CN112923873A - Laser scanning device, angle measurement sensor based on laser scanning and method - Google Patents

Laser scanning device, angle measurement sensor based on laser scanning and method Download PDF

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Publication number
CN112923873A
CN112923873A CN202110266581.3A CN202110266581A CN112923873A CN 112923873 A CN112923873 A CN 112923873A CN 202110266581 A CN202110266581 A CN 202110266581A CN 112923873 A CN112923873 A CN 112923873A
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laser
angle
prism
time interval
incident
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张白
高峰
张巍巍
刘锋
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North Minzu University
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North Minzu University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention aims to improve the angle measurement precision and reduce the measurement cost, and relates to a laser scanning device, an angle measurement sensor based on laser scanning and a method, wherein the method comprises the following steps: the laser is used for emitting laser with fixed wavelength to the laser angle deflection device; a laser angle deflecting device for changing an emitting angle of the received laser and emitting the laser whose emitting angle is changed to the triangular prism; the prism is used for enlarging the angle of the laser emitted by the laser angle deflection device, so that the angle between two beams of laser at the front and the back of a fixed time interval is increased, namely the included angle of the laser emitted by the laser angle deflection device is further enlarged; and the laser measuring device is used for receiving the laser with the angle expanded by the prism and recording the incident positions of the two beams of laser before and after a fixed time interval T.

Description

Laser scanning device, angle measurement sensor based on laser scanning and method
Technical Field
The invention relates to the technical field of angle measurement, in particular to a laser scanning device, an angle measurement sensor based on laser scanning and an angle measurement method.
Background
At present, the grating is often used as a measuring element for high-precision angle measurement, but the grating precision is limited by the grating line density and the line precision, and the measurement precision is difficult to further improve at present. The angle measurement sensor based on the optical arm amplification type proposed by the applicant also depends on a high-precision position sensitive detector, and the device is difficult to manufacture by domestic manufacturers.
The time grating invented by professor Pendonglin, university of Chongqing rational engineering, adopts a rotating magnetic field as a motion reference system, and the uniform speed and the stability of the rotating magnetic field influence the measurement precision.
The optical waveguide array device used in the patent application with the application number of 202110202949X and the name of 'a novel sensor based on time angle measurement and an angle measurement method thereof' has a large laser deflection angle range, but other stray light can be generated due to the principle of the optical waveguide array device, and the measurement result of the photoelectric detector can be influenced. When the conventional crystal is selected to realize laser deflection, the deflection angle range is small, and the requirement of the angle deflection range is difficult to meet in many application fields.
Therefore, innovation is carried out from the measurement principle, the requirement of the angle sensor on the precision of the photoelectric detection device is reduced, and the development of a novel high-precision and low-cost high-precision angle measurement sensor is very necessary.
Disclosure of Invention
The invention aims to improve the angle measurement precision and reduce the measurement cost, and provides a laser scanning device, an angle measurement sensor based on laser scanning and a method.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
a laser scanning device, comprising:
the laser is used for emitting laser with fixed wavelength to the laser angle deflection device;
a laser angle deflecting device for changing an emitting angle of the laser emitted from the laser and emitting the laser whose emitting angle is changed to the triangular prism;
the prism is used for enlarging the angle of the laser emitted by the laser angle deflection device so as to increase the angle between two beams of laser in front of and behind the fixed time interval T;
and the laser measuring device is used for receiving the laser with the angle expanded by the prism and recording the incident positions of the two beams of laser before and after the fixed time interval T.
In the above scheme, the laser angle deflection device continuously changes the emitting angle of the laser, but the changed emitting angle range is too small, so that a prism is arranged between the laser angle deflection device and the laser measuring device and used for increasing the angle between two beams of laser before and after a fixed time interval T, and the change of a large angle can be measured on the laser measuring device.
Further, the angle of the two laser beams incident on the triangular prism before and after the fixed time interval T is smaller than the angle at which the three prism is emitted.
Further, the laser angle deflection device is a potassium tantalate niobate crystal.
In the above embodiment, the laser angle deflector is preferably a potassium tantalate niobate crystal, but other crystals may be used.
An angle measurement sensor based on laser scanning comprises a measuring head and a polygonal regular prism, wherein the measuring head comprises:
the laser is used for emitting laser with fixed wavelength to the laser angle deflection device;
the laser angle deflection device is used for changing the emergent angle of the laser emitted by the laser and emitting the laser with the changed emergent angle to the polygon regular prism;
the first prism is used for expanding the angle of the laser reflected by the polygonal regular prism so as to increase the angle between two beams of laser before and after a fixed time interval T;
the measuring photoelectric detector is used for receiving the laser with the angle expanded by the first prism and recording the incident positions of the two beams of laser before and after a fixed time interval T;
the processor is used for calculating the rotation angle of the polygonal regular prism according to the incident positions of the two laser beams recorded by the photoelectric detector before and after the time interval T;
the polygonal regular prism is used for carrying a measured object to rotate and reflecting the laser with the changed emergent angle, which is emitted by the laser angle deflection device, to the first triangular prism.
Furthermore, the measuring head also comprises a spectroscope and a reference photoelectric detector, wherein,
the spectroscope reflects the laser emitted by the laser angle deflection device to the reference photoelectric detector and transmits the laser to the polygon regular prism;
the reference photoelectric detector receives the laser reflected by the beam splitter, records the incident positions of two beams of laser before and after a fixed time interval T, and is used for detecting the angle deflection amount of the laser changed by the laser angle deflection device in real time.
Furthermore, the measuring head further comprises a second triple prism for enlarging the angle of the laser light reflected by the beam splitter, so that the angle between the two laser lights before and after the fixed time interval T is increased.
Further, the angles of the two laser beams incident on the first and second triangular prisms before and after the fixed time interval T are smaller than the angles at which the first and second triangular prisms are emitted.
An angle measurement method based on laser scanning comprises the following steps:
step S1: at any moment, the laser angle deflection device changes the emitting angle of laser emitted by the laser, emits the laser with the changed emitting angle to the polygonal regular prism, the laser is reflected to the incident edge of the first triangular prism through the polygonal regular prism, the angle of the laser is changed by the first triangular prism, the laser is transmitted to the measuring photoelectric detector from the emitting edge of the first triangular prism, and the measuring photoelectric detector records the incident position x1 of the laser;
step S2: after a fixed time interval T is separated, the laser angle deflection device continuously changes the emitting angle of laser emitted by the laser, the laser with the changed emitting angle is emitted to the polygonal regular prism, the laser is reflected to the incident edge of the first triple prism through the polygonal regular prism, the angle of the laser is changed by the first triple prism, the laser is transmitted to the measuring photoelectric detector from the emitting edge, and at the moment, the measuring photoelectric detector records the incident position x2 of the laser;
step S3: and the processor calculates the position difference delta x according to the positions x1 and x2 of the two laser incident measurement photodetectors before and after a fixed time interval T, and obtains the rotation angle of the polygonal regular prism according to the position difference delta x.
The step S1 further includes:
at any moment, the laser angle deflection device changes the emergent angle of the laser emitted by the laser, and emits the laser with the changed emergent angle to the spectroscope, the spectroscope transmits the laser to the polygonal regular prism and reflects the laser to the incident edge of the second triangular prism, the second triangular prism changes the angle of the laser and transmits the laser to the reference photoelectric detector from the emergent edge, and at the moment, the reference photoelectric detector records the incident position y1 of the laser;
the step S2 further includes:
after a fixed time interval T is separated, the laser angle deflection device continuously changes the emergent angle of the laser emitted by the laser, and emits the laser with the changed emergent angle to the spectroscope, the spectroscope transmits the laser to the polygonal regular prism and reflects the laser to the incident edge of the second triangular prism, the second triangular prism changes the angle of the laser and transmits the laser to the reference photoelectric detector from the emergent edge, and at the moment, the reference photoelectric detector records the incident position y2 of the laser;
the step S3 further includes:
and the processor calculates the position difference delta y according to the positions y1 and y2 of the two times of laser incidence reference photodetectors before and after a fixed time interval T, and obtains the rotation angle of the polygonal regular prism according to the position difference delta x and the position difference delta y.
Further, when the measuring photodetector or the reference photodetector detects that the laser light reaches the edge position within the time interval T, the processor calculates a difference between positions of the laser light incident on the measuring photodetector or the reference photodetector twice before and after the fixed time interval T as a distance traveled by the incident point, that is, a sum of a distance from the incident position before the fixed time interval to the edge position and a distance from the incident position after the fixed time interval to the edge position.
In the above scheme, the measurement photodetector or the reference photodetector detects that the laser reaches the edge position within a fixed time interval T, that is, the measurement photodetector has a maximum value or a minimum value Mx or the reference photodetector has a maximum value or a minimum value My, the processor calculates a position difference between two times of laser incidence on the measurement photodetector before and after the fixed time interval T as | Mx-x1| + | Mx-x2|, and a position difference of the reference photodetector is | My-y1| + | My-y2 |.
Compared with the prior art, the invention has the beneficial effects that:
the deflection angle of the laser angle deflection device to the laser is enlarged through the triangular prism, and the deflection angle range of the laser angle deflection device is enlarged. Meanwhile, under the condition of fixing a deflection angle, the control requirement is greatly reduced, and taking a potassium tantalate-niobate crystal as an example, under the requirement of the same deflection angle, the invention greatly reduces the control voltage range.
The reflection angle of the polygonal regular prism is enlarged through the triangular prism, namely, the tiny angle change of the polygonal regular prism is enlarged, and the angle measurement precision of the polygonal regular prism is improved.
The laser deflection device comprises a laser deflection device, a reference photoelectric detector, a measurement photoelectric detector, a reference photoelectric detector and a reference photoelectric detector, wherein the reference photoelectric detector is used for measuring the angle change of laser incident to the polygonal regular prism, the measurement photoelectric detector is used for measuring the angle change of the laser reflected by the polygonal regular prism, and the angle quantity obtained by the reference photoelectric detector is used as a reference, so that the angle measurement precision of the polygonal regular prism is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a laser scanning apparatus according to embodiment 1 of the present invention;
FIG. 2 is a schematic angle comparison diagram of a laser scanning device according to embodiment 1 of the present invention;
fig. 3 is a schematic structural diagram of an angle measurement sensor based on a scanning laser in embodiment 2 of the present invention;
fig. 4 is a schematic structural view of another embodiment of an angle measurement sensor based on a scanning laser in embodiment 2 of the present invention;
fig. 5 is a schematic diagram of calculating a position difference by an angle measurement method based on scanning laser according to embodiment 3 of the present invention.
Fig. 6 is a schematic diagram of deflection curves of a prism for laser beams with different incident angles according to embodiment 1 of the present invention.
Description of the main elements
The laser device comprises a laser 1, a laser angle deflection device 2, a first triangular prism (triangular prism) 3, a measuring photoelectric detector (laser measuring device) 4, a polygonal regular prism 5, a spectroscope 6, a second triangular prism 7 and a reference photoelectric detector 8.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Also, in the description of the present invention, the terms "first", "second", and the like are used for distinguishing between descriptions and not necessarily for describing a relative importance or implying any actual relationship or order between such entities or operations.
Example 1:
the present invention is realized by the following technical solution, as shown in fig. 1, a laser scanning device is provided, which includes a laser, a laser angle deflection device, a prism, and a laser measurement device, wherein:
the laser is used for emitting laser with fixed wavelength to the laser angle deflection device;
a laser angle deflecting device for changing an emitting angle of the laser emitted from the laser and emitting the laser whose emitting angle is changed to the triangular prism;
the prism is used for enlarging the angle of the laser emitted by the laser angle deflection device so as to increase the angle between two beams of laser in front of and behind the fixed time interval T;
and the laser measuring device is used for receiving the laser with the angle expanded by the prism and recording the incident positions of the two beams of laser before and after the fixed time interval T.
Referring to fig. 1, a solid line represents laser light emitted from the laser angle deflection device before a fixed time interval, and a dotted line represents laser light emitted from the laser angle deflection device after the fixed time interval. For example, at time t0, the laser emits laser light to the laser angle deflection device, and the laser angle deflection device changes the emission angle of the laser light and emits the laser light with the changed emission angle to the laser measuring device. A prism is arranged between the laser angle deflection device and the laser measuring device and is used for enlarging the deflection angle of the laser. After a fixed time interval T, at time T0+ T, the laser angle deflection device continuously changes the emission angle of the laser light, and transmits the laser light with the changed emission angle to the laser measurement device after the laser light is expanded by the prism.
Therefore, after the triangular prism is arranged between the laser angle deflection device and the laser measuring device, the position difference of the laser which is incident into the laser measuring device twice before and after the fixed time interval T is increased. For example, when no prism is arranged, the position where the laser beam enters the laser measuring device before the fixed time interval is a, and the position where the laser beam enters the laser measuring device after the fixed time interval is b; after the triangular prism is arranged, the triangular prism enlarges the deflection angle of the laser, the position where the laser enters the laser measuring device before the fixed time interval is a ', and the position where the laser enters the laser measuring device after the fixed time interval is b'; the position difference | a-b | is found to be less than | a '-b' | by measurement. The range of incidence angles of the laser to the triple prism needs to be determined through calculation, and the angle between the two beams of incident laser is ensured to be smaller than the angle between the emergent laser of the triple prism.
Therefore, the angle of the laser emitted by the laser angle deflection device after the triangular prism is arranged is changed from a small angle to a large angle, and the angle deflection amount of the laser angle deflection device for emitting the laser before and after the fixed time interval T can be obtained according to the known refractive index of the triangular prism and the position difference of laser incidence on the measuring laser measuring device. In the scheme, the deflection angle of the laser angle deflection device to the laser can be further corrected and improved.
Further, since the triangular prism has a different refractive index for light of different wavelengths in the conventional art, the mixed light is dispersed using the triangular prism, thereby separating the monochromatic lights. In the present invention, the laser light emitted from the laser is a beam of light having a fixed wavelength, and thus when the laser light is incident on the triangular prism, the laser light is incident on different positions of the incident surface of the triangular prism, and different results may be obtained. That is, when the angle of incidence of the prism is not properly selected, the laser beam enters the prism and the angle between the two non-parallel laser beams is reduced.
Taking a prism with a refractive index of 1.5 and a vertex angle of 60 degrees as an example, the relationship between the incident angle and the exit angle is shown in fig. 6. When the incident angle is selected to be between 28 and 33 degrees, the deflection amplification effect of the triple prism on the incident laser is obvious, but when the incident angle is not proper, the deflection amplification effect of the triple prism on the incident laser is reduced.
Therefore, the scheme limits the angle of two laser beams which are incident on the triple prism before and after the fixed time interval T to be smaller than the angle when the laser beams are emitted from the triple prism. Referring to fig. 2, an angle α is an angle between two laser beams incident on the prism before and after a fixed time interval, and an angle β is an angle between two laser beams exiting from the prism before and after a fixed time interval.
Example 2:
the invention also provides a laser scanning-based angle measurement sensor, which comprises a measuring head and a polygonal regular prism, wherein the measuring head comprises a laser, a laser angle deflection device, a first prism and a measurement photoelectric detector, and the measuring head comprises:
the laser is used for emitting laser with fixed wavelength to the laser angle deflection device;
the laser angle deflection device is used for changing the emergent angle of the laser emitted by the laser and emitting the laser with the changed emergent angle to the polygon regular prism;
the first prism is used for expanding the angle of the laser reflected by the polygonal regular prism so as to increase the angle between two beams of laser before and after a fixed time interval T;
the measuring photoelectric detector is used for receiving the laser with the angle expanded by the first prism and recording the incident positions of the two beams of laser before and after a fixed time interval T; the measuring photodetector of the present embodiment corresponds to the laser measuring device of embodiment 1;
the processor is used for calculating the rotation angle of the polygonal regular prism according to the incident positions of the two laser beams recorded by the photoelectric detector before and after a fixed time interval T;
the polygonal regular prism is used for carrying a measured object to rotate and reflecting the laser with the changed emergent angle, which is emitted by the laser angle deflection device, to the first triangular prism.
Referring to fig. 3, the solid line is the laser before the fixed time interval, and the dotted line is the laser after the fixed time interval. Before a fixed time interval, for example, at time t0, laser is incident to the laser angle deflection device, and under the action of a control signal, the laser angle deflection device outputs the laser at a changed angle, so that the laser is output to a polygonal regular prism, and the laser is reflected to the measuring photodetector by the polygonal regular prism. The first triangular prism is arranged between the polygonal regular prism and the measuring photodetector and used for enlarging the deflection angle of the laser, and the function of the first triangular prism is the same as that of the triangular prism in the embodiment 1, so that the description is omitted. After the laser light is expanded by the first triangular prism, the laser light is emitted into a measuring photoelectric detector, and the measuring photoelectric detector records the incident position x1 of the laser light at the moment.
After a fixed time interval T, namely at the time T0+ T, laser enters the laser angle deflection device, the laser angle deflection device continuously changes the output laser angle under the action of a control signal, the laser is output to the polygonal regular prism, and the laser is reflected to the measuring photoelectric detector through the polygonal regular prism. The laser beam is also expanded by the first prism and then enters a measuring photodetector, and the measuring photodetector records the position x2 where the laser beam enters.
The processor can calculate the position difference delta x before and after the fixed time interval T according to the positions x1 and x2 recorded by the measuring photoelectric detector, and the processor can obtain the rotating angle of the polygonal regular prism according to the position difference delta x and the laser deflection quantity because the laser deflection quantity changed by the laser angle deflection device before and after the fixed time interval T is known.
It should be noted that, the position difference Δ x and the laser deflection amount, as well as the rotation angle of the polygonal regular prism are made into a table in advance in the form of a mark, and during measurement, through the table lookup, that is, one position difference Δ x and one laser deflection amount correspond to one unique rotation angle, which is the rotation angle of the polygonal regular prism, that is, the rotation angle of the measured object.
However, although the laser angle deflecting device is known to deflect the angle of the laser light before and after a fixed time interval T, since the amount of deflection is small, a first triangular prism is provided. In order to further accurately deflect the angle of the laser by the laser angle deflection device, the scheme is also provided with a spectroscope, a second triangular prism and a reference photoelectric detector.
Referring to fig. 4, the beam splitter reflects the laser light emitted from the laser angle deflection device to the reference photodetector, and transmits the laser light to the polygonal regular prism, and the path of the laser light transmitted to the polygonal regular prism is the same as the path before the beam splitter is disposed. A second prism is disposed between the spectroscope and the reference photodetector to enlarge the deflection angle of the laser, and the function of the second prism is the same as that of the prism in embodiment 1 and that of the first prism in this embodiment, and therefore, the description thereof is omitted.
At time T0, the beam splitter reflects the laser light to the reference photodetector, the laser light is incident to the reference photodetector after being expanded by the second triangular prism, the reference photodetector records the position y1 at which the laser light is incident at the time, and after a fixed time interval T, i.e., time T0+ T, the reference photodetector records the position y2 at which the laser light is incident at the time. The processor can calculate the position difference delta y according to the positions y1 and y2 recorded by the reference photoelectric detector, and can more accurately calculate the deflection quantity of the laser angle deflection device to the laser before and after the fixed time interval T according to the position difference delta y.
Therefore, the reference photoelectric detector is arranged in the embodiment and used for detecting the deflection amount of the laser angle deflection device to the laser in real time, so that the error of obtaining the deflection amount is reduced, and the measurement precision is improved.
Similarly, the angle of the two laser beams incident on the first triangular prism and the second triangular prism before and after the fixed time interval T is smaller than the angle of the two laser beams exiting from the first triangular prism and the second triangular prism, and the principle has been explained in embodiment 1, and therefore, the description thereof is omitted.
The rest of this example is the same as example 1, please refer to example 1.
Example 3:
the invention also provides an angle measuring method based on laser scanning, which comprises the following steps:
step S1: at any moment, the laser angle deflection device changes the emitting angle of laser emitted by the laser, emits the laser with the changed emitting angle to the polygonal regular prism, reflects the laser to the incident edge of the first triangular prism through the polygonal regular prism, changes the angle of the laser through the first triangular prism, and transmits the laser to the measuring photoelectric detector from the emitting edge, and the measuring photoelectric detector records the incident position x1 of the laser.
At this time, the laser angle deflection device changes the exit angle of the laser light emitted by the laser, and emits the laser light whose exit angle has been changed to the spectroscope, the spectroscope transmits the laser light to the polygonal regular prism and reflects the laser light to the incident edge of the second triangular prism, the second triangular prism changes the angle of the laser light and transmits the laser light from the exit edge thereof to the reference photodetector, and at this time, the reference photodetector records the position y1 at which the laser light is incident.
Step S2: after a fixed time interval T is separated, the laser angle deflection device continuously changes the emitting angle of laser emitted by the laser, the laser with the changed emitting angle is emitted to the polygonal regular prism, the laser is reflected to the incident edge of the first triple prism through the polygonal regular prism, the angle of the laser is changed by the first triple prism, the laser is transmitted to the measuring photoelectric detector from the emitting edge of the first triple prism, and at the moment, the measuring photoelectric detector records the incident position x2 of the laser.
At this moment, the laser angle deflection device continuously changes the emitting angle of the laser emitted by the laser, and emits the laser with the changed emitting angle to the spectroscope, the spectroscope transmits the laser to the polygonal regular prism and reflects the laser to the incident edge of the second triangular prism, the second triangular prism changes the angle of the laser and transmits the laser from the emitting edge to the reference photodetector, and at this moment, the reference photodetector records the incident position y2 of the laser.
Step S3: the processor calculates the position difference delta x according to the positions x1 and x2 of the two laser beams emitted into the measuring photoelectric detector before and after a fixed time interval T; and calculating the position difference delta y according to the positions y1 and y2 of the two times of laser incidence reference photodetectors before and after a fixed time interval T, and obtaining the rotation angle of the polygonal regular prism according to the position difference delta x and the position difference delta y.
It should be noted that, when the laser angle deflection device deflects the angle of the laser, the angle may be continuously changed, for example, like a pendulum, the laser may continuously swing after being powered on, and the measurement is performed at regular time intervals T. Therefore, it is very likely that the laser has scanned the edge position of the measurement photodetector or the reference photodetector within a fixed time interval T, see fig. 5, taking the measurement photodetector as an example, point a is the edge position of one end of the measurement photodetector, and point B is the edge position of the other end. However, the edge position changes, and the edge position is not the point a and the point B every time, so the edge position changes along with the rotation of the polygonal regular prism, but when the laser returns after scanning to a certain position, the position is the edge position of this time, and the measurement photoelectric detector of the scheme has the function of detecting the edge position.
Suppose that the photoelectric detector detects that the laser enters the point C at the time T0, the point A is scanned within a fixed time interval T, and then the laser returns, and the laser enters the point D at the time T0+ T. Therefore, when calculating the time difference Δ x, the position difference between two laser beams incident on the measuring photodetector before and after the fixed time interval is calculated as the distance traveled by the incident point, i.e. the sum of the distance from the incident position to the edge position before the fixed time interval and the distance from the incident position to the edge position after the fixed time interval, i.e. the sum of the distance from the point C to the point a and the distance from the point a to the point D, where Δ x is | CA | + | AD |. This principle is also referred to the photodetector, and therefore will not be described herein.
The rest of this example is the same as examples 1 and 2, please refer to examples 1 and 2.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A laser scanning device, characterized by: the method comprises the following steps:
the laser is used for emitting laser with fixed wavelength to the laser angle deflection device;
a laser angle deflecting device for changing an emitting angle of the laser emitted from the laser and emitting the laser whose emitting angle is changed to the triangular prism;
the prism is used for enlarging the angle of the laser emitted by the laser angle deflection device so as to increase the angle between two beams of laser in front of and behind the fixed time interval T;
and the laser measuring device is used for receiving the laser with the angle expanded by the prism and recording the incident positions of the two beams of laser before and after the fixed time interval T.
2. A laser scanning device according to claim 1, characterized in that: the angle of two beams of laser light which are incident on the triple prism before and after the fixed time interval T is smaller than the angle when the laser light is emitted from the triple prism.
3. A laser scanning device according to claim 1, characterized in that: the laser angle deflection device is a potassium tantalate niobate crystal.
4. An angle measurement sensor based on laser scanning, its characterized in that: including gauge head, multilateral regular prism, the gauge head includes:
the laser is used for emitting laser with fixed wavelength to the laser angle deflection device;
the laser angle deflection device is used for changing the emergent angle of the laser emitted by the laser and emitting the laser with the changed emergent angle to the polygon regular prism;
the first prism is used for expanding the angle of the laser reflected by the polygonal regular prism so as to increase the angle between two beams of laser before and after a fixed time interval T;
the measuring photoelectric detector is used for receiving the laser with the angle expanded by the first prism and recording the incident positions of the two beams of laser before and after a fixed time interval T;
the processor is used for calculating the rotation angle of the polygonal regular prism according to the incident positions of the two laser beams recorded by the photoelectric detector before and after the time interval T;
the polygonal regular prism is used for carrying a measured object to rotate and reflecting the laser with the changed emergent angle, which is emitted by the laser angle deflection device, to the first triangular prism.
5. An angle sensor based on laser scanning according to claim 4, characterized in that: the measuring head also comprises a spectroscope and a reference photoelectric detector, wherein,
the spectroscope reflects the laser emitted by the laser angle deflection device to the reference photoelectric detector and transmits the laser to the polygon regular prism;
the reference photoelectric detector receives the laser reflected by the beam splitter, records the incident positions of two beams of laser before and after a fixed time interval T, and is used for detecting the angle deflection amount of the laser changed by the laser angle deflection device in real time.
6. An angle sensor based on laser scanning according to claim 5, characterized in that: the measuring head further comprises a second prism used for enlarging the angle of the laser reflected by the beam splitter, so that the angle between the two beams of laser at the front and the rear of the fixed time interval T is enlarged.
7. The laser scanning based goniometric sensor of claim 6, wherein: the angles of two laser beams which are shot into the first triangular prism and the second triangular prism before and after the fixed time interval T are smaller than the angles of the two laser beams which are shot out of the first triangular prism and the second triangular prism.
8. An angle measurement method based on laser scanning is characterized in that: the method comprises the following steps:
step S1: at any moment, the laser angle deflection device changes the emitting angle of laser emitted by the laser, emits the laser with the changed emitting angle to the polygonal regular prism, the laser is reflected to the incident edge of the first triangular prism through the polygonal regular prism, the angle of the laser is changed by the first triangular prism, the laser is transmitted to the measuring photoelectric detector from the emitting edge of the first triangular prism, and the measuring photoelectric detector records the incident position x1 of the laser;
step S2: after a fixed time interval T is separated, the laser angle deflection device continuously changes the emitting angle of laser emitted by the laser, the laser with the changed emitting angle is emitted to the polygonal regular prism, the laser is reflected to the incident edge of the first triple prism through the polygonal regular prism, the angle of the laser is changed by the first triple prism, the laser is transmitted to the measuring photoelectric detector from the emitting edge, and at the moment, the measuring photoelectric detector records the incident position x2 of the laser;
step S3: and the processor calculates the position difference delta x according to the positions x1 and x2 of the two laser incident measurement photodetectors before and after a fixed time interval T, and obtains the rotation angle of the polygonal regular prism according to the position difference delta x.
9. The laser scanning-based angle measurement method according to claim 8, wherein:
the step S1 further includes:
at any moment, the laser angle deflection device changes the emergent angle of the laser emitted by the laser, and emits the laser with the changed emergent angle to the spectroscope, the spectroscope transmits the laser to the polygonal regular prism and reflects the laser to the incident edge of the second triangular prism, the second triangular prism changes the angle of the laser and transmits the laser to the reference photoelectric detector from the emergent edge, and at the moment, the reference photoelectric detector records the incident position y1 of the laser;
the step S2 further includes:
after a fixed time interval T is separated, the laser angle deflection device continuously changes the emergent angle of the laser emitted by the laser, and emits the laser with the changed emergent angle to the spectroscope, the spectroscope transmits the laser to the polygonal regular prism and reflects the laser to the incident edge of the second triangular prism, the second triangular prism changes the angle of the laser and transmits the laser to the reference photoelectric detector from the emergent edge, and at the moment, the reference photoelectric detector records the incident position y2 of the laser;
the step S3 further includes:
and the processor calculates the position difference delta y according to the positions y1 and y2 of the two times of laser incidence reference photodetectors before and after a fixed time interval T, and obtains the rotation angle of the polygonal regular prism according to the position difference delta x and the position difference delta y.
10. The laser scanning-based angle measurement method according to claim 9, wherein: when the measuring photoelectric detector or the reference photoelectric detector detects that the laser reaches the edge position within the time interval T, the processor calculates the position difference of the laser emitted into the measuring photoelectric detector or the reference photoelectric detector twice before and after the fixed time interval T as the distance of the incident point moving, namely the sum of the distance from the incident position to the edge position before the fixed time interval and the distance from the incident position to the edge position after the fixed time interval.
CN202110266581.3A 2021-03-11 2021-03-11 Laser scanning device, angle measurement sensor based on laser scanning and method Pending CN112923873A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114705138A (en) * 2022-04-29 2022-07-05 北方民族大学 Multi-reflection type angle measurement system and measurement method
CN115825929A (en) * 2021-12-14 2023-03-21 深圳市速腾聚创科技有限公司 Laser receiver and laser radar

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115825929A (en) * 2021-12-14 2023-03-21 深圳市速腾聚创科技有限公司 Laser receiver and laser radar
CN115825929B (en) * 2021-12-14 2023-08-29 深圳市速腾聚创科技有限公司 Laser receiving device and laser radar
CN114705138A (en) * 2022-04-29 2022-07-05 北方民族大学 Multi-reflection type angle measurement system and measurement method
CN114705138B (en) * 2022-04-29 2024-04-12 天航长鹰(江苏)科技有限公司 Multi-reflection angle measurement system and measurement method

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