CN113423856A - 掩模装置、掩模板及框架 - Google Patents

掩模装置、掩模板及框架 Download PDF

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Publication number
CN113423856A
CN113423856A CN201980002303.8A CN201980002303A CN113423856A CN 113423856 A CN113423856 A CN 113423856A CN 201980002303 A CN201980002303 A CN 201980002303A CN 113423856 A CN113423856 A CN 113423856A
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substrate
mask
clamping
plane
inner edge
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CN201980002303.8A
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CN113423856B (zh
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白珊珊
韩乔楠
李彦松
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B05C21/005—Masking devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种掩模装置(10)、掩模板(1)和框架(2)。掩模装置包括框架和第一掩模板，框架包括内边缘(21)、外边缘(22)和多个安装槽(23)，第一掩模板包括基板(11)和从基板的周边向外凸出延伸的多个夹持部(13)，多个夹持部被配置为一一对应地安装在多个安装槽中，从而基板安装在框架的内边缘上。夹持部包括与基板连接的第一部分(131)，第一部分具有弧形部(1310)，弧形部在基板的侧面(110)上的正投影位于夹持部整体在基板的侧面上的正投影内。

Description

PCT国内申请，说明书已公开。

Claims (22)

  1. PCT国内申请，权利要求书已公开。
CN201980002303.8A 2019-11-05 2019-11-05 掩模装置、掩模板及框架 Active CN113423856B (zh)

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PCT/CN2019/115640 WO2021087732A1 (zh) 2019-11-05 2019-11-05 掩模装置、掩模板及框架

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CN113423856A true CN113423856A (zh) 2021-09-21
CN113423856B CN113423856B (zh) 2023-04-18

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CN (1) CN113423856B (zh)
WO (1) WO2021087732A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109778116B (zh) * 2019-03-28 2021-03-02 京东方科技集团股份有限公司 一种掩膜版及其制作方法、掩膜版组件
CN109962096B (zh) * 2019-04-15 2021-02-23 京东方科技集团股份有限公司 显示背板及其制作方法、显示装置
WO2021087732A1 (zh) * 2019-11-05 2021-05-14 京东方科技集团股份有限公司 掩模装置、掩模板及框架

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120156812A1 (en) * 2010-12-20 2012-06-21 Samsung Mobile Display Co., Ltd. Mask frame assembly, method of manufacturing the same, and method of manufacturing organic light-emitting display device using the mask frame assembly
CN107399613A (zh) * 2017-08-03 2017-11-28 武汉华星光电技术有限公司 一种掩膜版搬运装置
CN207278637U (zh) * 2017-04-13 2018-04-27 福建农林大学 一种水滴形条板连接结构
US20180202034A1 (en) * 2016-06-17 2018-07-19 Boe Technology Group Co., Ltd. Mask plate and assembly method thereof
CN108823527A (zh) * 2018-06-14 2018-11-16 京东方科技集团股份有限公司 掩膜板框架组件和掩膜板模组
CN208532917U (zh) * 2018-08-03 2019-02-22 昆山国显光电有限公司 一种掩模片的支撑装置及掩模板

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2572097Y (zh) 2002-10-18 2003-09-10 无锡振锡金属制品有限公司 一种板材连接构件
EP2133444A1 (en) 2008-04-18 2009-12-16 Applied Materials, Inc. Mask support, mask assembly, and assembly comprising a mask support and a mask
KR101030030B1 (ko) * 2009-12-11 2011-04-20 삼성모바일디스플레이주식회사 마스크 조립체
KR101107159B1 (ko) * 2009-12-17 2012-01-25 삼성모바일디스플레이주식회사 평판 표시장치의 박막 증착용 마스크 조립체
KR101174879B1 (ko) * 2010-03-09 2012-08-17 삼성디스플레이 주식회사 박막 증착용 마스크 프레임 조립체 및 그 조립방법
KR101182239B1 (ko) * 2010-03-17 2012-09-12 삼성디스플레이 주식회사 마스크 및 이를 포함하는 마스크 조립체
KR101156442B1 (ko) * 2010-04-29 2012-06-18 삼성모바일디스플레이주식회사 마스크 프레임 조립체
KR20120105292A (ko) * 2011-03-15 2012-09-25 삼성디스플레이 주식회사 증착 마스크 및 증착 마스크 제조 방법
KR101820020B1 (ko) * 2011-04-25 2018-01-19 삼성디스플레이 주식회사 박막 증착용 마스크 프레임 어셈블리
KR101899093B1 (ko) * 2012-02-03 2018-09-17 삼성디스플레이 주식회사 증착 마스크의 제조 장치
CN202913047U (zh) 2012-09-07 2013-05-01 昆山允升吉光电科技有限公司 一种掩模框架及其对应的蒸镀用掩模组件
KR102000718B1 (ko) * 2012-11-15 2019-07-19 삼성디스플레이 주식회사 박막 증착용 마스크 조립체 및 이의 제조 방법
RU2525359C1 (ru) 2013-04-29 2014-08-10 Виталийс Кожуевс Узел соединенния деталей
KR102218656B1 (ko) * 2013-05-08 2021-02-23 삼성디스플레이 주식회사 마스크 조립체 및 이의 제조 방법
KR102097706B1 (ko) * 2013-06-19 2020-04-07 삼성디스플레이 주식회사 증착용 마스크 조립체
KR102106331B1 (ko) * 2013-07-08 2020-05-06 삼성디스플레이 주식회사 마스크 조립체 및 이의 제조 방법
KR102118641B1 (ko) * 2013-07-30 2020-06-04 삼성디스플레이 주식회사 단위 마스크 및 마스크 조립체
KR102541449B1 (ko) * 2015-12-22 2023-06-09 삼성디스플레이 주식회사 박막 증착용 마스크 어셈블리
KR102505877B1 (ko) * 2016-01-29 2023-03-06 삼성디스플레이 주식회사 마스크 프레임 조립체 및 이를 이용한 디스플레이 장치의 제조방법
KR102524534B1 (ko) * 2016-02-29 2023-04-24 삼성디스플레이 주식회사 증착용 마스크, 표시 장치의 제조 장치 및 표시 장치의 제조 방법
CN205688000U (zh) * 2016-06-29 2016-11-16 鄂尔多斯市源盛光电有限责任公司 一种掩膜板
KR101834194B1 (ko) * 2016-07-13 2018-03-05 주식회사 케이피에스 텐션마스크 프레임 어셈블리의 제조 장치 및 방법
CN106019819A (zh) * 2016-07-22 2016-10-12 京东方科技集团股份有限公司 掩膜板及其制作方法
KR102624714B1 (ko) * 2016-09-12 2024-01-12 삼성디스플레이 주식회사 마스크 및 이를 포함하는 마스크 조립체의 제조방법
KR102640219B1 (ko) * 2016-09-12 2024-02-23 삼성디스플레이 주식회사 분할 마스크
KR102609073B1 (ko) * 2016-11-30 2023-12-05 엘지디스플레이 주식회사 증착용 마스크 및 그 제조방법
CN106367718B (zh) * 2016-12-05 2018-10-30 京东方科技集团股份有限公司 一种掩膜板及其组装方法
CN106702318B (zh) * 2016-12-12 2018-11-23 京东方科技集团股份有限公司 掩膜框架及制造方法和掩膜板
CN106480404B (zh) * 2016-12-28 2019-05-03 京东方科技集团股份有限公司 一种掩膜集成框架及蒸镀装置
CN206706184U (zh) * 2017-05-12 2017-12-05 京东方科技集团股份有限公司 掩模板以及掩模片
TWI649787B (zh) * 2017-07-12 2019-02-01 林義溢 多層式遮罩
KR102373442B1 (ko) * 2017-09-08 2022-03-14 삼성디스플레이 주식회사 박막증착용 마스크와, 이의 제조방법
US11066742B2 (en) * 2017-09-28 2021-07-20 Sharp Kabushiki Kaisha Vapor deposition mask
US20200002801A1 (en) * 2017-09-28 2020-01-02 Sharp Kabushiki Kaisha Vapor deposition mask and manufacturing method for vapor deposition mask
CN107699854B (zh) * 2017-11-10 2019-09-17 京东方科技集团股份有限公司 掩膜组件及其制造方法
CN108004504B (zh) * 2018-01-02 2019-06-14 京东方科技集团股份有限公司 一种掩膜板
CN108611598B (zh) * 2018-07-27 2021-01-22 京东方科技集团股份有限公司 一种框架结构
KR102630638B1 (ko) * 2018-08-29 2024-01-30 삼성디스플레이 주식회사 마스크 조립체, 표시 장치의 제조장치 및 표시 장치의 제조방법
KR102631255B1 (ko) * 2018-10-18 2024-01-31 삼성디스플레이 주식회사 하이브리드형 마스크 스틱과, 이를 적용한 마스크 프레임 어셈블리
KR102568785B1 (ko) * 2018-11-02 2023-08-22 삼성디스플레이 주식회사 유기 발광 표시 장치의 제조 방법 및 마스크 조립체
WO2021087732A1 (zh) * 2019-11-05 2021-05-14 京东方科技集团股份有限公司 掩模装置、掩模板及框架

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120156812A1 (en) * 2010-12-20 2012-06-21 Samsung Mobile Display Co., Ltd. Mask frame assembly, method of manufacturing the same, and method of manufacturing organic light-emitting display device using the mask frame assembly
US20180202034A1 (en) * 2016-06-17 2018-07-19 Boe Technology Group Co., Ltd. Mask plate and assembly method thereof
CN207278637U (zh) * 2017-04-13 2018-04-27 福建农林大学 一种水滴形条板连接结构
CN107399613A (zh) * 2017-08-03 2017-11-28 武汉华星光电技术有限公司 一种掩膜版搬运装置
CN108823527A (zh) * 2018-06-14 2018-11-16 京东方科技集团股份有限公司 掩膜板框架组件和掩膜板模组
CN208532917U (zh) * 2018-08-03 2019-02-22 昆山国显光电有限公司 一种掩模片的支撑装置及掩模板

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US11560616B2 (en) 2023-01-24
US20210363628A1 (en) 2021-11-25
WO2021087732A1 (zh) 2021-05-14
CN113423856B (zh) 2023-04-18

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