CN112662998A - Vacuum coating process for lithium battery contact piece - Google Patents
Vacuum coating process for lithium battery contact piece Download PDFInfo
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- CN112662998A CN112662998A CN202011458983.5A CN202011458983A CN112662998A CN 112662998 A CN112662998 A CN 112662998A CN 202011458983 A CN202011458983 A CN 202011458983A CN 112662998 A CN112662998 A CN 112662998A
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- Prior art keywords
- lithium battery
- battery contact
- contact piece
- coating
- vacuum coating
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims abstract description 129
- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 129
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 49
- 239000011248 coating agent Substances 0.000 claims abstract description 48
- 238000005498 polishing Methods 0.000 claims abstract description 10
- 238000004140 cleaning Methods 0.000 claims abstract description 9
- 238000003618 dip coating Methods 0.000 claims abstract description 9
- 239000000428 dust Substances 0.000 claims abstract description 8
- 238000001035 drying Methods 0.000 claims description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000003921 oil Substances 0.000 claims description 8
- 239000013077 target material Substances 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 238000005477 sputtering target Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 229910000676 Si alloy Inorganic materials 0.000 claims description 4
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000011247 coating layer Substances 0.000 claims description 4
- 238000007791 dehumidification Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000003973 paint Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 3
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims description 3
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910001257 Nb alloy Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims description 2
- RJSRQTFBFAJJIL-UHFFFAOYSA-N niobium titanium Chemical compound [Ti].[Nb] RJSRQTFBFAJJIL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000000203 mixture Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 208000032953 Device battery issue Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
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Abstract
The invention discloses a vacuum coating process for a lithium battery contact piece, relates to the technical field of lithium battery contact pieces, and aims to solve the problem that the surface of the conventional lithium battery contact piece is not cleaned after vacuum coating, so that the attractiveness of the lithium battery contact piece is influenced after dust is actively adsorbed. Step 1, conveying the lithium battery contact piece into a polishing machine for pretreatment; step 2: the lithium battery contact piece is fixed through a clamp; and step 3: sinking the lithium battery contact piece together with the support into a dip coating tank for primary coating operation; and 4, step 4: sending the mixture into a first dryer to be dried for two hours; and 5: sending the lithium battery contact piece into a vacuum coating machine for coating; step 6: the lithium battery contact piece is sent into a coating machine for surface coating operation; and 7: the lithium battery contact piece is sent into a second dryer to be dried for the second time; and 8: cleaning the lithium battery contact piece by adopting an ultraviolet lamp; and step 9: and taking the lithium battery contact piece down from the fixture on the bracket.
Description
Technical Field
The invention relates to the technical field of lithium battery contact pieces, in particular to a vacuum coating process for a lithium battery contact piece.
Background
The pole piece coating has important significance on the capacity, consistency, safety and the like of the lithium battery. According to incomplete statistics: the battery failure caused by the pole piece coating process accounts for more than 10 percent of the failure of the lithium battery caused by all reasons. The magnetron sputtering technology, as a mature film coating means, has recently been paid attention to in the lithium battery industry. The principle of magnetron sputtering coating is as follows: when the background of a sputtering chamber of magnetron sputtering equipment is vacuumized to be below a certain value, inert working gas such as argon or mixed gas of argon and other gases in a certain proportion is introduced, and when certain voltage is applied to the sputtering chamber, free electrons in the sputtering chamber fly to the pole piece under the action of an electric field; if the electrons have enough energy, positive ions and another electron are ionized, wherein the electrons fly to the pole piece, the positive ions are accelerated to fly to the sputtering target under the action of an electric field and bombard the surface of the target with high energy, so that atoms on the surface of the target are separated from original crystal lattices and escape, and the atoms are deposited on the surface of the pole piece to form a film.
The surface of the existing lithium battery contact piece is not cleaned after vacuum coating, so that the attractiveness of the lithium battery contact piece is influenced after dust is actively adsorbed; therefore, the existing requirements are not met, and a vacuum coating process for the lithium battery contact piece is provided for the requirement.
Disclosure of Invention
The invention aims to provide a vacuum coating process for a lithium battery contact piece, which aims to solve the problem that the surface of the existing lithium battery contact piece is not cleaned after vacuum coating, so that the attractiveness of the lithium battery contact piece is influenced after dust is actively adsorbed.
In order to achieve the purpose, the invention provides the following technical scheme: a vacuum coating process for a lithium battery contact piece comprises the following steps:
step 1, processing and forming the lithium battery contact piece, conveying the lithium battery contact piece into a polishing machine through a conveying mechanism, and performing oil removal and dust removal pretreatment on the lithium battery contact piece in the polishing machine to ensure that a plated piece is clean and dry and avoid the defects of pockmarks and poor adhesion of a bottom coating;
step 2: the polished lithium battery contact pieces are fixed through a clamp, the lithium battery contact pieces are distributed on the supports, and ten lithium battery contact pieces can be simultaneously fixed on one support;
and step 3: sinking the lithium battery contact piece and the support into a dip coating groove, carrying out primary coating operation on the lithium battery contact piece in the dip coating groove, and selecting corresponding oil according to the metal type of the lithium battery contact piece;
and 4, step 4: sending the lithium battery contact piece subjected to bottom coating into a first dryer, adjusting the temperature of the first dryer to 60-70 ℃, and drying the lithium battery contact piece in the first dryer for two hours to completely dry a paint film on the lithium battery contact piece;
and 5: under the dehumidification environment, introducing inert gas for protection, sending the lithium battery contact pieces subjected to primary drying into a vacuum coating machine, and carrying out coating operation on the lithium battery contact pieces and the support in a tank body of the vacuum coating machine, wherein during coating, after ensuring that the vacuum degree of the vacuum coating machine meets the requirement, a tungsten wire is heated, the heating time is strictly controlled, and meanwhile, the metal adopted for coating is an aluminum wire;
step 6: the lithium battery contact piece subjected to vacuum coating is sent into a coating machine for surface coating operation, so that the water resistance, oxidation resistance, wear resistance and glossiness of the lithium battery contact piece are improved;
and 7: conveying the surface-coated lithium battery contact piece into a second dryer for secondary drying, adjusting the temperature of the second dryer to 50-60 ℃, and drying the lithium battery contact piece in the second dryer for one to two hours to ensure that the surface coating is completely dried;
and 8: cleaning the surface of the coated lithium battery contact piece by adopting an ultraviolet lamp;
and step 9: and (5) taking down the lithium battery contact piece from the fixture on the support, and finishing the treatment.
Preferably, the inert gas in step 5 is argon.
Preferably, the thickness of the coating layer in the step 5 is 0.1-15 μm.
Preferably, the coating time of the vacuum coating in the step 5 is 1-70 h.
Preferably, the power of the vacuum coating machine in the step 5 is 0.5 kilowatt.
Preferably, the bias voltage of the vacuum coater in the step 5 is-100V.
Preferably, the sputtering target material used by the vacuum coating machine in step 5 is a lithium target, and the target material is selected from one or more of Ti, Al, Cr, Nb, titanium-aluminum alloy, titanium-silicon alloy, titanium-niobium alloy, and chromium-molybdenum alloy.
Preferably, the time of the ultraviolet cleaning in the step 8 is 10-30 min.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the lithium battery contact piece is polished by the polishing machine before being coated with a film, so that the cleanness and dryness of the coated piece are ensured, and the defects of hard spots, poor adhesion and the like of a bottom coating are avoided; the ten lithium battery contact pieces are fixed on the support at one time, so that the ten lithium battery contact pieces can be operated at the same time, and the working efficiency is improved; the lithium battery contact piece is coated by adopting a vacuum coating mode, so that the performance of the lithium battery contact piece is improved, and the lithium battery contact piece has the advantages of oxidation resistance, water resistance, dirt prevention, scratch prevention, lasting luster, long-term maintenance and repeated continuous surface coating; through adopting ultraviolet lamp to wash the lithium cell contact piece of having plated the membrane, can avoid lithium cell contact piece surface initiative to adsorb the dust, improved the aesthetic property.
Drawings
FIG. 1 is a flow chart of a vacuum coating process for a lithium battery contact piece according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
A vacuum coating process for a lithium battery contact piece comprises the following steps:
step 1, processing and forming the lithium battery contact piece, conveying the lithium battery contact piece into a polishing machine through a conveying mechanism, and performing oil removal and dust removal pretreatment on the lithium battery contact piece in the polishing machine to ensure that a plated piece is clean and dry and avoid the defects of pockmarks and poor adhesion of a bottom coating;
step 2: the polished lithium battery contact pieces are fixed through a clamp, the lithium battery contact pieces are distributed on the supports, and ten lithium battery contact pieces can be simultaneously fixed on one support;
and step 3: sinking the lithium battery contact piece and the support into a dip coating groove, carrying out primary coating operation on the lithium battery contact piece in the dip coating groove, and selecting corresponding oil according to the metal type of the lithium battery contact piece;
and 4, step 4: sending the lithium battery contact piece subjected to bottom coating into a first dryer, adjusting the temperature of the first dryer to 60 ℃, and drying the lithium battery contact piece in the first dryer for two hours to completely dry a paint film on the lithium battery contact piece;
and 5: under the dehumidification environment, introducing inert gas for protection, sending the lithium battery contact pieces subjected to primary drying into a vacuum coating machine, and carrying out coating operation on the lithium battery contact pieces and the support in a tank body of the vacuum coating machine, wherein during coating, after ensuring that the vacuum degree of the vacuum coating machine meets the requirement, a tungsten wire is heated, the heating time is strictly controlled, and meanwhile, the metal adopted for coating is an aluminum wire;
step 6: the lithium battery contact piece subjected to vacuum coating is sent into a coating machine for surface coating operation, so that the water resistance, oxidation resistance, wear resistance and glossiness of the lithium battery contact piece are improved;
and 7: conveying the lithium battery contact piece with the coated surface into a second dryer for secondary drying, adjusting the temperature of the second dryer to 50 ℃, and drying the lithium battery contact piece in the second dryer for one hour to ensure that the surface coating is completely dried;
and 8: cleaning the surface of the coated lithium battery contact piece by adopting an ultraviolet lamp;
and step 9: and (5) taking down the lithium battery contact piece from the fixture on the support, and finishing the treatment.
Further, the inert gas in the step 5 is argon.
Further, the thickness of the coating layer in the step 5 is 0.5 μm.
Further, the coating time of the vacuum coating in the step 5 is 10 hours.
Further, the power of the vacuum coating machine in the step 5 is 0.5 kilowatt.
Further, the bias voltage of the vacuum coating machine in the step 5 is-100V.
Further, the sputtering target material used by the vacuum coating machine in the step 5 is a lithium target, and the target material is selected from Ti, titanium-aluminum alloy and titanium-silicon alloy.
Further, the time of the ultraviolet cleaning in the step 8 is 15 min.
Example 2
A vacuum coating process for a lithium battery contact piece comprises the following steps:
step 1, processing and forming the lithium battery contact piece, conveying the lithium battery contact piece into a polishing machine through a conveying mechanism, and performing oil removal and dust removal pretreatment on the lithium battery contact piece in the polishing machine to ensure that a plated piece is clean and dry and avoid the defects of pockmarks and poor adhesion of a bottom coating;
step 2: the polished lithium battery contact pieces are fixed through a clamp, the lithium battery contact pieces are distributed on the supports, and ten lithium battery contact pieces can be simultaneously fixed on one support;
and step 3: sinking the lithium battery contact piece and the support into a dip coating groove, carrying out primary coating operation on the lithium battery contact piece in the dip coating groove, and selecting corresponding oil according to the metal type of the lithium battery contact piece;
and 4, step 4: sending the lithium battery contact piece subjected to bottom coating into a first dryer, adjusting the temperature of the first dryer to 70 ℃, and drying the lithium battery contact piece in the first dryer for two hours to completely dry a paint film on the lithium battery contact piece;
and 5: under the dehumidification environment, introducing inert gas for protection, sending the lithium battery contact pieces subjected to primary drying into a vacuum coating machine, and carrying out coating operation on the lithium battery contact pieces and the support in a tank body of the vacuum coating machine, wherein during coating, after ensuring that the vacuum degree of the vacuum coating machine meets the requirement, a tungsten wire is heated, the heating time is strictly controlled, and meanwhile, the metal adopted for coating is an aluminum wire;
step 6: the lithium battery contact piece subjected to vacuum coating is sent into a coating machine for surface coating operation, so that the water resistance, oxidation resistance, wear resistance and glossiness of the lithium battery contact piece are improved;
and 7: conveying the lithium battery contact piece with the coated surface into a second dryer for secondary drying, adjusting the temperature of the second dryer to 60 ℃, and drying the lithium battery contact piece in the second dryer for two hours to ensure that the surface coating is completely dried;
and 8: cleaning the surface of the coated lithium battery contact piece by adopting an ultraviolet lamp;
and step 9: and (5) taking down the lithium battery contact piece from the fixture on the support, and finishing the treatment.
Further, the inert gas in the step 5 is argon.
Further, the thickness of the coating layer in the step 5 is 0.8 μm.
Further, the coating time of the vacuum coating in the step 5 is 24 hours.
Further, the power of the vacuum coating machine in the step 5 is 0.5 kilowatt.
Further, the bias voltage of the vacuum coating machine in the step 5 is-100V.
Further, the sputtering target material used by the vacuum coating machine in the step 5 is a lithium target, and the target material is selected from Al, titanium-silicon alloy and chromium-molybdenum alloy.
Further, the time of the ultraviolet cleaning in the step 8 is 25 min.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (8)
1. A vacuum coating process for a lithium battery contact piece is characterized by comprising the following steps: the method comprises the following steps:
step 1, processing and forming the lithium battery contact piece, conveying the lithium battery contact piece into a polishing machine through a conveying mechanism, and performing oil removal and dust removal pretreatment on the lithium battery contact piece in the polishing machine to ensure that a plated piece is clean and dry and avoid the defects of pockmarks and poor adhesion of a bottom coating;
step 2: the polished lithium battery contact pieces are fixed through a clamp, the lithium battery contact pieces are distributed on the supports, and ten lithium battery contact pieces can be simultaneously fixed on one support;
and step 3: sinking the lithium battery contact piece and the support into a dip coating groove, carrying out primary coating operation on the lithium battery contact piece in the dip coating groove, and selecting corresponding oil according to the metal type of the lithium battery contact piece;
and 4, step 4: sending the lithium battery contact piece subjected to bottom coating into a first dryer, adjusting the temperature of the first dryer to 60-70 ℃, and drying the lithium battery contact piece in the first dryer for two hours to completely dry a paint film on the lithium battery contact piece;
and 5: under the dehumidification environment, introducing inert gas for protection, sending the lithium battery contact pieces subjected to primary drying into a vacuum coating machine, and carrying out coating operation on the lithium battery contact pieces and the support in a tank body of the vacuum coating machine, wherein during coating, after ensuring that the vacuum degree of the vacuum coating machine meets the requirement, a tungsten wire is heated, the heating time is strictly controlled, and meanwhile, the metal adopted for coating is an aluminum wire;
step 6: the lithium battery contact piece subjected to vacuum coating is sent into a coating machine for surface coating operation, so that the water resistance, oxidation resistance, wear resistance and glossiness of the lithium battery contact piece are improved;
and 7: conveying the surface-coated lithium battery contact piece into a second dryer for secondary drying, adjusting the temperature of the second dryer to 50-60 ℃, and drying the lithium battery contact piece in the second dryer for one to two hours to ensure that the surface coating is completely dried;
and 8: cleaning the surface of the coated lithium battery contact piece by adopting an ultraviolet lamp;
and step 9: and (5) taking down the lithium battery contact piece from the fixture on the support, and finishing the treatment.
2. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: and in the step 5, the inert gas is argon.
3. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: and the thickness of the coating layer in the step 5 is 0.1-15 mu m.
4. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: and the coating time of the vacuum coating in the step 5 is 1-70 h.
5. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: and in the step 5, the power of the vacuum coating machine is 0.5 kilowatt.
6. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: and the bias voltage of the vacuum coating machine in the step 5 is-100V.
7. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: the sputtering target material used by the vacuum coating machine in the step 5 is a lithium target, and the target material is selected from one or more of Ti, Al, Cr, Nb, titanium-aluminum alloy, titanium-silicon alloy, titanium-niobium alloy and chromium-molybdenum alloy.
8. The vacuum coating process for lithium battery contact pieces as claimed in claim 1, wherein: and the ultraviolet cleaning time in the step 8 is 10-30 min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011458983.5A CN112662998A (en) | 2020-12-11 | 2020-12-11 | Vacuum coating process for lithium battery contact piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011458983.5A CN112662998A (en) | 2020-12-11 | 2020-12-11 | Vacuum coating process for lithium battery contact piece |
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| Publication Number | Publication Date |
|---|---|
| CN112662998A true CN112662998A (en) | 2021-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011458983.5A Pending CN112662998A (en) | 2020-12-11 | 2020-12-11 | Vacuum coating process for lithium battery contact piece |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1986869A (en) * | 2005-12-22 | 2007-06-27 | 佛山市顺德区汉达精密电子科技有限公司 | Plastic surface vacuum plating process |
| CN101338409A (en) * | 2007-08-31 | 2009-01-07 | 湖州金泰科技股份有限公司 | Coating method of automobile hub cover |
| US20090269511A1 (en) * | 2008-04-25 | 2009-10-29 | Aruna Zhamu | Process for producing hybrid nano-filament electrodes for lithium batteries |
| CN201975475U (en) * | 2011-03-09 | 2011-09-14 | 成都福兰特电子技术有限公司 | Self-protection lithium battery |
| CN111549320A (en) * | 2020-06-23 | 2020-08-18 | 东莞市鑫淼真空科技有限公司 | Vacuum coating process for precise metal product |
-
2020
- 2020-12-11 CN CN202011458983.5A patent/CN112662998A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1986869A (en) * | 2005-12-22 | 2007-06-27 | 佛山市顺德区汉达精密电子科技有限公司 | Plastic surface vacuum plating process |
| CN101338409A (en) * | 2007-08-31 | 2009-01-07 | 湖州金泰科技股份有限公司 | Coating method of automobile hub cover |
| US20090269511A1 (en) * | 2008-04-25 | 2009-10-29 | Aruna Zhamu | Process for producing hybrid nano-filament electrodes for lithium batteries |
| CN201975475U (en) * | 2011-03-09 | 2011-09-14 | 成都福兰特电子技术有限公司 | Self-protection lithium battery |
| CN111549320A (en) * | 2020-06-23 | 2020-08-18 | 东莞市鑫淼真空科技有限公司 | Vacuum coating process for precise metal product |
Non-Patent Citations (1)
| Title |
|---|
| 梁治齐: "《实用清洗技术手册》", 31 January 2000, 化学工业出版社 * |
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