CN113137563B - Filling method of high-purity inorganic compound dichlorosilane subpackaging storage container - Google Patents
Filling method of high-purity inorganic compound dichlorosilane subpackaging storage container Download PDFInfo
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- CN113137563B CN113137563B CN202010048020.1A CN202010048020A CN113137563B CN 113137563 B CN113137563 B CN 113137563B CN 202010048020 A CN202010048020 A CN 202010048020A CN 113137563 B CN113137563 B CN 113137563B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/02—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with liquefied gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/553—Compounds comprising hydrogen, e.g. silanes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/04—Methods for emptying or filling
- F17C2227/044—Methods for emptying or filling by purging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/03—Dealing with losses
- F17C2260/035—Dealing with losses of fluid
- F17C2260/037—Handling leaked fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
- F17C2260/044—Avoiding pollution or contamination
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The invention discloses a high-purity inorganic compound dichlorosilane (SiH)2Cl2) A filling method for split charging storage container includes separating steel cylinder from raw material barrel in different environment space, controlling environment temperature of steel cylinder to be lower than that of raw material barrel, separating cooling water pipeline with 3-8 deg.C cooling water by said filling pipeline, opening raw material barrel to liquefy dichlorosilane flowing to said filling pipeline by cooling water, automatically filling dichlorosilane liquid into steel cylinder at stable flow rate by temperature difference between two ends of steel cylinder and raw material barrel, closing valve port of steel cylinder after filling, discharging all gas in filling pipeline to washing tower, absorbing harmful gas by washing liquid, confirming to detach tube under safe state and achieving effect of safely filling dichlorosilane under effective condition of blocking external gas.
Description
Technical Field
The present invention relates to a gas filling method, and more particularly, to a method for filling a high-purity dichlorosilane dispensing storage container, which effectively blocks the outside air for safe operation.
Background
Dichlorosilane (SiH)2Cl2) Can be used as starting material for semiconductor silicon layers in microelectronics, and has the advantages that it can be decomposed at a lower temperature, and has higher silicon crystal growth rate, dichlorosilane is a gas with active chemical property, can hydrolyze rapidly in air and spontaneously ignite, so that the air-blocking state needs to be maintained during the operation, the toxicity of dichlorosilane is high, the safety risk also comprises the irritation and absorption of skin and eyes, when the empty bottle of dichlorosilane is recycled and refilled, a small amount of residual gas remains in the empty bottle, and if the residual gas is carelessly leaked, the dichlorosilane gas is easy to leak, when the dichlorosilane filling operation is performed, the dichlorosilane raw material barrel directly fills the vacuum-shaped steel cylinder by pressure difference, and after the pressure of the steel cylinder is increased, the filling speed will be reduced significantly, so that the whole filling time is prolonged and the filling pipeline is kept high for a long time.Under the pressure condition, the risk of toxic gas leakage is increased, and the known structure can not find out the defect of insufficient safety of residual gas recovery and filling operation.
In view of the above, the present inventors have made various design and judicious evaluations with respect to the above objects based on the manufacturing, development and design experiences of related products over many years, and finally have obtained a practical invention.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a high purity inorganic compound dichlorosilane (SiH) against the above disadvantages of the prior art2Cl2) A method of filling a storage container comprising the steps of:
obtaining a steel cylinder filled with stable gas, checking the valve port to confirm cleanness and no abnormality, weighing the steel cylinder to obtain the weight of the empty cylinder, connecting the valve port of the steel cylinder, a raw material barrel and a filling control device by a filling pipeline, isolating the steel cylinder and the raw material barrel in different environmental spaces, carrying out air tightness test on the filling pipeline by the filling control device under the condition that the steel cylinder and the raw material barrel are both closed, opening the valve port of the steel cylinder to extract the stable gas to form a vacuum state, controlling the environmental temperature of the steel cylinder to be lower than the environmental temperature of the raw material barrel, isolating the filling pipeline by a coating cooling water pipeline, circulating the cooling water pipeline by 3-8 ℃, opening the raw material barrel to liquefy dichlorosilane flowing to the filling pipeline by using the cooling water, and automatically filling dichlorosilane liquid into the steel cylinder at a stable flow rate through the temperature difference between the steel cylinder and the two ends of the raw material barrel, and after the steel cylinder is filled to the rated weight, closing a valve port of the steel cylinder, discharging all gas in the filling pipeline to a washing tower to form gas-liquid two-phase contact, absorbing harmful gas by virtue of the washing liquid, confirming that the filling pipeline is disassembled in a safe state, and moving the steel cylinder to a finished product area for storage.
Wherein the stable gas is helium (He) or nitrogen (N)2) Nitrogen gas (N) used2) Is a purity grade of 4.5N or more.
Wherein, the airtight test means that the internal pressure between 0.3Mpa and 0.35Mpa is formed in the filling pipeline in a closed way, and the pressure is kept for 2min to 5min without pressure reduction, so that the airtight condition is met.
Wherein, the positive pressure value of the filling seal of the steel cylinder is between 0.07MPa and 0.15 MPa.
Wherein the internal pressure of the steel cylinder in a vacuum state is-0.1 MPa.
Wherein, the filling pipeline is subjected to leakage test for 2min to 5min after being washed with harmful gas, and is repeatedly replaced by stable gas for a plurality of times to seal the filling pipeline by the stable gas.
Wherein the environment temperature of the steel cylinder is between 8 ℃ and 18 ℃, and the environment temperature of the raw material barrel is between 25 ℃ and 35 ℃.
Wherein, before connecting the filling pipeline, the steel cylinder is connected by a grounding wire, thereby preventing the operation danger caused by static electricity.
Wherein, it further comprises the steps of: a11 leak test of finished product, after filling dichlorosilane into the steel cylinder and sealing, cleaning the valve port of the steel cylinder with isopropyl alcohol (IPA), and after drying, standing litmus paper at the valve port to confirm whether there is leakage, wherein dichlorosilane has a purity grade between 3.5N and 5N.
Wherein the purity grade of the dichlorosilane is 4N.
The main object of the present invention is to isolate the steel cylinder and the raw material barrel in different environmental spaces, after air-tight test and vacuum extraction are performed in sequence, control the environmental temperature of the steel cylinder to be lower than the environmental temperature of the raw material barrel, and the filling pipeline is isolated and coated with a cooling water pipeline, and the cooling water pipeline circulates with cooling water of 3 ℃ to 8 ℃, open the raw material barrel and liquefy dichlorosilane flowing to the filling pipeline by using the cooling water, and through the temperature difference between the steel cylinder and the raw material barrel, the dichlorosilane liquid is automatically filled into the steel cylinder at a stable flow rate, and close the valve port of the steel cylinder after filling to a rated weight, discharge all gas in the filling pipeline to be washed to form gas-liquid two-phase contact, and confirm that the filling pipeline is disassembled in a safe state by absorbing harmful gas with the washing liquid, thereby under the condition of effectively isolating external gas, the effect of safely filling dichlorosilane is achieved, so that high-purity dichlorosilane is ensured to be filled in the steel cylinder, and abnormal change is avoided when the steel cylinder is applied to a semiconductor manufacturing process.
Other objects, advantages and novel features of the invention will become apparent from the following detailed description of the invention when considered in conjunction with the drawings.
Drawings
FIG. 1 is a flow chart of the operation of filling the cylinder with dichlorosilane of the present invention.
Symbolic description in the drawings:
steel bottle appearance inspection-101;
filling and piping operation-103;
hermetic test- -104;
vacuum treatment- -105;
confirm ambient temperature-106;
pipeline cooling water circulation-107;
dichlorosilane fill-108;
pipeline post-treatment-109;
the steel cylinder is moved to a finished product area-110;
and (4) finished product leakage testing-111.
Detailed Description
To further understand and appreciate the objects, features and functions of the present invention, reference is made to the following detailed description taken in conjunction with the accompanying drawings, in which:
first, as shown in FIG. 1, a high purity inorganic compound, dichlorosilane (SiH)2Cl2) A method of filling a storage container into separate containers, comprising the steps of:
a1 cylinder visual inspection (101): obtaining a steel cylinder filled with stable gas, checking whether the valve port is clean and abnormal, if the valve port is dirty, deformed, damaged or rusted, judging the valve port as a defective product without performing the subsequent dichlorosilane filling step, thereby improving the safety of operation, wherein the stable gas is helium (He) or nitrogen (N)2) Nitrogen gas (N) used2) The purity grade is more than or equal to 4.5N;
a2 steel cylinder weight confirmation (102): weighing the steel cylinder to obtain the weight of the empty cylinder, deducing the weight of the filled dichlorosilane from the measured weight and controlling the time for stopping filling;
a3 filling pipe work (103): the valve port, the raw material barrel and the filling control device of the steel cylinder are connected by a filling pipeline, the steel cylinder is connected by a grounding wire before the filling pipeline is connected, so that the operation danger caused by static electricity is prevented, and the steel cylinder is locked by a torque wrench to 400 kgf/cm after being locked by a bare hand when the recovery pipeline is connected2The steel cylinder is connected with the raw material barrel in an upright mode, so that liquefied dichlorosilane cannot block a valve port when being filled, wherein the steel cylinder and the raw material barrel are isolated from different environmental spaces;
a4 hermetic seal test (104): the filling control device carries out air tightness test on the filling pipeline under the condition that the steel cylinder and the raw material barrel are both closed, wherein the air tightness test is to form an internal pressure of 0.3Mpa to 0.35Mpa in the filling pipeline in a closed manner, and the pressure is kept for 2min to 5min without pressure reduction, so that the air tightness condition is met;
a5 vacuum treatment (105): opening the valve port of the steel cylinder to draw stable gas to form a vacuum state, wherein the internal pressure of the steel cylinder forming the vacuum state is-0.1 Mpa, so that dichlorosilane can be easily filled into the steel cylinder due to pressure difference;
a6 confirmation ambient temperature (106): controlling the environment temperature of the steel cylinder to be lower than that of the raw material barrel, wherein the environment temperature of the steel cylinder is 8-18 ℃, namely the steel cylinder is placed in a refrigerating chamber, and the environment temperature of the raw material barrel is 25-35 ℃, namely the steel cylinder is placed in a normal temperature chamber, so that a sufficient temperature difference effect is achieved at low cost;
a7 pipeline cooling water circulation (107): the filling pipeline is separately coated with a cooling water pipeline, and cooling water with the temperature of 3 ℃ to 8 ℃ flows through the cooling water pipeline in a circulating way;
a8 dichlorosilane fill (108): opening the raw material barrel to utilize cooling water to flow the silicon dichloride to the filling pipelineLiquefying alkane, automatically filling dichlorosilane liquid into the steel cylinder at a stable flow rate by using the temperature difference between the steel cylinder and the two ends of the raw material barrel, and applying 100 kgf/cm by using a torque wrench after the dichlorosilane liquid is filled to a rated weight2The torsion of the steel cylinder closes the valve port of the steel cylinder, the filling and sealing positive pressure value of the steel cylinder is between 0.07Mpa and 0.15Mpa, the purity grade of dichlorosilane is between 3.5N and 5N, and the optimal purity grade of dichlorosilane is 4N;
a9 line post-treatment (109): discharging all gas in the filling pipeline to a washing tower to form gas-liquid two-phase contact, absorbing harmful gas by using a washing liquid, carrying out a leakage test on the filling pipeline for 2-5 min after washing the harmful gas, repeatedly replacing the filling pipeline with stable gas for a plurality of times, filling the filling pipeline with the stable gas, and confirming that the filling pipeline is dismounted in a safe state;
the A10 steel cylinder is moved to the finished product area (110): finally, the steel cylinder is moved to a finished product area for storage;
a11 finished product leak test (111): after dichlorosilane was filled into the cylinder and sealed, the valve port of the cylinder was cleaned with isopropyl alcohol (IPA), and after drying, litmus paper was left to stand at the valve port to confirm the presence or absence of leakage.
With the structure of the above embodiment, the following benefits can be obtained: the steel cylinder and the raw material barrel are isolated in different environmental spaces, after air tightness test and vacuum pumping are carried out in sequence, the environmental temperature of the steel cylinder is controlled to be lower than the environmental temperature of the raw material barrel, the filling pipeline is isolated and coated with a cooling water pipeline, the cooling water pipeline is circulated with cooling water with the temperature of 3 ℃ to 8 ℃, the raw material barrel is opened, dichlorosilane flowing to the filling pipeline is liquefied by the cooling water, dichlorosilane liquid is automatically filled into the steel cylinder at a stable flow speed through the temperature difference between the steel cylinder and the two ends of the raw material barrel, a valve port of the steel cylinder is closed after the steel cylinder is filled to a rated weight, all gas in the filling pipeline is discharged to a washing tower to form gas-liquid two-phase contact, harmful gas is absorbed by washing liquid, the filling pipeline is confirmed to be disassembled in a safe state, and the effect of safely filling dichlorosilane is achieved under the condition of effectively isolating external gas, thereby ensuring that the steel cylinder is filled with high-purity dichlorosilane, and the high-purity dichlorosilane can not generate abnormal change when being applied to a semiconductor manufacturing process.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention; all equivalent changes and modifications made according to the claims of the present invention should be covered by the present invention.
Claims (10)
1. A filling method for a subpackaging storage container of a high-purity inorganic compound dichlorosilane is characterized by comprising the following steps: a1 Steel bottle appearance inspection: obtaining a steel cylinder filled with stable gas, and checking whether a valve port of the steel cylinder is clean and has no abnormity;
a2 confirmation of cylinder weight: weighing the steel cylinder to obtain the weight of the empty cylinder;
a3 filling and piping work: a filling pipeline is connected with a valve port of the steel cylinder, the raw material barrel and the filling control device, so that the steel cylinder and the raw material barrel are isolated from different environmental spaces;
a4 hermetic seal test: the filling control device carries out air tightness test on the filling pipeline under the condition that the steel cylinder and the raw material barrel are both closed;
a5 vacuum treatment: opening the valve port of the steel cylinder to draw the stable gas to form a vacuum state;
a6 confirms ambient temperature: controlling the environment temperature of the steel cylinder to be lower than the environment temperature of the raw material barrel;
a7 pipeline cooling water circulation: the filling pipeline is separately coated with a cooling water pipeline, and cooling water with the temperature of 3 ℃ to 8 ℃ flows through the cooling water pipeline in a circulating way;
a8 dichlorosilane filling: opening the raw material barrel, liquefying dichlorosilane flowing to the filling pipeline by using cooling water, automatically filling dichlorosilane liquid into the steel cylinder at a stable flow rate through the temperature difference between the steel cylinder and two ends of the raw material barrel, and closing a valve port of the steel cylinder after the raw material barrel is filled to a rated weight;
a9 pipeline post-treatment: discharging all gas in the filling pipeline to a washing tower to form gas-liquid two-phase contact, absorbing harmful gas by virtue of washing liquid, and confirming that the filling pipeline is disassembled in a safe state;
moving the A10 steel cylinder to a finished product area; the steel cylinder is moved to a finished product area for storage.
2. The method of claim 1, wherein the stable gas is helium or nitrogen, and the nitrogen used is at least 4.5N purity grade.
3. The method for filling a divided storage container of dichlorosilane, a high purity inorganic compound, according to claim 1, wherein the airtightness test is performed by: the inner pressure between 0.3Mpa and 0.35Mpa is formed in the filling pipeline in a closed way, and the pressure is kept for 2min to 5min without pressure reduction, so that the airtight condition is met.
4. The method of claim 1, wherein the positive pressure of the cylinder is between 0.07Mpa and 0.15 Mpa.
5. The method for filling a separate storage container for dichlorosilane as a high purity inorganic compound according to claim 1, wherein the internal pressure of the steel cylinder in a vacuum state is-0.1 MPa.
6. The method as claimed in claim 1, wherein the filling line is subjected to a leak test for 2 to 5min after washing the harmful gas, and is then repeatedly replaced with a stable gas several times to seal the filling line with the stable gas.
7. The method of claim 1, wherein the ambient temperature of the steel cylinder is between 8 ℃ and 18 ℃, and the ambient temperature of the raw material barrel is between 25 ℃ and 35 ℃.
8. The method of claim 1, wherein the steel cylinder is connected to a ground line before the filling line is connected, thereby preventing the risk of electrostatic discharge.
9. The method for filling a storage container for dichlorosilane as a high purity inorganic compound according to claim 1, further comprising the steps of: a11 leak test of finished product, after filling dichlorosilane into the steel cylinder and sealing, cleaning the valve port of the steel cylinder with isopropanol, and after drying, standing the valve port with litmus paper to confirm whether there is leakage, wherein the purity of dichlorosilane is 3.5N-5N.
10. The method for filling a separate storage container for dichlorosilane as a high-purity inorganic compound according to claim 9, wherein the purity level of dichlorosilane is 4N.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010048020.1A CN113137563B (en) | 2020-01-16 | 2020-01-16 | Filling method of high-purity inorganic compound dichlorosilane subpackaging storage container |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010048020.1A CN113137563B (en) | 2020-01-16 | 2020-01-16 | Filling method of high-purity inorganic compound dichlorosilane subpackaging storage container |
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| CN113137563B true CN113137563B (en) | 2022-07-19 |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2012269A1 (en) * | 1989-03-17 | 1990-09-17 | Laurent Pelissier | Device for injecting gas under high pressure and high flow rate into an airtight chamber and recovery of the gas |
| US5482536A (en) * | 1994-04-12 | 1996-01-09 | Solvay Specialty Chemicals, Inc. | Apparatus for containment and scrubbing of toxic gas from a leakage location and method therefor |
| CN200986099Y (en) * | 2005-12-09 | 2007-12-05 | 德古萨公司 | Equipment and reactor used for filling or emptying container |
| CN102506302A (en) * | 2011-09-21 | 2012-06-20 | 大连理工大学 | Device for processing residual gas of pressure container |
| CN202972512U (en) * | 2012-10-31 | 2013-06-05 | 吴纳新 | Pump-less bottle filling device for 7N ultra-pure liquid ammonia |
| CN103175659A (en) * | 2013-02-04 | 2013-06-26 | 李连清 | Technological method for testing natural gas cylinders |
| CN104815519A (en) * | 2015-04-09 | 2015-08-05 | 北京信诺海博石化科技发展有限公司 | Recovery technology for volatile oil gas in lightweight aromatic hydrocarbons filling process |
| CN106378019A (en) * | 2016-10-20 | 2017-02-08 | 福建久策气体集团有限公司 | Preparation device of toxic electronic mixed gas and preparation method thereof |
| CN108687574A (en) * | 2018-05-31 | 2018-10-23 | 苏州金宏气体股份有限公司 | A kind of high-purity gas steel cylinder treatment process |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5428755B2 (en) * | 2009-10-26 | 2014-02-26 | トヨタ自動車株式会社 | Gas filling device |
-
2020
- 2020-01-16 CN CN202010048020.1A patent/CN113137563B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2012269A1 (en) * | 1989-03-17 | 1990-09-17 | Laurent Pelissier | Device for injecting gas under high pressure and high flow rate into an airtight chamber and recovery of the gas |
| US5482536A (en) * | 1994-04-12 | 1996-01-09 | Solvay Specialty Chemicals, Inc. | Apparatus for containment and scrubbing of toxic gas from a leakage location and method therefor |
| CN200986099Y (en) * | 2005-12-09 | 2007-12-05 | 德古萨公司 | Equipment and reactor used for filling or emptying container |
| CN102506302A (en) * | 2011-09-21 | 2012-06-20 | 大连理工大学 | Device for processing residual gas of pressure container |
| CN202972512U (en) * | 2012-10-31 | 2013-06-05 | 吴纳新 | Pump-less bottle filling device for 7N ultra-pure liquid ammonia |
| CN103175659A (en) * | 2013-02-04 | 2013-06-26 | 李连清 | Technological method for testing natural gas cylinders |
| CN104815519A (en) * | 2015-04-09 | 2015-08-05 | 北京信诺海博石化科技发展有限公司 | Recovery technology for volatile oil gas in lightweight aromatic hydrocarbons filling process |
| CN106378019A (en) * | 2016-10-20 | 2017-02-08 | 福建久策气体集团有限公司 | Preparation device of toxic electronic mixed gas and preparation method thereof |
| CN108687574A (en) * | 2018-05-31 | 2018-10-23 | 苏州金宏气体股份有限公司 | A kind of high-purity gas steel cylinder treatment process |
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