CN113056119A

CN113056119A - Laminating apparatus and method for manufacturing laminated body

Info

Publication number: CN113056119A
Application number: CN202011171428.4A
Authority: CN
Inventors: 牧野由; 森本崇; 泽田智世; 森隆博
Original assignee: Nikkiso Co Ltd
Current assignee: Nikkiso Co Ltd
Priority date: 2019-12-27
Filing date: 2020-10-28
Publication date: 2021-06-29
Anticipated expiration: 2040-10-28
Also published as: JP2021104664A; TWI760840B; CN113056119B; TW202124148A; JP6987834B2

Abstract

The invention provides a laminating device capable of laminating sheets on the basis of eliminating the warping or deflection of the sheets and a manufacturing method of a laminated body. A conveying holder (60) for lamination holds the sheets (L1-L5) in which the metal layers (104) are laminated on the insulating film (106) by vacuum adsorption and conveys the sheets to a lamination stage (80). The holder charger (70) irradiates charged particles toward the sheets (L1-L5) held by the stacking conveyance holder (60). The holder charger (60) irradiates charged particles of higher voltage as the insulating film (106) of the sheets (L1-L5) being conveyed becomes thinner.

Description

Laminating apparatus and method for manufacturing laminated body

Technical Field

The present invention relates to a laminating apparatus and a method for manufacturing a laminated body.

Background

As a circuit board to be mounted on a communication device or the like, for example, a laminate formed by laminating sheets in which a metal layer is formed on an insulating film is used as disclosed in patent documents 1 and 2.

During the manufacturing of the stack, the sheets are transported layer by the holders to the stacking station. For example, the position alignment of the sheets is performed before the sheets are conveyed by the holder, and the sheets after the position alignment are stacked on the stacking table. By performing the position alignment, the positional shift between layers is suppressed. Further, the laminated body is heated and pressure-bonded by compressing the laminated body from the upper and lower ends, thereby fixing the respective layers.

[ Prior art documents ]

[ patent document ]

Patent document 1: international publication No. 2017/150678

Patent document 2: japanese patent laid-open publication No. 2018-170521

Disclosure of Invention

Technical problem to be solved by the invention

However, the sheet may be warped or bent due to a difference in expansion rate and shrinkage rate between the insulating sheet and the metal layer due to a temperature change. When a laminated body having a sheet with warpage or flexure is pressure-bonded, the warpage and flexure of the sheet are eliminated in this process, but there is a possibility that the position of the sheet is shifted in the elimination process of the warpage and flexure.

Accordingly, an object of the present invention is to provide a laminating apparatus and a method for manufacturing a laminated body, which can laminate sheets without warping or bending of the sheets.

Means for solving the technical problem

The present invention relates to a laminating apparatus for laminating a plurality of sheets in which metal layers are laminated on insulating films. The laminating apparatus includes a laminating table, a conveyance holder, and a charger for the holder. The sheets are stacked on a stacking table. The conveying holder holds the sheet by vacuum suction and conveys it to the lamination stage. The holder is irradiated with charged particles toward the sheet held by the transport holder with a charger. The holder charger irradiates charged particles of a higher voltage as the insulating film of the sheet being conveyed becomes thinner.

According to the above structure, by irradiating charged particles to the sheet in conveyance, the sheet is electrostatically adsorbed to the conveyance holder, and warping and flexing are eliminated in the process. Here, as the insulating film of the sheet is thinner, the surface elastic modulus of the film is lower, and the amount of warpage and the amount of flexure due to the difference in expansion rate and shrinkage rate from the metal layer increase. Therefore, in the present invention, the thinner the insulating film of the sheet being conveyed, the higher the voltage of the irradiated charged particles. In this way, the voltage of the charged particles is adjusted according to the thickness of the insulating film, thereby eliminating warpage and deflection of the sheet with high accuracy.

In the above configuration, the stage charger may be configured to irradiate the charged particles toward an exposed surface of an uppermost sheet of the plurality of sheets stacked on the stacking stage. In this case, the holder charger and the stage charger irradiate charged particles having equal voltages to each other.

According to the above configuration, the sheet vacuum-sucked to the conveyance holder is irradiated with the charged particles, and the exposed surface of the uppermost sheet of the multilayer sheets stacked on the stacking table is also irradiated with the charged particles. By equalizing the voltages of the charged particles of the two, the electrostatic attraction force with which the sheet is attracted to the conveyance holder and the electrostatic attraction force with which the conveyed sheet is attracted to the uppermost sheet on the stacking table are made to coincide with each other. Thus, for example, the sheet can be prevented from warping or bending at a maximum voltage within a range in which the sheet is not prevented from being detached from the conveyance holder by the positive pressure air blowing due to electrostatic attraction.

The present invention also relates to a laminating apparatus for laminating a plurality of sheets in which metal layers are laminated on insulating films. The laminating apparatus includes a laminating table, a conveyance holder, a charger for the holder, and an image pickup device. The sheets are stacked on a stacking table. The conveying holder holds the sheet by vacuum suction and conveys it to the lamination stage. The holder is irradiated with charged particles toward the sheet held by the transport holder with a charger. The image pickup device picks up a surface shape of the sheet held by the conveyance holder. The holder is configured such that a charged particle having a voltage higher than that of a portion of the sheet in close contact with the holding surface is irradiated to a floating portion of the sheet, which is determined based on a surface shape of the sheet photographed by the image pickup device and is separated from the holding surface of the transport holder, by a charger.

According to the above configuration, the floating portion of the sheet is irradiated with the charged particles of relatively high voltage, and the electrostatic attraction force is relatively suppressed with respect to the closely adhering portion around the floating portion. Thus, the occurrence of excessive electrostatic attraction force on the sheet can be avoided, and warpage and deflection can be eliminated.

In the above configuration, the charged particles irradiated to the floating portion of the sheet may be set to a higher voltage as the insulating film of the sheet is thinner.

As described above, as the insulating film becomes thinner, the amount of warpage and flexure of the sheet increase. The thinner the insulating film is, the higher the voltage of the charged particles is set, whereby warping and deflection can be eliminated with high accuracy.

In the above configuration, the holder charger may determine the irradiation point of the charged particles on the exposed surface of the sheet held by the transport holder in a region smaller than the exposed surface. In this case, the holder charger irradiates the charged particles only when at least a part of the irradiation spot overlaps with the floating portion of the sheet held by the transport holder.

According to the above configuration, the charged particles are irradiated only when at least a part of the irradiation spot overlaps the floating portion, and the other sheet region is not irradiated with the charged particles. Therefore, it is possible to avoid excessive electrostatic adsorption force on the sheet, and the sheet can be easily detached from the holder by the stacking table.

In the above configuration, an alignment table may be provided on which the sheet before being held by the conveyance holder is placed and which aligns the placed sheet. Further, a pressing member may be provided, which is further placed on the sheet placed on the alignment stage, and presses the entire surface of the sheet. In this case, at least a part of the sheet mounting region of the alignment stage is formed of a light-transmissive member. Further, an alignment camera that photographs the sheet placed on the alignment stage with the light-transmissive member may be provided. The alignment camera photographs the sheet pressed against the alignment stage by the pressing member.

According to the above configuration, even if the sheet has warp or deflection, the warp or deflection can be eliminated by pressing the sheet against the alignment stage by the pressing member. At this time, by photographing the sheet, highly accurate alignment can be performed.

The present invention also relates to a method for producing a laminate including a plurality of sheets in which metal layers are laminated on insulating films. The manufacturing method includes a lamination step and a crimping step. In the stacking step, the sheets are held by the conveyance holder by vacuum suction and conveyed to a stacking station on which the sheets are sequentially stacked. As for the pressure bonding step, a laminated body of the sheets laminated on the lamination stage is pressure bonded and the layers are fixed. In the laminating step, the thinner the insulating film of the sheet, the higher the voltage of the charged particles irradiated to the sheet being conveyed held by the conveying holder.

In addition, in the above-described structure, in the stacking step, charged particles of equal voltage to each other may be irradiated toward the exposed surface of the sheet being conveyed held by the conveying holder and the uppermost sheet of the multilayered sheets stacked on the stacking table.

The present invention also relates to a method for producing a laminate including a plurality of sheets in which metal layers are laminated on insulating films. The manufacturing method includes a lamination step and a crimping step. In the stacking step, the sheets are held by the conveyance holder by vacuum suction and conveyed to a stacking station on which the sheets are sequentially stacked. As for the pressure bonding step, a laminated body of the sheets laminated on the lamination stage is pressure bonded and the layers are fixed. In the laminating step, charged particles having a voltage higher than that of an adhesion portion of the sheet adhering to the holding surface are irradiated to a floating portion of the sheet determined based on the surface shape of the sheet held by the conveyance holder and separated from the holding surface of the conveyance holder.

In the above configuration, the thinner the insulating film of the sheet, the higher the voltage of the charged particles irradiated to the floating portion of the sheet can be.

Effects of the invention

According to the present invention, the sheets can be stacked while eliminating warpage or deflection of the sheets.

Drawings

Fig. 1 is a diagram illustrating a laminate manufactured by the laminating apparatus according to the present embodiment.

Fig. 2 is a diagram illustrating a laminated body including a sheet in which warpage is present.

Fig. 3 is a diagram illustrating a laminated body including a sheet in which a flexure is present.

Fig. 4 is a perspective view illustrating the structure of the laminating device according to the present embodiment.

Fig. 5 is an X-Z side view illustrating the structure of the laminating apparatus according to the present embodiment.

Fig. 6 is a diagram illustrating a hardware configuration of the controller.

Fig. 7 is a diagram illustrating functional blocks of the controller.

Fig. 8 is a diagram illustrating a voltage setting flow of charging and discharging performed in the lamination process of the sheets.

Fig. 9 is a diagram for explaining a sheet stacking process (1/10) using the stacking apparatus according to the present embodiment.

Fig. 10 is a diagram for explaining a sheet stacking process (2/10) using the stacking apparatus according to the present embodiment.

Fig. 11 is a diagram for explaining a sheet stacking process (3/10) using the stacking apparatus according to the present embodiment.

Fig. 12 is a diagram for explaining a sheet stacking process (4/10) using the stacking apparatus according to the present embodiment.

Fig. 13 is a diagram for explaining a sheet stacking process (5/10) using the stacking apparatus according to the present embodiment.

Fig. 14 is a diagram for explaining a sheet stacking process (6/10) using the stacking apparatus according to the present embodiment.

Fig. 15 is a diagram for explaining a sheet stacking process (7/10) using the stacking apparatus according to the present embodiment.

Fig. 16 is a diagram for explaining a sheet stacking process (8/10) using the stacking apparatus according to the present embodiment.

Fig. 17 is a diagram for explaining a sheet stacking process (9/10) using the stacking apparatus according to the present embodiment.

Fig. 18 is a diagram for explaining a sheet stacking process (10/10) using the stacking apparatus according to the present embodiment.

Fig. 19 is a diagram illustrating a structure of a stacking apparatus according to another example of the present embodiment.

Fig. 20 is a diagram showing another example of a voltage setting flow of charging and discharging performed in the lamination process of the sheets.

Fig. 21 is a diagram showing another example of the alignment stage.

Description of the reference numerals

10 stacking devices, 12 floating portions, 20 controllers, 30L1 to 30L5 sheet stockers, 40 stocker transport holders (front-stage holders), 50 alignment tables, 52 moving mechanisms, 53 stage plates, 54 transparent plates, 56 alignment cameras, 60 stacking transport holders, 68 stage chargers, 70 holder chargers, 72 stage dischargers, 74 holder dischargers, 80 stacking tables, 90 pressure welding devices, 100A stacked body in the middle of stacking, 100B final stacked body, 110 stocker transport holder control portions, 112 alignment table control portions, 114 stacking transport holder control portions, 116 sheet information storage portions, 118 charger control portions, 120 charge remover control portions, 122 pressure welding device control portions, and 130 cameras (cameras).

Detailed Description

< layered product >

Fig. 1 illustrates a laminate 100B produced by the laminating apparatus according to the present embodiment. The laminate 100B is a final laminate obtained by laminating the lowermost layer sheet L5 to the uppermost layer sheet L1, and is different from the laminate 100A in the middle of lamination as illustrated in fig. 5, for example, which will be described later. For convenience, the laminate 100A during lamination also includes a state in which only the lowermost sheet L5 is placed on the lamination stage 80 (see fig. 4).

In the embodiment shown in fig. 1 to 21, the final laminated body 100B is composed of a laminated body including 5 layers of the sheets L1 to L5, but the laminated body manufactured by the laminating apparatus according to the present embodiment is not limited to this example. For example, the laminating apparatus according to the present embodiment may laminate a plurality of sheets other than 5, such as 12 or 20 sheets.

The final laminated body 100B may be, for example, a circuit substrate mounted in a communication device. According to the example of fig. 1, a final laminated body 100B is formed by laminating a plurality of sheets L1 to L5. The sheets L1 to L5 are each formed of a multilayer sheet in which a metal layer 104 is laminated on an insulating film 106. The insulating film 106 is made of, for example, a thermoplastic liquid crystal polymer. The metal layer 104 is made of, for example, copper.

The lowermost sheet L5 and the uppermost sheet L1 are disposed so that the metal layer 104 is exposed. For example, the lowermost sheet L5 is arranged in a reversed manner with respect to the other sheets L1 to L4. The metal layer 104 of the uppermost sheet L1 and the lowermost sheet L5 may be, for example, so-called solid films in which a metal film is formed on one surface of the insulating film 106.

The metal layers 104 of the uppermost sheet L1 and the lowermost sheet L5 are in contact with the heated pressing surface of the pressure bonding tool 90 in the pressure bonding step. The metal layer 104 having a relatively higher melting point than the insulating film 106 is in contact with the heated pressing surface, thereby suppressing melting of the contact surface of the final laminate 100B in contact with the pressing surface.

In addition, in the metal layers 104 of the sheets L2 to L4 as the intermediate layers, different wiring patterns are formed for each sheet. From this point of view, the sheets L2 to L4 are also referred to as pattern-attached insulating films. The metal layers 104 of the sheets L2 to L4 are connected to each other by a through hole 102 penetrating in the thickness direction of the insulating film 106.

The insulating film 106 of each of the sheets L1 to L5 may be formed to have a thickness different from that of the other sheets. For example, the thicker the sheet, the closer to the upper layer of the stack. Alternatively, the thinner the sheet is toward the upper layer of the laminate.

As shown in the upper part of fig. 2 and 3, the sheets L1 to L5 may warp or flex. For example, the sheets L1 to L5 warp or flex due to the difference in expansion rate or shrinkage rate between the insulating film 106 and the metal layer 104.

As shown in the lower part of fig. 2 and 3, in the pressure bonding step, the warpage or deflection is eliminated, and as a result, a positional shift occurs between the layer where the warpage or deflection occurs and the lower layer thereof. As described later, the laminating apparatus according to the present embodiment includes a structure capable of eliminating warpage or deflection of the sheets L1 to L5 before lamination.

Further, in fig. 1, as an example of the sheet, a so-called adhesive sheet in which the metal layer 104 is formed on the insulating film 106 is illustrated, but the sheet laminated by the laminating apparatus according to the present embodiment is not limited to this form. For example, only one electrically insulating film such as an insulating film may be a sheet to be laminated. The sheet to be laminated may be a pressure-sensitive adhesive sheet in which two electrically insulating films are bonded to each other, or a pressure-sensitive adhesive sheet in which metal layers are formed on both surfaces of one electrically insulating film. The sheet to be laminated may be a pressure-sensitive adhesive sheet in which a metal layer is sandwiched between a pair of electrically insulating sheets. Further, the sheet to be laminated may be a sheet having a PET film or an adhesive sheet bonded to one surface or both surfaces thereof.

< integral Structure of laminating apparatus >

Fig. 4 and 5 illustrate the laminating apparatus 10 according to the present embodiment. Next, as directional axes for explaining the layout and the like of the stacking apparatus 10, an X axis, a Y axis, and a Z axis are appropriately used. The X axis is an axis along the moving direction of the stacking transport holder 60. The Y-axis is an axis orthogonal to the X-axis on the horizontal plane. The Z axis is a vertical axis orthogonal to the X axis and the Y axis, and is equivalent to the stacking direction of the sheets L1 to L5.

In the description of the arrangement of the respective mechanisms of the stacking apparatus 10, the sheet stockers 30L1 to 30L5 are upstream and the stacking table 80 is downstream along the X axis.

The laminating apparatus 10 includes a controller 20, sheet stockers 30L 1-30L 5, a stocker conveyance holder 40, an alignment table 50, a laminating conveyance holder 60, a laminating table 80, and a pressure bonding unit 90. Further, the laminating apparatus 10 includes a stage charger 68, a holder charger 70, a stage discharger 72, and a holder discharger 74 as a charged particle irradiation means.

The sheet stockers 30L1 to 30L5 accommodate sheets L1 to L5, respectively. Note that, in fig. 4, the sheets L1 to L5 are illustrated as so-called single-sheet type sheets, and the sheet stockers 30L1 to 30L5 are illustrated as cassettes that accommodate the single-sheet type sheets, but the stacking apparatus 10 relating to the present embodiment is not limited to this form. For example, a sheet roll in which a plurality of sheets are continuously formed may be formed for each of the sheets L1 to L5, and a cutter for cutting the sheet roll may be provided. In this case, the sheet stockers 30L1 to 30L5 are configured as roll holders that hold rolls of sheets corresponding to the sheets L1 to L5, respectively.

The conveyance holder 40 for the stocker is a conveyance device that reciprocates between the sheet stockers 30L1 to 30L5 and the alignment table 50. The stocker conveyance holder 40 is provided upstream of the stacking conveyance holder 60, and is therefore also referred to as a "front-stage holder".

The sheet stockers 30L1 to 30L5 are scattered in the X-axis direction and the Y-axis direction, and therefore the conveyance holder 40 for the stocker can move in the X-axis direction and the Y-axis direction. The conveyance holder 40 for the stocker can move along, for example, an X-axis table and a Y-axis table, not shown.

As shown in fig. 5, the conveyance holder 40 for the stocker includes a lifting mechanism 42. A suction plate 44 is provided at the lower end of the elevating mechanism 42. The lifting mechanism 42 moves the suction plate 44 in the Z-axis direction (vertical direction). As the moving mechanism in the Z-axis direction, the elevating mechanism 42 includes, for example, a rack, a pinion mechanism, a stepping motor, or a servo motor.

The adsorption plate 44 is formed with a plurality of pores in a metal plate such as an aluminum plate. The lower end of the air hole is exposed, and the upper end is connected to an air pipe 46. Air of negative pressure (Vac) and positive pressure (Prs) is supplied to the air pipe 46. The air pipe 46 is evacuated when the sheets L1 to L5 are sucked. When the sheets L1 to L5 are separated, pressurized air is sent from the air pipe 46. A soft porous sheet may be provided on the contact surface of the suction plate 44 with the sheets L1 to L5.

As shown in fig. 4, the alignment table 50 aligns the sheets L1 to L5 conveyed from the conveyance holder 40 for a stocker. The alignment stage 50 includes a moving mechanism 52, a stage plate 53 as a stage, and an alignment camera 56.

The moving mechanism 52 can move the stage plate 53 in the X axis and the Y axis, and can rotate the stage plate 53 about the Z axis as a rotation axis. The stage plate 53 includes a light-transmitting plate 54 as a light-transmitting member. The light-transmitting plate 54 is provided in at least a part of a sheet placing area where the sheets L1 to L5 are placed. For example, as shown in fig. 4, at least the portions of the stage plate 53 corresponding to the four corners of the sheets L1 to L5 are formed of the light-transmitting plates 54. In addition, instead of the form shown in fig. 4, the stage plate 53 may include portions corresponding to the four corners of the sheets L1 to L5, and one light-transmitting plate 54 may be provided.

A plurality of alignment cameras 56 are provided below the stage plate 53. For example, the alignment cameras 56 are disposed at positions capable of capturing images of four corners or two corners on a diagonal of the sheets L1 to L5. The alignment camera 56 can photograph the sheets L1 to L5 placed on the stage plate 53 through the transparent plate 54 (transparent member). The alignment process of the loaded sheets L1 to L5 will be described later.

As shown in fig. 4, the conveying holder 60 for lamination holds the sheets L1 to L5 aligned by the alignment stage 50 by vacuum suction, and conveys them to the lamination stage 80. For example, in the case where the alignment stage 50 and the stacking stage 80 are disposed on the X axis, the stacking transport holder 60 may be moved only along the X axis.

As shown in fig. 5, the stacking transport holder 60 has substantially the same structure as the stocker transport holder 40. That is, the stacking conveyance holder 60 includes a lifting mechanism 62, an adsorption plate 64 provided at a lower end of the lifting mechanism 62, and an air pipe 66 connected to the adsorption plate 64.

The lifting mechanism 62 moves the suction plate 64 in the Z-axis direction (vertical direction). As the moving mechanism in the Z-axis direction, the elevating mechanism 62 includes, for example, a rack, a pinion mechanism, a stepping motor, or a servo motor.

The adsorption plate 64 is formed with a plurality of pores in a metal plate such as an aluminum plate. The lower end of the air hole is exposed, and the upper end is connected to an air pipe 66. Air of negative pressure (Vac) and positive pressure (Prs) is supplied to the air pipe 66. When the sheets L1 to L5 are adsorbed, air is sucked from the air pipe 66. When the sheets L1 to L5 are separated, pressurized air is sent out from the air pipe 66. A flexible porous sheet may be provided on the contact surface of the suction plate 64 with the sheets L1 to L5.

As shown in fig. 4, the sheets L1 to L5 are stacked on the stacking base 80. Suction holes (not shown) for holding the lowermost sheet L5 may be formed in the mounting surface of the lamination stage 80 on which the final laminate 100B (see fig. 1) is formed. As shown in fig. 5, the suction hole is connected to an air pipe 82. The lowermost sheet L5 is held on the stacking table 80 by sucking a negative pressure from the air pipe 82. Instead of vacuum suction, an adhesive sheet may be attached to the mounting surface of the lamination stage 80.

As shown in fig. 4, the laminating apparatus 10 is provided with a charger and a discharger for irradiating charged particles to the conveying holder 60 for lamination, the sheets L1 to L5 conveyed by the holder, and the laminated body 100A in the middle of lamination laminated on the lamination stage.

Specifically, the laminating apparatus 10 includes a stage charger 68, a holder charger 70, a stage remover 72, and a holder remover 74. These charging and discharging devices are constituted by ionizers, for example.

The stage charger 68 irradiates the charged particles toward the mounting surface of the lamination stage 80. As shown in fig. 5, the stage charger 68 irradiates charged particles toward the exposed surface of the uppermost sheet L3 of the plurality of sheets L3 to L5 stacked on the stacking stage 80. For example, the stage charger 68 is movable relative to the lamination stage 80. Specifically, as shown in fig. 4, the stage charger 68 is attached to the downstream end of the stacking conveyance holder 60 (a position close to the stacking stage 80), and is movable in the X axis together with the stacking conveyance holder 60.

For example, the stage charger 68 determines the irradiation point of the charged particles on the exposed surface of the uppermost sheet L3 in a region smaller than the exposed surface of the sheet L3 shown in fig. 5. For example, as shown in fig. 5, the region shorter than the length of the lamination stage 80 and the sheets L3 to L5 in the X axis direction is an irradiation point on the exposed surface of the uppermost sheet L3 of the stage charger 68. The Y-axis direction length of the irradiation point may be equal to or greater than the Y-axis direction length of the lamination stage 80 and the sheets L3 to L5. By relatively moving the lamination stage 80 and the stage charger 68 in the X-axis direction, the entire placement surface of the lamination stage 80 and the uppermost surface of the laminate 100A during lamination can be irradiated with charged particles.

The holder charger 70 and the holder discharger 74 are movable relative to the stacking transport holder 60 in the X-axis direction, i.e., the moving direction of the stacking transport holder 60. For example, the holder charger 70 and the holder discharger 74 are provided between the alignment stage 50 and the stacking stage 80, and are arranged so that the stacking conveyance holder 60 passes above them.

For example, the holder charger 70 and the holder discharger 74 irradiate the charged particles upward (in the positive Z-axis direction). As described above, the stacking conveyance holder 60 vacuum-adsorbs the sheets L1 to L5 at the lower end thereof. Therefore, when the charged particles are irradiated while the stacking transport holder 60 is moved on the holder charger 70 and the holder discharger 74, the charged particles are incident on the exposed surfaces of the transported sheets L1 to L5.

The holder charger 70 and the holder discharger 74 specify irradiation points of charged particles on the exposed surfaces of the sheets L1 to L5 held by the stacking conveyance holder 60 in a region smaller than the exposed surfaces. For example, the regions shorter than the lengths of the sheets L1 to L5 in the X axis direction are irradiation points on the exposed surfaces of the sheets L1 to L5 of the holder charger 70 and the holder discharger 74. The Y-axis direction length of the irradiation point may be equal to or greater than the Y-axis direction lengths of the sheets L1 to L5. The stacking transport holder 60, the holder charger 70, and the holder discharger 74 are relatively moved in the X-axis direction, and thereby the entire exposed surfaces of the sheets L1 to L5 transported by the stacking transport holder 60 can be irradiated with charged particles.

The stage neutralizer 72 may be fixed to the lamination stage 80, for example. For example, the stage neutralizer 72 may irradiate the charged particles on the entire surface of the mounting surface of the lamination stage 80. That is, the stage charge eliminator 72 is set to have a wider irradiation point of the charged particles on the lamination stage 80 than the stage charge eliminator 68, the holder charge eliminator 70, and the holder charge eliminator 74.

The distance between the stage charger 68, the holder charger 70, the stage discharger 72, and the holder discharger 74 and the sheet materials L1 to L5 to which the charged particles are irradiated may be 10mm to 120 mm. Further, the separation distance may be maintained at 50 mm. In this regard, a Z elevating mechanism for adjusting the position in the Z axis direction may be provided in the stage charger 68, the holder charger 70, the stage discharger 72, and the holder discharger 74.

The stage charger 68, the holder charger 70, the stage remover 72, and the holder remover 74 may be irradiated with charged particles having a voltage value V in the range of-50 kV < V < -5kV and 5kV < V <50 kV.

For example, as described later, the holder charger 70 irradiates the charged particles to eliminate warpage and deflection of the sheets L1 to L5 conveyed to the stacking conveyance holder 60. Herein, by irradiating the charged particles with a voltage value lower than-5 kV or a voltage value higher than 5kV, the warpage and deflection of the sheets L1 to L5 were effectively eliminated. Further, by setting the voltage value to a voltage value higher than-50 kV or a voltage value lower than 50kV, it is possible to suppress breakdown of the sheets L1 to L5 such as insulation breakdown.

The controller 20 shown in fig. 6 controls the respective devices of the stacking apparatus 10. The controller 20 is constituted by a computer, for example. That is, the controller 20 includes an input/output controller 21, a CPU22, a ROM23, a RAM24, and a Hard Disk Drive (HDD)25, which are connected to the internal bus 28. Further, the controller 20 includes an input section 26 such as a mouse, a keyboard, and the like, and a display section 27 such as a display, which are connected to an internal bus 28.

The ROM23, which is a storage unit of the controller 20, stores a program for executing the voltage setting flow shown in fig. 8 and the stacking process shown in fig. 9 to 18. The program may be provided by the communication unit, or may be stored in a computer-readable recording medium such as a CD-ROM or a USB memory and executed.

Programs stored in the ROM23 or provided by the communication unit and the recording medium are executed by the CPU22 of the computer constituting the controller 20. By executing this program, the controller 20 is provided with the functional blocks shown in fig. 7.

That is, the controller 20 includes a storage conveyance holder control unit 110, an alignment table control unit 112, a stacking conveyance holder control unit 114, a sheet information storage unit 116, a charger control unit 118, a neutralizer control unit 120, and a pressure contact unit control unit 122.

As shown in fig. 7, the stocker conveyance holder control unit 110 controls the operation of the stocker conveyance holder 40. For example, the conveyance holder control unit 110 for the stocker sets the destination of the conveyance holder 40 for the stocker, which does not hold the sheet, from among the sheet stockers 30L1 to 30L5 shown in fig. 4.

For example, the conveyance holder control portion 110 for the stocker includes a sheet counter 111. The sheet counter 111 stores the order of the sheet stockers 30L1 to 30L5 designated as the moving destinations of the conveyance holder 40 for the stocker.

For example, the conveyance holder for storage control portion 110 specifies the movement destination of the conveyance holder for storage 40 in the order of the sheet stocker 30L5, the sheet stocker 30L4, the sheet stocker 30L3, the sheet stocker 30L2, and the sheet stocker 30L 1. After the sheet stocker 30L1 is designated, the conveyance holder for stocker control portion 110 returns the destination of movement of the conveyance holder for stocker 40 to the sheet stocker 30L 5.

In addition, for example, in the sheet counter 111, as an initial setting, the sheet stocker 30L5 is set as the moving destination of the first conveyance holder 40 for the stocker at the time of starting the stacking apparatus 10. Alternatively, the facility manager or the like may set the destination of the conveyance holder 40 for stocker at the time of starting the stacking apparatus 10 to any of the sheet stockers 30L1 to 30L 5.

The conveyance holder control unit 110 sets the conveyance destinations of the conveyance holders 40 for the stocker holding the sheets L1 to L5 on the alignment table 50 from the sheet stockers 30L1 to 30L 5.

The conveyance holder control unit 110 for the stocker controls the lowering and raising operations of the suction plate 44. For example, when the conveyance holder 40 for the stocker reaches the sheet stockers 30L1 to 30L5 designated as the destination of movement, the conveyance holder control portion 110 for the stocker lowers the suction plate 44 of the conveyance holder 40 for the stocker. For example, the conveyance holder 40 for the stocker drives the elevating mechanism 42 to lower the suction plate 44 until the uppermost sheets L1 to L5 of the sheet stockers 30L1 to 30L5 come into contact with the sheet. When the suction plate 44 sucks the sheets L1 to L5, the stocker conveyance holder control unit 110 drives the elevation mechanism 42 to raise the suction plate 44.

When the conveyance holder 40 for the stocker reaches the stage plate 53 of the alignment table 50 designated as the conveyance destination of the sheets L1 to L5, the conveyance holder control unit 110 for the stocker drives the elevating mechanism 42 to lower the suction plate 44 until the suction plate comes into contact with the stage plate 53. When the sheets L1 to L5 are separated from the suction plate 44, the conveyance holder controller 110 for a stocker drives the elevation mechanism 42 to raise the suction plate 44.

The conveyance holder control unit 110 for the stocker controls the internal pressure of the air pipe 46 shown in fig. 5 with respect to the adsorption and desorption of the sheets L1 to L5. For example, when the sheets L1 to L5 are sucked from the sheet stockers 30L1 to 30L5 to the conveyance holder 40 for stocker, the conveyance holder control portion 110 for stocker brings the air pipe 46 into a negative pressure state. For example, the accumulator transport holder control unit 110 outputs an opening command to a valve (not shown) provided in a branch pipe that branches from the air pipe 46 and is connected to a negative pressure source (not shown).

When the conveyed sheets L1 to L5 are transferred from the stocker conveyance holder 40 to the stage plate 53 of the alignment table 50, the stocker conveyance holder control unit 110 outputs a closing command to a valve provided in a branch pipe that branches from the air pipe 46 and is connected to the negative pressure source. Then, the storage conveyance holder control unit 110 outputs an open command to a valve (not shown) provided in a branch pipe that branches from the air pipe 46 and is connected to a positive pressure source (not shown).

As shown in fig. 5 and 7, the alignment stage control unit 112 generates a drive command for the movement mechanism 52 based on the image of the sheet placed on the stage plate 53 acquired from the alignment camera 56. The alignment stage control section 112 compares, for example, a captured image of the alignment camera 56 with a reference image stored in advance, and obtains a sheet position shift and an angle shift with respect to a target position and angle determined in the reference image. Further, the alignment stage control section 112 outputs a drive command for eliminating the obtained offset to the moving mechanism 52.

The stacking transport holder control unit 114 controls the operation of the stacking transport holder 60. For example, the stacking transport holder control unit 114 reciprocates the stacking transport holder 60 between the alignment stage 50 and the stacking stage 80.

The stacking transport holder control unit 114 controls the lowering and raising operations of the suction plate 64. For example, when the stacking transport holder 60 reaches the stage plate 53 of the alignment stage 50 designated as the movement destination shown in fig. 5, the stacking transport holder control section 114 lowers the suction plate 64. For example, the stacking transport holder control unit 114 drives the elevation mechanism 62 to lower the suction plate 64 until it comes into contact with the stage plate 53. When the suction plate 64 sucks the sheets L1 to L5, the stacking conveyance holder control unit 114 drives the elevation mechanism 62 to raise the suction plate 64.

When the stacking transport holder 60 reaches the stacking base 80 designated as the transport destination of the sheets L1 to L5, the stacking transport holder control unit 114 lowers the suction plate 64 of the stacking transport holder 60. For example, the stacking transport holder control unit 114 drives the elevation mechanism 62 to lower the suction plate 64 until it comes into contact with the stacking base 80. When the sheets L1 to L5 are separated from the suction plate 64, the stacking transport holder controller 114 drives the elevation mechanism 62 to raise the suction plate 64.

The stacking transport holder controller 114 controls the internal pressure of the air pipe 66 shown in fig. 5 with respect to the adsorption and desorption of the sheets L1 to L5. For example, when the sheets L1 to L5 are sucked from the stage plate 53 to the stacking transport holder 60, the stacking transport holder control unit 114 outputs an open command to a valve (not shown) provided in a branch pipe that branches from the air pipe 66 and is connected to a negative pressure source (not shown).

When the conveyed sheets L1 to L5 are transferred from the stacking conveyance holder 60 to the stacking base 80, the stacking conveyance holder control unit 114 outputs a closing command to a valve provided in a branch pipe that branches from the air pipe 66 and is connected to a negative pressure source (not shown). Then, the stacking transport holder control unit 114 outputs an opening command to a valve (not shown) provided in a branch pipe that branches from the air pipe 66 and is connected to a positive pressure source (not shown).

The charger controller 118 controls irradiation of the charged particles by the stage charger 68 and the holder charger 70. The irradiation control includes control of irradiation timing and voltage control of charged particles. As described later, the voltage control is performed together with the voltage control of the neutralizer control unit 120.

As shown in fig. 7, the laminating transport holder control unit 114 transmits coordinate information of the laminating transport holder 60 to the charger control unit 118. The charger control unit 118 sets the irradiation timing of the charged particles by the stage charger 68 and the holder charger 70 based on the coordinate information. The charger control unit 118 may check the actual position of the stacking transport holder 60 captured by a camera or the like, not shown, and control the stage charger 68 and the holder charger 70 to irradiate charged particles at the timing when the stacking transport holder 60 reaches the predetermined position.

The neutralizer control unit 120 controls irradiation of the charged particles by the stage neutralizer 72 and the holder neutralizer 74. The irradiation control includes control of irradiation timing and voltage control of charged particles.

As shown in fig. 7, the coordinate information of the stacking transport holder 60 is transmitted from the stacking transport holder control unit 114 to the neutralizer control unit 120. The static eliminator control unit 120 sets the irradiation timing of the charged particles by the stage static eliminator 72 and the holder static eliminator 74 based on the coordinate information. The static eliminator control unit 120 may check the actual position of the stacking transport holder 60 captured by a camera or the like, not shown, and control the holder static eliminator 74 to irradiate the charged particles at the timing when the stacking transport holder 60 reaches the predetermined position.

< Voltage setting flow >

Fig. 8 illustrates a voltage setting flow of the charger control unit 118 and the neutralizer control unit 120 for each of the stage charger 68, the holder charger 70, the stage neutralizer 72, and the holder neutralizer 74.

For example, the voltage setting flow of FIG. 8 is executed for each of the batches of sheets L1 to L5 accommodated in the sheet storages 30L1 to 30L 5. The batch means, for example, a unit of a sheet roll before the sheets L1 to L5 are cut into individual sheets, and in short, means a unit in which the thickness of the insulating film 106 of each of the sheets L1 to L5 can be regarded as constant.

For example, when the first sheets L1 to L5 of a new lot are stacked, the voltage setting flow of fig. 8 is executed. After the second sheet and thereafter, voltages V0 to V4 set for each of the sheets L1 to L5 are stored in the charger control unit 118 and the neutralizer control unit 120. Further, the voltages V0 to V4 are set based on the sheets L1 to L5 to be conveyed to the stacking conveyance holder 60 sent out from the sheet counter 111.

As shown in fig. 7 and 8, the charger control portion 118 specifies the sheet to be conveyed to the stacking conveyance holder 60, in other words, the sheet to be stacked next on the stacked body 100A in the middle of stacking (acquires the sheet number) (S10).

The charger control portion 118 acquires the sheet thickness information of the conveyance target sheet with reference to the sheet information storage portion 116 (S12). Next, the charger control portion 118 obtains a voltage value V0 based on the sheet thickness information (S14). The voltage value V0 is a voltage value required for eliminating warpage or deflection of the sheets L1 to L5 in the stacking conveyance holder 60, and is obtained by, for example, experiments, simulations, and the like in advance.

Here, the voltage value is qualitatively determined according to the thickness of the insulating film 106 of the sheets L1 to L5. More specifically, the thinner the insulating film 106, the higher the set voltage. Here, the high voltage includes a positive high voltage and a negative high voltage, and in short, refers to a voltage whose absolute value of a voltage value is high.

As the insulating film 106 becomes thinner, the surface elastic modulus (in other words, the degree of stretching) of the insulating film 106 decreases, and the amount of warpage and the amount of flexure due to the difference in expansion rate and the difference in contraction rate from the metal layer 104 increase. Therefore, in the voltage setting flow according to the present embodiment, the thinner the insulating film 106 of the sheets L1 to L5 being conveyed, the higher the voltage of the charged particles to be irradiated is set.

Further, the charger control unit 118 sets the voltage value V1 of the charged particles irradiated from the holder charger 70 to the voltage value V0 (S16). Further, the neutralizer controller 120 sets the voltage value V3 of the charged particles irradiated from the neutralizer 74 for the holder to a voltage value having an absolute value equal to V0 (V1) and opposite in polarity (S18). Note that even if the charging voltage V0 and the neutralization voltage V3 have the same polarity, V3 may be set to V0 instead of V3 to V0 to obtain the neutralization effect by polarization. The absolute values of the charging voltage and the neutralization voltage are not limited to be equal, and the neutralization voltage may be set as appropriate according to the neutralization device and the neutralization method.

The charger control unit 118 sets the voltage value V2 of the charged particles irradiated from the stage charger 68 to the voltage value V0 (S20). Further, the static eliminator control unit 120 sets the voltage value V4 of the charged particles irradiated by the stage static eliminator 72 to a voltage value having an absolute value equal to V0 (V2) and opposite in polarity (S22). Note that even if the charging voltage V0 and the neutralization voltage V4 have the same polarity, V4 may be set to V0 instead of V4 to V0 to obtain the neutralization effect by polarization. The absolute values of the charging voltage and the neutralization voltage are not limited to be equal, and the neutralization voltage may be set as appropriate according to the neutralization device and the neutralization method.

According to the above-described voltage setting flow, the charged particles are irradiated to the sheets L1 to L5 vacuum-adsorbed by the conveying holder 60 for lamination, and thereby the warp portions or bent portions (floating portions) of the sheets L1 to L5 are adsorbed to the conveying holder 60 for lamination by electrostatic adsorption. Here, as the insulating film 106 of the sheets L1 to L5 being conveyed becomes thinner, that is, as the amount of warp and the amount of deflection become larger as described above, the voltage of the charged particles irradiated becomes higher, thereby increasing the electrostatic attraction force and eliminating the warp and deflection.

Further, at the lamination stage 80, charged particles of a voltage such as electrostatic adsorption are irradiated to the uppermost surface of the laminate 100A during lamination. That is, the electrostatic attraction force with which the stacking conveyance holder 60 attracts the sheets L1 to L5 is equal to the electrostatic attraction force with which the stack 100A attracts the sheets L1 to L5 during stacking. Thus, when the positive pressure air is ejected from the conveying holder 60 for stacking to separate the sheets L1 to L5 and transfer them to the stacking table 80, the electrostatic attraction force applied to the conveying holder 60 for stacking to eliminate warping and bending is prevented from inhibiting the above-described separation. In other words, the warpage and deflection of the sheets L1 to L5 can be eliminated at the maximum voltage within the range in which the sheets L1 to L5 are not prevented from being detached from the stacking conveyance holder 60 by electrostatic attraction.

As shown in fig. 7, the crimper control section 122 controls the crimper 90 to crimp the final laminated body 100B. The final stacked body 100B of the sheets L1 stacked to the uppermost layer on the stacking table 80 is conveyed to the pressure welding unit 90 by the conveyance holder 91.

The crimper 90 compresses the final laminated body 100B from the up-down direction, in other words, the lamination direction while heating it. The crimping process is controlled by the crimper control part 122. As a result of the press bonding process, the layers of the final laminated body 100B are fixed as shown in the lower part of fig. 1, and mounted as a circuit substrate to a communication device or the like.

< lamination Process >

Fig. 9 to 18 illustrate a lamination process of the lamination device 10 according to the present embodiment. In the sheet counter 111 of the conveyance holder control unit for stocker 110 shown in fig. 7, the sheet stocker 30L5 is set as the destination of the first conveyance holder for stocker 40 when the stacking apparatus 10 is started up. Therefore, as shown in fig. 9, the moving destination of the conveyance holder 40 for storage is designated as the sheet storage 30L 5.

As shown in fig. 9 and 10, the magazine vacuum-adsorbs the sheet L5 from the sheet stocker 30L5 with the conveyance holder 40 (front-stage holder) and moves it to the alignment table 50.

As shown in fig. 10, when the conveyance holder 40 for the stocker reaches the alignment table 50, the suction plate 44 and the sheet L5 sucked by it are lowered by the lifting mechanism 42. When the sheet L5 abuts on the stage plate 53 of the alignment stage 50, the lowering drive of the lifting mechanism 42 is stopped. For example, the lowering drive of the elevating mechanism 42 is stopped by a torque sensor.

At this time, as shown in fig. 10, the sheet L5 is pressed against the stage plate 53 of the alignment stage 50 by the conveyance holder 40 (front-stage holder) for the stocker. Even when the sheet L5 is warped or flexed, the warp or flexure can be temporarily eliminated by pressing the stacking conveyance holder 40. In this state (expanded state), the alignment camera 56 photographs the sheet L5 on the stage plate 53 through the transparent plate 54 (see fig. 1).

As shown in fig. 7, the alignment stage control section 112 generates a drive command for the moving mechanism 52 based on the image of the sheet L5 acquired from the alignment camera 56. The alignment stand control section 112 compares, for example, a captured image of the alignment camera 56 with a reference image stored in advance, and obtains a positional deviation and an angular deviation of the sheet L5 with respect to the target position, angle determined in the reference image. Further, the alignment stage control section 112 outputs a drive command for eliminating the obtained offset to the moving mechanism 52.

As shown in fig. 11, after the suction plate 44 of the conveyance holder 40 for a stocker is separated from the stage plate 53, the sheet L5 is positioned in accordance with the driving of the moving mechanism 52. As shown in fig. 12, the aligned sheet L5 is vacuum-sucked by the conveyance holder for lamination 60.

The conveying holder 60 for lamination of the vacuum suction sheet L5 moves toward the lamination stage 80 in the X-axis direction in accordance with a drive command from the conveying holder control unit 114 for lamination (see fig. 7). In the process of this movement, as shown in fig. 13, charged particles such as ion particles are irradiated from the holder charger 70 to the exposed surface of the sheet L5 vacuum-adsorbed by the lamination transport holder 60.

At this time, the conveyance holder for stocker control portion 110 illustrated in fig. 7 designates the destination of movement of the conveyance holder for stocker 40 as the sheet stocker 30L4 in the order of being stored in the sheet counter 111. Accordingly, as shown in fig. 13, the magazine moves to the sheet stocker 30L4 with the conveyance holder 40, and the sheet L4 of the second layer is sucked (vacuum-sucked).

For example, as shown in fig. 7, the current coordinates of the stacking transport holder 60 are transmitted from the stacking transport holder control unit 114 to the charger control unit 118. Upon receiving the coordinates, the charger control unit 118 controls the holder charger 70, and irradiates the charged particles upward from the holder charger 70 throughout the process in which the sheet L5 conveyed to the stacking conveyance holder 60 passes above the holder charger 70. Thereby, the charged particles were incident on the entire exposed surface of the sheet L5.

As shown in fig. 14, the charged particles are irradiated to eliminate the warp or deflection of the sheet L5. By irradiation with the charged particles, an adsorption force due to electrostatic attraction (coulomb force) is generated on the sheet L5 in addition to an adsorption force due to vacuum. By such electrostatic adsorption, the floating portion 12 of the sheet L5 separated (peeled) from the holding surface of the adsorption plate 64 is attracted by the adsorption plate 64. As described in the voltage setting process described later, the charged particles irradiated from the holder charger 70 may be positively charged or negatively charged.

Note that, as described above, the voltage of the charged particles irradiated onto the sheet attracted by the stacking conveyance holder 60 is set to be higher as the sheet becomes thinner. Here, the high voltage includes a positive high voltage and a negative high voltage, and in short, refers to a voltage whose absolute value of a voltage value is high.

As the insulating film 106 shown in fig. 1 becomes thinner, the surface elastic modulus (in other words, the degree of stretching) of the insulating film 106 decreases, and the amount of warpage and the amount of flexure due to the difference in expansion rate and the difference in contraction rate from the metal layer 104 increase. Therefore, in the lamination process according to the present embodiment, the thinner the insulating film 106 of the sheets L1 to L5 being conveyed, the higher the voltage of the charged particles to be irradiated is set.

As shown in fig. 15, the stocker conveys the second-layer sheet L4 to the alignment table 50 with the conveying holder 40. The stage charger 68 attached to the stacking conveyance holder 60 irradiates the sheet-placing surface of the stacking stage 80 with charged particles. For example, the stage charger 68 irradiates charged particles from the upstream end to the downstream end of the lamination stage 80 in the X axis direction.

In fig. 15, the sheets L1 to L5 are not placed on the lamination stage 80, but when the sheets L1 to L5 are laminated on the lamination stage 80, the charged particles are irradiated from the stage charger 68 onto the uppermost surface of the laminate 100A in the middle of the lamination. In other words, the charged particles are irradiated from the stage charger 68 to the exposed surface of the uppermost sheet among the plurality of sheets stacked on the stacking stage 80. Note that since the size of the lamination stage 80 is larger than the sizes of the sheets L1 to L5, the charged particles are also irradiated to the portions where the sheets L1 to L5 are not placed (i.e., the exposed portions of the lamination stage 80).

At this time, as described in the above-described voltage setting flow, the charged particles irradiated from the stage charger 68 and the charged particles irradiated from the holder charger 70 are set to the same voltage (V1 — V2). By the irradiation with the charged particles, an electrostatic attractive force is generated on the mounting surface of the lamination stage 80 and the uppermost surface of the laminate 100A (see fig. 5) during lamination.

When the stacking transport holder 60 reaches the stacking table 80, the suction plate 64 and the sheet L5 sucked at the lower end thereof are lowered by the lowering drive of the raising and lowering mechanism 62, as shown in fig. 16. When the sheet L5 abuts the mounting surface of the lamination stage 80 or the uppermost surface of the laminate 100A in the middle of lamination, positive pressure air for detachment is ejected from the air pipe 66.

At this time, an electrostatic attractive force acts between the stacking conveyance holder 60 and the sheet L5. On the other hand, an electrostatic attraction force is also applied between the lamination stage 80 and the sheet L5. As described above, the charged particles irradiated from the stage charger 68 and the charged particles irradiated from the holder charger 70 are set to the same voltage (V1-V2). Therefore, the electrostatic attractive force acting between the stacking conveyance holder 60 and the sheet L5 is theoretically equal to the electrostatic attractive force acting between the stacking base 80 and the sheet L5. As a result, the warpage and deflection of the sheets L1 to L5 can be eliminated at the maximum voltage within the range in which the sheets L1 to L5 are not prevented from being detached from the stacking conveyance holder 60 by the positive pressure air due to electrostatic attraction.

As shown in fig. 17, when the transport holder for lamination 60 is separated from the lamination stage 80 and directed to the alignment stage 50, the charged particles are irradiated from the stage neutralizer 72 to the mounting surface of the lamination stage 80. The voltage value of the charged particles is set to a value having a polarity opposite to that of the charged particles irradiated from the stage charger 68 and an absolute value of the voltage value equal to that of the charged particles by the charge eliminator control unit 120 (see fig. 7), for example.

The charged particles are irradiated by the stage charger 68 to the laminate 100A (including the state of only the sheet L5 for convenience) in the middle of lamination, but when the irradiation is repeated and charges are accumulated, there is a possibility that damage such as dielectric breakdown occurs in the laminate 100A. Therefore, the stacked body 100A is subjected to charge removal by the stage charge remover 72.

Further, as shown in fig. 18, during the movement of the lamination transport holder 60, the charged particles are irradiated from the holder discharger 74 toward the adsorption plate 64. The voltage value of the charged particles is set to a value having a polarity opposite to that of the charged particles irradiated from the holder charger 70 and an absolute value of the voltage value equal to that of the charged particles by the charge eliminator control unit 120 (see fig. 7), for example. The adsorption plate 64 is discharged by the irradiation of the charged particles.

As shown in fig. 18, the aligned second sheet L4 is placed on the alignment stage 50. The conveying holder 60 for stacking vacuum-adsorbs the sheet L4, and the process of fig. 12 to 18 is repeated until the uppermost sheet L1 is stacked.

The final laminated body 100B obtained by laminating the sheet L1 on the uppermost layer on the laminating table 80 is conveyed to the pressure bonding tool 90 by the conveying holder 91. The crimper 90 compresses the final laminated body 100B from the up-down direction, in other words, the lamination direction while heating it. As a result of this pressure bonding process, the layers of the final laminated body 100B are fixed as shown in the lower part of fig. 1, and mounted as a circuit substrate to a communication device or the like.

< other examples of the laminating apparatus >

In the above embodiment, the charged particles are irradiated to the entire exposed surface of the sheets L1 to L5 conveyed by the conveying holder 60 for lamination, but the lamination device 10 according to the present embodiment is not limited to this form. Since the charged particles are irradiated to eliminate the floating portions 12 (see fig. 14) of the sheets L1 to L5, the charged particles may be irradiated so as to be concentrated on the floating portions 12.

For example, as shown in fig. 19, the stacking apparatus 10 includes a camera 130 provided between the alignment stage 50 and the holder neutralizer 74. The camera 130 can capture the surface shapes of the sheets L1 to L5 conveyed to the stacking conveyance holder 60 and passing above the camera 130, with the upper side thereof being a capture area. Note that the stacking transport holder 60 may temporarily stop moving to perform imaging when it is positioned above the camera 130.

Instead of providing the camera 130, the alignment camera 56 may capture the surface shapes of the sheets L1 to L5 aligned on the alignment table 50.

In this case, for example, as a functional block of the controller 20, images of the sheets L1 to L5 captured by the camera 130 or the alignment camera 56 are sent to the charger control section 118 shown in fig. 7.

The captured images of the sheets L1 to L5 acquired by the camera 130 or the alignment camera 56 are sent to the charger control unit 118 (see fig. 7). The charger control unit 118 determines the timing and voltage at which the charged particles are irradiated from the holder charger 70 to the sheets L1 to L5 held by the stacking transport holder 60, based on the surface shapes of the photographed sheets L1 to L5.

Specifically, the charger controller 118 controls the holder charger 70 so that the floating portions 12 (see fig. 14) of the sheets L1 to L5 separated from the holding surface of the stacking transport holder 60 are irradiated with charged particles having a voltage higher than that of the portions in close contact with the holding surface.

For example, the holder charger 70 irradiates charged particles only when at least a part of irradiation points of the charged particles on the exposed surfaces of the conveyed sheets L1 to L5 overlaps the floating portions 12 of the sheets L1 to L5 held by the stacking conveyance holder 60. The irradiation timing can be obtained from the coordinates of the conveying holder for lamination 60 sent from the conveying holder for lamination control section 114 and the surface shapes of the sheets L1 to L5 photographed. Note that irradiation of the charged particles was stopped at the closely contacted portions of the sheets L1 to L5 other than the floating portion 12.

Fig. 20 shows a voltage setting flow involved in another example of fig. 8. In fig. 20, the same steps as those in fig. 8 are denoted by the same reference numerals, and the process contents are not changed, and therefore, the description thereof is appropriately omitted.

In step S14 of fig. 20, a voltage value V0 is obtained based on the sheet thickness information. Specifically, as described above, the thinner the insulating film 106 of the sheets L1 to L5 shown in fig. 1 is, the higher the set voltage is.

Next, the charger control unit 118 shown in fig. 7 analyzes the surface shapes of the sheets L1 to L5, and determines whether at least a part of the sheets floats from the suction plate 64 of the stacking transport holder 60, in other words, whether there is a floating portion 12 (S30). In the image analysis by the captured image of the alignment camera 56, the presence or absence of the floating portion 12 is determined based on the surface shapes of the sheets L1 to L5 on the stage plate 53. Here, in order to emphasize the floating portion 12 in the image analysis, a flash mechanism may be provided in the camera 130 or the alignment camera 56.

When it is determined by the image analysis that the sheets L1 to L5 do not have the floating portion 12, the charger control unit 118 sets the set voltage value V1 of the charger for holders 70 to 0[ V ] because it is not originally necessary to eliminate the floating portion 12 by the charged particles (S32).

On the other hand, when the floating portion 12 of the sheets L1 to L5 is identified in step S30 (S36), the charger controller 118 sets the irradiation section of the charged particles of the holder charger 70 and the holder discharger 74 to only the floating portion 12 (S38). Since the coordinates of the transport holder for lamination 60 are transmitted from the transport holder for lamination control unit 114 to the charger control unit 118, the irradiation and stop of the charged particles are controlled in synchronization with the change of the coordinates.

Further, the voltage value V1 of the charged particles irradiated by the holder charger 70 is set to the voltage value V0 (S16). The voltage value V3 of the charged particles irradiated by the charge remover 74 for the holder is set to a voltage value having an absolute value equal to V0(═ V1) and opposite in polarity (S18).

Here, even when the set voltage value V1 of the holder charger 70 is set to 0[ V ] in step S32, the voltage V3 of the holder charge eliminator 74 is set to the voltage value V0(S18), and the stacked conveyance holder 60 is neutralized.

For example, as shown in fig. 16, when a sheet is transferred from the stacking conveyance holder 60 to the stacking base 80, there is a possibility that an electric charge is transferred from a stacked body 100A (a sheet L5 in fig. 16) in the middle of stacking with electric charge to the stacking conveyance holder 60 and charged. Therefore, regardless of whether or not the charged particles are irradiated by the holder charger 70, the lamination transport holder 60 is destaticized after the sheet is conveyed to the lamination stage 80.

According to the laminating device 10 of the embodiment described above, the floating portions 12 of the sheets L1 to L5 are irradiated with the charged particles of relatively high voltage, and the electrostatic attraction force is relatively suppressed in the peripheral close contact portions including the case of 0V. This can prevent the sheets L1 to L5 from generating excessive electrostatic attraction force, and the sheets L1 to L5 can be easily detached from the stacking conveyance holder 60 on the stacking base 80.

< other examples of alignment stage >

In the above embodiment, as shown in fig. 10, the sheet L5 is pressed against the stage plate 53 of the alignment stage 50 by the conveyance holder 40 (front-stage holder) for the stocker. Thereby, the warping or flexing of the sheet L5 is eliminated, and in this state, photographing is performed by the alignment camera 56.

The mode of eliminating warpage and flexure on the alignment stage 50 according to the present embodiment is not limited to the above. In short, the warping and bending of the sheets L1 to L5 can be eliminated by providing a pressing member that is further placed on the sheets L1 to L5 placed on the stage plate 53 of the alignment stage 50 and presses the entire surfaces of the sheets L1 to L5.

For example, as shown in fig. 21, a pressing plate 55 may be provided as a pressing member on the alignment stage 50. The pressing plate 55 may be formed of an acrylic plate, for example. Further, the stage plate 53 may be provided with an air chuck 51 for sucking the pressurizing plate 55.

Further, as the pressing member, a film member such as a PET film may be used. In this case, the air chuck 51 is evacuated in a state where the sheets L1 to L5 on the stage plate 53 are covered with the film member, whereby the sheets L1 to L5 are sealed by the film member. At this time, the sheets L1 to L5 were pressed by the film member, and the warpage and deflection of the sheets L1 to L5 were eliminated.

Note that the pressing plate 55 and the film member may be configured to have an area larger than the areas of the sheets L1 to L5 so as to be held by the air chuck 51. The pressing plate 55 or the film member is overlapped on the sheet materials L1 to L5 on the stage plate 53 by an equipment manager who manages the lamination process of the laminating apparatus 10 or by a conveying robot not shown.

The sheets L1 to L5 pressed against the stage plate 53 of the alignment stage 50 by the pressing plate 55 or the film member are photographed by the alignment camera 56. Based on the captured images, positional deviations and angular deviations of the sheets L1 to L5 on the stage plate 53 are corrected.

Claims

1. A laminating apparatus that laminates sheets having a metal layer laminated on an insulating film in a plurality of layers, wherein the laminating apparatus comprises:

a laminating station for laminating the sheets;

a conveyance holder that holds the sheet by vacuum suction and conveys it to the lamination stage; and

a holder charger configured to irradiate charged particles toward the sheet held by the transport holder,

the holder charger irradiates charged particles of a higher voltage as the insulating film of the sheet being conveyed becomes thinner.

2. The laminating device of claim 1,

the laminating apparatus includes a stage charger configured to irradiate charged particles toward an exposed surface of an uppermost one of the plurality of sheets laminated on the laminating table,

the holder charger and the stage charger irradiate charged particles having equal voltages to each other.

3. A laminating apparatus that laminates sheets having a metal layer laminated on an insulating film in a plurality of layers, wherein the laminating apparatus comprises:

a laminating station for laminating the sheets;

a conveyance holder that holds the sheet by vacuum suction and conveys it to the lamination stage;

a holder charger configured to irradiate charged particles toward the sheet held by the transport holder; and

an image pickup device that picks up a surface shape of the sheet held by the conveyance holder,

the holder-use charger irradiates a floating portion of the sheet, which is determined based on a surface shape of the sheet photographed by the image pickup device and is separated from the holding surface of the conveyance holder, with charged particles having a voltage higher than that of an adhering portion of the sheet adhering to the holding surface.

4. The laminating device of claim 3,

the charged particles irradiated to the floating portion of the sheet are set to a higher voltage as the insulating film of the sheet is thinner.

5. The laminating device of claim 3 or 4,

the holder-use charger determines an irradiation point of charged particles on an exposed surface of the sheet held by the conveyance holder in a smaller area than the exposed surface,

the holder charger irradiates charged particles only when at least a part of the irradiation spot overlaps with the floating portion of the sheet held by the conveyance holder.

6. The laminating device of claim 1, comprising:

an alignment table on which the sheet before being held by the conveyance holder is placed and which aligns the placed sheet; and

a pressing member that is further placed on the sheet placed on the alignment stage and presses the entire surface of the sheet,

at least a part of the sheet placing region of the alignment stage is formed of a light-transmitting member,

an alignment camera for imaging the sheet placed on the alignment stage by the light-transmissive member is provided,

the alignment camera photographs the sheet pressed against the alignment stage by the pressing member.

7. A method for manufacturing a laminated body including a plurality of sheets in which metal layers are laminated on an insulating film, the method comprising:

a stacking step of holding the sheet by a conveyance holder by vacuum suction and conveying the sheet to a stacking table on which the sheets are sequentially stacked; and

a press-bonding step of press-bonding a laminated body of the sheets laminated on the lamination stage and fixing each layer,

in the laminating step, as the insulating film of the sheet becomes thinner, charged particles of a higher voltage are irradiated to the sheet being conveyed held by the conveying holder.

8. The method for producing a laminate according to claim 7, wherein,

in the stacking step, charged particles of equal voltage to each other are irradiated toward the sheet being conveyed held by the conveying holder and an exposed surface of the uppermost one of the plurality of sheets stacked on the stacking table.

9. A method for manufacturing a laminated body including a plurality of sheets in which metal layers are laminated on an insulating film, the method comprising:

a stacking step of holding the sheets by a conveying holder by vacuum suction and conveying the sheets to a stacking table on which the sheets are stacked in order; and

in the laminating step, charged particles having a voltage higher than that of an adhering portion of the sheet adhering to the holding surface are irradiated to a floating portion of the sheet, which is determined based on a surface shape of the sheet held by the conveyance holder and is separated from the holding surface of the conveyance holder.

10. The method for producing a laminate according to claim 9, wherein,

the thinner the insulating film of the sheet, the higher the voltage of the charged particles irradiated to the floating portion of the sheet.