CN113355628A - Method for enhancing bonding strength between base tube and target coating - Google Patents
Method for enhancing bonding strength between base tube and target coating Download PDFInfo
- Publication number
- CN113355628A CN113355628A CN202110564951.1A CN202110564951A CN113355628A CN 113355628 A CN113355628 A CN 113355628A CN 202110564951 A CN202110564951 A CN 202110564951A CN 113355628 A CN113355628 A CN 113355628A
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- Prior art keywords
- pipe
- nickel
- enhancing
- base pipe
- stainless steel
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 230000002708 enhancing effect Effects 0.000 title claims abstract description 14
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 28
- 238000005488 sandblasting Methods 0.000 claims abstract description 27
- 238000004544 sputter deposition Methods 0.000 claims abstract description 25
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 16
- 239000010959 steel Substances 0.000 claims abstract description 16
- 239000010935 stainless steel Substances 0.000 claims abstract description 8
- 239000004576 sand Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 12
- 239000007921 spray Substances 0.000 claims description 10
- 238000005507 spraying Methods 0.000 claims description 6
- 239000002390 adhesive tape Substances 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 239000008188 pellet Substances 0.000 claims description 4
- 241000357293 Leptobrama muelleri Species 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 abstract description 17
- 230000000052 comparative effect Effects 0.000 description 8
- 239000013077 target material Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 239000006187 pill Substances 0.000 description 4
- 238000005422 blasting Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 229910000484 niobium oxide Inorganic materials 0.000 description 3
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/14—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying for coating elongate material
- C23C4/16—Wires; Tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Coating By Spraying Or Casting (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a method for enhancing the bonding strength between a base pipe and a target coating, which comprises the steps of firstly carrying out sand blasting on the base pipe of a stainless steel pipe in a rotary sputtering mode, wherein steel sand adopted in the sand blasting is formed by mixing SUS304CW1.0 stainless steel wire cut shots and SUS304s1.0 stainless steel wire round shots according to a ratio of 1:2, the sand blasting pressure is 0.6-0.7Mpa, thus the sand blasting efficiency is increased, and the surface roughness of the base pipe is improved, then uniformly sputtering melted nickel-aluminum wires to the surface of a back pipe in a rotary sputtering mode, wherein the wire diameter of the nickel-aluminum wires is phi 2 +/-0.1 mm, the current is 215 +/-15A, and the wire feeding speed is 5-5.5m/min, thus the base pipe is bottomed by sputtering, and the surface roughness of the base pipe is further improved.
Description
Technical Field
The invention relates to the field of targets, in particular to a method for enhancing the bonding strength between a base tube and a target coating.
Background
The target material is one of main materials for preparing the film, is mainly applied to integrated circuits, flat panel displays, solar cells, recording media, intelligent glass and the like, and has high requirements on material purity and stability.
The base pipe of the target material needs to be sprayed with a sputtering coating, the insufficient bonding strength of the coating is one of the main factors of cracking and shelling of the coating of the target material, and a better bonding strength can greatly reduce the cracking and shelling abnormality of the coating of the target material (particularly a niobium oxide target material, because the technical difficulty of the niobium oxide target material is higher than that of other target materials), so that the improvement of the surface roughness of the base pipe is an important item before the target material is sprayed.
The prior art patent CN105603354A discloses a method for preparing a metal zinc alloy target by an electric arc spraying process, which comprises the steps of selecting a steel tube with a proper size as an inner lining tube of a rotary target, machining, cleaning the surface of a steel tube substrate by acetone, removing surface dirt and an oxide layer, and performing surface sand blasting treatment by using a special sand blasting machine; the air pressure in the sand blasting process is 0.4MPa, and the sand blasting distance is 100-; setting certain voltage and current according to the spraying material, and keeping the electric arc to stably burn under the action of a power supply; behind the arc generating point, the high-speed airflow accelerated by the atomizing nozzle separates the molten droplets from the wire and atomizes the molten droplets into particles, and the particles are sprayed to the surface of the pretreated base material under the action of the high-speed airflow to form a coating. Although the patent discloses blasting first and then sputtering, the strength of the bond between the liner and the coating is not improved very well. Therefore, it is necessary to solve this problem.
Disclosure of Invention
In order to solve the problems, the invention provides a method for enhancing the bonding strength between a base pipe and a target coating, which comprises the steps of firstly carrying out sand blasting on the base pipe of a stainless steel pipe in a rotary sputtering mode, wherein steel sand adopted in the sand blasting is formed by mixing SUS304CW1.0 stainless steel wire cut shots and SUS304s1.0 stainless steel wire round shots according to a ratio of 1:2, the sand blasting pressure is 0.6-0.7Mpa, so that the sand blasting efficiency is increased, and the surface roughness of the base pipe is improved, then uniformly sputtering melted nickel-aluminum wires to the surface of a back pipe in a rotary sputtering mode, wherein the wire diameter of the nickel-aluminum wires is phi 2 +/-0.1 mm, the current is 215 +/-15A, and the wire feeding speed is 5-5.5m/min, so that the base pipe is bottomed, the surface roughness of the base pipe is further improved, and the problems in the background technology are solved.
The invention aims to provide a method for enhancing the bonding strength between a base tube and a target coating,
the method comprises the following steps: firstly, carrying out sand blasting operation on a base pipe of a stainless steel pipe, uniformly sputtering steel sand to the surface of a stainless steel back pipe in a rotary sputtering mode, and meeting the process requirements: the rotating speed of the base pipe is 100r/min, the gun distance is 150mm, the injection angle is 90 degrees, and the moving speed of the spray gun is 10-12 mm/s;
step two: then melting the nickel-aluminum wire by high current, and then uniformly sputtering the melted nickel-aluminum wire to the surface of the back tube in a rotary sputtering mode, wherein the process requirement is as follows: the wire diameter of the nickel-aluminum wire is phi 2 +/-0.1 mm, the voltage is 30 +/-5V, the current is 215 +/-15A, and the wire feeding speed is 5-5.5 m/min.
The further improvement lies in that: the steel grit adopted in the first step is formed by mixing SUS304CW1.0 stainless steel wire cut pellets and SUS 3041.0 stainless steel wire round pellets according to a ratio of 1: 2.
The further improvement lies in that: the nickel-aluminum ratio of the nickel-aluminum wire adopted in the second step is 90: 10.
The further improvement lies in that: and the rotating speed of the base pipe in the second step is 100r/min, the moving speed of the spray gun is 45mm/s, and the spraying angle is 90 degrees.
The further improvement lies in that: the pressure of the first step is 0.6-0.7 Mpa.
The further improvement lies in that: firstly, wrapping pipe orifices at two ends of a base pipe by using a high-temperature adhesive tape, sleeving a rubber protective sleeve with the same specification to protect the pipe orifices, and then carrying out sand blasting.
The further improvement lies in that: and in the second step, high-temperature adhesive tapes are used for protecting pipe orifices at two ends of the base pipe.
The invention has the beneficial effects that: the method comprises the steps of firstly carrying out sand blasting on a base tube of the stainless steel tube in a rotary sputtering mode, wherein steel sand adopted for sand blasting is formed by mixing SUS304CW1.0 cut stainless steel wire shots and SUS 3041.0 round stainless steel wire shots according to a ratio of 1:2, the sand blasting pressure is 0.6-0.7Mpa, so that the sand blasting efficiency is increased, the surface roughness of the base tube is improved, then, melting nickel-aluminum wires are uniformly sputtered on the surface of a back tube in a rotary sputtering mode, the wire diameter of the nickel-aluminum wires is phi 2 +/-0.1 mm, the current is 215 +/-15A, and the wire feeding speed is 5-5.5m/min, so that the base tube is bottomed by sputtering, and the surface roughness of the base tube is further improved; the nickel-aluminum ratio of the nickel-aluminum wires is 90:10, so that the surface roughness of the base tube is further improved; the two steps are both wrapped by two ends of the base pipe to protect the pipe orifice.
Detailed Description
In order to further understand the present invention, the following detailed description will be made with reference to the following examples, which are only used for explaining the present invention and are not to be construed as limiting the scope of the present invention.
The present embodiment provides a method for enhancing the bonding strength between a substrate tube and a target coating,
the method comprises the following steps: wrap up the mouth of pipe at parent tube both ends with high temperature sticky tape earlier to embolia the rubber protective sheath protection mouth of pipe with the specification, carry out the sandblast operation with the parent tube of nonrust steel pipe again, the steel sand evenly sputters to nonrust steel back of the body pipe surface with rotatory sputter's mode, the technological requirement: the rotating speed of the base pipe is 100r/min, the gun distance is 150mm, the injection angle is 90 degrees, the moving speed of the spray gun is 12mm/s, and the pressure is 0.7 MPa; the adopted steel grit is SUS304CW1.0 stainless steel wire cut shots SUS304s1.0 stainless steel wire round shots which are mixed according to the ratio of 1: 2.
Step two: the high-temperature adhesive tape is firstly used for protecting the pipe orifices at the two ends of the base pipe, then the high current is used for melting the nickel-aluminum wires, and then the melted nickel-aluminum wires are uniformly sputtered to the surface of the back pipe in a rotary sputtering mode, so that the process requirement is as follows: the wire diameter of the nickel-aluminum wire is phi 2mm, the voltage is 30V, the current is 215A, the wire feeding speed is 5m/min, the rotating speed of a base pipe is 100r/min, the moving speed of a spray gun is 45mm/s, and the spraying angle is 90 degrees; the nickel-aluminum ratio of the adopted nickel-aluminum wires is 90: 10.
According to the embodiment, two ends of a base pipe are wrapped firstly, then the base pipe of a stainless steel pipe is subjected to sand blasting in a rotary sputtering mode, steel sand adopted by the sand blasting is formed by mixing SUS304CW1.0 stainless steel wire cut shots and SUS304s1.0 stainless steel wire round shots according to a ratio of 1:2, the sand blasting pressure is 0.7Mpa, thus the sand blasting efficiency is increased, the surface roughness of the base pipe is improved, then melted nickel-aluminum wires are uniformly sputtered to the surface of a back pipe in a rotary sputtering mode, the wire diameter of the nickel-aluminum wires is phi 2mm, the current is 215A, and the wire feeding speed is 5m/min, so that the base pipe is subjected to bottom blasting in the sputtering mode, and the surface roughness of the base pipe is further improved; the nickel-aluminum ratio of the nickel-aluminum wires is 90:10, so that the surface roughness of the base tube is further improved; the process can ensure that the roughness of the base pipe can reach more than 400um, meet the requirement of bonding strength, particularly ensure that the produced niobium oxide target has no cracking abnormality in the process, similar feedback does not occur at a client, and the product quality is stable.
Analysis of the blasting:
| parameters of sand blasting | This example | Comparative example 1 | Comparative example 2 |
| Steel grit | SUS304CW1.0 stainless steel wire cut pill and SUS304S1.0 stainless steel wire The round pills are mixed according to the ratio of 1:2 | SUS304CW1.0 stainless steel wire cut pill and SUS 3041.0 stainless steel wire round pill Are mixed according to the ratio of 1:2 | Ordinary steel wire |
| Pressure of sand blasting | 0.7Mpa | 0.4 Mpa | 0.7Mpa |
| Base pipe rotation speed | 100r/min | 100r/min | 100r/min |
| Moving speed of spray gun | 12mm/s | 12mm/s | 12mm/s |
| Angle of spray | 90° | 90° | 90° |
| Analysis of results | The surface roughness of the base tube is high | The surface roughness of the substrate tube is lower than that of the embodiment | The roughness of the surface of the substrate tube was lower than that of comparative example 1 |
Thus, it can be seen that: the steel grit adopted in the embodiment is formed by mixing S304CW1.0 stainless steel wire cut shots and SUS 3041.0 stainless steel wire round shots according to the ratio of 1:2, and the sand blasting pressure is 0.7Mpa, so that the surface roughness of the base pipe can be improved.
Analysis of nickel-aluminium wire sputtering:
| parameter(s) | This example | Comparative example 3 | Comparative example 4 | Comparative example 5 |
| Wire diameter of nickel-aluminum wire | φ2mm | φ2m | φ2m | φ3m |
| Electric current | 215A | 215A | 230 | 215A |
| Wire feed speed | 5m/min | 6/min | 5m/min | 5m/min |
| The ratio of nickel to aluminum is | 90:10 | 90:10 | 90:10 | 90:10 |
| Speed of rotation of the back tube | 100r/min | 100r/min | 100r/min | 100r/min |
| Moving speed of spray gun | 45mm/s | 45mm/s | 45mm/s | 45mm/s |
| Angle of spray | 90° | 90° | 90° | 90° |
| Voltage of | 30V | 30V | 30V | 30V |
| Analysis of results | The surface roughness of the base tube is high | The surface roughness of the substrate tube is lower than that of the embodiment | The surface roughness of the base pipe is lower than that of the comparative example 3 | The roughness of the surface of the substrate tube is lower than that of comparative example 4 |
Thus, it can be seen that: the embodiment adopts the nickel-aluminum wire with the wire diameter of phi 2mm, the current is 215A, the wire feeding speed is 5m/min, the roughness of the base pipe can be further improved to more than 400um, and the requirement of the bonding strength with the target coating is met.
Claims (7)
1. A method for enhancing the bonding strength between a base tube and a target coating is characterized in that:
the method comprises the following steps: firstly, carrying out sand blasting operation on a base pipe of a stainless steel pipe, uniformly sputtering steel sand to the surface of a stainless steel back pipe in a rotary sputtering mode, wherein the rotating speed of the base pipe is 100r/min, the gun distance is 150mm, the spraying angle is 90 degrees, and the moving speed of a spray gun is 10-12 mm/s;
step two: and then melting the nickel-aluminum wires by high current, and then uniformly sputtering the melted nickel-aluminum wires to the surface of the back tube in a rotary sputtering mode, wherein the wire diameter of the nickel-aluminum wires is phi 2 +/-0.1 mm, the voltage is 30 +/-5V, the current is 215 +/-15A, and the wire feeding speed is 5-5.5 m/min.
2. The method of claim 1, wherein the step of enhancing the bond strength between the substrate tube and the target coating comprises: the steel grit adopted in the first step is formed by mixing SUS304CW1.0 stainless steel wire cut pellets and SUS 3041.0 stainless steel wire round pellets according to a ratio of 1: 2.
3. The method of claim 1, wherein the step of enhancing the bond strength between the substrate tube and the target coating comprises: the nickel-aluminum ratio of the nickel-aluminum wire adopted in the second step is 90: 10.
4. The method of claim 1, wherein the step of enhancing the bond strength between the substrate tube and the target coating comprises: and the rotating speed of the base pipe in the second step is 100r/min, the moving speed of the spray gun is 45mm/s, and the spraying angle is 90 degrees.
5. The method of claim 1, wherein the step of enhancing the bond strength between the substrate tube and the target coating comprises: the pressure of the first step is 0.6-0.7 Mpa.
6. The method of claim 1, wherein the step of enhancing the bond strength between the substrate tube and the target coating comprises: firstly, wrapping pipe orifices at two ends of a base pipe by using a high-temperature adhesive tape, sleeving a rubber protective sleeve with the same specification to protect the pipe orifices, and then carrying out sand blasting.
7. The method of claim 1, wherein the step of enhancing the bond strength between the substrate tube and the target coating comprises: and in the second step, high-temperature adhesive tapes are used for protecting pipe orifices at two ends of the base pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110564951.1A CN113355628A (en) | 2021-05-24 | 2021-05-24 | Method for enhancing bonding strength between base tube and target coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110564951.1A CN113355628A (en) | 2021-05-24 | 2021-05-24 | Method for enhancing bonding strength between base tube and target coating |
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| Publication Number | Publication Date |
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| CN113355628A true CN113355628A (en) | 2021-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110564951.1A Pending CN113355628A (en) | 2021-05-24 | 2021-05-24 | Method for enhancing bonding strength between base tube and target coating |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603354A (en) * | 2016-01-28 | 2016-05-25 | 基迈克材料科技（苏州）有限公司 | Method for preparing metal zinc alloy target by arc-spraying process |
| CN109518141A (en) * | 2019-01-16 | 2019-03-26 | 广州市尤特新材料有限公司 | A kind of niobium rotary target material and preparation method thereof |
| CN109706422A (en) * | 2019-01-16 | 2019-05-03 | 广州市尤特新材料有限公司 | A kind of aluminium rotary target material and its manufacturing method |
| CN110396669A (en) * | 2019-08-09 | 2019-11-01 | 广州市尤特新材料有限公司 | A kind of sputtering rotation aluminium copper target and preparation method thereof |
| CN110453186A (en) * | 2019-08-05 | 2019-11-15 | 广州市尤特新材料有限公司 | A kind of rotation nichrome target and preparation method thereof |
| CN111041432A (en) * | 2019-11-26 | 2020-04-21 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
| CN111118460A (en) * | 2020-01-10 | 2020-05-08 | 广州市尤特新材料有限公司 | Rotary titanium target and preparation method thereof |
-
2021
- 2021-05-24 CN CN202110564951.1A patent/CN113355628A/en active Pending
Patent Citations (7)
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|---|---|---|---|---|
| CN105603354A (en) * | 2016-01-28 | 2016-05-25 | 基迈克材料科技（苏州）有限公司 | Method for preparing metal zinc alloy target by arc-spraying process |
| CN109518141A (en) * | 2019-01-16 | 2019-03-26 | 广州市尤特新材料有限公司 | A kind of niobium rotary target material and preparation method thereof |
| CN109706422A (en) * | 2019-01-16 | 2019-05-03 | 广州市尤特新材料有限公司 | A kind of aluminium rotary target material and its manufacturing method |
| CN110453186A (en) * | 2019-08-05 | 2019-11-15 | 广州市尤特新材料有限公司 | A kind of rotation nichrome target and preparation method thereof |
| CN110396669A (en) * | 2019-08-09 | 2019-11-01 | 广州市尤特新材料有限公司 | A kind of sputtering rotation aluminium copper target and preparation method thereof |
| CN111041432A (en) * | 2019-11-26 | 2020-04-21 | 广州市尤特新材料有限公司 | Rotary zirconia target material and preparation method thereof |
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Non-Patent Citations (1)
| Title |
|---|
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Application publication date: 20210907 |