CN112635538A - Display panel and manufacturing method thereof - Google Patents
Display panel and manufacturing method thereof Download PDFInfo
- Publication number
- CN112635538A CN112635538A CN202011599045.7A CN202011599045A CN112635538A CN 112635538 A CN112635538 A CN 112635538A CN 202011599045 A CN202011599045 A CN 202011599045A CN 112635538 A CN112635538 A CN 112635538A
- Authority
- CN
- China
- Prior art keywords
- layer
- fabry
- display panel
- pixel
- perot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000010410 layer Substances 0.000 claims description 364
- 229910052751 metal Inorganic materials 0.000 claims description 162
- 239000002184 metal Substances 0.000 claims description 162
- 239000000463 material Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 238000005538 encapsulation Methods 0.000 claims description 19
- 239000003086 colorant Substances 0.000 claims description 16
- 238000004806 packaging method and process Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- 239000012790 adhesive layer Substances 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052710 silicon Inorganic materials 0.000 abstract description 13
- 239000010703 silicon Substances 0.000 abstract description 13
- 230000008569 process Effects 0.000 description 17
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 239000011651 chromium Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000001914 filtration Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The embodiment of the invention discloses a display panel and a manufacturing method of the display panel. The display panel comprises a driving back plate, a pixel layer and a filter layer, wherein the pixel layer comprises a plurality of sub-pixels. The filter layer is arranged to comprise the Fabry-Perot resonant cavity structures which correspond to the sub-pixels in the thickness direction of the display panel one to one, and the lengths of the cavities of the Fabry-Perot resonant cavity structures are not completely the same, so that light emitted from the pixel layer passes through the Fabry-Perot resonant cavity structures with different cavity lengths and then is different in color, colorful display of the display panel is achieved through the Fabry-Perot resonant cavity based on the optical resonance principle, the silicon-based OLED micro-display can comprise the display panel provided by the embodiment, namely the technical scheme provided by the embodiment, and colorful display of the OLED silicon-based micro-display is achieved through the Fabry-Perot resonant cavity based on the optical resonance principle.
Description
Technical Field
The embodiment of the invention relates to the technical field of display, in particular to a display panel and a manufacturing method of the display panel.
Background
An Organic Light Emitting Diode (OLED) display has the advantages of active Light emission, fast response speed, low driving voltage, and the like, and the types of common OLED displays include monochrome display, multi-color display, and the like.
Most of silicon-based OLED micro-displays rely on a low-temperature optical filter process in the process of realizing multi-color display, however, the yellow light process is difficult to guarantee the condition of being lower than 100 ℃, and the optical filter has the problem of easy falling due to infirm curing. Therefore, a new technical solution for implementing a multi-color display of a silicon-based OLED micro-display is needed to avoid the above problems.
Disclosure of Invention
The embodiment of the invention provides a display panel and a manufacturing method of the display panel, so that colorful display of a silicon-based OLED micro-display is realized through a Fabry-Perot resonant cavity based on an optical resonance principle, and dependence on a low-temperature optical filter process in the colorful display process of the silicon-based OLED micro-display is avoided.
In a first aspect, an embodiment of the present invention provides a display panel, where the display panel includes: driving the back plate; the pixel layer is positioned on one side of the driving back plate and comprises a plurality of sub-pixels; the filter layer is positioned on one side, away from the driving backboard, of the pixel layer; the filter layer includes fabry-perot resonator structures corresponding to the sub-pixels in a one-to-one manner in a thickness direction of the display panel, wherein lengths of cavities of the fabry-perot resonator structures are not completely the same, and light emitted from the pixel layer passes through the fabry-perot resonator structures with different cavity lengths and then exits in different colors.
Optionally, the fabry-perot resonator structure includes a first metal layer, a dielectric layer, and a second metal layer stacked on one side of the pixel layer away from the driving backplane;
the first metal layer covers the pixel layer;
the dielectric layer comprises a plurality of dielectric units, the dielectric units correspond to the sub-pixels one by one, and the thickness of each dielectric unit is not completely the same along the thickness direction of the display panel;
the second metal layer comprises metal parts corresponding to the medium units one by one, wherein the vertical projection of the metal parts on the driving back plate is overlapped with the vertical projection of the corresponding medium units on the driving back plate;
a Fabry-Perot resonant cavity is formed between the first metal layer positioned at two sides of the medium unit and two opposite surfaces of the metal part; the cavity length of the Fabry-Perot resonant cavity is equal to the thickness of the dielectric unit.
Optionally, the display device further comprises an insulating layer, wherein the insulating layer is located between the pixel layer and the filter layer;
optionally, the display device further includes a packaging layer, the packaging layer covers the pixel layer, the packaging layer is located between the pixel layer and the filter layer, and the packaging layer serves as the insulating layer.
Optionally, the fabry-perot resonator structure includes a first fabry-perot resonator structure, a second fabry-perot resonator structure, and a third fabry-perot resonator structure;
the cavity length of the first Fabry-Perot resonant cavity structure meets the condition that light emitted from the pixel layer is blue light and is emitted after passing through the first Fabry-Perot resonant cavity structure; the length of the cavity of the second Fabry-Perot resonant cavity structure meets the condition that light emitted from the pixel layer is green light and is emitted after passing through the second Fabry-Perot resonant cavity structure; the cavity length of the third fabry-perot resonator structure meets the condition that light emitted from the pixel layer is red light after passing through the third fabry-perot resonator structure.
Optionally, the cavity length of the first fabry-perot resonator structure is in a range of 90nm to 400nm, the cavity length of the second fabry-perot resonator structure is in a range of 115nm to 120nm, and the cavity length of the third fabry-perot resonator structure is in a range of 155nm to 160 nm.
Optionally, in the thickness direction of the display panel, the thickness of the first metal layer and/or the second metal layer is 25nm to 30 nm;
optionally, the material of the first metal layer and/or the material of the second metal layer is metallic silver.
Optionally, the dielectric layer is made of silicon dioxide.
Optionally, the package cover plate further comprises a first metal adhesion layer, a second metal adhesion layer and a package cover plate;
the first metal adhesion layer is positioned between the packaging layer and the filter layer;
the second metal adhesion layer is located on one side, far away from the driving substrate, of the filter layer, and the packaging cover plate covers the second metal adhesion layer.
Optionally, the pixel layer includes a first electrode layer, a light emitting layer, and a second electrode layer stacked from the driving backplane to the filter layer;
the first electrode layer comprises a plurality of first electrodes, and each sub-pixel comprises one first electrode;
the vertical projection of the Fabry-Perot resonant cavity structure corresponding to the sub-pixel on the driving back plate is overlapped with the vertical projection of the first electrode of the sub-pixel on the driving back plate.
Optionally, the cavity length of the first fabry-perot resonator structure ranges from 90nm to 400nm, the cavity length of the second fabry-perot resonator structure ranges from 115nm to 120nm, and the cavity length of the third fabry-perot resonator structure ranges from 155nm to 160 nm; the thickness of the first metal layer and/or the second metal layer is 25nm to 30nm in the thickness direction of the display panel; the material of the first metal layer and/or the material of the second metal layer is metallic silver; the dielectric layer is made of silicon dioxide; preferably, the cavity length of the first fabry-perot resonant cavity structure is 93 nm; the cavity length of the second Fabry-Perot resonant cavity structure is 120 nm; the cavity length of the third Fabry-Perot resonant cavity structure is 158 nm.
In a second aspect, an embodiment of the present invention further provides a manufacturing method of a display panel, where the manufacturing method of the display panel includes:
providing a driving substrate;
forming a pixel layer on one side of the driving substrate; wherein the pixel layer comprises a plurality of sub-pixels;
forming a filter layer on one side of the pixel layer far away from the driving backboard; the filter layer includes fabry-perot resonator structures corresponding to the sub-pixels in a one-to-one manner in a thickness direction of the display panel, wherein lengths of cavities of the fabry-perot resonator structures are not completely the same, and light emitted from the pixel layer passes through the fabry-perot resonator structures with different cavity lengths and then exits in different colors.
Optionally, before forming a filter layer on a side of the pixel layer away from the driving backplane, the method further includes: forming an encapsulation layer on one side of the pixel layer far away from the driving backboard;
forming a filter layer on a side of the pixel layer away from the driving backplane comprises: forming a first metal layer on one side of the packaging layer far away from the driving backboard; forming a dielectric layer on one side of the first metal layer, which is far away from the driving substrate, wherein the dielectric layer comprises a plurality of dielectric units, the dielectric units correspond to the sub-pixels one by one, and the thickness of each dielectric unit is not completely the same along the thickness direction of the display panel; and forming a second metal layer on one side of the dielectric layer, which is far away from the driving substrate, wherein the second metal layer comprises metal parts which correspond to the dielectric units one by one, the vertical projection of the metal parts on the driving back plate is overlapped with the vertical projection of the corresponding dielectric units on the driving back plate, a Fabry-Perot resonant cavity is formed between the first metal layer positioned on two sides of the dielectric units and two opposite surfaces of the metal parts, and the cavity length of the Fabry-Perot resonant cavity is equal to the thickness of the dielectric units.
The display panel provided by the embodiment of the invention comprises a driving backboard, a pixel layer and a filter layer, wherein the pixel layer comprises a plurality of sub-pixels. The filter layer is arranged to comprise the Fabry-Perot resonant cavity structures which correspond to the sub-pixels one by one in the thickness direction of the display panel, the cavity lengths of the Fabry-Perot resonant cavity structures are not completely the same, so that the colors of light emitted by the pixel layer after passing through the Fabry-Perot resonant cavity structures with different cavity lengths are different, the colorful display of the display panel is realized through the Fabry-Perot resonant cavity based on the optical resonance principle, the silicon-based OLED micro-display can comprise the display panel provided by the embodiment, namely the technical scheme provided by the embodiment, the colorful display of the OLED silicon-based micro-display is realized through the Fabry-Perot resonant cavity based on the optical resonance principle, the dependence on a low-temperature optical filter process in the colorful display process of the silicon-based OLED micro-display is avoided, and the problem that the yellow light process in the low-temperature optical filter, and the problem that the optical filter is not firmly cured and easily falls off in the low-temperature optical filter process.
Drawings
Fig. 1 is a schematic structural diagram of a display panel according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another display panel according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of another display panel according to an embodiment of the present invention;
fig. 4 is a schematic flowchart illustrating a method for manufacturing a display panel according to an embodiment of the invention;
fig. 5 to fig. 13 are schematic structural diagrams of the display panel provided in the embodiment of the present invention in each manufacturing step.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 1 is a schematic structural diagram of a display panel according to an embodiment of the present invention, and referring to fig. 1, the display panel includes: a driving back plate 10; a pixel layer 20 located at one side of the driving backplane 10, wherein the pixel layer 20 includes a plurality of sub-pixels; a filter layer 004 located on one side of the pixel layer 20 away from the driving backplane 10; the filter layer 004 includes the fp resonator structures 40 corresponding to the sub-pixels in the thickness direction of the display panel, wherein the cavity lengths of the fp resonator structures 40 are not completely the same, and the light emitted from the pixel layer 20 passes through the fp resonator structures 40 with different cavity lengths and then exits in different colors.
Specifically, the driving backplate 10 may include a silicon substrate, and the driving backplate 10 can provide buffering, protection and/or support for the display panel. The driving backplane 10 may be provided thereon with a driving circuit, which may include a thin film transistor and a signal line. The signal lines are connected to the pixel layer 20 through the thin film transistors and connected to the driving chip in the display panel through the via holes 11. The driving chip provides driving signals and scanning signals to the thin film transistor and the pixel layer 20 through the signal lines, so as to drive the pixel layer 20 to emit light.
The pixel layer 20 includes a plurality of sub-pixels (e.g., sub-pixels 201, 202, and 203 in fig. 1), each of which may have an organic light emitting material disposed therein, and the light emitting colors of the organic light emitting materials disposed in the sub-pixels may not be identical, for example, the light emitting color of the organic light emitting material disposed in the sub-pixels is red, blue, or green. The emission colors corresponding to the organic light emitting materials disposed in the sub-pixels may be completely the same, for example, all the emission colors corresponding to the organic light emitting materials disposed in the sub-pixels are white.
The filter layer 004 may filter light emitted from the pixel layer 20. If the emission colors corresponding to the organic light emitting materials disposed in the sub-pixels of the pixel layer 20 are not completely the same, for example, the emission color corresponding to the organic light emitting material disposed in each sub-pixel is red, blue or green, and the light emitted by the corresponding sub-pixel is red, blue or green, at this time, the filter layer 004 can perform a certain filtering function on the red, blue or green light emitted by the sub-pixel, so that the red, blue or green light emitted from the sub-pixel is correspondingly emitted more pure red, blue or green light after being filtered by the filter layer 004, thereby optimizing the display effect on the basis of realizing the multi-color display of the display panel. If the light emitting colors corresponding to the organic light emitting materials disposed in the sub-pixels of the pixel layer 20 are completely the same, for example, the light emitting colors corresponding to the organic light emitting materials disposed in the sub-pixels are all white, and the light emitted by the corresponding sub-pixels is all white light, at this time, the filter layer 004 can also perform a certain filtering function on the white light emitted by the sub-pixels, so that the white light emitted by the sub-pixels is filtered by the filter layer 004 to emit pure monochromatic light, such as red light, blue light or green light, thereby realizing a better colorful display of the display panel.
In this embodiment, in the thickness direction of the display panel (i.e. in the y direction in fig. 1), the filter layer 004 is disposed to include Fabry-Perot resonator structures 40(Fabry-Perot resonators) corresponding to the sub-pixels one by one, so that the Fabry-Perot resonator structures 40 perform the above-mentioned filtering action on the light emitted by the corresponding sub-pixels. For example, the fabry-perot resonator structure 401 filters light emitted by the sub-pixel 201, the fabry-perot resonator structure 402 filters light emitted by the sub-pixel 202, and the fabry-perot resonator structure 403 filters light emitted by the sub-pixel 203.
The cavity length of the fp resonator structure 40 is determined by the height of the fp resonator structure 40 in the y-direction, for example, the cavity lengths of the fp resonator structure 401, the fp resonator structure 402 and the fp resonator structure 403 in fig. 1 are sequentially increased.
When the light emitted from the pixel layer 20 passes through the fabry-perot resonator structures 40 with different cavity lengths, the light emitted from the sub-pixels 201, 202, and 203 has different colors, for example, when all the sub-pixels 201, 202, and 203 emit white light, the white light emitted from the sub-pixels 201, 202, and 203 passes through the corresponding fabry-perot resonator structures 401, 402, and 403, and the emitted light has different colors, and is no longer all white light. Certainly, by adjusting the cavity length of the fabry-perot resonator structure 40, the color of the light emitted from the fabry-perot resonator structure 40 can be the same as the color of the light emitted from the corresponding sub-pixel, for example, if the light emitted from the sub-pixels 201, 202, and 203 is respectively blue light, green light, and red light, by adjusting the cavity lengths of the corresponding fabry-perot resonator structures 401, 402, and 403, the light emitted from the sub-pixels 201, 202, and 203 is still respectively blue light, green light, and red light after passing through the corresponding fabry-perot resonator structures 401, 402, and 403, in this case, the fabry-perot resonator structure 40 filters the light emitted from the sub-pixels, so that the light emitted from the sub-pixels is more pure after passing through the fabry-perot resonator structure 40.
In this embodiment, the filter layer includes the fabry-perot resonator structures corresponding to the sub-pixels in the thickness direction of the display panel one to one, and the lengths of the cavities of the fabry-perot resonator structures are not completely the same, so that the colors of light emitted from the pixel layer after passing through the fabry-perot resonator structures with different cavity lengths are different, that is, the embodiment realizes the multi-color display of the display panel through the fabry-perot resonator based on the optical resonance principle. The silicon-based OLED micro-display can comprise the display panel provided by the embodiment, namely the technical scheme provided by the embodiment realizes the multi-color display of the silicon-based OLED micro-display through the Fabry-Perot resonant cavity based on the optical resonance principle, so that the dependence on a low-temperature optical filter process in the process of realizing the multi-color display of the silicon-based OLED micro-display is avoided, the problem that the yellow light process in the low-temperature optical filter process is difficult to ensure the condition of being lower than 100 ℃ is solved, and the problem that the optical filter is easy to fall off due to the fact that the optical filter is not.
Optionally, the display panel further includes an insulating layer, and the insulating layer is located between the pixel layer 20 and the filter layer 004.
Specifically, an insulating layer is disposed between the pixel layer 20 and the filter layer 004 to prevent crosstalk of signals in the pixel layer 20 to the filter layer 004, which affects the light emitting effect and the filtering effect.
Optionally, with continued reference to fig. 1, the display panel further includes an encapsulation layer 30, the encapsulation layer 30 covers the pixel layer 20, the encapsulation layer 30 is located between the pixel layer 20 and the filter layer 004, and the encapsulation layer 30 serves as an insulating layer.
Specifically, the encapsulation layer 30 may also serve as an insulating layer. After the pixel layer 20 is manufactured, the encapsulation layer 30 is manufactured to cover the pixel layer 20, so as to prevent the pixel layer 20 from being physically scratched and prevent water vapor, oxygen, impurities, pollutants and the like from corroding the pixel layer 20, thereby protecting the organic light emitting material in the pixel layer 20.
Fig. 2 is a schematic structural diagram of another display panel according to an embodiment of the present invention, and referring to fig. 2, optionally, the fabry-perot resonator structure 40 includes a first metal layer 41, a dielectric layer 42, and a second metal layer 43 stacked on a side of the pixel layer 20 away from the driving backplate 10; the first metal layer 41 covers the pixel layer 20; the dielectric layer 42 comprises a plurality of dielectric units 420, the dielectric units 420 correspond to the sub-pixels one by one, and the thickness of each dielectric unit 420 is not completely the same along the thickness direction of the display panel; the second metal layer 43 includes metal parts 430 corresponding to the media units 420, wherein a vertical projection of the metal part 430 on the driving backplane 10 overlaps with a vertical projection of the corresponding media unit 420 on the driving backplane 10; a fabry-perot resonant cavity is formed between the first metal layer 41 and the two opposite surfaces of the metal part 430 on the two sides of the dielectric unit 420; the cavity length of the fabry-perot resonator is equal to the thickness of the dielectric unit 420.
Specifically, the first metal layer 41 may be a continuous metal layer as shown in fig. 2, and the continuous metal layer is shared by the fp cavity structures 40 in the filter layer 004; the first metal layer 41 may also be a discontinuous metal layer, and when the first metal layer is discontinuous, each fabry-perot resonator structure 40 in the filter layer 004 correspondingly includes a first metal layer 41.
The dielectric layer 42 includes a plurality of dielectric units 420, each fabry-perot resonator structure 40 in the filter layer 004 corresponds to a sub-pixel one by one, so that the dielectric units 420 correspond to sub-pixels one by one, as exemplarily illustrated in fig. 2, which shows three dielectric units 420 corresponding to sub-pixels 201, 202, and 203, respectively. Along the y direction, the cavity length of the fabry-perot resonator structure 40 corresponds to the thickness of the dielectric unit 420, the larger the thickness of the dielectric unit 420 is, the longer the cavity length of the fabry-perot resonator structure 40 is, the smaller the thickness of the dielectric unit 420 is, and the shorter the cavity length of the fabry-perot resonator structure 40 is, so that the cavity lengths of the fabry-perot resonator structures 40 in the filter layer 004 are different, and the thicknesses of the dielectric units 420 corresponding to the fabry-perot resonator structures 40 in the filter layer 004 are different.
The second metal layer 43 includes metal parts 430 in one-to-one correspondence with the dielectric units 420. Thus, each fabry-perot resonator structure 40 includes a first metal layer 41, a dielectric unit 420 and a metal part 430.
For any of the fp resonator structures 40, a fp resonator is formed between two opposite surfaces of the first metal layer 41 and the metal part 430 located at two sides of the dielectric unit 420, and a frequency of light transmitted by the fp resonator is determined by refractive indexes of the first metal layer 41, the dielectric unit 420, and the metal part 430 and a cavity length of the fp resonator, where the cavity length of the fp resonator is equal to a thickness of the dielectric unit 420 along the y direction. Accordingly, the frequency of the light transmitted by the fabry-perot resonator structure 40 can be adjusted by adjusting the refractive index of the first metal layer 41, the refractive index of the dielectric unit 420, the refractive index of the metal part 430, and/or the thickness of the dielectric unit 420, so that the filter effect of the fabry-perot resonator structure 40 on the light emitted by the sub-pixels is achieved.
The working principle of the fabry-perot resonator structure 40 is as follows: light beams emitted from the pixel layer 20 are incident on the surface of the metal part 430 close to the dielectric unit 420 through the first metal layer 41, and interfere with the inside and/or outside of the fabry-perot resonator, light beams with enhanced interference are emitted from the surface of the metal part 430 far from the dielectric unit 420 through the metal part 430, the frequency of the emitted light is determined by the refractive indexes of the first metal layer 41, the dielectric unit 420 and the metal part 430 and the cavity length of the fabry-perot resonator, if the frequency is the frequency of red light in visible light, the emitted light is red light, if the frequency is the frequency of blue light in visible light, the emitted light is blue light, and if the frequency is the frequency of green light in visible light, the emitted light is green light.
Optionally, with continued reference to fig. 2, the fabry-perot resonator structure 40 includes a first fabry-perot resonator structure 401, a second fabry-perot resonator structure 402, and a third fabry-perot resonator structure 403;
the cavity length of the first fp cavity structure 401 satisfies the condition that light emitted from the pixel layer 20 is blue light, and light emitted after passing through the first fp cavity structure 401 is blue light; the cavity length of the second fp cavity structure 402 satisfies the condition that light emitted from the pixel layer 20 is green light after passing through the second fp cavity structure 402; the cavity length of the third fp cavity structure 403 satisfies the condition that light emitted from the pixel layer 20 is red light after passing through the third fp cavity structure 403.
Specifically, in the embodiment, when the cavity lengths of the first, second, and third fp resonator structures 40 are respectively satisfied, and the light emitted from the pixel layer 20 passes through the first, second, and third fp resonator structures 40 and then is the blue light, the green light, and the red light, three monochromatic lights, that is, the blue light, the green light, and the red light, can be received from the side of the filter layer 004 away from the driving backplane 10, so that the color display of the display panel is realized at the side of the filter layer 004 away from the driving backplane 10, that is, the color display of the display panel is realized at the side of the metal portion 430 away from the dielectric unit 420.
Optionally, the cavity length of the first fp resonant cavity structure 401 is in a range of 90nm to 400nm, the cavity length of the second fp resonant cavity structure 402 is in a range of 115nm to 120nm, and the cavity length of the third fp resonant cavity structure 403 is in a range of 155nm to 160 nm.
Specifically, when the cavity length of the first fp resonator structure 401 satisfies a condition that light emitted from the pixel layer 20 passes through the first fp resonator structure 401 and then exits as blue light, the cavity length of the first fp resonator structure 401 may be in a range from 90nm to 95nm, for example, the cavity length of the first fp resonator structure 401 is 91nm, 92nm, 94nm, or 95 nm.
When the cavity length of the second fp cavity structure 402 satisfies a condition that light emitted from the pixel layer 20 passes through the second fp cavity structure 402 and then exits as green light, the cavity length of the second fp cavity structure 402 may be in a range from 115nm to 120nm, for example, the cavity length of the second fp cavity structure 402 is 116nm, 117nm, 118nm, or 119 nm.
When the cavity length of the third fp cavity structure 403 satisfies a condition that light emitted from the pixel layer 20 passes through the third fp cavity structure 403 and then exits as red light, the cavity length of the third fp cavity structure 403 may be 155nm to 160nm, for example, the cavity length of the third fp cavity structure 403 is 156nm, 157nm, or 159 nm.
Because the light emitted from the pixel layer 20 needs to enter the fabry-perot cavity structure 40 through the first metal layer 41, the light enhanced by interference in the fabry-perot cavity structure 40 needs to pass through the second metal layer 43 (to realize colorful display of the display panel on the side of the second metal layer 43 away from the dielectric layer 42), the display panel needs to be light and thin, and therefore, the thickness of the first metal layer 41 and/or the second metal layer 43 is not too large; moreover, the fabry-perot cavity structure 40 is required to be formed between two opposite surfaces of the first metal layer 41 and the second metal layer 43, and therefore, the thickness of the first metal layer 41 and/or the second metal layer 43 is not too small. Optionally, the thickness of the first metal layer 41 and/or the second metal layer 43 is 25nm to 30nm in the thickness direction of the display panel. For example, the first metal layer 41 and/or the second metal layer 43 are provided with a thickness of 26nm, 27nm, 28nm, 29nm, or the like.
Optionally, the material of the first metal layer 41 and/or the material of the second metal layer 43 is metallic silver.
Optionally, the material of the dielectric layer 42 is silicon dioxide.
Fig. 3 is a schematic structural diagram of another display panel provided in an embodiment of the present invention, and referring to fig. 3, optionally, the display panel further includes a first metal adhesion layer 51, a second metal adhesion layer 52, and an encapsulation cover plate 50; a first metal adhesion layer 51 is located between encapsulation layer 30 and filter layer 004; a second metal adhesive layer 52 is located on the side of the filter layer 004 away from the driving backplane 10, and the package cover plate 50 covers the second metal adhesive layer 52.
Specifically, the first metal adhesion layer 51 is disposed to increase the adhesion of the filter layer 004 to the package layer 30, that is, the first metal adhesion layer 51 is located between the package layer 30 and the first metal layer 41 to increase the adhesion of the first metal adhesion layer 51 to the package layer 30, so as to increase the adhesion of the filter layer 004 to the package layer 30, that is, the adhesion of each fabry perot resonator structure 40 to the package layer 30, and prevent any fabry perot resonator structure 40 from falling off due to insecurity in the display panel. The package cover plate 50 plays a role in packaging and protecting the display panel to prevent physical scratches to the filter layer 004 and the pixel layer 20 and impurities such as water and oxygen from corroding the filter layer 004 and the pixel layer 20, a second metal adhesion layer 52 is arranged between the metal part 430 and the package cover plate 50 to further enhance the firmness of the filter layer 004, and the package cover plate 50 can be fixed in the display panel through the UV glue 53.
In the y direction, the thickness of the first and second metal adhesion layers is too large to facilitate the thinning of the display panel, and the thickness of the first and second metal adhesion layers is too small to effectively increase the adhesion between the fabry perot resonator structure 40 and the package layer 30, and the adhesion between the fabry perot resonator structure 40 and the package cover 50. Alternatively, the material of both the first and second metal adhesion layers may be chromium; the thickness of the first and second metal adhesion layers 52 may each be 0.5nm to 1nm in the y-direction, for example, the thickness of the first metal adhesion layer 51 and/or the second metal adhesion layer 52 may be 0.6nm, 0.7nm, 0.8nm, or 0.9 nm.
With continued reference to fig. 1 to 3, optionally, the pixel layer 20 includes a first electrode layer 21, a light-emitting layer 22 and a second electrode layer 23 stacked from the driving backplane 10 to the filter layer 004; the first electrode layer 21 includes a plurality of first electrodes 210, and each sub-pixel includes a first electrode 210; the vertical projection of the fabry-perot resonator structure 40 corresponding to the sub-pixel on the driving backplate 10 overlaps with the vertical projection of the first electrode 210 of the sub-pixel on the driving backplate 10.
Specifically, the organic light emitting materials of the light emitting layer 22 are exemplarily illustrated in fig. 1 to 3 as organic light emitting materials emitting white light, and in fact, the organic light emitting materials of the light emitting layers 22 of different sub-pixels may be different, which is not limited by the embodiment. For each sub-pixel, the organic light emitting material of the light emitting layer 22 emits light of a corresponding color under the driving of the corresponding first electrode 210 and the second electrode layer 23.
Optionally, this embodiment exemplarily provides a structural parameter of a display panel with a better display effect to realize a colorful display with a good display effect, where: the first fabry-perot resonator structure 40 has a cavity length of 93nm, the second fabry-perot resonator structure 40 has a cavity length of 120nm, the third fabry-perot resonator structure 40 has a cavity length of 158nm, the thicknesses of the first metal layer 41 and the second metal layer 43 are both 25nm to 30nm, the materials of the first metal layer 41 and the second metal layer 43 are silver Ag, and the material of the dielectric layer 42 is silicon dioxide SiO2The thicknesses of the first and second metal adhesion layers 51 and 52 are each 0.5nm to 1nm and the materials of the first and second metal adhesion layers 51 and 52 are each chromium Cr.
An embodiment of the present invention further provides a manufacturing method of a display panel, fig. 4 is a schematic flow chart of the manufacturing method of the display panel provided in the embodiment of the present invention, fig. 5 to 13 are schematic structural diagrams of the display panel provided in the embodiment of the present invention in each preparation step, and referring to fig. 4, the manufacturing method of the display panel includes:
s10, providing a driving back plate.
Specifically, referring to fig. 5, a driving backplane 10 is provided, the driving backplane 10 including vias 11.
S11, forming a pixel layer on one side of the driving backboard; wherein the pixel layer includes a plurality of sub-pixels.
Specifically, referring to fig. 6, the formed pixel layer 20 may include a first electrode layer 21, a light emitting layer 22, and a second electrode layer 23 sequentially stacked on the driving backplane 10; the first electrode layer 21 includes a plurality of first electrodes 210, and each sub-pixel includes a first electrode 210; the vertical projection of the fabry-perot resonator structure 40 corresponding to the sub-pixel on the driving backplate 10 overlaps with the vertical projection of the first electrode 210 of the sub-pixel on the driving backplate 10, wherein the sub-pixel is, for example, the sub-pixels 201, 202 and 203 in fig. 6.
S12, forming a filter layer 004 on the side of the pixel layer away from the driving backplane; the filter layer 004 includes fabry-perot resonator structures corresponding to the sub-pixels in the thickness direction of the display panel, wherein the lengths of the cavities of the fabry-perot resonator structures are not completely the same, and the light emitted from the pixel layer passes through the fabry-perot resonator structures with different cavity lengths and then the colors of the light emitted therefrom are different.
Specifically, referring to fig. 1, fabry-perot resonator structures 40 corresponding to the sub-pixels one to one are formed on a side of the pixel layer 20 away from the driving backplane 10 along the y-direction.
Optionally, referring to fig. 6, before step S12, the method further includes: and forming an encapsulation layer on one side of the pixel layer far away from the driving backboard. That is, the encapsulation layer 30 is formed immediately after the pixel layer 20 is formed to encapsulate and protect the pixel layer 20.
Optionally, referring to fig. 7, after forming the encapsulation layer on the side of the pixel layer away from the driving backplane, the method further includes: a first metal adhesion layer 51, such as Cr with a thickness of 0.5nm to 1nm along the y-direction, is evaporated on the side of the encapsulation layer 30 away from the pixel layer 20.
Alternatively, step S12 includes step S120, step S121, and step S122.
Referring to fig. 8, step S120 includes: and forming a first metal layer on one side of the packaging layer far away from the driving back plate. That is, the first metal layer 41 is formed on the side of the first metal adhesion layer 51 away from the encapsulation layer 30, for example, a layer of metal silver Ag with a thickness of 30nm along the y direction is evaporated.
Referring to fig. 9 to 11, step S121 includes: and forming a dielectric layer on one side of the first metal layer, which is far away from the driving back plate, wherein the dielectric layer comprises a plurality of dielectric units, the dielectric units correspond to the sub-pixels one by one, and the thickness of each dielectric unit is not completely the same along the thickness direction of the display panel. That is, photoresist spin coating, exposing, developing, evaporating the silicon dioxide dielectric layer 42, and removing the photoresist layer by a dry lift-off process are sequentially performed on the side of the first metal layer 41 away from the first metal adhesion layer 51 to form the dielectric unit 420 corresponding to the sub-pixel 201 as shown in fig. 9; further, performing photoresist spin coating, exposing, developing, evaporating the silicon dioxide dielectric layer 42, and removing the photoresist layer by a dry lift-off process on the side of the first metal layer 41 away from the first metal adhesion layer 51 to form a dielectric unit 420 corresponding to the sub-pixel 202 shown in fig. 10; furthermore, the photoresist spin coating, exposing, developing, evaporating the silicon dioxide dielectric layer 42, and removing the photoresist layer by a dry lift-off process are sequentially performed again on the side of the first metal layer 41 away from the first metal adhesion layer 51 to form the dielectric unit 420 corresponding to the sub-pixel 203 as shown in fig. 11.
Referring to fig. 12, step S122 includes: and forming a second metal layer on one side of the dielectric layer, which is far away from the driving back plate, wherein the second metal layer comprises metal parts 430 corresponding to the dielectric units one by one, the vertical projection of the metal parts on the driving back plate is overlapped with the vertical projection of the corresponding dielectric units on the driving back plate, a Fabry-Perot resonant cavity is formed between the first metal layer positioned on two sides of the dielectric units and two opposite surfaces of the metal parts, and the cavity length of the Fabry-Perot resonant cavity is equal to the thickness of the dielectric units. That is, the second metal layer 43 is formed on the side of the dielectric unit 420 far away from the first metal layer 41, for example, a layer of metal silver Ag with a thickness of 30nm in the y direction is evaporated, and the metal part 430 is formed in the process.
It should be noted that, in fig. 12, different from fig. 1 to 3, a situation that the second metal layer 43 covers the first metal layer 41 may also occur when the second metal layer 43 is evaporated, a mask used when the second metal layer 43 is manufactured in fig. 1 to 3 may be different from that used in fig. 12, a situation that the first metal layer 41 is not covered by the second metal layer 43 is illustrated in fig. 1 to 3, and a situation that the second metal layer 43 is still covered by the first metal layer 41 that is not covered by the dielectric unit 420 when the second metal layer 43 is evaporated is illustrated in fig. 12, and it can be understood that both fig. 12 and fig. 1 to 3 can achieve the technical effects of the present embodiment.
Alternatively, referring to fig. 13, a second metal adhesion layer 52 is formed on a side of the second metal layer 43 away from the dielectric unit 420, and the package cover plate 50 is disposed by UV glue 53, wherein the second metal layer 43 is, for example, a layer of chromium Cr evaporated with a thickness of 0.5nm to 1nm along the y direction.
The manufacturing method of the display panel provided by the embodiment of the invention can be used for manufacturing the display panel of any technical scheme, the manufacturing method of the display panel and the display panel belong to the same inventive concept, the two can realize the same technical effect, and repeated contents are not repeated here.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (12)
1. A display panel, comprising:
driving the back plate;
the pixel layer is positioned on one side of the driving back plate and comprises a plurality of sub-pixels;
the filter layer is positioned on one side, away from the driving backboard, of the pixel layer; the filter layer includes fabry-perot resonator structures corresponding to the sub-pixels in a one-to-one manner in a thickness direction of the display panel, wherein lengths of cavities of the fabry-perot resonator structures are not completely the same, and light emitted from the pixel layer passes through the fabry-perot resonator structures with different cavity lengths and then exits in different colors.
2. The display panel according to claim 1, wherein the fabry-perot resonator structure comprises a first metal layer, a dielectric layer and a second metal layer stacked on a side of the pixel layer away from the driving backplane;
the first metal layer covers the pixel layer;
the dielectric layer comprises a plurality of dielectric units, the dielectric units correspond to the sub-pixels one by one, and the thickness of each dielectric unit is not completely the same along the thickness direction of the display panel;
the second metal layer comprises metal parts corresponding to the medium units one by one, wherein the vertical projection of the metal parts on the driving back plate is overlapped with the vertical projection of the corresponding medium units on the driving back plate;
a Fabry-Perot resonant cavity is formed between the first metal layer positioned at two sides of the medium unit and two opposite surfaces of the metal part; the cavity length of the Fabry-Perot resonant cavity is equal to the thickness of the dielectric unit.
3. The display panel according to claim 1, further comprising an insulating layer between the pixel layer and the filter layer;
preferably, the liquid crystal display device further comprises an encapsulation layer, the encapsulation layer covers the pixel layer, the encapsulation layer is located between the pixel layer and the filter layer, and the encapsulation layer serves as the insulating layer.
4. The display panel according to claim 1 or 2, wherein the fabry-perot resonator structures comprise a first fabry-perot resonator structure, a second fabry-perot resonator structure, a third fabry-perot resonator structure;
the cavity length of the first Fabry-Perot resonant cavity structure meets the condition that light emitted from the pixel layer is blue light and is emitted after passing through the first Fabry-Perot resonant cavity structure; the length of the cavity of the second Fabry-Perot resonant cavity structure meets the condition that light emitted from the pixel layer is green light and is emitted after passing through the second Fabry-Perot resonant cavity structure; the cavity length of the third fabry-perot resonator structure meets the condition that light emitted from the pixel layer is red light after passing through the third fabry-perot resonator structure.
5. The display panel according to claim 4, wherein the first Fabry-Perot cavity structure has a cavity length in a range of 90nm to 400nm, the second Fabry-Perot cavity structure has a cavity length in a range of 115nm to 120nm, and the third Fabry-Perot cavity structure has a cavity length in a range of 155nm to 160 nm.
6. The display panel according to claim 2, wherein the thickness of the first metal layer and/or the second metal layer is 25nm to 30nm in the display panel thickness direction;
preferably, the material of the first metal layer and/or the material of the second metal layer is metallic silver.
7. The display panel according to claim 2, wherein the dielectric layer is made of silicon dioxide.
8. The display panel of claim 3, further comprising a first metal adhesive layer, a second metal adhesive layer, and an encapsulating cover plate;
the first metal adhesion layer is positioned between the packaging layer and the filter layer;
the second metal adhesion layer is located on one side, far away from the driving substrate, of the filter layer, and the packaging cover plate covers the second metal adhesion layer.
9. The display panel according to claim 1, wherein the pixel layer includes a first electrode layer, a light emitting layer, and a second electrode layer stacked from the driving backplane to the filter layer;
the first electrode layer comprises a plurality of first electrodes, and each sub-pixel comprises one first electrode;
the vertical projection of the Fabry-Perot resonant cavity structure corresponding to the sub-pixel on the driving back plate is overlapped with the vertical projection of the first electrode of the sub-pixel on the driving back plate.
10. The display panel according to claim 5,
the first Fabry-Perot resonant cavity structure has a cavity length ranging from 90nm to 400nm, the second Fabry-Perot resonant cavity structure has a cavity length ranging from 115nm to 120nm, and the third Fabry-Perot resonant cavity structure has a cavity length ranging from 155nm to 160 nm;
the thickness of the first metal layer and/or the second metal layer is 25nm to 30nm in the thickness direction of the display panel; the material of the first metal layer and/or the material of the second metal layer is metallic silver;
the dielectric layer is made of silicon dioxide;
preferably, the cavity length of the first fabry-perot resonant cavity structure is 93 nm; the cavity length of the second Fabry-Perot resonant cavity structure is 120 nm; the cavity length of the third Fabry-Perot resonant cavity structure is 158 nm.
11. A method for manufacturing a display panel is characterized by comprising the following steps:
providing a driving substrate;
forming a pixel layer on one side of the driving substrate; wherein the pixel layer comprises a plurality of sub-pixels;
forming a filter layer on one side of the pixel layer far away from the driving backboard; the filter layer includes fabry-perot resonator structures corresponding to the sub-pixels in a one-to-one manner in a thickness direction of the display panel, wherein lengths of cavities of the fabry-perot resonator structures are not completely the same, and light emitted from the pixel layer passes through the fabry-perot resonator structures with different cavity lengths and then exits in different colors.
12. The method for manufacturing a display panel according to claim 11,
before a filter layer is formed on one side of the pixel layer away from the driving backboard, the method further comprises the following steps: forming an encapsulation layer on one side of the pixel layer far away from the driving backboard;
forming a filter layer on a side of the pixel layer away from the driving backplane comprises: forming a first metal layer on one side of the packaging layer far away from the driving backboard; forming a dielectric layer on one side of the first metal layer, which is far away from the driving substrate, wherein the dielectric layer comprises a plurality of dielectric units, the dielectric units correspond to the sub-pixels one by one, and the thickness of each dielectric unit is not completely the same along the thickness direction of the display panel;
and forming a second metal layer on one side of the dielectric layer, which is far away from the driving substrate, wherein the second metal layer comprises metal parts which correspond to the dielectric units one by one, the vertical projection of the metal parts on the driving back plate is overlapped with the vertical projection of the corresponding dielectric units on the driving back plate, a Fabry-Perot resonant cavity is formed between the first metal layer positioned on two sides of the dielectric units and two opposite surfaces of the metal parts, and the cavity length of the Fabry-Perot resonant cavity is equal to the thickness of the dielectric units.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011599045.7A CN112635538A (en) | 2020-12-29 | 2020-12-29 | Display panel and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011599045.7A CN112635538A (en) | 2020-12-29 | 2020-12-29 | Display panel and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112635538A true CN112635538A (en) | 2021-04-09 |
Family
ID=75287543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011599045.7A Pending CN112635538A (en) | 2020-12-29 | 2020-12-29 | Display panel and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112635538A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113540189A (en) * | 2021-06-29 | 2021-10-22 | 合肥维信诺科技有限公司 | Display panel and display device |
| CN113571659A (en) * | 2021-07-06 | 2021-10-29 | 昆山梦显电子科技有限公司 | Color packaging cover plate, preparation method of color packaging cover plate and display panel |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105633116A (en) * | 2014-12-01 | 2016-06-01 | 昆山国显光电有限公司 | OLED (Organic Light-Emitting Diode) device and manufacturing method therefor, and display apparatus |
| US20170059754A1 (en) * | 2014-05-06 | 2017-03-02 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Optical filtering device including fabry-perot cavities comprising a structured layer and having different thicknesses |
| US20170236881A1 (en) * | 2014-10-29 | 2017-08-17 | Boe Technology Group Co., Ltd. | Display Substrate, Display Device Thereof, and Manufacturing Method Therefor |
| CN110164911A (en) * | 2018-07-10 | 2019-08-23 | 上海视涯信息科技有限公司 | A kind of top emitting declines chamber OLED display |
| CN111266934A (en) * | 2020-02-29 | 2020-06-12 | 湖南大学 | Method for manufacturing ion beam polished monolithic integrated Fabry-Perot cavity full-color filter in large batch |
| CN212209496U (en) * | 2020-07-06 | 2020-12-22 | 昆山梦显电子科技有限公司 | Display panel and display device |
| CN215342607U (en) * | 2020-12-29 | 2021-12-28 | 昆山梦显电子科技有限公司 | Display panel |
-
2020
- 2020-12-29 CN CN202011599045.7A patent/CN112635538A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170059754A1 (en) * | 2014-05-06 | 2017-03-02 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Optical filtering device including fabry-perot cavities comprising a structured layer and having different thicknesses |
| US20170236881A1 (en) * | 2014-10-29 | 2017-08-17 | Boe Technology Group Co., Ltd. | Display Substrate, Display Device Thereof, and Manufacturing Method Therefor |
| CN105633116A (en) * | 2014-12-01 | 2016-06-01 | 昆山国显光电有限公司 | OLED (Organic Light-Emitting Diode) device and manufacturing method therefor, and display apparatus |
| CN110164911A (en) * | 2018-07-10 | 2019-08-23 | 上海视涯信息科技有限公司 | A kind of top emitting declines chamber OLED display |
| CN111266934A (en) * | 2020-02-29 | 2020-06-12 | 湖南大学 | Method for manufacturing ion beam polished monolithic integrated Fabry-Perot cavity full-color filter in large batch |
| CN212209496U (en) * | 2020-07-06 | 2020-12-22 | 昆山梦显电子科技有限公司 | Display panel and display device |
| CN215342607U (en) * | 2020-12-29 | 2021-12-28 | 昆山梦显电子科技有限公司 | Display panel |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113540189A (en) * | 2021-06-29 | 2021-10-22 | 合肥维信诺科技有限公司 | Display panel and display device |
| CN113540189B (en) * | 2021-06-29 | 2023-12-22 | 合肥维信诺科技有限公司 | Display panel and display device |
| CN113571659A (en) * | 2021-07-06 | 2021-10-29 | 昆山梦显电子科技有限公司 | Color packaging cover plate, preparation method of color packaging cover plate and display panel |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10606393B2 (en) | Micro light-emitting diode display device | |
| WO2020113831A1 (en) | Display substrate, display panel, display apparatus, and method of fabricating display substrate thereof | |
| CN108735788B (en) | Display panel, manufacturing method thereof and display device | |
| JP5459142B2 (en) | ORGANIC EL DEVICE, METHOD FOR MANUFACTURING ORGANIC EL DEVICE, AND ELECTRONIC DEVICE | |
| US11289669B2 (en) | Light-emitting device, pixel unit, manufacturing method for pixel unit and display device | |
| US9000665B2 (en) | Organic light emitting diode display device and method of manufacturing the same | |
| US8080938B2 (en) | Organic light emitting display device and method for manufacturing the same | |
| CN110459581B (en) | Display panel and display device | |
| US11106102B2 (en) | Display substrate, method for manufacturing same, and display device | |
| JP2015153607A (en) | Method for manufacturing organic light emitting device, organic light emitting device and electronic apparatus | |
| WO2020224088A1 (en) | Array substrate and preparation method therefor | |
| CN112635538A (en) | Display panel and manufacturing method thereof | |
| CN111933670B (en) | Display substrate, preparation method thereof and display device | |
| JP2014035799A (en) | Light-emitting device, manufacturing method therefor, electronic apparatus | |
| WO2005017860A1 (en) | Optical device and organic el display | |
| JP2016018734A (en) | Display device and method of manufacturing the same | |
| JPH06194639A (en) | Liquid crystal display panel | |
| CN215342607U (en) | Display panel | |
| US20220059808A1 (en) | Method for preparing organic electroluminescent device, and organic electroluminescent device and display apparatus | |
| JP2012248453A (en) | Display device | |
| KR20180026267A (en) | Organic light emitting diode display and method for fabricating the same | |
| JP2010160504A (en) | Projector | |
| US9897847B2 (en) | Display device | |
| JP2016143605A (en) | Manufacturing method of light emitting device, light emitting device and electronic apparatus | |
| JP2014022091A (en) | Organic el device, method for manufacturing organic el device, and electronic apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |