CN113341533A - Large-angle coaxial flexible hinge support quick reflector device - Google Patents
Large-angle coaxial flexible hinge support quick reflector device Download PDFInfo
- Publication number
- CN113341533A CN113341533A CN202110746544.2A CN202110746544A CN113341533A CN 113341533 A CN113341533 A CN 113341533A CN 202110746544 A CN202110746544 A CN 202110746544A CN 113341533 A CN113341533 A CN 113341533A
- Authority
- CN
- China
- Prior art keywords
- flexible hinge
- voice coil
- coaxial flexible
- coil motor
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005489 elastic deformation Effects 0.000 claims abstract description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 238000012360 testing method Methods 0.000 abstract description 3
- 238000013461 design Methods 0.000 description 7
- 238000004891 communication Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
Abstract
The invention discloses a large-angle coaxial flexible hinge support quick reflector device, which comprises a base, a rear shell, a coaxial flexible hinge support structure, a working reflector body and a small reflector, wherein the base is provided with a front shell and a rear shell; the reflector device also comprises a voice coil motor assembly, wherein the voice coil motor assembly is divided into a first voice coil motor assembly and a second voice coil motor assembly; the first voice coil motor assembly drives the working mirror body to rotate around an x axis; the second voice coil motor assembly drives the working mirror body to rotate around the y axis; the two groups of voice coil motors can drive the working mirror body to work in an x-axis and y-axis rotating mode state, and can also be controlled according to index requirements. The reflector device has simple structure, compact overall structure layout and small volume, can meet the requirements of various loads and deflection angles, and is convenient to assemble and test; the device realizes the two-axis deflection of the quick reflector by the elastic deformation of the coaxial flexible hinge supporting structure, has no rotation friction, and can improve the rotation precision.
Description
Technical Field
The invention relates to the technical field of precise optical mechanical structure design, in particular to a large-corner coaxial flexible hinge support quick reflector device which is suitable for scanning and aligning light beams in the fields of laser radar, laser communication and the like.
Background
With the continuous development of automatic driving and 5G technology, laser radar has gradually become an important sensor for automatic driving of intelligent electric vehicles. With the increasing demand for air-to-air-ground-sea communication, space laser communication is becoming an important technical means in the field of wireless communication.
The scanning schemes for the laser radar mainly comprise a mechanical type, an MEMS galvanometer type and a solid state type, wherein the mechanical type can utilize a motor to rotate for 360 degrees for scanning, but the scanning efficiency is too low; the solid state type generally adopts a phased array principle, and the cost is high at the present stage; the MEMS galvanometer type is considered to be the best stage scheme at present, but the MEMS has a weak load capacity, so that the laser radar detection distance is short as in application numbers CN112799033A and CN 112945144A.
At present, three types of quick reflectors for a laser communication fine tracking system are mainly used, one type is a two-dimensional flexible hinge support quick reflector, the other type is a flexible shaft support quick reflector, and the other type is a rigid shaft support quick reflector. Such as application No. 201911129634.6, application No. 202021740161.1 and academic paper "vehicle-mounted large-aperture rigid support type fast reflector" (optical precision engineering, 2014, phase 1). The flexible hinge supported fast reflector has the advantages of strong load capacity, high closed loop bandwidth and the like, but the deflection angle of the flexible hinge supported fast reflector is small; the flexible shaft supports the quick reflector, the deflection angle of the quick reflector is relatively large, but a low-order mode in a non-working direction exists, and the anti-interference capability of a system is reduced; the rigid support quick reflecting mirror has larger load capacity, but friction exists in rotation, and the abrasion of the rigid support can cause the reduction of the rotation precision.
In summary, a need exists in the art for a fast mirror device that can satisfy a large deflection angle, meet the size requirements of various working mirrors, improve the anti-interference capability of the system, and facilitate the design of a small size.
Disclosure of Invention
The invention provides a large-angle coaxial flexible hinge support quick reflector device which can meet the requirement of a large deflection angle, is beneficial to volume miniaturization design and can meet the size requirements of various working reflector bodies.
In order to achieve the above purpose, the invention provides the following technical scheme:
the invention discloses a large-angle coaxial flexible hinge support quick reflector device, which comprises:
a base;
a rear housing integrated at a rear side of the base; and
a coaxial flexible hinge support structure mounted to a side of the base opposite the rear housing;
a working mirror body is arranged on the outer side of the coaxial flexible hinge supporting structure, and a small reflector which is coaxially arranged with the working mirror body is arranged on the inner side of the coaxial flexible hinge supporting structure;
the mirror device further includes:
the voice coil motor assembly is divided into a first voice coil motor assembly and a second voice coil motor assembly;
the first voice coil motor assembly drives the working mirror body to rotate around an x axis;
the second voice coil motor assembly drives the working mirror body to rotate around the y axis;
the deflection angles of the working mirror body and the small reflector are the same;
the working mirror body is angularly deflected by elastic deformation of the coaxial flexible hinge support structure.
Further, the coaxial flexible hinge support structure includes:
a support frame body;
a first flexible unit extending in the x-axis direction; and
a second flexible unit extending along the y-axis direction;
the first flexible unit is configured as a rotating shaft of the working mirror body rotating around the x-axis direction, and the second flexible unit is configured as a rotating shaft of the working mirror body rotating around the y-axis direction;
the rotation centers of the two rotating shafts are positioned on the same plane.
Furthermore, the number of the second flexible units is two, and the two second flexible units are symmetrically arranged on the outer side of the supporting frame body;
one end of the second flexible unit, which is far away from the supporting frame body, is provided with a mounting hole;
the coaxial flexible hinge support structure is mounted to the mounting hole with the base by a fastening bolt.
Further, the first voice coil motor assembly includes:
first magnetic steels symmetrically arranged on the coaxial flexible hinge support structure; and
the first coil is integrated in the first coil supporting seat;
the second voice coil motor assembly includes:
the second coils are symmetrically arranged on two sides of the first coil supporting seat along the y-axis direction of the first coil supporting seat; and
and the second magnetic steel is matched with the second coil and is connected with the base.
Further, the reflector device also comprises an angle feedback component;
the angle feedback assembly has:
a light source fixed on one side of the base; and
the photoelectric detector is fixed on the other side of the base;
and light rays emitted by the light source are transmitted to the photoelectric detector through reflection of the small reflector.
Further, the light source and the photodetector are respectively mounted on a base.
In the technical scheme, the large-angle coaxial flexible hinge support quick reflector device provided by the invention has the following beneficial effects:
the fast reflector device has simple structure, compact overall structure layout and small volume, can meet the requirements of various loads and deflection angles, and is convenient to assemble and test; the device realizes the two-axis deflection of the quick reflector by the elastic deformation of the coaxial flexible hinge supporting structure, has no rotation friction, and can improve the rotation precision.
The size and the notch shape of the flexible unit of the coaxial flexible hinge supporting structure of the device are subjected to iterative optimization design according to indexes such as load size, deflection angle, closed loop width and the like, so that the index requirements are met, and meanwhile, the anti-interference capability of the system is enhanced.
The small reflector and the working mirror body of the device are arranged on the same coaxial flexible hinge support structure, so that the consistency of the rotation angles of the small reflector and the working mirror body is ensured, the angle feedback component is utilized to provide angle feedback information for a control system, the detection precision can be improved, and the system error can be reduced.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
FIG. 1 is a schematic structural diagram of a wide-angle coaxial flexible hinge-supported fast mirror device according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a wide angle coaxial flexible hinge supported fast mirror device provided in accordance with an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a coaxial flexible hinge support structure of a wide-angle coaxial flexible hinge support fast mirror device according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an angle feedback assembly of a wide angle coaxial flexible hinge supported fast mirror device according to an embodiment of the present invention.
Description of reference numerals:
101. a base; 102. a rear cover; 103. a rear cover;
2. a coaxial flexible hinge support structure;
201. a support frame body; 202. a first flexible unit; 203. a second flexible unit; 204. mounting holes;
301. a working mirror body; 302. a small mirror;
401. a first magnetic steel; 402. a first coil support seat; 403. a first coil;
501. a second magnetic steel; 502. a second coil;
601. a photodetector; 602. a light source; 603. a circuit board.
Detailed Description
In order to make the technical solutions of the present invention better understood, those skilled in the art will now describe the present invention in further detail with reference to the accompanying drawings.
As shown in fig. 1 to 4;
the invention discloses a large-angle coaxial flexible hinge support quick reflector device, which comprises:
a base 101;
a rear case integrated at the rear side of the base 101; and
a coaxial flexible hinge support structure 2 mounted to a side of the base 101 opposite the rear housing;
the outer side of the coaxial flexible hinge supporting structure 2 is provided with a working mirror body 301, and the inner side of the coaxial flexible hinge supporting structure 2 is provided with a small reflector 302 which is coaxially arranged with the working mirror body 301;
the quick mirror device further includes:
the voice coil motor assembly is divided into a first voice coil motor assembly and a second voice coil motor assembly;
the first voice coil motor assembly drives the working mirror body 301 to rotate around the x axis;
the second voice coil motor component drives the working mirror body 301 to rotate around the y axis;
the deflection angles of the working mirror body 301 and the small reflector 302 are the same;
the working mirror body 301 is angularly deflected by elastic deformation of the coaxial flexible hinge support structure 2.
Specifically, the embodiment discloses a fast reflecting mirror device based on a coaxial flexible hinge support structure 2, wherein a main body part of the fast reflecting mirror device comprises a base 101 and a rear shell, and a working mirror body 301 and a small reflecting mirror 302 are respectively integrated on two sides of the coaxial flexible hinge support structure 2, so as to ensure that the deflection angles of the working mirror body 301 and the small reflecting mirror 302 are the same. The working mirror 301 of this embodiment respectively realizes the rotation in the x-axis direction and the rotation in the y-axis direction by the first voice coil motor assembly and the second voice coil motor assembly. In addition, the two ends of the coaxial flexible hinge support structure 2 along the y-axis direction of the present embodiment are fixedly assembled with the base 101, and the rear housing of the present embodiment specifically includes a rear cover 102 and a rear housing 103.
Preferably, the coaxial flexible hinge support structure 2 of the present embodiment includes:
a support frame body 201;
a first flexible unit 202 extending in the x-axis direction; and
a second flexible unit 203 extending in the y-axis direction;
the first flexible unit 201 is configured as a rotation axis of the working mirror body 301 rotating around the x-axis direction, and the second flexible unit 202 is configured as a rotation axis of the working mirror body 301 rotating around the y-axis direction;
the rotation centers of the two rotating shafts are positioned on the same plane.
The first flexible unit 202 and the second flexible unit 203 are one structural member, the number of the second flexible units 203 is two, and the two second flexible units 203 are symmetrically arranged on the outer side of the supporting frame 201;
the end of the second flexible unit 202 away from the support frame 203 is provided with a mounting hole 204;
the coaxial flexible hinge support structure 2 is mounted to the mounting hole 204 with the base 101 by fastening bolts.
The specific structural composition of the coaxial flexible hinge support structure 2 is detailed here, comprising a main body support frame 203, the support frame 201 being configured in a circular ring configuration matching the base 101; meanwhile, the support frame 201 is provided with the first flexible unit 202 and the second flexible unit 203 described above. The two sets of flexible units of the coaxial flexible hinge support structure 2 of the present embodiment are configured as a criss-cross flexible unit combination structure, and the size and the notch shape of the flexible unit are designed according to the index requirements of the load size, the deflection angle, the closed loop bandwidth, etc., and the width, the wall thickness and the notch shape of the flexible unit of the present embodiment are also limited by the mechanical processing technology and the design of the service life of the flexible unit, so that the wall thickness and the notch shape of the flexible unit are mainly determined according to the index of the load, the corner size, the service life, the processing cost, etc. during the design. Under the condition that the shape and the width of the incision are not changed, the larger the wall thickness of the flexible unit is, the larger the deformation rigidity is, and the larger the resilience force is during resetting; it is also found by theoretical analysis that the greater the width of the flexible element, the greater the stiffness of the deformation, without the change in the shape and thickness of the incision. The large-angle coaxial flexible hinge support structure suitable for the quick reflector disclosed by the embodiment is designed by comprehensively considering the factors, and the structure can be designed according to different index requirements, so that the adaptability of the system is improved.
Preferably, the first voice coil motor assembly of the present embodiment includes:
first magnetic steels 401 symmetrically arranged on the coaxial flexible hinge support structure 2; and
a first coil 403 integrated in the first coil support base 402;
the second voice coil motor assembly includes:
the second coils 502 are symmetrically arranged on two sides of the first coil support base 402 along the y-axis direction of the first coil support base 402; and
and a second magnetic steel 501 matched with the second coil 502, wherein the second magnetic steel 501 is connected with the base 101.
In order to realize the rotation of the working mirror body 301 around the x axial direction and the rotation around the y axial direction, a first voice coil motor assembly and a second voice coil motor assembly are integrated at the corresponding positions; when the fast reflecting mirror device works, the rotation of the working mirror body around the x axis is realized by the two first magnetic steels 401 symmetrically arranged on the coaxial flexible hinge supporting structure 2 and the first coil 403 arranged in the first coil supporting seat 402. The rotation around the y axis is realized by two second coils 502 arranged on the first coil supporting seat 402 and two second magnetic steels 501 arranged on the base 101, and the two pairs of motors respectively drive the working mirror body to rotate around the two axes, so that the working of the quick reflector under the resonance state of the two-axis rotation can be met, and the closed-loop control can be performed according to the requirements.
As a preferred embodiment:
the quick reflector device also comprises an angle feedback component;
the angle feedback assembly has:
a light source 602 fixed to one side of the base 101; and
a photodetector 601 fixed to the other side of the base 101;
light from the light source 602 is reflected by the small mirror 302 to the photodetector 601.
Wherein the light source 602 and the photodetector 601 are respectively installed in the base 101.
The angle feedback assembly of the embodiment adopts the combination of the photoelectric detector 602 and the light source 601, provides angle feedback information for the control system, the small reflector 302 and the working mirror body 301 are both arranged on the coaxial flexible hinge supporting structure 2, and the deflection angles of the small reflector 302 and the working mirror body 301 are consistent, so that the detection precision can be improved, and the system error is reduced. In addition, a circuit board 603 connected to the photodetector 602 and the light source 601 of the present embodiment is integrated on the rear cover 103.
In the technical scheme, the large-angle coaxial flexible hinge support quick reflector device provided by the invention has the following beneficial effects:
the reflector device has simple structure, compact overall structure layout and small volume, can meet the requirements of various loads and deflection angles, and is convenient to assemble and test; the device realizes the two-axis deflection of the quick reflector by the elastic deformation of the coaxial flexible hinge supporting structure, has no friction, and can improve the rotation precision.
The size and the notch shape of the flexible unit of the coaxial flexible hinge support structure 2 of the device are subjected to iterative optimization design according to indexes such as load size, deflection angle, closed loop width and the like, so that the index requirements are met, and meanwhile, the anti-interference capability of the system is enhanced.
The small reflector 302 and the working mirror body 301 of the device are arranged on the coaxial flexible hinge supporting structure 2, so that the consistency of the rotation angles of the small reflector 302 and the working mirror body is ensured, the angle feedback component is utilized to provide angle feedback information for a control system, the detection precision can be improved, and the system error can be reduced.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.
Claims (6)
1. A large angle coaxial flexible hinge supported fast mirror device, comprising:
a base (101);
a rear case integrated with a rear side of the base (101); and
a coaxial flexible hinge support structure (2) mounted to a side of the base (101) opposite the rear housing;
a working mirror body (301) is arranged on the outer side of the coaxial flexible hinge supporting structure (2), and a small reflector (302) which is coaxially arranged with the working mirror body (301) is arranged on the inner side of the coaxial flexible hinge supporting structure (2);
the mirror device further includes:
the voice coil motor assembly is divided into a first voice coil motor assembly and a second voice coil motor assembly;
the first voice coil motor component drives the working mirror body (301) to rotate around an x axis;
the second voice coil motor component drives the working mirror body (301) to rotate around the y axis;
the deflection angles of the working mirror body (301) and the small reflector (302) are the same;
the working mirror body (301) is angularly deflected by elastic deformation of the coaxial flexible hinge support structure (2).
2. A wide angle coaxial flexible hinge-supported fast mirror device according to claim 1, characterized in that said coaxial flexible hinge support structure (2) comprises:
a support frame (201);
a first flexible unit (202) extending in the x-axis direction; and
a second flexible unit (203) extending in the y-axis direction;
the first flexible unit (202) is configured as a rotating shaft of the working mirror body (301) rotating around the x-axis direction, and the second flexible unit (203) is configured as a rotating shaft of the working mirror body (301) rotating around the y-axis direction;
the rotation centers of the two rotating shafts are positioned on the same plane.
3. The high angle coaxial flexible hinge-supported quick mirror device of claim 2, wherein said second flexible unit (202) has a mounting hole (204) at one end;
the coaxial flexible hinge support structure (2) is mounted to the mounting hole (204) with the base (101) by fastening bolts.
4. The high angle coaxial flexible hinge-supported fast mirror device of claim 2, wherein said first voice coil motor assembly comprises:
a first magnetic steel (401) symmetrically arranged on said coaxial flexible hinge support structure (2); and
a first coil (403) integrated in the first coil support base (402);
the second voice coil motor assembly includes:
second coils (502) symmetrically arranged on two sides of the first coil support seat (402) along the y-axis direction of the first coil support seat (402); and
and the second magnetic steel (501) is matched with the second coil (502), and the second magnetic steel (501) is connected with the base (101).
5. The high angle coaxial flexible hinge-supported quick mirror device of claim 1, further comprising an angle feedback assembly;
the angle feedback assembly has:
a light source (602) fixed to one side of the base (101); and
a photoelectric detector (601) fixed on the other side of the base (101);
the light emitted by the light source (602) is transmitted to the photoelectric detector (601) through the reflection of the small reflector (302).
6. A wide angle coaxial flexible hinge-supported quick mirror device as claimed in claim 5, wherein said light source (602) and said photodetector (601) are fixed separately in said base (101).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110746544.2A CN113341533A (en) | 2021-07-01 | 2021-07-01 | Large-angle coaxial flexible hinge support quick reflector device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110746544.2A CN113341533A (en) | 2021-07-01 | 2021-07-01 | Large-angle coaxial flexible hinge support quick reflector device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113341533A true CN113341533A (en) | 2021-09-03 |
Family
ID=77482158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110746544.2A Pending CN113341533A (en) | 2021-07-01 | 2021-07-01 | Large-angle coaxial flexible hinge support quick reflector device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113341533A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520517A (en) * | 2011-12-16 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Flexible anti-rotation mechanism for two-dimensional rapid reflector |
| CN102829773A (en) * | 2012-08-07 | 2012-12-19 | 中国科学院长春光学精密机械与物理研究所 | Automatic lightproof cylinder cover device suitable for large-scale photoelectric theodolite |
| CN107942473A (en) * | 2017-12-28 | 2018-04-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of fast mirror |
| CN109557634A (en) * | 2018-12-29 | 2019-04-02 | 中国科学院长春光学精密机械与物理研究所 | The application of mirror assembly, parallel light tube and parallel light tube |
| CN112630960A (en) * | 2019-09-24 | 2021-04-09 | 北京辰阳自动化科技有限公司 | Biaxial resonant scanning mirror |
| CN112799033A (en) * | 2021-01-20 | 2021-05-14 | 湖北三江航天红峰控制有限公司 | Large-field-of-view scanning MEMS laser radar device and scanning system |
-
2021
- 2021-07-01 CN CN202110746544.2A patent/CN113341533A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520517A (en) * | 2011-12-16 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Flexible anti-rotation mechanism for two-dimensional rapid reflector |
| CN102829773A (en) * | 2012-08-07 | 2012-12-19 | 中国科学院长春光学精密机械与物理研究所 | Automatic lightproof cylinder cover device suitable for large-scale photoelectric theodolite |
| CN107942473A (en) * | 2017-12-28 | 2018-04-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of fast mirror |
| CN109557634A (en) * | 2018-12-29 | 2019-04-02 | 中国科学院长春光学精密机械与物理研究所 | The application of mirror assembly, parallel light tube and parallel light tube |
| CN112630960A (en) * | 2019-09-24 | 2021-04-09 | 北京辰阳自动化科技有限公司 | Biaxial resonant scanning mirror |
| CN112799033A (en) * | 2021-01-20 | 2021-05-14 | 湖北三江航天红峰控制有限公司 | Large-field-of-view scanning MEMS laser radar device and scanning system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108663770B (en) | Rapid control reflector large-angle rotating mechanism based on cross spring bearing | |
| CN108873320B (en) | Two-dimensional rapid control reflector | |
| CN100350280C (en) | Fast steering reflection mirror with giant magnetostrictive driver | |
| CN113933989B (en) | Two-dimensional quick reflector and locking structure thereof | |
| CN116400476A (en) | Moving coil type quick reflector based on flexible support | |
| CN113341533A (en) | Large-angle coaxial flexible hinge support quick reflector device | |
| CN210693579U (en) | Driving motor | |
| CN116699793B (en) | Quick reflector based on memory alloy locking structure | |
| CN110726984B (en) | Vibrating mirror and laser radar | |
| CN112444796A (en) | Galvanometer and laser radar | |
| CN217561833U (en) | Quick scanning reflector and flexible supporting structure thereof | |
| CN113791493B (en) | Quick reflector based on macro-micro two-stage composite actuation | |
| CN114341663A (en) | Driving motor, scanning module and laser radar | |
| CN115128798A (en) | Two-dimensional rapid control reflector with large deflection angle and high vibration resistance | |
| CN210803864U (en) | Biaxial resonant scanning mirror | |
| CN111308479B (en) | Galvanometer and laser radar | |
| CN217404627U (en) | Rapid reflector system based on transmission type application of eddy current sensor | |
| CN114578504A (en) | Reaction force-free quick reflecting mirror based on flexible support | |
| CN114839762A (en) | Rapid reflector system based on transmissive application of eddy current sensor | |
| CN113359273A (en) | Large-corner cross frame type quick reflector device | |
| CN116643371B (en) | Limiting locking device for quick reflection mirror and quick reflection mirror | |
| CN112630960A (en) | Biaxial resonant scanning mirror | |
| CN218037314U (en) | Laser galvanometer and laser radar system | |
| CN110955014B (en) | High-precision large-caliber quick reflecting mirror system | |
| CN116909013B (en) | Hollow quick reflector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210903 |
|
| RJ01 | Rejection of invention patent application after publication |