CN113249703B - Rotatory target apparatus for producing of electrically conductive zirconia - Google Patents
Rotatory target apparatus for producing of electrically conductive zirconia Download PDFInfo
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- CN113249703B CN113249703B CN202110798543.2A CN202110798543A CN113249703B CN 113249703 B CN113249703 B CN 113249703B CN 202110798543 A CN202110798543 A CN 202110798543A CN 113249703 B CN113249703 B CN 113249703B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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Abstract
The invention discloses a production device of a conductive zirconia rotary target, and relates to the technical field of zirconia target production. The machine comprises a supporting frame, a processing mechanism, a water circulation mechanism, a feeding mechanism and a gas supply mechanism are respectively and fixedly arranged between the inner surfaces of the supporting frame, a negative pressure dust collection mechanism is fixedly arranged on the side surface of the supporting frame, one ends of the water circulation mechanism, the feeding mechanism, the gas supply mechanism and the negative pressure dust collection mechanism are all communicated with the processing mechanism, the processing mechanism comprises a machine body, the peripheral side surface of the machine body is fixedly connected with the supporting frame, the side surface of the machine body is fixedly communicated with the gas supply mechanism, and the other side surface of the machine body is fixedly communicated with a dust collection cover communicated with the negative pressure dust collection mechanism. According to the invention, through the design of the processing mechanism, the water circulation mechanism, the feeding mechanism and the air supply mechanism, the device can efficiently complete the production operation of the zirconia rotary target material in an automatic mode.
Description
Technical Field
The invention belongs to the technical field of zirconia target production, and particularly relates to a production device of a conductive zirconia rotary target.
Background
Zirconium dioxide is known to exist in three phases: monoclinic, tetragonal and cubic phase, the ionic conductivity of ZrO2 is currently improved mainly by the addition of suitable dopants to the zirconia, such as yttrium oxide, magnesium oxide, cerium oxide, etc., the presence of these dopants being beneficial to the formation of said cubic or tetragonal phase, so that doped zirconia is also referred to as stabilized zirconia.
At present, a zirconia target is mainly prepared by a magnetron sputtering process, but in the magnetron sputtering process, serious ignition and even large-area ablation formation of pits on the surface of the zirconia target can be often found, the phenomenon is caused by arc discharge, the arc discharge can particularly occur in areas with different conductivities, and the zirconia has three metallographic phases and is easy to change due to the existence of different metallographic phases in the zirconia target, so that the stable conductive rotary zirconia target is prepared by taking the conductivity as a cut-in point and taking low resistivity and high uniformity as targets, a patent document with the publication number of CN111041432A discloses a rotary zirconia target and a preparation method thereof, the method solves the problems in the background technology through a series of processes, but in the prior art, a production device for integrally completing the zirconia target by using the method is lacked, therefore, the invention provides a production device of the conductive zirconia rotary target material to solve the problems.
Disclosure of Invention
The invention aims to provide a production device of a conductive zirconia rotary target, which solves the problem that production equipment capable of finishing zirconia rotary targets is lacked in the existing market through the design of a processing mechanism, a water circulation mechanism, a feeding mechanism and an air supply mechanism.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to a production device of a conductive zirconia rotary target, which comprises a supporting frame, wherein a processing mechanism, a water circulation mechanism, a feeding mechanism and an air supply mechanism are respectively and fixedly arranged between the inner surfaces of the supporting frame;
the processing mechanism comprises a machine body, the peripheral side surface of the machine body is fixedly connected with a supporting frame, the side surface of the machine body is fixedly communicated with an air feeding mechanism, the other side surface of the machine body is fixedly communicated with a dust hood communicated with the negative pressure dust collection mechanism, the top surface of the machine body is fixedly communicated with an exhaust pipe, a water distribution ring cavity communicated with the water circulation mechanism is fixedly arranged in the machine body, the inner wall of the water distribution ring cavity is rotationally connected with a water distribution ring seat, a spraying component communicated with the feeding mechanism and the air supply mechanism is fixedly arranged at the axial line position in the machine body, the interior of the machine body is rotationally connected with a pressing mechanism through a bearing, the peripheral side surface of the machine body is fixedly connected with a servo motor, one end of the output shaft of the servo motor is in transmission connection with the pressing and holding mechanism through a bevel gear, a first static gear ring and a second static gear ring are fixedly mounted on the inner wall of the machine body from top to bottom in sequence, and the inner walls of the first static gear ring and the second static gear ring are meshed with the pressing and holding mechanism.
Preferably, the pressing mechanism comprises a transmission seat, a spinning movable disc, a spinning static disc and a liquid collecting pipe, the circumferential side surfaces of the transmission seat, the spinning static disc and the liquid collecting pipe are rotatably connected with the machine body through bearings, the bottom of the liquid collecting pipe is fixedly communicated with a drain pipe, one end of the drain pipe is fixedly communicated with a water circulation mechanism, one end of an output shaft of a servo motor is in transmission connection with the transmission seat through a bevel gear, a group of pressing push rods distributed in a circumferential array are fixedly arranged between the opposite surfaces of the transmission seat and the spinning movable disc, a group of linkage telescopic rods distributed in a circumferential array are fixedly arranged between the opposite surfaces of the spinning movable disc and the spinning static disc, a group of positioning modules distributed in a circumferential array are arranged between the opposite surfaces of the spinning movable disc and the spinning static disc, and the circumferential side surfaces of the positioning modules are in transmission connection with a first static toothed ring and a second static toothed ring, the top ends of the positioning modules are fixedly communicated with the water distribution ring seat, and the bottom ends of the positioning modules are fixedly communicated with the liquid collection discharge pipe.
Preferably, the positioning modules comprise a limiting table and a placing table, the peripheral side surface of the limiting table is fixedly connected with the spinning moving disc, a liquid inlet pipe is fixedly arranged at the axis position of the spinning moving disc, the peripheral side surface at the top of the liquid inlet pipe is connected with a connecting pipe in a sliding manner, the top end of the connecting pipe is fixedly communicated with the water distribution ring seat, a temperature probe and a liquid level sensor are respectively and fixedly arranged in the limiting table and at the position adjacent to the liquid inlet pipe, the inner wall of the limiting table is rotatably connected with a pressing table through a bearing, a first driven gear is fixedly arranged on the peripheral side surface of the pressing table and corresponding to the position of the first fixed gear ring, the peripheral side surface of the first driven gear is meshed with the first fixed gear ring, the peripheral side surface of the placing table is rotatably connected with the spinning static disc through a bearing, a second driven gear is fixedly arranged on the peripheral side surface of the spinning static disc and corresponding to the position of the second fixed gear ring, and the peripheral side surface of the second driven gear is meshed with the second fixed gear ring, the pressure platform bottom surface and place the equal fixed mounting of platform top surface have sealed cushion, there is the target parent tube through sealed cushion joint between the platform relative surface with placing the pressure platform, place the inside fixed sap cavity of having seted up of platform down, lower sap cavity bottom surface rotates the intercommunication and has the downcomer, downcomer one end and the fixed intercommunication of collection liquid calandria.
Preferably, a group of sealing rubber rings is fixedly arranged at the sliding connection position of the connecting pipe and the liquid inlet pipe, the liquid outlet pipe is obliquely arranged, the target base pipe is of a hollow tubular structure with two open ends, and the axis of the target base pipe is perpendicular to the horizontal line.
Preferably, a connecting panel b is fixedly arranged at the joint of the feeding mechanism and the air supply mechanism and the spraying component, and one surface of the connecting panel b is fixedly connected with the machine body.
Preferably, the spraying subassembly includes footstock and base, footstock top surface and organism fixed connection, base week side rotates with the static dish of spinning to be connected, fixed mounting has lead screw drive module between footstock and the base relative surface, lead screw drive module week side is connected with the mobile station, mobile station back fixed mounting has a set of roll adjustment push rod, and is a set of roll adjustment push rod one end fixed mounting has the spraying platform, spraying bench top surface and mobile station sliding connection, spraying platform terminal surface fixed mounting has plasma nozzle, spraying platform back fixed mounting has connection panel an, connection panel a passes through the connecting piece on the surface and is connected with connection panel b.
Preferably, the axis of the plasma nozzle is perpendicular to the axis of the target base tube, the axis of the plasma nozzle is parallel to the axis of the dust hood, and the surface of the top seat is fixedly provided with a wire passing hole matched with the connecting panel b.
Preferably, lead screw drive module includes the guide bar that driving motor, drive screw and two symmetries set up, two guide bar and drive screw both ends are equallyd divide and are connected with footstock and base respectively, a driving motor surface and footstock fixed connection, the one end and the drive screw fixed connection of driving motor output shaft, drive screw and two guide bar week sides all are connected with the mobile station, drive screw is coaxial setting with the spinning driving disk.
Preferably, the machine body end face is fixedly provided with a material door, the side face of the machine body is fixedly communicated with an air inlet pipe communicated with an air supply mechanism, the peripheral side faces of the dust hood, the air inlet pipe and the air outlet pipe are fixedly provided with valves, the bottom face of the supporting frame is provided with a group of universal casters, and the end face of the supporting frame is fixedly provided with a central control panel.
Preferably, the water circulation mechanism includes the water tank, inside mutually isolated hot water chamber and the cold water chamber of being provided with of water tank, water tank bottom surface fixed mounting has mixes the water valve, mix the both ends of water valve water inlet respectively with hot water chamber and the fixed intercommunication in cold water chamber, water tank week side fixed mounting has a liquid pump and returns the liquid pump respectively, the one end and the fixed intercommunication of mixing the water valve of liquid pump water inlet go out the one end of liquid pump delivery port and pass through pipeline and the fixed intercommunication in water diversion ring chamber, the one end of returning the liquid pump inlet passes through pipeline and the fixed intercommunication in drain pipe, the one end and the fixed intercommunication in hot water chamber of returning liquid pump outlet, the inside fixed mounting in hot water chamber has the electric heat stick, hot water chamber and the inside equal fixed mounting in cold water chamber have the liquid.
The invention has the following beneficial effects:
1. the invention enables the device to efficiently finish the production operation of the zirconia rotary target material in an automatic mode through the design of the processing mechanism, the water circulation mechanism, the feeding mechanism and the air supply mechanism, and the device can effectively reduce the temperature difference between the target material and a spray gun during spraying through the liquid filling design in the target material during the production operation, is favorable for reducing the internal stress of the target material during spraying through the reduction of the temperature difference, is favorable for improving the forming effect of coating on the target material through the reduction of the internal stress, can effectively control the temperature of the target material during spraying through the liquid filling design, can maintain the surface stability of the base pipe during spraying through the realization of the temperature control effect, can quickly cool the base pipe after the target material is formed through the liquid filling type spraying design, and can realize the technical effects through the realization of the technical effect, therefore, the multifunctional and automatic degree of the device is effectively improved.
2. The base tube can synchronously generate revolution and spin during production through the design of the first static tooth ring and the second static tooth ring, the base tube can be sprayed on the base tube in an all-round and rapid mode through the realization of the technical effects, the base tube can be processed and operated through the design that the positions of the spinning static disc and the spinning moving disc can be adjusted, the base tube can rapidly remove dust and self-clean formed targets and the interior of a machine body after production through the design of the dust hood, and the maintenance difficulty and the use convenience of the base tube can be effectively reduced through the realization of the dust removal self-cleaning effect.
3. According to the invention, through the inert gas filling type design in the target production process, impurities and air in the production space can be effectively driven away, through the realization of the driving away effect, the yield and impurity-free rate of the device during target forming can be effectively improved, and through the realization of the driving away effect, the safety of the device during processing can be effectively improved.
Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a conductive zirconia rotary target production apparatus;
FIG. 2 is a schematic structural view of a processing mechanism;
FIG. 3 is a schematic cross-sectional view of FIG. 2;
FIG. 4 is a schematic view of a portion of the enlarged structure at A in FIG. 3;
FIG. 5 is a schematic structural view of a spray assembly;
FIG. 6 is a schematic structural diagram of the mobile station, the distance-adjusting push rod and the spraying station;
FIG. 7 is a schematic structural view of the pressing mechanism;
FIG. 8 is a schematic cross-sectional view of a positioning module;
FIG. 9 is a schematic view of the target base tube and the first driven gear;
fig. 10 is a schematic structural view of the first stationary ring and the second stationary ring.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a support frame; 2. a processing mechanism; 3. a water circulation mechanism; 4. a feeding mechanism; 5. an air supply mechanism; 6. a negative pressure dust suction mechanism; 7. a body; 8. a dust hood; 9. an exhaust pipe; 10. a water diversion ring cavity; 11. a water distribution ring seat; 12. a spray assembly; 13. an air inlet pipe; 14. a pressing mechanism; 15. a servo motor; 16. a first stationary ring gear; 17. a second stationary ring gear; 18. a transmission seat; 19. a spinning movable disc; 20. spinning a static disc; 21. collecting liquid calandria; 22. a drain pipe; 23. a pressure applying push rod; 24. linking the telescopic rod; 25. a positioning module; 26. a limiting table; 27. a placing table; 28. a liquid inlet pipe; 29. connecting pipes; 30. a temperature probe; 31. a liquid level sensor; 32. pressing the table; 33. a first driven gear; 34. a second driven gear; 35. a target material base pipe; 36. a lower liquid cavity; 37. a liquid discharging pipe; 38. a top seat; 39. a base; 40. a screw rod driving module; 41. a mobile station; 42. a distance adjusting push rod; 43. a spraying table; 44. a plasma shower head; 45. a connection panel a; 46. a material door; 47. and a panel b is connected.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-10, the present invention is a conductive zirconia rotary target material production apparatus, including a supporting frame 1, a set of casters is installed on the bottom surface of the supporting frame 1, a central control panel is fixedly installed on the end surface of the supporting frame 1, a display screen and a central control key are respectively installed on the surface of the central control panel, and a controller for controlling the operation of an electric power mechanism in the apparatus is fixedly installed in the central control panel;
a processing mechanism 2, a water circulation mechanism 3, a feeding mechanism 4 and an air supply mechanism 5 are respectively and fixedly arranged between the inner surfaces of the supporting frames 1, a negative pressure dust collection mechanism 6 is fixedly arranged on the side surface of the supporting frame 1, and one ends of the water circulation mechanism 3, the feeding mechanism 4, the air supply mechanism 5 and the negative pressure dust collection mechanism 6 are communicated with the processing mechanism 2;
the nature of the negative pressure dust collection mechanism 6 is a negative pressure dust collector, the feeding mechanism 4 comprises a kettle body and a vacuum discharge pump, zirconium oxide powder to be sprayed is stored in the kettle body, one end of a feed port of the vacuum discharge pump is communicated with the kettle body, one end of a discharge port of the vacuum discharge pump is communicated with a plasma spray head 44, and then feeding operation is carried out on the plasma spray head 44, the gas supply mechanism 5 comprises a gas storage tank, inert protective gas is filled in the gas storage tank, the inert protective gas can be argon, and the gas storage tank is used for filling inert protective gas into the machine body 7 and the plasma spray head 44;
the water circulation mechanism 3 comprises a water tank, a hot water cavity and a cold water cavity which are mutually isolated are arranged in the water tank, liquid level probes are fixedly arranged in the hot water cavity and the cold water cavity respectively, two water replenishing pipes are fixedly arranged on the surface of the water tank, the water replenishing pipes are arranged to replenish water to the hot water cavity and the cold water cavity, the liquid level probes are arranged to monitor liquid level data in the hot water cavity and the cold water cavity in real time, when the water circulation mechanism is used, the two water replenishing pipes are communicated with an external water pipe, and electromagnetic valves are arranged at the positions where the two water replenishing pipes are communicated with the water tank;
the bottom surface of the water tank is fixedly provided with a water mixing valve, the two ends of a water inlet of the water mixing valve are respectively fixedly communicated with the hot water cavity and the cold water cavity, the water mixing valve is an electric water mixing valve, a temperature measuring interface is arranged in the water mixing valve, and then the water outlet temperature of the water mixing valve is controlled, the water mixing valve is of an existing structure, and the details are omitted;
a liquid outlet pump and a liquid return pump are fixedly mounted on the peripheral side surface of the water tank respectively, one end of a water inlet of the liquid outlet pump is fixedly communicated with the water mixing valve, one end of a water outlet of the liquid outlet pump is fixedly communicated with the water distribution ring cavity 10 through a pipeline, one end of a liquid inlet of the liquid return pump is fixedly communicated with the drain pipe 22 through a pipeline, one end of a liquid outlet of the liquid return pump is fixedly communicated with the hot water cavity, an electric heating rod is fixedly mounted inside the hot water cavity, and the electric heating rod is used for heating liquid inside the hot water cavity;
the processing mechanism 2 comprises a machine body 7, a material door 46 is fixedly arranged on the end face of the machine body 7, the material door 46 is arranged and used for placing in and taking out the target base tube 35, the side face of the periphery of the machine body 7 is fixedly connected with the supporting frame 1, the side face of the machine body 7 is fixedly communicated with the air supply mechanism 5, the side face of the machine body 7 is fixedly communicated with an air inlet pipe 13 communicated with the air supply mechanism 5, and the other side face of the machine body 7 is fixedly communicated with a dust hood 8 communicated with the negative pressure dust collection mechanism 6;
the top surface of the machine body 7 is fixedly communicated with an exhaust pipe 9, the peripheral side surfaces of the dust hood 8, the air inlet pipe 13 and the exhaust pipe 9 are fixedly provided with valves, and the valve at the dust hood 8 is used for controlling the connection between the dust hood 8 and the negative pressure dust collection mechanism 6;
a water distribution ring cavity 10 communicated with the water circulation mechanism 3 is fixedly arranged in the machine body 7, the inner wall of the water distribution ring cavity 10 is rotatably connected with a water distribution ring seat 11, a plurality of layers of sealing rubber rings are arranged at the rotating connection position of the water distribution ring seat 11 and the water distribution ring cavity 10, and the sealing property of the rotating connection position of the water distribution ring cavity 10 and the water distribution ring seat 11 is ensured through the arrangement of the sealing rubber rings;
the inner axis position of the machine body 7 is fixedly provided with a spraying component 12 communicated with the feeding mechanism 4 and the air supply mechanism 5, the joint of the feeding mechanism 4 and the air supply mechanism 5 with the spraying component 12 is fixedly provided with a connecting panel b47, the surface of the connecting panel b47 is fixedly connected with the machine body 7, the surface of the connecting panel b47 is fixedly provided with a plurality of connecting pipes and joints, the inside of the machine body 7 is rotatably connected with a pressing and holding mechanism 14 through a bearing, the peripheral side of the machine body 7 is fixedly connected with a servo motor 15, one end of an output shaft of the servo motor 15 is in transmission connection with the pressing and holding mechanism 14 through a bevel gear, the inner wall of the machine body 7 is sequentially and fixedly provided with a first fixed gear ring 16 and a second fixed gear ring 17 from top to bottom, and the inner walls of the first fixed gear ring 16 and the second fixed gear ring 17 are both meshed with the pressing and holding mechanism 14.
The pressing and holding mechanism 14 comprises a transmission seat 18, a spinning movable disc 19, a spinning static disc 20 and a liquid collecting discharge pipe 21, the circumferential sides of the transmission seat 18, the spinning static disc 20 and the liquid collecting discharge pipe 21 are rotatably connected with the machine body 7 through bearings, the bottom of the liquid collecting discharge pipe 21 is fixedly communicated with a water discharge pipe 22, the circumferential side of the water discharge pipe 22 is also provided with a valve, one end of the water discharge pipe 22 is fixedly communicated with the water circulation mechanism 3, one end of an output shaft of the servo motor 15 is in transmission connection with the transmission seat 18 through a bevel gear, and the circumferential side of the transmission seat 18 is fixedly provided with a driven bevel gear ring matched with the servo motor 15;
a group of pressing push rods 23 distributed in a circumferential array are fixedly arranged between the opposite surfaces of the transmission seat 18 and the spinning movable disc 19, a group of linkage telescopic rods 24 distributed in a circumferential array are fixedly arranged between the opposite surfaces of the spinning movable disc 19 and the spinning static disc 20, and the linkage telescopic rods 24 are arranged to ensure that the spinning static disc 20 and the spinning movable disc 19 can synchronously rotate;
a group of positioning modules 25 distributed in a circumferential array are arranged between the opposite surfaces of the spinning movable disc 19 and the spinning static disc 20, the circumferential side surfaces of the group of positioning modules 25 are in transmission connection with the first static toothed ring 16 and the second static toothed ring 17, the top ends of the group of positioning modules 25 are fixedly communicated with the water distribution ring seat 11, and the bottom ends of the group of positioning modules 25 are fixedly communicated with the liquid collection calandria 21.
The group of positioning modules 25 respectively comprise a limiting table 26 and a placing table 27, the peripheral side surface of the limiting table 26 is fixedly connected with the spinning moving disc 19, a liquid inlet pipe 28 is fixedly installed at the axis position of the spinning moving disc 19, the peripheral side surface of the top of the liquid inlet pipe 28 is connected and communicated with a connecting pipe 29 in a sliding manner, a group of sealing rubber rings are fixedly arranged at the sliding connection position of the connecting pipe 29 and the liquid inlet pipe 28, the sealing rubber rings are arranged to ensure the sealing performance of the sliding connection position of the connecting pipe 29 and the liquid inlet pipe 28, and the top end of the connecting pipe 29 is fixedly communicated with the water distribution ring seat 11;
a temperature probe 30 and a liquid level sensor 31 are fixedly mounted in the limiting table 26 and adjacent to the liquid inlet pipe 28 respectively, the temperature probe 30 is used for monitoring liquid temperature data in the target base pipe 35 in real time, the liquid level sensor 31 is used for early warning liquid level height in the target base pipe 35, the temperature probe 30 and the liquid level sensor 31 feed back monitored real-time signals to a controller, the controller controls the water circulation speed and the internal water temperature of the water circulation mechanism 3 according to data feedback of the temperature probe 30, the liquid level sensor 31 is used for controlling whether water is drained from a valve at the drain pipe 22, and the temperature probe 30, the liquid level sensor 31 and the controller can be customized or selected according to actual requirements;
the inner wall of the limit table 26 is rotatably connected with a press table 32 through a bearing, the peripheral side surface of the press table 32 is fixedly provided with a first driven gear 33 corresponding to the position of the first fixed gear ring 16, the peripheral side surface of the first driven gear 33 is meshed with the first fixed gear ring 16, the peripheral side surface of the placing table 27 is rotatably connected with the spinning static disc 20 through a bearing, the peripheral side surface of the spinning static disc 20 is fixedly provided with a second driven gear 34 corresponding to the position of the second fixed gear ring 17, the peripheral side surface of the second driven gear 34 is meshed with the second fixed gear ring 17, the bottom surface of the press table 32 and the top surface of the placing table 27 are both fixedly provided with sealing rubber pads, a target base pipe 35 is clamped between the opposite surfaces of the press table 32 and the placing table 27 through the sealing rubber pads, the target base pipe 35 is a 304 stainless steel pipe, the target base pipe 35 is of a hollow tubular structure with openings at two ends, the axis of the target base pipe 35 is vertical to a horizontal line, a lower liquid cavity 36 is fixedly arranged inside the placing table 27, the lower liquid cavity 36 is of a funnel-shaped structure, the bottom surface of the lower liquid cavity 36 is rotatably communicated with a lower liquid pipe 37, the lower liquid pipe 37 is obliquely arranged, and one end of the lower liquid pipe 37 is fixedly communicated with the liquid collecting discharge pipe 21.
The spraying assembly 12 comprises a top seat 38 and a base seat 39, the top surface of the top seat 38 is fixedly connected with the machine body 7, the peripheral side surface of the base seat 39 is rotatably connected with the spinning static disc 20, a screw rod driving module 40 is fixedly installed between the opposite surfaces of the top seat 38 and the base seat 39, the peripheral side surface of the screw rod driving module 40 is connected with a moving table 41, and the screw rod driving module 40 is used for driving the moving table 41 to reciprocate within a set stroke, so that the omnibearing spraying on the target base tube 35 is realized through the reciprocating motion of the moving table 41;
the screw rod driving module 40 comprises a driving motor, a transmission screw rod and two guide rods which are symmetrically arranged, two ends of the two guide rods and two ends of the transmission screw rod are respectively connected with the top seat 38 and the base 39, one surface of the driving motor is fixedly connected with the top seat 38, one end of an output shaft of the driving motor is fixedly connected with the transmission screw rod, the peripheral sides of the transmission screw rod and the two guide rods are respectively connected with the moving platform 41, and the transmission screw rod and the spinning disc 19 are coaxially arranged;
a group of distance adjusting push rods 42 are fixedly installed on the back surface of the moving platform 41, one end of each distance adjusting push rod 42 is fixedly installed with a spraying platform 43, the top surface of each spraying platform 43 is connected with the moving platform 41 in a sliding mode, a plasma spray head 44 is fixedly installed on the end surface of each spraying platform 43, the axis of each plasma spray head 44 is perpendicular to the axis of the target base tube 35, the axis of each plasma spray head 44 is parallel to the axis of the dust hood 8, a plasma generator and other structures are arranged on each plasma spray head 44, and specific structural components of each plasma spray head 44 are disclosed by the existing documents and are not described again;
the back of the spraying platform 43 is fixedly provided with a connecting panel a45, the surface of the top seat 38 is fixedly provided with a wire passing hole matched with the connecting panel b47, and one surface of the connecting panel a45 is connected with the connecting panel b47 through a connecting piece.
Before the use, sufficient zirconia powder is put into the kettle body, before the base pipe is processed, firstly, the base pipe is subjected to surface sand blasting treatment, oxide layers and surface dirt on the surface of the base pipe are removed through sand blasting treatment, after the sand blasting treatment and the shaping are finished, a material door 46 is opened, the distance between a spinning movable disc 19 and a spinning static disc 20 is adjusted to be the maximum through the control of a pressing push rod 23, after the adjustment is finished, a target base pipe 35 is sequentially put into each positioning module 25, after the target base pipe 35 is put into, the base pipe to be sprayed is fully compressed through the control of the pressing push rod 23, after the compression, a compression table 32 and a sealing rubber pad at a placement table 27 seal the edge of the target base pipe 35, after the sealing, a valve at a drain pipe 22 is closed, and the water circulation mechanism 3 performs liquid filling operation to the interior of the base pipe to be sprayed through a water distribution ring cavity 10, a connecting pipe 29 and a liquid inlet pipe 28, when the liquid level inside the target base tube 35 reaches the monitoring position of the liquid level sensor 31, the water circulation mechanism 3 stops feeding liquid, wherein the initial temperature of the water circulation mechanism 3 during liquid feeding is set to be 85 ℃, after the liquid is filled, the temperature probe 30 and the liquid level sensor 31 respectively monitor the liquid temperature and the liquid level inside the target base tube 35 in real time, after the liquid is filled, the servo motor 15 drives the spinning rotor 19 and the spinning stator 20 to synchronously and slowly move circumferentially, after the spinning rotor 19 and the spinning stator 20 rotate, the target base tube 35 rotates, during the movement of the spinning stator 20, the plasma nozzle 44 is ignited, meanwhile, the gas feeding mechanism 5 fills inert gas into the machine body 7, when the inert gas is filled, the dust hood 8 is in a closed state, the exhaust pipe 9 is communicated with an external exhaust pipe 9, after the inert gas is filled for a designated time, the exhaust pipe 9 and the gas inlet pipe 13 are synchronously closed, after 20min, feeding mechanism 4 send powder for in the shower nozzle, then carry out the spraying operation, the spraying in-process, water circulation mechanism 3 passes through temperature probe 30 and level sensor 31's data feedback, make the inside liquid level height of target parent tube 35 keep invariable with liquid temperature, after the spraying finishes, open blast pipe 9, water circulation mechanism 3 makes the inside liquid temperature of target parent tube 35 reduce to about 20 ℃ gradually, then realize the cooling to spraying back parent tube, in the cooling process, suction hood 8 and negative pressure dust absorption mechanism 6 open, and spinning movable disk 19 and spinning static dish 20 continue the circular motion, after cooling and dust absorption finish, open bin gate 46, then can carry out the material operation of getting of spraying back parent tube.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (9)
1. The utility model provides a rotatory target apparatus for producing of electrically conductive zirconia, includes braced frame (1), its characterized in that:
a processing mechanism (2), a water circulation mechanism (3), a feeding mechanism (4) and an air supply mechanism (5) are respectively and fixedly installed between the inner surfaces of the supporting frames (1), a negative pressure dust collection mechanism (6) is fixedly installed on the side surface of each supporting frame (1), and one end of each of the water circulation mechanism (3), the feeding mechanism (4), the air supply mechanism (5) and the negative pressure dust collection mechanism (6) is communicated with the processing mechanism (2);
the processing mechanism (2) comprises a machine body (7), the peripheral side surface of the machine body (7) is fixedly connected with a supporting frame (1), the side surface of the machine body (7) is fixedly communicated with an air supply mechanism (5), the other side surface of the machine body (7) is fixedly communicated with a dust hood (8) communicated with a negative pressure dust collection mechanism (6), the top surface of the machine body (7) is fixedly communicated with an exhaust pipe (9), a water distribution ring cavity (10) communicated with a water circulation mechanism (3) is fixedly arranged in the machine body (7), the inner wall of the water distribution ring cavity (10) is rotatably connected with a water distribution ring seat (11), a spraying component (12) communicated with a feeding mechanism (4) and the air supply mechanism (5) is fixedly arranged on the inner axis position of the machine body (7), a pressing and holding mechanism (14) is rotatably connected in the machine body (7) through a bearing, and a servo motor (15) is fixedly connected to the peripheral side surface of the machine, one end of an output shaft of the servo motor (15) is in transmission connection with the pressing and holding mechanism (14) through a bevel gear, a first fixed gear ring (16) and a second fixed gear ring (17) are sequentially and fixedly installed on the inner wall of the machine body (7) from top to bottom, and the inner walls of the first fixed gear ring (16) and the second fixed gear ring (17) are meshed with the pressing and holding mechanism (14);
mechanism (14) is held in pressure includes transmission seat (18), spinning driving disk (19), the static dish of spinning (20) and liquid collection calandria (21), transmission seat (18), the static dish of spinning (20) and liquid collection calandria (21) week side all rotate through bearing and organism (7) and be connected, the fixed intercommunication in liquid collection calandria (21) bottom has drain pipe (22), drain pipe (22) one end and water circulation mechanism (3) fixed intercommunication, the one end of servo motor (15) output shaft is passed through bevel gear and is connected with transmission seat (18) transmission, fixed mounting has a set of pressure applying push rod (23) that are circumference array distribution between transmission seat (18) and the relative surface of driving disk (19), fixed mounting has a set of linkage telescopic link (24) that are circumference array distribution between driving disk spinning (19) and the static dish of spinning (20) relative surface, it is a set of circumference array distribution to install a set of being between the relative surface of spinning driving disk (19) and the static dish of spinning (20), it is a set of circumference array distribution to be a set of circumference array (23) to be the static dish of spinning The locating module (25) that distributes, a set of locating module (25) week side all is connected with first quiet ring gear (16) and the transmission of second quiet ring gear (17), and is a set of locating module (25) top all with water distribution ring seat (11) fixed intercommunication, a set of locating module (25) bottom all with the fixed intercommunication of album liquid calandria (21).
2. The conductive zirconia rotary target production device according to claim 1, wherein one set of the positioning modules (25) comprises a limiting table (26) and a placing table (27), the peripheral side surface of the limiting table (26) is fixedly connected with a spinning disc (19), a liquid inlet pipe (28) is fixedly installed at the axis position of the spinning disc (19), the peripheral side surface of the top of the liquid inlet pipe (28) is slidably communicated with a connecting pipe (29), the top end of the connecting pipe (29) is fixedly communicated with a water distribution ring seat (11), a temperature probe (30) and a liquid level sensor (31) are respectively and fixedly installed inside the limiting table (26) and at the position adjacent to the liquid inlet pipe (28), the inner wall of the limiting table (26) is rotatably connected with a pressing table (32) through a bearing, and a first driven gear (33) is fixedly installed at the peripheral side surface of the pressing table (32) and at the position corresponding to the first fixed gear ring (16), first driven gear (33) week side and first quiet ring gear (16) meshing, place platform (27) week side and rotate with static dish of spinning (20) through the bearing and be connected, the static dish of spinning (20) week side and the position fixed mounting who corresponds the quiet ring gear of second (17) have second driven gear (34), second driven gear (34) week side and the quiet ring gear of second (17) meshing, press platform (32) bottom surface and place the equal fixed mounting of platform (27) top surface have sealed cushion, it has target parent tube (35) through sealed cushion joint to press platform (32) and place between the platform (27) relative surface, place platform (27) inside fixed down liquid chamber (36) of having seted up, lower liquid chamber (36) bottom surface rotates the intercommunication and has down liquid pipe (37), down liquid pipe (37) one end and the fixed intercommunication of collection liquid calandria (21).
3. The conductive zirconia rotary target production device according to claim 2, wherein a group of sealing rubber rings is fixedly arranged at the sliding connection position of the connecting pipe (29) and the liquid inlet pipe (28), the liquid outlet pipe (37) is obliquely arranged, the target base pipe (35) is a hollow tubular structure with two open ends, and the axis of the target base pipe (35) is perpendicular to the horizontal line.
4. The conductive zirconia rotary target production device according to claim 1, wherein a connection panel b (47) is fixedly arranged at the connection position of the feeding mechanism (4) and the air feeding mechanism (5) and the spraying component (12), and one surface of the connection panel b (47) is fixedly connected with the machine body (7).
5. The conductive zirconia rotary target production device according to claim 1, wherein the spraying assembly (12) comprises a top seat (38) and a base (39), the top surface of the top seat (38) is fixedly connected with the machine body (7), the circumferential side surface of the base (39) is rotatably connected with the spinning static disc (20), a lead screw driving module (40) is fixedly installed between the opposite surfaces of the top seat (38) and the base (39), the circumferential side surface of the lead screw driving module (40) is connected with a moving table (41), the back surface of the moving table (41) is fixedly provided with a group of distance adjusting push rods (42), one end of the group of distance adjusting push rods (42) is fixedly provided with a spraying table (43), the top surface of the spraying table (43) is slidably connected with the moving table (41), the end surface of the spraying table (43) is fixedly provided with a plasma nozzle (44), the back surface of the spraying table (43) is fixedly provided with a connecting panel a (45), one surface of the connecting panel a (45) is connected with the connecting panel b (47) through a connecting piece.
6. The conductive zirconia rotary target production device according to claim 5, wherein the axis of the plasma nozzle (44) is perpendicular to the axis of the target base tube (35), the axis of the plasma nozzle (44) is parallel to the axis of the dust hood (8), and the surface of the top base (38) is fixedly provided with a wire through hole matched with the connecting panel b (47).
7. The conductive zirconia rotary target production device according to claim 5, wherein the lead screw driving module (40) comprises a driving motor, a driving screw and two guide rods symmetrically arranged, two ends of the two guide rods and two ends of the driving screw are respectively connected with the top seat (38) and the base (39), one surface of the driving motor is fixedly connected with the top seat (38), one end of an output shaft of the driving motor is fixedly connected with the driving screw, the peripheral sides of the driving screw and the two guide rods are respectively connected with the moving platform (41), and the driving screw and the spinning disk (19) are coaxially arranged.
8. The conductive zirconia rotary target production device according to claim 1, wherein a material door (46) is fixedly arranged on an end face of the machine body (7), an air inlet pipe (13) communicated with the air supply mechanism (5) is fixedly communicated with a side face of the machine body (7), valves are fixedly arranged on peripheral side faces of the dust hood (8), the air inlet pipe (13) and the air outlet pipe (9), a group of universal casters is arranged on a bottom face of the support frame (1), and a central control panel is fixedly arranged on an end face of the support frame (1).
9. The apparatus for producing a conductive zirconia rotary target according to claim 1, the water circulation mechanism (3) comprises a water tank, a hot water cavity and a cold water cavity which are mutually isolated are arranged in the water tank, a water mixing valve is fixedly arranged on the bottom surface of the water tank, two ends of a water inlet of the water mixing valve are respectively and fixedly communicated with the hot water cavity and the cold water cavity, a liquid outlet pump and a liquid return pump are respectively and fixedly arranged on the peripheral side surface of the water tank, one end of a water inlet of the liquid outlet pump is fixedly communicated with a water mixing valve, one end of the water outlet of the liquid outlet pump is fixedly communicated with the water distribution ring cavity (10) through a pipeline, one end of the liquid inlet of the liquid return pump is fixedly communicated with a drain pipe (22) through a pipeline, one end of a liquid outlet of the liquid return pump is fixedly communicated with the hot water cavity, an electric heating rod is fixedly mounted inside the hot water cavity, and liquid level probes are fixedly mounted inside the hot water cavity and the cold water cavity.
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| CN202110798543.2A CN113249703B (en) | 2021-07-15 | 2021-07-15 | Rotatory target apparatus for producing of electrically conductive zirconia |
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| CN202110798543.2A CN113249703B (en) | 2021-07-15 | 2021-07-15 | Rotatory target apparatus for producing of electrically conductive zirconia |
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| CN113249703B true CN113249703B (en) | 2021-09-14 |
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| CN114262861A (en) * | 2021-12-23 | 2022-04-01 | 江苏迪丞光电材料有限公司 | Preparation method of yttrium-stabilized zirconia rotary target and stainless steel tube fixing equipment |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60181270A (en) * | 1984-02-27 | 1985-09-14 | Matsushita Electric Ind Co Ltd | Production of target for sputtering |
| US20040200418A1 (en) * | 2003-01-03 | 2004-10-14 | Klaus Hartig | Plasma spray systems and methods of uniformly coating rotary cylindrical targets |
| JP2012107277A (en) * | 2010-11-16 | 2012-06-07 | Tosoh Corp | Method for manufacturing zinc oxide cylinder target |
| CN104831244A (en) * | 2015-04-17 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Aluminum tantalum rotating target material, and method used for preparing aluminum tantalum rotating target material via controlled atmosphere cold spraying |
| CN208261071U (en) * | 2018-01-04 | 2018-12-21 | 西安创亿能源科技有限公司 | A kind of device for target manufacture |
| CN209222489U (en) * | 2018-09-19 | 2019-08-09 | 福建省创飞新材料科技有限公司 | A kind of portable is used for the spray equipment of metal targets production and processing |
| CN110539190A (en) * | 2019-08-23 | 2019-12-06 | 昆山金力达机械科技有限公司 | synchronous machining positioning clamp for movable and fixed scroll plates and machining method of synchronous machining positioning clamp |
| CN209997842U (en) * | 2019-03-11 | 2020-01-31 | 广东基泰智能设备有限公司 | direct-drive rotary spraying device |
| CN210711719U (en) * | 2019-09-29 | 2020-06-09 | 深圳恒泰克科技有限公司 | Rotatory target preparation facilities |
-
2021
- 2021-07-15 CN CN202110798543.2A patent/CN113249703B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60181270A (en) * | 1984-02-27 | 1985-09-14 | Matsushita Electric Ind Co Ltd | Production of target for sputtering |
| US20040200418A1 (en) * | 2003-01-03 | 2004-10-14 | Klaus Hartig | Plasma spray systems and methods of uniformly coating rotary cylindrical targets |
| JP2012107277A (en) * | 2010-11-16 | 2012-06-07 | Tosoh Corp | Method for manufacturing zinc oxide cylinder target |
| CN104831244A (en) * | 2015-04-17 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Aluminum tantalum rotating target material, and method used for preparing aluminum tantalum rotating target material via controlled atmosphere cold spraying |
| CN208261071U (en) * | 2018-01-04 | 2018-12-21 | 西安创亿能源科技有限公司 | A kind of device for target manufacture |
| CN209222489U (en) * | 2018-09-19 | 2019-08-09 | 福建省创飞新材料科技有限公司 | A kind of portable is used for the spray equipment of metal targets production and processing |
| CN209997842U (en) * | 2019-03-11 | 2020-01-31 | 广东基泰智能设备有限公司 | direct-drive rotary spraying device |
| CN110539190A (en) * | 2019-08-23 | 2019-12-06 | 昆山金力达机械科技有限公司 | synchronous machining positioning clamp for movable and fixed scroll plates and machining method of synchronous machining positioning clamp |
| CN210711719U (en) * | 2019-09-29 | 2020-06-09 | 深圳恒泰克科技有限公司 | Rotatory target preparation facilities |
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