CN113506820A - 一种高性能静态随机存储器比特单元结构 - Google Patents
一种高性能静态随机存储器比特单元结构 Download PDFInfo
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- CN113506820A CN113506820A CN202110798893.9A CN202110798893A CN113506820A CN 113506820 A CN113506820 A CN 113506820A CN 202110798893 A CN202110798893 A CN 202110798893A CN 113506820 A CN113506820 A CN 113506820A
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- 230000005669 field effect Effects 0.000 claims description 13
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- 238000013461 design Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 24
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- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
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CN202110798893.9A CN113506820A (zh) | 2021-07-15 | 2021-07-15 | 一种高性能静态随机存储器比特单元结构 |
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CN202110798893.9A CN113506820A (zh) | 2021-07-15 | 2021-07-15 | 一种高性能静态随机存储器比特单元结构 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024012214A1 (zh) * | 2022-07-15 | 2024-01-18 | 华为技术有限公司 | 制作半导体器件的方法和半导体器件 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150243667A1 (en) * | 2014-02-27 | 2015-08-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and Method for FinFET SRAM |
US20180006040A1 (en) * | 2016-04-27 | 2018-01-04 | United Microelectronics Corp. | Static random-access memory (sram) cell array and forming method thereof |
US20180138185A1 (en) * | 2016-11-17 | 2018-05-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN109904160A (zh) * | 2017-12-11 | 2019-06-18 | 中芯国际集成电路制造(北京)有限公司 | 静态随机存储器及其制造方法 |
US20210183869A1 (en) * | 2019-12-12 | 2021-06-17 | Qualcomm Incorporated | Fin field-effect transistor (finfet) static random access memory (sram) |
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2021
- 2021-07-15 CN CN202110798893.9A patent/CN113506820A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150243667A1 (en) * | 2014-02-27 | 2015-08-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and Method for FinFET SRAM |
US20180006040A1 (en) * | 2016-04-27 | 2018-01-04 | United Microelectronics Corp. | Static random-access memory (sram) cell array and forming method thereof |
US20180138185A1 (en) * | 2016-11-17 | 2018-05-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN109904160A (zh) * | 2017-12-11 | 2019-06-18 | 中芯国际集成电路制造(北京)有限公司 | 静态随机存储器及其制造方法 |
US20210183869A1 (en) * | 2019-12-12 | 2021-06-17 | Qualcomm Incorporated | Fin field-effect transistor (finfet) static random access memory (sram) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024012214A1 (zh) * | 2022-07-15 | 2024-01-18 | 华为技术有限公司 | 制作半导体器件的方法和半导体器件 |
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