CN112610608A - Wide-temperature-range self-lubricating bearing and preparation method thereof - Google Patents

Wide-temperature-range self-lubricating bearing and preparation method thereof Download PDF

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CN112610608A
CN112610608A CN202011346102.0A CN202011346102A CN112610608A CN 112610608 A CN112610608 A CN 112610608A CN 202011346102 A CN202011346102 A CN 202011346102A CN 112610608 A CN112610608 A CN 112610608A
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coating
atomic percent
bearing
target
layer
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CN112610608B (en
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邢佑强
万一枝
骆诚
李燕凡
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Southeast University
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6696—Special parts or details in view of lubrication with solids as lubricant, e.g. dry coatings, powder
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00—Solid materials defined by their properties
    • F16C2202/50—Lubricating properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2204/00—Metallic materials; Alloys
    • F16C2204/60—Ferrous alloys, e.g. steel alloys
    • F16C2204/66—High carbon steel, i.e. carbon content above 0.8 wt%, e.g. through-hardenable steel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2204/00—Metallic materials; Alloys
    • F16C2204/60—Ferrous alloys, e.g. steel alloys
    • F16C2204/70—Ferrous alloys, e.g. steel alloys with chromium as the next major constituent
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F16C2223/60—Coating surfaces by vapour deposition, e.g. PVD, CVD

Abstract

The invention provides a wide-temperature-range self-lubricating bearing and a preparation method thereof. The wide-temperature-range self-lubricating bearing comprises a bearing substrate, a micro-texture and a composite coating, wherein the micro-texture is arranged on the surface of the bearing substrate, and the composite coating is deposited on the surface of the micro-texture; the composite coating comprises a first coating and a second coating, and the first coating and the second coating are alternately superposed. When the working temperature is lower, the second coating can play a role in lubrication; when the working temperature is higher, the first coating and the second coating react to generate a compound with a high-temperature lubricating effect, so that the lubricating effect can be achieved. The bearing has good self-lubricating effect under the conditions of wide temperature range or alternating temperature, can reduce the abrasion of the bearing and prolong the service life.

Description

Wide-temperature-range self-lubricating bearing and preparation method thereof
Technical Field
The invention relates to the technical field of bearing manufacturing, in particular to a wide-temperature-range self-lubricating bearing and a preparation method thereof.
Background
The bearing is an important part in the modern mechanical equipment, the bearing has larger friction and wear in the working process, and a lubricant is usually required in the using process; the self-lubricating technology can realize oil-free lubrication of the bearing, breaks through the use limitations of lubricating oil or lubricating grease and the like, and the self-lubricating bearing becomes a research hotspot for green manufacture. Therefore, the development of new self-lubricating bearings with high strength, low friction, low wear and long life is of great importance to advanced manufacturing!
The Chinese patent application No. 201910511263.1 discloses an antifriction and antiwear self-lubricating coating bearing and a preparation method thereof, the bearing is provided with a hard alloy layer, a silicon nitride ceramic layer and a cubic boron nitride layer composite lubricating coating on the surface of a substrate by a plasma spraying method, and the lubricating effect in the working process is realized. Chinese patent application No. 201320341799.1 discloses an inserted solid self-lubricating bearing, and bearing body lateral part is equipped with annular groove and stores solid lubricant's through-hole, can realize the self-lubricating of working process, reduces coefficient of friction, prolongs bearing life-span. The Chinese patent application No. CN201710547274.6 discloses a self-lubricating bearing and a preparation method thereof, wherein a graphene/calcium fluoride/ceramic self-lubricating coating is prepared on the surface of a chromium-containing alloy steel bearing substrate by a laser cladding method, so that the self-lubricating function of the bearing is realized.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the bearing has good lubricating effect in a wide temperature range and an alternating temperature range, can realize lubrication in the working process of the bearing, reduces the abrasion of the bearing and prolongs the service life of the bearing.
In order to solve the technical problems, the invention provides a wide-temperature-range self-lubricating bearing, which comprises a bearing substrate, a micro-texture and a composite coating, wherein the micro-texture is arranged on the surface of the bearing substrate, and the composite coating is deposited on the surface of the micro-texture; the composite coating comprises a first coating and a second coating, and the first coating and the second coating are alternately superposed; the composite coating includes at least 10 first coating layers and at least 10 second coating layers.
As a further improvement of the embodiment of the invention, the first coating is a TiVZnN layer, the second coating is a MoTeHfC layer, and the single-layer thicknesses of the first coating and the second coating are both less than or equal to 500 nm.
As a further improvement of the embodiment of the invention, in the first coating, the atomic percent of Ti element is 30-50%, the atomic percent of V element is 10-20%, the atomic percent of Zn element is 5-15%, the atomic percent of N element is 20-40%, and the sum of the atomic percent of Ti element, the atomic percent of V element, the atomic percent of Zn element and the atomic percent of N element is 100%.
As a further improvement of the embodiment of the invention, in the second coating, the atomic percent of Mo element is 30-40%, the atomic percent of Te element is 30-40%, the atomic percent of Hf element is 8-12%, the atomic percent of C element is 10-20%, and the sum of the atomic percent of Mo element, the atomic percent of Te element, the atomic percent of Hf element and the atomic percent of C element is 100%.
As a further improvement of an embodiment of the invention, the bearing base body is made of bearing steel.
On the other hand, the embodiment of the invention also provides a preparation method for preparing the wide-temperature-range self-lubricating bearing, which comprises the following steps:
step 1, preparing a micro-texture on the surface of a bearing substrate by adopting a laser processing technology, wherein the laser power is 10-50W, the frequency is 10-20kHz, and the scanning speed is 5-300 mm/s; the width of the microtexture is 10-200 μm, and the depth is 5-200 μm;
and 2, preparing a composite coating on the surface of the microtexture by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition to obtain the wide-temperature-range self-lubricating bearing.
As a further improvement of the embodiment of the present invention, the step 2 specifically includes:
step 21, opening the Ti target and the VZnN target, adjusting the working air pressure to be 0.5-2.5Pa, the bias voltage to be 100-300V, adjusting the current of the Ti target to be 50-160A, adjusting the current of the VZnN target to be 50-100A, and depositing a TiVZnN layer for 2-5 min;
step 22, starting MoTe2Target, Hf target and C target, adjusting the working pressure to 0.5-2.0Pa, bias pressure to 100-120V, and MoTe2Depositing a MoTeHfC layer for 3-8min, wherein the target current is 80-120A, the Hf target current is 30-50A, and the C target current is 50-80A;
and 23, repeating the step 21 and the step 22, and alternately depositing a TiVZnN layer and a MoTeHfC layer to enable the total thickness of the composite coating to be a preset thickness, so as to obtain the wide-temperature-range self-lubricating bearing.
As a further improvement of the embodiment of the present invention, the predetermined thickness is 1 to 10 μm.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects: the bearing provided by the embodiment of the invention has a good self-lubricating effect in a wide temperature range working range, and the MoTeHfC coating can play a lubricating effect when the working temperature is low; when the working temperature is higher, TiVZnN, MoTeHfC and oxygen in the air react to generate ZnMoO4 and V2O5 compounds with high-temperature lubrication, so that the lubricating oil can play a good lubricating role under the high-temperature condition. The bearing provided by the embodiment of the invention does not need lubricating oil and a complex lubricating system, and is simple in structure and convenient to use; the TiVZnN layer and the MoTeHfC layer are overlapped in a staggered mode, so that the performance of a single coating is improved, and the application range of the bearing is widened. The micro-texture on the surface of the bearing can improve the bonding strength between the bearing substrate and the composite coating, can collect abrasive dust and a high-temperature lubricating phase, and plays roles in reducing abrasive wear and providing secondary lubrication, thereby prolonging the service life of the bearing. The bearing of the embodiment has good lubricating effect under the conditions of wide temperature range or alternating temperature, the friction and abrasion of the bearing in the working process can be reduced, and the service life of the bearing is prolonged.
Drawings
FIG. 1 is a schematic structural diagram of a wide temperature range self-lubricating bearing according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of a wide temperature range self-lubricating bearing of an embodiment of the present invention.
In the figure: the bearing comprises a bearing substrate 1, a microtexture 2, a first coating 31, a second coating 32, an inner ring 6, an outer ring 7 and balls 8.
Detailed Description
The technical solution of the present invention will be described in detail below with reference to the accompanying drawings.
An embodiment of the present invention provides a wide temperature range self-lubricating bearing, as shown in fig. 1 and 2, including a bearing base 1 including an inner ring 6 and an outer ring 7, and balls 8 located between the inner ring 6 and the outer ring 7. The wide temperature range self-lubricating bearing of the embodiment further comprises a micro-texture and a composite coating, wherein the micro-texture 2 is arranged on the outer surface of the inner ring 6 and the inner surface of the outer ring 7, and the composite coating is deposited on the surface of the micro-texture 2. The composite coating comprises a first coating 31 and a second coating 32, the first coating 31 and the second coating 32 being alternately stacked. In the composite coating, the first coating 31 has at least 10 layers, and the second coating 32 has at least 10 layers.
The first coating 31 is a TiVZnN layer, the second coating 32 is a MoTeHfC layer, and the single-layer thicknesses of the first coating 31 and the second coating 32 are both less than or equal to 500 nm.
Preferably, in the first coating 31, the atomic percent of Ti element is 30 to 50%, the atomic percent of V element is 10 to 20%, the atomic percent of Zn element is 5 to 15%, the atomic percent of N element is 20 to 40%, and the sum of the atomic percent of Ti element, the atomic percent of V element, the atomic percent of Zn element, and the atomic percent of N element is 100%.
Preferably, in the second coating layer 32, the atomic percent of Mo element is 30-40%, the atomic percent of Te element is 30-40%, the atomic percent of Hf element is 8-12%, the atomic percent of C element is 10-20%, and the sum of the atomic percent of Mo element, the atomic percent of Te element, the atomic percent of Hf element and the atomic percent of C element is 100%.
Preferably, the bearing base body 1 is made of bearing steel.
The embodiment of the invention also provides a preparation method for preparing the wide-temperature-range self-lubricating bearing, which comprises the following steps:
step 1, preparing a micro-texture 2 on the surface of a bearing substrate 1 by adopting a laser processing technology, wherein the laser power is 10-50W, the frequency is 10-20kHz, and the scanning speed is 5-300 mm/s; the width of the microtexture 2 is 10-200 μm, and the depth is 5-200 μm;
and 2, preparing a composite coating on the surface of the microtexture 2 by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition to obtain the wide-temperature-range self-lubricating bearing.
According to the method provided by the embodiment of the invention, the composite coating is prepared on the surface of the bearing substrate by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition, and the preparation method is simple.
Preferably, step 2 specifically comprises:
step 21, opening the Zr target and the VZnN target, adjusting the working air pressure to be 0.5-2.5Pa, the bias voltage to be 100-300V, adjusting the Zr target current to be 50-160A, adjusting the VZnN target current to be 50-100A, and depositing the TiVZnN layer for 2-5 min;
step 22, starting a MoTe2 target, a Hf target and a C target, adjusting the working air pressure to be 0.5-2.0Pa, the bias voltage to be 100-120V, the MoTe2 target current to be 80-120A, the Hf target current to be 30-50A and the C target current to be 50-80A, and depositing a MoTeHfC layer for 3-8 min;
and 23, repeating the step 21 and the step 22 until the total thickness of the composite coating is the preset thickness, and obtaining the wide-temperature-range self-lubricating bearing.
Preferably, the predetermined thickness is 1 to 10 μm.
The bearing provided by the embodiment of the invention has a good self-lubricating effect in a wide temperature range working range, and the MoTeHfC coating can play a lubricating effect when the working temperature is low; when the working temperature is higher, TiVZnN, MoTeHfC and oxygen in the air react to generate ZnMoO4 and V2O5 compounds with high-temperature lubrication, so that the lubricating oil can play a good lubricating role under the high-temperature condition. The bearing provided by the embodiment of the invention does not need lubricating oil and a complex lubricating system, and is simple in structure and convenient to use; the TiVZnN + MoTeHfC laminated coating improves the performance of a single coating and increases the application range of the bearing. The microtexture on the surface of the bearing substrate prepared by the method can improve the bonding strength between the bearing substrate and the composite coating, and can collect abrasive dust and a high-temperature lubricating phase, so that the abrasive wear of abrasive particles is reduced, a secondary lubricating effect is provided, and the service life of the bearing is prolonged.
Example 1
Preparing a micro-texture on the surface of a bearing substrate by adopting a laser processing technology, wherein the laser power is 12W, the frequency is 20kHz, the scanning speed is 10mm/s, the width of the micro-texture is 50 mu m, and the depth of the texture is 100 mu m; opening the Ti target and the VZnN target, adjusting the working air pressure to be 0.5Pa, the bias voltage to be 150V, adjusting the current of the Ti target to be 50A, adjusting the current of the VZnN target to be 60A, and depositing a TiVZnN layer for 5 min; starting a MoTe2 target, a Hf target and a C target, adjusting the working air pressure to be 0.5Pa, the bias voltage to be 100V, adjusting the MoTe2 target current to be 90A, the Hf target current to be 30A and the C target current to be 60A, and depositing a MoTeHfC layer for 8 min; and alternately depositing a TiVZnN layer and a MoTeHfC layer until the total thickness of the composite coating is 10 mu m, thus obtaining the wide-temperature-range self-lubricating bearing.
According to the prepared wide-temperature-range self-lubricating bearing, the material of the bearing substrate is GCr15 bearing steel, the surface of the bearing substrate is provided with a micro-texture, and the surface of the micro-texture is provided with a composite coating. The composite coating comprises 10 TiVZnN layers and 10 MoTeHfC layers which are alternately stacked, and the thickness of a single layer of the TiVZnN layer and the MoTeHfC layer is 500 nm. In the TiVZnN layer, the atomic percent of Ti element is 30%, the atomic percent of V element is 20%, the atomic percent of Zn element is 15% and the atomic percent of N element is 35%. In the MoTeHfC layer, the atomic percent of Mo element is 30%, the atomic percent of Te element is 40%, the atomic percent of Hf element is 10%, and the atomic percent of C element is 20%.
Example 2
Preparing a micro-texture on the surface of a bearing substrate by adopting a laser processing technology, wherein the laser power is 30W, the frequency is 10kHz, the scanning speed is 300mm/s, the width of the micro-texture is 100 mu m, and the depth of the micro-texture is 50 mu m; opening the Ti target and the VZnN target, adjusting the working air pressure to be 2.0Pa, the bias voltage to be 300V, adjusting the current of the Ti target to be 150A, adjusting the current of the VZnN target to be 80A, and depositing a TiVZnN layer for 3 min; starting a MoTe2 target, a Hf target and a C target, adjusting the working air pressure to be 2.0Pa, the bias voltage to be 120V, adjusting the MoTe2 target current to be 100A, the Hf target current to be 50A and the C target current to be 50A, and depositing a MoTeHfC layer for 3 min; and alternately depositing a TiVZnN layer and a MoTeHfC layer until the total thickness of the composite coating is 4 mu m, thus obtaining the wide-temperature-range self-lubricating bearing.
According to the prepared wide-temperature-range self-lubricating bearing, the bearing substrate is made of G8Cr4M04V bearing steel, the surface of the bearing substrate is provided with a micro-texture, and the surface of the micro-texture is provided with a composite coating. The composite coating comprises 20 TiVZnN layers and 20 MoTeHfC layers which are alternately stacked, and the thickness of a single layer of the TiVZnN layer and the MoTeHfC layer is 100 nm. In the TiVZnN layer, the atomic percent of Ti element is 50%, the atomic percent of V element is 10%, the atomic percent of Zn element is 10% and the atomic percent of N element is 30%. In the MoTeHfC layer, the atomic percent of Mo element is 40%, the atomic percent of Te element is 40%, the atomic percent of Hf element is 8%, and the atomic percent of C element is 12%.
Example 3
Preparing a micro-texture on the surface of a bearing substrate by adopting a laser processing technology, wherein the laser power is 50W, the frequency is 25kHz, the scanning speed is 100mm/s, the width of the micro-texture is 200 mu m, and the depth of the texture is 200 mu m; opening the Ti target and the VZnN target, adjusting the working air pressure to be 0.5Pa, the bias voltage to be 150V, adjusting the current of the Ti target to be 50A, adjusting the current of the VZnN target to be 60A, and depositing a TiVZnN layer for 5 min; starting a MoTe2 target, a Hf target and a C target, adjusting the working air pressure to be 0.5Pa, the bias voltage to be 100V, adjusting the MoTe2 target current to be 90A, the Hf target current to be 30A and the C target current to be 60A, and depositing a MoTeHfC layer for 8 min; and alternately depositing a TiVZnN layer and a MoTeHfC layer until the total thickness of the composite coating is 10 mu m, thus obtaining the wide-temperature-range self-lubricating bearing.
According to the prepared wide-temperature-range self-lubricating bearing, the material of the bearing substrate is GCr15 bearing steel, the surface of the bearing substrate is provided with a micro-texture, and the surface of the micro-texture is provided with a composite coating. The composite coating comprises 10 TiVZnN layers and 10 MoTeHfC layers which are alternately stacked, and the thickness of a single layer of the TiVZnN layer and the MoTeHfC layer is 500 nm. In the TiVZnN layer, the atomic percent of Ti element is 40%, the atomic percent of V element is 15%, the atomic percent of Zn element is 5% and the atomic percent of N element is 40%. In the MoTeHfC layer, the atomic percent of Mo element is 38%, the atomic percent of Te element is 30%, the atomic percent of Hf element is 12% and the atomic percent of C element is 20%.
Example 4
Preparing a micro-texture on the surface of a bearing substrate by adopting a laser processing technology, wherein the laser power is 1W, the frequency is 10kHz, the scanning speed is 5mm/s, the width of the micro-texture is 10 mu m, and the depth of the micro-texture is 5 mu m; opening the Ti target and the VZnN target, adjusting the working air pressure to be 2.0Pa, the bias voltage to be 300V, adjusting the current of the Ti target to be 150A, adjusting the current of the VZnN target to be 80A, and depositing a TiVZnN layer for 3 min; starting a MoTe2 target, a Hf target and a C target, adjusting the working air pressure to be 2.0Pa, the bias voltage to be 120V, adjusting the MoTe2 target current to be 100A, the Hf target current to be 50A and the C target current to be 50A, and depositing a MoTeHfC layer for 3 min; and alternately depositing a TiVZnN layer and a MoTeHfC layer until the total thickness of the composite coating is 4 mu m, thus obtaining the wide-temperature-range self-lubricating bearing.
According to the prepared wide-temperature-range self-lubricating bearing, the bearing substrate is made of G8Cr4M04V bearing steel, the surface of the bearing substrate is provided with a micro-texture, and the surface of the micro-texture is provided with a composite coating. The composite coating comprises 20 TiVZnN layers and 20 MoTeHfC layers which are alternately stacked, and the thickness of a single layer of the TiVZnN layer and the MoTeHfC layer is 100 nm. In the TiVZnN layer, the atomic percent of Ti element is 50%, the atomic percent of V element is 20%, the atomic percent of Zn element is 10% and the atomic percent of N element is 20%. In the MoTeHfC layer, the atomic percent of Mo element is 40%, the atomic percent of Te element is 38%, the atomic percent of Hf element is 12%, and the atomic percent of C element is 10%.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are intended to further illustrate the principles of the invention, and that various changes and modifications may be made without departing from the spirit and scope of the invention, which is also intended to be covered by the appended claims. The scope of the invention is defined by the claims and their equivalents.

Claims (8)

1. The wide-temperature-range self-lubricating bearing is characterized by comprising a bearing substrate (1), a micro-texture (2) and a composite coating, wherein the micro-texture (2) is arranged on the surface of the bearing substrate (1), and the composite coating is deposited on the surface of the micro-texture (2); the composite coating comprises a first coating (31) and a second coating (32), wherein the first coating (31) and the second coating (32) are alternately superposed; the composite coating comprises at least 10 first coating layers (31) and at least 10 second coating layers (32).
2. The wide temperature range self-lubricating bearing of claim 1, wherein the first coating (31) is a layer of TiVZnN, the second coating (32) is a layer of motefhc, and the first coating (31) and the second coating (32) each have a monolayer thickness of 500nm or less.
3. The wide temperature range self-lubricating bearing according to claim 2, wherein in the first coating (31), the atomic percent of Ti is 30 to 50%, the atomic percent of V is 10 to 20%, the atomic percent of Zn is 5 to 15%, the atomic percent of N is 20 to 40%, and the sum of the atomic percent of Ti, V, Zn, and N is 100%.
4. The wide temperature range self-lubricating bearing according to claim 2, wherein in the second coating (32), the atomic percent of Mo element is 30-40%, the atomic percent of Te element is 30-40%, the atomic percent of Hf element is 8-12%, the atomic percent of C element is 10-20%, and the sum of the atomic percent of Mo element, the atomic percent of Te element, the atomic percent of Hf element, and the atomic percent of C element is 100%.
5. Wide temperature range self-lubricating bearing according to claim 1, characterized in that the bearing base body (1) is made of bearing steel.
6. A method for manufacturing the wide temperature range self-lubricating bearing according to any one of claims 1 to 5, comprising the steps of:
step 1, preparing a micro-texture (2) on the surface of a bearing substrate (1) by adopting a laser processing technology, wherein the laser power is 10-50W, the frequency is 10-20kHz, and the scanning speed is 5-300 mm/s; the width of the microtexture (2) is 10-200 μm, and the depth is 5-200 μm;
and 2, preparing a composite coating on the surface of the microtexture (2) by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition to obtain the wide-temperature-range self-lubricating bearing.
7. The preparation method according to claim 6, wherein the step 2 specifically comprises:
step 21, opening the Ti target and the VZnN target, adjusting the working air pressure to be 0.5-2.5Pa, the bias voltage to be 100-300V, adjusting the current of the Ti target to be 50-160A, adjusting the current of the VZnN target to be 50-100A, and depositing a TiVZnN layer for 2-5 min;
step 22, starting MoTe2Target, Hf target and C target, adjusting the working air pressure to 0.5-2.0Pa, bias voltage to 100-120V, MoTe2 target current to 80-120A, Hf target current to 30-50A and C target current to 50-80A, and depositing MoTeHfC layer for 3-8 min;
and 23, repeating the step 21 and the step 22, and alternately depositing a TiVZnN layer and a MoTeHfC layer to enable the total thickness of the composite coating to be a preset thickness, so as to obtain the wide-temperature-range self-lubricating bearing.
8. The method according to claim 7, wherein the predetermined thickness is 1 to 10 μm.
CN202011346102.0A 2020-11-26 2020-11-26 Wide-temperature-range self-lubricating bearing and preparation method thereof Active CN112610608B (en)

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