CN112666166A - 一种碳化硅微管检测装置及方法 - Google Patents
一种碳化硅微管检测装置及方法 Download PDFInfo
- Publication number
- CN112666166A CN112666166A CN202011510804.8A CN202011510804A CN112666166A CN 112666166 A CN112666166 A CN 112666166A CN 202011510804 A CN202011510804 A CN 202011510804A CN 112666166 A CN112666166 A CN 112666166A
- Authority
- CN
- China
- Prior art keywords
- light
- light source
- polarizer
- half mirror
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 25
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title abstract description 11
- 238000012360 testing method Methods 0.000 claims abstract description 9
- 238000003384 imaging method Methods 0.000 claims description 37
- 230000010287 polarization Effects 0.000 claims description 32
- 230000005540 biological transmission Effects 0.000 claims description 22
- 238000005286 illumination Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 102000029749 Microtubule Human genes 0.000 description 2
- 108091022875 Microtubule Proteins 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 210000004688 microtubule Anatomy 0.000 description 2
- 238000000790 scattering method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011510804.8A CN112666166B (zh) | 2020-12-18 | 2020-12-18 | 一种碳化硅微管检测装置及方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011510804.8A CN112666166B (zh) | 2020-12-18 | 2020-12-18 | 一种碳化硅微管检测装置及方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112666166A true CN112666166A (zh) | 2021-04-16 |
CN112666166B CN112666166B (zh) | 2024-04-12 |
Family
ID=75406249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011510804.8A Active CN112666166B (zh) | 2020-12-18 | 2020-12-18 | 一种碳化硅微管检测装置及方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN112666166B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113933319A (zh) * | 2021-09-01 | 2022-01-14 | 郑州旭飞光电科技有限公司 | 玻璃缺陷检测装置 |
CN114280009A (zh) * | 2021-12-31 | 2022-04-05 | 北京天科合达半导体股份有限公司 | 一种碳化硅晶片的综合缺陷检测装置及方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014137229A (ja) * | 2013-01-15 | 2014-07-28 | Lasertec Corp | 検査装置及び欠陥検査方法 |
US20150069247A1 (en) * | 2012-04-17 | 2015-03-12 | Nanyang Technologial University | Method and system for real time inspection of a silicon wafer |
CN204903413U (zh) * | 2015-06-23 | 2015-12-23 | 上海盛广科技发展有限公司 | 基于偏振光成像技术的检测装置 |
EP3279646A1 (en) * | 2016-08-04 | 2018-02-07 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical detection method and system for detecting a spatial feature on a surface of a substrate |
CN111006602A (zh) * | 2019-12-17 | 2020-04-14 | 电子科技大学 | 一种基于双目视觉对涡轮叶片应变测量的成像装置 |
CN211927730U (zh) * | 2020-03-16 | 2020-11-13 | 上海谦视智能科技有限公司 | 一种碳化硅瑕疵检测设备 |
-
2020
- 2020-12-18 CN CN202011510804.8A patent/CN112666166B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150069247A1 (en) * | 2012-04-17 | 2015-03-12 | Nanyang Technologial University | Method and system for real time inspection of a silicon wafer |
JP2014137229A (ja) * | 2013-01-15 | 2014-07-28 | Lasertec Corp | 検査装置及び欠陥検査方法 |
CN204903413U (zh) * | 2015-06-23 | 2015-12-23 | 上海盛广科技发展有限公司 | 基于偏振光成像技术的检测装置 |
EP3279646A1 (en) * | 2016-08-04 | 2018-02-07 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical detection method and system for detecting a spatial feature on a surface of a substrate |
CN111006602A (zh) * | 2019-12-17 | 2020-04-14 | 电子科技大学 | 一种基于双目视觉对涡轮叶片应变测量的成像装置 |
CN211927730U (zh) * | 2020-03-16 | 2020-11-13 | 上海谦视智能科技有限公司 | 一种碳化硅瑕疵检测设备 |
Non-Patent Citations (1)
Title |
---|
曹易 等: "碳化硅单晶片关键质量指标及评价方法研究", 中国标准化·新材料标准领航增刊, 31 December 2019 (2019-12-31), pages 41 - 49 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113933319A (zh) * | 2021-09-01 | 2022-01-14 | 郑州旭飞光电科技有限公司 | 玻璃缺陷检测装置 |
CN114280009A (zh) * | 2021-12-31 | 2022-04-05 | 北京天科合达半导体股份有限公司 | 一种碳化硅晶片的综合缺陷检测装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN112666166B (zh) | 2024-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10410335B2 (en) | Inspection method and inspection apparatus | |
US7864310B2 (en) | Surface inspection method and surface inspection apparatus | |
JPH05209722A (ja) | 微細構造評価装置及び微細構造評価法 | |
JPWO2009072484A1 (ja) | 検査装置および検査方法 | |
KR102248091B1 (ko) | 자동 광학 검사 방법 | |
CN112666166A (zh) | 一种碳化硅微管检测装置及方法 | |
TW201719156A (zh) | 晶圓檢查方法以及晶圓檢查裝置 | |
JP2006017726A (ja) | 印刷回路基板の微細パターンを検査するための照明装置と、これを具備する自動光学検査システムおよびそれの検査方法 | |
CN115165758A (zh) | 一种检测设备及方法 | |
US9921169B2 (en) | Method of detecting defect location using multi-surface specular reflection | |
JP2014137229A (ja) | 検査装置及び欠陥検査方法 | |
JPWO2009133849A1 (ja) | 検査装置 | |
JPH06294749A (ja) | 板ガラスの欠点検査方法 | |
US10094787B2 (en) | Multi-surface specular reflection inspector | |
WO2022126677A1 (zh) | 半导体检测装置及检测方法 | |
KR100851212B1 (ko) | 반도체 웨이퍼 표면결함 검사 방법 및 이를 위한원자간력현미경 장치 | |
JP2947513B1 (ja) | パターン検査装置 | |
EP0335163B1 (en) | Apparatus for detecting foreign matter on the surface of a substrate | |
CN113125343A (zh) | 光学检测设备与光学检测方法 | |
JP2002071576A (ja) | 外観検査装置および外観検査方法 | |
CN117080108B (zh) | 一种晶圆检测装置和检测方法 | |
JPH08102478A (ja) | 結晶欠陥検出装置 | |
JPS5848837A (ja) | 欠陥検査方法 | |
TWI534425B (zh) | A method of inspecting a surface state of a flat substrate, and a surface state checking device using a flat substrate | |
JP2017072443A (ja) | ウェーハ検査方法およびウェーハ検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220224 Address after: 201600 floor 1, building 15, No. 85, Mingnan Road, Zhongshan street, Songjiang District, Shanghai Applicant after: SHANGHAI QIANSHI INTELLIGENT TECHNOLOGY Co.,Ltd. Address before: No.28, Yunshan Middle Road, Sanqi Town, Yuyao City, Ningbo City, Zhejiang Province Applicant before: Ningbo Qianshi Intelligent Technology Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Room 101, Building 8, Qidi City Science and Technology Innovation Park, No. 9 Zhishi Road, Qilin Science and Technology Innovation Park, Nanjing City, Jiangsu Province, 211135 Patentee after: Nanjing Qianshi Intelligent Technology Co.,Ltd. Country or region after: China Address before: 201600 floor 1, building 15, No. 85, Mingnan Road, Zhongshan street, Songjiang District, Shanghai Patentee before: SHANGHAI QIANSHI INTELLIGENT TECHNOLOGY Co.,Ltd. Country or region before: China |