make the vacuum in the vacuum coating machine reach 3.0-5.0E-1Pa, setting the bias voltage to be 50-100V, sputtering the chromium and the graphite for 10-15 minutes by using 2 pairs of intermediate frequency, setting the current to be 12A, and depositing a transition layer, wherein the thickness of the transition layer is 80-120 nm;
(8) filling 200 plus 300sccm argon gas and 300 plus 400sccm acetylene gas to make the vacuum in the vacuum coating machine reach 6.0-7.0E-1Pa, setting the bias voltage at 30-50V, sputtering graphite for 60-80 minutes by using 2 pairs of intermediate frequency, setting the current at 25A, and depositing a black surface layer with the thickness of 500-800 nm;
(9) and taking out the part C from the vacuum coating machine, cooling, and then putting into a vibration grinding barrel filled with ceramic particles for vibration for 20-40 minutes, wherein the black surface layer on the surface of the part C is removed by 10-30% so as to generate the antique grain effect.
2. The vacuum coating method with antique grain effect according to claim 1, further comprising the following steps:
(10) vacuum hydrocarbon cleaning is carried out on the parts processed in the step (9), and then the parts are placed into a hanging tool again;
(11) placing the hanger carrying the parts into a vacuum coating machine for heating to 100 ℃ and 150 ℃, and vacuumizing to 6.0-8.0E- 3Pa;
(12) Filling 50-100sccm argon gas and 200-300sccm oxygen gas to make the vacuum in the vacuum coating machine reach 2.0-3.0E-1Pa, bias voltage is set to be 100-150V, 2 pairs of intermediate frequency are used for sputtering silicon dioxide for 10-20 minutes, the current is set to be 20A, a transparent protective surface layer is deposited, and the thickness of the transparent protective surface layer is 50-80 nm.
Priority Applications (1)
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CN115287587A (en) * | 2022-07-21 | 2022-11-04 | 厦门建霖健康家居股份有限公司 | Method for plating wire drawing film on plastic substrate |
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