CN113167507A - Refrigeration control system and cooling system - Google Patents

Refrigeration control system and cooling system Download PDF

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Publication number
CN113167507A
CN113167507A CN201980079308.0A CN201980079308A CN113167507A CN 113167507 A CN113167507 A CN 113167507A CN 201980079308 A CN201980079308 A CN 201980079308A CN 113167507 A CN113167507 A CN 113167507A
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China
Prior art keywords
refrigerant
cooling
unit
temperature
switching valve
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Granted
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CN201980079308.0A
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Chinese (zh)
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CN113167507B (en
Inventor
佐藤敏美
清水和重
深见泰宏
苅谷知行
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ATS Japan Corp
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ATS Japan Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
    • F25B25/005—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00 using primary and secondary systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B1/00—Compression machines, plants or systems with non-reversible cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B1/00—Compression machines, plants or systems with non-reversible cycle
    • F25B1/10—Compression machines, plants or systems with non-reversible cycle with multi-stage compression
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/40—Fluid line arrangements
    • F25B41/42—Arrangements for diverging or converging flows, e.g. branch lines or junctions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B43/00—Arrangements for separating or purifying gases or liquids; Arrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B45/00—Arrangements for charging or discharging refrigerant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/008—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant being carbon dioxide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/06—Compression machines, plants or systems characterised by the refrigerant being carbon dioxide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/06—Compression machines, plants or systems characterised by the refrigerant being carbon dioxide
    • F25B2309/061—Compression machines, plants or systems characterised by the refrigerant being carbon dioxide with cycle highest pressure above the supercritical pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/13—Economisers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/16—Receivers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/24—Storage receiver heat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/02—Compressor control
    • F25B2600/021—Inverters therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/05—Refrigerant levels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2501—Bypass valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2507—Flow-diverting valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2519—On-off valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/19—Pressures
    • F25B2700/193—Pressures of the compressor
    • F25B2700/1931—Discharge pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/19—Pressures
    • F25B2700/193—Pressures of the compressor
    • F25B2700/1933—Suction pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2115—Temperatures of a compressor or the drive means therefor
    • F25B2700/21151—Temperatures of a compressor or the drive means therefor at the suction side of the compressor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2117—Temperatures of an evaporator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/022—Compressor control arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

A refrigeration control system and a cooling system capable of maintaining usability. The refrigeration control system for controlling the flow of the first refrigerant through the first circulation passage 61 connected to the compression unit 20 includes: an accumulator unit 30 for storing the first refrigerant; a first branch pipe 71a connected to the outlet side pipe 62 a; a second branched pipe 71b connected to the inlet side pipe 62 b; a first switching valve 72b provided in the first branch pipe 71a and capable of switching whether or not to flow the first refrigerant to the storage unit 30 in the outlet side pipe 62 a; a second branch pipe 71b capable of switching whether or not to flow the first refrigerant in the storage unit 30 to the inlet side pipe 62 b; and an on-off control unit controlling on-off states of the first and second on-off valves 72a and 72b according to a predetermined method based on the set temperature of the second refrigerant.

Description

Refrigeration control system and cooling system
Technical Field
The invention relates to a refrigeration control system and a cooling system.
Background
Generally, an apparatus for cooling a cooling object has been proposed. For example, the apparatus of patent document 1 includes a high-source refrigeration cycle in which a high-source-side compressor, a high-source-side condenser, a high-source-side throttling device, and a high-source-side evaporator are connected by pipes and circulates a refrigerant, a cycle in which a low-source refrigeration cycle in which a low-source-side compressor, an auxiliary radiator, a low-source-side condenser, a low-source-side throttling device, and a low-source-side evaporator are connected by pipes and circulates a refrigerant, and a cascade capacitor evaporator and a low-source-side condenser obtained by coupling the high-source side to perform heat exchange between the refrigerants respectively passing therethrough.
Further, the intake-side pipe of the low-source-side compressor among the pipes of the low-source refrigeration cycle is connected to the expansion tank by a solenoid valve, and by opening the solenoid valve, the pressure in the low-source refrigeration cycle can be adjusted so as not to be equal to or higher than the set pressure, and the refrigerant in the low-source refrigeration cycle can be caused to flow into the expansion tank. With this configuration, it is possible to perform heat exchange between the cooling target provided in the vicinity of the low-source-side evaporator of the low-source refrigeration cycle and the refrigerant in the low-source refrigeration cycle, and cool the cooling target.
Citation list:
patent document 1: international publication No. 2014/181399.
However, in the device of patent document 1, since the expansion tank is connected to the intake-side pipe of the low-source-side compressor as described above, the pressure (the amount of refrigerant) in the low-source refrigeration cycle cannot be effectively adjusted, and for example, when the temperature range of the cooling target is wide, the amount of refrigerant required in the low-source refrigeration cycle greatly varies. As for the flows of the refrigerant in the intake side tube and the expansion tank of the low source side compressor, as described above, the refrigerant in the intake side tube of the low source side compressor flows only to the expansion tank. Therefore, for example, when a refrigerant that is likely to become saturated vapor at room temperature is used in the intake-side tube of the low-source-side compressor, the ambient temperature is set, or the like, saturated vapor or condensed water accumulates in the expansion tank. Leading to concern that the function of the low-source refrigeration cycle may deteriorate. From the above, there is room for improvement from the viewpoint of usability of the apparatus.
The present invention has been made in view of the above problems, and it is an object of the present invention to provide a refrigeration control system and a cooling system capable of maintaining usability.
Disclosure of Invention
Means for solving the problems:
in order to solve the above problems and achieve the above object, a refrigeration control system according to claim 1 is a refrigeration control system for controlling a refrigerant flowing through a circulation passage connected to a compression element and circulating the refrigerant to perform heat exchange between a cooling target and the refrigerant compressed by the compression element, comprising: a storage area for storing a refrigerant; a first pipe connected to an outlet side pipe constituting the circulation passage, which is located at an outlet side of the compression member, and allows the refrigerant in the outlet side pipe to flow to the storage member through the first pipe; a second pipe connected to the inlet-side pipe constituting the circulation passage, which is located at an inlet side of the compression member, and through which the refrigerant in the storage member flows to the inlet-side pipe; a first switching valve provided in the first pipe and capable of switching whether or not to flow the refrigerant in the outlet side pipe to the storage member; a second switching valve provided in the second pipe and capable of switching whether or not to flow the refrigerant in the storage member to the inlet side pipe; and a switching control part for controlling the switching states of the first and second switching valves based on a set temperature of the cooling object set according to a predetermined method.
The refrigeration control system according to claim 2, which is the refrigeration control system according to claim 1, wherein the switching control member opens the first switching valve and closes the second switching valve when the set temperature of the cooling target is higher than the critical temperature of the refrigerant; and when the set temperature of the cooling object is higher than the critical temperature of the refrigerant, the first switch valve is closed and the second switch valve is opened. The set temperature of the cooling target is lower than the critical temperature of the refrigerant.
The refrigeration control system according to claim 3, which is the refrigeration control system according to claim 2, wherein the switching control part opens the first switching valve and closes the second switching valve in any one of a case where an operating pressure value of the compression member obtained according to a predetermined method is greater than a threshold value, or a case where a set temperature of the cooling object is higher than a critical temperature of the refrigerant; and the switching control member closes the first switching valve and opens the second switching valve in any one of a case where an operating pressure value of the compression member is less than a threshold value or a case where a set temperature of the cooling object is lower than a critical temperature of the refrigerant.
The refrigeration control system according to claim 4, which is the refrigeration control system according to any one of claims 1 to 3, further comprising: a temperature adjusting member that adjusts a temperature of the refrigerant in the storage member.
The refrigeration control system according to claim 5, which is the refrigeration control system according to any one of claims 1 to 4, wherein the refrigerant is carbon dioxide.
The refrigeration control system according to claim 6, which is the refrigeration control system according to any one of claims 1 to 5, wherein the cooling target is a cooling refrigerant of the semiconductor manufacturing system.
The cooling system for cooling a cooling object using a refrigerant according to claim 7, which is a cooling system for cooling a cooling object using a refrigerant, comprising a compressing member for compressing the refrigerant; a circulation passage connected to the compression member, including a cooling object side tube on a cooling object side, and circulating the refrigerant so as to perform heat exchange between the cooling object and the refrigerant compressed by the compression member; the refrigeration control system according to any one of claims 1 to 6; and a heat exchanging member disposed in the cooling target side tube and exchanging heat between the cooling target and the refrigerant in the cooling target side tube.
The cooling system of claim 8, which is the cooling system according to claim 7, wherein the heat exchanging elements include a first heat exchanging element capable of cooling the cooling object, and a second heat exchanging element capable of heating the cooling object cooled by the first heat exchanging element, wherein the cooling object side tube includes a first cooling object side tube located at a side of the first heat exchanging element, and a second cooling object side tube located at a side of the second heat exchanging element, wherein the cooling system further includes: a detecting member that detects a temperature in the outlet side pipe or a temperature in the inlet side pipe; a third tube connected to the inlet-side tube and the upstream portion with respect to the first heat exchange element in the first cooling-target-side tube; and a third switching valve provided in the third pipe and capable of adjusting an amount of the refrigerant existing in the cooling object side pipe and flowing to the inlet side pipe, wherein the switching control part controls an opening degree of the third switching valve based on a detection result of the detection part.
The cooling system according to claim 9, being a cooling system according to claim 8, further comprising: a fourth switching valve that is provided at an upstream portion disposed with respect to the first heat exchange member in the first cooling subject side tube and is capable of adjusting an amount of refrigerant existing in the first cooling subject side tube and flowing to the first heat exchange member; and a fifth switching valve disposed at a downstream portion of the second heat exchanging element with respect to the second cooling object side tube and capable of adjusting an amount of the refrigerant heat-exchanged by the second heat and flowing to the inlet side tube, wherein the switching control part controls opening degrees of the fourth and fifth switching valves based on the temperature of the cooling object acquired according to a predetermined method.
The refrigeration control system according to claim 10, which is the refrigeration control system according to any one of claims 7 to 9, further comprising: and a refrigerant heat-exchanging member that exchanges heat between the refrigerant of an upstream portion with respect to the first heat-exchanging member in the first cooling subject side tube and the refrigerant of a downstream portion with respect to the second heat-exchanging member in the second cooling subject side tube.
The refrigeration control system according to claim 11, which is the refrigeration control system according to any one of claims 7 to 10, further comprising: and a compression control part controlling the compression part based on a detection result of the detection part and the temperature of the cooling object acquired according to a predetermined method.
The invention has the advantages that:
the refrigeration control system according to claim 1 and the cooling system according to claim 7, wherein since the first pipe that is connected to the outlet-side pipe and that causes the refrigerant in the outlet-side pipe to flow through the first pipe to the storage member and the second pipe that is connected to the inlet-side pipe and that causes the refrigerant in the storage member to flow through the second pipe to the inlet-side pipe are provided, the temperature of the storage member can be maintained above the critical temperature (or the superheated vapor temperature) of the refrigerant by the heat of the refrigerant flowing to the storage member and the heat of the refrigerant in the flow path being suppressed. Therefore, when the refrigerant condenses in the storage member, the decrease in the refrigerant in the circulation passage can be suppressed. In particular, since the first tube is connected to the outlet side tube, the refrigerant can be stored in a high compression state and a high density state, as compared with the case where the first tube is connected to the inlet side tube. Therefore, when the set temperature of the cooling target is high, it is possible to prevent the pressure in the circulation passage from excessively increasing or the cooling capacity from excessively increasing. Further, since the refrigerant in the storage member may flow into the inlet side tube, and the temperature in the inlet side tube may be increased by the heat of the flowing refrigerant, it may be possible to suppress the deterioration or malfunction of the compression member due to the flow of the saturated vapor to the compression member. Further, since a first switching valve is provided, it is possible to switch whether or not to flow the refrigerant into the storage member in the outlet-side pipe; a second switching valve capable of switching whether to flow the refrigerant in the storage member to the inlet side tube; and an opening and closing control member which controls opening and closing states of the first and second opening and closing valves according to a set temperature of the cooling target set by a predetermined method, so that it is possible to efficiently perform inflow and outflow of the refrigerant to and from the storage member through opening and closing control of the first and second opening and closing valves based on the set temperature of the cooling target. According to the above feature, since the function of the compression element, the function of the storage element, and the function of the circulation passage (a simple technique of simply flowing the refrigerant in the low-source refrigeration cycle into the expansion tank) are easily maintained as compared with the related art, the usability of the refrigeration control system (or the cooling system) can be maintained.
The refrigeration control system as recited in claim 2, wherein the switching control part opens the first switching valve and closes the second switching valve when the set temperature of the cooling object is higher than the critical temperature of the refrigerant; and closing the first switching valve and opening the second switching valve when the set temperature of the cooling object is lower than the critical temperature of the refrigerant; when the set temperature of the cooling target is higher than the critical temperature of the refrigerant, the refrigerant in the high compression state and the high density state may flow from the outlet-side pipe to the storage member. Therefore, when the set temperature of the cooling target is high, an excessive increase in the pressure in the circulation passage or an excessive increase in the cooling capacity can be more effectively prevented. Further, when the set temperature of the cooling target is lower than the critical temperature of the refrigerant, the refrigerant in the storage member may flow into the inlet side tube, and the amount of the refrigerant of the circulation passage may be increased by that amount. Accordingly, the pressure in the circulation passage, which decreases as the set temperature of the cooling target decreases, can be recovered, and the function of the circulation passage can be easily maintained.
The refrigeration control system as recited in claim 3, wherein the switching control part opens the first switching valve and closes the second switching valve due to any one of a case where an operating pressure value of the compression part is higher than a threshold value and a case where a set temperature of the cooling object is higher than a critical temperature of the refrigerant; on the other hand, in any one of the case where the operating pressure value of the compression element is lower than the threshold value and the case where the set temperature of the cooling target is lower than the critical temperature of the refrigerant, the switching control member closes the first on-off valve and opens the second on-off valve, so that the opening and closing control of the first on-off valve and the second on-off valve can be performed based on the set temperature of the cooling target and the operating pressure value of the compression element. Therefore, via the heat of the refrigerant flowing to the storage member, it is possible to easily keep the temperature in the storage member above the critical temperature (or superheated steam temperature) of the refrigerant while suppressing an excessive increase in the pressure in the circulation passage, as compared with the case where the opening and closing control of the first and second switching valves is performed based only on the set temperature of the cooling target.
The refrigeration control system according to claim 4, since a temperature adjusting member for adjusting the temperature of the refrigerant in the storage member is provided, the temperature of the refrigerant in the storage member can be adjusted, and therefore, for example, when the refrigerant in the storage member condenses, it is possible to suppress a decrease in the refrigerant in the circulation passage.
The refrigeration control system according to claim 5, since the refrigerant is carbon dioxide, it is possible to prevent the pressure in the circulation passage from excessively rising even if the refrigerant is easily expanded compared to freon gas.
The refrigeration control system according to claim 6, since the cooling target is a cooling refrigerant of the semiconductor manufacturing system, it is possible to prevent the pressure of the circulation passage from excessively rising even if the temperature range of the cooling target is wide, and to prevent the flow rate of the refrigerant in the circulation passage from decreasing when the refrigerant condenses in the storage element.
The refrigeration control system of claim 8, wherein the cooling system further comprises, because the heat exchange members include a first heat exchange member capable of cooling the cooling object and a second heat exchange member capable of heating the cooling object cooled by the first heat exchange member, wherein the cooling object side tubes include a first cooling object side tube positioned at a side of the first heat exchange member and a second cooling object side tube positioned at a side of the second heat exchange member: a third tube connected to the inlet-side tube and an upstream portion with respect to the first heat exchange element in the first cooling-target-side tube; and a third on/off valve capable of adjusting the amount of the refrigerant existing in the cooling target side pipe and flowing to the inlet side pipe. Wherein the opening and closing control member controls the opening degree of the third switching valve based on the detection result of the detection member, thereby being capable of adjusting the opening degree of the third switching valve according to the temperature of the refrigerant and effectively adjusting the temperature of the refrigerant in the outlet side tube.
The refrigeration control system of claim 9, wherein the cooling system comprises: a fourth switching valve capable of adjusting an amount of refrigerant existing in the first cooling subject side tube and flowing to the first heat exchange member; and a fifth switching valve capable of adjusting the amount of refrigerant that is heat-exchanged by the second heat exchange member and flows into the inlet side tube. Wherein the opening and closing control member controls the opening degrees of the fourth and fifth switching valves based on the temperature of the cooling object acquired according to a predetermined method, and therefore, it is possible to adjust the temperature of the refrigerant in the cooling object-side tube so that the temperature of the refrigerant reaches the set temperature and to cool the refrigerant efficiently.
The refrigeration control system of claim 10, wherein the cooling system further comprises: a refrigerant heat-exchanging member that exchanges heat between the refrigerant in an upstream portion with respect to the first heat-exchanging member in the first cooling-subject side tube and the refrigerant in a downstream portion with respect to the second heat-exchanging member in the second cooling-subject side tube, and therefore, the temperature of the refrigerant in the downstream portion with respect to the second heat-exchanging member in the second cooling-subject side tube can be raised, and the dried refrigerant can flow into the compressing member.
The refrigeration control system of claim 11, further comprising: a compression control member that controls the compression member based on a detection result of the detection member and a temperature of the cooling object acquired according to a predetermined method, and thus, the compression member can be controlled based on the temperature of the refrigerant and the temperature of the cooling object, and the compression member can be effectively controlled.
Drawings
FIG. 1 is an external view of one embodiment of a cooling system according to the present invention.
Fig. 2 is a block diagram of an electrical configuration of the control unit.
FIG. 3 is a control flow diagram according to an embodiment.
Fig. 4 is a flow diagram of the first refrigerant when the first switching valve and the second switching valve are opened and closed; fig. 4(a) is a diagram showing the open and closed states of the first and second on-off valves; fig. 4(b) is a diagram showing a state in which the first switching valve is closed and the second switching valve is opened.
Fig. 5 is a flowchart of the first temperature adjustment flow.
Fig. 6 is a flowchart of a second temperature adjustment flow.
Fig. 7 is a modified example illustration of the cooling system.
Fig. 8 is a diagram showing the installation state of the temperature adjusting unit.
Fig. 9 is a diagram showing the installation state of the temperature adjusting unit.
Fig. 10 is a modified example illustration of the cooling system.
Detailed Description
Hereinafter, embodiments of a refrigeration control system and a cooling system according to the present invention will be described in detail with reference to the accompanying drawings. First, the basic concept of the present embodiment in [ I ] will be explained, the details of the present embodiment will be described in [ II ], and a final modified example of the present embodiment will be described in [ III ]. The invention is not limited to this embodiment.
[I] Basic concept of the embodiment.
First, the basic concept of the present embodiment will be explained. The present embodiment relates to a refrigeration control system that controls refrigerant flowing through a circulation passage for circulating the refrigerant so that the refrigerant compressed by a compression element can exchange heat with a cooling object, and to a cooling system. Here, the "refrigerant" refers to a medium for cooling a cooling object, and is, for example, a refrigerant including a gaseous refrigerant (e.g., carbon dioxide, chlorofluorocarbon, air, etc.), a liquid refrigerant (e.g., water, etc.), but in the present embodiment, the refrigerant is described as carbon dioxide. In addition, the "cooling object" refers to an object to be cooled, and includes, for example, the apparatus itself (or the system itself), a concept (or system) of a cooling refrigerant (for example, a gas or liquid cooling refrigerant) of the apparatus, and the like, but in the present embodiment, the refrigerant will be described as a cooling refrigerant (specifically, a liquid cooling refrigerant) of the semiconductor manufacturing system.
[ II ] details of examples.
Next, details of the embodiment will be described.
(configuration)
First, the configuration of the cooling system according to the embodiment will be described. Fig. 1 is an external view of a cooling system according to an embodiment of the present invention. In the following description, the X direction of fig. 1 will be referred to as the left-right direction of the cooling system (+ X direction will be referred to as the left direction of the cooling system and the-X direction will be referred to as the right direction of the cooling system), the Y direction of fig. 1 will be referred to as the front-rear direction of the cooling system (+ Y direction will be referred to as the front direction of the cooling system and the-Y direction will be referred to as the rear direction of the cooling system), and a direction perpendicular to the X direction and the Y direction will be referred to as the up-down direction (a direction toward the front side of fig. 1 will be referred to as the up direction of the cooling system and a direction toward the rear side of fig. 1 will be referred to as the down direction of the cooling system).
The cooling system 1 is a system that cools a second refrigerant using a first refrigerant, and includes a first cooling system 10, a second cooling system 100, a third cooling system 200, and a control unit 300 of fig. 2, which are described later, as shown in fig. 1. Here, the "first refrigerant" is used to cool the second refrigerant, and is circulated by the circulation unit 50, which will be described later. Further, the "second refrigerant" is cooled by the first refrigerant and delivered by an output channel 131 of the second cooling system 100, which will be described later. Further, the first refrigerant corresponds to "refrigerant" of the claims, and the second refrigerant corresponds to "coolant" of the claims.
(configuration-first Cooling System)
The first cooling system 10 is a system for exchanging heat between a first refrigerant and second and third refrigerants, and includes a compression unit 20, a storage unit 30, first to sixth heat exchange units 41 to 46, a removal unit 47, and a circulation unit 50, as shown in fig. 1. Here, the "third refrigerant" is used to cool the first refrigerant, and is delivered by a first output passage 201 or a second output passage 202 of a third cooling system 200 described later. For example, the third refrigerant is a concept including a gaseous refrigerant, a liquid refrigerant, and the like, but in the embodiment, the third refrigerant is referred to as industrial water.
(configuration-first Cooling System-compression Unit)
The compression unit 20 is a compression member for compressing a first refrigerant. The compression unit 20 is configured, for example, by using a known compressor (e.g., a frequency-controlled operation type two-stage compressor such as a compressor having an inverter driving circuit), and the like, and includes a compression unit main body 21, a first outlet 22, a first inlet 23, a second outlet 24, and a second inlet 25.
Wherein the compression unit main body 21 is a basic structure of the compression unit 20 and is hollow. The first outlet 22 is an opening through which the first refrigerant in the compression unit main body 21 flows toward a first circulation passage 61, which will be described later. Further, the first inlet 23 is an opening through which the first refrigerant in the first circulation passage 61 described later flows to the compression unit main body 21. Further, the second outlet 24 is an opening through which the first refrigerant in the compression unit main body 21 flows toward the second circulation passage 81, which will be described later. Further, the second inlet 25 is an opening through which the first refrigerant in the second circulation passage 81, which will be described later, flows to the compression unit main body 21.
Further, the detailed operation of the compression unit 20 is arbitrary, but as explained in the present embodiment, follows. That is, first, the first refrigerant flowing from the first circulation passage 61 to the compression unit main body 21 through the first inlet 23 is compressed, and the compressed first refrigerant flows to a second circulation passage 81 described later through the second outlet 24 (hereinafter, referred to as "first compression operation"). Next, the first refrigerant flowing from the second circulation passage 81 described later to the compression unit main body 21 through the second inlet 25 is compressed, and the compressed first refrigerant flows to the first circulation passage 61 described later through the first outlet 22 (hereinafter, referred to as "second compression operation"). Then, the operation cycle including the first compression operation and the second compression operation is repeated. By this operation, the first refrigerant compressed twice by the compression unit 20 can flow to the first circulation passage 61 described later, and therefore, the first refrigerant can be efficiently compressed as compared with the case where only one compression operation is performed.
(configuration-first Cooling System-storage Unit)
The storage unit 30 is a storage member for storing the first refrigerant. The storage unit 30 is constructed by using, for example, a known refrigerant storage container, for example, a hollow cylindrical expansion tank having an inlet and an outlet (not shown) through which the first refrigerant flows, and is installed at a side of the second cooling system 100 opposite to the compression unit 20, as shown in fig. 1.
Further, the detailed dimensions (e.g., diameter and height) of the storage unit 30 are arbitrary, but may be set based on experimental results or the like, because it is desirable that the dimensions be as small as possible, for example, as a required amount of the first refrigerant can be stored.
(configuration-first Cooling System-Heat exchange Unit)
The first heat exchange unit 41 is for heat exchange between a first refrigerant and a second refrigerant in a first circulation passage 61 described later, and is a first heat exchange member capable of cooling the second refrigerant. The first heat exchange unit 41 is configured by using a known heat exchanger (e.g., an evaporator) or the like, for example, and is installed in the vicinity of the second cooling system 100 (in fig. 1, an upstream position of the output duct 131, which will be described later), as shown in fig. 1.
The second heat exchange unit 42 is for exchanging heat between the first refrigerant and the second refrigerant in the first circulation passage 61, which will be described later, and is a second heat exchange member capable of heating the second refrigerant cooled by the first heat exchange unit 41. The second heat exchange unit 42 is configured by using a known heat exchanger (for example, a plate heat exchanger) or the like, for example, and is installed at a position near the second cooling system 100 (in fig. 1, a position downstream of an output passage 131 described later), as shown in fig. 1. The second refrigerant cooled by the first heat exchange unit 41 may be heated by the second heat exchange unit 42, and the temperature of a downstream portion of the outlet duct 131, which will be described later, may be easily maintained at a predetermined temperature. Further, the above-mentioned "first heat exchange unit 41" and "second heat exchange unit 42" correspond to the "heat exchange member" of the claims.
The third heat exchange unit 43 is for exchanging heat between the first refrigerant and a third refrigerant in the first circulation passage 61, which will be described later, and is a third heat exchange member capable of cooling the first refrigerant. The third heat exchange unit 43 is configured by using, for example, a known heat exchanger or the like, and is installed at a position near the third cooling system 200, as shown in fig. 1.
The fourth heat exchange unit 44 is for exchanging heat between the first refrigerant and the third refrigerant in the second circulation passage 81, which will be described later, and is a kind of fourth heat exchange member capable of cooling the first refrigerant. The fourth heat exchange unit 44 is configured by using, for example, a known heat exchanger or the like, and is installed at a position (in fig. 1, a position different from that of the third heat exchange unit 43) near the third cooling system 200, as shown in fig. 1.
The fifth heat exchange unit 45 is for exchanging heat between the first refrigerant at an upstream position with respect to the first heat exchange unit 41 in the first cooling subject side tube 63a (described later) and the first refrigerant in a fourth heat exchange tube 71d (described later), and is a kind of fifth heat exchange member capable of cooling the first refrigerant in the first cooling subject side tube 63a (described later). The fifth heat exchange unit 45 is configured by using a known heat exchanger or the like, for example, and is installed between the second heat exchange unit 42 and the third heat exchange unit 43. The first refrigerant on the upstream side of the first heat exchange unit 41 in the first target-to-be-cooled tube 63a described later can be cooled (supercooled) by passing through the fifth heat exchange unit 45. The cooling efficiency of the cooling system 1 can be improved while promoting the cooling of the second refrigerant, as compared with the case where the fifth heat exchange unit 45 is not provided.
The sixth heat exchange unit 46 is for exchanging heat between the first refrigerant in an upstream portion with respect to the first heat exchange unit 41 in the first subject-to-cooling side tubes 63a (described later) and the first refrigerant in a downstream portion with respect to the second heat exchange unit 42 in the second subject-to-cooling side tubes 63b (described later), and is a refrigerant heat exchange member capable of heating the first refrigerant in the second subject-to-cooling side tubes 63b (described later). The sixth heat exchange unit 46 is configured, for example, by using a known heat exchanger or the like, and is installed between the storage unit 30 and the first heat exchange unit 41 (or the second heat exchange unit 42), as shown in fig. 1 with respect to the second heat exchange unit 42 in the second cooling target side tube 63b described later, the temperature of the first refrigerant on the downstream side can be increased by the sixth heat exchange unit 46, and the dried first refrigerant can flow into the compression unit 20.
(configuration-first Cooling System-removal Unit)
The removing unit 47 is a removing member for removing foreign substances (e.g., dust, dirt, etc.) or moisture contained in the first refrigerant of the first circulation passage 61, which will be described later. The removal unit 47 is configured by using, for example, a known refrigerant remover (e.g., a filter dryer) or the like, and is installed between the third heat exchange unit 43 and the fifth heat exchange unit 45 as shown in fig. 1.
(configuration-first Cooling System-circulation Unit)
The circulation unit 50 is a circulation member for circulating the first refrigerant, and includes a first circulation unit 60 and a second circulation unit 80, as shown in fig. 1.
(configuration-first Cooling System-circulation Unit-first circulation Unit)
The first circulation unit 60 is for circulating the first refrigerant to the second cooling system 100, and includes a first circulation passage 61, first to fourth branch pipes 71a to 71d, first to sixth switching valves 72a to 72f, first to third temperature detection units 73a to 73c, and first to third pressure detection units 74a to 74c, as shown in fig. 1.
(configuration-first Cooling System-circulation Unit-first circulation channel)
The first circulation passage 61 is a passage for circulating the first refrigerant to perform heat exchange between the first refrigerant compressed by the compression unit 20 and the second refrigerant. The first circulation passage 61 is configured by using a known airtight circulation passage, for example, and is installed to pass through the compression unit 20, the storage unit 30, the first to sixth heat exchange units 41 to 46, and the removal unit 47, as shown in fig. 1. Further, as shown in fig. 1, the first circulation passage 61 includes a compression unit side tube 62 and a cooling target side tube 63.
(configuration-first Cooling System-circulation Unit-first circulation passage-compression Unit side tube)
The compression unit side pipe 62 is a type of pipe, and is located on the compression unit 20 side of the pipe constituting the first circulation passage 61. The compression unit side tube 62 is configured by using a known refrigerant tube or the like, for example (and other tubes are also the same), and includes an outlet side tube 62a and an inlet side tube 62b, as shown in fig. 1.
The outlet side pipe 62a is a pipe located on the first outlet 22 side of the compression unit 20, and is connected to the first outlet 22 of the compression unit 20 and the upstream end of the cooling target side pipe 63. Specifically, as shown in fig. 1, the outlet side pipe is connected so that a part of the outlet side pipe 62a is accommodated in the storage unit 30. The inlet-side pipe 62b is a pipe located on the first inlet 23 side of the compression unit 20, and is connected to the first inlet 23 of the compression unit 20 and the downstream end of the cooling target-side pipe 63, as shown in fig. 1.
(configuration-first Cooling System-circulation Unit-first circulation passage-Cooling target side tube)
The cooling target side pipe 63 is a pipe that is located on a side surface of the second cooling system 100 in the pipe that constitutes the first circulation passage 61, and includes a first cooling target side pipe 63a and a second cooling target side pipe 63b, as shown in fig. 1.
The first cooling target side tube 63a is a type of tube, is positioned on the first heat exchange unit 41 side, and is connected to the downstream end of the outlet side tube 62a and the downstream end of the inlet side tube 62 b. Specifically, as shown in fig. 1, the first subject-to-cooling side tube is connected to pass through the sixth heat exchange unit 46, the third heat exchange unit 43, the removal unit 47, the fifth heat exchange unit 45, the first heat exchange unit 41, and the sixth heat exchange unit 46 in this order. The second cooling target side tube 63b is a tube positioned on the second heat exchange unit 42 side, and is connected to the downstream end of the outlet side tube 62a and the downstream end of the inlet side tube 62 b. Specifically, as shown in fig. 1, the second cooling target side tube is connected to pass through the second heat exchange unit 42 and the sixth heat exchange unit 46 in this order. In addition, in the present embodiment, as shown in fig. 1, a portion on the downstream side of the second cooling target side tube 63b (specifically, from the downstream-side end portion of the second cooling target side tube 63b to the sixth heat exchange unit 46) is formed integrally with a downstream portion of the first cooling target side tube 63a so as to serve as the downstream portion of the first cooling target side tube 63 a.
The flow of the first refrigerant in the first circulation passage 61 is explained as follows. That is, first, a part of the first refrigerant compressed by the compression unit 20 flows through the outlet side tube 62a to the first cooling target side tube 63 a. Subsequently, the first refrigerant flowing into the first cooling target side tube 63a is cooled by the third heat exchange unit 43 and the fifth heat exchange unit 45, and passes through the first heat exchange unit 41 to exchange heat with the second refrigerant (specifically, to exchange heat to cool the second refrigerant). Subsequently, the first refrigerant, which exchanges heat with the second refrigerant, is heated by the sixth heat exchange unit 46, and flows to the compression unit 20 through the first cooling subject side tube 63a and the inlet side tube 62 b. The other part of the first refrigerant compressed by the compression unit 20 flows through the outlet side tube 62a to the second cooling target side tube 63 b. Subsequently, the first refrigerant flowing into the second cooling target side tube 63b is subjected to heat exchange with the second refrigerant by the second heat exchange unit 42 (specifically, heat exchange is performed to heat the second refrigerant). Subsequently, the first refrigerant, which exchanges heat with the second refrigerant, is heated by the sixth heat exchange unit 46, and flows to the compression unit 20 through the second cooling target-side tube 63b and the inlet-side tube 62 b.
The first refrigerant may be circulated by the first circulation passage 61 to exchange heat between the first refrigerant in the first circulation passage 61 and the second refrigerant in the outlet passage 131, which will be described later.
(configuration-first Cooling System-circulation Unit-first circulation Unit-Branch pipe)
The first branch pipe 71a is a first pipe that allows the first refrigerant in the outlet side pipe 62a to flow into the storage unit 30 through the first branch pipe 71 a. The first branch pipe 71a is connected to the outlet side pipe 62 a. Specifically, as shown in fig. 1, the upstream end portion of the first branch pipe 71a is connected to the upstream portion with respect to the storage unit 30 in the outlet side pipe 62a, and the downstream end portion of the first branch pipe 71a is accommodated in the storage unit 30. The first refrigerant in the outlet side tube 62a can flow to the storage unit 30 through the first branch tube 71a, and the pressure in the first circulation passage 61 can be prevented from being excessively large. In particular, since the first branch pipe 71a is connected to the outlet side pipe 62a, the pressure in the first circulation passage 61 can be effectively prevented from being excessively large as compared with the case where the first branch pipe 71a is connected to the inlet side pipe 62 b. Further, due to the heat of the flow of the first refrigerant to the storage unit 30, the temperature in the storage unit 30 can be easily maintained above the critical temperature of the first refrigerant (e.g., above 31 degrees celsius), and therefore the decrease in the refrigerant in the first circulation passage 61 can be suppressed because of the condensation of the first refrigerant in the storage unit 30.
The second branch pipe 71b is a second pipe that allows the first refrigerant in the storage unit 30 to flow into the inlet side pipe 62b through the second branch pipe 71 b. The second branch pipe 71b is connected to the inlet side pipe 62 b. Specifically, as shown in fig. 1, the upstream end of the second branch pipe 71b is connected to the upstream portion of the compression unit 20 in the inlet side pipe 62b, and the downstream end of the second branch pipe 71b is housed in the storage unit 30. Further, in the present embodiment, as shown in fig. 1, a part of the second branch pipe 71b on the side of the storage unit 30 is integrally formed with a part of the first branch pipe 71a on the side of the storage unit 30, thereby being a part of the first branch pipe 71a on the side of the storage unit 30, however, the present invention is not limited thereto. For example, the portion may be formed separately from the portion on the storage unit 30 side in the first branch pipe 71 a. Since the first refrigerant (additional first refrigerant) in the storage unit 30 may flow into the inlet side tube 62b through the second branch tube 71b, and the temperature in the inlet side tube 62b may be increased via the heat of the flowing first refrigerant, it is possible to suppress the deterioration or malfunction of the compression unit 20 due to the flow of saturated vapor to the compression unit 20.
The third branch pipe 71c is a third pipe that allows the first refrigerant in the first cooling target side pipe 63a to flow into the inlet side pipe 62b and is connected to the first cooling target side pipe 63a and the inlet side pipe 62 b. Specifically, as shown in fig. 1, the third branch pipe is connected to an upstream portion with respect to the first heat exchange unit 41 and an upstream end portion of the inlet side pipe 62b in the first cooling target side pipe 63 a. The first refrigerant in the upstream portion of the first heat exchange unit 41 in the first cooling subject-side tube 63a may flow to the inlet-side tube 62b through the third branch tube 71c, and the temperature of the first refrigerant in the first circulation passage 61 may be adjusted using the heat of the flowing first refrigerant.
The fourth branch pipe 71d is a fourth pipe which is located on the side of the fifth heat exchange unit 45 and is connected to a portion between the fifth heat exchange unit 45 and the removing unit 47 in the second cooling object side pipe 63b and a downstream end portion of the second circulation passage 81, which will be described later, as shown in fig. 1. Specifically, the fourth branch pipe is connected to pass through the fifth heat exchange unit 45. It is possible to exchange heat between the first refrigerant in the fourth branch pipe 71d and the first refrigerant in the first cooling subject side pipe 63a through the fourth branch pipe 71 d.
(configuration-first Cooling System-circulation Unit-first circulation Unit-on-off valve)
The first switching valve 72a is a valve that can switch whether or not to flow the first refrigerant to the storage unit 30 in the outlet side pipe 62 a. The first on-off valve 72a is configured by using a known solenoid valve or the like, for example (the other on-off valves are also configured in the same manner), and is provided in the first branch pipe 71 a. Specifically, as shown in fig. 1, the first switching valve is connected to a portion of the first branch pipe 71a on the compression unit 20 side.
The second on-off valve 72b is a valve that can flow the first refrigerant in the storage unit 30 to the inlet side pipe 62b, and is provided in the second branch pipe 71 b. Specifically, as shown in fig. 1, the second on-off valve is provided in a part of the second branch pipe 71b on the compression unit 20 side.
The third on/off valve 72c is a valve capable of adjusting the amount of the first refrigerant existing in the cooling target side pipe 63 and flowing to the inlet side pipe 62b, and is provided in the third branch pipe 71 c. Specifically, as shown in fig. 1, the third on/off valve is connected to an upstream portion of the third branch pipe 71 c.
The fourth switching valve 72d is a valve capable of adjusting the amount of the first refrigerant existing in the first cooling subject side tube 63a and flowing into the first heat exchange unit 41, and is provided at the first cooling subject side tube 63 a. Specifically, as shown in fig. 1, the fourth switching valve is connected to a portion between the first heat exchange unit 41 and the fifth heat exchange unit 45 in the first cooling target side tube 63 a.
The fifth switching valve 72e is a valve capable of adjusting the amount of the first refrigerant that exchanges heat with the inlet side tube 62b through the second heat exchange unit 42, and is provided in the second cooling target side tube 63 b. Specifically, as shown in fig. 1, the fifth switching valve is connected to a downstream portion of the second cooling target side tube 63b with respect to the first heat exchange unit 41.
The sixth switching valve 72f is a valve capable of adjusting the amount of the first refrigerant in the upstream portion of the fifth heat exchange unit 45 with respect to the fourth sub-pipe 71d to the downstream portion of the fifth heat exchange unit 45 with respect to the fourth sub-pipe 71d, and is provided in the fourth sub-pipe 71 d. Specifically, as shown in fig. 1, the sixth switching valve is connected to an upstream portion of the fourth branch pipe 71 d.
(configuration-first cooling system-circulation unit-first circulation unit-temperature detection unit)
The first temperature detection unit 73a is a detection member for detecting the temperature in the outlet side pipe 62 a. The first temperature detection unit 73a is configured by using a known temperature detection sensor or the like, for example (the configuration of the other temperature detection units is also the same), and is provided in the outlet side pipe 62 a. Specifically, as shown in fig. 1, the first temperature detection unit is connected to a portion of the outlet side pipe 62a in the vicinity of the compression unit 20.
The second temperature detection unit 73b is a detection member for detecting the temperature in the inlet side pipe 62b, and is provided in the inlet side pipe 62 b. Specifically, as shown in fig. 1, the second temperature detection unit is connected to a portion of the inlet side pipe 62b in the vicinity of the compression unit 20.
The third temperature detection unit 73c is for detecting the temperature in the cooling target side tube 63, and is provided in the cooling target side tube 63. Specifically, as shown in fig. 1, the third temperature detection unit is connected to a portion between the fourth switching valve 72d and the fifth heat exchange unit 45 in the first cooling target-side pipe 63 a.
(configuration-first cooling system-circulation unit-first circulation unit-pressure detection unit)
The first pressure detecting unit 74a is for detecting the pressure in the outlet side pipe 62 a. The first pressure detecting unit 74a is configured by using, for example, a known pressure sensor or a pressure switch, and is provided at a plurality of positions (two positions in fig. 1) of the outlet side pipe 62 a. Specifically, as shown in fig. 1, the first pressure detecting unit is connected to a portion of the outlet side pipe 62a in the vicinity of the compressing unit 20.
The second pressure detecting unit 74b is for detecting the pressure in the inlet side pipe 62 b. The second pressure detecting means 74b is configured by using a known pressure sensor or the like, for example (the third pressure detecting means 74c, the pressure detecting means 83 described later, and the delivery pressure detecting means 136 described later are also the same), and is provided in the inlet side pipe 62 b. Specifically, as shown in fig. 1, the second pressure detecting unit is connected to a portion of the inlet side pipe 62b in the vicinity of the compressing unit 20.
The third pressure detecting unit 74c is for detecting the pressure in the cooling target side pipe 63, and is provided in the first cooling target side pipe 63 a. Specifically, as shown in fig. 1, the third pressure detecting unit is connected to a portion between the fourth switching valve 72d and the fifth heat exchanging unit 45 in the first cooling target side pipe 63 a.
(configuration-first Cooling System-circulation Unit-second circulation Unit)
The second circulation unit 80 is for circulating the first refrigerant to the second cooling system 100, and includes a second circulation passage 81, a temperature detection unit 82, and a pressure detection unit 83, as shown in fig. 1.
(configuration-first Cooling System-circulation Unit-second circulation channel)
The second circulation passage 81 is a passage for circulating the first refrigerant to perform heat exchange between the first refrigerant compressed by the compression unit 20 and the third refrigerant. The second circulation passage 81 is configured by using a known airtight circulation passage formed as a pipe, for example, and is provided to pass through the fourth heat exchange unit 44, as shown in fig. 1. The first refrigerant may circulate through the second circulation passage 81 to exchange heat between the first refrigerant in the second circulation passage 81 and the third refrigerant in the first output passage 201, which will be described later.
(configuration-first Cooling System-circulation Unit-second circulation Unit-temperature detection Unit, pressure detection Unit)
The temperature detection unit 82 is for detecting the temperature in the second circulation passage 81, and is provided in the second circulation passage 81. Specifically, as shown in fig. 1, the temperature detection unit is connected to a downstream portion of the second circulation passage 81.
The pressure detecting unit 83 is for detecting the pressure in the second circulation passage 81, and is provided in the second circulation passage 81. Specifically, as shown in fig. 1, the pressure detecting unit 83 is connected to a downstream portion of the second circulation passage 81.
(configuration-second Cooling System)
The second cooling system 100 is a system for exchanging heat between the second refrigerant and the first refrigerant, and includes a discharge hole part 110, a storage unit 120, and a delivery unit 130, as shown in fig. 1.
(configuration-second Cooling System-exhaust hole portion)
The exhaust hole part 110 is for discharging air accumulated in the output duct 131, and is configured by using a known exhaust unit (e.g., an exhaust tank) or the like, for example, and is installed in the vicinity of the second heat exchange unit 42, as shown in fig. 1.
(configuration-second Cooling System-storage Unit)
The storage unit 120 is for storing the second refrigerant, and is configured, for example, by using a known refrigerant storage member (e.g., an accumulator) or the like, and is installed near the output passage 131, as shown in fig. 1.
(configuration-second Cooling System-conveying Unit)
The delivery unit 130 is a delivery portion for delivering the second refrigerant to the second cooling system 10, and includes an output passage 131, first to fourth delivery pipes 132a to 132d, first to fourth delivery switching valves 133a to 133d, a pump unit 134, a first delivery temperature detection unit 135a, a second delivery temperature detection unit 135b, a delivery pressure detection unit 136, and a flow rate detection unit 137, as shown in fig. 1.
(configuration-second Cooling System-conveying Unit-output channel)
The output passage 131 is a passage for delivering the second refrigerant to the first cooling system 10. The output passage 131 is configured, for example, by using a known passage formed as a pipe (in addition, the other output passages are also the same in structure), and is provided to pass through a first inflow portion (not shown) through which the second refrigerant flows from the outside to the output passage 131, the first heat exchange unit 41, the second heat exchange unit 42, the exhaust hole portion 110, and a first outflow portion (not shown) through which the second refrigerant flows from the output passage 131 to the outside, as shown in fig. 1. Specifically, an upstream end portion of the output duct 131 is connected to the first inflow portion, and a downstream end portion of the output duct 131 is connected to the first outflow portion. The second refrigerant may be delivered by the outlet passage 131 to exchange heat between the second refrigerant in the outlet passage 131 and the first refrigerant in the first circulation passage 61.
(configuration-second Cooling System-delivery Unit-distribution pipe)
The first dividing pipe 132a is a pipe that allows the second refrigerant in the discharge hole portion 110 to flow into the storage unit 120 through the first dividing pipe 132 a. As shown in fig. 1, an upstream end portion of the first distribution pipe 132a is connected to the exhaust hole portion 110, and a downstream end portion of the first distribution pipe 132a is connected to the storage unit 120.
The second dividing pipe 132b is a pipe that allows the second refrigerant in the storage unit 120 to flow into the discharge hole portion 110 through the second dividing pipe 132 b. As shown in fig. 1, an upstream end portion of the second distribution pipe 132b is connected to the storage unit 120, and a downstream end portion of the second distribution pipe 132b is connected to the exhaust hole portion 110.
The third dividing tube 132c is a pipe for allowing the second refrigerant in the upstream portion of the output channel 131 to flow into the downstream portion of the output channel 131 through the third dividing tube 132 c. As shown in fig. 1, an upstream end portion of the third distributing pipe 132c is connected to an upstream portion of the output duct 131, and a downstream end portion of the third distributing pipe 132c is connected to a downstream portion of the output duct 131.
The fourth dividing pipe 132d is a pipe for discharging the second refrigerant in the discharge hole portion 110 to a discharge portion, not shown, through the fourth dividing pipe 132 d. As shown in fig. 1, an upstream end portion of the fourth distribution pipe 132d is connected to the exhaust hole portion 110, and a downstream end portion of the fourth distribution pipe 132d is connected to the discharge portion.
(configuration-second Cooling System-transporting Unit-transporting switching valve)
The first transfer switching valve 133a is a valve that can switch whether or not to cause the second refrigerant to flow from the first inflow portion to the output passage 131. The first transfer switching valve 133a is configured by using a known switching valve (e.g., a gate valve) or the like, for example (the second transfer switching valve 133b is also configured in the same manner), and is provided at the upstream end of the output duct 131, as shown in fig. 1.
The second transfer switching valve 133b is a valve that can switch whether or not the second refrigerant flows from the output passage 131 to the first outflow portion, and is provided at the downstream end of the output passage 131, as shown in fig. 1.
The third feed switching valve 133c is a valve that can switch whether or not the second refrigerant in the third dividing tube 132c flows to the downstream side of the output passage 131. The third conveyance switching valve 133c is configured by using a known switching valve (e.g., a ball valve) or the like (further, the structure of the fourth conveyance switching valve 133 d), for example, and is provided in the third distribution pipe 132c as shown in fig. 1.
The fourth sending switching valve 133d is a valve that can switch whether or not to discharge the second refrigerant in the fourth sending pipe 132d to the discharge portion, and is provided in the fourth sending pipe 132d, as shown in fig. 1.
(configuration-second Cooling System-delivery Unit-Pump Unit)
The pump unit 134 is configured to convey the second refrigerant in the output passage 131 from the first inflow portion to the first outflow portion, and is provided downstream of the output passage 131, for example, using a known pump or the like, as shown in fig. 1.
(configuration-second cooling system-transport unit-transport temperature detecting unit)
The first conveyance temperature detection unit 135a is for detecting the temperature in the output duct 131, and is provided at an upstream portion of the output duct 131, as shown in fig. 1.
The second conveyance temperature detection unit 135b is for detecting the temperature in the output duct 131, and is provided at a downstream portion of the output duct 131, as shown in fig. 1.
(configuration-second cooling system-delivery unit-delivery pressure detecting unit)
The delivery pressure detecting unit 136 is for detecting the pressure in the output channel 131, and is provided at a downstream portion of the output channel 131, as shown in fig. 1.
(configuration-second Cooling System-transporting Unit-flow detecting Unit)
The flow amount detecting unit 137 is for detecting the flow amount of the second refrigerant in the output duct 131, and is disposed at a downstream portion of the output duct 131, as shown in fig. 1.
(configuration-third Cooling System)
The third cooling system 200 is a system for exchanging heat between the third refrigerant and the first refrigerant, and includes a first output passage 201, a second output passage 202, a first delivery switching valve 203, a second cooling system, a delivery switching valve 204, and a delivery temperature detection unit 205, as shown in fig. 1.
(configuration-third Cooling System-output channel)
The first output passage 201 is a passage for delivering the third refrigerant to the first cooling system 10, and is provided to pass through a second inflow portion (not shown) through which the second refrigerant flows from the outside into the first inflow passage 201, the third heat exchange unit 43, and a second outflow portion (not shown) through which the third refrigerant flows from the first output passage 201 to the outside, as shown in fig. 1. Specifically, the upstream end of the first output channel 201 is connected to the second inflow portion, and the downstream end of the first output channel 201 is connected to the second outflow portion. The third refrigerant may be sent through the first output passage 201 so as to exchange heat between the third refrigerant in the first output passage 201 and the first refrigerant in the first circulation passage 61.
The second output passage 202 is a passage for conveying the third refrigerant toward the first cooling system 10, and is provided to pass through the fourth heat exchange unit 44, as shown in fig. 1. Specifically, the upstream end of the second output path 202 is connected to the upstream end of the first output path 201, and the downstream end of the second output path 202 is connected to the downstream end of the first output path 201. The third refrigerant may be sent through the second output passage 202 so as to exchange heat between the third refrigerant in the second output passage 202 and the first refrigerant in the second circulation passage 81.
(configuration-third Cooling System-delivery switching valve)
The first transfer switching valve 203 is a valve that can switch whether or not the third refrigerant in the first output passage 201 flows to the second outflow portion. The first feed switching valve 203 is configured by using a known switching valve (e.g., a ball valve) or the like, for example, and is provided on the downstream side of the first output passage 201, as shown in fig. 1.
The second transfer switching valve 204 is a valve that can switch whether or not the third refrigerant in the second output passage 202 flows to the second outflow portion. The second feed switching valve 204 is configured by using a known switching valve (e.g., a solenoid valve) or the like, for example, and is provided on the downstream side of the second output passage 202, as shown in fig. 1.
(configuration-third Cooling System-delivery temperature detecting Unit)
The conveyance temperature detection unit 205 is for detecting the temperature in the first output duct 201, and is provided at an upstream portion of the first output duct 201, as shown in fig. 1.
(configuration-control Unit)
Fig. 2 is a block diagram showing an electrical configuration of the control unit 300. The control unit 300 is a device that controls each component of the cooling system 1, is provided near the first cooling system 10, and includes an operation unit 310, a communication unit 320, an output unit 330, a power supply unit 340, a control unit 350, and a storage unit 360, as shown in fig. 2. In the present embodiment, the explanation will be made on the premise that the control unit 300 is electrically connected to the respective components (for example, various on-off valves, various detectors, and the like) of the first cooling system 10, the second cooling system 100, and the third cooling system 200 through electric wires.
(configuration-control Unit-operation Unit)
The operation unit 310 is an operation member that receives operation input for various information. The operation unit 310 is configured by using a known operation portion including, for example, a touch panel, a remote operation portion such as a remote controller, or a hard switch.
(configuration-control Unit-communication Unit)
The communication unit 320 is a communication member for communicating with each of the electronic components of the first cooling system 10, the second cooling system 100, and the third cooling system 200 or an external device such as a management server, and is configured by using a known communication section or the like, for example.
(configuration-control Unit-output Unit)
The output unit 330 is an output device for outputting various information based on the control of the control unit 350, and is configured by using, for example, a known display portion including a flat panel display such as a liquid crystal display or an organic EL display, or a sound output portion such as a speaker.
(configuration-control Unit-Power supply Unit)
The power supply unit 340 is a power supply device that supplies power supplied from a commercial power source (not shown) or power stored in the power supply unit 340 to each component of the control unit 300.
(configuration-control Unit)
The control unit 350 is a control member that controls each component of the control unit 300. Specifically, the control unit 350 is a computer including a Central Processing Unit (CPU), various programs analyzed and executed on an Operating System (OS), such as a basic control program of the OS or an application program that is started on the OS and implements a specific function, and an internal memory, such as a Random Access Memory (RAM) for storing programs or various data.
Further, the control unit 350 conceptually includes a switch control unit 351 and a compression control unit 352, as shown in fig. 2.
The switching control unit 351 is a switching control member that controls the switching states of the first switching valve 72a and the second switching valve 72b according to a predetermined method based on the set temperature of the second refrigerant.
The compression control unit 352 is a compression control member that controls the compression unit 20 based on the detection result of the first temperature detection unit 73a or the second temperature detection unit 73b and the acquired temperature of the second refrigerant according to a predetermined method. In addition, a detailed process performed by the control unit 350 will be described later.
(configuration-control Unit-storage Unit)
The storage unit 360 is a recording member that records programs and various data necessary for the operation of the control unit 300, and is configured by using, for example, a hard disk (not shown) serving as an external recording device. Here, other alternative recording media may be used in addition to or in addition to the hard disk, including known magnetic recording media (e.g., magnetic disks), optical recording media (e.g., DVD and blu-ray disks), or known electrical recording media (e.g., magnetic disks).
The cooling system 1 having the above-described configuration can efficiently cool the second refrigerant by using the first refrigerant. The "storage unit 30", the "first branch pipe 71 a", the "second branch pipe 71 b", the "first on-off valve 72 a", the "second on-off valve 72 b", and the "on-off control unit 351" all correspond to the "refrigeration control system" in each claim.
(control flow)
Next, a control flow executed by the cooling system 1 in such a configuration will be described. Fig. 3 is a control flowchart (in the following description of each process, a step is abbreviated as "S") according to the embodiment. Fig. 4 is a diagram of the flow of the first refrigerant when the first and second switching valves 72a and 72b are opened or closed, fig. 4(a) is a diagram of the state of the first refrigerant in which the first switching valve 72a is opened and the second switching valve 72b is closed, and fig. 4(b) is a diagram of the state in which the first switching valve 72a is closed and the second switching valve 72b is opened. The control flow is for controlling the cooling system 1. The timing of executing the control flow is optional, but in the present embodiment, description will be made with the control flow being started after electric power is input to the cooling system 1.
In the present embodiment, the control flow is premised on the following. That is, it is assumed that a desired amount of the first refrigerant is stored in the compression unit 20. Regarding the open/close states of the various on-off valves of the cooling system 1, the first on-off valve 72a, the third conveyance on-off valve 133c, and the fourth conveyance on-off valve 133d are closed, while the other on-off valves are open. Accordingly, the first refrigerant may circulate through the first and second circulation passages 61 and 81 such that the second refrigerant flows through the output passage 131 and the third refrigerant flows through the first and second output passages 201 and 202.
When the control flow is started, as shown in fig. 3, the control unit 350 of the control unit 300 sets the set temperature of the first refrigerant (e.g., about +80 ℃ to +90 ℃, hereinafter, referred to as "first set temperature" in SA 1). The method of setting the set temperature of the first refrigerant is optional, but in the present embodiment, information indicating the set temperature input through the operation unit 310 is set as the set temperature of the first refrigerant to be set. Here, the present invention is not limited to this, and for example, information indicating the set temperature stored in advance in the storage unit 360 or information indicating the set temperature received from the external apparatus through the communication unit 320 may be set as the set temperature of the first refrigerant to be set (in addition, the same applies to a method of setting the second set temperature of SA2, which will be described later).
In SA2, the control unit 350 of the control unit 300 sets a set temperature (e.g., about-20 ℃ to +80 ℃, hereinafter referred to as "second set temperature") of the second refrigerant.
In SA3, the compression control unit 352 of the control unit 300 controls the compression unit 20 (specifically, repeatedly performs control of the above-described operation cycle). In the present embodiment, the flow of SA3 is continued until the control flow ends.
Here, the control method of the compressing unit 20 is optional, but in this embodiment, the compressing unit 20 (specifically, the operating frequency of the compressing unit 20) is controlled according to the detection result of the first temperature detecting unit 73a or the second temperature detecting unit 73b in SA3, and the detection result of the first feeding temperature detecting unit 135a, or the second feeding temperature detecting unit 135b in SA 3. For example, when the temperature of the second refrigerant obtained from the first feeding temperature detecting unit 135a (or the second feeding temperature detecting unit 135b) is higher than the second set temperature set in SA2, the flow rate of the first refrigerant flowing out of the compression unit 20 is increased by increasing the operating frequency of the compression unit 20, so that the temperature of the first refrigerant obtained from the first temperature detecting unit 73a (or the second temperature detecting unit 73b) is decreased. Further, when the temperature of the second refrigerant obtained from the first feeding temperature detecting unit 135a (or the second feeding temperature detecting unit 135b) is lower than the second set temperature set in SA2, the temperature of the first refrigerant obtained from the first temperature detecting unit 73a (or the second temperature detecting unit 73b) is decreased by decreasing the operating frequency of the compression unit 20 to decrease the first refrigerant flowing out of the compression unit 20. Therefore, the compression unit 20 may be controlled based on the temperature of the first refrigerant and the temperature of the second refrigerant, and the compression unit 20 may be effectively controlled.
In SA4, the switching control unit 351 of the control unit 300 controls the switching states of the first and second switching valves 72a and 72b based on the second set temperature set in SA 2.
Here, the method of opening or closing the first and second switching valves 72a and 72b is optional, but in the present embodiment, when the second set temperature is higher than the critical temperature of the first refrigerant (for example, the critical temperature of the first refrigerant previously stored in the first refrigerant of the storage unit 360), the first switching valve 72a is opened and the second switching valve 72b is closed. Accordingly, as shown in fig. 4(a), the first refrigerant in the outlet side tube 62a flows into the storage unit 30. In addition, when the second set temperature is lower than the critical temperature of the first refrigerant, the first switching valve 72a is closed and the second switching valve 72b is opened. Therefore, as shown in fig. 4(b), the first refrigerant in the storage unit 30 flows into the inlet side tube 62 b.
In this manner, the inflow and outflow of the first refrigerant in the storage unit 30 can be efficiently performed by the open/close control of the first and second switching valves 72a and 72b of the second set temperature. In particular, when the second set temperature is higher than the critical temperature of the first refrigerant, the first refrigerant in the high compression state and the high density state may flow into the storage unit 30 from the outlet side tube 62 a. Therefore, when the second set temperature is high, it is possible to effectively prevent the pressure of the first circulation passage 61 from excessively increasing or the cooling capacity from excessively increasing. Further, when the second set temperature is lower than the critical temperature of the first refrigerant, the first refrigerant in the storage unit 30 may flow into the inlet side tube 62b, and the amount of refrigerant of the first circulation passage 61 may be increased by that amount. Accordingly, the pressure in the first circulation passage 61, which decreases with a decrease in the second set temperature, can be recovered, and the function of the first circulation passage 61 can be easily maintained. Therefore, since it is easy to maintain the functions of the compression unit 20, the storage unit 30, and the first circulation passage 61, the usability of the cooling system 1 can be maintained. Since the first refrigerant is carbon dioxide, the pressure of the first circulation passage 61 can be prevented from being excessively increased even if the refrigerant is easily expanded compared to freon gas. Further, since the second refrigerant is a cooling refrigerant of the semiconductor manufacturing system, even if the temperature range of the second refrigerant is relatively wide and the temperature range of the second refrigerant is wide, the pressure of the first circulation passage 61 can be prevented from excessively rising. To prevent a flow rate of the first refrigerant in the first circulation passage 61 from being reduced when the first refrigerant is condensed in the storage unit 30.
Returning to fig. 3, at SA5, switching control section 351 of control section 300 controls the open/close state of sixth switching valve 72 f. Further, in the present embodiment, the flow of SA5 continues until the control flow ends.
Here, the method of opening or closing the sixth switching valve 72f is optional, but in the embodiment, the method is performed based on the second set temperature. For example, when the second set temperature is lower than the threshold value stored in the storage unit 360 in advance, the sixth switching valve 72f is opened to a predetermined opening degree. Therefore, since the first refrigerant in the upstream portion with respect to the fifth heat exchange unit 45 in the fourth branch pipe 71d flows toward the downstream portion with respect to the fifth heat exchange unit 45 in the fourth branch pipe 71d, the heat exchange of the first refrigerant is performed by the fifth heat exchange unit 45. Further, when the second set temperature is higher than the threshold value, the sixth switching valve 72f is closed. Accordingly, since the first refrigerant in the upstream portion with respect to the fifth heat exchange unit 45 in the fourth sub-tube 71d does not flow to the downstream portion with respect to the fifth heat exchange unit 45 in the fourth sub-tube, the fifth refrigeration exchange unit 45 does not heat-exchange the first refrigerant.
Through the above-described flow, the opening degree of the sixth on-off valve 72f can be adjusted based on the second set temperature, and the temperature of the first refrigerant in the first cooling target side pipe 63a can be effectively adjusted.
After the SA5 process, the switch control unit 351 of the control unit 300 starts the first temperature adjustment process (SA 6).
(control flow-first temperature regulating flow)
Next, the first temperature adjustment flow (SA6) will be described. Fig. 5 is a flowchart of the first temperature adjustment. The first temperature adjustment flow is a flow for adjusting the temperature of the first refrigerant in the cooling target side tube 63.
When the first temperature adjustment flow is started, the switching control unit 351 of the control unit 300 acquires the temperature of the second refrigerant from the first conveying temperature detecting unit 135a (or the second conveying temperature detecting unit 135b) in SB1, as shown in fig. 5.
At SB2, the switching control unit 351 of the control unit 300 determines whether the temperature of the second refrigerant acquired at SB1 is the second set temperature. Then, when it is not determined that the temperature of the second refrigerant is the second set temperature (SB2, no), the switching control unit 351 of the control unit 300 proceeds to SB 3. Meanwhile, when it is determined that the temperature of the second refrigerant is the second set temperature (SB2, yes), the switching control unit ends the first temperature adjustment flow and returns to the control flow of fig. 3.
In SB3, the switching control unit 351 of the control unit 300 controls the opening degrees of the fourth switching valve 72d and the fifth switching valve 72e based on the temperature of the second refrigerant acquired in SB 1. Then, the switching control unit 351 of the control unit 300 proceeds to SB1, and repeats the process from SB1 to SB3 until it is determined that the temperature of the second refrigerant is the second set temperature in SB 2.
Further, the method of controlling the opening degrees of the fourth switching valve 72d and the fifth switching valve 72e is optional, but for example, when the temperature of the second refrigerant taken at SB1 is higher than the second set temperature set at SA2, the opening degree of the fourth switching valve 72d is set larger than the first reference opening degree, and the opening degree of the fifth switching valve 72e is set smaller than the first reference opening degree. Accordingly, when the amount of the first refrigerant that is present in the first cooling target side tube 63a and flows to the first heat exchange unit 41 increases and the amount of the first refrigerant decreases, the amount of heating of the second heat exchange unit 42 decreases, and the refrigerant that is heat-exchanged by the second heat exchange unit 42 and flows into the inlet side tube 62b decreases, so that cooling of the second refrigerant by the first refrigerant is promoted. Further, when the temperature of the second refrigerant taken at SB1 is lower than the second set temperature set at SA2, the opening degree of the fourth switching valve 72d is set smaller than the first reference opening degree, and the opening degree of the fifth switching valve 72e is set larger than the first reference opening degree. Accordingly, when the amount of the first refrigerant existing in the first cooling target side tube 63a and flowing into the first heat exchange unit 41 decreases, the amount of heat generation of the second heat exchange unit 42 increases, and therefore, the first refrigerant that exchanges heat by the second heat exchange unit 42 and flows into the inlet side tube 62b increases, and cooling of the second refrigerant by the first refrigerant is suppressed. The "first reference opening degree" is, for example, an opening degree of a valve when the temperature of the second refrigerant is equal to the second set temperature.
Through the above-described flow, the opening degrees of the fourth switching valve 72d and the fifth switching valve 72e are adjusted in accordance with the temperature of the second refrigerant, and the temperature of the first refrigerant in the cooling target-side pipe 63 can be effectively adjusted in accordance with the temperature of the second refrigerant.
By the first temperature adjustment flow, the temperature of the first refrigerant in the cooling target side tube 63 can be adjusted so that the temperature of the second refrigerant becomes the second set temperature, and the second refrigerant can be efficiently cooled.
Returning to fig. 3, the switch control unit 351 of the control unit 300 starts the second temperature adjustment process after the process of SA6 (SA 7).
(control flow-second temperature regulating flow)
Next, the second temperature adjustment flow (SA7) will be described. Fig. 6 is a flowchart of a second temperature adjustment flow. The second temperature adjustment flow is a flow for adjusting the temperature of the first refrigerant in the outlet side tube 62 a.
When the second temperature adjustment flow is started, as shown in fig. 6, in SC1, the switching control unit 351 of the control unit 300 acquires the temperature of the first refrigerant (or the second temperature detection unit 73b) from the first temperature detection unit 73 a.
In SC2, the switching control unit 351 of the control unit 300 determines whether the temperature of the first refrigerant acquired in SC1 is lower than a first set temperature. Then, when it is not determined that the temperature of the first refrigerant is lower than the first set temperature (SC2, no), the switching control unit 351 of the control unit 300 proceeds to SC 3. Meanwhile, when it is determined that the temperature of the first refrigerant is lower than the first set temperature (SC2, yes), the switching control unit ends the second temperature adjustment flow and returns to the control flow of fig. 3.
In SC3, the switching control unit 351 of the control unit 300 controls the opening degree of the third switching valve 72c based on the temperature of the first refrigerant acquired in SC 1. Then, the switching control unit 351 of the control unit 300 proceeds to SC1, and repeats the process from SC1 to SC3 until it is determined that the temperature of the first refrigerant is lower than the first set temperature in SC 2.
Further, the method of controlling the opening degree of the third switching valve 72c is optional, but for example, when the temperature of the first refrigerant acquired in SC1 is higher than the first set temperature set in SA1, the "opening degree" of the third switching valve 72c is set to be larger than the second reference opening degree. Therefore, since the amount of the first refrigerant existing in the cooling target-side tube 63 and flowing toward the inlet-side tube 62b increases, the temperature of the first refrigerant in the outlet-side tube 62a can be reduced. Further, when the temperature of the first refrigerant acquired in SC1 is equal to the first set temperature set in SA1, the opening degree of the third switching valve 72c is maintained at the second reference opening degree. Therefore, since the amount of the first refrigerant that is present in the cooling target-side tube 63 and that flows into the inlet-side tube 62b is maintained, the temperature rise of the first refrigerant in the outlet-side tube 62a can be suppressed. The "second reference opening degree" is, for example, an opening degree of a valve when the temperature of the first refrigerant is equal to the first set temperature.
Through the above-described flow, it is possible to adjust the opening degree of the third switching valve 72c based on the temperature of the first refrigerant, and effectively adjust the temperature of the first refrigerant in the outlet side tube 62 a.
By the second temperature adjustment flow, the temperature of the first refrigerant in the outlet side tube 62a can be adjusted so that the temperature of the first refrigerant becomes the first set temperature. Therefore, when the first refrigerant in the outlet side tube 62a flows toward the storage unit 30 through the first branch tube 71a, the temperature in the storage unit 30 is easily maintained at or above the critical temperature of the first refrigerant via the heat of the flowing first refrigerant.
Returning to fig. 3, in SA8, control section 350 of control section 300 determines whether or not a time to end the control flow (hereinafter referred to as "end time") has reached. The method of determining whether the end time has been reached is optional. For example, the timing may be determined based on whether a predetermined operation is received through the operation unit 310. Here, the end timing is determined when a predetermined operation is received, and the end timing is determined when the predetermined operation is not received. Then, when determining that the end timing has been reached (SA8, yes), the control unit 350 of the control unit 300 ends the control flow. Meanwhile, when it is not determined that the end timing has been reached (SA8, no), the routine proceeds to SA6, and proceeds from SA6 to SA8 until it is determined in SA8 that the end timing has been reached.
By the above control process, it is possible to efficiently cool the second refrigerant by using the first refrigerant while maintaining the availability of the cooling system 1.
(Effect of the embodiment)
Accordingly, according to the present embodiment, since the first sub-pipe 71a connected to the outlet side pipe 62a and causing the first refrigerant in the outlet side pipe 62a to flow to the storage unit 30 through the first sub-pipe 71a and the second sub-pipe 71b connected to the inlet side pipe 62b and causing the first refrigerant in the storage unit 30 to flow to the inlet side pipe 62b through the second sub-pipe 71b are provided, it is possible to easily maintain the temperature inside the storage unit 30 above the critical temperature (or superheated steam temperature) of the first refrigerant by the heat of the first refrigerant flowing to the storage unit 30 while suppressing an excessive increase in the pressure in the first circulation passage 61. Therefore, when the first refrigerant is condensed in the storage unit 30, the amount of the first refrigerant in the first circulation passage 61 can be suppressed from decreasing. In particular, since the first sub-pipe 71a is connected to the outlet side pipe 62a, the refrigerant can be stored in a high compressed state and a high density state as compared with the case where the first sub-pipe 71a is connected to the inlet side pipe 62 b. Accordingly, when the second set temperature is high, it is possible to prevent an excessive increase in the pressure or an excessive increase in the cooling capacity in the first circulation passage 61. Further, since the first refrigerant in the storage unit 30 can flow into the inlet side tube 62b and the temperature in the inlet side tube 62b can be increased by the heat of the flowing first refrigerant, it is possible to suppress the deterioration or malfunction of the function of the compression unit 20 due to the flow of the saturated vapor to the compression unit 20. Further, since the first switching valve 72a capable of switching whether or not to cause the first refrigerant to flow in the outlet side tube 62a to the storage unit 30, the second switching valve 72b capable of switching whether or not to cause the first refrigerant in the storage unit 30 to flow in the inlet side tube 62b, and the switching control unit 351 controlling the switching states of the first switching valve 72a and the second switching valve 72b on the basis of the second set temperature set according to the predetermined method are provided, it is possible to efficiently perform the inflow and outflow of the first refrigerant in the storage unit 30 by the on/off control of the first switching valve 72a and the second switching valve 72b based on the second set temperature. As described above, since the function of the compression unit 20, the function of the storage unit 30, and the function of the first circulation passage 61 (a technique of simply flowing the refrigerant in the low-source refrigeration cycle to the expansion tank) are easily maintained as compared with the related art, the usability of the refrigeration control system (or the cooling system 1) can be maintained.
Further, since the switching control unit 351 opens the first switching valve 72a and closes the second switching valve 72b when the second set temperature is higher than the critical temperature of the first refrigerant, and closes the first switching valve 72a and opens the second switching valve 72b when the second set temperature is lower than the critical temperature of the first refrigerant, the first refrigerant in a high compression state and a high density state can flow from the outlet side tube 62a to the storage unit 30 when the second set temperature is higher than the critical temperature of the first refrigerant. Therefore, when the second set temperature is high, it is possible to more effectively prevent an excessive increase in the pressure or an excessive increase in the cooling capacity in the first circulation passage 61. Further, when the second set temperature is lower than the critical temperature of the first refrigerant, the first refrigerant in the storage unit 30 may flow into the inlet side tube 62b, and the amount of refrigerant of the first circulation passage 61 may be increased by that amount. Therefore, the pressure in the first circulation passage 61, which decreases with a decrease in the second set temperature, can be recovered, and the function of the first circulation passage 61 can be easily maintained.
Further, since the first refrigerant is carbon dioxide, even if the first refrigerant is more likely to expand than freon gas, the pressure in the first circulation passage 61 can be prevented from excessively increasing.
Further, since the second refrigerant is a cooling refrigerant of the semiconductor manufacturing system, even if the temperature range of the second refrigerant is relatively wide and the temperature range of the second refrigerant is wide, the pressure in the first circulation passage 61 can be prevented from excessively rising. When the first refrigerant is condensed in the storage unit 30, the flow rate of the first refrigerant in the first circulation passage 61 is suppressed from decreasing.
In addition, since the heat exchange member includes the first heat exchange unit 41 capable of cooling the second refrigerant and the second heat exchange unit 42 capable of heating the second refrigerant cooled by the first heat exchange unit 41; the cooling target side tube 63 includes a first cooling target side tube 63a on the side of the first heat exchange unit 41 and a second cooling target side tube 63b on the side of the second heat exchange unit 42, and a third sub-tube 71c is provided which is connected to the inlet side tube 62b and an upstream portion with respect to the first heat exchange unit 41 in the first cooling target side tube 63 a; a third switching valve 72c capable of adjusting the amount of the first refrigerant existing in the cooling target side tube 63 and flowing to the inlet side tube 62b, and a switching control unit 351 controlling the opening degree of the third switching valve 72c based on the detection result of the first temperature detecting unit 73a (or the second temperature detecting unit 73b), and therefore, the opening degree of the third switching valve 72c can be adjusted based on the temperature of the first refrigerant, and the temperature of the first refrigerant in the outlet side tube 62a can be effectively adjusted.
Further, since the fourth switching valve 72d capable of adjusting the amount of the first refrigerant existing in the first cooling-target-side pipe 63a and flowing to the first heat exchange unit 41 and the fifth switching valve 72e capable of adjusting the amount of the first refrigerant heat-exchanged by the second heat exchange unit 42 and flowing to the inlet-side pipe 62b are provided, the switching control unit 351 may control the opening degrees of the fourth switching valve 72d and the fifth switching valve 72e according to the temperature of the second refrigerant obtained by a predetermined method, and thus, it is possible to adjust the temperature of the first refrigerant in the cooling-target-side pipe 63 such that the temperature of the second refrigerant becomes the second set temperature and effectively cool the second refrigerant.
Further, since the sixth heat exchange unit 46 that exchanges heat between the first refrigerant in the upstream portion with respect to the first heat exchange unit 41 in the first cooling subject side tube 63a and the first refrigerant in the downstream portion with respect to the second heat exchange unit 42 in the second cooling subject side tube 63b is provided, it is possible to increase the temperature of the first refrigerant in the downstream portion with respect to the second heat exchange unit 42 in the second cooling subject side tube 63b and to flow the dried first refrigerant to the compression unit 20.
Further, since the compression control unit 352 is provided which controls the compression unit 20 according to the detection result of the first temperature detection unit 73a (or the second temperature detection unit 73b) and the temperature of the second refrigerant acquired according to a predetermined method, the compression unit 20 can be controlled based on the temperature of the first refrigerant and the temperature of the second refrigerant, and the compression unit 20 can be effectively controlled.
[ III ] modified example of embodiment
Although the embodiments of the present invention have been described, the detailed configuration and portions of the present invention may be arbitrarily modified and improved within the scope of the technical spirit of the present invention described in the claims. Hereinafter, a modified example will be described.
(problems to be solved or effects of the invention)
In particular, the problem to be solved by the present invention or the effect of the present invention is not limited to the above. Further, the present invention can solve the above unsolved problems or obtain the above undescribed effects. Further, only a part of the above problems can be solved, or only a part of the above effects can be obtained.
(distribution or integration)
In addition, each of the above-described electric components is conceptual in function and need not be physically configured as shown in the drawings. That is, the detailed form of distribution or integration of the components is not limited to the form shown in the drawings, and all or a part thereof may be functionally or physically distributed or integrated by any unit in response to various loads or use states. Further, the "system" in the specification is not limited to one including a plurality of devices, but includes one configured as a single device. Further, the "device" in the specification is not limited to being configured as one of a single device, but includes one of a plurality of devices. Further, each data structure of the information described in the embodiments may be arbitrarily modified. For example, the control unit 300 may include a plurality of devices distributed to communicate with each other. Further, the control unit 350 may be provided in a part of the plurality of devices, and the storage unit 360 may be provided in another part of the plurality of devices.
(shape, value, structure, and time series)
With respect to the components illustrated in the embodiments and the drawings, the shape, the numerical value, the structure, or the time-series relationship between each other of the plurality of components may be arbitrarily modified and improved within the technical spirit of the present invention.
(third refrigerant)
In the above-described embodiment, it has been described that the third refrigerant is industrial water, but the present invention is not limited thereto. Fig. 7 is a diagram showing a modified example of the cooling system 1. For example, the third refrigerant may be air. In this case, as shown in fig. 7, the third cooling system 200 may include a first delivery unit 401 (e.g., a known blower fan) that delivers the third refrigerant to the third heat exchange unit 43, and a second delivery unit 402 (e.g., a known blower fan) that delivers the third refrigerant to the fourth heat exchange unit 44.
(first Cooling System)
In the above-described embodiment, it has been described that the first cooling system 10 includes the fifth heat exchange unit 45, the sixth heat exchange unit 46, and the removal unit 47, but the present invention is not limited thereto. For example, at least one of the fifth heat exchange unit 45, the sixth heat exchange unit 46, and the removal unit 47 may be omitted. Further, when the fifth heat exchange unit 45 is omitted, the fourth and sixth switching valves 71d and 72f may be omitted.
Further, in the above-described embodiment, it has been described that the first cooling system 10 includes the third switching valve 72c, the fourth switching valve 72d, the fifth switching valve 72e, and the sixth switching valve 72f, but the present invention is not limited thereto. For example, at least one of the third, fourth, fifth, and sixth switching valves 72c, 72d, 72e, and 72f may be omitted. Further, when the third switching valve 72c is omitted, the SA7 flow of the control flow may be omitted. In addition, when the fourth and fifth switching valves 72d and 72e are omitted, the flow of SA6 of the control flow may be omitted. Further, when the sixth switching valve 72f is omitted, the flow of SA5 of the control flow may be omitted.
Further, in the above-described embodiment, it has been described that the first cooling system 10 includes the compression unit 20, the storage unit 30, the first to sixth heat exchange units 41 to 46, the removal unit 47, and the circulation unit 50, but the present invention is not limited thereto. For example, the temperature adjustment unit 410 may be provided in addition to these components. Fig. 8 and 9 are illustrations of the installation state of the temperature adjusting unit 410. Here, the temperature adjusting unit 410 is a temperature adjusting member for adjusting the temperature of the first refrigerant in the storage unit 30, for example, by using a known temperature controller (for example, having at least one of a heating function and a cooling function) or the like, and is installed in the storage unit 30. Further, the method of installing the temperature adjusting unit 410 is optional, but may be installed in the storage unit 30, for example, as shown in fig. 8, or, as shown in fig. 9, a temperature adjusting unit may be installed so as to surround the storage unit 30 outside the storage unit 30. By the temperature adjusting unit 410, it is possible to adjust the temperature of the refrigerant in the storage unit 30 and suppress the decrease of the refrigerant in the first circulation passage 61, for example, when the refrigerant in the storage unit 30 is condensed.
(storage unit)
In the above-described embodiment, the number of the mounted memory units 30 has been described as one, but the present invention is not limited thereto. For example, the number of the mounted memory units 30 may be two or more. In this case, when the first branch pipe 71a and the second branch pipe 71b are installed in each storage unit 30, inflow and outflow of the first refrigerant may be performed in each storage unit 30.
Further, in the above-described embodiment, it has been described that a part of the outlet side tube 62a is stored in the storage unit 30, but the present invention is not limited thereto. For example, the outlet side tube 62a may not be stored in the storage unit 30 (i.e., the entire outlet side tube 62a may be installed at a position separated from the storage unit 30 as shown in fig. 8 and 9), or the storage unit 30 may be installed so as to wrap the storage unit 30 outside the storage unit 30.
(compression unit)
In the above-described embodiment, it has been described that the compression unit 20 is an operation frequency control operation type compressor, but the present invention is not limited thereto. For example, the compression unit may be a constant speed operation type compressor.
Further, in the above-described embodiment, it has been described that the compression unit 20 includes a two-stage compressor, but the present invention is not limited thereto. Fig. 10 is a diagram showing a modified example of the cooling system 1. For example, the compression unit 20 may be a single stage compressor. In this case, the cooling system 1 may omit the fourth heat exchange unit 44, the second circulation unit 80, the second output passage 202, and the second delivery switching valve 204 of fig. 1, compared to fig. 1.
(second Cooling System)
In the above-described embodiment, it has been described that the second cooling system 100 includes the exhaust hole part 110, the storage unit 120, the first to fourth delivery pipes 132a to 132d, the first to fourth delivery switching valves 133a to 133d, the pump unit 134, the first delivery temperature detecting unit 135a, the second delivery temperature detecting unit 135b, the delivery pressure detecting unit 136, and the flow rate detecting unit 137, but the present invention is not limited thereto. For example, at least one of the exhaust hole part 110, the storage unit 120, the first to fourth delivery pipes 132a to 132d, the first to fourth delivery switching valves 133a to 133d, the pump unit 134, the first delivery temperature detection unit 135a, the second delivery temperature detection unit 135b, the delivery pressure detection unit 136, and the flow rate detection unit 137 may be omitted.
(third Cooling System)
In the above-described embodiment, it has been described that the third cooling system 200 includes the first delivery switching valve 203, the second delivery switching valve 204, and the delivery temperature detecting unit 205, but the present invention is not limited thereto. For example, at least one of the first delivery switching valve 203, the second delivery switching valve 204, and the delivery temperature detecting unit 205 may be omitted.
(control flow)
In the above-described embodiment, it has been described that the operating frequency of the compression unit 20 is controlled based on the detection result of the first temperature detection unit 73a or the second temperature detection unit 73b and the detection result of the first temperature detection unit 73b and the first conveying temperature detection unit 135a or the second conveying temperature detection unit 135b in SA3, but the present invention is not limited thereto. For example, the operating frequency of the compression unit 20 may be controlled to a constant frequency.
Further, in the above-described embodiment, it has been described that when the second set temperature is higher than the critical temperature of the first refrigerant and the first switching valve 72a is closed, the first switching valve 72a is opened and the second switching valve 72b is closed, and when the second set temperature is lower than the critical temperature of the first refrigerant during SA4, the second switching valve 72b is opened, but the present invention is not limited thereto. For example, in any case where the operation pressure value of the compression unit 20 is acquired according to a predetermined method, the first switching valve 72a may be opened and the second switching valve 72b may be closed (e.g., the pressure value acquired from the first pressure detecting unit 74a, etc.) above a threshold value, and the second set temperature is higher than the critical temperature of the first refrigerant. Meanwhile, in any one of the case where the operating pressure value of the compression unit 20 is lower than the threshold value and the case where the second set temperature is lower than the critical temperature of the first refrigerant, the first switching valve 72a may be closed and the second switching valve 72b may be opened. Accordingly, the opening and closing control of the first and second opening and closing valves 72a and 72b can be performed based on the second set temperature and the operating pressure value of the compression unit 20 and the temperature in the storage unit. By the heat of the first refrigerant flowing to the storage unit 30, it is possible to easily maintain the temperature of the storage unit 30 at the critical temperature (or the superheated steam temperature) of the first refrigerant or higher while suppressing an excessive increase in the pressure in the first circulation passage 61, as compared with the case where the open/close control of the first and second switching valves 72a and 72b is performed based on only the second set temperature.
(Note)
The refrigeration control system according to note 1 is a refrigeration control system for controlling and circulating a refrigerant flowing through a circulation passage connected to a compression member so as to perform heat exchange between a cooling object and the refrigerant compressed by the compression member, and includes; a storage member for storing a refrigerant; a first pipe connected to an outlet side pipe constituting the circulation passage and located at an outlet side of the compression member, and allowing the refrigerant in the outlet side pipe to flow toward the storage member through the first pipe; a second pipe connected to the inlet-side pipe constituting the circulation passage and located at one side of the inlet of the compression section, for allowing the refrigerant in the storage member to flow to the inlet-side pipe through the second pipe; a first switching valve provided in the first tube and capable of switching whether to flow the refrigerant to the storage member in the outlet-side tube; a second switching valve provided in the second pipe and capable of switching whether or not to flow the refrigerant in the storage member to the inlet side pipe; and a switching control part which controls the on-off states of the first and second switching valves based on a set temperature of the cooling object set according to a predetermined method.
The refrigeration control system according to note 2 is the refrigeration control system according to note 1, wherein the switching control member opens the first switching valve and closes the second switching valve when the set temperature of the cooling target is higher than the critical temperature of the refrigerant, and closes the first switching valve and opens the second switching valve when the set temperature of the cooling target is lower than the critical temperature of the refrigerant.
The refrigeration control system according to note 3 is the refrigeration control system according to note 2, wherein the switching control member opens the first switching valve and closes the second switching valve in any one of a case where an operating pressure value of the compression member obtained according to a predetermined method is larger than a threshold value, or a case where a set temperature of the cooling object is higher than a critical temperature of the refrigerant, and closes the first switching valve and opens the second switching valve in any one of a case where the operating pressure value of the compression member is smaller than the threshold value, or a case where the set temperature of the cooling object is lower than the critical temperature of the refrigerant.
The refrigeration control system according to note 4 is the refrigeration control system according to any one of notes 1 to 3, further comprising: a temperature adjusting member that adjusts a temperature of the refrigerant in the storage member.
The refrigeration control system according to note 5 is the refrigeration control system according to any one of note 1 to 4, wherein the refrigerant is carbon dioxide.
The refrigeration control system according to note 6 is the refrigeration control system according to any one of note 1 to 5, wherein the cooling target is a cooling refrigerant of the semiconductor manufacturing system.
The cooling system according to note 7, which cools a cooling object using a refrigerant, is a cooling system that cools a cooling object using a refrigerant, including; a compression member for compressing the refrigerant; a circulation passage connected to the compression member, including a cooling object side tube at a cooling object side, for circulating the refrigerant to perform heat exchange between the cooling object and the refrigerant compressed by the compression member; the refrigeration control system according to any one of notes 1 to 6; and a heat exchanging member provided in the cooling target side tube, the heat exchanging member performing heat exchange between the cooling target and the refrigerant in the cooling target side tube.
The cooling system according to note 8 is the cooling system according to note 7, wherein the heat exchange members include a first heat exchange member capable of cooling a cooling target, and a second heat exchange member capable of heating the cooling target cooled by the first heat exchange member, wherein the cooling target side tube includes a first cooling target side tube located at a side of the first heat exchange member, and a second cooling target side tube located at a side of the second heat exchange member, wherein the cooling system further includes: a detecting member for detecting a temperature in the outlet side pipe or a temperature in the inlet side pipe; a third tube connected to the inlet-side tube and the upstream portion with respect to the first heat exchange element in the first cooling-target-side tube; and a third switching valve provided in the third pipe and capable of adjusting an amount of the refrigerant existing in the cooling object side pipe and flowing to the inlet side pipe, wherein the switching control part controls an opening degree of the third switching valve based on a detection result of the detection part.
The cooling system according to note 9 is the cooling system according to note 8, further comprising: a fourth switching valve that is provided upstream with respect to the first heat exchange member in the first cooling subject side tube, and that is capable of adjusting an amount of refrigerant present in the first cooling subject side tube and flowing to the first heat exchange member; and a fifth switching valve which is provided in a downstream portion of the second heat exchange member with respect to the second cooling object side tube and is capable of adjusting an amount of refrigerant that is heat-exchanged by the second heat exchange member and flows to the inlet side tube. Wherein the switching control part controls the opening degrees of the fourth and fifth switching valves based on the temperature of the cooling object acquired according to a predetermined method.
The cooling system according to note 10 is the cooling system according to any one of notes 7 to 9, further comprising: a refrigerant heat exchange member that exchanges heat between a refrigerant of an upstream portion with respect to the first heat exchange member in the first cooling subject side tube and a refrigerant of a downstream portion with respect to the second heat exchange member in the second cooling subject side tube.
The cooling system according to note 11 is the cooling system according to any one of note 7 to note 10, further comprising: and a compression control member controlling the compression member according to a detection result of the detection member and the temperature of the cooling object acquired according to a predetermined method.
(advantages of respective notes)
According to the refrigeration control system described in note 1 and the cooling system described in note 7, since the first pipe that is connected to the outlet side pipe and that causes the refrigerant in the outlet side pipe to flow to the storage member through the first pipe and the second pipe that is connected to the inlet side pipe and that causes the refrigerant in the storage member to flow to the inlet side pipe through the second pipe are provided, it is easy to maintain the temperature in the storage member at the critical temperature (or the superheated steam temperature) or higher by the heat of the refrigerant flowing to the storage member while suppressing an excessive increase in the pressure in the circulation passage. Therefore, when the refrigerant condenses in the storage member, the decrease in the refrigerant in the circulation passage can be suppressed. In particular, since the first tube is connected to the outlet side tube, the refrigerant can be stored in a high compression state and a high density state, as compared with the case where the first tube is connected to the inlet side tube. In this way, when the set temperature of the cooling target is high, it is possible to prevent the pressure in the circulation passage from excessively increasing or the cooling capacity from excessively increasing. Further, since the refrigerant in the storage member can flow into the inlet side tube, and the temperature in the inlet side tube can be increased by the heat of the flowing refrigerant, it is possible to suppress the deterioration or malfunction of the compression member due to the flow of the saturated vapor to the compression member. Further, since the first switching valve capable of switching whether or not to flow the refrigerant in the outlet side tube to the storage member and the second switching valve capable of switching whether or not to flow the refrigerant in the refrigerant to the storage member are provided, and the switching controller that controls the switching states of the first switching valve and the second switching valve according to the set temperature of the object to be cooled according to a predetermined method, the inflow and outflow of the refrigerant to and from the storage member can be efficiently performed by the open/close control of the first switching valve and the second switching valve of the set temperature of the object to be cooled. According to the above feature, since it is easy to maintain the function of the compression member, the function of the storage member, and the function of the circulation passage (a technique of simply flowing the refrigerant in the low-source refrigeration cycle to the expansion tank) as compared with the related art, it is possible to maintain the usability of the refrigeration control system (or the cooling system).
According to the refrigeration control system of note 2, since the switching controller opens the first switching valve and closes the second switching valve when the set temperature of the cooling target is higher than the critical temperature of the refrigerant, and closes the first switching valve and opens the second switching valve when the set temperature of the cooling target is lower than the critical temperature of the refrigerant. Therefore, when the set temperature of the cooling target is high, an excessive increase in the pressure in the circulation passage or an excessive increase in the cooling capacity can be more effectively prevented. Further, when the set temperature of the cooling target is lower than the critical temperature of the refrigerant, the refrigerant in the storage member may flow into the inlet side tube, and the amount of the refrigerant of the circulation passage may be increased by that amount. Accordingly, the pressure in the circulation passage, which decreases with a decrease in the set temperature of the cooling target, can be recovered, and the function of the circulation passage can be easily maintained.
According to the refrigeration control system described in note 3, since the switch control member opens the first switch valve and closes the second switch valve in any of the case where the working pressure value of the compression element is higher than the threshold value and the case where the set temperature of the cooling target is higher than the critical temperature of the refrigerant, and closes the first switch valve and opens the second switch valve in any of the case where the working pressure value of the compression element is lower than the threshold value and the case where the set temperature of the cooling target is lower than the critical temperature of the refrigerant, the opening and closing control of the first switch valve and the second switch valve can be performed based on the set temperature of the cooling target and the working pressure value of the compression element. Accordingly, the temperature in the storage member can be easily maintained above the critical temperature (or superheated steam temperature) of the refrigerant by the heat of the refrigerant flowing to the storage member, while suppressing an excessive increase in the pressure in the circulation passage as compared with the case where the opening and closing control of the first and second switching valves is performed based only on the set temperature of the cooling target.
According to the refrigeration control system described in note 4, since the temperature adjusting member for adjusting the temperature of the refrigerant in the storage member is provided, the temperature of the refrigerant in the storage member can be adjusted, and therefore, for example, when the refrigerant in the storage member condenses, the decrease of the refrigerant in the circulation passage can be suppressed.
According to the refrigeration control system described in note 5, since the refrigerant is carbon dioxide, even if it is more easily expanded than freon gas, it is possible to prevent the pressure in the circulation passage from excessively rising.
According to the refrigeration control system described in note 6, since the cooling target is the cooling refrigerant of the semiconductor manufacturing system, it is possible to prevent the pressure of the circulation passage from excessively rising even in the case where the temperature range of the cooling target is 100 ℃. Even when the refrigerant condenses in the storage member, the refrigerant is relatively wide and the flow rate of the refrigerant in the circulation passage is prevented from being reduced.
The cooling system according to note 8, since the heat exchange member includes a first heat exchange member capable of cooling the cooling target and a second heat exchange member capable of heating the cooling target cooled by the first cooling, wherein the cooling system further includes: a third tube connected to the inlet-side tube and the upstream portion with respect to the first heat exchange element in the first cooling-target-side tube; and a third switching valve capable of adjusting an amount of refrigerant existing in the cooling object side tube and flowing to the inlet side tube, wherein the opening and closing control part controls the opening degree of the third switching valve based on a detection result of the detection part, and thus, the opening degree of the third switching valve can be adjusted based on the temperature of the refrigerant, and the temperature of the refrigerant in the outlet side tube can be effectively adjusted.
The cooling system according to note 9, since the cooling system includes: a fourth switching valve capable of adjusting an amount of refrigerant existing in the first cooling subject side tube and flowing to the first heat exchange member; and a fifth switching valve capable of adjusting an amount of refrigerant heat-exchanged through the second heat exchanging element and flowing into the inlet side tube, wherein the switching control member controls opening degrees of the fourth switching valve and the fifth switching valve based on a temperature of the cooling object acquired according to a predetermined method, and thus, the temperature of the refrigerant in the cooling object side tube can be adjusted to reach a set temperature and effectively cool the refrigerant.
The cooling system according to note 10, since the cooling system further includes: a refrigerant heat exchange member that exchanges heat between a refrigerant in an upstream portion with respect to the first heat exchange member in the first cooling subject side tube and a refrigerant in a downstream portion with respect to the second heat exchange member in the second cooling subject side tube, and therefore, a temperature of the refrigerant in the downstream portion with respect to the second heat exchange member in the second cooling subject side tube may be increased, and a dried refrigerant may flow into the compression member.
The cooling system according to note 11, further comprising: a compression control member that controls the compression member based on a detection result of the detection member and a temperature of the cooling object acquired according to a predetermined method, and thus, the compression member can be controlled based on the temperature of the refrigerant and the temperature of the cooling object, and the compression member can be effectively controlled.
[ notation ] to show
1 Cooling System
10 first cooling system
20 compression unit
21 compression unit body
22 first outlet
23 first inlet
24 second outlet
25 second inlet
30 memory cell
41 first heat exchange unit
42 second heat exchange unit
43 third Heat exchange Unit
44 fourth heat exchange unit
45 fifth heat exchange unit
46 sixth heat exchange unit
47 removing unit
50 circulation unit
60 first cycle Unit
61 first circulation path
62 compression unit side tube
62a outlet side pipe
62b inlet side tube
63 side pipe to be cooled
63a first cooling target side pipe
63b second cooling target side pipe
71a first branch pipe
71b second branch pipe
71c third branch pipe
71d fourth branch pipe
72a first on-off valve
72b second on-off valve
72c third on-off valve
72d fourth switching valve
72e fifth switching valve
72f sixth switching valve
73a first temperature detecting unit
73b second temperature detecting unit
73c third temperature detecting unit
74a first pressure detecting unit
74b second pressure detecting unit
74c third pressure detecting unit
80 second circulation unit
81 second circulation path
82 temperature detecting unit
83 pressure detecting unit
100 second cooling system
110 exhaust hole part
120 memory cell
130 conveying unit
131 output channel
132a first distributing pipe
132b second distribution pipe
132c third distributing pipe
132d fourth distributing pipe
133a first transfer switching valve
133b second transfer switching valve
133c third transfer switching valve
133d fourth transfer switching valve
134 pump unit
135a first conveying temperature detecting unit
135b second conveying temperature detecting unit
136 delivery pressure detecting unit
137 flow rate detecting unit
200 third cooling system
201 first output channel
202 second output channel
203 first delivery switching valve
204 second delivery on-off valve
205 conveying temperature detecting unit
300 control unit
310 operating unit
320 communication unit
330 output unit
340 power supply unit
350 control unit
351 switch control unit
352 compression control unit
360 storage unit
401 first conveyance unit
402 second conveying unit
410 temperature adjusting unit

Claims (11)

1. A refrigeration control system for controlling and circulating a refrigerant flowing through a circulation passage connected to a compression member to perform heat exchange between a cooling target and the refrigerant compressed by the compression member, comprising:
a storage member storing the refrigerant;
a first pipe connected to an outlet side pipe constituting the circulation passage and located at an outlet side of the compressing member, and allowing the refrigerant in the outlet side pipe to flow toward the storage member through the first pipe;
a second pipe connected to an inlet side pipe constituting the circulation passage and located at an inlet side of the compression member, and allowing the refrigerant in the storage member to flow to the inlet side pipe through the second pipe;
a first switching valve provided in the first pipe and capable of switching whether or not to flow the refrigerant to the storage member in the outlet-side pipe;
a second switching valve provided in the second pipe and capable of switching whether or not to flow the refrigerant in the storage member to the inlet side pipe; and
a switching control part which controls a switching state of the first switching valve and the second switching valve based on a set temperature of the cooling object set according to a predetermined method.
2. The refrigeration control system of claim 1, wherein the switching control member opens the first switching valve and closes the second switching valve when the set temperature of the cooling object is higher than a critical temperature of the refrigerant; when the set temperature of the cooling object is lower than the critical temperature of the refrigerant, the switch control member closes the first switch valve and opens the second switch valve.
3. The refrigeration control system according to claim 2, wherein the switching control part opens the first switching valve and closes the second switching valve in any one of a case where an operating pressure value of the compression part obtained according to the predetermined method is greater than a threshold value, or a case where the set temperature of the cooling object is higher than the critical temperature of the refrigerant; and the switching control member closes the first switching valve and opens the second switching valve in any one of a case where the working pressure value of the compression member is less than the threshold value or a case where the set temperature of the cooling object is lower than the critical temperature of the refrigerant.
4. The refrigeration control system of any of claims 1 to 3, further comprising: a temperature adjusting member for adjusting the temperature of the refrigerant in the storage member.
5. The refrigeration control system of any of claims 1 to 4, wherein the refrigerant is carbon dioxide.
6. The refrigeration control system of any of claims 1 to 5, wherein the cooling target is a cooling refrigerant of a semiconductor manufacturing system.
7. A cooling system for cooling a cooling object using a refrigerant, comprising:
a compression member compressing the refrigerant;
a circulation passage connected to the compression member, including a cooling target side tube on the cooling target side, and circulating the refrigerant to perform heat exchange between the cooling target and the refrigerant compressed by the compression member;
a refrigeration control system as claimed in any one of claims 1 to 6; and
a heat exchanging member that is provided in the cooling object side tube and exchanges heat between the cooling object and the refrigerant in the cooling object side tube.
8. The cooling system of claim 7, wherein the heat exchange member includes a first heat exchange member capable of cooling the cooling object, and a second heat exchange member capable of heating the cooling object cooled by the first heat exchange member,
wherein the cooling target side tube includes a first cooling target side tube located on the first heat exchanging element side and a second cooling target side tube located on the second heat exchanging element side,
wherein the cooling system further comprises:
a detecting member that detects a temperature in the outlet side pipe or a temperature in the inlet side pipe;
a third tube connected to the inlet-side tube and an upstream portion with respect to the first heat exchange element in the first cooling-target-side tube; and
a third on/off valve provided in the third pipe and capable of adjusting the amount of the refrigerant existing in the cooling target side pipe and flowing to the inlet side pipe, and
wherein the switch control member controls an opening degree of the third switch valve based on a detection result of the detection member.
9. The cooling system of claim 8, further comprising:
a fourth switching valve that is provided at the upstream portion with respect to the first heat exchange member in the first cooling subject-side tube, and that is capable of adjusting the amount of the refrigerant present in the first cooling subject-side tube and flowing toward the first heat exchange member; and
a fifth switching valve provided at a downstream portion of the second heat exchange member with respect to the second cooling object side tube and capable of adjusting an amount of the refrigerant heat-exchanged by the second heat exchange member and flowing to the inlet side tube,
wherein the switching control part controls an opening degree of the fourth switching valve and the fifth switching valve based on the temperature of the cooling object acquired according to the predetermined method.
10. The cooling system of any one of claims 7 to 9, further comprising:
a refrigerant heat-exchanging member that exchanges heat between the refrigerant of the upstream portion with respect to the first heat-exchanging member in the first subject-side tube and the refrigerant of the downstream portion with respect to the second heat-exchanging member in the second subject-side tube.
11. The cooling system of any one of claims 7 to 10, further comprising:
a compression control member that controls the compression member based on a detection result of the detection member and the temperature of the cooling object acquired according to the predetermined method.
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US20210302087A1 (en) 2021-09-30
US11841177B2 (en) 2023-12-12
EP3933297B1 (en) 2023-11-08
SG11202104998WA (en) 2021-09-29
EP3933297A1 (en) 2022-01-05
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JP6980945B2 (en) 2021-12-15
JPWO2020174530A1 (en) 2021-09-30

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