CN112666166B - 一种碳化硅微管检测装置及方法 - Google Patents
一种碳化硅微管检测装置及方法 Download PDFInfo
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- CN112666166B CN112666166B CN202011510804.8A CN202011510804A CN112666166B CN 112666166 B CN112666166 B CN 112666166B CN 202011510804 A CN202011510804 A CN 202011510804A CN 112666166 B CN112666166 B CN 112666166B
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 25
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000003384 imaging method Methods 0.000 claims abstract description 47
- 230000010287 polarization Effects 0.000 claims abstract description 24
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 23
- 230000000694 effects Effects 0.000 abstract description 2
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 102000029749 Microtubule Human genes 0.000 description 2
- 108091022875 Microtubule Proteins 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 210000004688 microtubule Anatomy 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 238000000790 scattering method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
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CN113933319A (zh) * | 2021-09-01 | 2022-01-14 | 郑州旭飞光电科技有限公司 | 玻璃缺陷检测装置 |
CN114280009A (zh) * | 2021-12-31 | 2022-04-05 | 北京天科合达半导体股份有限公司 | 一种碳化硅晶片的综合缺陷检测装置及方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014137229A (ja) * | 2013-01-15 | 2014-07-28 | Lasertec Corp | 検査装置及び欠陥検査方法 |
CN204903413U (zh) * | 2015-06-23 | 2015-12-23 | 上海盛广科技发展有限公司 | 基于偏振光成像技术的检测装置 |
EP3279646A1 (en) * | 2016-08-04 | 2018-02-07 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical detection method and system for detecting a spatial feature on a surface of a substrate |
CN111006602A (zh) * | 2019-12-17 | 2020-04-14 | 电子科技大学 | 一种基于双目视觉对涡轮叶片应变测量的成像装置 |
CN211927730U (zh) * | 2020-03-16 | 2020-11-13 | 上海谦视智能科技有限公司 | 一种碳化硅瑕疵检测设备 |
Family Cites Families (1)
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US20150069247A1 (en) * | 2012-04-17 | 2015-03-12 | Nanyang Technologial University | Method and system for real time inspection of a silicon wafer |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014137229A (ja) * | 2013-01-15 | 2014-07-28 | Lasertec Corp | 検査装置及び欠陥検査方法 |
CN204903413U (zh) * | 2015-06-23 | 2015-12-23 | 上海盛广科技发展有限公司 | 基于偏振光成像技术的检测装置 |
EP3279646A1 (en) * | 2016-08-04 | 2018-02-07 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical detection method and system for detecting a spatial feature on a surface of a substrate |
CN111006602A (zh) * | 2019-12-17 | 2020-04-14 | 电子科技大学 | 一种基于双目视觉对涡轮叶片应变测量的成像装置 |
CN211927730U (zh) * | 2020-03-16 | 2020-11-13 | 上海谦视智能科技有限公司 | 一种碳化硅瑕疵检测设备 |
Non-Patent Citations (1)
Title |
---|
碳化硅单晶片关键质量指标及评价方法研究;曹易 等;中国标准化·新材料标准领航增刊;20191231;第41-49页 * |
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Address after: Room 101, Building 8, Qidi City Science and Technology Innovation Park, No. 9 Zhishi Road, Qilin Science and Technology Innovation Park, Nanjing City, Jiangsu Province, 211135 Patentee after: Nanjing Qianshi Intelligent Technology Co.,Ltd. Country or region after: China Address before: 201600 floor 1, building 15, No. 85, Mingnan Road, Zhongshan street, Songjiang District, Shanghai Patentee before: SHANGHAI QIANSHI INTELLIGENT TECHNOLOGY Co.,Ltd. Country or region before: China |