CN112838782B - Piezoelectric motor - Google Patents

Piezoelectric motor Download PDF

Info

Publication number
CN112838782B
CN112838782B CN202110016373.8A CN202110016373A CN112838782B CN 112838782 B CN112838782 B CN 112838782B CN 202110016373 A CN202110016373 A CN 202110016373A CN 112838782 B CN112838782 B CN 112838782B
Authority
CN
China
Prior art keywords
piezoelectric
motor
piezoelectric motor
movers
piezoelectric ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110016373.8A
Other languages
Chinese (zh)
Other versions
CN112838782A (en
Inventor
夏庆路
俞胜平
张丹阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Goertek Microelectronics Inc
Original Assignee
Goertek Microelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goertek Microelectronics Inc filed Critical Goertek Microelectronics Inc
Priority to CN202110016373.8A priority Critical patent/CN112838782B/en
Publication of CN112838782A publication Critical patent/CN112838782A/en
Application granted granted Critical
Publication of CN112838782B publication Critical patent/CN112838782B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention discloses a piezoelectric motor which is provided with a first direction and a second direction which are arranged in a crossed mode, the piezoelectric motor comprises a plurality of motor monomers, each motor monomer comprises a stator and a rotor which is arranged along the first direction in a moving mode relative to the stator, the stators of the motor monomers are arranged side by side along the second direction, and the rotors of the motor monomers are connected into a whole through a connecting structure. According to the invention, the arrangement of a plurality of motor monomers is beneficial to increasing the total driving force of the piezoelectric motor; in addition, set up a plurality of stators and lay side by side along the second direction and a plurality of active cells are connected through connection structure and are an organic whole for a plurality of free drive power syntropies of a plurality of motors are just synchronous, help more accurate and stable of piezoelectric motor's total drive power.

Description

Piezoelectric motor
Technical Field
The invention relates to the technical field of motors, in particular to a piezoelectric motor.
Background
In small devices such as mobile communication devices and wearable devices, a motor capable of linear motion is required to drive small components and moving mechanisms, for example, a retractable camera and a retractable moving mechanism. The traditional small linear motor needs complex mechanical structures such as gears and cams to convert high-speed rotation motion into linear motion, and has the defects of high current, overheating phenomenon, high power consumption, easy mechanical failure and the like.
A piezoelectric motor is a motor that performs electromechanical energy conversion using a piezoelectric inverse effect of a piezoelectric body. The conventional piezoelectric motor is limited by the size, performance and friction coefficient of the piezoelectric body, and is difficult to realize large driving force.
Disclosure of Invention
The invention mainly aims to provide a piezoelectric motor, aiming at solving the problem of insufficient driving force of the traditional piezoelectric motor.
In order to achieve the above object, the piezoelectric motor provided by the present invention has a first direction and a second direction which are arranged in a crossed manner, and the piezoelectric motor includes a plurality of motor units, each of the motor units includes a stator and a mover which is arranged to move along the first direction relative to the stator, the plurality of stators of the plurality of motor units are arranged side by side along the second direction, and the plurality of movers of the plurality of motor units are connected into a whole through a connection structure.
Optionally, the connecting structure includes a clamping groove and a clamping protrusion that are fastened to each other;
the clamping groove is formed in the side portion of one of the adjacent two rotors, and the clamping protrusion is formed in the side portion of the other rotor.
Optionally, two convex hulls are arranged on the side portion of the mover at intervals along the first direction, the convex hulls form the clamping protrusions, and the clamping grooves are formed at intervals between the two convex hulls.
Optionally, the clamping groove and the clamping protrusion have abutting surfaces abutting against each other;
the butt joint face of the clamping groove and/or the butt joint face of the clamping protrusion are/is arranged in an elastic mode.
Optionally, the clamping groove and the clamping protrusion have matching surfaces which are arranged oppositely;
and an assembly gap is formed between the matching surface of the clamping groove and the matching surface of the clamping protrusion opposite to the matching surface of the clamping groove.
Optionally, the width of the assembling gap is 0.01-2 mm.
Optionally, the plurality of movers includes two outer movers, the two outer movers are located at two opposite sides of the piezoelectric motor along the second direction, and side surfaces of the two outer movers, which are away from each other, are arranged in an arc surface shape.
Optionally, the stator includes two vibration plates arranged at an interval in the first direction, and a connecting rod interposed between the two vibration plates, and the mover is slidably mounted and matched with the connecting rod:
the two vibrating plates are polarized along the first direction, each vibrating plate comprises two piezoelectric ceramic plates which are oppositely arranged along the first direction at intervals and a metal substrate which is clamped between the two piezoelectric ceramic plates, and the voltage directions applied by the two piezoelectric ceramic plates in each vibrating plate are opposite.
Optionally, the metal substrate is elastically bendable; and/or
The piezoelectric ceramic plate is fixedly bonded with the metal substrate.
Optionally, the piezoelectric ceramic piece is made of a single crystal ceramic, a polycrystalline piezoelectric ceramic or a polymer material; and/or the presence of a gas in the gas,
the connecting rod is made of carbon fiber.
In the technical scheme provided by the invention, the arrangement of the plurality of motor monomers is beneficial to increasing the total driving force of the piezoelectric motor; in addition, set up a plurality of stators and lay side by side along the second direction and a plurality of active cells are connected through connection structure and are an organic whole for a plurality of free drive power syntropies of a plurality of motors are just synchronous, help more accurate and stable of piezoelectric motor's total drive power.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural view of a piezoelectric motor according to a first embodiment of the present invention;
FIG. 2 is a schematic structural diagram of two outer movers in FIG. 1;
fig. 3 is a schematic structural view of a second embodiment of the piezoelectric motor provided by the present invention;
fig. 4 is a schematic structural view of a third embodiment of a piezoelectric motor provided by the present invention;
fig. 5 is a schematic structural view of a fourth embodiment of a piezoelectric motor according to the present invention;
fig. 6 is a schematic structural diagram of an embodiment of a motor unit provided in the present invention;
fig. 7 is a schematic top view of the piezoelectric ceramic plate in fig. 6;
fig. 8 is a schematic top view of the piezoelectric ceramic plate in fig. 6 according to a second embodiment.
The reference numbers illustrate:
reference numerals Name (R) Reference numerals Name (R)
1 Piezoelectric motor 200 Mover
1a Motor monomer 210 Outer rotor
100 Stator 220 Middle rotor
110 Vibrating plate 300 Connection structure
111 Piezoelectric ceramic piece 310 Clamping groove
112 Metal substrate 320 Clamping projection
120 Connecting rod 330 Convex hull
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout includes three juxtapositions, exemplified by "A and/or B", including either A or B or both A and B. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
In small devices such as mobile communication devices and wearable devices, a motor capable of linear motion is required to drive small components and moving mechanisms, for example, a retractable camera and a retractable moving mechanism. The traditional small linear motor needs complex mechanical structures such as gears and cams to convert high-speed rotation motion into linear motion, and has the defects of high current, overheating phenomenon, high power consumption, easy mechanical failure and the like.
A piezoelectric motor is a motor that performs electromechanical energy conversion using the piezoelectric reverse effect of a piezoelectric body. The conventional piezoelectric motor is limited by the size, performance and friction coefficient of the piezoelectric body, and is difficult to realize large driving force.
In view of the above, the present invention provides a piezoelectric motor, please refer to fig. 1 to 8, which illustrate an embodiment of the piezoelectric motor according to the present invention.
Referring to fig. 1 to 2, the piezoelectric motor 1 provided by the present invention has a first direction and a second direction which are arranged in a crossing manner, the piezoelectric motor 1 includes a plurality of motor units 1a, each of the motor units 1a includes a stator 100 and a mover 200 which is movably arranged along the first direction relative to the stator 100, the stators 100 of the motor units 1a are arranged side by side along the second direction, and the movers 200 of the motor units 1a are connected into a whole through a connection structure 300.
It should be noted that, the first direction and the second direction are not limited in this design, and may be specifically set according to practical application requirements, for example, in an application, if the piezoelectric motor 1 needs to output linear motion along the vertical direction, the vertical direction may be specifically defined as the first direction, and the horizontal direction, which is set to intersect with the vertical direction, may be specifically defined as the second direction.
The piezoelectric motor 1 according to the present embodiment is a motor that converts high-frequency vibration of a piezoelectric body driven by an electric signal into linear motion or reciprocating linear motion of a movable terminal attached to a movable shaft, that is, the mover 200, by using a piezoelectric effect of the piezoelectric body.
Specifically, the piezoelectric body is, for example, a piezoelectric ceramic. The piezoelectric ceramic is an electronic ceramic material with piezoelectric effect, and can convert an electric drive signal into mechanical vibration with certain frequency according to the inverse piezoelectric effect. The piezoelectric motor 1 is a stepping motor system which is manufactured according to the principle and is driven by friction inertia piezoelectric, and by applying voltage signals such as sawtooth waves to piezoelectric elements such as a piezoelectric stack and a piezoelectric bimorph according to the law of conservation of momentum, relative displacement is generated between the stator 100 and the mover 200 or between two different mass blocks, so that stepping large-stroke motion is realized.
Because the structure of the friction inertia piezoelectric driving device is simple, for example, the precise displacement output with large stroke can be realized only by two moving parts of the stator 100 and the mover 200, and the control strategy is also simple. However, the conventional piezoelectric motor 1 depends on the size and performance of the piezoelectric ceramic itself, and is limited by the friction coefficient of the material itself, and it is difficult to realize a large driving force.
In view of the above, the present invention contributes to increasing the total driving force of the piezoelectric motor 1 by providing that the piezoelectric motor 1 includes a plurality of motor cells 1 a; in addition, the plurality of stators 100 are arranged side by side along the second direction, and the plurality of movers 200 are connected into a whole through the connecting structure 300, so that the plurality of driving forces of the plurality of motor units 1a are in the same direction and synchronous, the total driving force of the piezoelectric motor 1 is more precise and stable, and the reliability of the whole piezoelectric motor 1 is improved.
It can be understood that the connection structure 300 realizes the detachable connection between the two movers 200 of every two adjacent motor units 1 a; each motor unit 1a can be used as a common motor alone, and when every two adjacent movers 200 are connected into a whole through the connecting structure 300, the driving force of the plurality of motor units 1a is multiplied.
The specific technical solutions of the connection structure 300 are various, wherein, for example, in an embodiment, the connection structure 300 includes a screw connector and at least two threaded holes respectively disposed between every two adjacent movers 200, and the screw connector is screwed and fixed with the two threaded holes, so that the at least two movers 200 can be connected into a whole; or, in another embodiment, the connection structure 300 includes an absorption member and a matching member, the absorption member and the matching member are respectively disposed on every two adjacent movers 200, the absorption member and the matching member are absorbed, and the at least two movers 200 can be connected into a whole, where the absorption member is, for example, a suction disc assembly with a large absorption force, an adhesive structure with a large adhesive force, or the like.
In the present embodiment, referring to fig. 1, the connecting structure 300 includes a slot 310 and a protrusion 320 that are fastened to each other; the clamping groove 310 is formed in the side portion of one of the adjacent two movers 200, and the clamping protrusion 320 is formed in the side portion of the other mover 200. The shape and the size of the outer surface of the clamping protrusion 320 are matched with the shape and the size of the inner groove of the clamping groove 310; because the clamping grooves 310 and the movers 200 are both disposed at the corresponding side portions of the movers 200, that is, the clamping direction (for example, the second direction) between the clamping grooves 310 and the clamping protrusions 320 is crosswise disposed with respect to the moving direction (that is, the first direction) of the movers 200, the two movers 200 can be effectively prevented from being separated from each other during the moving process along the first direction, and the structure is simple. In addition, the mutual engagement between the engaging groove 310 and the engaging protrusion 320 can also limit the rotational movement of the mover 200 relative to the stator 100 to a certain extent.
The number of the connecting structures 300 arranged between every two adjacent movers 200 is not limited, for example, one or more sets of mutually fastened locking grooves 310 and locking protrusions 320 may be provided according to actual needs, but for convenience of understanding, in the following embodiments, one connecting structure 300 is provided between every two adjacent movers 200 as an example.
The forming manner of the locking protrusion 320 and the locking groove 310 is not limited in the present design, and if it is defined that every two adjacent movers 200 have opposite surfaces oppositely arranged, please refer to fig. 1 and fig. 2, in an embodiment, the opposite surface of one mover 200 is concavely arranged to form the locking groove 310, and the opposite surface of the other mover 200 is correspondingly convexly arranged to form the locking protrusion 320. Alternatively, referring to fig. 3, in an embodiment, two convex hulls 330 are arranged at intervals along the first direction at the side of the mover 200, the convex hulls 330 form the clamping bosses 320, and the clamping grooves 310 are formed at intervals between the two convex hulls 330. So set up for all movers 200 can all do the unified setting, all are formed with foretell protruding 320 of card and draw-in groove 310 simultaneously, make and need not to distinguish a plurality of movers 200, and the homoenergetic is connected smoothly between two arbitrary movers 200, helps improving the convenience of processing and assembly, reduces processing and assembly error.
When the plurality of motor units 1a are used in combination, if the snap 320 between every two adjacent movers 200 is directly and rigidly abutted against the snap groove 310, the slight difference in the friction coefficient of any motor unit 1a will cause the motion synchronism among the movers 200 to be reduced, so that the total driving force of the piezoelectric motor 1 is not required, and the total driving force is unstable.
Based on the above, in one embodiment, the card slot 310 and the card protrusion 320 have abutting surfaces abutting against each other; the abutting surface of the locking groove 310 and/or the abutting surface of the locking protrusion 320 are/is elastically arranged. It is understood that the abutting surface of the card slot 310 includes any inner wall of the card slot 310 and the card protrusion 320 abutting against each other; the abutting surface of the locking projection 320 includes any outer surface of the locking projection 320 and the locking groove 310 abutting against each other. Due to the elastic arrangement, the asynchronous movement of the movers 200 caused by factors such as low assembly precision and friction coefficient difference between the two movers 200 can be buffered, so that the two motor units 1a can work in a cooperative manner.
For convenience of understanding, the first abutting surface is defined as an abutting surface of the card slot 310, and the second abutting surface is defined as an abutting surface of the card protrusion 320 corresponding to the first abutting surface. In this case, the first abutting surface may be elastically provided, the second abutting surface may be elastically provided, or both the first abutting surface and the second abutting surface may be elastically provided.
The specific schemes of the elastic arrangement are various, wherein, for example, the mover 200 is made of an elastic material at least at the first abutting surface and/or the second abutting surface; alternatively, the mover 200 may be provided with an elastic layer disposed on the first contact surface and/or the second contact surface, the elastic layer may be relatively fixed to the first contact surface and/or the second contact surface by, for example, bonding, thermocompression bonding, or the like, and the elastic layer may be made of an elastic material. Such as rubber, silicone, etc. Of course, the mover 200 may further include an elastic member, such as a spring member, interposed between the first abutting surface and the second abutting surface.
In another embodiment, the card slot 310 and the card protrusion 320 have mating surfaces respectively disposed oppositely; an assembly gap is formed between the mating surface of the card slot 310 and the mating surface of the card protrusion 320. Similar to the above abutting surfaces, the mating surface of the locking groove 310 includes any inner wall of the locking groove 310 opposite to the locking protrusion 320; the mating surface of the locking projection 320 includes any outer surface of the locking projection 320 opposite to the locking groove 310. The assembly gap is defined between the matching surfaces of the oppositely arranged clamping grooves 310 and the matching surfaces of the clamping protrusions 320, and the rigid butting between the two rotors is avoided, so that the asynchronous movement of the rotors 200 caused by factors such as low assembly precision and difference of friction coefficients between the two rotors 200 can be buffered, and the two motor units 1a can work in a cooperative mode.
It is understood that the width of the assembly gap is the distance between the mating surface of the card slot 310 and the mating surface of the card protrusion 320. The distance between the two matching surfaces needs to be set within a proper range, if the distance between the two matching surfaces is too large, the movable space between the clamping protrusion 320 and the clamping groove 310 is easily larger, the buckling effect between the clamping protrusion 320 and the clamping groove 310 is reduced, and the clamping protrusion 320 is easily separated from the clamping groove 310; on the contrary, if the distance between the two mating surfaces is too small, the buffering effect of the assembly gap is reduced, so that the two movers 200 are still close to the rigid connection. Therefore, in the present embodiment, the width of the fitting gap is 0.01 to 2 mm.
It should be noted that, the number of the motor units 1a in the piezoelectric motor 1 is not limited by the design, and the piezoelectric motor can be specifically assembled according to the actual required driving force; as shown in fig. 1 and 3, two motor units 1a may be provided in the same piezoelectric motor 1; as shown in fig. 4 and 5, three motor units 1a may be provided in the same piezoelectric motor 1. Of course, in other embodiments, the number of the motor units 1a in the same piezoelectric motor 1 may be more than three, and is not limited herein.
Based on the above, in an embodiment, the plurality of movers 200 includes two outer movers 210, the two outer movers 210 are located at two opposite sides of the piezoelectric motor 1 along the second direction, and side surfaces of the two outer movers 210 away from each other are arranged in an arc surface shape, which on one hand can play a fool-proof role and is convenient for the convenient assembly of the plurality of motor units 1 a; on the other hand, interference of the movement of the mover 220 in the piezoelectric motor 1 with other members on the peripheral side of the piezoelectric motor 1 can be reduced, thereby ensuring safe use of the piezoelectric motor 1.
Specifically, when two motor units 1a are provided in the same piezoelectric motor 1 as shown in fig. 1 and 3, two movers 200 of the two motor units 1a are both outer movers 210. When three motor units 1a are provided in the same piezoelectric motor 1 as shown in fig. 4 and 5, the remaining two movers 200 of the three motor units 1a are the outer movers 210 except for the middle mover 200 (hereinafter, simply referred to as the middle mover 220 for the sake of understanding). Based on this, as shown in fig. 4, when the two outer movers 210 are both provided with the clamping groove 310, the two opposite sides of the middle mover 220 are respectively provided with a convex clamping portion 320; as shown in fig. 4, when the two outer movers 210 are both provided with the clamping protrusions 320, two opposite sides of the middle mover 220 are respectively provided with one of the clamping grooves 310; of course, one of the two outer rotors 210 may be provided with the locking protrusion 320, the other one is provided with the locking groove 310, and two opposite sides of the middle rotor 220 are correspondingly provided with the locking groove 310 and the locking protrusion 320.
Referring to fig. 6, in an embodiment, the stator 100 includes two vibration plates 110 arranged along the first direction at intervals, and a connecting rod 120 sandwiched between the two vibration plates 110, and the mover 200 is slidably mounted and matched with the connecting rod 120: the two vibrating plates 110 are polarized along the first direction, each vibrating plate 110 includes two piezoelectric ceramic plates 111 arranged along the first direction at intervals, and a metal substrate 112 sandwiched between the two piezoelectric ceramic plates 111, and the directions of voltages applied to the two piezoelectric ceramic plates 111 in each vibrating plate 110 are opposite.
The two piezoelectric ceramic plates 111 on the same vibrating plate 110 are subjected to electrical signals in different directions, so that the two piezoelectric ceramic plates 111 contract and expand in opposite directions on the plane of the metal substrate 112, and a large vibration amplitude in the first direction is generated; the electric signals applied by the two vibration plates 110 of the same stator 100 are the same, so that the vibration amplitudes and the vibration directions of the two vibration plates 110 are consistent, and the superposition of the driving forces in the first direction can be realized, so that the mover 200 is driven to slide relative to the stator 100. Of course, the technology for driving the mover 200 to move by using the piezoelectric ceramic sheet 111 is mature, and will not be described herein.
Referring to fig. 7 and 8, the specific shape of the piezoelectric ceramic plate 111 is not limited in this design, and may be circular, elliptical, polygonal, or other shapes.
The specific material of the piezoelectric ceramic sheet 111 is also not limited, and may include, but is not limited to, single crystal ceramic, polycrystalline piezoelectric ceramic, or polymer material. In one embodiment, the metal substrate 112 is elastically bendable so as to be able to adapt to the deformation such as contraction and expansion of the piezoelectric ceramic plate 111 connected thereto to a certain extent. The specific technical solution of the bendable configuration is various, for example, the bendable configuration can be obtained by making the metal substrate 112 of a specific material, in this case, the material of the metal substrate 112 can be selected from a metal material with certain elasticity, such as copper alloy, nickel alloy, or stainless steel.
In an embodiment, the piezoelectric ceramic plate 111 is fixed on the metal substrate 112 by gluing, so that the piezoelectric ceramic plate and the metal substrate can be conveniently detached.
In one embodiment, the connecting rod 120 is made of carbon fiber or other material with a large friction coefficient. Opposite ends of the connecting rod 120 are respectively bonded and fixed to the two vibration plates 110. The mover 200 is provided with a mounting hole along a first direction, and the mover 200 is slidably mounted and matched with the sliding part through the mounting hole, so as to be slidably arranged along the first direction relative to the stator 100. The link 120 can support the sliding of the mover 200 and simultaneously accurately guide the moving direction of the mover 200.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (13)

1. The piezoelectric motor is characterized in that the piezoelectric motor is provided with a first direction and a second direction which are arranged in a crossed mode, the piezoelectric motor comprises a plurality of motor units, each motor unit comprises a stator and a rotor which is arranged relative to the stator and moves along the first direction, the stators of the motor units are arranged side by side along the second direction, and the rotors of the motor units are detachably connected into a whole through a connecting structure;
the connecting structure comprises a clamping groove and a clamping protrusion which are mutually buckled; the clamping groove is formed in the side part of one rotor, and the clamping protrusion is formed in the side part of the other rotor; the clamping groove and the clamping protrusion are provided with abutting surfaces which are mutually abutted; the butt joint face of the clamping groove and/or the butt joint face of the clamping protrusion are/is arranged in an elastic mode.
2. The piezoelectric motor according to claim 1, wherein the side portion of the mover is provided with two convex hulls at intervals in the first direction, the convex hulls form the snap protrusions, and a gap between the two convex hulls forms the snap groove.
3. The piezoelectric motor according to claim 1, wherein the plurality of movers includes two outer movers, the two outer movers being located on opposite sides of the piezoelectric motor in the second direction, and side surfaces of the two outer movers which are away from each other are arranged in an arcuate shape.
4. The piezoelectric motor according to claim 1, wherein the stator includes two vibration plates arranged at an interval in the first direction, and a link interposed between the two vibration plates, and the mover is slidably fitted to the link:
the two vibrating plates are polarized along the first direction, each vibrating plate comprises two piezoelectric ceramic plates which are oppositely arranged along the first direction at intervals and a metal substrate which is clamped between the two piezoelectric ceramic plates, and the voltage directions applied by the two piezoelectric ceramic plates in each vibrating plate are opposite.
5. The piezoelectric motor according to claim 4, wherein the metal substrate is elastically bendable; and/or
The piezoelectric ceramic plate is fixedly bonded with the metal substrate.
6. The piezoelectric motor according to claim 5, wherein the piezoelectric ceramic sheet is made of a material including a single crystal ceramic, a polycrystalline piezoelectric ceramic, or a polymer material; and/or the presence of a gas in the gas,
the connecting rod is made of carbon fiber.
7. The piezoelectric motor is characterized in that the piezoelectric motor is provided with a first direction and a second direction which are arranged in a crossed mode, the piezoelectric motor comprises a plurality of motor units, each motor unit comprises a stator and a rotor which is arranged relative to the stator and moves along the first direction, the stators of the motor units are arranged side by side along the second direction, and the rotors of the motor units are detachably connected into a whole through a connecting structure;
the connecting structure comprises a clamping groove and a clamping protrusion which are mutually buckled; the clamping groove is formed in the side part of one rotor, and the clamping protrusion is formed in the side part of the other rotor; the clamping groove and the clamping protrusion are provided with matching surfaces which are oppositely arranged; and an assembly gap is formed between the matching surface of the clamping groove and the matching surface of the clamping protrusion opposite to the matching surface of the clamping groove.
8. The piezoelectric motor according to claim 7, wherein the width of the fitting slit is 0.01 to 2 mm.
9. The piezoelectric motor according to claim 7, wherein the side portion of the mover is provided with two convex hulls at intervals in the first direction, the convex hulls form the snap protrusions, and a gap between the two convex hulls forms the snap groove.
10. The piezoelectric motor according to claim 7, wherein the plurality of movers includes two outer movers, the two outer movers being located on opposite sides of the piezoelectric motor in the second direction, and side surfaces of the two outer movers which are away from each other are arranged in an arcuate shape.
11. The piezoelectric motor according to claim 7, wherein the stator includes two vibration plates arranged at an interval in the first direction, and a link interposed between the two vibration plates, and the mover is slidably fitted to the link:
the two vibrating plates are polarized along the first direction, each vibrating plate comprises two piezoelectric ceramic plates which are oppositely arranged along the first direction at intervals and a metal substrate which is clamped between the two piezoelectric ceramic plates, and the voltage directions applied by the two piezoelectric ceramic plates in each vibrating plate are opposite.
12. The piezoelectric motor according to claim 11, wherein the metal substrate is elastically bendable; and/or
The piezoelectric ceramic plate is fixedly bonded with the metal substrate.
13. The piezoelectric motor according to claim 12, wherein the piezoelectric ceramic sheet is made of a material including a single crystal ceramic, a polycrystalline piezoelectric ceramic, or a polymer material; and/or the presence of a gas in the gas,
the connecting rod is made of carbon fiber.
CN202110016373.8A 2021-01-07 2021-01-07 Piezoelectric motor Active CN112838782B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110016373.8A CN112838782B (en) 2021-01-07 2021-01-07 Piezoelectric motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110016373.8A CN112838782B (en) 2021-01-07 2021-01-07 Piezoelectric motor

Publications (2)

Publication Number Publication Date
CN112838782A CN112838782A (en) 2021-05-25
CN112838782B true CN112838782B (en) 2022-05-13

Family

ID=75926429

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110016373.8A Active CN112838782B (en) 2021-01-07 2021-01-07 Piezoelectric motor

Country Status (1)

Country Link
CN (1) CN112838782B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114696656B (en) * 2022-05-31 2022-08-23 南京航达超控科技有限公司 Four-stator-rotor series ultrasonic motor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100443639B1 (en) * 2004-06-04 2004-08-11 (주)피에조테크놀리지 small piezoelectric or electrostrictive linear motor
CN201418043Y (en) * 2009-06-19 2010-03-03 东南大学 Ring-shaped traveling wave type ultrasonic wave motor
KR20110080297A (en) * 2010-01-05 2011-07-13 한 상 이 Piezoelectric actuating device
CN103023374A (en) * 2012-12-28 2013-04-03 东南大学 Inertia type piezoelectric linear motor
CN104079202A (en) * 2014-06-23 2014-10-01 南京航空航天大学 Inertia linear motor based on pull type piezoelectric actuator
CN104716864B (en) * 2014-12-05 2017-01-11 南京航空航天大学 Linear piezoelectric motor of inertia type middle-sized structure and control method thereof
CN110768571B (en) * 2019-04-08 2022-08-23 浙江师范大学 Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle
CN111224577B (en) * 2020-02-25 2023-01-03 Oppo广东移动通信有限公司 Motor and electronic apparatus

Also Published As

Publication number Publication date
CN112838782A (en) 2021-05-25

Similar Documents

Publication Publication Date Title
CN110138266A (en) A kind of Inchworm type piezoelectric actuator
CN111030502B (en) Pitch-fork type bipedal linear piezoelectric motor
CN112838782B (en) Piezoelectric motor
CN101262182A (en) Compound vibrator line ultrasonic electromotor
CN115566931B (en) Two rotational degree of freedom executor based on piezoelectric wafer drive
CN110768571A (en) Novel bionic creeping type piezoelectric precision driving device based on parasitic inertia principle
CN110798094A (en) Novel piezoelectric linear precision driving device based on parasitic inertia principle
CN211183830U (en) Secondary displacement amplification type piezoelectric driver
US7687974B2 (en) Vibration type driving apparatus
CN103746600A (en) Paster bent vibration composite piezoelectric supersonic motor vibrator
CN110601597B (en) Bimodal compound inchworm ultrasonic motor
CN210297571U (en) Linear motor driven by laminated eight-rod piezoelectric stator
KR101124807B1 (en) Piezoelectric Ultrasonic Motor
CN209642570U (en) A kind of supersonic motor driving device and its linear ultrasonic electric machine
CN110601589B (en) Linear motor pushed by laminated eight-rod piezoelectric stator and operation mode
CN110492785A (en) A kind of rotary-type ultrasound electric machine of rood beam and its control method
CN109951105A (en) A kind of supersonic motor driving device and its linear ultrasonic electric machine
CN113141126B (en) Three-leg rotary ultrasonic motor
CN114257123B (en) Inertia linear ultrasonic piezoelectric motor
CN217693119U (en) Micro stepping motor and electronic device
CN109495011A (en) A kind of arc vibrator line type piezoelectric motor and its driving method
CN210608959U (en) Piezoelectric plane motion device based on basin frame-shaped stator
WO2023056619A1 (en) Piezoelectric drive device and piezoelectric drive system having same
CN110798093B (en) Linear piezoelectric precision driving platform
CN216371056U (en) Redundant drive large-stroke flexible precise motion platform

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right

Effective date of registration: 20210706

Address after: F / F, phase II, Qingdao International Innovation Park, 1 Keyuan Weiyi Road, Laoshan District, Qingdao City, Shandong Province, 266100

Applicant after: Geer Microelectronics Co.,Ltd.

Address before: 261031 No. 268 Dongfang Road, hi tech Industrial Development Zone, Shandong, Weifang

Applicant before: GOERTEK Inc.

TA01 Transfer of patent application right
GR01 Patent grant
GR01 Patent grant