CN112705510A - Method for cleaning residues on surfaces of anti-sticking plate parts - Google Patents
Method for cleaning residues on surfaces of anti-sticking plate parts Download PDFInfo
- Publication number
- CN112705510A CN112705510A CN202011451595.4A CN202011451595A CN112705510A CN 112705510 A CN112705510 A CN 112705510A CN 202011451595 A CN202011451595 A CN 202011451595A CN 112705510 A CN112705510 A CN 112705510A
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- Prior art keywords
- cleaning
- pressure water
- sand blasting
- ultrasonic
- sand
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/086—Descaling; Removing coating films
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a method for cleaning residues on the surface of a plate-attachment-preventing part, which comprises the following steps: step 10, performing high-pressure water sand blasting cleaning; step 20, carrying out primary ultrasonic cleaning; step 30, checking and correcting; step 40, secondary ultrasonic cleaning; and step 50, drying. The invention combines high-pressure water washing and sand blasting operation, and can ensure the cleaning effect of the anti-sticking plate parts.
Description
Technical Field
The invention belongs to the field of surface cleaning of anti-sticking plate parts, and particularly relates to a method for cleaning residues on the surfaces of anti-sticking plate parts.
Background
The board-proof part exists in a coating chamber in the integrated circuit manufacturing industry in a large quantity, and the main function of the part is to protect the chamber from being polluted and simultaneously attach redundant materials in the coating process. The method for cleaning the anti-sticking plate parts mainly comprises chemical liquid washing and sand blasting treatment, wherein the chemical liquid washing is used for removing the surface film quality of the parts, and the sand blasting operation is used for ensuring that the roughness of the surfaces of the parts can meet the film coating requirement. The chemical liquid washing and sand blasting operation of the traditional process can introduce the problems of liquid medicine residue and part deformation, the two problems can greatly influence the service life of the anti-sticking plate, and the chemical pollution of a vacuum coating chamber can be caused due to the liquid medicine residue.
The problem of chemical liquid medicine residue is mainly that the plate-sticking-preventing parts need to be subjected to chemical liquid medicine film removal in the traditional cleaning process, and the chemical liquid medicine is easy to remain on a rough surface and cannot be completely removed due to the fact that the surfaces of the plate-sticking-preventing parts have high roughness. The surface deformation of the part is mainly realized in the sand blasting operation process, the sand material is collided with the surface of the anti-sticking plate at a high speed to generate a large amount of heat, and the local area of the part is overhigh in temperature due to the local operation of sand blasting, so that the part thin plate is elastically deformed due to high temperature, and the part can not be corrected and repaired.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a method for cleaning residues on the surface of a component such as a circuit board, which combines high-pressure water washing and sand blasting to ensure the cleaning effect of the component such as a circuit board.
The technical scheme adopted by the invention is as follows: a method for cleaning residues on the surface of a plate-attachment prevention part comprises the following steps:
step 10, high-pressure water sand blasting and cleaning: arranging a high-pressure water cleaning device at a sand through hole of a sand blasting device, placing the anti-adhesion plate part to be cleaned at the sand blasting device, simultaneously starting the sand blasting device and the high-pressure water cleaning device, mixing sand materials into a high-pressure water column to form a water-sand mixed solution, and performing high-pressure water sand blasting cleaning on the anti-adhesion plate part to be cleaned;
step 20, primary ultrasonic cleaning, namely performing primary ultrasonic cleaning on the attachment-preventing plate parts subjected to high-pressure water sand blasting cleaning in the step 20, wherein in the primary ultrasonic cleaning process, the ultrasonic power is 1000W-1600W, and the ultrasonic energy density is 5W/in-15W/in;
step 30, checking and correcting: inspecting and correcting the anti-sticking plate type part which is cleaned by ultrasonic wave in the step 20;
step 40, secondary ultrasonic cleaning, namely performing secondary ultrasonic cleaning on the attachment prevention plate parts which are inspected and corrected in the step 30, wherein in the secondary ultrasonic cleaning process, the ultrasonic power is 1000W-1600W, and the ultrasonic energy density is 5W/in-15W/in;
step 50, drying: and (4) drying the anti-adhesion plate parts cleaned by the secondary ultrasonic wave in the step (40) to finish cleaning the anti-adhesion plate parts.
In one embodiment, in step 10, the pressure of the high-pressure water washing device is 300kg/cm2-800kg/cm2。
In one embodiment, in step 10, the sand material is brown corundum, white corundum, glass beads or a mixture of the brown corundum, the white corundum and the glass beads with a particle size of 50-1600 μm.
In one embodiment, in step 30, the checking and correcting specifically includes:
and (3) checking whether the surface of the attachment-preventing plate part has untreated scratches, and simultaneously checking the flatness of the attachment-preventing plate part by using a cutting rule, wherein the deformation of the attachment-preventing plate part is controlled to be less than 1.0 mm.
In one embodiment, the drying temperature is 100 ℃ to 250 ℃ in step 50.
The invention has the beneficial effects that:
1. chemical liquid medicine is not introduced by adopting a physical membrane removing mode, and the chemical liquid medicine is not used in the whole process of cleaning the anti-sticking plate type parts, so that the chemical liquid washing is avoided, and the liquid medicine residue is avoided.
2. The cleaning mode is energy-saving and environment-friendly: no chemical liquid medicine is used, so that the environment is not polluted;
3. avoid the deformation of the plate-attachment sand-blasting: in the process of high-pressure water sand blasting cleaning, the water flow can take away the heat of sand material impact, so that the parts cannot be heated and deformed;
4. the cleaning process is simple, and manpower and material resources are saved: compared with the traditional process, the chemical liquid washing and sand blasting protection operation for many times is cancelled, so that the labor and material cost in the cleaning process is greatly reduced;
Detailed Description
The present invention will be described in further detail with reference to specific examples.
The invention discloses a method for cleaning residues on the surface of a plate-attachment-preventing part, which comprises the following steps:
step 10, high-pressure water sand blasting and cleaning: arranging a high-pressure water cleaning device at a sand through hole of a sand blasting device, placing the anti-adhesion plate part to be cleaned at the sand blasting device, simultaneously starting the sand blasting device and the high-pressure water cleaning device, mixing sand materials into a high-pressure water column to form a water-sand mixed solution, and performing high-pressure water sand blasting cleaning on the anti-adhesion plate part to be cleaned;
step 20, primary ultrasonic cleaning, namely performing primary ultrasonic cleaning on the attachment-preventing plate parts subjected to high-pressure water sand blasting cleaning in the step 20, wherein in the primary ultrasonic cleaning process, the ultrasonic power is 1000W-1600W, and the ultrasonic energy density is 5W/in-15W/in;
step 30, checking and correcting: inspecting and correcting the anti-sticking plate type part which is cleaned by ultrasonic wave in the step 20;
step 40, secondary ultrasonic cleaning, namely performing secondary ultrasonic cleaning on the attachment prevention plate parts which are inspected and corrected in the step 30, wherein in the secondary ultrasonic cleaning process, the ultrasonic power is 1000W-1600W, and the ultrasonic energy density is 5W/in-15W/in;
step 50, drying: and (4) drying the anti-adhesion plate parts cleaned by the secondary ultrasonic wave in the step (40) to finish cleaning the anti-adhesion plate parts.
In this example, in step 10, the pressure of the high-pressure water washing apparatus was 300kg/cm2-800kg/cm2。
In this embodiment, in step 10, the sand material is brown corundum, white corundum, glass beads or a mixture of the brown corundum, the white corundum and the glass beads with a particle size of 50 μm to 1600 μm.
In this embodiment, in step 30, the inspecting and correcting specifically includes:
and (3) checking whether the surface of the attachment-preventing plate part has untreated scratches, and simultaneously checking the flatness of the attachment-preventing plate part by using a cutting rule, wherein the deformation of the attachment-preventing plate part is controlled to be less than 1.0 mm.
In this embodiment, in step 50, the drying temperature is 100 ℃ to 250 ℃.
The invention combines high-pressure water washing and sand blasting operation, and utilizes the rapid flow of a high-pressure water column to generate airflow siphonage at a sand through hole, and sand materials are mixed into the high-pressure water column to form water-sand mixed liquid; the heat of the plate is prevented in the impact of the sand material in the stripping process can be taken away in time due to the action of water flow, so that the problem of deformation of parts caused by accumulation of local heat is avoided, and the problem that the traditional plate-type parts are cleaned to avoid contact of chemical liquid medicine and reduce the local heat caused in the sand blasting process is solved.
The above-mentioned embodiments only express the specific embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention.
Claims (5)
1. A method for cleaning residues on the surface of a plate-attachment prevention part is characterized by comprising the following steps:
step 10, high-pressure water sand blasting and cleaning: arranging a high-pressure water cleaning device at a sand through hole of a sand blasting device, placing the anti-adhesion plate part to be cleaned at the sand blasting device, simultaneously starting the sand blasting device and the high-pressure water cleaning device, mixing sand materials into a high-pressure water column to form a water-sand mixed solution, and performing high-pressure water sand blasting cleaning on the anti-adhesion plate part to be cleaned;
step 20, primary ultrasonic cleaning, namely performing primary ultrasonic cleaning on the attachment-preventing plate parts subjected to high-pressure water sand blasting cleaning in the step 20, wherein in the primary ultrasonic cleaning process, the ultrasonic power is 1000W-1600W, and the ultrasonic energy density is 5W/in-15W/in;
step 30, checking and correcting: inspecting and correcting the anti-sticking plate type part which is cleaned by ultrasonic wave in the step 20;
step 40, secondary ultrasonic cleaning, namely performing secondary ultrasonic cleaning on the attachment prevention plate parts which are inspected and corrected in the step 30, wherein in the secondary ultrasonic cleaning process, the ultrasonic power is 1000W-1600W, and the ultrasonic energy density is 5W/in-15W/in;
step 50, drying: and (4) drying the anti-adhesion plate parts cleaned by the secondary ultrasonic wave in the step (40) to finish cleaning the anti-adhesion plate parts.
2. The method according to claim 1, wherein the pressure of the high pressure water washing device in step 10 is 300kg/cm2-800kg/cm2。
3. The method according to claim 1, wherein in the step 10, the sand material is selected from brown corundum, white corundum, glass beads or a mixture of the brown corundum, the white corundum and the glass beads with a particle size of 50-1600 μm.
4. The method for cleaning surface residues of protection plate parts according to claim 1, wherein in step 30, the inspection and correction are specifically:
and (3) checking whether the surface of the attachment-preventing plate part has untreated scratches, and simultaneously checking the flatness of the attachment-preventing plate part by using a cutting rule, wherein the deformation of the attachment-preventing plate part is controlled to be less than 1.0 mm.
5. The method for cleaning residues on the surface of the protection board parts according to claim 1, wherein the drying temperature in step 50 is 100-250 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011451595.4A CN112705510A (en) | 2020-12-10 | 2020-12-10 | Method for cleaning residues on surfaces of anti-sticking plate parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011451595.4A CN112705510A (en) | 2020-12-10 | 2020-12-10 | Method for cleaning residues on surfaces of anti-sticking plate parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112705510A true CN112705510A (en) | 2021-04-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011451595.4A Pending CN112705510A (en) | 2020-12-10 | 2020-12-10 | Method for cleaning residues on surfaces of anti-sticking plate parts |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE899365A (en) * | 1983-04-07 | 1984-07-31 | Vault Corp | METHOD AND APPARATUS FOR REMOVING IN A CONTROLLED WAY A LAYER OF DISK OXIDE. |
| DE19942785A1 (en) * | 1999-09-08 | 2001-03-22 | Thyssen Krupp Automotive Ag | Processing residue, surface coating or oxide layer removal process, |
| CN101121170A (en) * | 2007-09-10 | 2008-02-13 | 张家港市超声电气有限公司 | Ultrasonic cleaning groove and its processing method |
| CN101492808A (en) * | 2009-02-18 | 2009-07-29 | 颀中科技（苏州）有限公司 | Surface treatment process for square TiW target material for sputtering |
| CN105642598A (en) * | 2014-11-27 | 2016-06-08 | 沈其煜 | Cleaning method for injection molding material |
| CN106048577A (en) * | 2016-07-06 | 2016-10-26 | 安徽红桥金属制造有限公司 | Hardware stamping part surface treatment process |
| CN106272090A (en) * | 2016-08-15 | 2017-01-04 | 永红保定铸造机械有限公司 | A kind of efficiency wet type sand blasting machine |
| CN108097642A (en) * | 2017-12-26 | 2018-06-01 | 苏州贝尔纳德铁路设备有限公司 | A kind of Paint removing process of high-speed EMU wheel pair |
-
2020
- 2020-12-10 CN CN202011451595.4A patent/CN112705510A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE899365A (en) * | 1983-04-07 | 1984-07-31 | Vault Corp | METHOD AND APPARATUS FOR REMOVING IN A CONTROLLED WAY A LAYER OF DISK OXIDE. |
| DE19942785A1 (en) * | 1999-09-08 | 2001-03-22 | Thyssen Krupp Automotive Ag | Processing residue, surface coating or oxide layer removal process, |
| CN101121170A (en) * | 2007-09-10 | 2008-02-13 | 张家港市超声电气有限公司 | Ultrasonic cleaning groove and its processing method |
| CN101492808A (en) * | 2009-02-18 | 2009-07-29 | 颀中科技（苏州）有限公司 | Surface treatment process for square TiW target material for sputtering |
| CN105642598A (en) * | 2014-11-27 | 2016-06-08 | 沈其煜 | Cleaning method for injection molding material |
| CN106048577A (en) * | 2016-07-06 | 2016-10-26 | 安徽红桥金属制造有限公司 | Hardware stamping part surface treatment process |
| CN106272090A (en) * | 2016-08-15 | 2017-01-04 | 永红保定铸造机械有限公司 | A kind of efficiency wet type sand blasting machine |
| CN108097642A (en) * | 2017-12-26 | 2018-06-01 | 苏州贝尔纳德铁路设备有限公司 | A kind of Paint removing process of high-speed EMU wheel pair |
Non-Patent Citations (1)
| Title |
|---|
| 杨武成: "《特种与精密加工》", 31 August 2018, 西安电子科技大学出版社 * |
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Application publication date: 20210427 |
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