CN113427134A - Multi-axis laser processing system for on-machine error detection and correction - Google Patents
Multi-axis laser processing system for on-machine error detection and correction Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 42
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- 230000000087 stabilizing effect Effects 0.000 claims abstract description 14
- 238000012625 in-situ measurement Methods 0.000 claims abstract description 4
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention discloses a multi-axis laser processing system for error on-machine detection and correction, which comprises a five-axis numerical control machine tool, a femtosecond laser system, a three-dimensional galvanometer scanning system, an in-situ vision detection system, a light beam stabilizing system and an industrial personal computer, has the in-situ measurement capability on a complex component and the real-time automatic collimation function of a light beam, can realize the detection and correction of the constructed pose error, only needs one-time clamping without designing a special clamp, can control the laser focus position in real time by the three-dimensional galvanometer, has the surface etching capability, is also suitable for deep hole processing, improves the processing flexibility, has high femtosecond laser processing precision, good processing quality, large stroke of the five-axis numerical control machine tool, strong loading capability and large degree of freedom, and can realize the precision processing of a.
Description
Technical Field
The invention belongs to the field of laser precision machining equipment, and particularly relates to a multi-axis laser machining system for on-machine error detection and correction, which is used for realizing laser precision etching of surface textures of a three-dimensional complex curved surface workpiece.
Background
The surfaces of components such as a spacecraft antenna fixed surface reflector, a radar part frequency selector, a quartz hemispherical resonant gyroscope electrostatic excitation cover, an aircraft engine ceramic core, a casing, a mold and the like need fine texture manufacturing, the success or failure of national major civil and military projects is influenced, the fine manufacturing technology of the surface texture in China lags behind Europe and America, and is mainly reflected in the laggard processing and manufacturing equipment. The price of a plurality of curved surface texture precise laser manufacturing equipment required by China is nearly millions of yuan, and the precision and the efficiency can not meet the actual processing requirements; but the difference between domestic equipment and foreign equipment is obvious, and the requirement of precise manufacturing of complex curved surface textures cannot be met. The performance of the curved surface texture precision laser manufacturing equipment is jointly determined by a laser and an optical system thereof, a motion system and a photoelectric control system, and in order to improve the processing performance of the self-grinding laser processing equipment, the invention aims to realize on-machine error detection and correction on a multi-axis laser processing system through an optical-mechanical-electrical control system.
Disclosure of Invention
In order to solve the technical problems, the invention provides a multi-axis laser processing system for on-machine detection and correction of errors with large processing breadth, high precision and strong curved surface processing capability.
The invention is realized by adopting the following technical scheme:
a multi-axis laser processing system for error on-machine detection and correction comprises an industrial personal computer, a three-dimensional galvanometer scanning system, a femtosecond laser system, an in-situ vision measuring system and a five-axis numerical control machine; wherein, the industrial personal computer communicates with the three-dimensional galvanometer scanning system through a PCI interface, communicates with a femtosecond laser system, an in-situ vision measuring system and a five-axis numerical control machine through an EtherCAT Ethernet, realizes the on-off control and the process parameter setting of a laser beam through optical-mechanical-electrical cooperative control software operated on the industrial personal computer, controls the five-axis numerical control machine to drive a workpiece to move to a processing position, the in-situ vision measuring system detects and acquires a three-dimensional point cloud model and transmits the three-dimensional point cloud model to the industrial personal computer and calculates a pose error, the industrial personal computer controls the five-axis numerical control machine to correct the pose error, a second industrial CCD camera collects laser detection beam information and transmits the laser detection beam information to the industrial personal computer, the optical-mechanical-electrical cooperative control software calculates the laser processing beam deviation error and then communicates with the three-dimensional galvanometer scanning system to correct the pointing direction of the laser processing beam, and then sends scanning track point location information to an RTC5 galvanometer control card of the three-dimensional galvanometer scanning system, the RTC5 galvanometer control card controls the three-dimensional galvanometer scanning system to carry out laser processing.
The invention has the further improvement that the three-dimensional galvanometer scanning system comprises a two-dimensional galvanometer scanning head, a dynamic focusing mirror and an RTC5 galvanometer control card, wherein the RTC5 galvanometer control card is arranged in an industrial personal computer, and the two-dimensional galvanometer scanning head and the dynamic focusing mirror are communicated with the RTC5 control card through a DB interface to complete three-axis linkage of a X, Y axis of the two-dimensional galvanometer scanning head and a Z axis of the dynamic focusing mirror, so that high-speed and accurate control of a laser scanning track is realized.
The femtosecond laser system comprises a marble base, wherein a femtosecond laser, a beam expander, a first-stage reflector, a diaphragm, an 1/4 wave plate, a second-stage reflector, a power detection device and a third-stage reflector are arranged on the marble base, a fourth-stage reflector is arranged on a Z-direction upright post base, a fifth-stage reflector is arranged on a Z-axis supporting plate base, laser is subjected to beam expanding, light filtering and collimation through a light path transmission system and is incident to the fourth-stage reflector at the bottom of the Z-direction upright post of the five-axis numerical control machine tool after passing through a front-stage reflector, and is incident to a dynamic focusing mirror of the three-dimensional galvanometer scanning system through the fifth-stage reflector on the Z-axis supporting plate base, and the moving of the dynamic focusing mirror can realize the Z-direction movement of a laser focus.
The five-axis numerical control machine tool is further improved in that the five-axis numerical control machine tool comprises a base, a Y-direction translation shaft is installed on the base, an X-direction translation shaft is installed on a Y-direction motion table, a A, C-direction cradle type double-turntable is installed on the X-direction motion table, a vertical Z-direction motion shaft is installed at the rear part of the base, a three-dimensional galvanometer scanning system, an in-situ vision measuring system and a light beam stabilizing system are installed on a Z-direction supporting plate mechanism, femtosecond laser is emitted through a light path system and then enters the three-dimensional galvanometer scanning system through the reflection of a fourth-stage reflector and a fifth-stage reflector which are installed at the bottom of the Z-direction motion shaft and on the Z-direction supporting plate mechanism, laser parameters are arranged on an industrial personal computer, and the three-dimensional galvanometer scanning system and the five-axis numerical control machine tool are controlled to adjust the position and posture of a workpiece.
The invention has the further improvement that the X, Y, Z-direction moving platforms are all mechanisms that a servo motor drives a screw rod to rotate and drive a nut seat to drive a supporting plate seat to move, and X, Y, Z shaft screw rods are provided with organ shields on the respective supporting plate mechanisms.
The invention has the further improvement that the in-situ vision measurement system comprises a first industrial CCD camera, the first industrial CCD camera is installed on the dynamic focusing module through a CCD adapter, scanning data of the first industrial CCD camera is transmitted to an industrial personal computer through EtherCAT Ethernet, and after being processed by opto-electro-mechanical cooperative control software, the error between a three-dimensional point cloud model of a workpiece and the position and posture of the workpiece is obtained, in-situ measurement is realized on laser processing equipment, and the position and posture of the workpiece are corrected by utilizing a five-axis numerical control machine.
The invention further improves the technical scheme that the laser beam processing device further comprises a light beam stabilizing system, the light beam stabilizing system and the three-dimensional vibrating mirror scanning system are mounted on the Z-axis supporting plate seat together, the light beam stabilizing system and the three-dimensional vibrating mirror scanning system divide laser emitted by the three-dimensional vibrating mirror into a laser detection light beam and a laser processing light beam, the second industrial CCD camera collects the laser detection light beam, the laser processing light beam is used for processing, based on an optical path conjugation principle, the relation between the offset of a detection target light spot and the offset of a processing target light spot can be known according to the relative distance between the second industrial CCD camera and the light splitting mirror and the distance between the light splitting mirror and the processing target position, the offset of the processing target light spot is calculated by optical-mechanical-electrical cooperative control software, and the three-dimensional vibrating mirror is controlled to collimate and correct the laser light beam so as to ensure the pointing accuracy of the light beam.
The invention has the further improvement that the industrial personal computer runs with optical-electromechanical cooperative control software, the industrial personal computer communicates with the femtosecond laser, the first industrial CCD camera, the second industrial CCD camera and the five-axis numerical control machine through the EtherCAT, the RTC5 galvanometer control card is used as a PCI interface to issue a motion control command, the optical-electromechanical cooperative control system controls the five-axis numerical control machine to drive the workpiece to move to a processing position, then the laser switch is controlled, the surface of the workpiece is scanned by the three-dimensional galvanometer scanning system, the first industrial CCD camera transmits the shooting data back to the industrial personal computer, the three-dimensional point cloud model and the pose error of the workpiece are obtained after the processing of the optical-electromechanical cooperative control software, the five-axis numerical control machine is controlled to correct the pose of the workpiece, the second industrial CCD camera collects the laser beam information and transmits the laser beam information to the industrial personal computer, the optical-electromechanical cooperative control software calculates the laser beam deviation error and then communicates with the three-dimensional galvanometer scanning system, and correcting the laser processing light beam, then sending scanning track point location information to an RTC5 galvanometer control card, controlling the three-dimensional galvanometer scanning system to carry out laser processing, repeating the above processes after the current characteristic processing is finished, and moving to the next processing pose to continue processing until all the processing characteristics are finished.
The invention has at least the following beneficial technical effects:
1. the invention develops a multi-axis laser processing system for on-machine detection and correction of errors for large-breadth complex curved surface components, the system consists of an industrial personal computer, a three-dimensional galvanometer system, a femtosecond laser and a light path transmission system thereof, an in-situ vision measurement system, a light beam stabilizing system and a five-axis numerical control machine tool, optical-mechanical-electrical cooperative control software runs in the industrial personal computer to complexly coordinate various subsystems to complete processing, and the adopted femtosecond laser has good processing quality and high precision, can be used for surface etching of workpieces and deep hole processing.
2. The invention has an in-situ detection function, combines laser processing and line laser measurement, only needs one-time clamping in the processing process, does not need to design a special clamp, can obtain a three-dimensional point cloud model and a pose error of a workpiece by a vision detection system, and controls a five-axis numerical control machine tool to correct by an industrial personal computer, thereby ensuring the processing consistency and enhancing the flexible processing capability.
3. The laser beam stabilizing device has the function of automatically stabilizing the light beam, solves the problem of light beam offset caused by factors such as temperature drift of a vibrating mirror, thermal offset of a laser, air fluctuation, temperature change and the like, stabilizes the laser processing precision, and can be used for laser precision processing.
Drawings
FIG. 1 is a schematic diagram of a hardware connection structure of a multi-axis laser processing system for on-machine error detection and correction.
Fig. 2 is a schematic diagram of the structure of the optical path system.
Fig. 3 is a schematic structural diagram of a multi-axis laser processing system with error on-machine detection and correction.
FIG. 4 is a schematic view of a multi-axis laser processing system with on-machine error detection and correction.
Detailed Description
The invention is illustrated in more detail below by means of examples, which are only illustrative and the scope of protection of the invention is not limited by these examples.
As shown in FIG. 1, the invention provides a multi-axis laser processing system for on-machine error detection and correction, which comprises an industrial personal computer 1, a three-dimensional galvanometer scanning system b, a femtosecond laser system e, an in-situ vision measurement system c, a beam stabilizing system d and a five-axis numerical control machine tool a; wherein, the industrial personal computer 1 communicates with a three-dimensional galvanometer scanning system b through a PCI interface, communicates with a femtosecond laser system e, an in-situ vision measuring system c and a five-axis numerical control machine a through EtherCAT Ethernet, realizes the on-off control and the process parameter setting of laser through optical-mechanical-electrical cooperative control software operated on the industrial personal computer 1, controls the five-axis numerical control machine a to drive a workpiece to move to a processing position, the in-situ vision measuring system c detects and acquires a three-dimensional point cloud model and transmits the three-dimensional point cloud model to the industrial personal computer 1 and calculates a pose error, the industrial personal computer 1 controls the five-axis numerical control machine a to correct the pose error, a second industrial CCD camera 8 collects laser detection light beam information and transmits the laser detection light beam information to the industrial personal computer 1, the optical-mechanical-electrical cooperative control software calculates the laser processing light beam deviation error and then communicates with the three-dimensional galvanometer scanning system b to correct the laser processing light beam, and then sends scanning track point location information to an RTC5 galvanometer control card, and controlling the three-dimensional galvanometer scanning system b to carry out laser processing.
The three-dimensional galvanometer scanning system b consists of a two-dimensional galvanometer scanning head 3, a dynamic focusing mirror 4 and an RTC5 galvanometer control card, the galvanometer control card is installed inside an industrial personal computer, the two-dimensional galvanometer scanning head 3 and the dynamic focusing mirror 4 are communicated with the RTC5 control card through a DB interface, the three-axis linkage of a X, Y axis of the two-dimensional galvanometer scanning head 3 and a Z axis of the dynamic focusing mirror 4 is completed, and the high-speed and accurate control of a laser scanning track is realized
As shown in fig. 2, the femtosecond laser system e includes a marble base 21, on which a femtosecond laser 2, a beam expander 9, a first-stage reflector 10, a diaphragm 11, an 1/4 wave plate 12, a second-stage reflector 14, a power detector 13, and a third-stage reflector 15 are mounted, a fourth-stage reflector 16 is mounted on a Z-direction column base, a fifth-stage reflector 17 is mounted on a Z-axis pallet base 19, the laser beam is expanded, filtered, collimated by a light path transmission system, and enters the fourth-stage reflector 16 at the bottom of the Z-direction column of the five-axis machine tool a after passing through the front-stage reflector, and enters the dynamic focusing mirror 4 of the three-dimensional galvanometer scanning system b through the fifth-stage reflector 17 on the Z-axis pallet base 19, and the movement of the dynamic focusing mirror 4 can realize the Z-direction movement of the laser focus.
As shown in fig. 3, the in-situ vision measuring system c is composed of a first industrial CCD camera 6 and a three-dimensional galvanometer scanning system b together as described in chinese publication No. CN 109903342 a, wherein the first industrial CCD camera 6 is mounted on the dynamic focusing module 4 through a CCD adapter 5, scanning data of the first industrial camera 6 is transmitted to the industrial personal computer 1 through EtherCAT ethernet, and an error between a three-dimensional point cloud model of a workpiece and a position of the workpiece is obtained after processing by opto-electro-mechanical cooperative control software, so that in-situ measurement is realized on the laser processing equipment, the position of the workpiece is corrected by using a five-axis numerical control machine tool a, and accurate positioning in space of a complex curved surface workpiece can be realized without using a special fixture.
As shown in fig. 3, the light beam stabilizing system d is composed of a beam splitter 7 and a second industrial CCD camera 8, the light beam stabilizing system d and the three-dimensional galvanometer scanning system b are mounted on a Z-axis supporting plate seat 19 together, the beam splitter 7 splits the laser beam emitted from the three-dimensional galvanometer 3 into a laser detection beam and a laser processing beam, the second industrial CCD camera 8 collects the laser detection beam, the laser processing beam is used for processing, based on the optical path conjugation principle, the relationship between the detection target spot offset and the processing target spot offset is known according to the relative distance between the second industrial CCD camera 8 and the beam splitter 7 and the distance between the beam splitter 7 and the processing target position, the processing target spot offset is calculated by the opto-electro-mechanical cooperation control software, and the three-dimensional galvanometer 3 is controlled to perform collimation and correction on the laser beam to ensure the beam pointing accuracy.
As shown in fig. 4, an industrial personal computer 1 runs on optical-electromechanical cooperative control software, communicates with a femtosecond laser 2, a first industrial CCD camera 6, a second industrial CCD camera 8 and a five-axis numerical control machine a through EtherCAT, issues a motion control command through a PCI interface which is an RTC5 galvanometer control card, the optical-electromechanical cooperative control system controls the five-axis numerical control machine a to drive a workpiece to move to a processing position, then controls the on-off of a light beam of the laser 2, scans the surface of the workpiece through a three-dimensional galvanometer scanning system b, the first industrial CCD camera 6 transmits shot data back to the industrial personal computer 1, obtains a three-dimensional point cloud model and a pose error of the workpiece after being processed by the optical-electromechanical cooperative control software, controls the five-axis numerical control machine a to correct the workpiece, the second industrial CCD camera 8 collects laser detection light beam information and transmits the laser detection light beam information to the industrial personal computer 1, the optical-electromechanical cooperative control software calculates the laser processing light beam deviation error and then communicates with the three-dimensional galvanometer scanning system b, and correcting the pointing direction of a laser processing light beam, then sending scanning track point location information to an RTC5 galvanometer control card, controlling a three-dimensional galvanometer scanning system b to perform laser processing, repeating the above processes after the current characteristic is processed, and moving to the next processing pose to continue processing until all the processing characteristics are processed.
Claims (8)
1. A multi-axis laser processing system for error on-machine detection and correction is characterized by comprising an industrial personal computer (1), a three-dimensional galvanometer scanning system (b), a femtosecond laser system (e), an in-situ vision measurement system (c) and a five-axis numerical control machine tool (a); wherein, the industrial personal computer (1) is communicated with the three-dimensional galvanometer scanning system (b) through a PCI interface, is communicated with the femtosecond laser system (e), the in-situ vision measuring system (c) and the five-axis numerical control machine tool (a) through an EtherCAT Ethernet, realizes the on-off control and the process parameter setting of a laser beam through the optical-mechanical-electrical cooperative control software operated on the industrial personal computer (1), controls the five-axis numerical control machine tool (a) to drive a workpiece to move to a processing position, detects and obtains a three-dimensional point cloud model to be transmitted to the industrial personal computer (1) by the in-situ vision measuring system (c) and calculates a pose error, controls the five-axis numerical control machine tool (a) to correct the pose error by the industrial personal computer (1), acquires and transmits laser beam information to the second industrial CCD camera (8), calculates the laser processing beam offset error by the optical-mechanical-electrical cooperative control industrial personal computer software and then is communicated with the three-dimensional galvanometer scanning system (b), and correcting the pointing direction of a laser processing light beam, then sending scanning track point position information to an RTC5 galvanometer control card of the three-dimensional galvanometer scanning system (b), and controlling the three-dimensional galvanometer scanning system (b) to carry out laser processing by the RTC5 galvanometer control card.
2. The multi-axis laser processing system for on-machine error detection and correction according to claim 1, wherein the three-dimensional galvanometer scanning system (b) comprises a two-dimensional galvanometer scanning head (3), a dynamic focusing mirror (4) and an RTC5 galvanometer control card, the RTC5 galvanometer control card is installed inside an industrial personal computer, the two-dimensional galvanometer scanning head (3) and the dynamic focusing mirror (4) communicate with the RTC5 control card through a DB interface, three-axis linkage of a X, Y axis of the two-dimensional galvanometer scanning head (3) and a Z axis of the dynamic focusing mirror (4) is completed, and high-speed and accurate control of a laser scanning track is realized.
3. The multi-axis laser processing system for on-machine error detection and correction according to claim 1, wherein the femtosecond laser system (e) comprises a marble base (21) on which the femtosecond laser (2), the beam expander (9), the first stage reflector (10), the diaphragm (11), the 1/4 wave plate (12), the second stage reflector (14), the power detection device (13) and the third stage reflector (15) are mounted, the fourth stage reflector (16) is mounted on the base of the Z-direction column, the fifth stage reflector (17) is mounted on the Z-axis pallet base (19), the laser is expanded, filtered, collimated by the optical path transmission system, and then is incident to the fourth stage reflector (16) at the bottom of the Z-direction column of the five-axis numerical control machine (a) and then is incident to the dynamic focusing mirror (4) of the three-dimensional galvanometer scanning system (b) via the fifth stage reflector (17) on the Z-axis pallet base (19), the movement of the dynamic focusing mirror (4) can realize the Z-direction movement of the laser focus.
4. An error on-machine detection corrected multi-axis laser processing system as claimed in claim 3, it is characterized in that the five-axis numerical control machine tool (a) comprises a base, a Y-direction translational shaft is arranged on the base, an X-direction translational shaft is arranged on a Y-direction motion table, an A, C-direction cradle type double-turntable is arranged on the X-direction motion table, a vertical Z-direction motion shaft is arranged at the rear part of the base, a three-dimensional galvanometer scanning system (b), an in-situ vision measuring system (c) and a light beam stabilizing system (d) are arranged on a Z-direction supporting plate mechanism, after femtosecond laser is emitted through a light path system, the light is reflected by a fourth-stage reflector (16) and a fifth-stage reflector (17) which are arranged at the bottom of a Z-direction motion shaft and on a Z-direction supporting plate mechanism and enters a three-dimensional galvanometer scanning system (b), laser parameters are set on an industrial personal computer (1) to control a three-dimensional galvanometer scanning system (b) and a five-axis numerical control machine tool (a) to adjust the position and the pose of a workpiece.
5. The multi-axis laser processing system for on-machine error detection and correction of claim 3, wherein the X, Y, Z-direction moving platform is a mechanism that a servo motor drives a screw rod to rotate and drive a nut seat to drive a supporting plate seat to move, and the X, Y, Z-axis screw rods are provided with organ shields on the respective supporting plate mechanisms.
6. The multi-axis laser processing system for on-machine error detection and correction according to claim 1, wherein the in-situ vision measuring system (c) comprises a first industrial CCD camera (6), the first industrial CCD camera (6) is mounted on the dynamic focusing module (4) through a CCD adapter (5), scanning data of the first industrial CCD camera (6) is transmitted to the industrial personal computer (1) through EtherCAT ethernet, and after being processed by opto-electro-mechanical cooperative control software, a workpiece three-dimensional point cloud model and a workpiece pose error are obtained, in-situ measurement is realized on a laser processing device, and a workpiece pose is corrected by using a five-axis numerical control machine (a).
7. The multi-axis laser processing system for error on-machine detection and correction according to claim 6, further comprising a beam stabilizing system (d) composed of a beam splitting mirror (7) and a second industrial CCD camera (8), wherein the beam stabilizing system (d) and the three-dimensional galvanometer scanning system (b) are installed on the Z-axis pallet base (19), the beam splitting mirror (7) splits the laser beam emitted from the three-dimensional galvanometer (3) into a laser detection beam and a laser processing beam, the second industrial CCD camera (8) collects the laser detection beam, the laser processing beam is used for processing, based on the optical path conjugation principle, the relationship between the detected target spot offset and the processed target spot offset can be known according to the relative distance between the second industrial CCD camera (8) and the beam splitting mirror (7) and the distance between the beam splitting mirror (7) and the processed target position, the offset of the processing target facula is calculated by optical-electro-mechanical cooperative control software, and the three-dimensional galvanometer (3) is controlled to carry out collimation and correction on the laser beam so as to ensure the pointing accuracy of the beam.
8. The multi-axis laser processing system for on-machine error detection and correction according to claim 7, wherein an industrial personal computer (1) runs optical-electro-mechanical cooperative control software, communicates with the femtosecond laser (2), the first industrial CCD camera (6), the second industrial CCD camera (8) and the five-axis numerical control machine (a) through EtherCAT, issues a motion control command for an RTC5 galvanometer control card through a PCI interface, controls the five-axis numerical control machine (a) to drive a workpiece to move to a processing position through the optical-electro-mechanical cooperative control system, then controls the laser (2) to be switched on and off, scans the surface of the workpiece through the three-dimensional galvanometer scanning system (b), transmits shot data back to the first industrial CCD camera (6), obtains a three-dimensional point cloud model and a pose error of the workpiece after being processed by the optical-electro-mechanical cooperative control software of the optical-electro-mechanical control computer, and controls the five-axis numerical control machine (a) to correct the pose of the workpiece, the second industrial CCD camera (8) collects laser detection light beam information and transmits the laser detection light beam information to the industrial personal computer (1), optical-mechanical-electrical cooperation control software calculates laser processing light beam deviation errors and then communicates with the three-dimensional galvanometer scanning system (b) to correct the laser processing light beams, scanning track point position information is sent to the RTC5 galvanometer control card to control the three-dimensional galvanometer scanning system (b) to carry out laser processing, after the current characteristic processing is finished, the above processes are repeated, and the processing is continued until all processing characteristics are finished.
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