CN112886261B - Adjustable multi-angle terahertz wave beam splitter and method thereof - Google Patents
Adjustable multi-angle terahertz wave beam splitter and method thereof Download PDFInfo
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- CN112886261B CN112886261B CN202110036859.8A CN202110036859A CN112886261B CN 112886261 B CN112886261 B CN 112886261B CN 202110036859 A CN202110036859 A CN 202110036859A CN 112886261 B CN112886261 B CN 112886261B
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- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 82
- 229910052751 metal Inorganic materials 0.000 claims abstract description 82
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000010453 quartz Substances 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 6
- 108091026890 Coding region Proteins 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 16
- 238000005516 engineering process Methods 0.000 description 2
- 239000010953 base metal Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
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- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
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Abstract
The invention discloses an adjustable multi-angle terahertz wave beam splitter and a method thereof. The terahertz wave detector comprises a terahertz wave input end and N multiplied by N unit structures, wherein N is a natural number; the N multiplied by N unit structures are periodically arranged on a plane vertical to the input direction of the terahertz waves, and each unit structure comprises a top layer metal structure, a liquid crystal medium layer, a substrate metal plate and a quartz layer; the top-layer metal structure is positioned above the liquid crystal medium layer and is formed by combining a cross-shaped metal piece and a rectangular metal piece, the cross-shaped metal piece is vertically intersected at the central position of the metal structure layer, the rectangular metal piece is connected with the left end of the cross-shaped metal piece, and a metal plate is plated below the liquid crystal medium layer; the bottom layer is a quartz substrate as a support. The adjustable multi-angle terahertz wave beam splitter has the advantages of simple and compact structure, convenience in manufacturing, high response speed and convenience in adjustment, and meets the application requirements of a terahertz wave system.
Description
Technical Field
The invention relates to the technical field of terahertz wave application, in particular to an adjustable multi-angle terahertz wave beam splitter and a method thereof.
Background
The terahertz wave is an electromagnetic wave with the frequency of 0.1-10 THz and the wavelength of 3000-30 μm, and is superposed with the millimeter wave in a long wave band and superposed with the infrared ray in a short wave band, and the terahertz wave occupies a special position in an electromagnetic wave spectrum. Therefore, the terahertz technology has wide application prospects in the fields of high-speed communication, imaging, radar and the like. A terahertz wave beam splitter, which is one of important devices for terahertz wave control, has attracted extensive attention of researchers at home and abroad. In recent years, various terahertz filters, terahertz wave switches, terahertz wave modulators, and the like have been developed and reported. However, in general, once the structural size parameters of the terahertz devices are optimized, the performance of the terahertz devices is fixed and cannot be regulated, and the application and development of the terahertz technology are severely limited, so that the design of the adjustable multi-angle terahertz wave beam splitter has great significance. The invention provides an adjustable multi-angle terahertz wave beam splitter, which changes applied external voltage by designing a microstructure and utilizing the birefringence characteristic of a liquid crystal material, and realizes the function of adjusting the terahertz wave reflection beam splitting angle. The device has the advantages of simple structure, excellent performance and flexible control.
Disclosure of Invention
The invention provides an adjustable multi-angle terahertz wave beam splitter, aiming at overcoming the defects of the prior art.
In order to achieve the purpose, the technical scheme of the invention is as follows:
an adjustable multi-angle terahertz wave beam splitter comprises N multiplied by N unit structures, wherein N is a natural number; the NxN unit structures are periodically arranged on a plane vertical to the input direction of the terahertz wave; each unit structure comprises a top layer metal structure, a liquid crystal medium layer, a substrate metal plate and a quartz layer, and the top surface of each unit structure is used as a terahertz wave input end; the top-layer metal structure is arranged on the upper surface of the liquid crystal medium layer and is formed by combining a cross-shaped metal piece and a rectangular metal piece, and the cross-shaped metal piece is positioned in the center of the upper surface of the liquid crystal medium layer and is formed by vertically intersecting two straight arms; the rectangular metal piece is positioned on one side of the cross-shaped metal piece, one end of the rectangular metal piece is connected with the outer edge of one cross arm of the cross-shaped metal piece, the other end of the rectangular metal piece extends to the side edge of the liquid crystal medium layer, a layer of metal plate is plated below the liquid crystal medium layer, and the quartz substrate is used as a support below the metal plate.
The specific parameters of each part in the above scheme can adopt the following preferred modes:
preferably, the front view of each unit structure is square, and the side length of the square is 180-220 μm.
Preferably, the length and the width of the quartz layer are both 180-220 μm, and the thickness is 480-520 μm.
Preferably, the substrate metal plate is made of copper, the length and the width of the substrate metal plate are both 180-220 micrometers, and the thickness of the substrate metal plate is 0.1-0.5 micrometer.
Preferably, the length and the width of the liquid crystal medium layer are both 180-220 mu m, and the thickness is 20-30 mu m.
Preferably, the top metal structure is made of copper and has a thickness of 0.1-0.5 μm.
Preferably, in the cross-shaped metal piece, the length of each straight arm is 70-90 μm, and the width of each straight arm is 20-40 μm; the intersection positions of the two straight arms are overlapped.
Preferably, the length of the rectangular metal piece is 50-70 μm, the width of the rectangular metal piece is 10-20 μm, and the rectangular metal piece is made of copper.
Preferably, in the N × N unit structures arranged periodically, each column of unit structures is provided with an interface for independently applying a bias voltage to the column of unit structures.
The invention also provides a terahertz wave beam splitting method using the adjustable multi-angle terahertz wave beam splitter in any scheme, which comprises the following steps: when terahertz waves are input from a terahertz wave input end, terahertz waves with the frequency of 0.51THz are reflected by the N multiplied by N unit structures, and the turning direction of liquid crystal molecules is changed by applying different bias voltages to the liquid crystal medium layer by utilizing the double-refraction rate characteristic of the tunable material liquid crystal, so that the phase delay is changed; in the N multiplied by N unit structures arranged in the periodic array, a real-time coding sequence consisting of two unit structures with the phase difference of 180 degrees is generated by applying different bias voltages to each array, and the terahertz waves are controlled to realize beam splitting at different angles.
The adjustable multi-angle terahertz wave beam splitter has a simple and compact structure. The terahertz wave detector is convenient to manufacture, high in response speed and convenient to adjust, and meets the application requirement of a terahertz wave system.
Drawings
FIG. 1 is a three-dimensional schematic diagram (a) and a top metal structure schematic diagram (b) of a unit structure of a tunable multi-angle terahertz wave beam splitter;
FIG. 2 is a front view of an adjustable multi-angle terahertz wave beam splitter;
FIG. 3 is a three-dimensional far-field scattering diagram and a two-dimensional far-field scattering diagram of the adjustable multi-angle terahertz wave beam splitter in a first working mode;
FIG. 4 is a three-dimensional far-field scattering diagram and a two-dimensional far-field scattering diagram of the adjustable multi-angle terahertz wave beam splitter in a second working mode;
FIG. 5 is a three-dimensional far-field scattering diagram and a two-dimensional far-field scattering diagram of the adjustable multi-angle terahertz wave beam splitter in a third working mode;
FIG. 6 is a diagram showing the normalized reflection amplitude of an adjustable multi-angle terahertz wave beam splitter in a first working mode;
FIG. 7 is a diagram showing the normalized reflection amplitude of the adjustable multi-angle terahertz wave beam splitter in the second operation mode;
FIG. 8 is a diagram of the normalized reflection amplitude of the adjustable multi-angle terahertz wave beam splitter in the third operating mode.
Detailed Description
As shown in fig. 1 to 2, in an embodiment of the present invention, an adjustable multi-angle terahertz wave beam splitter is provided, which includes N × N unit structures 3, where N is a natural number. The N × N unit structures 3 are periodically arranged on a plane perpendicular to the input direction of the terahertz wave, forming a continuous plane. Each unit structure 3 comprises a top layer metal structure 2, a liquid crystal medium layer 4, a substrate metal plate 5 and a quartz layer 6 which are sequentially stacked from top to bottom, and the top surface of each unit structure 3 is used as a terahertz wave input end 1. Wherein each unit structure 3 has the following specific structure: the top layer metal structure 2 is arranged on the upper surface of the liquid crystal medium layer 4, and the top layer metal structure 2 is formed by combining a cross-shaped metal piece 7 and a rectangular metal piece 8. The cross-shaped metal piece 7 is positioned at the center of the upper surface of the liquid crystal medium layer 4, namely the center point of the cross-shaped metal piece coincides with the center point of the upper surface of the liquid crystal medium layer 4. The cross-shaped metal piece 7 is formed by vertically intersecting two straight arms, each straight arm is a rectangular metal piece, and the two straight arms are vertically intersected and the intersecting positions are overlapped instead of being overlapped up and down. The rectangular metal piece 8 is positioned on one side of the cross-shaped metal piece 7 and between the cross-shaped metal piece 7 and the side edge of the liquid crystal medium layer 4, one end of the rectangular metal piece is connected with the outer edge of one cross arm of the cross-shaped metal piece 7, the other end of the rectangular metal piece extends to the side edge of the liquid crystal medium layer 4, and the end part of the other end of the rectangular metal piece is superposed with the side edge of the liquid crystal medium layer 4. A metal plate 5 is plated below the liquid crystal medium layer 4, and a quartz substrate 6 is used as a support below the metal plate 5.
The specific materials and parameters of each part in the adjustable multi-angle terahertz wave beam splitter are as follows: the front view of each unit structure 3 is square, that is, the shape of the unit structure is square under the view angle along the input direction of the terahertz wave, and the side length of the square is 180-220 μm. The length and the width of the quartz layer 6 are both 180-220 mu m, and the thickness is 480-520 mu m. The substrate metal plate 5 is made of copper, the length and the width of the substrate metal plate are both 180-220 mu m, and the thickness of the substrate metal plate is 0.1-0.5 mu m. The length and the width of the liquid crystal medium layer 4 are both 180-220 mu m, and the thickness is 20-30 mu m. The top metal structure 2 is made of copper and has a thickness of 0.1-0.5 μm. In the cross-shaped metal piece 7, the length of each straight arm is 70-90 μm, and the width is 20-40 μm. Therefore, the intersecting positions of the two straight arms are superposed to form a square with the side length of 20-40 mu m, and the whole cross-shaped metal piece 7 is in a centrosymmetric form. The rectangular metal piece 8 is 50-70 μm long and 10-20 μm wide and is made of copper. In the N × N unit structures 3 arranged periodically, each column of unit structures 3 is provided with an interface for independently applying a bias voltage to the column of unit structures 3.
Based on the adjustable multi-angle terahertz wave beam splitter, a terahertz wave beam splitting method can be further provided, and the specific method comprises the following steps: when terahertz waves are input from the terahertz wave input end 1, terahertz waves with the frequency of 0.51THz are reflected by the N multiplied by N unit structures 3, and the liquid crystal molecules are turned to change by applying different bias voltages to the liquid crystal medium layer 4 by utilizing the birefringence characteristic of the tunable material liquid crystal, so that the phase delay is changed. Two unit structures with 180-degree phase difference and high reflection amplitude can be obtained by selecting specific bias voltage, and the two units are used as encoding units to be arranged according to a periodic array, so that the super surface can be formed. In the N multiplied by N unit structures 3 arranged in a periodic array, by applying different bias voltages to each array of unit structures 3 of the unit structures 3, a real-time coding sequence consisting of two unit structures with a phase difference of 180 degrees can be generated, and terahertz waves are controlled to realize beam splitting at different angles.
Of course, the bias voltage applied to each column of the unit cell structure 3 array is not limited, but is determined according to the encoding pattern. The bias voltage required to be applied to form a phase difference of 180 ° in the cell structure can be adjusted according to experiments.
Specific technical effects of the adjustable multi-angle terahertz wave beam splitter are described through embodiments.
Example 1
In this embodiment, the structure and the shapes of the components of the adjustable multi-angle terahertz wave beam splitter are as described above, and therefore are not described again. However, the specific parameters of each component are as follows:
the number of selected unit structures N is 24. The front view of each unit structure 3 is a square having a side of 200 μm. The quartz layer 6 had a length and width of 200 μm and a thickness of 500. mu.m. The base metal plate 5 was made of copper, and had a length and width of 200 μm and a thickness of 0.2. mu.m. The liquid crystal medium layer 4 had a length and width of 200 μm and a thickness of 25 μm. The top metal structure 2 is made of copper and has a thickness of 0.2 μm. In the cross-shaped metal member 7, each straight arm has a length of 80 μm and a width of 30 μm. The rectangular metal piece 8 was 60 μm in length and 15 μm in width, and was made of copper. In the N × N unit structures 3 arranged periodically, each column of unit structures 3 is provided with an interface for independently applying a bias voltage to the column of unit structures 3.
Due to the existence of the metal plate of the beam splitter substrate, the terahertz waves cannot be transmitted out. When the terahertz wave input end is input, the terahertz wave with the frequency of 0.51THz is reflected by the N multiplied by N unit structures, different bias voltages are applied to the liquid crystal medium layer by utilizing the double-refraction rate characteristic of the tunable material liquid crystal, and liquid crystal molecules are convertedThe phase change occurs, causing a change in the phase delay. Two unit structures with 180-degree phase difference and high reflection amplitude can be obtained by selecting specific bias voltage, the coding units are arranged according to a periodic array, real-time coding sequences are generated by applying different voltages to each array, and terahertz waves are controlled to realize beam splitting at different angles. In this embodiment, in the cell structure 3 with 24 × 24 periodic arrangement shown in fig. 2, two adjacent columns are provided with the same interface for applying bias voltage, and are numbered with "V" from left to right1”,“V2”,“V3”,“V4”,“V5”,“V6”,“V7”,“V8”,“V9”,“V10”,“V11”,“V12". By pair number "V1”,“V2”,“V3”,“V4”,“V5”,“V6”,“V7”,“V8”,“V9”,“V10”,“V11”,“V12The interface of the terahertz wave real-time coding system applies specific voltage to generate a real-time coding sequence consisting of two unit structures with the phase difference of 180 degrees, so that vertically incident terahertz waves realize beam splitting at different angles.
In order to verify the angle-adjustable beam splitting function, the terahertz wave beam splitter with the adjustable reflection beam angle is designed based on the coded super-surface, three-dimensional far-field scattering diagrams and two-dimensional far-field scattering diagrams of terahertz waves vertically incident to the terahertz wave beam splitter in three different modes at 0.51THz are respectively shown in figures 3 to 5, and the incident terahertz waves are divided into two symmetrical beams to be reflected out. Wherein the first mode is shown in FIG. 3 by being at "V1”,“V3”,“V5”,“V7”,“V9”,“V11No voltage is applied to serial port at V2”,“V4”,“V6”,“V8”,“V10”,“V12' under the condition that voltage is applied by a serial port, terahertz waves are vertically incident to three-dimensional far-field dispersion of terahertz beam splitter under 0.51THzA ray diagram and a two-dimensional far-field scatter diagram. FIG. 4 shows the second case, at serial "V1”,V4”,“V7”,“V10At serial port without voltage2”,“V3”,“V5”,“V6”,“V8”,“V9”,“V11”,“V12"applied voltage, terahertz wave is divided into two beams of waves at 0.51THz when vertically incident to the beam splitter and reflected, according to the generalized snell's law, the reflection angle also changes due to the change of the phase gradient period, and the three-dimensional and two-dimensional far-field scattering modes at this time are shown in fig. 4. Similarly, the third mode of operation of the splitter is at serial port "V1”,“V2”,“V5”,“V6”,“V9”,“V10At "no voltage is applied, and at" V3”,“V4”,“V7”,“V8”,“V11”,“V12"applying a voltage at the serial port, an increase in the phase gradient period, results in a decrease in the reflection angle, as shown in fig. 5. Therefore, it can be seen that the beam splitter can achieve the function of dynamically adjusting the reflection angle.
In order to more clearly and accurately prove that the designed beam splitter is adjustable in angle, normalized reflection amplitudes of reflected beams in three modes are given, as shown in fig. 6-8, it is obvious that the distances between positions where energy is concentrated are reduced, and angles corresponding to reflection peaks can be seen to be 47 degrees, 29 degrees and 21 degrees respectively through the normalized reflection amplitude diagram. Therefore, under the condition that the super surface is not required to be reconstructed, the terahertz beam splitting function with the adjustable angle is realized by applying specific voltage to the serial port of the array.
Claims (9)
1. An adjustable multi-angle terahertz wave beam splitter is characterized by comprising N multiplied by N unit structures (3), wherein N is a natural number; the NxN unit structures (3) are periodically arranged on a plane vertical to the input direction of the terahertz waves; each unit structure (3) comprises a top layer metal structure (2), a liquid crystal medium layer (4), a substrate metal plate (5) and a quartz layer (6), and the top surface of each unit structure (3) is used as a terahertz wave input end (1); the top-layer metal structure (2) is arranged on the upper surface of the liquid crystal medium layer (4), the top-layer metal structure (2) is formed by combining a cross-shaped metal piece (7) and a rectangular metal piece (8), and the cross-shaped metal piece (7) is positioned in the center of the upper surface of the liquid crystal medium layer (4) and formed by vertically intersecting two straight arms; the rectangular metal piece (8) is positioned on one side of the cross-shaped metal piece (7), one end of the rectangular metal piece is connected with the outer edge of one cross arm of the cross-shaped metal piece (7), the other end of the rectangular metal piece extends to the side edge of the liquid crystal medium layer (4), a layer of metal plate (5) is plated below the liquid crystal medium layer (4), and a quartz layer (6) is used as a support below the metal plate (5);
in the N multiplied by N unit structures (3) which are arranged periodically, each column of unit structures (3) is provided with an interface which is used for independently applying bias voltage to the column of unit structures (3).
2. The adjustable multi-angle terahertz wave beam splitter according to claim 1, wherein each unit structure (3) is square in front view, and the side length of the square is 180-220 μm.
3. The adjustable multi-angle terahertz wave beam splitter according to claim 1, wherein the length and width of the quartz layer (6) are both 180-220 μm, and the thickness is 480-520 μm.
4. The adjustable multi-angle terahertz wave beam splitter according to claim 1, wherein the substrate metal plate (5) is made of copper, the length and the width of the substrate metal plate are both 180-220 μm, and the thickness of the substrate metal plate is 0.1-0.5 μm.
5. The adjustable multi-angle terahertz wave beam splitter of claim 1, wherein the length and width of the liquid crystal medium layer (4) are both 180-220 μm, and the thickness is 20-30 μm.
6. The adjustable multi-angle terahertz wave beam splitter according to claim 1, wherein the top metal structure (2) is made of copper and has a thickness of 0.1-0.5 μm.
7. The adjustable multi-angle terahertz wave beam splitter according to claim 1, wherein in the cross-shaped metal piece (7), each straight arm has a length of 70-90 μm and a width of 20-40 μm; the intersection positions of the two straight arms are overlapped.
8. The adjustable multi-angle terahertz wave beam splitter according to claim 1, wherein the rectangular metal piece (8) is 50-70 μm long and 10-20 μm wide and is made of copper.
9. A terahertz wave beam splitting method using the adjustable multi-angle terahertz wave beam splitter according to any one of claims 1 to 8, characterized in that when terahertz waves are input from the terahertz wave input end (1), terahertz waves with the frequency of 0.51THz are reflected by the N × N unit structures (3), and by utilizing the birefringence characteristic of tunable material liquid crystal, different bias voltages are applied to the liquid crystal medium layer (4) to change the turning direction of liquid crystal molecules, thereby causing the change of phase delay; in the N multiplied by N unit structures (3) which are arranged in a periodic array, a real-time coding sequence consisting of two unit structures with a phase difference of 180 degrees is generated by applying different bias voltages to each array of unit structures (3), and the terahertz waves are controlled to realize beam splitting at different angles.
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CN113764896B (en) * | 2021-08-26 | 2023-08-29 | 中国计量大学 | Terahertz wave angle deflection controller and method thereof |
CN118285023A (en) * | 2021-11-25 | 2024-07-02 | 株式会社日本显示器 | Radio wave reflecting plate |
WO2023095566A1 (en) * | 2021-11-25 | 2023-06-01 | 株式会社ジャパンディスプレイ | Radio wave reflector |
CN114325898B (en) * | 2022-01-12 | 2023-09-08 | 桂林电子科技大学 | Dynamic adjustable terahertz wave beam splitter based on composite super surface |
CN114545673B (en) * | 2022-04-25 | 2022-08-12 | 之江实验室 | Liquid crystal super-surface device for realizing wide color gamut reflection color modulation and preparation method thereof |
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