CN113203503B - Touch sensor, sliding sensor, working method of touch sensor and double-integrated sensor - Google Patents

Touch sensor, sliding sensor, working method of touch sensor and double-integrated sensor Download PDF

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Publication number
CN113203503B
CN113203503B CN202110385005.0A CN202110385005A CN113203503B CN 113203503 B CN113203503 B CN 113203503B CN 202110385005 A CN202110385005 A CN 202110385005A CN 113203503 B CN113203503 B CN 113203503B
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layer
sensor
electrode
sliding
slip
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CN113203503A (en
Inventor
陈涛
黄志颖
倪克健
符俊臣
田显东
田玉祥
孙立宁
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Suzhou University
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Suzhou University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B32B27/308—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The application discloses touch sensor, smooth sense sensor and operating method, two integrated sensors thereof, the design main points lie in, include: a first layer: polymethyl methacrylate plate; a second layer, namely a copper layer which has the functions of an electrode and a friction layer; third layer: a polydimethylsiloxane friction layer; fourth layer: a copper layer; fifth layer: polymethyl methacrylate plate; a spring; the lower surface of the first layer is electroplated with a second layer; a fourth layer is electroplated on the upper surface of the fifth layer, and a third layer is coated on the upper surface of the fourth layer; the first layer and the fifth layer are connected together through a spring; in the initial condition, the second layer and the third layer are provided with an air gap before each other, so that the deformation is recovered after the contact. The application aims to provide a touch sensor, a sliding sense sensor, a working method of the touch sensor and the sliding sense sensor, and a double-integrated sensor, which can provide control assistance for a transfer robot.

Description

Touch sensor, sliding sensor, working method of touch sensor and double-integrated sensor
Technical Field
The present application relates to the field of sensors, and more particularly, to a tactile sensor, a slip sensor, a method of operating the same, and a dual integrated sensor.
Background
The intellectualization of mechanical devices (e.g. flexible wearable devices, smart robots, medical rehabilitation robots) necessitates the presence of sensor devices for support, in particular tactile sensors and slip sensors, which are increasingly in demand.
For a tactile sensor:
prior art 1: the invention provides a piezoelectric flexible pressure sensor prepared from an all-organic material and a preparation method thereof, and the sensor comprises an organic electrode fiber film and an organic piezoelectric fiber film, wherein the organic electrode fiber film and the organic piezoelectric fiber film are bonded through hot melt non-woven fabrics to form an organic electrode fiber film-hot melt non-woven fabrics-organic piezoelectric fiber film-hot melt non-woven fabrics-organic electrode fiber film structure.
Prior art 2: CN112229553a proposes a flexible tactile sensor based on light attenuation, an array and a method for manufacturing the same, the flexible tactile sensor comprising: the device comprises a laser light source, a first optical fiber, a flexible dome, a second optical fiber, a photoelectric sensor and a flexible optical fiber coupler, wherein the flexible dome is adhered to the surface of a soft object through the flexible optical fiber coupler, one ends of the first optical fiber and the second optical fiber are aligned with the flexible dome, the other ends of the first optical fiber and the second optical fiber are respectively connected with the laser light source and the photoelectric sensor, laser generated by the laser light source sequentially passes through the first optical fiber for transmission, the flexible dome for reflection and the second optical fiber for transmission, then reaches the photoelectric sensor, the photoelectric sensor is used for calculating the light intensity of the received laser, and the light intensity is determined by the force born on the surface of the soft object.
As is clear from this, both of the above-described tactile sensors have been developed for specific use equipment, and are not suitable for tactile sensors required for a transfer robot (particularly, a pole robot).
For a slip sensor:
prior art 3: the Chongqing green intelligent technology institute of China academy of sciences provides a touch/slip sensor and a preparation method thereof, electronic equipment, braille recognition equipment and a robot thereof in CN110031135A, the touch/slip sensor comprises two electrode layers which are oppositely arranged, and a dielectric layer positioned between the two electrode layers, wherein a micro-nano structure is arranged on one side of at least one electrode layer, which corresponds to the dielectric layer, and the dielectric layer and the electrode layer with the micro-nano structure form a dielectric layer/electrode conformal integrated structure in a conformal way, so that the integration level and the stability during the period are improved, and the graphene nano wall with the micro-nano structure is adopted on the electrode layer, so that the sensitivity and the measuring range of the sensor are improved.
However, the slip sensor cannot effectively sense the direction and magnitude of the slip.
Disclosure of Invention
The object of the present application is to provide a tactile sensor, a slip sensor, a working method thereof and a double-integrated sensor, which address the above-mentioned drawbacks of the prior art.
The technical scheme of the application is as follows:
a tactile sensor, comprising:
a first layer: polymethyl methacrylate plate;
a second layer, namely a copper layer which has the functions of an electrode and a friction layer;
third layer: a polydimethylsiloxane friction layer;
fourth layer: a copper layer;
fifth layer: polymethyl methacrylate plate;
a spring;
the lower surface of the first layer is electroplated with a second layer;
a fourth layer is electroplated on the upper surface of the fifth layer, and a third layer is coated on the upper surface of the fourth layer;
the first layer and the fifth layer are connected together through a spring;
in the initial condition, the second layer and the third layer are provided with an air gap before each other, so that the deformation is recovered after the contact.
Further, the number of springs is 4 or more.
Further, a fine structure is etched on the upper surface of the third layer.
A slip sensor, comprising:
a first layer: the negative friction electrode is made of a polydimethylsiloxane silica gel sliding module;
a second layer: a positive friction electrode as a sliding displacement vector detection electrode;
the first layer is slidably disposed on an upper side of the second layer.
Further, the second layer includes: the device comprises a base and four groups of electrode groups, wherein 1 group of electrode group is arranged on four directions of the lower part of the base;
each electrode group comprises: the first electrode, the second electrode and the third electrode correspond to three grades of sliding sense detection, and the sliding displacement can be judged according to three grading electric signals.
Further, the bottom of the first layer is bowl-shaped, and the base is bowl-shaped.
A working method of a slip sensor comprises the following steps: when the first layer deflects to contact or separate from the second layer, a corresponding electrical signal is generated.
A working method of a slip sensor comprises the following steps: when sliding is generated, the first layer is firstly contacted with the first electrode of the second layer, and an electric signal is generated; with the increase of the sliding displacement, the sliding displacement is sequentially contacted with the second electrode and the third electrode to generate corresponding electric signals.
Further, the sliding sense sensor can accurately judge the sliding direction, wherein E1 represents north, E2 represents east, E3 represents south and E4 represents west; the northeast direction is denoted by E1+E2, the southeast direction is denoted by E1+E3, the southwest direction is denoted by E3+E4, and the northwest direction is denoted by E1+E4; when the first layer slides in any direction, the corresponding electrode generates a corresponding electric signal.
A touch-slide sense double-integrated sensor comprises a touch sensor and a slide sense sensor;
a part of the area of the fifth layer of the touch sensor is electroplated with the fourth layer of the touch sensor, and the part of the area is not electroplated with the fourth layer of the touch sensor;
the second layer of the slip sensor is disposed on an area of the fifth layer of the tactile sensor that is not the fourth layer of the electroplated tactile sensor.
The beneficial effects of this application lie in:
first, a first innovation of the present application is to propose a tactile sensor; when the third layer 1-3 is brought into contact with/separated from the second layer 1-2, a corresponding triboelectric signal is generated.
Second, a second innovation of the present application is to propose a slip sensor; when the first layer 2-1 deflects to be contacted with or separated from the second layer 2-2 (namely, positive and negative electrodes are contacted with or separated from each other), corresponding electric signals are generated; when a slip is generated, the first layer 2-1 is first brought into contact with the first electrode 3-1 and an electrical signal is generated; with the increase of the sliding displacement, the sliding displacement is sequentially contacted with the second electrode 8-2 and the third electrode 8-3 to generate corresponding electric signals. The bottom 2-1 of the first layer is bowl-shaped; the base is also bowl-shaped. The slip sensor 2 can accurately determine the direction in which the slip occurs, and as shown in fig. 4, E1 indicates north, E2 indicates east, E3 indicates south, and E4 indicates west. The northeast direction is denoted by E1+E2, the southeast direction is denoted by E1+E3, the southwest direction is denoted by E3+E4, and the northwest direction is denoted by E1+E4. When the first layer 2-1 slides in each direction, the corresponding electrode generates corresponding electric signals
Third, a third innovation of the present application is to propose a haptic-slide dual integrated sensor, which solves the problem of how to integrate the two sensors.
Drawings
The present application is described in further detail below in conjunction with the embodiments in the drawings, but is not to be construed as limiting the present application in any way.
FIG. 1 is a schematic representation of a three-dimensional design of a haptic-slide dual integrated sensor.
FIG. 2 is a structural design cross-section of a haptic-slide dual integrated sensor.
Fig. 3 is a schematic diagram of the operation of the slip sensor.
FIG. 4 is a schematic diagram of an eight-way slide sensor.
Detailed Description
As shown in fig. 1-2:
the tactile sensor 1 includes:
first layer 1-1: polymethyl methacrylate plate;
a second layer 1-2, a copper layer, which has the functions of both an electrode and a friction layer;
third layer 1-3: a polydimethylsiloxane friction layer;
fourth layer 1-4: a copper layer;
fifth layers 1-5: polymethyl methacrylate plate;
1-6 parts of springs;
the lower surface of the first layer 1-1 is electroplated with a second layer 1-2;
the upper surface of the fifth layer 1-5 is electroplated with a fourth layer 1-4, and the upper surface of the fourth layer 1-4 is coated with a third layer 1-3;
the first layer and the fifth layer are connected together through more than 4 springs 1-6;
under normal conditions, the second layer 1-2 is provided with a layer of air gap in front of the third layer 1-3, so that deformation can be recovered after contact;
in order to improve the signal output intensity and increase the friction area during contact, a microstructure is etched on the surface of the third layer 1-3.
The operating method of the touch sensor is as follows:
when the third layer 1-3 is brought into contact with/separated from the second layer 1-2, a corresponding triboelectric signal is generated.
The slip sensor 2 includes:
first layer 2-1: negative friction electrode (the material adopts a polydimethylsiloxane silica gel sliding module);
second layer 2-2: positive friction electrode (sliding displacement vector detection electrode).
The first layer 2-1 is slidably arranged on the upper side of the second layer 2-2.
Wherein the second layer 2-2 comprises: the device comprises a base and four groups of electrode groups, wherein 1 group of electrode group is arranged on four directions of the lower part of the base;
each electrode group comprises: the first electrode 3-1, the second electrode 3-2 and the third electrode 3-3 correspond to three levels of the slide sense detection, and the sliding displacement can be judged according to the three levels of the electrical signals.
The working method of the slip sensor 2 is as follows:
when the first layer 2-1 deflects to be contacted with or separated from the second layer 2-2 (namely, positive and negative electrodes are contacted with or separated from each other), corresponding electric signals are generated;
when a slip is generated, the first layer 2-1 is first brought into contact with the first electrode 3-1 and an electrical signal is generated; with the increase of the sliding displacement, the sliding displacement is sequentially contacted with the second electrode 8-2 and the third electrode 8-3 to generate corresponding electric signals.
The bottom 2-1 of the first layer is bowl-shaped; the base is also bowl-shaped.
The slip sensor 2 can accurately determine the direction in which the slip occurs, and as shown in fig. 4, E1 indicates north, E2 indicates east, E3 indicates south, and E4 indicates west. The northeast direction is denoted by E1+E2, the southeast direction is denoted by E1+E3, the southwest direction is denoted by E3+E4, and the northwest direction is denoted by E1+E4. When the first layer 2-1 slides in each direction, the corresponding electrode generates a corresponding electrical signal.
A touch-slide sense double-integrated sensor, which comprises a touch sensor 1 and a slide sense sensor 2;
a part of the area of the fifth layer 1-5 of the tactile sensor 1 is electroplated with the fourth layer 1-4 of the tactile sensor 1, and the other part of the area is not electroplated with the fourth layer 1-4 of the tactile sensor 1;
the second layer 2-2 of the slip sensor 2 is disposed on the area of the fourth layer 1-4 of the electroless touch sensor 1 of the fifth layer 1-5 of the touch sensor 1.
The above examples are preferred embodiments of the present application, and are merely for convenience of explanation, not limitation, and any person having ordinary skill in the art shall make local changes or modifications by using the technical disclosure of the present application without departing from the technical features of the present application, and all the embodiments still fall within the scope of the technical features of the present application.

Claims (7)

1. A slip sensor, comprising:
a first layer: the negative friction electrode is made of a polydimethylsiloxane silica gel sliding module;
a second layer: a positive friction electrode as a sliding displacement vector detection electrode;
the first layer is slidably disposed on an upper side of the second layer.
2. The slip sensor of claim 1, wherein the second layer comprises: the device comprises a base and four groups of electrode groups, wherein 1 group of electrode group is arranged on four directions of the lower part of the base;
each electrode group comprises: the first electrode, the second electrode and the third electrode correspond to three grades of sliding sense detection, and the sliding displacement can be judged according to three grading electric signals.
3. A slip sensor according to claim 2, wherein the bottom of the first layer is bowl-shaped and the base is bowl-shaped.
4. A working method of a slip sensor is characterized in that: the slip sensor according to claim 1; when the first layer deflects to contact or separate from the second layer, a corresponding electrical signal is generated.
5. A working method of a slip sensor is characterized in that: the slip sensor according to claim 2; when sliding is generated, the first layer is firstly contacted with the first electrode of the second layer, and an electric signal is generated; with the increase of the sliding displacement, the sliding displacement is sequentially contacted with the second electrode and the third electrode to generate corresponding electric signals.
6. A method of operating a slip sensor as claimed in claim 5, wherein: the sliding sense sensor can accurately judge the sliding direction, wherein E1 represents north, E2 represents east, E3 represents south and E4 represents west; the northeast direction is denoted by E1+E2, the southeast direction is denoted by E1+E3, the southwest direction is denoted by E3+E4, and the northwest direction is denoted by E1+E4; when the first layer slides in any direction, the corresponding electrode generates a corresponding electric signal.
7. A haptic-slide dual integrated sensor, comprising: a tactile sensor, a slip sensor as claimed in any one of claims 1 to 3;
the touch sensor comprises:
a first layer: polymethyl methacrylate plate;
a second layer, namely a copper layer which has the functions of an electrode and a friction layer;
third layer: a polydimethylsiloxane friction layer; fourth layer: a copper layer;
fifth layer: polymethyl methacrylate plate;
a spring;
the lower surface of the first layer is electroplated with a second layer;
a fourth layer is electroplated on the upper surface of the fifth layer, and a third layer is coated on the upper surface of the fourth layer;
the first layer and the fifth layer are connected together through a spring;
under the initial condition, a layer of air gap is arranged in front of the second layer and the third layer, so that deformation can be recovered after contact;
a part of the area of the fifth layer of the touch sensor is electroplated with the fourth layer of the touch sensor, and the part of the area is not electroplated with the fourth layer of the touch sensor;
the second layer of the slip sensor is disposed on an area of the fifth layer of the tactile sensor that is not the fourth layer of the electroplated tactile sensor.
CN202110385005.0A 2021-04-09 2021-04-09 Touch sensor, sliding sensor, working method of touch sensor and double-integrated sensor Active CN113203503B (en)

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DE10334458A1 (en) * 2003-07-29 2005-03-03 Weiss, Karsten Spatial force profile measurement unit for tactile gripping devices has slip resistant force transducer array in exchangeable mount
CN105865667B (en) * 2016-05-19 2018-06-01 北京印刷学院 Condenser type pliable pressure sensor based on micro-structural dielectric layer and preparation method thereof
CN109883584B (en) * 2017-12-06 2022-05-20 中国科学院苏州纳米技术与纳米仿生研究所 Flexible bionic touch sensor based on microstructure and preparation method thereof
CN108036879B (en) * 2017-12-15 2020-02-18 广州智能装备研究院有限公司 Capacitive flexible touch sensor and manufacturing method thereof
CN110031135B (en) * 2019-05-20 2021-07-09 中国科学院重庆绿色智能技术研究院 Tactile/tactile sensor, method for manufacturing tactile/tactile sensor, electronic device, braille recognition device, and robot
CN110601586A (en) * 2019-09-06 2019-12-20 华中科技大学 Friction nanometer power generation sensor based on negative Poisson ratio performance
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CN112326074B (en) * 2020-06-17 2022-06-21 中国科学院深圳先进技术研究院 Touch sensor, preparation method and intelligent device comprising touch sensor

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