CN112661103B - Preparation method of ultra-smooth sliding block - Google Patents
Preparation method of ultra-smooth sliding block Download PDFInfo
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- CN112661103B CN112661103B CN202011582589.2A CN202011582589A CN112661103B CN 112661103 B CN112661103 B CN 112661103B CN 202011582589 A CN202011582589 A CN 202011582589A CN 112661103 B CN112661103 B CN 112661103B
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Abstract
The invention provides a preparation method of an ultra-smooth sliding block, which comprises the following steps: pushing the super-slide island from a side of the super-slide island such that the super-slide island is separated into a first portion and a second portion, and the first portion and the second portion are not completely separated; after the side thrust is removed, the super-sliding island automatically returns; the super-slide island is pushed continuously from the top of the super-slide island, so that the first part and the second part are completely separated, and the separated first part or second part is a super-slide block. According to the preparation method of the super-sliding slide block, provided by the invention, the method of pushing the super-sliding island from the side and the method of pushing the super-sliding island from the top are combined, so that the problems of buckling instability, super-sliding island rotation and super-sliding island damage caused by pushing the super-sliding island in a single direction are avoided, and the success rate of super-sliding slide block preparation is greatly improved.
Description
Technical Field
The invention relates to the technical field of structural super-sliding, in particular to a preparation method of a super-sliding block.
Background
Friction and wear problems have long been closely related to manufacturing, but also directly to energy, environment and health. It is counted that about one third of the world's energy is consumed during friction and about 80% of machine component failures are caused by wear. The structural ultra-slip is one of ideal schemes for solving the friction and abrasion problems, and the structural ultra-slip refers to the phenomenon that friction and abrasion between two van der Waals solid surfaces (such as two-dimensional material surfaces of graphene, molybdenum disulfide and the like) which are smooth at atomic level and are in non-metric contact are almost zero.
The existing method for preparing the micron-scale ultra-smooth sliding block is that firstly, photoresist is coated and patterned, then the photoresist and partial graphite which is not protected by the photoresist are etched, and a plurality of graphite islands with the size of micron scale are formed on the surface of the HOPG material. And then pushing the graphite islands in turn to form an ultra-sliding surface, thereby preparing the ultra-sliding block. In the preparation of super-slide blocks, pushing open the graphite islands is an important step, which will determine whether usable super-slide blocks and super-slide surfaces are available. Generally, the etching preparation process of the graphite island array is mature and has high success rate. However, in the prior art, in the process of pushing open the graphite islands, the situation that the graphite islands are damaged and the ultra-sliding blocks cannot be obtained can occur.
The existing method for pushing the super-slide block away adopts a probe to push the super-slide island, the probe is loaded in a way that part of the probe contacts the side surface of the super-slide block through the probe, lateral force is applied to push the super-slide island, and the super-slide island is pushed from the side surface of the super-slide block, but the super-slide island can possibly rotate during the pushing process, the super-slide island can be locked when the super-slide block rotates during the rotating process, and the super-slide island cannot be normally processed and formed into the super-slide block.
In chinese patent application publication No. CN111717881a, a method for preparing an ultra-sliding block is disclosed, which comprises etching a platform at the tip of a probe, then contacting the ultra-sliding block with the platform, and changing the loading mode to a method of contacting the ultra-sliding block from the top by using the probe, and applying positive pressure and shearing force, thereby pushing the sliding block. However, when the super-slide island is pushed directly from the top, the super-slide island needs to be pushed initially, and a large pressure needs to be applied to the super-slide island due to the need of overcoming the connection force between the layers, so that the slider is easy to damage, the pushing success rate is low, and a customized probe structure is needed, so that the driving can not be realized directly under the driving of a conventional probe.
In summary, in the existing method for preparing the ultra-smooth sliding block, the manner of pushing the ultra-smooth island by the probe from the side surface or the top surface respectively may cause damage to the sliding block or rotation of the ultra-smooth island, and may cause structural damage, so that a qualified ultra-smooth sliding block cannot be obtained, and the yield of mass production of the ultra-smooth sliding block is reduced, so that a simple and convenient method for preparing the ultra-smooth sliding block is needed, which can solve the instability problem.
Disclosure of Invention
The invention aims to provide a preparation method of an ultra-smooth sliding block, which aims to solve the technical problem of low yield of ultra-smooth sliding blocks in the prior art.
In order to achieve the above purpose, the invention adopts the following technical scheme: the preparation method of the ultra-smooth sliding block comprises the following steps:
step 1, pushing a super-slide island from the side edge of the super-slide island so that the super-slide island is separated into a first part and a second part, wherein the first part and the second part are not completely separated;
and 3, continuing to push the super-slide island from the top of the super-slide island, so that the first part and the second part are completely separated, and the separated first part or second part is a super-slide block.
Further, in the step 1, the super-slide island is pushed from 1/3 to 2/3 of the length direction of the side surface of the super-slide island to 1/4-4/5 of the height direction.
Further, in the step 1, the thrust applied toward the super-slide island is in the range of 5 to 50 μn.
Further, after the step 1, the push-out distance of the first portion is 1/10 to 1/2 of the side length of the super-sliding island.
Further, in the step 2, if the first portion and the second portion are not automatically returned, the super-sliding island is replaced and the step 1 and the step 2 are repeated.
Further, in the step 3, the super-slider is pushed from 1/2 of the top surface of the super-slider in the length direction to 1/4 to 3/4 of the width direction.
Further, in the step 3, the thrust applied toward the super-slide island is in a range of 30 to 300 μn.
Further, a heating step is further provided before the step 1, and the super-sliding island is heated in a nitrogen atmosphere and gradually cooled to room temperature.
Further, the heating temperature of the super-sliding island is 100-300 ℃, and the heating time is more than 5 minutes.
Further, in both the step 1 and the step 3, the ultra-sliding island is pushed by a probe, preferably a tungsten probe.
The preparation method of the ultra-smooth sliding block provided by the invention has the beneficial effects that: compared with the prior art, the method for pushing the super-sliding island from the side and the method for pushing the super-sliding island from the top are combined, the problems of super-sliding island rotation and super-sliding island damage caused by pushing the super-sliding island in a single direction are avoided, and the success rate of super-sliding slider preparation is greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a lateral pushing step of a method for manufacturing an ultra-smooth slider according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a pushing step of a preparation method of an ultra-sliding block according to an embodiment of the present invention.
Reference numerals illustrate:
1. super-smooth island; 11. a first portion; 12. a second portion; 2. a substrate; 3. and (3) a probe.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1 and fig. 2 together, a method for manufacturing an ultra-smooth slider according to the present invention will now be described. The preparation method of the ultra-smooth sliding block comprises the following steps:
s1, placing the ultra-smooth island 1 to be processed under nitrogen atmosphere for heating, wherein the temperature range during heating is 100-300 ℃, and the heating time is more than five minutes. Preferably, the heating range of the super slide island 1 is 150 ℃ and the heating time is 10 minutes;
s2, the heated super-slide island 1 is continuously placed in a nitrogen atmosphere for natural cooling until the super-slide island is cooled to room temperature and then is transferred to a sample stage of a transfer device with a probe 3 on a substrate 2, and subsequent processing and transfer can be performed through the probe 3.
The ultra-smooth island 1 is heated before the ultra-smooth island 1 is dissociated, and organic pollution and liquid film generated by long-term placement of the ultra-smooth island 1 surface in the atmosphere can be removed by heating under nitrogen atmosphere, so that damage of the ultra-smooth surface caused by organic pollutant and liquid film can be avoided.
S3, placing the probe 3 on the side edge of the super-slide island 1, wherein the transverse position of the tip of the probe 3 is positioned at 1/3 to 2/3 of the length direction of the side edge, the longitudinal position of the tip is positioned at 1/4 to 4/5 of the height direction of the side edge, and the tip exerts thrust towards the direction vertical to the side edge, so that the super-slide island 1 can be pushed towards the direction vertical to the side edge, and the thrust range is 5 to 50 mu N.
Due to the effect of the dissociation surface, the super-slide island 1 can be separated into the first part 11 and the second part 12 along a certain interlayer dissociation surface, and the pushing length of the probe 3 is controlled, so that the first part 11 and the second part 12 are staggered and are not completely separated, the pushing distance of the first part 11 after side pushing is generally 1/10 to 1/2 of any side length of the super-slide island 1, namely, at least half of the area of the first part 11 and the second part 12 still is overlapped, at this time, the super-slide island 1 can be primarily dissociated, and the pushing length of the super-slide island 1 is smaller due to smaller pushing force, at this time, the super-slide island 1 cannot rotate, the phenomenon that the super-slide island 1 is locked due to rotation is avoided, and the phenomenon that the super-slide island 1 is damaged cannot occur.
Preferably, in the side pushing step, the probe 3 is used to push from either side of the super-slide island 1, the needle tip is located at the center point of the side, i.e. at 1/2 of the length direction of the side of the super-slide island 1, and 1/2 of the height direction, the force applied at the center point is 15 μN, and the push-out distance of the first portion 11 is 1/4 of the super-slide island 1, i.e. 3/4 of the width direction of the first portion 11 is still coincident with the second portion 12.
S4, the pushing distance of the first part 11 after the side pushing is generally 1/10 to 1/2 of the length of any side of the super-slide island 1, namely, when at least half of the areas of the first part 11 and the second part 12 are overlapped, the lateral pushing force is removed, if the super-slide island 1 has a super-slide dissociation surface, the super-slide island 1 can restore to the state before the first part 11 and the second part 12 are not pushed again due to the self-restoring effect, but at the moment, the first part 11 and the second part 12 are completely dissociated, only a certain pushing force is needed to be applied, and the super-slide island can be separated again.
If the super-sliding island 1 does not have the super-sliding dissociation surface, i.e. has the super-sliding characteristic, the super-sliding island 1 does not have the self-restoring effect at this time, i.e. the first part 11 and the second part 12 cannot return automatically, at this time, the pushing step is not needed to be continuously carried out, the super-sliding island 1 without the super-sliding dissociation surface is directly abandoned, and one super-sliding island 1 is replaced again for reprocessing.
S5, placing the probe 3 on the top of the super-slide island 1, wherein the transverse position of the needle tip of the probe 3 is positioned at 1/2 of the length direction of the top surface, the longitudinal position of the needle tip is positioned at 1/4-3/4 of the width direction of the top surface, and the needle tip obliquely applies thrust towards the direction vertical to the top surface, so that the super-slide island 1 can continuously move along the direction vertical to the side until the first part 11 and the second part 12 are completely separated, and the thrust at the moment ranges from 30 mu N to 300 mu N. Of course, depending on the actual situation and the specific requirements, it is also possible to push the super-slide island 1 to move in either direction so that the first portion 11 and the second portion 12 are completely separated, which is not limited only herein.
At this time, the first portion 11 and the second portion 12 are detached due to the side pushing, at this time, the first portion 11 and the second portion 12 are continuously separated by pushing, a pushing force is applied from the top to the lower direction, at this time, the pushing force at the top can enhance the contact force between the first portion 11 and the second portion 12, a phenomenon that the first portion 11 rotates in the process of continuously pushing can be effectively avoided, and since the first portion 11 and the second portion 12 are completely detached, the continuous separation of the first portion 11 and the second portion 12 can be realized without larger pushing force, and damage to the surface of the super-sliding island 1 can be avoided.
Preferably, in the pushing step, the probe 3 is pushed from the top of the super-slide island 1, and the top surface of the super-slide island 1 may or may not have an island cover, which is not limited herein. The needle tip is positioned at the center point of the top surface, i.e., 1/2 of the length direction of the top surface of the super-slide island 1 and 1/2 of the width direction, and the force applied at the center point is 60 mu N.
And S6, transferring the first part 11 or the second part 12 pushed out after processing to the target substrate 2.
The method of pushing the super-slide island 1 from the side and the method of pushing the super-slide island 1 from the top are combined, so that the problems of buckling instability of the sliding block, rotation of the super-slide island 1 and damage of the super-slide island 1 caused by pushing the super-slide island 1 in a single direction are avoided, and the success rate of manufacturing the super-slide sliding block is greatly improved.
In the above processing steps, not only the probe 3 but also other transfer heads may be used as a pushing and transferring tool. Preferably, the probe 3 is a tungsten probe 3, and the diameter of the tungsten probe 3 is preferably 0.1 to 1mm, and the tip curvature radius is preferably 1 to 10 μm.
Preferably, the limitation on the size and shape of the super-slider 1 in the above-described processing steps is generally a limitation on the super-slider 1 of a regular shape, such as a triangle, a quadrangle, or a pentagon. Of course, according to the actual situation and specific requirements, the shape of the super-slide island 1 can also be round, and the limitation of the above-mentioned dimensions is the limitation of the diameter of the super-slide island 1; the shape of the super-sliding island 1 is other special shapes, the pushing position is optimally at the geometric center of the front face or the side face of the super-sliding island 1, and the longest distance of the super-sliding island during side pushing is at least that a general area is not separated, so that the super-sliding island is not limited only.
The super-sliding island 1 is an initial material for manufacturing super-sliding sheets, which is not dissociated, and is generally made of multiple layers of sheets, for example, high-orientation pyrolytic graphite, that is, HOPG graphite, graphene and other materials, the super-sliding slider is a slider with a super-sliding surface formed after dissociation of the super-sliding island 1, a first portion 11 of the super-sliding island 1 after dissociation is the super-sliding slider, and a second portion 12 is the super-sliding substrate 2.
As an alternative to the above embodiments, the super-slider 1 may be directly dissociated without heating the super-slider 1, or the surrounding environment temperature may be directly raised for heating the super-slider 1, or the super-slider 1 may be heated in a specific liquid environment, which is not limited only herein.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (9)
1. The preparation method of the ultra-smooth sliding block is characterized by comprising the following steps:
step 1, pushing the super-slide island from the side edge of the super-slide island so that the super-slide island is separated into a first part and a second part, wherein the first part and the second part are not completely separated, and the pushing-out distance of the first part is 1/10 to 1/2 of the side length of the super-slide island so that the first part and the second part are staggered and are not completely separated;
step 2, after the thrust of the side is withdrawn, the first part and the second part return automatically, and if the first part and the second part do not return automatically, the super slide island is replaced and the step 1 and the step 2 are repeated; if the first part and the second part return automatically, continuing to step 3;
and 3, obliquely applying a pushing force from the direction perpendicular to the top surface of the super-slide island, and continuously pushing the super-slide island to completely separate the first part from the second part, wherein the separated first part or second part is a super-slide block.
2. The method for preparing the ultra-smooth sliding block according to claim 1, wherein the method comprises the following steps: in the step 1, the super-slide island is pushed from 1/3 to 2/3 of the length direction of the side surface of the super-slide island to 1/4 to 4/5 of the height direction.
3. The method for preparing the ultra-smooth sliding block according to claim 1, wherein the method comprises the following steps: in the step 1, the thrust applied toward the super-slide island ranges from 5 to 50 μN.
4. The method for preparing the ultra-smooth sliding block according to claim 1, wherein the method comprises the following steps: in the step 3, the super-slider is pushed from 1/2 of the top surface of the super-slider in the length direction to 1/4 to 3/4 of the width direction.
5. The method for preparing the ultra-smooth sliding block according to claim 1, wherein the method comprises the following steps: in the step 3, the thrust applied toward the super-slide island ranges from 30 to 300 μN.
6. The method for manufacturing an ultra-smooth sliding block according to any one of claims 1 to 5, wherein: and (2) a heating step is further arranged before the step (1), and the super-slide island is heated in a nitrogen atmosphere and gradually cooled to room temperature.
7. The method for preparing the ultra-smooth sliding block according to claim 6, wherein: the heating temperature of the super-sliding island is 100-300 ℃, and the heating time is more than 5 minutes.
8. The method for manufacturing an ultra-smooth sliding block according to any one of claims 1 to 5, wherein: in both the step 1 and the step 3, the ultra-sliding island is pushed by a probe.
9. The method for preparing the ultra-smooth sliding block according to claim 8, wherein: the probe is a tungsten probe.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6769969B1 (en) * | 1997-03-06 | 2004-08-03 | Keltech Engineering, Inc. | Raised island abrasive, method of use and lapping apparatus |
| CN107032330A (en) * | 2017-06-02 | 2017-08-11 | 大连理工大学 | A kind of friction surface grows macroscopical superslide method of graphene |
| WO2018087420A1 (en) * | 2016-11-08 | 2018-05-17 | Nanovate Oy | A system and a method for producing continuous and monolithic graphene |
| CN109030870A (en) * | 2018-07-19 | 2018-12-18 | 清华大学 | Two-dimensional layer material wraps up atomic force microscope probe and preparation method thereof and application |
| CN209237133U (en) * | 2018-11-05 | 2019-08-13 | 胡歆 | A kind of improvement Urology Surgery expander |
| CN111515386A (en) * | 2020-05-06 | 2020-08-11 | 明光市龙盛瑞新材料科技有限公司 | Preparation method of graphene metal composite material |
| CN111824735A (en) * | 2020-06-28 | 2020-10-27 | 深圳清华大学研究院 | Method for picking and overturning ultra-smooth slider |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180095067A1 (en) * | 2015-04-03 | 2018-04-05 | Abbott Laboratories | Devices and methods for sample analysis |
| GB201510761D0 (en) * | 2015-06-18 | 2015-08-05 | Imp Innovations Ltd | 2-dimensional carbon material |
| US11136269B2 (en) * | 2015-08-24 | 2021-10-05 | Morgan Advanced Materials And Technology, Inc. | Preparation of articles comprising graphitic particles |
| US20170347760A1 (en) * | 2016-06-01 | 2017-12-07 | Boban Jose | Locking slider assembly and a method for its manufacture |
| US10345563B2 (en) * | 2016-10-25 | 2019-07-09 | Glint Photonics, Inc. | Sunlight collection system with asymmetric catadioptric optics |
| WO2020087075A1 (en) * | 2018-10-26 | 2020-04-30 | The Regents Of The University Of California | Aqueous exfoliated graphene by amphiphilic cellulose nanofibrils for foldable and moisture-responsive nanopaper |
-
2020
- 2020-12-28 CN CN202011582589.2A patent/CN112661103B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6769969B1 (en) * | 1997-03-06 | 2004-08-03 | Keltech Engineering, Inc. | Raised island abrasive, method of use and lapping apparatus |
| WO2018087420A1 (en) * | 2016-11-08 | 2018-05-17 | Nanovate Oy | A system and a method for producing continuous and monolithic graphene |
| CN107032330A (en) * | 2017-06-02 | 2017-08-11 | 大连理工大学 | A kind of friction surface grows macroscopical superslide method of graphene |
| CN109030870A (en) * | 2018-07-19 | 2018-12-18 | 清华大学 | Two-dimensional layer material wraps up atomic force microscope probe and preparation method thereof and application |
| CN209237133U (en) * | 2018-11-05 | 2019-08-13 | 胡歆 | A kind of improvement Urology Surgery expander |
| CN111515386A (en) * | 2020-05-06 | 2020-08-11 | 明光市龙盛瑞新材料科技有限公司 | Preparation method of graphene metal composite material |
| CN111824735A (en) * | 2020-06-28 | 2020-10-27 | 深圳清华大学研究院 | Method for picking and overturning ultra-smooth slider |
Non-Patent Citations (2)
| Title |
|---|
| Rotational instability in supperlubric joins;Qu CY等;《Physcal Review Letters》;第122卷(第24期);全文 * |
| 石墨烯超滑研究取得重要进展;清华大学机械系摩擦学国家重点实验室;《表面工程与再制造》;第17卷(第02期);第63-64页 * |
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