CN112661103A - Preparation method of ultra-smooth sliding block - Google Patents
Preparation method of ultra-smooth sliding block Download PDFInfo
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- CN112661103A CN112661103A CN202011582589.2A CN202011582589A CN112661103A CN 112661103 A CN112661103 A CN 112661103A CN 202011582589 A CN202011582589 A CN 202011582589A CN 112661103 A CN112661103 A CN 112661103A
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Abstract
The invention provides a preparation method of an ultra-smooth sliding block, which comprises the following steps: pushing the ultra-smooth island from the side edge of the ultra-smooth island, so that the ultra-smooth island is separated into a first part and a second part, and the first part and the second part are not completely separated; after the side thrust is removed, the ultra-sliding island automatically returns; and continuously pushing the ultra-smooth island from the top of the ultra-smooth island to completely separate the first part from the second part, wherein the separated first part or second part is the ultra-smooth slider. According to the preparation method of the ultra-smooth slider, the method of pushing the ultra-smooth island laterally and the method of pushing the ultra-smooth island at the top are combined, so that the problems of buckling instability of the slider, rotation of the ultra-smooth island and damage of the ultra-smooth island caused by pushing the ultra-smooth island in a single direction are solved, and the success rate of preparation of the ultra-smooth slider is greatly improved.
Description
Technical Field
The invention relates to the technical field of structure ultra-smoothness, in particular to a preparation method of an ultra-smooth sliding block.
Background
For a long time, friction and wear problems have been closely related not only to manufacturing, but also directly to energy, environment and health. Statistically, about one third of the world's energy is consumed during friction, and about 80% of machine component failures are caused by wear. The ultra-smooth structure is one of ideal schemes for solving the problem of frictional wear, and the ultra-smooth structure refers to the phenomenon that the friction and the wear between two atomic-level smooth and non-metric contact Van der Waals solid surfaces (such as two-dimensional material surfaces of graphene, molybdenum disulfide and the like) are almost zero.
The existing method for preparing the micron-scale ultra-smooth sliding block is to form a plurality of micron-scale graphite islands on the surface of an HOPG material by coating and patterning photoresist, etching the photoresist and part of graphite which is not protected by the photoresist. And then pushing away the graphite islands in sequence to form a super-slip surface, thereby preparing the super-slip slider. In the preparation process of the ultra-smooth slide block, pushing away the graphite islands is an important step, and whether the available ultra-smooth slide block and the ultra-smooth sliding surface can be obtained or not is determined. Generally, the etching preparation process of the graphite island array is mature, and the success rate is high. However, in the process of pushing away the graphite island in the prior art, the situation that the ultra-smooth slider cannot be obtained due to the damaged graphite island occurs.
The conventional method for pushing the ultra-smooth sliding block is to push the ultra-smooth island by adopting a probe, wherein part of a loading mode of the probe is in contact with the side surface of the ultra-smooth sliding block through the probe, a lateral force is applied to push the sliding block, and the ultra-smooth island is pushed from the side surface of the ultra-smooth sliding block.
Chinese patent application publication No. CN111717881A discloses a method for manufacturing an ultra-smooth slider, in which a platform is etched at the tip of a probe, and then the platform is used to contact the ultra-smooth slider, and the loading mode is changed to use the probe to contact the ultra-smooth slider from the top, and a positive pressure and a shearing force are applied to push the slider. However, when the ultra-smooth island is directly pushed from the top, and the ultra-smooth island is initially pushed, a large pressure needs to be applied to the ultra-smooth island due to the fact that the connection force among the layers needs to be overcome, the sliding block is easily damaged, the pushing success rate is low, a customized probe structure is needed, and the ultra-smooth island cannot be directly driven by a conventional probe.
In a word, in the existing method for manufacturing the ultra-smooth slider, the probe pushes the ultra-smooth island from the side surface or the top surface respectively, which may cause the damage of the slider or the rotation of the ultra-smooth island, and may cause the structural damage, so that the qualified ultra-smooth slider cannot be obtained, and the yield of the ultra-smooth slider in batch production is reduced, and therefore, a simple method for manufacturing the ultra-smooth slider capable of solving the instability problem is required.
Disclosure of Invention
The invention aims to provide a preparation method of an ultra-smooth sliding block, and the preparation method is used for solving the technical problem that the yield of the ultra-smooth sliding block produced in the prior art is low.
In order to achieve the purpose, the invention adopts the technical scheme that: the preparation method of the ultra-smooth sliding block comprises the following steps:
step 1, pushing a super-slip island from the side edge of the super-slip island to separate the super-slip island into a first part and a second part, wherein the first part and the second part are not completely separated;
and 3, continuously pushing the ultra-smooth island from the top of the ultra-smooth island to completely separate the first part from the second part, wherein the separated first part or second part is an ultra-smooth slider.
Further, in the step 1, the ultra-smooth island is pushed from 1/3 to 2/3 in the length direction and from 1/4 to 4/5 in the height direction of the side face of the ultra-smooth island.
Further, in the step 1, the thrust force applied toward the super islands ranges from 5 to 50 μ N.
Further, after the step 1, the push-out distance of the first part is 1/10 to 1/2 of the side length of the ultra-smooth island.
Further, in the step 2, if the first part and the second part are not automatically returned, the ultra-smooth island is replaced and the steps 1 and 2 are repeated.
Further, in the step 3, the ultra-smooth island is pushed from 1/2 in the length direction of the top surface of the ultra-smooth island to 1/4 to 3/4 in the width direction.
Further, in the step 3, the thrust force applied toward the super islands ranges from 30 to 300 μ N.
Further, a heating step is also arranged before the step 1, and the ultra-smooth island is placed in a nitrogen atmosphere for heating and is gradually cooled to room temperature.
Further, the heating temperature of the ultra-smooth island is 100-300 ℃, and the heating time is more than 5 minutes.
Further, in step 1 and step 3, a probe is used to push the ultra-smooth island, preferably, the probe is a tungsten probe.
The preparation method of the ultra-smooth slider provided by the invention has the beneficial effects that: compared with the prior art, the method for pushing the ultra-smooth island on the side and the method for pushing the ultra-smooth island on the top are combined, so that the problems of ultra-smooth island rotation and ultra-smooth island damage caused by pushing the ultra-smooth island in a single direction are solved, and the success rate of ultra-smooth slider preparation is greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a side-pushing step of a method for manufacturing an ultra-smooth slider according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a pushing step of the method for manufacturing the ultra-smooth slider according to the embodiment of the present invention.
Description of reference numerals:
1. an ultra-smooth island; 11. a first portion; 12. a second portion; 2. a substrate; 3. and (3) a probe.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1 and fig. 2, a method for manufacturing the ultra-smooth slider according to the present invention will now be described. The preparation method of the ultra-smooth slider comprises the following steps:
and S1, heating the ultra-smooth island 1 to be processed in a nitrogen atmosphere at the temperature of 100-300 ℃ for more than five minutes. Preferably, the heating range of the ultra-smooth island 1 is 150 ℃, and the heating time is 10 minutes;
and S2, continuously placing the heated ultra-sliding island 1 in a nitrogen atmosphere for natural cooling until the temperature is cooled to room temperature, transferring the ultra-sliding island 1 to a sample table of a transfer device with a probe 3 on a substrate 2, and performing subsequent processing and transfer through the probe 3.
Before the ultra-sliding island 1 is dissociated, the ultra-sliding island 1 is heated, organic pollution and a liquid film which are generated on the surface of the ultra-sliding island 1 due to long-term placement in an atmospheric atmosphere can be removed by heating in a nitrogen atmosphere, and damage to an ultra-sliding surface caused by the organic pollutants and the liquid film can be avoided.
And S3, placing the probe 3 at the side of the ultra-sliding island 1, wherein the transverse position of the tip of the probe 3 is 1/3 to 2/3 of the length direction of the side, the longitudinal position of the tip is 1/4 to 4/5 of the height direction of the side, and the tip applies a pushing force towards the direction vertical to the side, so that the ultra-sliding island 1 can be pushed towards the direction vertical to the side, and the pushing force ranges from 5 to 50 mu N.
Due to the effect of the release surface, the ultra-sliding island 1 can be separated into the first part 11 and the second part 12 along a certain interlayer release surface, and the pushing length of the probe 3 is controlled, so that the first part 11 and the second part 12 are staggered and not completely separated, the pushing distance of the first part 11 after lateral pushing is generally 1/10-1/2 with any side length of the ultra-sliding island 1, namely at least half of the areas of the first part 11 and the second part 12 are overlapped, the ultra-sliding island 1 can be primarily separated at the moment, and the pushing length of the ultra-sliding island 1 is smaller because the pushing force is smaller, the ultra-sliding island 1 cannot rotate at the moment, the phenomenon that the rotation causes locking is avoided, and the phenomenon that the ultra-sliding island 1 is damaged cannot occur.
Preferably, in the side pushing step, the probe 3 is used to push from either side of the ultra-sliding island 1, the position of the tip is located at the central point of the side, namely at 1/2 in the length direction of the side of the ultra-sliding island 1, 1/2 in the height direction, the force applied at the central point is 15 μ N, and the push-out distance of the first part 11 is 1/4 of the ultra-sliding island 1, namely 3/4 in the width direction of the first part 11 is still coincident with the second part 12.
S4, after lateral pushing, making the pushing distance of the first part 11 generally equal to 1/10 to 1/2 of any side length of the ultra-smooth island 1, i.e. when at least half of the areas of the first part 11 and the second part 12 are still coincident, removing the lateral pushing force, and if the ultra-smooth island 1 has an ultra-smooth release surface, the ultra-smooth island 1 will recover to the state before pushing due to self-recovery effect, but when the first part 11 and the second part 12 are completely released, only a certain pushing force needs to be applied, and can be separated again.
If the ultra-smooth island 1 does not have the ultra-smooth release surface, that is, the ultra-smooth island 1 has the ultra-smooth characteristic, the ultra-smooth island 1 does not have the self-recovery effect at this time, that is, the first part 11 and the second part 12 do not return automatically, and at this time, the pushing step is not required to be carried out continuously, the ultra-smooth island 1 without the ultra-smooth release surface is directly abandoned, and one ultra-smooth island 1 is replaced for re-processing.
And S5, placing the probe 3 on the top of the ultra-sliding island 1, wherein the transverse position of the tip of the probe 3 is 1/2 of the length direction of the top surface, the longitudinal position of the tip is 1/4-3/4 of the width direction of the top surface, and the tip obliquely applies a thrust force towards the direction vertical to the top surface, so that the ultra-sliding island 1 can continuously move along the direction vertical to the side edge until the first part 11 and the second part 12 are completely separated, and the thrust force at the moment ranges from 30 to 300 mu N. Of course, depending on the actual situation and the specific requirements, the ultra-sliding island 1 can also be pushed to move in any direction so that the first part 11 and the second part 12 are completely separated, which is not limited herein.
At this time, the first part 11 and the second part 12 are already separated by the side pushing, at this time, the separation of the first part 11 and the second part 12 is continuously completed by adopting a pushing mode, the pushing force is applied from the top to the bottom, at this time, the pushing force at the top can enhance the contact force between the first part 11 and the second part 12, the phenomenon that the first part 11 rotates in the process of continuous pushing can be effectively avoided, and because the separation between the first part 11 and the second part 12 is already completed, the continuous separation of the first part 11 and the second part 12 can be realized without a large pushing force, and the damage to the surface of the ultra-smooth island 1 can be avoided.
Preferably, in the pushing step, the probe 3 is used to push from the top of the ultra-smooth island 1, and the top surface of the ultra-smooth island 1 may have an island cover or may not have an island cover, which is not limited herein. The position of the needle tip is located at the central point of the top surface, namely 1/2 in the length direction and 1/2 in the width direction of the top surface of the ultra-sliding island 1, and the force applied at the central point is 60 μ N.
S6, transferring the first part 11 or the second part 12 pushed out after the process onto the target substrate 2.
The method for pushing the ultra-smooth island 1 laterally and the method for pushing the ultra-smooth island 1 at the top are combined, so that the problems of buckling instability of the sliding block, rotation of the ultra-smooth island 1 and damage of the ultra-smooth island 1 caused by pushing the ultra-smooth island 1 in a single direction are solved, and the success rate of ultra-smooth sliding block preparation is greatly improved.
In the above processing steps, not only the probe 3 but also other transfer heads may be used as the pushing and transferring tool. Preferably, the probe 3 is a tungsten probe 3, and the diameter of the tungsten probe 3 is preferably 0.1 to 1mm, and the radius of curvature of the tip is preferably 1 to 10 μm.
Preferably, the size and shape of the ultra-smooth island 1 in the processing step are generally defined by regular shape of the ultra-smooth island 1, such as triangle, quadrangle or pentagon. Of course, according to actual conditions and specific requirements, the shape of the ultra-smooth island 1 can also be circular, and the above size is defined for the diameter of the ultra-smooth island 1; the shape of the ultra-smooth island 1 is other special shapes, the optimal pushing position is the geometric center of the front surface or the side surface of the ultra-smooth island 1, the longest distance during side pushing is that at least a general area is not separated, and the position is not limited specifically.
The ultra-smooth island 1 is a starting material for manufacturing an ultra-smooth sheet without dissociation, and is generally made of a multi-layer sheet material, for example, materials such as highly oriented pyrolytic graphite (HOPG graphite) and graphene, the ultra-smooth slider is a slider with an ultra-smooth surface formed after the ultra-smooth island 1 is dissociated, the first part 11 of the ultra-smooth island 1 is an ultra-smooth slider, and the second part 12 is an ultra-smooth substrate 2.
As an alternative to the above embodiments, the ultra-smooth island 1 may be heated, the ultra-smooth island 1 may be dissociated directly, or the ultra-smooth island 1 may be heated directly to raise the ambient temperature, or the ultra-smooth island 1 may be heated in a specific liquid environment, which is not limited herein.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. The preparation method of the ultra-smooth sliding block is characterized by comprising the following steps:
step 1, pushing a super-slip island from the side edge of the super-slip island to separate the super-slip island into a first part and a second part, wherein the first part and the second part are not completely separated;
step 2, after the thrust of the side edge withdraws, the first part and the second part return automatically;
and 3, continuously pushing the ultra-smooth island from the top of the ultra-smooth island to completely separate the first part from the second part, wherein the separated first part or second part is an ultra-smooth slider.
2. The method of manufacturing an ultra-smooth slider as set forth in claim 1, wherein: in the step 1, the ultra-smooth island is pushed from 1/3 to 2/3 in the length direction of the side surface of the ultra-smooth island and from 1/4 to 4/5 in the height direction of the side surface of the ultra-smooth island.
3. The method of manufacturing an ultra-smooth slider as set forth in claim 1, wherein: in the step 1, the thrust force applied toward the super-islands ranges from 5 to 50 μ N.
4. The method of manufacturing an ultra-smooth slider as set forth in claim 1, wherein: after step 1, the first portion is pushed out by a distance 1/10 to 1/2 of the side length of the ultra-smooth island.
5. The method of manufacturing an ultra-smooth slider as set forth in claim 1, wherein: in the step 2, if the first part and the second part are not automatically returned, the ultra-smooth island is replaced and the steps 1 and 2 are repeated.
6. The method of manufacturing an ultra-smooth slider as set forth in claim 1, wherein: in step 3, the ultra-smooth island is pushed from the position 1/2 in the length direction of the top surface of the ultra-smooth island and from the position 1/4 to 3/4 in the width direction of the top surface of the ultra-smooth island.
7. The method of manufacturing an ultra-smooth slider as set forth in claim 1, wherein: in the step 3, the thrust force applied toward the super-islands ranges from 30 to 300 μ N.
8. The method of manufacturing an ultra-smooth slider according to any of claims 1 to 7, wherein: a heating step is also arranged before the step 1, and the ultra-smooth island is placed in a nitrogen atmosphere to be heated and is gradually cooled to room temperature.
9. The method of manufacturing an ultra-smooth slider as set forth in claim 8, wherein: the heating temperature of the ultra-smooth island is 100-300 ℃, and the heating time is more than 5 minutes.
10. The method of manufacturing an ultra-smooth slider according to any of claims 1 to 7, wherein: in step 1 and step 3, a probe is used to push the ultra-smooth island, preferably, the probe is a tungsten probe.
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Cited By (1)
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