CN113387723B - Diamond coating of ceramic cutter and preparation method and application thereof - Google Patents

Diamond coating of ceramic cutter and preparation method and application thereof Download PDF

Info

Publication number
CN113387723B
CN113387723B CN202110610541.6A CN202110610541A CN113387723B CN 113387723 B CN113387723 B CN 113387723B CN 202110610541 A CN202110610541 A CN 202110610541A CN 113387723 B CN113387723 B CN 113387723B
Authority
CN
China
Prior art keywords
ceramic
diamond coating
diamond
femtosecond laser
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110610541.6A
Other languages
Chinese (zh)
Other versions
CN113387723A (en
Inventor
陈汪林
伍卫凯
王成勇
黄勇浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong University of Technology
Original Assignee
Guangdong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong University of Technology filed Critical Guangdong University of Technology
Priority to CN202110610541.6A priority Critical patent/CN113387723B/en
Publication of CN113387723A publication Critical patent/CN113387723A/en
Application granted granted Critical
Publication of CN113387723B publication Critical patent/CN113387723B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/0036—Laser treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments

Abstract

The invention provides a diamond coating of a ceramic cutter, a preparation method and application thereof, wherein the preparation method comprises the following steps: s1, performing femtosecond laser modification treatment on the surface of the ceramic; the power of the femtosecond laser is 0.5-5W, the scanning speed of the femtosecond laser is 200-1000 mm/s, the scanning interval is 5-40 mu m, the wavelength is 1000-1500 nm, the pulse frequency is 100-200 kHz, the pulse width is 25-300 fs, and the scanning frequency of the femtosecond laser is 1-5 times; s2, soaking the ceramic obtained in the step S1 in a suspension formed by mixing nano diamond and absolute ethyl alcohol, and performing ultrasonic oscillation; s3, preparing the diamond coating from the ceramic obtained in the step S2 through vapor deposition, and obtaining the diamond coating of the ceramic cutter. The preparation method can effectively improve the seed crystal rate, nucleation rate and binding force of the nano-diamond, and can greatly improve the service life.

Description

Diamond coating of ceramic cutter and preparation method and application thereof
Technical Field
The invention relates to the technical field of ceramic cutters, in particular to a diamond coating of a ceramic cutter, and a preparation method and application thereof.
Background
With the emphasis on developing advanced manufacturing industries such as aerospace, rail transit, 5G intelligent equipment and the like in China, the application of difficult-to-process materials such as graphite, carbon fiber composite materials, stainless steel, high-strength steel and the like is continuously increased. The high-speed cutting of difficult-to-machine materials has higher and higher requirements on the performance of cutters, and the performance of the cutters directly influences the final surface quality of the machined materials and the service life of the cutters. The diamond coating has low friction coefficient, high hardness, high wear resistance and good heat conductivity, so that the diamond coating can be widely applied to high-speed cutting of difficult-to-machine materials.
The ceramic has high hardness and high thermal stability, is favored in the high-precision machining tool industry in recent years, and is a potential hotspot of future high-performance ceramic tools. At present, Chinese patent (CN 109397549A) discloses a diamond-coated silicon nitride ceramic integral cutter, a preparation method thereof and application of the cutter in graphite. The method causes the problems of poor seeding effect, low nucleation and growth efficiency, poor binding force and the like, and shortens the service life of the crystal.
Therefore, the ceramic tool for improving the crystal rate of the nano-diamond on the surface of the ceramic, improving the nucleation effect and increasing the nucleation density has important research significance and application value.
Disclosure of Invention
The invention provides a preparation method of a diamond coating of a ceramic cutter, aiming at overcoming the defects of short service life caused by low crystal seed rate and poor bonding force of the nano diamond.
Another object of the present invention is to provide the diamond ceramic tool.
Another object of the present invention is to provide an application of the diamond ceramic tool.
In order to achieve the purpose, the invention adopts the technical scheme that:
a preparation method of a diamond coating of a ceramic cutter comprises the following steps:
s1, performing femtosecond laser modification treatment on the surface of the ceramic; the power of the femtosecond laser is 0.5-5W, the scanning speed of the femtosecond laser is 200-1000 mm/s, and the scanning distance is 5-40 mu m; the wavelength is 1000-1500 nm; the pulse frequency is 100-200 kHz; the pulse width is 25-300 fs; the scanning times of the femtosecond laser are 1-5 times;
s2, soaking the ceramic obtained in the step S1 in a suspension formed by mixing nano-diamond and absolute ethyl alcohol, and performing ultrasonic oscillation;
and S3, preparing the diamond coating from the ceramic obtained in the step S2 through vapor deposition to obtain the diamond coating of the ceramic cutter.
The method adopts the femtosecond laser to carry out surface modification on the ceramic matrix, the power of the femtosecond laser is regulated to be 0.5-5W, the scanning speed is 200-1000 mm/s, the scanning interval is 5-40 mu m, the wavelength is 1000-1500 nm, the pulse frequency is 100-200 kHz, the pulse width is 25-300 fs, and the scanning frequency is 1-5 times; a high-density nano/submicron composite porous modified layer can be formed, wherein the depth of the high-density nano/submicron composite porous modified layer is controlled to be 1-3 mu m, and the high-density nano/submicron composite porous modified layer has continuity; the nano-diamond crystal seeds are trapped through the holes in the porous modified layer, the diamond nucleation rate is improved, and the growth speed, the binding force and the fracture toughness of the diamond coating are greatly improved; the service life of the diamond ceramic cutter is prolonged. The laser power is too high, the void density of the porous layer is low, and the seed crystal rate is not enough; the porous layer of the too low material is discontinuous and has a low pore density. Therefore, the laser power is controlled to be 0.5-5W.
When the laser scanning frequency is 1-5 times, the material at the cutting edge of the cutter has better strength, and the cutter is prevented from being easily broken when being cut.
Preferably, in step S1, the scanning distance of the femtosecond laser is 25-35 μm. When the scanning distance is 25-35 mu m, the continuity of the laser modified nano/submicron composite porous modified layer is best.
Preferably, in step S1, the femtosecond laser scanning speed is 300-600 mm/S. The optimal high-density nano/submicron composite porous modified layer for trapping the nano diamond seed crystal can be obtained under the scanning speed parameter, and the efficiency of trapping the nano diamond seed crystal by the high-density nano/submicron composite porous modified layer can be reduced when the scanning speed is too high or too low.
Preferably, the femtosecond laser power is 1W. The laser power is too high, the void density of the porous layer is low, and the seed crystal rate is insufficient; the porous layer of the too low material is discontinuous and has a low pore density.
Preferably, in the deposition process in step S3, hydrogen and methane are used as reaction gases, the temperature of the hot wire is 2100-2500 ℃, the pressure is 1500-2500 Pa, and the deposition time is 10-30 h.
Preferably, in the step S3, the thickness of the diamond coating is 5 to 20 μm.
The coating is less than 5 mu m, is not wear-resistant and is more than 20 mu m, and the coating is too thick and is easy to peel off.
Preferably, the ceramic is a silicon nitride ceramic, a silicon oxide ceramic or an aluminum oxide ceramic.
Preferably, the ceramic having the nano/sub-micron composite porous modified layer is ultrasonically cleaned by ethanol and acetone solution sequentially before step S2.
A diamond ceramic cutting tool comprises a diamond coating prepared by the preparation method of the diamond coating of the ceramic cutting tool.
The service life of the diamond ceramic cutter is longer.
The diamond ceramic cutter is applied to the field of brittle material processing.
The brittle material is a common brittle material such as graphite or carbon fiber.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the femtosecond laser is adopted to carry out surface modification on the ceramic matrix, a high-density nano/submicron composite porous modified layer is formed by regulating the power of the femtosecond laser to be 0.5-5W and the energy value of the femtosecond laser to be 3-6 muJ, and nano diamond seed crystals are imprisoned through holes in the porous modified layer, so that the diamond nucleation rate is improved, and the growth speed, the binding force and the fracture toughness of the diamond coating are greatly improved; the service life of the diamond ceramic cutter is prolonged.
Drawings
FIG. 1 is a surface topography of a silicon nitride substrate after being treated by the femtosecond laser surface modification technique according to the present invention;
FIG. 2 is a graph of nucleation of a CVD silicon nitride ceramic based diamond coating prepared in example 1;
FIG. 3 is a surface topography of a CVD silicon nitride ceramic based diamond coating prepared in example 1;
FIG. 4 is a diagram of a CVD silicon nitride ceramic-based diamond coated milling cutter prepared in example 1;
FIG. 5 is a graph of nucleation of a CVD zirconia ceramic-based diamond coating prepared in example 16;
FIG. 6 is a surface topography of the CVD zirconia ceramic-based diamond coating prepared in example 16;
FIG. 7 is a graph illustrating nucleation of a CVD alumina ceramic based diamond coating prepared in example 15;
FIG. 8 is a surface topography of the CVD alumina ceramic based diamond coating prepared in example 15;
fig. 9 is a surface topography of nucleation of the silicon nitride based diamond coating in comparative example 1.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, but the embodiments of the present invention are not limited thereto.
The reagents, methods and equipment adopted by the invention are conventional in the technical field if no special description is provided.
Example 1
Embodiment 1 provides a method for preparing a diamond coating of a ceramic cutting tool, comprising the steps of:
s1, performing femtosecond laser modification treatment on the surface of the ceramic; the power of the femtosecond laser is 1W, the scanning speed of the femtosecond laser is 400mm/s, and the scanning interval is 30 mu m; the wavelength is 1030 nm; the pulse frequency is 100 kHz; the pulse width is 290 fs; the scanning times of the femtosecond laser are 1 time;
s2, ultrasonic cleaning is carried out on the ceramic matrix subjected to the femtosecond laser surface modification treatment in an acetone solution and an ethanol solution for 15min in sequence, and then the matrix is placed in an ethanol suspension of nano diamond powder for ultrasonic crystal seeding for 30 min;
s3, putting the ceramic obtained in the step S2 into a hot wire CVD chemical vapor deposition coating furnace to prepare a diamond coating, wherein hydrogen (H) is used in the deposition process 2 ) Methane (CH) 4 ) The temperature of the hot wire is 2400 ℃, the pressure is 2KPa, and the deposition rate is 0.4 μm/h. And after deposition for 10 hours, obtaining a diamond film with the thickness of 4 mu m, uniformity and continuity and excellent film-substrate bonding performance on the silicon nitride surface, and obtaining the diamond ceramic cutter.
Examples 2 to 14
Examples 2-14 provide a series of diamond coatings for ceramic cutting tools prepared in the same manner as in example 1, except as set forth in table 1.
TABLE 1 examples 2 to 14
Figure BDA0003095680910000041
Example 15
Example 15 provides a diamond ceramic cutting tool made in the same manner as in example 1, except that alumina ceramic was used instead of silicon nitride ceramic.
Example 16
Example 16 provides a diamond ceramic tool made in the same manner as in example 1, except that a zirconia ceramic was used instead of a silicon nitride ceramic.
Comparative example 1
The preparation method is the same as that of example 1, and is different from that of example 1 in that the surface roughening treatment is carried out on the silicon nitride ceramic matrix by adopting traditional mechanical grinding instead of femtosecond laser.
Comparative examples 2 to 7
Comparative examples 2 to 7 provide a diamond ceramic cutting tool, which is prepared by the same method as example 1, except for the differences shown in table 2.
TABLE 2 comparative examples 2 to 7
Comparative example 2 Comparative example 3 Comparative example 4 Comparative example 5 Comparative example 6 Comparative example 7
power/W 0.3 7 1 1 1 1
Scanning speed/mm/s 400 400 100 1200 400 400
Scanning pitch/μm 30 30 30 30 1 45
Performance test
The above examples and comparative examples all passed the following performance tests:
(1) nucleation rate: observing the percentage of the area of the diamond in the total area by adopting SEM; the higher the area percentage is, the faster the nucleation rate is, and the good seeding effect is achieved.
(2) Service life: the cutting material is graphite, the cutting speed is 180m/min, the cutting depth is 0.2mm, the cutting width is 2mm, the feed rate is 2292mm/min, and the longer the cutting length is, the longer the service life is.
TABLE 3 data for examples and comparative examples
Figure BDA0003095680910000051
Figure BDA0003095680910000061
From examples 1 to 6, when the power of the femtosecond laser is 1W, the nucleation rate is high, and the service life is long;
from the examples 1 and 7-10, the scanning speed is 300-600 mm/s, and the effect is good;
see examples 1 and 11-14. The best effect is achieved when the scanning distance is 25-35 mu m.
As shown in FIG. 1, the surface topography of the silicon nitride substrate after the femtosecond laser surface modification technique is shown in FIG. 1, and the surface of the silicon nitride substrate is uniformly roughened. Measuring the surface roughness (Ra) of the pretreated silicon nitride substrate by adopting a white light interferometer, wherein the total measurement range is 15mm multiplied by 15mm, the measurement range of each time is 0.5mm multiplied by 0.5mm, the roughness (Ra) of each time is 0.175 +/-0.005 mu m, and the controllability of the femtosecond laser surface modification technology is realized so as to avoid damaging the toughness of the silicon nitride substrate; the femtosecond laser surface modification technology provided by the invention is adopted to process the surface of the silicon nitride substrate to form a high-density nano/submicron composite porous layer, thereby improving the nano-crystalline rate, strengthening the nucleation effect, promoting the growth of a diamond film, increasing the nucleation density and improving the film-substrate bonding performance.
From fig. 2 and 9, fig. 2 is a graph of nucleation surface topography of a silicon nitride-based diamond coating processed by a femtosecond laser surface modification technique; compared with the nucleation surface topography of the silicon nitride-based diamond coating in the comparative example 1, the nucleation rate of the diamond film obtained by the femtosecond laser treatment is obviously improved.
Referring to fig. 3, fig. 3 is a surface topography of the silicon nitride based diamond coating prepared in example 1. The diamond film is evenly and continuously attached to the surface of the silicon nitride substrate, and the lattice orientation of the surface of the diamond film is mainly { 111 }.
Fig. 5 and 6 are a nucleation and topography of the diamond coating prepared in example 16, which shows that it works as well as the silicon nitride ceramic matrix.
FIGS. 7 and 8 are a nucleation and topography of the diamond coating prepared in example 15, which shows that the effect is as good as that of the silicon nitride ceramic substrate.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. It will be apparent to those skilled in the art that other variations and modifications can be made on the basis of the above description. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (9)

1. A preparation method of a diamond coating of a ceramic cutter is characterized by comprising the following steps:
s1, performing femtosecond laser modification treatment on the surface of the ceramic; the power of the femtosecond laser is 0.5-5W, the scanning speed of the femtosecond laser is 200-1000 mm/s, the scanning interval is 25-35 mu m, the wavelength is 1000-1500 nm, the pulse frequency is 100-200 kHz, the pulse width is 25-300 fs, and the scanning frequency of the femtosecond laser is 1-5 times;
s2, soaking the ceramic obtained in the step S1 in a suspension formed by mixing nano diamond and absolute ethyl alcohol, and performing ultrasonic oscillation;
s3, preparing the diamond coating from the ceramic obtained in the step S2 through vapor deposition, and obtaining the diamond coating of the ceramic cutter.
2. The method for preparing a diamond coating layer of a ceramic cutting tool according to claim 1, wherein the femtosecond laser power is 1W.
3. The method for preparing a diamond coating layer of a ceramic cutting tool according to claim 1, wherein the scanning speed of the femtosecond laser is 300 to 600mm/S in step S1.
4. The method for preparing a diamond coating of a ceramic cutting tool according to claim 1, wherein the deposition process in step S3 uses hydrogen and methane as reaction gases, the temperature of the hot wire is 2100-2500 ℃, the pressure is 1500-2500 Pa, and the deposition time is 10-30 h.
5. The method for preparing a diamond coating layer of a ceramic cutting tool according to claim 1, wherein the diamond coating layer has a thickness of 5 to 20 μm in step S3.
6. The method for preparing a diamond coating layer of a ceramic cutting tool according to claim 1, wherein the ceramic is a silicon nitride ceramic, a silicon oxide ceramic or an aluminum oxide ceramic.
7. The method for preparing a diamond coating of a ceramic cutting tool according to claim 1, wherein the ceramic of the nano/sub-micron composite porous modified layer is subjected to ultrasonic cleaning with ethanol and acetone solution in sequence before step S2.
8. A diamond ceramic cutting tool, characterized by comprising a diamond coating layer produced by the method for producing a diamond coating layer of the ceramic cutting tool according to any one of claims 1 to 7.
9. Use of a diamond ceramic tool according to claim 8 in the field of machining of brittle materials.
CN202110610541.6A 2021-06-01 2021-06-01 Diamond coating of ceramic cutter and preparation method and application thereof Active CN113387723B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110610541.6A CN113387723B (en) 2021-06-01 2021-06-01 Diamond coating of ceramic cutter and preparation method and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110610541.6A CN113387723B (en) 2021-06-01 2021-06-01 Diamond coating of ceramic cutter and preparation method and application thereof

Publications (2)

Publication Number Publication Date
CN113387723A CN113387723A (en) 2021-09-14
CN113387723B true CN113387723B (en) 2022-08-19

Family

ID=77619819

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110610541.6A Active CN113387723B (en) 2021-06-01 2021-06-01 Diamond coating of ceramic cutter and preparation method and application thereof

Country Status (1)

Country Link
CN (1) CN113387723B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114988917B (en) * 2022-05-05 2023-05-23 滁州用朴新材料科技有限公司 Nano composite high-hardness ceramic cutter material and preparation method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103146892B (en) * 2013-03-07 2014-04-09 江苏大学 Femtosecond laser surface pretreatment method for improving bonding state of layer base or film base
CN107779858B (en) * 2017-10-25 2020-04-17 山东大学 Multi-layer soft coating nano-texture cutter based on electro-jet deposition and preparation method thereof
CN109397549B (en) * 2018-09-26 2020-08-28 广东工业大学 Diamond-coated silicon nitride ceramic integral cutter, preparation method thereof and application of cutter in graphite
CN111299869A (en) * 2019-11-26 2020-06-19 湖北工业大学 Gradient hydrophilic cutting fluid Al processed by femtosecond laser2O3Method for ceramic cutting tool

Also Published As

Publication number Publication date
CN113387723A (en) 2021-09-14

Similar Documents

Publication Publication Date Title
CA2060823C (en) Diamond-or diamond-like carbon-coated hard materials
CN102211218B (en) Diamond coated cutter and application thereof in processing of fiber composite material
JP7050337B2 (en) High Adhesion Boron Dope Inclined Diamond Layer in WC-Co Cutting Tools
JP5124790B2 (en) Diamond coated cutting tool
CN108385085B (en) Low-stress CVD diamond composite coating and preparation method thereof
CN109397549B (en) Diamond-coated silicon nitride ceramic integral cutter, preparation method thereof and application of cutter in graphite
CN106544641B (en) Prepare the preprocess method of hard alloy substrate diamond coatings
Almeida et al. Nanocrystalline CVD diamond coatings for drilling of WC-Co parts
CN108060407A (en) A kind of preparation method of micro-nano MULTILAYER COMPOSITE diamond thin
CN113387723B (en) Diamond coating of ceramic cutter and preparation method and application thereof
JPWO2018174139A1 (en) Diamond coated cemented carbide cutting tool
CN104053517A (en) Diamond-coated tool
Shen et al. Study on fabrication and cutting performance of high quality diamond coated PCB milling tools with complicated geometries
CN111647875B (en) Method for preparing high-finish-degree complex-shape ultra-nano diamond coating cutter in batches
CN101318839B (en) Silicon carbide ceramic and method for manufacturing composite drawing mould of diamond
Song et al. Fabrication and evaluation of diamond thick film-Si3N4 brazed cutting tool by microwave plasma chemical vapor deposition method
US5328761A (en) Diamond-coated hard material, throwaway insert and a process for the production thereof
CN110983293A (en) Hard alloy part with diamond coating, preparation method and application thereof
KR20000065840A (en) Diamond coated cutting tools and manufacturing method thereof
Jackson et al. Manufacture of diamond-coated cutting tools for micromachining applications
JP2011200987A (en) Diamond-coated cutting tool
CN111910168B (en) CVD diamond thick film-ceramic composite sheet brazing cutter and preparation method thereof
JP2022087846A (en) Tantalum carbide coated carbon material and producing method thereof
Peng et al. Characterization and adhesion strength of diamond films deposited on silicon nitride inserts by dc plasma jet chemical vapour deposition
JP6040698B2 (en) Diamond-coated cemented carbide drill

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant