CN113099687B - Microchannel cold drawing structure with reverse mediation function - Google Patents
Microchannel cold drawing structure with reverse mediation function Download PDFInfo
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- CN113099687B CN113099687B CN202110303588.8A CN202110303588A CN113099687B CN 113099687 B CN113099687 B CN 113099687B CN 202110303588 A CN202110303588 A CN 202110303588A CN 113099687 B CN113099687 B CN 113099687B
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- 238000010622 cold drawing Methods 0.000 title description 2
- 238000001914 filtration Methods 0.000 claims abstract description 158
- 239000002245 particle Substances 0.000 claims abstract description 42
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 239000000110 cooling liquid Substances 0.000 claims description 21
- 230000008021 deposition Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 11
- 239000002826 coolant Substances 0.000 description 16
- 239000007788 liquid Substances 0.000 description 13
- 238000001816 cooling Methods 0.000 description 10
- 230000017525 heat dissipation Effects 0.000 description 9
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 230000036961 partial effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20254—Cold plates transferring heat from heat source to coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/44—Edge filtering elements, i.e. using contiguous impervious surfaces
- B01D29/46—Edge filtering elements, i.e. using contiguous impervious surfaces of flat, stacked bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/62—Regenerating the filter material in the filter
- B01D29/66—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps
- B01D29/68—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps with backwash arms, shoes or nozzles
- B01D29/688—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps with backwash arms, shoes or nozzles with backwash arms or shoes acting on the cake side
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20272—Accessories for moving fluid, for expanding fluid, for connecting fluid conduits, for distributing fluid, for removing gas or for preventing leakage, e.g. pumps, tanks or manifolds
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
A micro-channel cold plate structure with a reverse dredging function comprises an upper-layer cover plate and a lower-layer filter plate, wherein the upper surface of the upper-layer cover plate is connected with a heat source, and the lower surface of the upper-layer cover plate is connected with the upper surface of the lower-layer filter plate; a runner inlet and a runner outlet are arranged on the lower layer filter plate, the runner inlet is connected with a first-stage filtering runner inlet which is connected with more than two stages in sequence through a main runner of the filter plate, and the last-stage filtering runner outlet is connected with the runner outlet through a return runner of the filter plate; the flow channel inlet and the flow channel outlet are through holes penetrating through the lower layer filter plate, each stage of filtering flow channel is positioned on the upper surface of the lower layer filter plate, and each stage of filtering flow channel comprises different numbers of filtering units; under the condition of not adding an external force field, particles in different shapes and sizes can be separated only through the structure of the internal flow channel of the cold plate, so that the filtering effect is achieved, and the cold plate has the advantages of small mass, compact structure and the like.
Description
Technical Field
The invention belongs to the technical field of foreign matter blockage prevention of a liquid cooling heat dissipation system of electronic equipment, and particularly relates to a micro-channel cold plate structure with a reverse dredging function.
Background
With the continuous development of microelectronic packaging technology, electronic equipment is increasingly miniaturized, the packaging density of electronic components in the equipment is continuously improved, the heat flux density is correspondingly increased, and the heat dissipation problem is increasingly prominent. However, the reliability of electronic products is very sensitive to temperature changes, the failure rate of the electronic products increases with the increase of the temperature, the temperature becomes an important factor influencing the reliability index of electronic equipment, and the electronic equipment is one of the key problems restricting the improvement of the performance of electronic devices. According to the literature, most of electronic devices fail due to the fact that the temperature exceeds the specified value of the electronic component, and therefore how to timely discharge the heat generated by the electronic device with high heat flux density is a problem to be solved.
Active phased array radars are representative of military electronic devices, and since the external environment of the military electronic devices is usually very complex, and the purpose of the military electronic devices is special, the reliability of the electronic devices is very high in design. 80% -85% of the total power consumption of the antennas of the phased array radar comes from heat power consumption, which mainly comes from T/R assemblies which are massively integrated on antenna array surfaces, and as the T/R assemblies are increasingly miniaturized, the layout of tiny elements in the assemblies is compact, and the heat flow density in the assemblies is high. In the future, thousands of T/R elements are integrated on an antenna array surface, and therefore the practical application of the active phased array radar is dependent on whether the performance of the T/R elements can be further improved. The cold plate is commonly used for heat dissipation of electronic equipment and can be divided into an air cooling cold plate and a liquid cooling cold plate according to different cooling working media. Because the density and the thermal conductivity of the liquid are superior to those of the gas, the heat dissipation effect of the liquid cooling plate is far greater than that of the air cooling plate. In the liquid cooling cold plate, the microchannel cold plate is widely used in the field of heat dissipation of electronic equipment due to the advantages of compact structure, small mass, good heat exchange effect and the like.
Although the micro-channel heat dissipation cold plate has achieved a good heat dissipation effect, the problem of foreign matter blockage in the cooling working medium is becoming more and more serious as the size of the flow channel inside the micro-channel cold plate is continuously reduced. If the impurity particles with larger particle sizes can not be removed in time before the cooling working medium enters the micro-channel of the cold plate, the impurity particles are likely to form aggregation in the micro-channel cold plate, so that the flow channel of the micro-channel cold plate is blocked, and the working process of the whole heat dissipation system is further influenced. Therefore, foreign matter and impurities must be filtered before the cooling medium enters the cold plate. At present, the most common filtering method is filtering by a filter screen, but foreign particles which can cause blockage of a microchannel cold plate still exist in the filtered liquid filtered by the filter screen. Besides filtering by a filter screen, the method of adding external force fields such as sound, light, magnetism, electricity and the like to control the motion mode of particles is very effective, and has higher precision on particle control, but the particles under the action of the external force fields usually need long enough acting time to generate obvious orbit deviation so as to generate a sorting effect, and the development of the whole airborne phased array radar heat dissipation system is restricted by the additional external force field generating equipment required by the method. From this some anti-blocking plate that simply utilize runner structure particularity receive researcher's attention gradually, through ingenious design runner structure for the particle can be wherein according to its characteristics such as size, shape distinguish, greatly reduced the complexity of foreign matter clearance among the microchannel liquid cooling system, also simplified manufacturing flow.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a micro-channel cold plate structure with a reverse dredging function, which can separate particles with different shapes and sizes only through the structure of a flow channel in the cold plate under the condition of not applying an external force field, thereby achieving a filtering effect.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a micro-channel cold plate structure with a reverse dredging function comprises an upper layer cover plate 1 and a lower layer filter plate 2, wherein the upper surface of the upper layer cover plate 1 is connected with a heat source, and the lower surface of the upper layer cover plate 1 is connected with the upper surface of the lower layer filter plate 2; a runner inlet 3 and a runner outlet 11 are arranged on the lower layer filter plate 2, the runner inlet 3 is connected with the inlets of more than two stages of first-stage filter runners 5 which are connected in sequence through a filter plate main runner 4, and the outlet of the last-stage filter runner is connected with the runner outlet 11 through a filter plate return runner 10; the flow channel inlet 3 and the flow channel outlet 11 are through holes penetrating through the lower layer filter plate 2, and the filtering flow channels at all levels are positioned on the upper surface of the lower layer filter plate 2.
The filtering flow channels of all levels on the lower filtering plate 2 are of symmetrical structures, the flow channel inlet 3 and the flow channel outlet 11 are arranged on the longitudinal axis of the lower filtering plate 2, and the lower filtering plate 2 is connected with the upper cover plate 1 through a welding process.
The upper surface of the lower layer filter plate 2 is provided with five stages of filtering flow channels, namely a first stage filtering channel 5, a second stage filtering channel 6, a third stage filtering channel 7, a fourth stage filtering channel 8 and a fifth stage filtering channel 9, and each stage of filtering flow channel comprises filtering units with different quantities.
Said filter unit being symmetrical about a longitudinal axis; the filter unit comprises two filter unit main flow channels 12 and two filter unit branch flow channels 13 which are symmetrically distributed; a rectangular filter unit branch flow channel 13 is arranged on the filter unit main flow channel 12; the variable cross-section width flow channel is arranged at the tail end of the main flow channel 12 of the filtering unit, the cross-section width of the variable cross-section width flow channel is narrowed, particles which cannot pass through the tail end are continuously gathered, so that deposition is formed at the tail end of the main flow channel 12 of the filtering unit and does not enter a subsequent flow channel, and foreign matter particles and other particles which are not gathered enter a next-stage filtering flow channel along with cooling liquid from the branch flow channel 13 of the filtering unit.
The five-stage filtering flow channel arranged on the lower filtering plate 2 increases the filtering units from the first-stage filtering flow channel 5 to the third-stage filtering flow channel 7 step by step, and decreases from the third-stage filtering flow channel 7 to the fifth-stage filtering flow channel 9 step by step.
Lower floor's filter 2 have reverse mediation function, when reverse mediation, the last level when positive filtration filters the runner and becomes first level mediation runner when reverse mediation, first level filters runner 5 and becomes last level mediation runner, when reverse mediation, the coolant liquid enters into the filtration runner at different levels of lower floor's filter 2 upper surface from the runner export 11 of lower floor's filter 2 lower surface, clears away the foreign matter foreign particle deposit in each filter unit deposit area, makes it flow out the filter plate along with the coolant liquid.
During backward dredging, cooling liquid reversely enters from the filtering unit, foreign matter particles deposited during forward filtering in the deposition area are impacted by the cooling liquid, reversely flow along the narrow and widened main flow channel 12 of the filtering unit in the filtering unit, enter the filtering unit in the next filtering flow channel, enter the subsequent flow channel through the branch flow channel 13 of the filtering unit, and flow out of the lower-layer filtering plate 2 after converging the foreign matter particles in the final deposition area and the foreign matter particles in the previous dredging flow channels.
The invention has the beneficial effects that:
the micro-channel cold plate structure with the reverse dredging function has a compact structure and an obvious filtering effect, the foreign matter and impurity content in the cooling liquid is reduced step by step through the array multistage filtering units, particularly, the filtering effect is achieved only through the particularity of the internal structure under the condition that an external force field is not added, the processing is simple, and meanwhile, the filtering process is simplified;
this microchannel cold plate has reverse mediation function, consequently can recycle, guarantees the normal working process of cold plate through in time handling the foreign matter impurity in the coolant liquid to ensure the job stabilization nature and the reliability of T/R subassembly.
Drawings
Fig. 1 is a schematic structural view of the present invention.
FIG. 2 is a schematic view of the internal structure of the lower filter plate.
Fig. 3 is a schematic view of the structure of the filter unit.
FIG. 4 is a partial schematic view showing the flow direction of the cooling liquid in each filtering flow passage when the lower filtering plate is filtering in the forward direction.
FIG. 5 is a graph showing the partial effect of the lower filter plate in forward filtration.
FIG. 6 is a partial schematic view of the flowing direction of cooling liquid in each stage of dredging flow channel when the lower filter plate is dredged reversely.
FIG. 7 is a partial effect diagram of the flow of foreign matters in the reverse dredging of the lower filter plate.
Detailed Description
The present invention will be further described with reference to the following drawings and examples, which include but are not limited to the following examples:
as shown in fig. 1-7, a micro-channel cold plate structure with reverse dredging function comprises an upper cover plate 1 and a lower filter plate 2, wherein the upper surface of the upper cover plate 1 is connected with a heat source, and the lower surface of the upper cover plate 1 is connected with the upper surface of the lower filter plate 2; a runner inlet 3 and a runner outlet 11 are arranged on the lower layer filter plate 2, the runner inlet 3 is connected with an inlet of a first-stage filtering runner 5 through a filter plate main runner 4, an outlet of the first-stage filtering runner 5 is connected with an inlet of a second-stage filtering runner 6, an outlet of the second-stage filtering runner 6 is connected with an inlet of a third-stage filtering runner 7, an outlet of the third-stage filtering runner 7 is connected with an inlet of a fourth-stage filtering runner 8, an outlet of the fourth-stage filtering runner 8 is connected with an inlet of a fifth-stage filtering runner 9, and an outlet of the fifth-stage filtering runner 9 is connected with the runner outlet 11 through a filter plate backflow runner 10; the flow channel inlet 3 and the flow channel outlet 11 are through holes penetrating through the lower layer filter plate 2, and the first stage filtering flow channel 5, the second stage filtering flow channel 6, the third stage filtering flow channel 7, the fourth stage filtering flow channel 8 and the fifth stage filtering flow channel 9 are positioned on the upper surface of the lower layer filter plate 2; the cooling liquid enters a first-stage filtering flow channel 5 from a flow channel inlet 3 on the lower surface of a lower-layer filtering plate 2 through a main flow channel 4 of the filtering plate, then enters subsequent filtering flow channels at all stages, and finally flows out from a flow channel outlet 11 through a filtering plate backflow flow channel 10.
As shown in figure 2, each stage of filtering flow channel on the lower layer filtering plate 2 is of a symmetrical structure, a flow channel inlet 3 and a flow channel outlet 11 are arranged on the longitudinal axis of the lower layer filtering plate 2, the lower layer filtering plate 2 is connected with the upper layer cover plate 1 through a welding process, and the sealing performance of each stage of filtering flow channel inside the lower layer filtering plate 2 is guaranteed.
As shown in fig. 2, the five-stage filtering channels disposed on the upper surface of the lower filtering plate 2 include different numbers of filtering units, wherein the first-stage filtering channel 5 includes one filtering unit, the second-stage filtering channel 6 includes two filtering units, the third-stage filtering channel 7 includes three filtering units, the fourth-stage filtering channel 8 includes two filtering units, the fifth-stage filtering channel 9 includes one filtering unit, and the cooling liquid is filtered in each filtering unit.
As shown in fig. 3, the filter unit is symmetrical about a longitudinal axis; the filtering unit comprises two filtering unit main flow channels 12 and two filtering unit branch flow channels 13, and the rectangular filtering unit branch flow channels 13 are arranged on the filtering unit main flow channels 12; during forward filtration, a cooling liquid is divided into two paths after entering a filtering unit and then respectively enters a left filtering unit main flow channel 12 and a right filtering unit main flow channel 12, in the cooling liquid, the inertia of impurity particles with different shapes and sizes is different, wherein the particles with larger particle sizes are heavy in mass and large in inertia, the impurity particles enter the filtering unit along with the cooling liquid and then preferentially select the filtering unit main flow channel 12 with smaller flow resistance to flow, a variable cross-section width flow channel is arranged at the tail end a of the filtering unit main flow channel 12, the cross-section width of the variable cross-section width flow channel is changed from 0.8mm to 0.5mm, and the particles cannot be continuously collected through the tail end a, so that deposition is formed at the tail end a of the filtering unit main flow channel 12 and does not enter a subsequent flow channel any more, and foreign matter particles and other particles which are not collected enter a next-stage filtering flow channel along with the cooling liquid from the filtering unit main flow channel 13.
After the cooling liquid passes through the first-stage filtering flow channel 5, foreign particles cannot be completely deposited, so that the subsequent four-stage filtering flow channel is arranged for filtering again, the foreign particles in the cooling liquid passing through the multi-stage filtering flow channel are continuously deposited, the content of the foreign particles is gradually reduced, the filtering effect is further improved, and the flowing direction of the cooling liquid in each stage of filtering flow channel during forward filtering is as shown in fig. 4; the number of the filter units is increased step by step from the first-stage filtering flow passage 5 to the third-stage filtering flow passage 7, so that the cross-sectional area of the flow passage is increased step by step from the first-stage filtering flow passage 5 to the third-stage filtering flow passage 7, the flow rate of the cooling liquid is reduced step by step, the deposition effect of foreign particles can be improved, the filtering capacity of the lower-layer filter plate 2 is improved, and the forward filtering effect of the lower-layer filter plate 2 is shown in fig. 5.
When reverse mediation, coolant liquid from the lower floor filter 2 lower surface on the runner export 11 get into the upper surface of lower floor filter 2, get into the fifth level after filter backward flow runner 10 and filter in runner 9, filter the runner at all levels this moment and become the mediation runner, the coolant liquid will originally deposit the foreign matter granule in filtering the runner at all levels after dredging the runner at all levels and clear away to from runner entry 3 play lower floor filter 2, the flow direction in dredging the runner at all levels when the coolant liquid is reverse is as shown in fig. 6.
When the coolant is reversely dredged, the coolant enters from the reverse direction of the filter unit, as shown in fig. 7, the width of the flow channel at the tail end a of the main flow channel 12 of the filter unit is narrowed and widened along the flowing direction of the coolant, when the coolant flows through the tail end a, the foreign particles gathered at the tail end a are impacted by the coolant, so that the foreign particles deposited at the tail end a will flow with the coolant, when the coolant enters the next level dredging flow channel at the tail end b of the main flow channel 12 of the filter unit, the foreign particles will pass through the branch flow channels 13 of the filter unit and enter the subsequent flow channel, the foreign particles in the deposition area at the tail end c of the main flow channel 12 of the filter unit in the last level dredging flow channel will directly flow out with the coolant, the particles in the deposition area in the previous level dredging flow channel will join at the tail end d of the main flow channel 12 of the filter unit in the last level dredging flow channel and flow out of the lower filter plate 2 with the coolant, thereby completing the reverse dredging.
Although the invention has been described above with reference to an embodiment, it will be understood by those skilled in the art that many modifications may be made in the arrangement and details of the present disclosure within the principle and scope of the disclosure, the scope of which is to be determined by the appended claims, and the claims are intended to cover all modifications which are encompassed within the literal meaning or scope of the technical features in the claims.
Claims (2)
1. A micro-channel cold plate structure with a reverse dredging function comprises an upper-layer cover plate (1) and a lower-layer filter plate (2), wherein the upper surface of the upper-layer cover plate (1) is connected with a heat source, and the lower surface of the upper-layer cover plate (1) is connected with the upper surface of the lower-layer filter plate (2); the method is characterized in that: a runner inlet (3) and a runner outlet (11) are arranged on the lower layer filter plate (2), the runner inlet (3) is connected with the inlet of a first-stage filtering runner (5) which is connected with more than two stages in sequence through a filter plate main runner (4), and the outlet of the last-stage filtering runner is connected with the runner outlet (11) through a filter plate backflow runner (10); the flow channel inlet (3) and the flow channel outlet (11) are through holes penetrating through the lower layer filter plate (2), and each stage of filter flow channel is positioned on the upper surface of the lower layer filter plate (2);
each stage of filtering flow channel on the lower layer filtering plate (2) is of a symmetrical structure, a flow channel inlet (3) and a flow channel outlet (11) are arranged on a longitudinal axis of the lower layer filtering plate (2), and the lower layer filtering plate (2) is connected with the upper layer cover plate (1) through a welding process;
five stages of filtering flow channels are arranged on the upper surface of the lower filtering plate (2), namely a first stage filtering flow channel (5), a second stage filtering flow channel (6), a third stage filtering flow channel (7), a fourth stage filtering flow channel (8) and a fifth stage filtering flow channel (9), and each stage of filtering flow channel comprises different numbers of filtering units;
the filter unit is symmetrical about a longitudinal axis; the filtering unit comprises two main filtering unit runners (12) and two branch filtering unit runners (13), and the two main filtering unit runners and the two branch filtering unit runners are symmetrically distributed; a rectangular filter unit branch flow channel (13) is arranged on the filter unit main flow channel (12); the tail end of the main flow channel (12) of the filtering unit is provided with a variable cross-section width flow channel, the cross-section width of the variable cross-section width flow channel is narrowed, and particles which cannot pass through the tail end are continuously gathered, so that deposition is formed at the tail end of the main flow channel (12) of the filtering unit and do not enter a subsequent flow channel, and foreign matter particles and other particles which are not gathered enter a next-stage filtering flow channel along with cooling liquid from the branch flow channel (13) of the filtering unit;
the five-stage filtering flow channel arranged on the lower filtering plate (2) increases the filtering units from the first-stage filtering flow channel (5) to the third-stage filtering flow channel (7) step by step, and decreases from the third-stage filtering flow channel (7) to the fifth-stage filtering flow channel (9) step by step.
2. A microchannel cold plate configuration with reverse flow unblocking function according to claim 1, wherein: the lower layer filter plate (2) has a reverse dredging function, when in reverse dredging, a last stage filtering flow channel during forward filtering becomes a first stage dredging flow channel during reverse dredging, a first stage filtering flow channel (5) becomes a last stage dredging flow channel, when in reverse dredging, cooling liquid enters each stage of filtering flow channel on the upper surface of the lower layer filter plate (2) from a flow channel outlet (11) on the lower surface of the lower layer filter plate (2), foreign matter and impurity particles deposited in a deposition area of each filtering unit are removed, and the foreign matter and impurity particles flow out of the filter plate along with the cooling liquid;
when the filter unit is used for dredging in the reverse direction, cooling liquid enters from the filter unit in the reverse direction, foreign matter particles deposited during forward filtering in the deposition area are impacted by the cooling liquid and flow reversely along the narrow and widened main flow channel (12) of the filter unit in the filter unit, after entering the filter unit in the next-stage filter flow channel, the foreign matter particles in the deposition area at the last stage and the foreign matter particles in the dredging flow channel at each stage are converged and then flow out of the lower-layer filter plate (2) through the branch flow channels (13) of the filter unit, and the foreign matter particles are dredged step by step.
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