CN211317207U - Laser interference displacement measuring device - Google Patents
Laser interference displacement measuring device Download PDFInfo
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- CN211317207U CN211317207U CN202020202232.6U CN202020202232U CN211317207U CN 211317207 U CN211317207 U CN 211317207U CN 202020202232 U CN202020202232 U CN 202020202232U CN 211317207 U CN211317207 U CN 211317207U
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Abstract
The utility model relates to a laser interference displacement measurement device, including reading head, triangular wave speculum, the reading head includes laser source, first spectroscope, second spectroscope, beam splitter prism, first photoelectric detector, condensing lens, second photoelectric detector, treater. The utility model adds the beam splitter prism and the first photoelectric detector, avoids the deviation of the final measuring result caused by the change of the wavelength of the laser beam due to factors such as environment and the like in the measuring process, and compensates the change of the wavelength of the laser beam; the optical device is simple to use, the displacement measurement work of the measured object is completed by utilizing the laser interference principle, and the complexity of the device is simplified under the condition that the measurement precision is ensured.
Description
Technical Field
The utility model relates to a wavelength measurement technical field, in particular to laser interference displacement measurement device.
Background
The accurate measurement is crucial to the field of optical precision measurement, taking a laser interferometer as an example, the measurement precision of the laser interferometer is directly related to the precision of laser wavelength, how to improve the measurement precision, reduce the influence of the laser wavelength on the measurement precision, and reduce the complexity and cost of a measurement device, and the laser interferometer becomes important research content in the related field.
SUMMERY OF THE UTILITY MODEL
The utility model discloses an aim at improving the measurement accuracy of laser interferometer, simplify measuring device's complexity, provide a laser interference displacement measurement device.
In order to realize the purpose of the utility model, the embodiment of the utility model provides a following technical scheme:
a laser interference displacement measuring device comprises a reading head and a triangular wave reflector, and is used for receiving a laser beam transmitted by a first spectroscope and reflecting the received laser beam;
the reading head comprises:
a laser source for emitting a laser beam;
the first spectroscope is used for transmitting the laser beam emitted by the laser source to the triangular wave reflector and reflecting the laser beam to the condenser lens;
the second beam splitter is used for receiving the laser beam reflected by the triangular wave reflector, reflecting the received laser beam to the triangular wave reflector again and transmitting the laser beam to the beam splitter prism;
the beam splitter prism is used for receiving the laser beam transmitted by the second beam splitter and transmitting the laser beam to the first photoelectric detector;
the first photoelectric detector is used for receiving the laser beam transmitted by the beam splitter prism;
the condensing lens is used for receiving the laser beams reflected by the first spectroscope and the triangular wave reflector, condensing the received laser beams and transmitting the condensed laser beams to the second photoelectric detector;
a second photodetector for receiving the laser beam transmitted by the condensing lens;
and the processor is used for recording the displacement of the laser beam on the first photoelectric detector, detecting the interference phenomenon generated on the second photoelectric detector and calculating the displacement of the reading head or the triangular wave reflector.
In the scheme, the beam splitter prism and the first photoelectric detector are added, so that the deviation of a final measurement result caused by the change of the wavelength of a laser beam due to factors such as environment and the like in the measurement process is avoided, and the compensation calculation is carried out on the change of the wavelength of the laser beam; the optical device is simple to use, the displacement measurement work of the measured object is completed by utilizing the laser interference principle, and the complexity of the device is simplified under the condition that the measurement precision is ensured.
To explain the arrangement mode of the measuring device in more detail, the first spectroscope is obliquely arranged above the triangular wave reflector and forms an included angle of 30 degrees with the horizontal direction; the second spectroscope is parallel to the first spectroscope.
For the structure of more detailed explanation measuring device, the triangle wave speculum includes the same reflection configuration of N structures, every reflection configuration includes first plane of reflection, second plane of reflection, first plane of reflection or second plane of reflection are parallel with the speculum, and have 120 degrees contained angles between first plane of reflection and the second plane of reflection.
For more detailed description of the structure and arrangement of the optical device selected in the measuring apparatus, the condensing lens is a convex lens and is arranged parallel to the horizontal direction.
Preferably, the condenser lens is a non-spherical-aberration lens.
Preferably, the first photodetector is a position sensitive detector.
In order to improve the measuring device, the reading head is arranged on the measured object and moves along with the measured object, and the triangular wave reflector is fixedly arranged; or the triangular wave reflector is arranged on the measured object and moves along with the measured object, and the reading head is fixedly arranged.
Further, the reading head is multiple, and the reading heads alternately participate in interference fringe counting.
A use method of a laser interference displacement measuring device comprises the following steps:
step S1: fixedly arranging a triangular wave reflector/reading head, arranging the reading head/triangular wave reflector on an object to be measured, enabling the reading head/triangular wave reflector to move along with the object to be measured, and arranging the angle of a laser source to enable the included angle between a laser beam emitted by the laser source and the horizontal direction to be 150 degrees; arranging a first spectroscope and a second spectroscope in parallel, wherein the included angle between the first spectroscope and the horizontal direction is 30 degrees; the condensing lens is arranged on one side of the first beam splitter, which is far away from the triangular wave reflector, and can receive the laser beams reflected by the first beam splitter and the triangular wave reflector; arranging a second photoelectric detector at the focus of the condensing lens, so that the second photoelectric detector can receive two laser beams transmitted by the condensing lens and generate an interference phenomenon; arranging the beam splitter prism between the second beam splitter and the condensing lens, so that the beam splitter prism can receive the laser beam transmitted by the second beam splitter; arranging a first photoelectric detector between the beam splitter prism and the condensing lens, so that the first photoelectric detector can receive the laser beam transmitted by the beam splitter prism;
step S2: starting a laser source, detecting an interference phenomenon generated on a second photoelectric detector by using a processor, and moving a reading head/a triangular wave reflector along with an object to be detected in the horizontal direction to enable the interference phenomenon generated on the second photoelectric detector to be constructive interference/destructive interference, and recording the interference frequency to be 0 time;
step S3: moving the measured object in the horizontal direction again within the time t, moving the reading head/the triangular wave reflector along with the measured object, and recording the times of constructive interference/destructive interference generated on the second photoelectric detector as M;
step S4: calculating the average laser beam wavelength lambda in time t through the change of the laser beam incidence position point on the first photoelectric detector;
step S5: calculating the second displacement of the object according to the number M of constructive/destructive interference and the average wavelength λ of laser generated by the second photodetector
Step S6: and repeating the steps S3 to S5 to calculate the accumulated displacement of the measured object.
As another possible implementation, a method for using a laser interferometric displacement measuring device includes the following steps:
step S1: fixedly arranging a triangular wave reflector/reading head, and arranging the reading head/triangular wave reflector on an object to be measured, so that the reading head/triangular wave reflector moves along with the object to be measured;
step S2: starting a laser source, detecting an interference phenomenon generated on a second photoelectric detector by using a processor, and moving a reading head/a triangular wave reflector along with a detected object in a vertical direction to enable the interference phenomenon generated on the second photoelectric detector to be constructive interference/destructive interference, and recording the laser interference frequency to be 0 at the moment;
step S3: moving the measured object in the vertical direction again within the time t, moving the reading head/the triangular wave reflector along with the measured object, and recording the times of constructive interference/destructive interference generated on the second photoelectric detector as M;
step S4: calculating the average laser wavelength lambda within the time t through the change of the laser beam incidence position point on the first photoelectric detector;
step S5: calculating the second displacement of the reading head/triangular wave reflector in the vertical direction according to the times M of constructive interference/destructive interference and the average wavelength lambda of the laser beam generated on the second photoelectric detector
Step S6: and repeating the steps S3 to S5 to calculate the accumulated displacement of the measured object.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a beam splitter prism, a photoelectric detector have compensated in the measurement process because of environmental factor influences the change of laser beam wavelength, take the average wavelength of laser beam in the measurement period and calculate the measured object accumulative total displacement volume, very big improvement measuring precision.
In the displacement measurement process, the maximum interference optical path is greatly shortened, linear increase along with the increase of displacement is avoided, and the influence of laser wavelength on interference counting is greatly reduced.
The optical device is simple to use, the displacement measurement work of the measured object is completed by utilizing the laser interference principle, and the complexity of the device is simplified under the condition that the measurement precision is ensured.
The utility model discloses when measuring in vertical direction, can also avoid gravity to further ensure measurement accuracy to measuring result's influence.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of an apparatus provided in an embodiment of the present invention;
fig. 2 is a schematic view of the device according to the embodiment of the present invention in horizontal operation;
FIG. 3 is an enlarged view of a portion of the apparatus of FIG. 2 according to the present invention;
fig. 4 is a schematic view of the device according to the embodiment of the present invention in vertical operation;
fig. 5 is a schematic diagram illustrating the calculation of the displacement of the reading head when the device provided by the embodiment of the present invention works in the horizontal direction;
fig. 6 is a partially enlarged schematic view of fig. 5 according to the present invention.
Description of the main elements
The reading head comprises a reading head 1, a laser source 100, a first beam splitter 200, a second beam splitter 300, a beam splitter prism 400, a first photoelectric detector 500, a condenser lens 600, a second photoelectric detector 700, a triangular wave reflector 2, a first reflecting surface 21 and a second reflecting surface 22.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Also, in the description of the present invention, the terms "first," "second," and the like are used solely for distinguishing between the descriptions and not necessarily for indicating or implying any actual such relationship or order between such entities or operations.
Example 1:
the utility model discloses a following technical scheme realizes, as shown in FIG. 1, a laser interference displacement measurement device, including reading head, triangle wave reflecting mirror, the reading head includes a laser source, two spectroscopes, a beam splitter prism, a condensing lens, two photoelectric detector, wherein:
and the laser source is used for emitting the laser beam to the first beam splitter.
And the first beam splitter is arranged above the triangular wave reflector, has an included angle of 30 degrees with the horizontal direction as shown in fig. 3, and is used for receiving the laser beam emitted by the laser source, transmitting the received laser beam to the triangular wave reflector and reflecting the received laser beam to the condenser lens. For the sake of convenience of distinction, the laser beam reflected by the first beam splitter to the condenser lens is defined as a reflected laser beam, and the laser beam transmitted by the first beam splitter to the triangular wave mirror is defined as a transmitted laser beam.
And the second beam splitter is arranged above the triangular wave reflector, is parallel to the first beam splitter, and is used for receiving the transmission laser beam reflected by the triangular wave reflector, transmitting the received transmission laser beam to the beam splitter prism and reflecting the transmission laser beam to the triangular wave reflector again.
And the beam splitting prism is arranged between the second beam splitter and the condensing lens and is used for receiving the transmission laser beam transmitted by the second beam splitter and transmitting the received transmission laser beam to the first photoelectric detector.
And the first photoelectric detector is arranged between the beam splitter prism and the condensing lens and is used for receiving the transmission laser beam transmitted by the beam splitter prism.
And the condensing lens is used for receiving the reflected laser beam reflected by the first beam splitter and receiving the transmitted laser beam reflected by the triangular wave reflector and transmitting the two laser beams to the second photoelectric detector.
And the second photoelectric detector is arranged at the focus of the condensing lens and used for receiving the laser beam transmitted by the condensing lens.
And the processor is used for recording the change of the incident position point of the laser beam on the first photoelectric detector, detecting the interference phenomenon generated on the second photoelectric detector, and calculating the displacement of the reading head or the triangular wave reflector so as to obtain the displacement of the object to be measured.
The utility model moves the reading head or the triangular wave reflector in the horizontal direction or the vertical direction, so that the transmission laser beam generates optical path difference variation, the processor is used for detecting the light interference phenomenon generated on the second photoelectric detector, and the times M of constructive interference/destructive interference generated on the second photoelectric detector during the movement period is recorded; the wavelength of laser beam may change because of environmental reasons, for example, the change of temperature, humidity, etc. in the environment can lead to the change of the wavelength of laser beam, therefore the utility model discloses in set up beam splitter prism and first photoelectric detector for record reading head or triangle wave speculum incident position change on first photoelectric detector of laser beam in the removal process, calculate the average wavelength of laser beam after the change, use this average wavelength to calculate the displacement volume of reading head or triangle wave speculum; the wavelength of the laser beam and the number M of constructive interference/destructive interference generated on the second photodetector can be known, and the optical path difference variation of the laser beam in the moving process of the reading head or the triangular wave reflector can be calculated, so that the displacement X of the reading head or the triangular wave reflector, namely the displacement of the object to be measured, can be obtained, and the measurement work can be completed. The device can not only well complete the measurement work, but also avoid the problem of low measurement precision caused by the wavelength change of the laser beam due to environmental factors, and has the advantages of simple measurement device and reduced device complexity under the condition of improving the measurement precision.
Furthermore, the triangular wave reflector includes N reflecting structures having the same structure, each reflecting structure includes a first reflecting surface and a second reflecting surface, as shown in fig. 3, the first reflecting surface or the second reflecting surface is parallel to the reflector, and an included angle of 120 degrees exists between the first reflecting surface and the second reflecting surface. For example, as shown in fig. 1, the triangular wave mirror includes eight reflecting structures, and the first beam splitter transmits the transmitted laser beam to the second reflecting surface of the first reflecting structure.
For a more detailed description of the working principle of the present invention, the present embodiment selects to move the reading head in the horizontal direction, fix the triangular wave reflector, and detect the constructive interference frequency generated on the second photodetector. As shown in fig. 1, after the laser source emits the laser beam to the first beam splitter, the first beam splitter transmits the transmission laser beam to the second reflection surface of the first reflection structure of the triangular wave reflector, and because the first reflection surface and the second reflection surface have an included angle of 120 degrees, the transmission laser beam transmitted from the first beam splitter is parallel to the first reflection surface, and therefore the transmission laser beam reaches the second reflection surface and then vertically enters the second beam splitter, and the first beam splitter directly reflects the reflection laser beam to the condenser lens. And after receiving the transmission laser beam reflected by the triangular wave reflector, the second beam splitter transmits the transmission laser beam to the beam splitter prism, and reflects the transmission laser beam to the triangular wave reflector again. The beam splitter prism transmits the received transmitted laser beam to the first photodetector. The triangular wave reflecting mirror reflects the transmitted laser beam reflected by the second beam splitter to the condensing lens, and the condensing lens transmits the received transmitted laser beam and the received reflected laser beam to the second photoelectric detector. Before the measurement is started, the reading head is horizontally moved, so that a constructive interference phenomenon is generated on the second photoelectric detector, the interference frequency generated on the second photoelectric detector is recorded as 0 time, and meanwhile, the processor records the position of the falling point of the laser beam on the first photoelectric detector.
As shown in fig. 2, after the measurement is started, the measured object moves horizontally to drive the reading head to move together, M pieces of constructive interference are generated on the second photoelectric detector within a set time t, and the processor records the position of the falling point of the laser beam on the first photoelectric detector. At this time, the average laser beam wavelength λ in the time t is calculated from the change of the laser beam incident position point on the first photodetector.
Referring to fig. 2 and 3, it can be seen that during the second movement of the reading head, the optical path of the reflected laser beam reflected from the first beam splitter does not change, but the optical path of the transmitted laser beam transmitted from the first beam splitter changes. According to the principle of laser interference, the variation of the optical path difference is equal to an integer multiple of the wavelength, and then the processor of this embodiment obtains the wavelength of the laser beam after the change and the number M of constructive interference generated on the second photodetector, so as to calculate the variation of the optical path difference.
Then, as shown in fig. 5, it can be seen that the variation of the optical path difference is h + L, and then, as shown in fig. 6, the variation of the optical path difference of the laser beam in fig. 5 is enlarged, and in the case where the angles between the first beam splitter, the first reflecting surface, and the second reflecting surface are known, it can be obtained
So that the first beam splitter transmits the laser beam with a variation of the optical path difference of
The variation of the optical path difference of the laser beam reflected by the second beam splitter is also
The optical path difference of the whole interference light path is
Therefore, the displacement X of the reading head is obtained according to the interference displacement measurement principle, and the measurement work is finished.
Furthermore, the condensing lens is a convex lens, when two parallel beams of light vertically enter the convex lens, the two beams of light pass through the convex lens and then pass through the focus of the convex lens, so that the convex lens with a condensing effect is used, and the second photoelectric detector is arranged at the focus of the condensing lens, so that the two beams of laser beams passing through the condensing lens can enter the second photoelectric detector and generate an interference phenomenon on the second photoelectric detector.
Still further, the first photodetector is a position sensitive detector.
Based on the device, the use method of the laser interference displacement measuring device can be provided, and the use method comprises the following steps:
step S1: fixedly arranging a triangular wave reflector/reading head, arranging the reading head/triangular wave reflector on an object to be measured, enabling the reading head/triangular wave reflector to move along with the object to be measured, and arranging the angle of a laser source to enable the included angle between a laser beam emitted by the laser source and the horizontal direction to be 150 degrees; arranging a first spectroscope and a second spectroscope in parallel, wherein the included angle between the first spectroscope and the horizontal direction is 30 degrees; the condensing lens is arranged on one side of the first beam splitter, which is far away from the triangular wave reflector, and can receive the laser beams reflected by the first beam splitter and the triangular wave reflector; arranging a second photoelectric detector at the focus of the condensing lens, so that the second photoelectric detector can receive two laser beams transmitted by the condensing lens and generate an interference phenomenon; arranging the beam splitter prism between the second beam splitter and the condensing lens, so that the beam splitter prism can receive the laser beam transmitted by the second beam splitter; arranging a first photoelectric detector between the beam splitter prism and the condensing lens, so that the first photoelectric detector can receive the laser beam transmitted by the beam splitter prism;
step S2: starting a laser source, detecting an interference phenomenon generated on a second photoelectric detector by using a processor, and moving a reading head/a triangular wave reflector along with an object to be detected in the horizontal direction to enable the interference phenomenon generated on the second photoelectric detector to be constructive interference/destructive interference, and recording the interference frequency to be 0 time;
step S3: moving the measured object in the horizontal direction again within the time t, moving the reading head/the triangular wave reflector along with the measured object, and recording the times of constructive interference/destructive interference generated on the second photoelectric detector as M;
step S4: calculating the average laser beam wavelength lambda in time t through the change of the laser beam incidence position point on the first photoelectric detector;
step S5: calculating the second displacement of the object according to the number M of constructive/destructive interference and the average wavelength λ of laser generated by the second photodetector
Step S6: and repeating the steps S3 to S5 to calculate the accumulated displacement of the measured object.
As another possible implementation, a method for using a laser interferometric displacement measuring device includes the following steps:
step S1: fixedly arranging a triangular wave reflector/reading head, and arranging the reading head/triangular wave reflector on an object to be measured, so that the reading head/triangular wave reflector moves along with the object to be measured;
step S2: starting a laser source, detecting an interference phenomenon generated on a second photoelectric detector by using a processor, and moving a reading head/a triangular wave reflector along with a detected object in a vertical direction to enable the interference phenomenon generated on the second photoelectric detector to be constructive interference/destructive interference, and recording the laser interference frequency to be 0 at the moment;
step S3: moving the measured object in the vertical direction again within the time t, moving the reading head/the triangular wave reflector along with the measured object, and recording the times of constructive interference/destructive interference generated on the second photoelectric detector as M;
step S4: calculating the average laser wavelength lambda within the time t through the change of the laser beam incidence position point on the first photoelectric detector;
step S5: calculating the second displacement of the reading head/triangular wave reflector in the vertical direction according to the times M of constructive interference/destructive interference and the average wavelength lambda of the laser beam generated on the second photoelectric detector
Step S6: and repeating the steps S3 to S5 to calculate the accumulated displacement of the measured object.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (6)
1. The utility model provides a laser interference displacement measurement device, includes reading head, its characterized in that: the triangular wave reflector is used for receiving the laser beam transmitted by the first beam splitter and reflecting the received laser beam;
the reading head comprises:
a laser source for emitting a laser beam;
the first spectroscope is used for transmitting the laser beam emitted by the laser source to the triangular wave reflector and reflecting the laser beam to the condenser lens;
the second beam splitter is used for receiving the laser beam reflected by the triangular wave reflector, reflecting the received laser beam to the triangular wave reflector again and transmitting the laser beam to the beam splitter prism;
the beam splitter prism is used for receiving the laser beam transmitted by the second beam splitter and transmitting the laser beam to the first photoelectric detector;
the first photoelectric detector is used for receiving the laser beam transmitted by the beam splitter prism;
the condensing lens is used for receiving the laser beams reflected by the first spectroscope and the triangular wave reflector, condensing the received laser beams and transmitting the condensed laser beams to the second photoelectric detector;
a second photodetector for receiving the laser beam transmitted by the condensing lens;
and the processor is used for recording the change of the incident position point of the laser beam on the first photoelectric detector, detecting the interference phenomenon generated on the second photoelectric detector and calculating the displacement of the reading head or the triangular wave reflector.
2. A laser interferometric displacement measuring device according to claim 1, in which: the first spectroscope is obliquely arranged above the triangular wave reflector, and an included angle of 30 degrees is formed between the first spectroscope and the horizontal direction; the second spectroscope is parallel to the first spectroscope.
3. A laser interferometric displacement measuring device according to claim 2, in which: the triangular wave reflector comprises N reflecting structures with the same structure, each reflecting structure comprises a first reflecting surface and a second reflecting surface, the first reflecting surface or the second reflecting surface is parallel to the reflector, and a 120-degree included angle exists between the first reflecting surface and the second reflecting surface.
4. A laser interferometric displacement measuring device according to claim 1, in which: the condensing lens is a convex lens and is arranged in parallel to the horizontal direction.
5. A laser interferometric displacement measuring device according to any one of claims 1-4, characterized in that: the reading head is arranged on the measured object and moves along with the measured object, and the triangular wave reflector is fixedly arranged; or the triangular wave reflector is arranged on the measured object and moves along with the measured object, and the reading head is fixedly arranged.
6. A laser interferometric displacement measuring device according to claim 5, in which: the reading heads are multiple, and the reading heads alternately participate in interference fringe counting.
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| CN202020202232.6U CN211317207U (en) | 2020-02-24 | 2020-02-24 | Laser interference displacement measuring device |
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| CN202020202232.6U CN211317207U (en) | 2020-02-24 | 2020-02-24 | Laser interference displacement measuring device |
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