CN107245697A - Strengthen the method and hydraulic system friction pair, hydraulic system of hydraulic system friction pair antiwear characteristic - Google Patents
Strengthen the method and hydraulic system friction pair, hydraulic system of hydraulic system friction pair antiwear characteristic Download PDFInfo
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- CN107245697A CN107245697A CN201710348319.7A CN201710348319A CN107245697A CN 107245697 A CN107245697 A CN 107245697A CN 201710348319 A CN201710348319 A CN 201710348319A CN 107245697 A CN107245697 A CN 107245697A
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
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- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
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Abstract
The invention provides the method and hydraulic system friction pair, hydraulic system of enhancing hydraulic system friction pair antiwear characteristic.Hydraulic system friction pair includes first with pair and second with pair, and methods described includes：Cleaning treatment is carried out with secondary matrix to first, the matrix of cleaning is obtained；In clean matrix surface formation metal nitride transition zone；In metal nitride transition layer surface formation fullerene carbon coating.Thus, first thickness is formed uniformly with parabasal body surface, fine and close coating, and Coating Surface Roughness reaches nanometer scale, the bond strength with matrix is high, and wearability is strong, can greatly enhance the antiwear characteristic of hydraulic system friction pair.
Description
Technical field
The present invention relates to hydraulic system technical field, in particular it relates to strengthen the side of hydraulic system friction pair antiwear characteristic
Method and hydraulic system friction pair, hydraulic system.
Background technology
Hydraulic pump and motor are very important parts in Hydraulic Field, are applied in hydraulic system and engineering mechanical device
Extensively, current hydraulic system just develops towards high speed, high-pressure trend and long-life direction.However, in complicated operating condition
Friction pair in lower hydraulic system produces different degrees of wear-out failure, and then reduces performance and the life-span of each part, for example
The problems such as producing leakage and be inefficient.In order to improve the antiwear characteristic of frictional interface, existing frequently-used method is to friction subtabulation
Face carries out Nitrizing Treatment, and carries out chemical silvering modification to lift boundary lubrication Wear vesistance.However, under complicated operating mode
Each crucial friction pair can produce different degrees of wear out failure, for example, occur adhesive wear and abrasion of particles, cause it to use
Restricted lifetime, repair rate is high.
Therefore, the research about strengthening hydraulic system friction pair antiwear characteristic needs to be goed deep into.
The content of the invention
It is contemplated that at least solving one of technical problem in correlation technique to a certain extent.Therefore, the present invention
One purpose is to propose that one kind can strengthen hydraulic system friction pair antiwear characteristic, or extends the method in friction pair life-span.
In one aspect of the invention, the method for hydraulic system friction pair antiwear characteristic is strengthened the invention provides a kind of.
Embodiments in accordance with the present invention, the hydraulic system friction pair includes first with pair and second with pair, and this method includes：To first
Cleaning treatment is carried out with secondary matrix, the matrix of cleaning is obtained；In clean matrix surface formation metal nitride transition zone；
Metal nitride transition layer surface formation fullerene carbon coating.Thus, first is uniform with secondary matrix deposition a layer thickness, causes
Close coating, and Coating Surface Roughness reaches nanometer scale, the bond strength with matrix is high, and wearability is strong, can increase greatly
The antiwear characteristic of strong hydraulic system friction pair.
Embodiments in accordance with the present invention, this method further comprises：Applied second with secondary matrix surface formation aluminum oxide
Layer or silicon nitride coating.
Embodiments in accordance with the present invention, cleaning treatment includes：By first petroleum ether and alcohol are sequentially placed into secondary matrix
It is middle to be cleaned by ultrasonic；Processing will be dried by the first matrix with pair being cleaned by ultrasonic；Pair will be matched somebody with somebody by dry first
Matrix carries out plasma cleaning.
Embodiments in accordance with the present invention, the condition of plasma cleaning is：Vacuum 1.0 × 10-4~1.0 × 10-3Pa；Argon
Gas shielded simultaneously controls air pressure in 5~10Pa；Bias 700~800V；Conduction ratio 0.5~0.8；The plasma cleaning time is 30~60
Minute.
Embodiments in accordance with the present invention, formed the first material with secondary matrix include selected from bearing steel, stainless steel,
At least one of 38CrMoAl, spheroidal graphite cast-iron, common grey iron.
Embodiments in accordance with the present invention, metal nitride transition zone and fullerene carbon coating are by magnetron sputtering vapor
Deposition process formation.
Embodiments in accordance with the present invention, the condition of deposited metal nitride transition layer is：Target is metal material；Bias and be
400~1000V；Working gas is argon gas and nitrogen；Air pressure is 5~10Pa；Sedimentation time is 15~45 minutes.
Embodiments in accordance with the present invention, target is chromium or aluminium.
Embodiments in accordance with the present invention, deposition fullerene carbon coating condition be：Working gas is methane and hydrogen；Gas
Press as 5~10Pa；Sedimentation time is 150~300 minutes.
Embodiments in accordance with the present invention, forming the described second material with secondary matrix includes copper alloy, bearing steel, oxidation
At least one of aluminium and silicon nitride.
Embodiments in accordance with the present invention, the aluminum oxide or silicon nitride coating are by plasma spray coating or chemical gaseous phase
Sedimentation formation.
In another aspect of this invention, the invention provides a kind of hydraulic system friction pair.Embodiments in accordance with the present invention,
Hydraulic system friction pair is obtained after strengthening antiwear characteristic by foregoing method.Thus, hydraulic system friction is matched somebody with somebody
Secondary surface has uniform, the fine and close coating of thickness, and the coating roughness reaches nanometer scale, the bond strength with matrix
Height, wearability is strong, greatly strengthen the antiwear characteristic of hydraulic system friction pair.
In still another aspect of the invention, the invention provides a kind of hydraulic system.Embodiments in accordance with the present invention, the hydraulic pressure
System includes foregoing hydraulic system friction pair.Thus, the antiwear characteristic of the friction pair of the hydraulic system is strong, service life
It is longer.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the method for enhancing hydraulic system friction pair antiwear characteristic in one embodiment of the invention.
Fig. 2 is the flow signal of the method for enhancing hydraulic system friction pair antiwear characteristic in another embodiment of the present invention
Figure.
Fig. 3 is the friction testing schematic diagram of friction pair in another embodiment of the invention.
Fig. 4 be in the embodiment of the present invention 1 fullerene carbon coating friction pair with copper alloy to mill and the hydraulic pressure system of non-coating
System friction pair and comparison diagram of the copper alloy to the coefficient of friction of mill.
Fig. 5 be in the embodiment of the present invention 1 with fullerene carbon coating friction pair to the copper alloy rubbed surface of mill and with not
Comparison diagram of the coatings friction pairs to the copper alloy rubbed surface of mill.
Fig. 6 be in the embodiment of the present invention 2 fullerene carbon coating with bearing steel to mill and fullerene carbon coating and oxidation
Coefficient of friction comparison diagram of the aluminium to mill.
Fig. 7 be in the embodiment of the present invention 2 with fullerene carbon coating to the bearing steel of mill and with fullerene carbon coating pair
The aluminum oxide rubbed surface comparison diagram of mill.
Fig. 8 is the flow signal of the method for enhancing hydraulic system friction pair antiwear characteristic in another embodiment of the present invention
Figure.
Embodiment
Embodiments of the invention are described below in detail.The embodiments described below is exemplary, is only used for explaining this hair
It is bright, and be not considered as limiting the invention.Unreceipted particular technique or condition in embodiment, according to text in the art
Offer described technology or condition or carried out according to product description.Agents useful for same or the unreceipted production firm person of instrument,
For can be by the conventional products of acquisition purchased in market.
In one aspect of the invention, the method for hydraulic system friction pair antiwear characteristic is strengthened the invention provides a kind of.
Embodiments in accordance with the present invention, reference picture 1, this method includes：
S100：Cleaning treatment is carried out with secondary matrix to first, the matrix of cleaning is obtained.Thus, it is possible to effectively remove base
The impurity such as dust, the greasy dirt in body surface face, the performance of formation and raising friction pair beneficial to follow-up coating.
Embodiments in accordance with the present invention, forming the first material with secondary matrix does not have special requirement, art technology
Personnel can flexibly select according to actual conditions.In some embodiments of the invention, the first material with secondary matrix is formed
Including but not limited at least one of bearing steel, stainless steel, 38CrMoAl, spheroidal graphite cast-iron, common grey iron.
Embodiments in accordance with the present invention, reference picture 2, cleaning treatment step includes：
S110：First is sequentially placed into petroleum ether and alcohol with secondary matrix and is cleaned by ultrasonic.
Embodiments in accordance with the present invention, the first time being cleaned by ultrasonic respectively in petroleum ether and alcohol with secondary matrix does not have
There is special limitation, as long as can be cleaned up first with secondary matrix surface, no dirt.In some implementations of the present invention
In example, first is first put into ultrasonic cleaning 20~30 minutes in petroleum ether with secondary matrix, is then transferred into 5~10 points of alcohol washes
Clock.Thus, it is possible to which first is cleaned up with secondary matrix within the most short time.
S120：Processing will be dried by the first matrix with pair being cleaned by ultrasonic.Thus, it is possible to by above-mentioned steps
The petroleum ether or ethanol for staying in matrix surface are removed, and keep matrix surface clean, are carried out beneficial to subsequent step.
Embodiments in accordance with the present invention, first does not have special want with withering condition after secondary matrix cleaning
Ask, those skilled in the art flexibly select according to actual conditions.In some embodiments of the invention, by after cleaning
One is put into drying in 30 DEG C~60 DEG C of drying box with secondary matrix.Thus, it is possible to make the first matrix with pair relatively mild
Rapid draing in environment.
S130：By dry first plasma cleaning will be carried out with secondary matrix.
Embodiments in accordance with the present invention, the first condition with secondary matrix plasma clean has no particular limits, this
Art personnel can flexibly select according to actual conditions.In some embodiments of the invention, the condition of plasma cleaning
For：Dried first is placed in magnetron sputtering C VD equipment with secondary matrix, it is 1.0 × 10 to keep vacuum-4~1.0 ×
10-3Pa, protects in argon gas and controls air pressure in 5~10Pa, 700~800V of bias, under conditions of conduction ratio 0.5~0.8, wait from
Sub- scavenging period is 30~60 minutes.Thus, it is clear to the first further cavity (magnetron sputtering C VD equipment) with secondary matrix
Wash, obtain cleaner first with secondary matrix, make later processing operation more smooth, improve product yield.
S200：In clean matrix surface formation metal nitride transition zone.
Embodiments in accordance with the present invention, forming the method for metal nitride transition zone does not have special limitation, this area skill
Art personnel can flexibly select according to actual conditions.In some embodiments of the invention, metal nitride transition zone is to pass through
The formation of magnetron sputtering vapor deposition process.Thus, technical maturity, simple operation.
Embodiments in accordance with the present invention, forming the condition of metal nitride does not have particular/special requirement, and those skilled in the art can
Flexibly to be selected according to actual conditions.In some embodiments of the invention, the condition of deposited metal nitride transition layer is：Target
Material elects metal material as, in magnetron sputtering C VD equipment, biases as 400~1000V, and working gas is argon gas and nitrogen, air pressure
For 5~10Pa, sedimentation time is 15~45 minutes.Thus, it is possible to be nitrogenized in the short period of time in matrix surface deposited metal
Thing transition zone, and the transition region thickness is uniform, it is fine and close.
Embodiments in accordance with the present invention, the specific metal material of target selection is not particularly limited, and those skilled in the art can be with
Flexibly selected according to actual conditions.In some embodiments of the invention, target is at least one of chromium or aluminium.Thus, should
The adhesion of metal nitride and matrix is stronger, can strengthen the adhesion of fullerene coating and matrix, and with preferable
Anti-wear performance, can greatly improve the antiwear characteristic of hydraulic system friction pair, and extend its service life.
S300：In metal nitride transition layer surface formation fullerene carbon coating.
Embodiments in accordance with the present invention, forming the method for fullerene carbon coating does not have special limitation, art technology
Personnel can flexibly select according to actual conditions.In some embodiments of the invention, fullerene carbon coating is by magnetic control
Sputter CVD method formation.Thus, technical maturity, simple operation.
Embodiments in accordance with the present invention, the condition of deposition fullerene carbon coating does not have particular/special requirement, people in the art
Member can flexibly select according to actual conditions.In some embodiments of the invention, the condition of deposition fullerene carbon coating is：
In methane and hydrogen working environment, air pressure be 5~10Pa under conditions of, deposit 150~300 minutes.Thus, it is possible to shorter
Time in deposit fullerene carbon coating in metal nitride transition layer surface, and fullerene carbon coating thickness is uniform, causes
Close, surface roughness reaches nanometer scale, and wearability is strong, greatly enhances the antiwear characteristic of hydraulic system friction pair.
Embodiments in accordance with the present invention, as long as the thickness of fullerene carbon coating is it is not also specifically limited, disclosure satisfy that increasing
The requirement of strong antiwear characteristic, those skilled in the art can flexibly select as needed.In some embodiments of the invention, class
The thickness of Fullerene Carbon coating can be 0.5~2 micron.Thus, it can both ensure that friction pair had preferable antiwear characteristic, again
Easily come off or waste of materials after coating will not being caused.
Embodiments in accordance with the present invention, reference picture 8, the method for above-mentioned enhancing hydraulic system friction pair antiwear characteristic can be entered
One step includes：
S400：Second with secondary matrix surface formation aluminum oxide coating layer or silicon nitride coating.Thus, fullerene coating
With aluminum oxide coating layer or silicon nitride coating collective effect, can be with the antiwear characteristic of complex intensifying hydraulic system friction pair, wear-resisting spy
Property is significantly improved.
Embodiments in accordance with the present invention, form the second material with secondary matrix also without particular/special requirement, those skilled in the art
Can flexibly it be selected according to actual conditions.In some embodiments of the invention, forming the second material with secondary matrix includes
At least one of copper alloy, bearing steel, aluminum oxide and silicon nitride.Thus, extensively, cost is relatively low for material source.
Embodiments in accordance with the present invention, the method for forming aluminum oxide coating layer or silicon nitride coating is also not particularly limited, this
Art personnel can select any conventional method of this area.In some embodiments of the invention, aluminum oxide coating layer
It is by plasma spray coating or chemical vapour deposition technique formation.Thus, technical maturity, it is easy to operate, it is easy to industrial metaplasia
Production., wherein it is desired to which explanation, when second is aluminum oxide with pair, just no longer needs to carry out aluminum oxide coating layer with secondary to second
Technique.Thus, it is possible to avoid the waste of raw material, technological process is saved.
The present inventor is effectively reduced the abrasion of hydraulic system friction pair using fullerene carbon coating first, and carries
The hydraulic system friction pair and Ceramic Composite anti-attrition for going out to be formed with above-mentioned coating are designed to further lift lubrication property, experiment
As a result surface, coefficient of friction can reduce by 30~50%, and frictional interface is closely without abrasive effect.In addition, in addition it is also necessary to special instruction
It is that the working environment of hydraulic system friction pair and the working environment of other friction pairs are significantly different, such as with hydraulic system friction pair
Material to mill is usually copper alloy, aluminum oxide etc., and the lubricating oil viscosity used is different from general friction pair, and utilizes this hair
Hydraulic system friction pair after bright above method processing, goes for particular job environment of hydraulic system, meets hydraulic pressure
The use requirement of system, while playing the effect of good enhancing antiwear characteristic and greasy property.
In another aspect of this invention, the invention provides a kind of hydraulic system friction pair.Embodiments in accordance with the present invention,
Hydraulic system friction pair is obtained after strengthening antiwear characteristic by foregoing method.Thus, the hydraulic system friction pair
Surface roughness reach nanometer scale, greatly strengthen the antiwear characteristic of hydraulic system friction pair, extend its service life.
In still another aspect of the invention, the invention provides a kind of hydraulic system.Embodiments in accordance with the present invention, the hydraulic pressure
System includes foregoing hydraulic system friction pair.Thus, the antiwear characteristic of the friction pair of the hydraulic system is strong, service life
Greatly prolong, reliability is remarkably reinforced.It will be understood by those in the art that the hydraulic system include foregoing all features and
Advantage, this is no longer going to repeat them.
Embodiment
Embodiment 1
The antiwear characteristic that fullerene carbon coating strengthens friction pair is prepared in high-carbon-chromium bearing steel (GCr15) substrate.
Hydraulic system friction parabasal body is first put into petroleum ether and is cleaned by ultrasonic 20 minutes, alcohol washes 10 are then transferred into
Minute, hydraulic system friction parabasal body is put into 50 DEG C of drying box drying afterwards；The hydraulic system friction parabasal body of drying is put
In magnetron sputtering C VD equipment, vacuumized in cavity up to 1 × 10-4Cavity cleaning is carried out during below Pa, argon gas is protected and controlled
8Pa, biases 800V, conduction ratio 0.8, plasma cleaning 30 minutes；It is target from chromium (Cr), biases 800V, be passed through argon gas
In nitrogen atmosphere, control air pressure is gradually decreased to 10Pa, sedimenting chromium chloride (CrN) coating 30 minutes；Bias 1000V, first are provided
Alkane 10Pa working environment, deposition fullerene carbon coating 200 minutes, obtains the hydraulic system friction of fullerene carbon coating
It is secondary.Exemplar is taken out after cavity cooling and carries out friction testing, shown in friction testing schematic diagram such as Fig. 3 (b), it is copper to choose to mill material
Alloy, and contrasted with GCr15 (shown in friction testing schematic diagram such as Fig. 3 (a)) frictional behavior of non-coating treatment, test knot
Fruit sees Fig. 4 and Fig. 5, wherein, Fig. 4 is hydraulic system friction of the fullerene carbon coating friction pair with copper alloy to mill and non-coating
Secondary and copper alloy is to the comparison diagram of the coefficient of friction of mill, and Fig. 5 is copper alloy rubbed surface comparison diagram, wherein, Fig. 5 (a) is and class
Fullerene Carbon coatings friction pairs are to the copper alloy rubbed surface figure of mill, and Fig. 5 (b) is that the copper alloy of mill is ground with non-coatings friction pairs
Spot shape appearance figure.
As shown in Figure 4, fullerene carbon coating can be obviously promoted the lubricant effect of friction pair, compared to non-coating treatment
GCr15, can at least reduce by 30% using the coefficient of friction of the hydraulic system friction pair of fullerene carbon coating, and then can drop
Friction energy loss and alleviation friction Temperature Rise in low system；As shown in Figure 5, with fullerene carbon to mill, copper alloy mill spot is little, says
Bright fullerene carbon coating has excellent wear-resistant effect.
Embodiment 2
Fullerene carbon coating and antiwear characteristic of the ceramics with secondary complex intensifying friction pair on GCr15 matrixes.
Hydraulic system friction parabasal body is first put into petroleum ether and is cleaned by ultrasonic 30 minutes, alcohol washes 5 are then transferred into
Minute, hydraulic system friction parabasal body is put into 30 DEG C of drying box drying afterwards；The hydraulic system friction parabasal body of drying is put
In magnetron sputtering C VD equipment, vacuumized in cavity up to 1 × 10-4Cavity cleaning is carried out during below Pa, argon gas is protected and controlled
10Pa, biases 700V, conduction ratio 0.8, plasma cleaning 30 minutes；Aluminium (Al) is target, biases 600V, is being passed through argon gas
In nitrogen atmosphere, control air pressure is gradually decreased to 10Pa, cvd nitride aluminium (AlN) coating 25 minutes；Bias 1000V, first are provided
The working environment of alkane, hydrogen 10Pa, deposition fullerene carbon coating 150 minutes, obtains the hydraulic system of fullerene carbon coating
Friction pair.Exemplar is taken out after cavity cooling and carries out friction testing, shown in such as Fig. 3 (c), it is aluminum oxide to choose to mill material, and with
The frictional behavior of fullerene carbon coating and bearing steel is contrasted, and as a result sees Fig. 6 and Fig. 7, wherein, Fig. 6 is fullerene carbon
Coating is with bearing steel to mill and fullerene carbon coating and coefficient of friction comparison diagram of the aluminum oxide to mill, and Fig. 7 is bearing steel and oxygen
Change aluminium rubbed surface comparison diagram, wherein, Fig. 7 (a) is and rubbed surface figure of the fullerene carbon coating to the bearing steel of mill, Fig. 7
(b) it is and rubbed surface figure of the fullerene carbon coating to the aluminum oxide of mill.
It will be appreciated from fig. 6 that the method such as using plasma spraying or chemical deposition is made pottery to the material surface such as bearing steel aluminum oxide
Porcelainization processing so that alumina ceramic coating is combined anti-attrition design of friction pairs with fullerene carbon coating, and there is excellent lubrication to imitate
Really, fullerene carbon coating application effect is efficiently improved, compound antifriction effect is reached.Fullerene carbon coating and aluminum oxide pair
Coefficient of friction can be reduced near 0.07 during mill, compared to fullerene carbon coating and bearing steel or copper alloy to mill, rubbed
Wipe coefficient and at least reduce 50%.Similarly, its anti-attrition characteristic is more prominent, reference picture 7, and surface is almost without mill after friction
Damage.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or the spy that the embodiment or example are described
Point is contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.Moreover, specific features, structure, material or the feature of description can be with office
Combined in an appropriate manner in one or more embodiments or example.In addition, in the case of not conflicting, the skill of this area
Art personnel can be tied the not be the same as Example or the feature of example and non-be the same as Example or example described in this specification
Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changed, replacing and modification.
Claims (10)
1. a kind of strengthen the method for hydraulic system friction pair antiwear characteristic, it is characterised in that the hydraulic system friction pair includes
First matches somebody with somebody pair with pair and second, and methods described includes：
Cleaning treatment is carried out with secondary matrix to described first, the matrix of cleaning is obtained；
In the clean matrix surface formation metal nitride transition zone；
In metal nitride transition layer surface formation fullerene carbon coating.
2. according to the method described in claim 1, it is characterised in that further comprise：Described second with secondary matrix surface
Form aluminum oxide coating layer or silicon nitride coating.
3. according to the method described in claim 1, it is characterised in that the cleaning treatment includes：
Described first is sequentially placed into petroleum ether and alcohol with secondary matrix and is cleaned by ultrasonic；
Processing will be dried by the first matrix with pair being cleaned by ultrasonic；
Plasma cleaning will be carried out with parabasal body by dry first,
It is preferred that, the condition of the plasma cleaning is：
Vacuum 1.0 × 10-4~1.0 × 10-3Pa；
Argon gas is protected and controls air pressure in 5~10Pa；
Bias 700~800V；
Conduction ratio 0.5~0.8；
The plasma cleaning time is 30~60 minutes.
4. according to the method described in claim 1, it is characterised in that forming the described first material with secondary matrix includes being selected from
At least one of bearing steel, stainless steel, 38CrMoAl, spheroidal graphite cast-iron, common grey iron.
5. according to the method described in claim 1, it is characterised in that the metal nitride transition zone and the fullerene carbon
Coating is formed by magnetron sputtering vapor deposition process.
6. method according to claim 5, it is characterised in that the condition of the deposition metal nitride transition zone is：
Target is metal material；
Bias as 400~1000V；
Working gas is argon gas and nitrogen；
Air pressure is 5~10Pa；
Sedimentation time is 15~45 minutes,
It is preferred that, the target be chromium or aluminium,
Optional, the condition for depositing the fullerene carbon coating is：
Working gas is methane and hydrogen；
Air pressure is 5~10Pa；
Sedimentation time is 150~300 minutes.
7. method according to claim 1, it is characterised in that formed the described second material with secondary matrix include copper alloy,
At least one of bearing steel, aluminum oxide and silicon nitride.
8. method according to claim 2, it is characterised in that the aluminum oxide or silicon nitride coating are by plasma spray coating
Or chemical vapour deposition technique formation.
9. a kind of hydraulic system friction pair, it is characterised in that be to strengthen resistance to by the method any one of claim 1-8
Obtained after mill characteristic.
10. a kind of hydraulic system, it is characterised in that including the hydraulic system friction pair described in claim 9.
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