CN112654735A - 燃料喷射器用球和阀座及其涂敷方法 - Google Patents
燃料喷射器用球和阀座及其涂敷方法 Download PDFInfo
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Abstract
本发明涉及如下的燃料喷射装置用球和阀座及其涂敷方法,即,为了减少摩擦系数,而将具有低摩擦特性的Ta‑C:H‑SiO功能层作为最***层形成,用于将Ta‑C:H‑SiO功能层在母材接合并加以支撑的接合层及支撑层适用Mo类材料来提高耐热性,为了形成接合层及支撑层,仅蒸镀纯粹的粒子状态的Mo粒子来提高紧贴力及粘结力并提高耐久性。
Description
技术领域
本发明涉及燃料喷射器用球和阀座及其涂敷方法,更具体地,涉及层叠用于减少摩擦阻力、增加涂敷硬度及耐久寿命的涂敷材料的球和阀座的涂敷结构及其涂敷方法。
背景技术
汽车的燃料喷射器为根据引擎的行程在适当时期向引擎供给燃料的核心部件中的一个。
与此相关,在燃料喷射器的部件中,尤其,作为滑动部件,球和阀座逐渐小型化,但是面临更高的反复负荷及应力,因此,发生因热冲击和磨损等而导致寿命急剧下降的现象。
作为用于改善这种滑动部件的耐磨损性的方案,在韩国公开专利公报第10-2014-0038084号中揭示了如下的内容,即,在滑动部件的母材形成Cr或Ti接合层,在上述接合层的表面形成CrN或WC支撑层,在上述支撑层的表面形成SiO-DLC功能层,从而改善滑动部件的耐磨损性及耐热性的涂敷材料。
但是,根据上述文献中所揭示的结构,SiO-DLC功能层可设置于最***层来改善耐摩擦性能,但是,Cr、Ti或W类的材料无法充分确保耐热性能及层间接合力,因此,如球及阀座等,在高温环境及高振动性环境中不适合。
另一方面,在日本公开专利公报第1994-25826号中揭示了如下的内容,即,作为涂敷材料,代替Cr、Ti或W类的材料,适用Mo类材料的滑动部件。
在上述文献中揭示了如下的内容,即,与Mo类材料的蒸镀方法相关,将利用高能束来蒸发的Mo离子蒸镀在母材来形成Mo皮膜的离子镀方式的物理蒸镀法。
只是,在对应文献中揭示的蒸镀方法的情况下,将会发生通过高能束,从Mo靶蒸发的Mo离子粒子之外的直径相对大的非离子状态的粒子一同蒸镀在母材的现象,从而发生所蒸镀的多个粒子的不均一性,由此,发生涂敷皮膜的粗糙度恶化及对于母材的接合力恶化现象,由此,整个涂敷皮膜的耐久性有可能显著降低。
发明内容
技术问题
本发明为了解决上述现有技术的问题而提出,本发明的目的在于,提供如下的燃料喷射装置用球和阀座及其涂敷方法,即,为了减少摩擦系数,在最***层形成具有低摩擦特性的Ta-C:H-SiO功能层,在母材接合Ta-C:H-SiO功能层并加以支撑的接合层及支撑层通过适用Mo类材料来提高耐热性,为了形成接合层及支撑层而仅蒸镀纯粹离子状态的Mo粒子来提高紧贴力及接合力并提高耐久性。
技术方案
为了实现上述目的,本发明为在母材的表面层叠多层结构的涂敷材料的燃料喷射器用球和阀座,其特征在于,上述涂敷材料包括:Mo接合层,在上述母材的表面层叠;MoN支撑层,在上述Mo接合层的外侧面层叠;以及Ta-C:H-SiO功能层,在上述MoN支撑层的外侧面层叠,上述Mo接合层及上述MoN支撑层通过物理蒸镀法层叠,上述Ta-C:H-SiO功能层通过化学蒸镀法层叠。
并且,上述Mo接合层由在真空环境下向Mo靶照射激光来引发电弧而蒸发的Mo离子在上述母材蒸镀而成。
并且,在上述Mo接合层的层叠完成的状态下,上述MoN支撑层通过在上述Mo接合层的外侧面蒸镀由通过照射上述激光来从上述Mo靶分离的上述Mo离子和从作为活性气体注入的N2气体分离的N离子发生反应而形成的MoN粒子而成。
并且,通过向上述Mo靶照射上述激光来生成除上述Mo离子之外的非离子状态的粒子,上述非离子状态的粒子通过电磁过滤器捕集,由此防止上述非离子状态的粒子向上述母材或上述Mo接合层层叠。
并且,上述化学蒸镀法包括利用碳化气体及六甲基二硅氧烷(HexamethylDisiloxane,HMDSO)气体的等离子体辅助化学气相沉积法。
并且,在上述Mo接合层层叠之前,等离子状态的Ar离子与上述母材的表面发生碰撞来对上述母材的表面进行清洗。
另一方面,本发明为在燃料喷射器用球和阀座的母材的表面层叠多层结构的涂敷材料的涂敷方法,其特征在于,包括:Mo接合层形成步骤,在上述母材的外周面,Mo接合层通过物理蒸镀法层叠;MoN支撑层形成步骤,在上述Mo接合层的外侧面,MoN支撑层通过物理蒸镀法层叠;以及Ta-C:H-SiO功能层形成步骤,在上述MoN支撑层的外侧面,Ta-C:H-SiO功能层通过化学蒸镀法层叠。
并且,上述Mo接合层形成步骤包括:Mo离子生成步骤,生成在真空环境下通过向Mo靶照射激光来引发电弧而蒸发的Mo离子;Mo离子移动步骤,使上述Mo离子向上述母材的表面移动;以及Mo离子蒸镀步骤,在上述母材的表面蒸镀所移动的上述Mo离子。
并且,上述MoN支撑层形成步骤包括:MoN粒子形成步骤,在完成上述Mo接合层的层叠的状态下,通过照射上述激光来从上述Mo靶分离的Mo离子与从作为活性气体注入的N2气体分离的N离子发生反应而形成MoN粒子;以及MoN粒子蒸镀步骤,在上述Mo接合层的外侧面蒸镀上述MoN粒子。
并且,在上述Mo离子生成步骤中,除上述Mo离子之外,生成非离子状态的粒子,上述非离子状态的粒子通过电磁过滤器捕集,由此防止上述非离子状态的粒子向上述母材或上述Mo接合层层叠。
并且,上述化学蒸镀法包括利用碳化气体及六甲基二硅氧烷HMDSO气体的等离子体辅助化学气相沉积法PACV。
并且,本发明还包括:真空形成步骤,在上述球及上述阀座配置于反应腔室的内部的状态下,以真空状态维持上述反应腔室的内部环境;等离子形成步骤,向上述反应腔室的内部注入Ar气体,通过提高上述反应腔室的温度来形成用于生成Ar离子的等离子状态;以及清洗步骤,使上述Ar离子与上述球及上述阀座的母材的表面发生碰撞来对上述母材的表面进行清洗。
发明的效果
本发明的燃料喷射装置用球和阀座及其涂敷方法具有如下的效果,即,为了减少摩擦系数,在最***层形成具有低摩擦特性的Ta-C:H-SiO功能层,在母材接合Ta-C:H-SiO功能层并加以支撑的接合层及支撑层通过适用Mo类材料来提高耐热性,为了形成接合层及支撑层而仅蒸镀纯粹离子状态的Mo粒子来提高紧贴力及接合力并提高耐久性。
附图说明
图1为设置有本发明的球及阀座的燃料喷射器的部分放大图。
图2为示出层叠根据本发明的一实施例蒸镀的涂敷材料的球和阀座的剖面的简图。
图3为根据本发明的一实施例蒸镀的涂敷材料的扫描电子显微镜(SEM,scanningelectron microscope)照片。
图4为用于形成本发明的涂敷材料的涂敷装置的简图。
图5为用于说明本发明的一实施例的涂敷方法的流程图。
具体实施方式
以下,参照附图,详细说明本发明的燃料喷射装置用球和阀座及其涂敷方法的结构。
本发明可具有多种变更,并可具有多种实施例,在附图中例示特定实施例并对其进行详细说明。这并非将本发明限定在特定实施方式,而是包括本发明的思想及技术范围中的所有变更、等同技术方案或代替技术方案。
在说明本发明的过程中,第一、第二等的术语可用于说明多种结构要素,上述结构要素并不局限于上述术语。上述术语仅用于区分两种结构要素。例如,在不超出本发明的发明要求保护范围的情况下,第一结构要素可被命名为第二结构要素,类似地,第二结构要素可被命名为第一结构要素。
和/或术语可包括多个相关记载的项目的组合或多个相关记载的项目中的一个项目。
在一个机构要素与其他结构要素“连接”或“联接”的情况下,可以与其他结构要素直接连接或联接,也可以在中间存在其他结构要素。相反,当提及到一个结构要素与其他结构要素“直接连接”或“直接联接”时,在中间不存在其他结构要素。
在本发明中所使用的术语仅用于说明特定实施例,而并非用于限定本发明。只要在文脉上并未明确表示,单数的表现可包括复数的表现。
在本发明中,“包括”或“具有”等的术语用于指定在说明书上记载的特征、数字、步骤、动作、结构要素、部件或这些组合的存在,而并非意味着预先排除一个或一个以上的其他特征、数字、步骤、动作、结构要素、部件或这些组合的存在或附加可能性。
只要并未明确定义,包括技术或科学术语在内的在此使用的所有术语的含义与本发明所属技术领域的普通技术人员通常理解的含义相同。通常使用的词典定义的术语可以与相关技术的文脉所具有的含义相同,只要在本发明中并未明确定义,不能被解释成异常或过于形式的含义。
同时,以下的实施例为了向本发明所属技术领域的普通技术人员更加完整地说明本发明而提供,附图中的要素的形状及大小等为了更加明确的说明而可以被放大。
图1为适用本发明的球及阀座的燃料喷射器的部分放大图。
参照图1,燃料喷射器包括:外罩,在内部收容针;阀座C,形成于外罩的下端;以及球A,配置于阀座C与针B之间。阀座C具有安装球A的阀座面,在阀座C设置沿着燃料喷射方向贯通的喷嘴。
针B通过未图示的电磁线圈及复位弹簧作用使球A向上下方向移动并开闭形成于阀座C的喷嘴。
图1示出具有球形形状的球A,本发明并不局限于此,此外,可不限制地使用具有多种形状的阀体,这些均属于本发明的范围。为了便利,以下,以具有球体形状的球A的实施例为基准进行说明。
燃料喷射器,尤其,直接喷射方式的燃料喷射器直接向气缸的内部喷射燃料,因此,球A和阀座C处于高温、高压状态,因氧化碳、Soot等的燃烧副产物而导致喷嘴堵塞等现象发生的可能性高。
如上所述,球A及阀座C处于高温及高压状态,因燃烧副产物而发生很大的摩擦阻力,从而有可能被轻易破损,因此,如图2所示,本发明可通过在球A及阀座C的母材10层叠多层结构的涂敷材料来减少摩擦阻力,增加耐久性,并增加耐热性。
参照图2及图3,本发明一实施例的涂敷材料包括:Mo接合层20,在球和阀座的母材10的表面层叠;MoN支撑层30,在Mo接合层20的外侧面层叠;以及Ta-C:H-SiO功能层40,在MoN支撑层30的外侧面层叠。
在此情况下,Mo接合层20及MoN支撑层30通过物理蒸镀法,优选地,通过滤波激光电弧沉积(FLAD,Filtered Laser Arc Deposition)法层叠,Ta-C:H-SiO功能层40通过利用碳化气体及六甲基二硅氧烷(Hexamethyl Disiloxane,HMDSO)气体的等离子体辅助化学气相沉积(PACVD,Plasma-Assisted Chemical Vapor Deposition)法层叠。
层叠这些Mo接合层20、MoN支撑层30及Ta-C:H-SiO功能层40的详细步骤将参照图4及图5后述。
Mo接合层20可执行用于使球及阀座的母材10与MoN支撑层30接合的功能,厚度范围可以为0.01至0.5μm,优选地,0.05μm,但并不局限于此。
在Mo接合层20的厚度小于0.01μm的情况下,接合力有可能会降低,从而导致耐久性降低的问题,在大于0.5μm的情况下,有可能发生涂敷时间需要消耗5小时以上的问题,随着在涂敷材料内发生因厚膜而导致的硬度平衡损失的问题,有可能发生耐久性降低的问题。
MoN支撑层30支撑Mo接合层20和Ta-C:H-SiO功能层40,厚度范围可以为0.1至5μm,优选地,0.2μm,但并不局限于此。
在MoN支撑层30的厚度小于0.1μm的情况下,因支撑层的厚度不足,层间硬度平衡将会损失,因层间硬度平衡的损失而发生耐久性降低的问题、局部厚度损失问题以及磨损痕迹(磨损起点作用)。并且,在MoN支撑层30的厚度大于5μm的情况下,有可能发生涂敷时间增加的问题(需要5小时以上)、对Ta-C:H-SiO涂敷产生恶劣影响而形成锥状(columnar)结构(易脆的组织),从而层内残留应力将会增加。
Ta-C:H-SiO(SiO composed tetrahedral hydrogenated amorphous carbon)功能层40与本发明的涂敷材料的最***层对应,起到具有低摩擦、耐磨损及耐热性的功能性层的作用。
Ta-C:H-SiO功能层40的厚度为0.1至10μm,优选地,0.8μm,但并不局限于此。
在Ta-C:H-SiO功能层40的厚度小于0.1μm的情况下,由于因功能层的厚度不足而导致的磨损增加及摩擦系数的增加,将会发生耐久性降低的问题,在大于10μm的情况下,有可能发生涂敷时间的增加(需要5小时以上)、成本上升的问题及层内残留应力增加的问题。
另一方面,以100重量百分比为基准,本发明的Ta-C:H-SiO功能层40具有50~85重量百分比的碳C、1~4重量百分比的氢H、1~25重量百分比的硅Si及1~25重量百分比的氧O的成分比。
这是因为,若碳C具有小于50重量百分比的含量,则Ta-C:H-SiO功能层40的硬度及润滑性不充分,若具有大于85重量百分比的含量,则Ta-C:H-SiO功能层40的硬度过强而具有脆性,且有可能发生耐热性及耐烧灼性不充分的问题。
并且,若氢H的含量小于1重量百分比,则Ta-C:H-SiO功能层40的摩擦系数有可能会增加,且耐磨损性不充分,若含量大于40重量百分比,则有可能发生Ta-C:H-SiO功能层40的润滑性、耐热性及耐烧灼性不充分的问题。
并且,若硅Si的含量小于1重量百分比,则Ta-C:H-SiO功能层40的摩擦系数有可能会增加,耐热性及耐湿性不充分,若含量大于25重量百分比,则有可能Ta-C:H-SiO功能层40的硬度及润滑性不充分。
并且,若氧O的含量小于1重量百分比,则Ta-C:H-SiO功能层40的耐烧灼性有可能不充分,且对透明性(美观)产生恶劣影响,对于裂痕的阻抗性不充分,若含量大于25重量百分比,则有可能Ta-C:H-SiO功能层40的硬度及润滑性不充分。
在本发明中,如上所述,接合层及支撑层适用Mo材料,作为最***层的功能层适用Ta-C:H-SiO,如上所述,与适用Cr、Ti或W类材料的情况相比,作为燃料喷射器用球及阀座的涂敷材料,可同时确保充分的耐热性能、耐磨损性能及耐久性能。
以下,参照图4及图5,说明本发明的燃料喷射装置用球和阀座的涂敷方法及涂敷装置。
首先,可利用图4所示的涂敷装置在本发明的汽车用球及阀座的母材10形成涂敷材料。
参照图4,所示的涂敷装置包括:反应腔室100;Mo靶T,固定于反应腔室100的内部;气体注入口110,用于向反应腔室100的内部注入工序气体;气体排出口120,用于排出剩余工序气体;偏执电极200;激光发生装置300,用于向Mo靶T照射激光;转盘400,用于支撑球及阀座的母材10;电磁过滤器500,用于捕集从Mo靶T分离的非离子状态的粒子。
反应腔室100起到通过分离内部空间与外部空间来在内部形成规定的涂敷条件(温度及压力)。
偏执电极200由一对构成,如下所述,为了对母材10的表面进行清洗而形成规定的偏执电压差,以可使Ar离子进行加速来与母材的表面进行碰撞。偏执电极200与未图示的偏执电源相连接,如下所述,一对偏执电极200之间的偏执电压维持200V至400V的范围。
激光发生装置300向Mo靶T照射激光来引发电弧,通过使Mo靶T的表面蒸发来从Mo靶T生成气体状态的Mo离子。
即,如下所述,在本发明中,为了通过物理蒸镀法,优选地,通过激光电弧蒸镀法蒸镀Mo离子及MoN粒子而利用激光发生装置。
激光发生装置300只要具有可从Mo靶T生成气体状态的Mo离子的功率,则本发明可以无限制地适用。
另一方面,电磁过滤器500通过激光发生装置300捕集从Mo靶T分离的Mo离子和非离子状态的Mo粒子,除上述激光电弧蒸镀法(Laser Arc Deposition)之外,用于实现添加电磁过滤的滤波激光电弧沉积。
即,若通过激光发生装置300向Mo靶T照射激光来发生电弧,则除所蒸发的气体桩体的Mo离子之外,形成直径相对大且直径不均匀的多个非离子状态的Mo粒子。
在这种非离子状态的Mo粒子与Mo离子一同蒸镀在母材10的情况下,将会发生蒸镀表面的不均匀性,从而有可能发生蒸镀层的表面粗糙度将会恶化,蒸镀层的粘结力也将会降低的问题。
因此,在本发明中,为了仅使从Mo靶T分离的纯粹状态的Mo离子蒸镀在母材,通过非离子状态的Mo粒子被电磁过滤器500捕集的滤波激光电弧沉积蒸镀法形成Mo接合层及MoN支撑层。
如图所示,电磁过滤器500配置于Mo靶T与转盘400之间的Mo离子的移动路径上。
另一方面,虽然未图示,在反应腔室100的内部,与转盘400相邻设置恒温装置,由此,可将反应腔室100的内部温度上升至最大600℃。
以下,参照图5,按步骤说明本发明的燃料喷射装置用球和阀座的涂敷方法。
首先,在反应腔室200的内部的转盘400配置球及阀座的母材10,将反应腔室200的内部环境形成为真空状态并维持真空状态(步骤S1)。
接着,作为工序气体300,通过气体注入口110供给Ar气体,利用恒温装置来提高温度来形成在反应腔室200的内部形成Ar离子的等离子装填(步骤S2)。
优选地,利用恒温装置来将反应腔室100的内部维持80℃的状态。
之后,进行如下的清洗步骤S3,即,向偏执电极200施加偏执电压,以使Ar离子与球及阀座的母材的表面发生碰撞的方式进行加速来对球及阀座的母材表面进行清洗。
上述清洗步骤S3为了如下目的而执行,即,优选执行用于去除在球及阀座的母材表面自然形成的氧化层及不纯物的蚀刻过程,提高涂敷材料与母材之间的粘结力。
并且,在此情况下,优选地,偏执电压维持在200V至400V的范围。若偏执电压小于200V,则Ar离子的加速电压将会降低,从而涂敷材料的硬度将会降低,若偏执电压大于400V,则格子排列变得不规则,从而有可能发生紧贴性降低的问题。
通过Ar离子对球及阀座的母材进行清洗之后,进行通过物理蒸镀法,优选地,通过上述滤波激光电弧沉积蒸镀法在母材的表面层叠Mo离子来形成Mo接合层的Mo接合层形成步骤S3。
更详细地,上述Mo接合层形成步骤S3可区分为如下步骤,即,Mo离子生成步骤S41,在反应腔室100形成的真空环境条件下,向Mo靶照射激光来引发电弧而蒸发的Mo离子;Mo离子移动步骤S42,使所生成的Mo离子向配置于转盘400的母材的表面移动;以及Mo离子蒸镀步骤S43,在母材的表面蒸镀所移动的Mo离子。
接着,进行在Mo接合层形成步骤S3中形成的Mo接合层的外侧面,通过物理蒸镀法,优选地,通过激光电弧蒸镀法层叠MoN支撑层的MoN支撑层形成步骤S5。
更详细地,MoN支撑层形成步骤S5可区分为如下步骤,即,MoN粒子形成步骤S51,在完成Mo接合层20的层叠的情况下,使通过激光照射从Mo靶分离的Mo离子与从通过气体注入口110作为活性气体注入的N2气体分离的N离子进行反应来形成MoN粒子;以及MoN粒子蒸镀步骤S52,在Mo接合层20的外侧面蒸镀所形成的MoN粒子。
在此情况下,如上所述,在Mo离子生成步骤S41中生成的非离子状态的粒子通过电磁过滤器500捕集,从而防止非离子状态的粒子向母材或Mo接合层层叠。
接着,进行在MoN支撑层30的外侧面,通过化学蒸镀法,优选地,等离子体辅助化学气相沉积法层叠Ta-C:H-SiO功能层40的Ta-C:H-SiO功能层形成步骤S6。
具体地,Ta-C:H-SiO功能层40通过气体注入口110向反应腔室100的内部注入作为工序气体的碳化气体(CXHY)及六甲基二硅氧烷气体(Hexamethyl Disiloxane)来形成,由此,最终,形成本发明的涂敷材料。
在Ta-C:H-SiO功能层40中,利用碳成分的气体,在真空状态下发生等离子来在表面蒸镀涂膜,在表面形成于钻石类似结构的碳膜,在本发明中,为了形成Ta-C:H-SiO功能层40,通过向反应腔室100的内部注入碳化气体并同时注入六甲基二硅氧烷气体的方式形成Ta-C:H-SiO功能层40。
在此情况下,例如,碳化气体为甲烷(CH4)气体及乙烷气体(C2H6),但本发明并不局限于此。
以下,说明对于适用本发明的涂敷方法来制作的实施例和根据现有技术制作的比较例的耐久性评价比较及物性评价比较结果。
实施例
在反应腔室100的内部为真空的状态下,利用Ar气体来形成等离子状态,将反应腔室100的内部加热至80℃来将由SUS440C不锈钢材质形成的母材10的表面活性化之后,以使Ar离子与母材10的表面发生碰撞的方式施加300V的偏执电压来对母材表面进行清洗。
之后,将通过滤波激光电弧沉积蒸镀法蒸发的Mo离子,在母材的表面以0.05μm的厚度层叠Mo接合层。
而且,向反应腔室100的内部注入作为工序气体的N2来使其与从Mo靶蒸发的Mo离子发生反应,从而以0.2μm的厚度涂敷MoN支撑层20(非离子状态的Mo粒子通过电磁过滤器捕集)。
之后,向反应腔室的内部注入碳化气体及六甲基二硅氧烷气体来以0.8μm的厚度层叠Ta-C:H-SiO功能层40。
比较例1
与本发明的实施例不同,其特征在于,不在球及阀座的母材形成涂敷材料。与实施例相同,上述球及阀座的母材由SUS440C不锈钢形成。
比较例2
如实施例,在相同球及阀座的SUS440C不锈钢母材形成具有相同厚度的涂敷材料,代替Mo,利用Cr在球及阀座的母材的表面形成Cr接合层,在上述Cr接合层的外周面形成CrN支撑层,之后,通过向反应腔室100的内部注入碳化气体并同时注入六甲基二硅氧烷气体的方式在CrN支撑层的表面形成SiO-DLC功能层。
比较例3
与本发明的实施例相同,在球及阀座的SUS440C不锈钢母材层叠包括Mo接合层及MoN支撑层的涂敷材料,与本发明的实施例不同,Mo接合层及MoN支撑层通过以往的一般物理蒸镀法(PVD)蒸镀(未适用额外的电磁过滤器),作为最***层形成SiO-DLC层。
耐久性能评价试验
为了进行耐久性能评价而进行了干燥空气工作耐久试验(Dry-run test)。对应耐久试验为用于在短期内评价各个涂敷材料的耐久性的实验,以实施例、比较例1至比较例3为对象,通过以下的试验条件相同地进行。
试验气体为空气或氮,空气压力为5bar,试验温度在常温条件下进行,驱动阶段利用(PHID,Peak&Hold,1.2A&0.6A电流控制方式),供给电压为14.0V,脉冲间隔(period)为5.0ms,脉宽(width)为2.5ms,工作时间为30分钟以上。
作为判定基准,通过肉眼确认是否存在如涂敷材料表面的剥离等的损伤并评价了涂敷厚度。
涂敷厚度测定了产品的0°、180°2处的平均值和上述2处涂敷材料的厚度偏差。厚度利用卡洛特测试仪测定。
表1
根据上述表1,耐久性能试验结果,在适用本发明实施例的涂敷材料的球及阀座中,涂敷材料的厚度损失0%,尚未发现磨损痕迹。
相反,在比较例2的情况下,涂敷材料的厚度损失27%,发现多少磨损痕迹。
并且,在比较例3的情况下,涂敷材料的厚度损失19%,发现多少磨损痕迹。
结果,对球及阀座进行对于涂敷材料的耐久性能的测试的结果,与多个比较例相比,在本发明的实施例中,消耗了相对少的涂敷时间,不仅如此,涂敷材料的损失率极低,且具有极为优秀的耐久性能。
物性评价
为了评价涂敷材料的而进行了物性评价。
为了导出摩擦系数,利用10N、0.1m/s、2km及SUS440C pin来进行了Plate on disk试验。
为了测定硬度而利用了微型压头(0.05N,0.7μm压痕深度(indenting depth))
为了测定接合力而利用划痕测试仪和罗克韦尔C测试仪(HF1:高接合力,HF5:低接合力)。
表2
如上述表2所示,在本发明的实施例中,与多个比较例相比,硬度数值优秀,摩擦系数相对低,从而确认了摩擦阻力的减少。
并且,与其他实施例,尤其,与比较例3的紧贴力33N相比,本发明实施例的涂敷材料的紧贴力为38N更优秀,这是因为根据本发明的滤波激光电弧沉积蒸镀法蒸镀的实施例的表面粗糙度能够以极低的状态维持。
Claims (12)
1.一种燃料喷射器用球和阀座,在母材的表面层叠多层结构的涂敷材料,其特征在于,
上述涂敷材料包括:
Mo接合层,在上述母材的表面层叠;
MoN支撑层,在上述Mo接合层的外侧面层叠;以及
Ta-C:H-SiO功能层,在上述MoN支撑层的外侧面层叠,
上述Mo接合层及上述MoN支撑层通过物理蒸镀法层叠,上述Ta-C:H-SiO功能层通过化学蒸镀法层叠。
2.根据权利要求1所述的燃料喷射器用球和阀座,其特征在于,上述Mo接合层由在真空环境下向Mo靶照射激光来引发电弧而蒸发的Mo离子在上述母材蒸镀而成。
3.根据权利要求2所述的燃料喷射器用球和阀座,其特征在于,在上述Mo接合层的层叠完成的状态下,上述MoN支撑层通过在上述Mo接合层的外侧面蒸镀由通过照射上述激光来从上述Mo靶分离的上述Mo离子和从作为活性气体注入的N2气体分离的N离子发生反应而形成的MoN粒子而成。
4.根据权利要求3所述的燃料喷射器用球和阀座,其特征在于,
通过向上述Mo靶照射上述激光来生成除上述Mo离子之外的非离子状态的粒子,
上述非离子状态的粒子通过电磁过滤器捕集,由此防止上述非离子状态的粒子向上述母材或上述Mo接合层层叠。
5.根据权利要求1所述的燃料喷射器用球和阀座,其特征在于,上述化学蒸镀法包括利用碳化气体及六甲基二硅氧烷气体的等离子体辅助化学气相沉积法。
6.根据权利要求1所述的燃料喷射器用球和阀座,其特征在于,在上述Mo接合层层叠之前,等离子状态的Ar离子与上述母材的表面发生碰撞来对上述母材的表面进行清洗。
7.一种燃料喷射器用球和阀座的涂敷方法,在燃料喷射器用球和阀座的母材的表面层叠多层结构的涂敷材料,其特征在于,包括:
Mo接合层形成步骤,在上述母材的外周面,Mo接合层通过物理蒸镀法层叠;
MoN支撑层形成步骤,在上述Mo接合层的外侧面,MoN支撑层通过物理蒸镀法层叠;以及
Ta-C:H-SiO功能层形成步骤,在上述MoN支撑层的外侧面,Ta-C:H-SiO功能层通过化学蒸镀法层叠。
8.根据权利要求7所述的燃料喷射器用球和阀座的涂敷方法,其特征在于,上述Mo接合层形成步骤包括:
Mo离子生成步骤,生成在真空环境下通过向Mo靶照射激光来引发电弧而蒸发的Mo离子;
Mo离子移动步骤,使上述Mo离子向上述母材的表面移动;以及
Mo离子蒸镀步骤,在上述母材的表面蒸镀所移动的上述Mo离子。
9.根据权利要求8所述的燃料喷射器用球和阀座的涂敷方法,其特征在于,上述MoN支撑层形成步骤包括:
MoN粒子形成步骤,在完成上述Mo接合层的层叠的状态下,通过照射上述激光来从上述Mo靶分离的Mo离子与从作为活性气体注入的N2气体分离的N离子发生反应而形成MoN粒子;以及
MoN粒子蒸镀步骤,在上述Mo接合层的外侧面蒸镀上述MoN粒子。
10.根据权利要求9所述的燃料喷射器用球和阀座的涂敷方法,其特征在于,
在上述Mo离子生成步骤中,除上述Mo离子之外,生成非离子状态的粒子,上述非离子状态的粒子通过电磁过滤器捕集,由此防止上述非离子状态的粒子向上述母材或上述Mo接合层层叠。
11.根据权利要求7所述的燃料喷射器用球和阀座的涂敷方法,其特征在于,上述化学蒸镀法包括利用碳化气体及六甲基二硅氧烷气体的等离子体辅助化学气相沉积法。
12.根据权利要求7所述的燃料喷射器用球和阀座的涂敷方法,其特征在于,还包括:
真空形成步骤,在上述球及上述阀座配置于反应腔室的内部的状态下,以真空状态维持上述反应腔室的内部环境;
等离子形成步骤,向上述反应腔室的内部注入Ar气体,通过提高上述反应腔室的温度来形成用于生成Ar离子的等离子状态;以及
清洗步骤,使上述Ar离子与上述球及上述阀座的母材的表面发生碰撞来对上述母材的表面进行清洗。
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