CN112548883A - 研磨砂轮及研磨设备 - Google Patents
研磨砂轮及研磨设备 Download PDFInfo
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- CN112548883A CN112548883A CN202011399035.9A CN202011399035A CN112548883A CN 112548883 A CN112548883 A CN 112548883A CN 202011399035 A CN202011399035 A CN 202011399035A CN 112548883 A CN112548883 A CN 112548883A
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- grinding
- grinding wheel
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- silicon
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- 238000000227 grinding Methods 0.000 title claims abstract description 186
- 239000010703 silicon Substances 0.000 claims abstract description 91
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 88
- 239000002245 particle Substances 0.000 claims abstract description 63
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 58
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 40
- 239000010432 diamond Substances 0.000 claims abstract description 40
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 31
- 239000000654 additive Substances 0.000 claims abstract description 29
- 230000000996 additive effect Effects 0.000 claims abstract description 25
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 23
- 239000011230 binding agent Substances 0.000 claims abstract description 22
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims description 7
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 6
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 6
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 5
- 239000012286 potassium permanganate Substances 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 239000007800 oxidant agent Substances 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 4
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 3
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 3
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 claims description 3
- 239000006061 abrasive grain Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 90
- 230000009471 action Effects 0.000 abstract description 22
- 238000000034 method Methods 0.000 abstract description 21
- 230000008569 process Effects 0.000 abstract description 19
- 239000000126 substance Substances 0.000 abstract description 10
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 56
- 238000005498 polishing Methods 0.000 description 21
- 238000007254 oxidation reaction Methods 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 12
- 230000003647 oxidation Effects 0.000 description 12
- 239000002585 base Substances 0.000 description 8
- 229910052681 coesite Inorganic materials 0.000 description 7
- 229910052906 cristobalite Inorganic materials 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 229910052682 stishovite Inorganic materials 0.000 description 7
- 229910052905 tridymite Inorganic materials 0.000 description 7
- 238000003486 chemical etching Methods 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000001723 curing Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000007790 solid phase Substances 0.000 description 3
- 229910020489 SiO3 Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000009740 moulding (composite fabrication) Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910008045 Si-Si Inorganic materials 0.000 description 1
- 229910006411 Si—Si Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910000421 cerium(III) oxide Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/16—Bushings; Mountings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
- B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
- B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011399035.9A CN112548883A (zh) | 2020-12-02 | 2020-12-02 | 研磨砂轮及研磨设备 |
Applications Claiming Priority (1)
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CN202011399035.9A CN112548883A (zh) | 2020-12-02 | 2020-12-02 | 研磨砂轮及研磨设备 |
Publications (1)
Publication Number | Publication Date |
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CN112548883A true CN112548883A (zh) | 2021-03-26 |
Family
ID=75047761
Family Applications (1)
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---|---|---|---|
CN202011399035.9A Pending CN112548883A (zh) | 2020-12-02 | 2020-12-02 | 研磨砂轮及研磨设备 |
Country Status (1)
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CN (1) | CN112548883A (zh) |
Citations (16)
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CN1951635A (zh) * | 2006-11-08 | 2007-04-25 | 大连理工大学 | 一种硬脆晶体基片超精密磨削砂轮 |
CN1958233A (zh) * | 2006-11-08 | 2007-05-09 | 大连理工大学 | 一种硬脆晶体基片的无损伤磨削方法 |
KR20100062369A (ko) * | 2008-12-02 | 2010-06-10 | 주식회사 실트론 | 연마패드용 드레서 |
CN101780662A (zh) * | 2010-03-17 | 2010-07-21 | 大连理工大学 | 超精密低损伤磨削硅片的软磨料砂轮 |
CN102699826A (zh) * | 2012-06-16 | 2012-10-03 | 大连理工大学 | 一种常温固化结合剂软磨料砂轮 |
CN204976211U (zh) * | 2015-07-03 | 2016-01-20 | 安徽孺子牛轴承有限公司 | 一种实用性强的无心磨床 |
CN205465674U (zh) * | 2016-03-14 | 2016-08-17 | 安徽格楠机械有限公司 | 无齿轮研磨机的研磨液回流槽 |
CN105150091B (zh) * | 2015-07-16 | 2017-05-24 | 河海大学 | 一种用于自动研磨抛光机的研磨抛光装置 |
CN206296811U (zh) * | 2016-11-11 | 2017-07-04 | 丹东太华电热材料有限公司 | 一种设有排屑槽的砂轮 |
CN207656465U (zh) * | 2017-12-05 | 2018-07-27 | 芜湖东旭光电装备技术有限公司 | 研磨器具 |
CN207807472U (zh) * | 2018-01-31 | 2018-09-04 | 禹州七方超硬材料制品有限公司 | 具有波纹状排屑槽的砂轮 |
CN105081962B (zh) * | 2015-07-10 | 2018-10-23 | 河海大学 | 一种用于小样品硬质薄片研磨抛光的装置 |
CN110539209A (zh) * | 2019-08-15 | 2019-12-06 | 大连理工大学 | 一种薄型板状蓝宝石晶片的加工方法 |
CN210255676U (zh) * | 2019-08-09 | 2020-04-07 | 衢州学院 | 蓝宝石切片游离磨料研磨装置 |
CN210790609U (zh) * | 2019-07-23 | 2020-06-19 | 东莞市创盈磨具有限公司 | 电铸砂轮 |
CN211760758U (zh) * | 2020-01-16 | 2020-10-27 | 深圳西斯特科技有限公司 | 一种整体式磨具 |
-
2020
- 2020-12-02 CN CN202011399035.9A patent/CN112548883A/zh active Pending
Patent Citations (16)
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CN1958233A (zh) * | 2006-11-08 | 2007-05-09 | 大连理工大学 | 一种硬脆晶体基片的无损伤磨削方法 |
CN1951635A (zh) * | 2006-11-08 | 2007-04-25 | 大连理工大学 | 一种硬脆晶体基片超精密磨削砂轮 |
KR20100062369A (ko) * | 2008-12-02 | 2010-06-10 | 주식회사 실트론 | 연마패드용 드레서 |
CN101780662A (zh) * | 2010-03-17 | 2010-07-21 | 大连理工大学 | 超精密低损伤磨削硅片的软磨料砂轮 |
CN102699826A (zh) * | 2012-06-16 | 2012-10-03 | 大连理工大学 | 一种常温固化结合剂软磨料砂轮 |
CN204976211U (zh) * | 2015-07-03 | 2016-01-20 | 安徽孺子牛轴承有限公司 | 一种实用性强的无心磨床 |
CN105081962B (zh) * | 2015-07-10 | 2018-10-23 | 河海大学 | 一种用于小样品硬质薄片研磨抛光的装置 |
CN105150091B (zh) * | 2015-07-16 | 2017-05-24 | 河海大学 | 一种用于自动研磨抛光机的研磨抛光装置 |
CN205465674U (zh) * | 2016-03-14 | 2016-08-17 | 安徽格楠机械有限公司 | 无齿轮研磨机的研磨液回流槽 |
CN206296811U (zh) * | 2016-11-11 | 2017-07-04 | 丹东太华电热材料有限公司 | 一种设有排屑槽的砂轮 |
CN207656465U (zh) * | 2017-12-05 | 2018-07-27 | 芜湖东旭光电装备技术有限公司 | 研磨器具 |
CN207807472U (zh) * | 2018-01-31 | 2018-09-04 | 禹州七方超硬材料制品有限公司 | 具有波纹状排屑槽的砂轮 |
CN210790609U (zh) * | 2019-07-23 | 2020-06-19 | 东莞市创盈磨具有限公司 | 电铸砂轮 |
CN210255676U (zh) * | 2019-08-09 | 2020-04-07 | 衢州学院 | 蓝宝石切片游离磨料研磨装置 |
CN110539209A (zh) * | 2019-08-15 | 2019-12-06 | 大连理工大学 | 一种薄型板状蓝宝石晶片的加工方法 |
CN211760758U (zh) * | 2020-01-16 | 2020-10-27 | 深圳西斯特科技有限公司 | 一种整体式磨具 |
Non-Patent Citations (1)
Title |
---|
金钊: "硅片软磨料砂轮的磨削性能研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
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