CN113358247B - Flexible sensor for simultaneously detecting pressure-strain bimodal signals and preparation method - Google Patents
Flexible sensor for simultaneously detecting pressure-strain bimodal signals and preparation method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a flexible sensor for simultaneously detecting pressure-strain bimodal signals and a preparation method thereof. The lower electrode plate and the upper electrode plate are made of low-dimensional nano materials, and when the device is prepared, the low-dimensional nano materials of the electrode plates downwards encapsulate the upper surface of the protective layer to be diffused to form a first diffusion layer, and the low-dimensional nano materials of the upper electrode plate are diffused to the upper surface of the porous dielectric layer to be formed into a second diffusion layer; the lower electrode plate and the upper electrode plate are used as electrode plate parts of the capacitor structure for sensing pressure signals, and are used as strain gauge structures for sensing tensile signals. The sensor has simple preparation method, and the two ends of the low-dimensional nano material are embedded into the upper and lower elastic bodies, so that the upper and lower layers are effectively connected without additional assembly and adhesion in the later period.
Description
Technical Field
The invention relates to a flexible sensor, in particular to a pressure-strain dual-mode flexible sensor based on a low-dimensional nanomaterial and a preparation method thereof.
Background
Wearable electronics have received great attention for their great potential in human motion monitoring, artificial intelligence devices and bioelectronics. In recent years, with the development of low-dimensional nanomaterials such as metal nanowires, carbon nanotubes, graphene, carbon black, and MXene, great progress has been made in flexible sensors having high sensitivity or high stretchability.
The sensing mechanism of the flexible strain or pressure sensor is based on the fact that the flexible substrate of the sensor is subjected to stretching/compression deformation under the action of stretching/pressure, the size of the sensitive layer structure attached to the flexible substrate is deformed along with the flexible substrate, and further the fact that an electrical output signal of the sensitive layer structure changes along with the strain is achieved, and the change quantity of the electrical output signal is related to the size of the deformation. However, most reported wearable sensor systems are typically designed for single-mode measurement, i.e. only one external parameter can be detected, and multi-mode (multi-parameter) excitation state discrimination from human body motion cannot be achieved. A few flexible sensors with multi-modal monitoring are typically based on a single sensing mechanism. For example, the sensor responds to tangential tension and normal compression with opposite resistive responses. Normal pressure will result in a decrease in resistance and tangential tension will result in an increase in resistance. By correlating the shape of the resistive time curve with a given stimulus, stimuli such as bending, stretching, and compression can be distinguished. However, such sensors do not provide a good resolution of the excitation signal when two different excitation signals are simultaneously present, such as tangential pull and normal pressure. Therefore, how to detect the motion states of different parts of the human body during the motion of the human body and complete the feature analysis and the health monitoring of the motion states of different parts is a research difficulty.
Disclosure of Invention
The invention aims to: aiming at the prior art, a flexible sensor for simultaneously detecting pressure-strain bimodal signals is provided, and the problem of decoupling strain and pressure signals at different parts of a human body is solved; meanwhile, the preparation method of the material and the structure of the sensor is simple and easy to implement.
The technical scheme is as follows: a flexible sensor for simultaneously detecting pressure-strain bimodal signals comprises a lower packaging protection layer, a lower electrode plate, a first metal lead layer, a porous dielectric layer, a second metal lead layer, an upper electrode plate and an upper packaging protection layer which are sequentially arranged from bottom to top; the lower electrode plate and the upper electrode plate are made of low-dimensional nano materials, when the device is prepared, the low-dimensional nano materials of the lower electrode plate diffuse to the upper surface of the lower packaging protective layer to form a first diffusion layer, the low-dimensional nano materials of the upper electrode plate diffuse to the upper surface of the porous dielectric layer to form a second diffusion layer, and the low-dimensional nano materials form conductive channels inside the first diffusion layer and the second diffusion layer; the lower electrode plate and the upper electrode plate are used as electrode plate parts of the capacitor structure for sensing pressure signals, and are used as strain gauge structures for sensing stretching signals.
Further, the materials of the lower packaging protection layer and the upper packaging protection layer are insulating elastic polymers.
Further, the porous dielectric layer is made of an organic flexible material with high dielectric constant.
Further, the low-dimensional nanomaterial is a carbon nanotube or a silver nanowire; in the lower electrode plate, the front end of the carbon nano tube or the silver nano wire is embedded into the lower packaging protective layer, the tail end of part of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer, and the tail end of part of the carbon nano tube or the silver nano wire which is not embedded into the porous dielectric layer forms a conductive path on a plane; in the upper electrode plate, the front end of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer, the tail end of part of the carbon nano tube or the silver nano wire is embedded into the upper packaging protection layer, and the tail end of part of the carbon nano tube or the silver nano wire which is not embedded into the upper packaging protection layer forms a conductive path on a plane.
Further, the lower packaging protection layer is prepared by adopting a pouring method, and the upper surface of the semi-solidified lower packaging protection layer is coated with a low-dimensional nano material and then is heated and cured to form the lower electrode plate and the first diffusion layer.
Further, the porous dielectric layer is prepared by adopting a pouring method, and the upper surface of the semi-solidified porous dielectric layer is coated with a low-dimensional nano material and then is heated and solidified to form the upper electrode plate and the second diffusion layer.
A preparation method of a flexible sensor for simultaneously detecting pressure-strain bimodal signals comprises the following steps:
step 1: uniformly stirring the insulating elastic polymer raw material, pouring the stirred material into a template, and preparing a lower packaging protective layer; after the lower packaging protection layer is semi-cured, brushing a low-dimensional nano material on the upper surface of the lower packaging protection layer, diffusing the low-dimensional nano material to the upper surface of the lower packaging protection layer to form a first diffusion layer, and then heating and curing by adopting an oven to form a lower electrode plate;
step 2: sticking metal lead layers at two ends of the upper surface of the lower electrode plate for leading out electrode wires;
step 3: uniformly arranging fine copper wires on the lower electrode plate and the metal lead layer, pouring an insulating elastic polymer as a porous dielectric layer, pasting second metal lead layers on two ends of the upper surface of the semi-cured porous dielectric layer, brushing low-dimensional nano materials, diffusing the low-dimensional nano materials to the upper surface of the porous dielectric layer to form a second diffusion layer, and heating and curing by adopting an oven to form an upper electrode plate;
step 4: pouring an insulating elastic polymer on the surface of the upper electrode plate, and forming an upper packaging protective layer after heating and curing;
step 5: and removing the template, and drawing away the fine copper wires serving as the die to form pores, thereby completing the preparation of the device.
The beneficial effects are that: compared with the prior art, the invention has the following beneficial effects: first, the bimodal integrated flexible sensor adopts two different sensing mechanisms of capacitance type and resistance type, and is respectively used for sensing the excitation of pressure and tensile strain and has no mutual influence with each other, so as to meet the simultaneous detection of strain and pressure signals, and the decoupling of pressure stimulation and tensile stimulation at joints in human body movement can be realized. The sensor can perform artificial intelligent algorithm identification according to the resistance and capacitance signals simultaneously output by the motion characteristics of different parts of the human body, so as to realize judgment and detection of the motion of the different parts of the human body.
Secondly, propose the integrated pouring technology and realize the sensor preparation, not only simple technological process is brushed low dimension nano material in the time of semi-solidification moreover, can realize making its both ends imbed the elastomer of upper and lower side, reach upper and lower floor and form effectual joining and form integrated sensor structure for the mechanical properties of sensor obtains guaranteeing, can improve the repeatability and the reliability height of sensor need not the extra equipment bonding of later stage. Thirdly, thin copper wires are adopted as a porous structure with controllable size formed by drawing away after pouring of a die, so that the sensitivity of the capacitive sensor to pressure is improved, the influence of tensile strain on capacitance change is reduced, the hysteresis characteristic of the sensor is optimized, and the integral pouring flow is not influenced. In the prior art, a porous medium layer is prepared in a foaming mode, the size of pores is uncontrollable, and an adhesive is required to be assembled with an upper electrode plate and a lower electrode plate, so that the service life of a device is influenced.
In addition, the CDC chip and the ADC chip are adopted to respectively collect the capacitance and the resistance of the designed bimodal sensor and convert the capacitance and the resistance into digital signals. The acquired data are transmitted to the MCU for operation processing and are transmitted to the receiving end through the Bluetooth or 5G module, the MCU of the receiving end processes the received data, and the corresponding servo motor is controlled, so that a remote control scheme can be realized.
Drawings
FIG. 1 is a schematic diagram of a flexible sensor according to the present invention;
FIG. 2 is a schematic cross-sectional view of a flexible sensor manufacturing process according to the present invention;
FIG. 3 is a schematic cross-sectional view of a flexible sensor manufacturing process step II of the present invention;
FIG. 4 is an SEM image of one end of a low-dimensional nanomaterial embedded in an elastomer in a flexible sensor in accordance with the present invention;
FIG. 5 is a schematic cross-sectional view of a flexible sensor manufacturing method according to the present invention, in a step three;
FIG. 6 is a schematic cross-sectional view of a flexible sensor manufacturing method according to the present invention;
FIG. 7 is a schematic cross-sectional view of a flexible sensor manufacturing method step five of the present invention;
FIG. 8 is a flow chart of the preparation of a structural cross-sectional view of step six of the preparation method of the flexible sensor of the present invention;
FIG. 9 is a schematic cross-sectional view of a process for preparing a flexible sensor according to the present invention;
fig. 10 is a diagram of a remote control scheme framework in an example of the invention.
Detailed Description
The invention is further explained below with reference to the drawings.
As shown in fig. 1, a flexible sensor for simultaneously detecting pressure-strain bimodal signals comprises a lower packaging protection layer 1, a lower electrode plate 2, a first metal lead layer 3, a porous dielectric layer 4, a second metal lead layer 6, an upper electrode plate 7 and an upper packaging protection layer 8 which are sequentially arranged from bottom to top. The materials of the lower electrode plate 2 and the upper electrode plate 7 are low-dimensional nano materials, when the device is prepared, the low-dimensional nano materials of the lower electrode plate 2 downwards encapsulate the upper surface of the protective layer 1 to form a first diffusion layer, the low-dimensional nano materials of the upper electrode plate 7 diffuse to the upper surface of the porous dielectric layer 4 to form a second diffusion layer, and the low-dimensional nano materials form conductive channels inside the first diffusion layer and the second diffusion layer. The lower electrode plate 2 and the upper electrode plate 7 serve as plate portions of the capacitor structure for sensing the pressure signal, and serve as strain gauge structures for sensing the tensile signal.
Wherein, the materials of the lower packaging protection layer 1 and the upper packaging protection layer 8 are insulating elastic polymers; the porous dielectric layer 4 is made of an organic flexible material with high dielectric constant. The low-dimensional nano material is a carbon nano tube or a silver nano wire; in the lower electrode plate 2, the front end of the carbon nano tube or the silver nano wire is embedded in the lower packaging protective layer 1, the tail end of part of the carbon nano tube or the silver nano wire is embedded in the porous dielectric layer 4, and the tail ends of part of the carbon nano tube or the silver nano wire which are not embedded in the porous dielectric layer 4 are overlapped in a plane to form a conductive path, as shown in fig. 4; in the upper electrode plate 7, the front end of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer 4, the tail end of part of the carbon nano tube or the silver nano wire is embedded into the upper packaging protection layer 8, and the tail end of part of the carbon nano tube or the silver nano wire which is not embedded into the upper packaging protection layer 8 forms a conductive path on a plane.
The preparation method of the flexible sensor for simultaneously detecting the pressure-strain bimodal signals comprises the following steps:
step 1: the insulating elastic polymer raw material is stirred uniformly and then poured into a template to prepare the lower packaging protection layer 1, as shown in fig. 2.
Step 2: after the lower packaging protection layer 1 is semi-cured, brushing a low-dimensional nano material on the upper surface of the lower packaging protection layer 1, diffusing the low-dimensional nano material to the upper surface of the lower packaging protection layer 1 to form a first diffusion layer, and then heating and curing by adopting an oven to form a lower electrode plate 2, as shown in fig. 3.
Step 3: metal lead layers 3 are adhered to both ends of the upper surface of the lower electrode plate 2 for drawing out electrode wires, thereby forming a resistive strain sensor, as shown in fig. 5.
Step 4: fine copper wires 5 are uniformly arranged on the lower electrode plate 2 and the metal lead layer 3 and insulating elastic polymer is poured as a porous dielectric layer 4, as shown in fig. 6.
Step 5: second metal lead layers 6 are attached to both ends of the upper surface of the semi-solidified porous dielectric layer 4 as shown in fig. 7.
Step 6: then brushing low-dimensional nano material on the upper surface, diffusing the low-dimensional nano material to the upper surface of the porous dielectric layer 4 to form a second diffusion layer, and then heating and curing by adopting an oven to form an upper electrode plate 7, as shown in fig. 8.
Step 7: insulating elastic polymer is poured on the surface of the upper electrode plate 7, and an upper packaging protection layer 8 is formed after heating and curing, as shown in fig. 9.
Step 8: and removing the template, and drawing away the fine copper wires 5 serving as the die to form pores, thereby completing the preparation of the device.
When the flexible sensor works and is stimulated by tensile strain, the upper electrode plate 7 and the lower electrode plate 2 based on the low-dimensional nanomaterial and the insulating elastic polymer composite conductive layer can be used for sensing the tensile strain, and electric signals of the resistor are respectively led out from the metal lead layers 6 and 3. The low-dimensional nanomaterial forms conductive channels on the surface and inside of the insulating elastic polymer. Under small tensile strain, the low-dimensional nanomaterial network on the surface of the insulating elastic polymer plays a main role in sensing, the low-dimensional nanomaterial overlapped on the surface is separated along with the action of stretching, the conductive path is reduced, and the resistance is changed. Under large tensile strain, the low-dimensional nanomaterial on the surface is pulled away, the low-dimensional nanomaterial network inside the insulating elastic polymer plays a main role in sensing, and the large tensile strain causes the internal low-dimensional nanomaterial channel to be broken, so that the resistance is changed. When the pressure stimulus is applied, the porous dielectric layer 4 based on elastic polymer, the upper electrode plate 7 and the lower electrode plate 2 form a parallel plate capacitor, the electrode distance of the parallel plate capacitor changes under the action of the pressure, and the capacitance value changes accordingly, so that the pressure is sensed.
The dual-mode flexible sensor structure integrates two sensing structures of resistance type and capacitance type, and realizes the simultaneous output of resistance and capacitance signals. The resistance signal change is mainly affected by strain, and the capacitance signal change is mainly affected by pressure, so that the simultaneous detection of strain and pressure signals is satisfied. And then carrying out algorithm analysis according to the motion characteristics of different parts of the human body to realize judgment and detection of the motion of the different parts of the human body. Taking the movement of a human joint as an example, the flexible sensor is conformally attached to the skin of the human joint, and when the joint is bent, the flexible sensor is not only subjected to tensile strain caused by the bending of the joint, but also extruded by the protrusion of the joint bone. Under the same bending angle, the different joints can generate different pressures due to different degrees of bone bulge, so that the types of the motion joints can be identified. For the same joint, different bending angles can generate different degrees of tensile strain, so that the bending angle is monitored. In addition, remote communication monitoring can be performed through 5G communication, so that action control of the remote manipulator is realized.
FIG. 10 shows a remote control scheme of the pressure-strain bimodal flexible sensor, wherein a CDC chip and an ADC chip are adopted to respectively collect capacitance and resistance data of the designed bimodal sensor. The acquired data are transmitted to the MCU for operation processing and are transmitted to a receiving end, such as an exoskeleton or a machine, through the Bluetooth or 5G module, the MCU of the receiving end processes the received data, and the corresponding servo motor is controlled, so that a remote control scheme is realized.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (5)
1. The flexible sensor for simultaneously detecting the pressure-strain bimodal signals is characterized by comprising a lower packaging protection layer (1), a lower electrode plate (2), a first metal lead layer (3), a porous dielectric layer (4), a second metal lead layer (6), an upper electrode plate (7) and an upper packaging protection layer (8) which are sequentially arranged from bottom to top; the lower electrode plate (2) and the upper electrode plate (7) are made of low-dimensional nano materials, when the device is manufactured, the low-dimensional nano materials of the lower electrode plate (2) diffuse to the upper surface of the lower packaging protection layer (1) to form a first diffusion layer, the low-dimensional nano materials of the upper electrode plate (7) diffuse to the upper surface of the porous dielectric layer (4) to form a second diffusion layer, and the low-dimensional nano materials form conductive channels inside the first diffusion layer and the second diffusion layer; the lower electrode plate (2) and the upper electrode plate (7) are used as electrode plate parts of a capacitor structure for sensing pressure signals, and are used as strain gauge structures for sensing stretching signals;
the materials of the lower packaging protection layer (1) and the upper packaging protection layer (8) are insulating elastic polymers; the low-dimensional nano material is a carbon nano tube or a silver nano wire; in the lower electrode plate (2), the front end of the carbon nano tube or the silver nano wire is embedded into the lower packaging protective layer (1), the tail end of part of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer (4), and the tail end of part of the carbon nano tube or the silver nano wire which is not embedded into the porous dielectric layer (4) forms a conductive path on a plane; in the upper electrode plate (7), the front ends of the carbon nanotubes or silver nanowires are embedded into the porous dielectric layer (4), the tail ends of part of the carbon nanotubes or silver nanowires are embedded into the upper packaging protective layer (8), and the tail ends of part of the carbon nanotubes or silver nanowires, which are not embedded into the upper packaging protective layer (8), form a conductive path on a plane.
2. A flexible sensor for simultaneous detection of pressure-strain bimodal signals according to claim 1, wherein said porous dielectric layer (4) is made of an organic flexible material with a high dielectric constant.
3. The flexible sensor for simultaneous detection of pressure-strain bimodal signals according to claim 1, wherein the lower encapsulation protection layer (1) is prepared by a casting method, and the upper surface of the semi-solidified lower encapsulation protection layer (1) is coated with a low-dimensional nanomaterial and then is heated and cured to form the lower electrode plate (2) and the first diffusion layer.
4. The flexible sensor for simultaneous detection of pressure-strain bimodal signals according to claim 1, wherein the porous dielectric layer (4) is prepared by casting, and the upper surface of the semi-solidified porous dielectric layer (4) is coated with a low-dimensional nanomaterial and then cured by heating to form the upper electrode plate (7) and the second diffusion layer.
5. The method for manufacturing a flexible sensor for simultaneous detection of pressure-strain bimodal signals according to any one of claims 1 to 4, comprising the steps of:
step 1: uniformly stirring the insulating elastic polymer raw material, pouring the stirred material into a template, and preparing a lower packaging protective layer (1); after the lower packaging protection layer (1) is semi-cured, brushing a low-dimensional nano material on the upper surface of the lower packaging protection layer (1), diffusing the low-dimensional nano material to the upper surface of the lower packaging protection layer (1) to form a first diffusion layer, and then heating and curing by adopting an oven to form a lower electrode plate (2);
step 2: metal lead layers (3) are stuck at two ends of the upper surface of the lower electrode plate (2) and are used for leading out electrode wires;
step 3: uniformly arranging fine copper wires (5) on a lower electrode plate (2) and a metal lead layer (3), pouring an insulating elastic polymer as a porous dielectric layer (4), pasting a second metal lead layer (6) on two ends of the upper surface of the semi-solidified porous dielectric layer (4), brushing a low-dimensional nano material, diffusing the low-dimensional nano material to the upper surface of the porous dielectric layer (4) to form a second diffusion layer, and heating and solidifying by adopting an oven to form an upper electrode plate (7);
step 4: pouring an insulating elastic polymer on the surface of the upper electrode plate (7), and forming an upper packaging protective layer (8) after heating and curing;
step 5: and removing the template, and drawing away the fine copper wires (5) serving as the die to form pores, thereby completing the preparation of the device.
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| US10067007B2 (en) * | 2015-09-02 | 2018-09-04 | Oculus Vr, Llc | Resistive-capacitive deformation sensor |
| CN106289594A (en) * | 2016-11-02 | 2017-01-04 | 吉林大学 | Three-dimension deformation-quantity and the sensor array of three-dimensional pressure high-precise synchronization measurement can be realized |
| CN107478360B (en) * | 2017-08-18 | 2020-05-19 | 北京纳米能源与***研究所 | Capacitive flexible pressure sensor and preparation method thereof |
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