CN112519385A

CN112519385A - Film peeling device and film peeling method

Info

Publication number: CN112519385A
Application number: CN202010964846.2A
Authority: CN
Inventors: 厨子卓哉
Original assignee: Screen Holdings Co Ltd
Current assignee: Screen Holdings Co Ltd
Priority date: 2019-09-19
Filing date: 2020-09-15
Publication date: 2021-03-19
Also published as: JP2021046300A

Abstract

Provided are a film peeling device and a film peeling method, which can more reliably peel a film from a substrate or more reliably start to stick the substrate to an object to be stuck, in a laminated body composed of the substrate and the film. A peeling apparatus for peeling a film from a substrate with respect to a laminated body composed of the substrate and the film, comprising: a support member that supports an end region, which is a region of a leading end of the laminated body, from below; a stage which is adjacent to the support member and supports a main body region, which is a region other than the end region, of the laminated body from below with the base material side facing downward; a peeling mechanism that peels the film from the substrate from an end region to a main body region in the laminate; the support member has a cylindrical shape, and a cylindrical surface of the support member is formed of a member having adhesiveness.

Description

Film peeling device and film peeling method

Technical Field

The present invention relates to a peeling apparatus and a peeling method for peeling a film from a laminate having a substrate and a film.

Background

Conventionally, a technique of peeling a separator (film) from a sheet-like piece (substrate) disposed on a substrate, and bonding the separator (film) -peeled sheet-like piece (substrate) to another bonding object for transportation is widely known. For example, in patent document 1, an adhesive device that adheres a film taken out from a rolled film to another rolled film is disclosed. The bonding apparatus has a peeling section which peels the sheet-like single sheet from the separator as a pretreatment for the bonding treatment.

In the above-described technique, before starting the bonding, the bonding start end portion of the sheet piece 2 (base material) held on the suction pad member (support member) of the rectangular parallelepiped shape is pressed against the second film to be bonded, and then, before starting the bonding, the suction pad member is moved to the retracted position and the bonding roller is raised, and the bonding start end portion of the sheet piece is pressed against the second film by the bonding roller. Then, by rotating the pasting roller, the rear area of the pasting start end portion of the sheet-like individual piece is pasted to the second film while applying a pressing force.

In such a technique, a region on the tip side of the sheet-like single piece (base material) before the separator (film) is peeled off is supported from below by a rectangular parallelepiped support member (adsorption pad member), and a region other than the tip side of the sheet-like single piece (base material) is supported by a stage adjacent to the support member.

In this case, although the base material is held by the support member by sucking air from the suction holes provided on the upper surface of the support member, in the case where the support member has a rectangular parallelepiped shape, the force acting on the base material when peeling the film may be larger than the holding force of the support member on the base material depending on the position where peeling of the film starts. In this case, air leakage may occur in the suction holes in the upper surface of the support member, and it may be difficult to stably hold the end region of the base material by the support member.

Further, in the case where the support member is of a rectangular parallelepiped shape, since the contact area between the support member and the base material is large, when the support member is retracted before starting the attachment, the base material moves together with the support member, and it may be difficult to smoothly perform the attachment work of the base material. Alternatively, when the driving force for retracting the support member is weak, the support member cannot move against the holding force of the base material, which may cause malfunction of the mechanism unit.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2018-1466 (for example, paragraphs 0070 to 0075, FIGS. 24A to E)

Disclosure of Invention

Problems to be solved by the invention

The present invention has been made in view of the above circumstances, and an object thereof is to provide a technique capable of more reliably peeling a film from a laminate composed of a substrate and a film or more reliably starting to attach a substrate to an attachment object.

Means for solving the problems

The present invention for solving the above-described problems provides a peeling apparatus for peeling a film from a laminate composed of a substrate and the film bonded to the substrate, the peeling apparatus comprising:

a support member that supports an end region, which is a region of a leading end of the laminated body, from below,

a stage that is adjacent to the support member and supports a main region of the laminated body, which is a region other than the end region, from below with one side of the base material facing downward,

a peeling mechanism that peels the film from the substrate from the end region to the main body region in the laminate;

the support member has a cylindrical shape, and a cylindrical surface of the support member is formed of a member having adhesiveness.

That is, in the present invention, the support member is made to have a cylindrical shape, and the cylindrical surface of the support member is made to have adhesiveness. Thus, when the film is peeled off from the substrate, the end region of the substrate can be held more reliably with the adhesive force on the cylindrical surface of the support member. Further, in the case where the support member is retracted before the start of the adhesion of the base material, since the contact area between the support member and the base material is limited, the base material can be prevented from moving together with the support member when the support member is retracted. The "cylindrical shape" as used herein includes not only a hollow cylindrical shape but also a solid cylindrical shape.

In the present invention, a part of the cylindrical surface of the support member may be formed of a second member having lower adhesiveness than the adhesiveness of the member. Thus, the strength of the adhesiveness of the entire support member can be adjusted by appropriately changing the area of the portion formed by the member having adhesiveness and the area of the portion formed by the second member having lower adhesiveness on the cylindrical surface of the support member.

In the present invention, the support member may be provided so as to be rotatable around a central axis of the cylindrical shape. Thus, after the film is peeled off from the substrate, the support member is rotated by itself, whereby the adhesion between the support member and the substrate can be eliminated. In this way, when the support member is retracted, the base material can be more reliably prevented from moving together. In the present invention, a mechanism for actively rotating the support member is not particularly required, and only the support member may be freely rotatable.

In the present invention, the film peeling apparatus further includes a retracting mechanism that retracts the support member in a direction away from the stage in a state where the support member and the stage support the base material from which the film has been peeled,

the retraction mechanism may rotate and move the support member when retracting the support member.

Thus, when the support member is retracted, the support member can be rotated and rolled on the base material as the support member moves. As a result, when the support member is retracted, the substrate can be more reliably prevented from moving together, and the support member can be more reliably retracted.

In the present invention, the retraction mechanism may retract the support member so that the support member moves upward as the support member moves away from the table. When the support member is retracted, the substrate may be caught in the lower side as the support member rotates when the support member is moved horizontally. As a result, defects such as damage and creases occur in the base material. In contrast, in the present invention, when the support member is retracted, the support member moves upward as it moves away from the table. This can reduce the rolling-in of the base material downward with the rotation of the support member, and can suppress the occurrence of defects such as damage or folding of the base material.

In the present invention, when retracting the support member, the trajectory of the movement of the support member may have any one of a straight line shape, a curved shape that is convex downward, and an arc shape that is convex downward.

In the present invention, when retracting the support member, the trajectory of the movement of the support member may be a trajectory in which the deformation of the base material supported by the support member is equal to or less than 0.1mm when retracting the support member. This trajectory, in which the deformation of the substrate supported by the support member is less than or equal to 0.1mm, can also be determined by experiments or simulations. This can more reliably reduce the rolling-in of the base material downward with the rotation of the support member, and can suppress the occurrence of defects such as damage or folding of the base material. Here, 0.1mm is a deformation amount which is a threshold value for preventing the base material from being damaged or folded, and is determined by an experiment or simulation.

In addition, in the present invention, a lock mechanism for restricting rotation of the support member may be further provided. Thus, when the support member is configured to be rotatable, the support member can be locked when the support member is not required to be rotated.

In the present invention, the adhesiveness of the cylindrical surface of the support member is more than 1N/15mm and not more than 3N/15 mm. When the adhesion on the cylindrical surface of the support member is within this range, the substrate can be appropriately held when the film is peeled from the substrate, and a failure that the substrates move together when the support member is retracted can be suppressed.

In addition, in the present invention, the first and second substrates,

the peeling mechanism may also have:

a roller having a cylindrical shape with an axis in a horizontal direction, having adhesiveness on a cylindrical surface thereof, and being rotatable around the axis,

a moving mechanism that moves the roller from the end region in a direction toward the body region,

and a winding mechanism configured to wind a part of the film around the cylindrical surface of the roller by moving the roller by the moving mechanism and rotating the roller around the shaft from a state in which the roller is in contact with the end region of the film.

Thus, when the film starts to be peeled from the substrate, the laminate is sandwiched from above and below by 2 cylinders, and the film in the end region can be appropriately deformed to easily wind the film around the roll.

In addition, according to the present invention, a position where the roller in the peeling mechanism abuts against the film in the end region may be a position shifted toward the main body region side with respect to a position where the support member supports the laminated body.

Thus, when the film starts to be peeled from the substrate, the film is inclined so as to become higher toward the leading end side in the region where the roller and the film are in contact with each other, and the end region of the film can be wound around the roller more smoothly.

Further, the present invention provides a peeling method for peeling a film from a laminate including a substrate and the film bonded to the substrate, the peeling method including:

a supporting step of supporting an end region, which is a region at the tip of the laminated body, from below by a supporting member in a state where one side of the base material is directed downward, and supporting a main body region, which is a region other than the end region, in the laminated body by a stage adjacent to the supporting member,

a peeling step of peeling the film from the substrate from the end region to the main body region in the laminate;

in the supporting step, the laminated body is supported by a supporting member having a cylindrical shape with a cylindrical surface having adhesiveness.

In the above-mentioned peeling method of the present invention,

further comprises a back-off process for the optical fiber,

the retracting step of retracting the support member in a predetermined retracting direction in a state where the support member and the stage support the substrate from which the film is peeled,

in the retracting step, the support member is retracted so as to be moved upward as the support member moves away from the table.

In the present invention, the means for solving the above problems can be implemented in combination as much as possible.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, it is possible to more reliably peel off a film from a laminate composed of a substrate and the film or to more reliably start the adhesion of the substrate to an object to be adhered.

Drawings

Fig. 1 is a diagram showing a schematic configuration of a peeling apparatus in a first embodiment.

Fig. 2 is a diagram showing a schematic configuration of a moving device that moves a peeling unit in the first embodiment.

Fig. 3A and 3B are diagrams showing a schematic configuration of the peeling unit in the first embodiment.

Fig. 4 is a diagram for explaining the operation of the peeling apparatus using the peeling unit in the first embodiment.

Fig. 5 is a diagram for explaining the operation of the peeling apparatus after the protective film is completely peeled from the substrate in the first embodiment.

Fig. 6 is a diagram for explaining an operation when the base material from which the protective film is peeled is bonded to the glass substrate in the first embodiment.

Fig. 7 is a flowchart relating to the process of peeling the protective film from the base material and attaching the base material to the glass substrate in the first embodiment.

Fig. 8 is a flowchart relating to preparation of the glass substrate side in the step of bonding the base material to the glass substrate in the first embodiment.

Fig. 9 is a sectional view of the cleaning device in the first embodiment.

Fig. 10 is a diagram for explaining the operation of the peeling apparatus using the peeling unit in the first embodiment.

Fig. 11 is a perspective view of the support portion in the first embodiment.

Fig. 12 is a diagram for explaining the operation of the support portion after the peeling of the protective film is started in the first embodiment.

Fig. 13 is a diagram for explaining the operation of the support portion in the retracting state in the first embodiment.

Fig. 14 is a diagram for explaining another mode of operation of the support portion in the retracting state in the first embodiment.

Fig. 15 is a diagram for explaining the operation of a peeling apparatus using a peeling unit according to a modification.

Description of the reference numerals

1: a stripping unit,

2a, 2 b: a roller,

4: a shaft,

5: a frame,

6: a linear actuator,

7: a clamping head,

10: a stripping device,

102. 302: a supporting part,

103: a table,

110: a laminate,

111: a protective film,

112: a substrate.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiment described below is one embodiment of the present invention, and does not limit the technical scope of the present invention.

< first embodiment >

First, the overall configuration of a peeling apparatus 10 for peeling a film from a substrate will be described with reference to fig. 1. Fig. 1 is a schematic diagram of the operation of the peeling apparatus 10 in the present embodiment. The peeling apparatus 10 includes: a peeling unit 1 that peels a protective film 111 as a film from a base material 112 in a laminate 110 shown by a broken line in the figure; a support 102 and a stage 103 that support the laminated body 110 from the lower side; a separator 108 for temporarily holding the peeled protective film 111; a waste box 107 for discarding the protective film 111; and a cleaning device 109 for cleaning the peeling unit 1.

In fig. 1, the direction from the support 102 toward the stage 103 is defined as the positive direction in the x direction, the directions from the support 102 and the stage 103 upward in the figure are defined as the positive directions in the z direction, and the width directions of the support 102 and the stage 103 are defined as the positive directions in the y direction. This direction is also the same in the following side view and perspective view. The support portion 102 and the stage 103 are horizontally arranged, and both

upper surfaces

102a and 103a form substantially the same plane. The laminate 110 is placed on the upper surface 102a of the support 102 and the upper surface 103a of the stage 103.

After the protective film 111 is peeled off from the laminate 110 placed on the support portion 102 and the stage 103, when the base material 112 is attached to the attachment object, the support portion 102 is retracted in the negative direction of the y direction. The protective film 111 peeled from the base 110 is temporarily held between the holding

members

108a and 108b on the separator 108. Then, the holding of the protective film 111 by the holding

members

108a and 108b is released, and the protective film 111 is dropped into the waste box 107 and discarded.

Next, fig. 2 shows a schematic configuration of a moving device 20 for moving the peeling unit 1 in the present embodiment. The peeling apparatus 10 of the present invention may have one peeling unit 1, or may have a plurality of peeling units 1. In fig. 2, an example with two peeling units 1 is shown. The mobile device 20 in fig. 2 has three frames, i.e., a first base frame 201, a second base frame 202, and a third base frame 203, and is installed by placing the three frames on a floor. On the upper surface of the first base frame 201, there are a first Rack and pinion mechanism (Rack and pin mechanism)207 and a first linear bearing 205. On the upper surface of the second base frame 202, there are a second rack and pinion mechanism 208 and a second linear motion bearing 206. A third rack and pinion mechanism 209 is provided on the upper surface of the third base frame 203. Further, a third linear motion bearing 210 and a fourth linear motion bearing 211 are provided through the third base frame 203.

The moving device 20 has a moving frame 204, and the moving frame 204 has a gate shape when viewed from the x direction in the drawing. The moving frame 204 is configured by bridging the stay member 204b over 2

column members

204a, 204 a. The 2

column members

204a and 204a are fixed to moving elements (not shown) of the first and second

linear bearings

205 and 206, respectively, and can smoothly move in the x direction (positive direction and negative direction).

Further, the 2

column members

204a and 204a have a first x servomotor 220 and a second x servomotor 221, respectively. The output gears (not shown) of the first x servo motor 220 and the second x servo motor 221 are coupled to rack gears (not shown) of the first rack-and-pinion mechanism 207 and the second rack-and-pinion mechanism 208, respectively. The moving frame 204 can be moved in the x direction (positive direction, negative direction) by driving the first x servomotor 220 and the second x servomotor 221.

In the stay member 204b of the moving frame 204, there are a first y-servomotor 228 and a second y-servomotor 229. The first y ball screw 230 is coupled to an output shaft of the first y servomotor 228. In addition, the second y ball screw 231 is coupled to an output shaft of the second y servomotor 229. Further, the first peeling unit support 222 is coupled to the first y ball screw 230 so as to be movable in the y direction (positive direction, negative direction) in accordance with the rotation of the first y ball screw 230. The second stripping unit support 223 is coupled to the second y ball screw 231 so as to be movable in the y direction (positive direction, negative direction) in accordance with the rotation of the second y ball screw 231.

That is, the first y servomotor 228 is driven to move the first peeling unit support 222 in the y direction (positive direction, negative direction), and the second y servomotor 229 is driven to move the second peeling unit support 223 in the y direction (positive direction, negative direction).

Further, the first peeling unit support 222 has a first z servomotor 224. First z ball screw 226 is coupled to the output shaft of first z servomotor 224. The peeling unit 1 is coupled to the first z ball screw 226, and the peeling unit 1 is movable in the z direction (positive direction, negative direction) by rotating the first z ball screw 226. In addition, a second z servomotor 225 is provided in the second peeling unit support 223. The second z ball screw 227 is coupled to an output shaft of the second z servomotor 225. The peeling unit 1 is also coupled to the second z ball screw 227, and the peeling unit 1 is movable in the z direction (positive direction, negative direction) by rotating the second z ball screw 227.

Therefore, by driving the first z servomotor 224 and the second z servomotor 225, the 2 peeling units 1 can be moved in the z direction (positive direction, negative direction). By driving the first x servomotor 220, the first y servomotor 228, the first z servomotor 224, the second x servomotor 221, the second y servomotor 229, and the second z servomotor 225 by these mechanisms, the 2 peeling units 1 can be freely moved in the three directions (positive direction and negative direction) of x, y, and z.

In the moving device 20, the support portion 102 is placed on the moving elements (not shown) of the third x linear motion bearing 210 and the fourth x linear motion bearing 211. The support portion 102 is supported by the third x-rack and pinion mechanism 209 and a third x-servomotor (not shown) so as to be movable in the x direction (positive direction and negative direction). The stage 103 is also supported by a similar mechanism (not shown) so as to be movable in the x direction (positive direction, negative direction) independently of the support portion 102.

In fig. 2, commands for driving the first x servomotor 220, the first y servomotor 228, the first z servomotor 224, the second x servomotor 221, the second y servomotor 229, and the second z servomotor 225, respectively, are output from the control device 40. The control device 40 is configured by a computer including a CPU, various storage devices, and a communication device, which are not shown, but has the same hardware configuration as a general computer, and therefore, a detailed description thereof is omitted. In the present embodiment, the retraction mechanism includes a third x linear motion bearing 210, a fourth x linear motion bearing 211, a third x rack and pinion mechanism 209, a third x servomotor, and the control device 40.

Fig. 3A and 3B show a schematic structure of the peeling unit 1 for the peeling apparatus 10 in the present embodiment. The peeling unit 1 has the following structure: the shaft 4 as a shaft is fixed to the frame 5, and the

rollers

2a and 2b wound with the protective film 111 are supported by the shaft 4 so as to be rotatable about the shaft 4. Further, a cylindrical or disk-shaped nip receiving portion 3 is provided between the

rollers

2a and 2b, the nip receiving portion 3 is fixed to the shaft 4, and the diameter of the nip receiving portion 3 is slightly smaller than the diameters of the

rollers

2a and 2 b. The

rollers

2a and 2b may rotate integrally or independently. The nip receiving portion 3 may be fixed to the shaft 4, may be independently rotatable about the shaft 4, or may be integrally rotatable with the

rollers

2a and 2 b.

The cylindrical surfaces of the

rollers

2a and 2b are formed of an adhesive rubber such as a butyl rubber or a urethane rubber. The material of the clamping and receiving portion 3 is not particularly limited, but may be formed of a metal such as SUS (Steel Use Stainless) or aluminum, as in the case of the shaft 4. The adhesion of the cylindrical surfaces of the

rollers

2a and 2b may be 1N/15mm or more and 2N/15mm or less. This makes it possible to adhere the protective film 111 to the cylindrical surfaces of the

rollers

2a and 2b with sufficient force, and to more reliably wind the protective film 111 around the cylindrical surfaces of the

rollers

2a and 2 b. The values of the adhesive force of the cylindrical surfaces of the

rollers

2a and 2b, i.e., 1N/15mm and 2N/15mm, indicate the load at which sliding starts when an adherend having an adhesive surface with a width of 15mm (length is 1mm) is stretched in the 180-degree (horizontal) direction.

The hardness of the cylindrical surface of the

rollers

2a and 2b may be 0 ° or more and 20 ° or less. In the case where the cylindrical surface is formed by a rubber (particularly, a butyl-based rubber or a urethane-based rubber), when the hardness of the cylindrical surface is within the above range, higher adhesion is obtained. Therefore, by setting the hardness of the cylindrical surfaces of the

rollers

2a and 2b to 0 ° or more and 20 ° or less, the protective film 111 can be more reliably adhered to the cylindrical surfaces of the

rollers

2a and 2 b.

Further, the linear actuator 6 is fixed to the upper surface 5a of the frame 5. Further, a clamp head 7 is provided on the

rollers

2a and 2b side of the linear actuator 6, and the clamp head 7 is coupled to a moving element of the linear actuator 6. By operating the linear actuator 6, the clamp head 7 is moved to the

rollers

2a and 2b side and brought into contact with the clamp receiving portion 3. The clamp head 7 is biased toward the linear actuator 6 by an elastic member, not shown, and in a state where the linear actuator 6 is not operated, the state where the clamp head 7 is in contact with the clamp receiving portion 3 is released, and the clamp head 7 is moved toward the upper surface 5a of the frame 5 and returned to the initial position.

Fig. 4 shows an operation of the peeling apparatus 10 using the peeling unit 1 in the present embodiment when peeling is performed. Here, as described above, the laminate 110 includes the base 112 and the protective film 111 for protecting the base 112. In addition, the protective film 111 corresponds to a film in the present embodiment. In the present embodiment, the base 112 and the protective film 111 are formed of a PET (polyethylene Terephthalate) film, but the material of the laminate 110 is not limited thereto. The end region 110a, which is the tip end portion of the laminated body 110, is supported by the support portion 102, and the main body region 110b, which is the region other than the end region 110a in the laminated body 110, is supported by the stage 103.

In this case, a plurality of suction holes (not shown) for sucking air may be disposed in the upper surface 102a of the support portion 102 and the upper surface 103a of the stage 103, and the laminated body 110 may be sucked and supported through the suction holes. Further, a sheet of urethane rubber or the like (having suction holes) may be disposed on the upper surface 102a of the support portion 102 or the upper surface 103a of the stage 103, thereby improving adhesion to the laminate 110. Further, the support portion 102 needs to attract the laminate 110 with a force stronger than the adhesive force of the

rollers

2a, 2 b. This is because, as described later, when the protective film 111 is peeled off from the base material 112 by the adhesive force of the

rollers

2a and 2b, it is necessary to prevent the base material 112 from being detached from the upper surface 102a of the support portion 102.

In the present specification, hereinafter, in the protective film 111, regions corresponding to the end region 110a and the main region 110b of the multilayer body 110 are also referred to as an end region 111a and a main region 111b of the protective film 111. Further, in the base material 112, regions corresponding to the end region 110a and the main region 110b of the laminate 110 are similarly referred to as an end region 112a and a main region 112b of the base material 112.

In the peeling apparatus 10, when peeling the protective film 111 from the laminate 110, first, the peeling unit 1 is lowered to bring the surfaces of the

rollers

2a and 2b into contact with the end region 111a of the protective film 111. Then, from this state, the peeling unit 1 is moved in the x direction (positive direction: main body region 111b side) by a predetermined distance. Thus, in part (a) of fig. 4, the

rollers

2a, 2b are rotated clockwise following the movement of the peeling unit 1 and roll on the protective film 111.

At this time, since the

rollers

2a and 2b have adhesive force on their surfaces, the end region 111a of the protective film 111 is wound around the

rollers

2a and 2b and peeled off from the base 112. Here, the predetermined distance is a distance at which the

rollers

2a and 2b are rotated by the movement of the peeling unit 1 to wind the protective film 111 to a position where the protective film can be abutted by the nip head 7. For example, as shown in fig. 3A and 3B, when the chuck head 7 is lowered from the vertically upper side, the predetermined distance is a distance of rotating the rollers 2a and 2B by 180 degrees or more.

Next, in the peeling unit 1, the linear actuator 6 is operated to lower the chuck head 7. Then, the wound protective film 111 is pressed onto the outer circumferential surface of the nip receiving portion 3. In other words, the protective film 111 is held and fixed between the outer peripheral surface of the clip receiving portion 3 and the front end of the clip head 7. At this time, the

rollers

2a and 2b, the nip receiving portion 3, and the nip head 7 are fixed to each other via the protective film 111, and therefore, the rotation of the

rollers

2a and 2b is restricted. Here, in the present embodiment, the linear actuator 6, the clamp head 7, and the clamp receiving portion 3 constitute a clamping mechanism.

Next, as shown in part (b) of fig. 4, in a state where the linear actuator 6 is operated, the peeling unit 1 is moved upward in the z direction (positive direction) and further moved in the x direction (positive direction: the main body region 111b side). Thereby, the protective film 111 is peeled off from the base 112 to a greater extent. At this time, the nip head 7 is continuously in contact with the nip receiving portion 3, and the rotation of the

rollers

2a and 2b is continuously restricted, so that the protective film 111 does not fall off from the peeling unit 1.

In the present embodiment, the clamp head 7 presses the protective film 111 against the outer peripheral surface of the clamp receiving portion 3 from vertically above. However, the direction in which the clamping head 7 presses the protective film 111 is not limited to the vertical direction, and may be appropriately inclined. For example, when the wound protective film 111 is in contact with the frame 5, the protective film 111 may be pressed obliquely from the negative x-direction side of the portion (a) in fig. 4. In the present embodiment, the clip head 7 presses the protective film 111 against the outer peripheral surface of the clip receiving portion 3. However, the object of the clamping head 7 pressing the protective film 111 is not limited thereto. For example, the clamping head 7 may also press the protective film 111 against the cylindrical surface of the

rollers

2a, 2 b. Here, the nip receiving portion 3 is an example of a member other than the roller.

Next, returning to the description of fig. 1, the movement of the peeling unit 1 when peeling the protective film 111 from the base 112 is shown in more detail. In fig. 1, as shown in step S1 in fig. 8, the peeling unit 1 is moved horizontally in the x direction (positive direction: main body region 111b side) from a state in which the

rollers

2a and 2b of the peeling unit 1 are in contact with the end region 112a of the protective film 112. At this point, the end region 111a of the protective film 111 is wound around the

rollers

2a, 2b of the peeling unit 1. After the completion of the movement in step S1, the linear actuator 6 is operated to clamp the protective film 111 between the clamp head 7 and the clamp receiving portion 3, thereby clamping the protective film 111 to the peeling unit 1.

Next, as shown in step S2, the peeling unit 1 moves in the x direction (positive direction) while ascending and descending in the z direction (positive and negative directions). Here, in step S1, although the corner portions of the end regions 111a of the protective film 111 are merely peeled off from the base material 112 by the peeling unit 1, the protective film 111 is peeled off from the base material 112 to a greater extent by the movement of step S2. Further, in step S3, the peeling unit 1 moves in the y direction (positive and negative directions: width direction of the protective film 111), and further moves in the x direction (positive direction). That is, the peeling unit 1 is moved in a meandering manner, whereby the peeling direction in which the protective film 111 is peeled from the base 112 is changed, and the peeling is continued. Therefore, the protective film 111 can be more smoothly peeled off from the base 112.

After step S3, since the protective film 111 is already peeled off in a predetermined area or more, the protective film 111 can be smoothly (smoothly) peeled off only by moving the peeling unit 1 in the x direction (positive direction) in step S4. Then, in step S5, the peeling unit 1 moves the end region 111a of the protective film 111 to the end of the disposal container 107 in the x direction, and sandwiches and holds the end region 111a of the protective film 111 by the holding

members

108a and 108b of the partition 108.

Then, at this point, the operation of the linear actuator 6 of the peeling unit 1 is stopped, and the clamping head 7 is raised, so that the clamping of the protective film 111 by the peeling unit 1 is released. At this point, the entire protective film 111 is peeled off from the base material 112, and a part of the protective film 111 is accommodated in the disposal container 107. Next, the peeling unit 1 is retracted to the initial position. Then, the holding of the protective film 111 by the holding

members

108a and 108b is released. Therefore, the protective film 111 falls into the disposal bin 107 and is disposed of.

Next, the operation of the peeling apparatus 10 after the protective film 111 is completely peeled from the base material 112 will be described with reference to fig. 5. As shown in part (a) of fig. 5, in a state where only the base material 112 is supported by the upper surface 102a of the support portion 102 and the upper surface 103a of the stage 103 as the support members, the base material 112 is imaged by an Alignment camera (Alignment camera)104 as shown in part (a) of fig. 5. That is, the position and angle of the substrate 112 in the x-y plane is acquired using the captured image of the alignment camera 104.

On the other hand, as shown in part (b) of fig. 5, the glass substrate 113 to which the base material 112 is to be attached is in a waiting state for the base material 112 in a state where it is supported by the inversion base 105. In this waiting state, the position and angle of the glass substrate 113 on the x-y plane are acquired. These actions are performed before or in parallel with the peeling action of the protective film 111 from the base material 112. Next, the support 102, the stage 103, and the base 112 after the peeling operation are moved in the x direction (negative direction), and the base 112 is stopped in a state where the base 112 and the glass substrate 113 face each other in parallel at a predetermined distance. Then, the positions and angles of the support 102 and the stage 103 on the x-y plane are corrected by the correction mechanism based on the positions and angles of the base 112 and the glass substrate 113 on the x-y plane acquired as described above. Thereby, an alignment action is performed. Then, the support section 102 releases the support of the end region 112a of the base material 112, and the support section 102 moves in the x direction (negative direction) and retracts. Thereby, the end region 112a of the base material 112 is in a free state.

Next, an operation of attaching the base 112 from which the protective film 111 is peeled to the glass substrate 113 will be described with reference to fig. 6. As shown in fig. 6 (a), the stage 103 is inclined such that the end region 112a of the base material 112 is close to the glass substrate 113. Then, as shown in fig. 6 (b), the pasting roller 106 is raised to paste the end region 112a of the base material 112 onto the glass substrate 113. Then, as shown in fig. 6 (c), the support 102 and the stage 103 move in the x direction (positive direction). Then, the pasting roller 106 rotates to paste the base material 112 onto the glass substrate 113, and moves in the x direction (positive direction) in the same manner as the support portion 102 and the stage 103. This completes the work of bonding the base material 112 to the glass substrate 113.

Fig. 7 and 8 are flowcharts showing a process of peeling the protective film 111 from the base 112 and a process of attaching the base 112 from which the protective film 111 has been peeled to the glass substrate 113. When this flow is executed, first, in step S101, the laminated body 110 is set on the stage 103. At this time, the end region 110a of the laminated body 110 is supported by the upper surface 102a of the support portion 102, and the main body region 110b is supported by the upper surface 103a of the stage 103. This process corresponds to the supporting process in the present embodiment.

Next, in step S102, the peeling unit 1 is lowered, and the

rollers

2a and 2b are brought into contact with the end region 111a of the protective film 111. In the present embodiment, the step S102 corresponds to a roller contact step. Then, in step S103, as shown in fig. 4 (a), the peeling unit 1 is moved to wind the end region 111a of the protective film 111 around the

rollers

2a and 2b, and the linear actuator 6 is operated to clamp the protective film 111 by the clamping head 7. In the present embodiment, this step corresponds to a winding step and a clamping step. Then, as shown in fig. 4 (b), the peeling unit 1 is moved to peel the protective film 111 from the base material 112. In this embodiment, this step corresponds to a peeling step.

Then, in step S104, image data necessary for alignment of the substrate 112 is acquired by the alignment camera 104, and the position and angle of the substrate 112 on the x-y plane are acquired. Next, in step S105, the support 102 and the stage 103 in a state of supporting the base material 112 are horizontally moved to a position directly below the inversion stage 105 supporting the glass substrate 113. Here, the positions and angles of the support 102 and the stage 103 on the x-y plane are corrected based on the information acquired in S104 and the positions and angles of the glass substrate 113 on the x-y plane acquired in S203 described later. Then, in the next step S106, the support portion 102 is retracted in the x direction (negative direction). Thereby, the end region 112a of the base material 112 is in a free state and can be pressed from below by the application roller 106. This process corresponds to the retreat process in this embodiment. Next, in step S107, the stage 103 is tilted clockwise.

Thereby, the end region 112a of the base material 112 is brought closer to the glass substrate 113. Next, in step S108, the joining roller 106 is raised to press the end region 112a of the base 112 against the glass substrate 113. Next, in step S109, the stage 103, the pasting roller 106, and the support portion 102 are moved in the x direction (positive direction). Thereby, the main body region 112b of the base 112 is pressed and bonded to the glass substrate 113 while the bonding roller 106 is moved.

Fig. 8 shows a flow related to the preparation of the glass substrate 113 to which the base material 112 is to be attached. When this flow is executed, in step S201, the glass substrate 113 is set on the inversion stage 105. A plurality of suction holes (not shown) may be provided in the surface of the inversion base 105, and the glass substrate 113 may be sucked and fixed to the inversion base 105 through the plurality of suction holes.

Next, in step S202, the inversion base 105 is inverted vertically. Next, in step S203, an image of the glass substrate 113 is acquired to use the alignment in S104 described above. Then, information of the position and angle of the glass substrate 113 on the x-y plane is acquired from the acquired image data. Further, in step 204, the support 102, the stage 103, and the base 112 after the peeling operation are kept standing by, and a state is waited for in which the base 112 and the glass substrate 113 are opposed to each other by moving the support 102, the stage 103, and the base 112 in the x direction (negative direction).

While the above-described process of peeling the protective film 111 from the base material 112 is repeatedly performed, the peeling unit 1 is periodically or aperiodically moved into the cleaning device 109, which is an example of a cleaning mechanism, to clean the cylindrical surfaces of the

rollers

2a and 2 b. Fig. 9 shows a cross-sectional view of the cleaning device 109. The cleaning device 109 has a structure in which a cleaning roller 109a is provided in a housing 109b, and the cleaning roller 109a is rotatable about an axis parallel to the axis 4 of the peeling unit 1. An adhesive agent having a stronger adhesive force than the cylindrical surfaces of the

rollers

2a and 2b is stuck to the cylindrical surface of the cleaning roller 109 a.

A rotary actuator 109c such as a motor is connected to the cleaning roller 109a, and the cleaning roller 109a can rotate by itself. Then, the peeling unit 1 is lowered into the cleaning device 109, and the cleaning roller 109a is rotated by operating the rotation actuator 109c in a state where the cylindrical surfaces of the

rollers

2a and 2b are brought into contact with the cylindrical surface of the cleaning roller 109 a. In this way, the

rollers

2a and 2b are rotated in a driven manner, and the dust and foreign matter on the cylindrical surfaces of the

rollers

2a and 2b are transferred to the cleaning roller 109a to clean the cylindrical surfaces of the

rollers

2a and 2b, thereby restoring the adhesion force to the cylindrical surfaces of the

rollers

2a and 2 b. Further, the adhesive of the cleaning roller 109a can be replaced, and when the adhesive force of the adhesive itself is decreased, the adhesive can be replaced.

The flowcharts shown in fig. 7 and 8 are stored in the storage device of the control device 40, and command signals necessary for the propulsion flow are also output from the control device 40 to devices other than the mobile device 20 shown in fig. 2. Here, the moving device 20 in fig. 2 is configured as a device capable of moving 2 peeling units 1, but may be configured as a device capable of moving 1 peeling unit 1.

Further, in the above, the peeling mechanism includes the peeling unit 1, the moving device 20 as a moving mechanism that moves the peeling unit 1 in the x direction, and the control device 40 as a winding mechanism.

In the peeling unit 1, the protective film 111 wound around the

rollers

2a and 2b is sandwiched between the nip head 7 and the nip receiving portion 3, and the function of the nip mechanism is exerted, thereby preventing the wound protective film 11 from falling off. However, in the case where the adhesion of the

rollers

2a, 2b is considered to be strong enough so that the protective film 11 does not fall off from the

rollers

2a, 2b during the movement of the peeling unit 1, it is not necessarily required to provide a clamping mechanism.

In the case where the clamping mechanism is not provided, a lock mechanism for restricting rotation of the

rollers

2a and 2b in a state where the protective film 111 is wound may be further provided. As with the gripping mechanism, the locking mechanism may also be formed by a combination of a linear actuator and a locking member. In this case, the lock member may be configured to abut against the flat side surface without abutting against the cylindrical surface of the roller, for example. Alternatively, the rollers may be inserted into holes provided in the

rollers

2a and 2 b.

In the present embodiment, the description has been made of an example in which, in the peeling unit 1, the

rollers

2a and 2b are rotated around the shaft 4 in a driven manner in accordance with the movement of the peeling unit 1 in a state in which the

rollers

2a and 2b are rotatably supported and the

rollers

2a and 2b are in contact with the protective film 111. On the other hand, as shown by the broken line in fig. 9, the peeling unit 1 may have a rotary actuator 2c for rotating the

rollers

2a and 2b, so that the

rollers

2a and 2b can be actively rotated.

In this way, the peeling unit 1 can wind the protective film 111 by actively rotating the

rollers

2a and 2b in a state where the

rollers

2a and 2b are in contact with the protective film 111. In this case, in the cleaning device 109, the cleaning roller 109a may be driven to rotate by actively rotating the

rollers

2a and 2b in a state where the peeling unit 1 is lowered into the cleaning device 109 and the cylindrical surfaces of the

rollers

2a and 2b are in contact with the cylindrical surface of the cleaning roller 109a, without providing the rotation actuator 109c to the cleaning roller 109 a.

The peeling apparatus 10 shown in fig. 1 to 9 has a square-pillar-shaped support portion 102, and the cross-sectional shape of the support portion 102 is rectangular when viewed from the y direction, and after the peeling of the protective film 111 from the base material 112 using the peeling unit 1 is completed, the support portion 102 is retracted in the x direction (negative direction), and the application by the application roller 106 can be started.

Here, as described above, the support portion 102 has a square column shape, and suction holes (not shown) for sucking air are provided in the upper surface 102a of the support portion 102 (or urethane rubber or the like provided in the upper surface 102 a), and a problem when the laminate 110 is sucked to the support portion 102 is considered. In this case, depending on the portion from which the peeling unit 1 starts peeling the protective film 111, the force acting on the base material 112 when peeling the protective film 111 may be larger than the holding force for holding the base material 112 by the suction of the suction holes. In such a case, air leakage may occur in the suction holes, and it may be difficult to stably hold the end region 110a of the laminated body 110 on the support portion 102.

Further, since the contact area between the support portion 102 and the base 112 is large, when the support portion 102 retreats in the x direction (negative direction), the base 112 moves together with the support portion 102, and it may be difficult to smoothly perform the work of attaching the base. In contrast, in the present embodiment, the cross section of the support portion 302 is circular when viewed in the y direction, that is, the support portion 302 is formed in a cylindrical shape, and the cylindrical surface of the support portion 302 is formed of a material having adhesive force.

Fig. 10 shows an operation mode of the peeling unit 1 in the peeling apparatus 30 of the present embodiment. The peeling unit 1 in the present embodiment is the same as that in the first embodiment. The peeling apparatus 30 is different from the peeling apparatus 10 of the first embodiment in that a supporting portion 302 having a cylindrical shape and having an adhesive force on a cylindrical surface is used in the peeling apparatus 30. As shown in fig. 10 (a), in the peeling apparatus 30, the peeling unit 1 is also lowered to bring the surfaces of the

rollers

2a and 2b into contact with the end region 111a of the protective film 111. Then, from this state, the peeling unit 1 is moved in the x direction (positive direction: main body region 111b side). Thereby, the end region 111a of the protective film 111 is wound around the

rollers

2a, 2 b. In addition, the end region 111a of the protective film 111 is clamped by operating the linear actuator 6.

Subsequently, as shown in part (b) of fig. 10, in a state where the linear actuator 6 is operated, the peeling unit 1 is raised in the z direction and further moved in the x direction (positive direction: the main body region 111b side). Thereby, the protective film 111 is peeled from the base material 112 to a wider extent.

According to the present embodiment, the end region 112a of the base material 112 can be held more reliably by the adhesive force on the cylindrical surface of the support portion 302. Further, since the contact area between the support portion 302 and the base material 112 is limited, when the support portion 302 retreats in the x direction (negative direction), the base material 112 can be suppressed from moving together with the support portion 302. In the present embodiment, the adhesion of the support 302 needs to be stronger than the adhesion of the

rollers

2a, 2b of the peeling unit 1. More specifically, when the adhesion of the

rollers

2a, 2b of the peeling unit 1 is 1N/15mm, the adhesion of the supporting portion 302 may also be more than 1N/15mm and 3N/15mm or less. When the adhesion of the

rollers

2a and 2b of the peeling unit 1 is 2N/15mm, the adhesion of the support 302 may be more than 2N/15mm and not more than 3N/15 mm.

That is, when the adhesion of the

rollers

2a and 2b of the peeling unit 1 is 1N/15mm or more and 2N/15mm or less, the range of the adhesion of the supporting portion 302 may be 1N/15mm or more and 3N/15mm or less on the premise that the adhesion is stronger than the adhesion of the

rollers

2a and 2b of the peeling unit 1. Here, the upper limit is set to the adhesion force of the support 302 in order to reliably prevent the base material 112 from moving together with the support 302 when the support 302 retreats in the x direction (negative direction).

Here, when the peeling unit 1 is lowered to bring the

rollers

2a and 2b into contact with the end region 111a of the protective film 111, the position in the x direction of the contact point between the

rollers

2a and 2b and the protective film 111 may be a position shifted in the x direction (positive direction) from the position of the apex (uppermost point) of the support portion 302.

In this way, the base material 112 of the laminated body 110 can be pressed from below by the apex (uppermost point) of the support portion 302, and a position slightly shifted from this position in the x direction (positive direction) can be pressed from above by the

rollers

2a and 2 b. As a result, the protective film 111 is inclined so that the tip end side thereof becomes higher in the region where the

rollers

2a and 2b are in contact with the protective film 111, and the end region of the protective film 111 can be wound around the

rollers

2a and 2b more smoothly.

Fig. 11 shows a perspective view of the support portion 302 in the present embodiment. The cylindrical surface 302a of the support portion 302 in the present embodiment is formed of a rubber material having adhesiveness, such as butyl rubber or urethane rubber. Further, a cover portion 302b is provided to adjust the adhesion of the entire support portion 302. The lid portion 302b may be formed by covering the cylindrical surface 302a with a resin material such as PET (polyethylene Terephthalate) as a second member having low adhesiveness. Accordingly, the adhesion of the entire support portion 302 can be adjusted by changing the area ratio of the surface area of the cover portion 302b to the cylindrical surface 302a of the support portion 302.

In the present embodiment, the basic flow of the step of peeling the protective film 111 from the base 112 and the step of attaching the base 112 from which the protective film 111 has been peeled to the glass substrate 113 follows the flow charts shown in fig. 7 and 8. Fig. 12 shows the operation of the support portion 302 performed between step S103 and step S105 in fig. 7 or before the support portion 302 retracts in step S106. In fig. 12, there is a rotation actuator 303 that rotates the support 302, and after the peeling unit 1 starts winding the protective film 111, the support 302 is rotated clockwise in the drawing.

This can release the adhesion of the support 302 to the base 112, and the support 302 can be easily retracted in the x direction (negative direction) after the peeling unit 1 peels the protective film 111. In this case, the reason why the support portion 302 is rotated in the clockwise direction is that a force for moving the base material 112 in the x direction (positive direction) is generated by rotating the support portion 302 in the clockwise direction, and since the base material 112 is held by the stage 103, the end region 112a of the base material 112 is deformed within an appropriate range, and the adhesion of the support portion 302 to the base material 112 can be smoothly (smoothly) released.

In addition, fig. 13 shows the operation of the supporting portion 302 when the supporting portion retracts in step S106. In this case, when retracting the support portion 302, the support portion 302 is moved in the x direction (negative direction) while being rotated clockwise. Thus, by rotating the support 302, the position of the adhering portion adhering to the base 112 can be moved in the x direction (negative direction), and at the same time, the position of the support 302 is also moved in the x direction (negative direction). As a result, even when the adhesive force between the base material 112 and the support portion 302 is strong, the support portion 302 can be smoothly retracted without applying an excessive load to the base material 112 or deforming the base material 112.

In this case, the linear velocity of the outer periphery of the support portion 302 caused by the rotation of the support portion 302 may be made to coincide with the retraction velocity of the support portion 302 in the x direction (negative direction). Thus, the support portion 302 is in a state of rolling on the lower surface of the base material 112, and therefore, the load applied to the base material 112 and the deformation of the base material 112 can be more reliably suppressed. As a result, it is possible to prevent the base 112 from being damaged or deformed after the support portion 302 is retracted.

In this case, a rotation actuator 303 for rotating the support 302 is provided, and when retracting the support 302, the support 302 may rotate by itself or only the support 302 may be configured to be rotatable around the central axis. By configuring the support portion 302 to be rotatable and retracting the center axis of the support portion 302 in the x direction (negative direction), the support portion 302 can be automatically rotated so that the linear velocity of the outer periphery of the support portion 302 coincides with the retraction velocity of the support portion 302 in accordance with the movement of the support portion 302.

Next, fig. 14 shows another mode of the operation of the support portion 302 when the support portion retracts in step S106. In this embodiment, when retracting the support 302, the support 302 is rotated in the clockwise direction and moved in the x direction (negative direction) and the z direction (positive direction) while moving the support 302 in the clockwise direction in step S106. That is, the center of the support 302 when retracted is indicated as a trajectory inclined upward on the front end side of the base 112.

Accordingly, when the adhesive force between the base material 112 and the support portion 302 is strong or when the base material 112 is thin, the end region 112a of the base material 112 is rolled in the z direction (negative direction) which is the lower side with the rotation of the support portion 302, and thus a defect such as the end region 112a of the base material 112 being broken can be more reliably suppressed.

In this case, as examples of the trajectory of the support portion 302 directed obliquely upward, a curved trajectory projecting downward, an arc-shaped trajectory projecting downward, and the like may be given in addition to a straight trajectory. Alternatively, the trajectory along which the end region 112a of the base material 112 is not deformed may be obtained in advance by experiments or simulations. In this case, as the trajectory of the support portion 302 directed obliquely upward, a trajectory in which the deformation amount of the end region 112a of the base material 112 is 0.1mm or less may be obtained. This can more reliably suppress the end region 112a of the base material 112 from being broken or damaged. In addition, even when the gap between the glass substrate 113 disposed on the upper side and the base material 112 is about 0.2mm to 0.3mm, the base material 112 and the glass substrate 113 can be prevented from coming into contact with each other. In this case, a rotation actuator 303 that rotates the support 302 may be provided, and when retracting the support 302, the support 302 may rotate by itself, or only the support 302 may be configured to be rotatable about the central axis.

The support 302 in the present embodiment may also include a lock mechanism (not shown) that restricts rotation of the support 302 about its central axis. The lock mechanism may be a mechanism in which a linear actuator and a lock member are combined. In this case, the lock member may be brought into contact with, for example, a cylindrical surface of the roller by operating the linear actuator. Alternatively, the roller may be configured to abut against a planar side surface (corresponding to the bottom surface of the cylinder) instead of the cylindrical surface of the roller. Further, the lock member may be inserted into a hole provided on one surface of the support portion 302.

In the present embodiment, in order to more reliably support the laminated body 110 by the support portion 302, a mechanism and a process for pressing the laminated body 110 toward the support portion 302 side after placing the laminated body 110 on the support portion 302 may be added to the process of step S101 in fig. 5. The mechanism and the process may be a process of pressing the laminate 110 onto the supporting portion 302 side with a prescribed pressing force by the peeling unit 1.

In the above-described embodiment, the description has been given on the premise that the protective film 111 is peeled off from the base 112 and the base 112, which is a flexible PET film, is attached to the glass substrate 113, but the application of the present invention is not limited to this case. For example, the present invention can also be applied to a laminate using a hard glass substrate as a base material. Further, a laminate formed in a roll shape may also be applied.

< modification example >

Next, a modification of the peeling apparatus to which the present invention is applied will be described with reference to fig. 15. In the present modification, the conventional rectangular parallelepiped support portion 102 is used as the support portion 102, but when the present invention is applied, a cylindrical support portion such as the support portion 302 is used as the support portion 102, and the support portion 302 operates as described in the first embodiment. Fig. 15 is a schematic diagram of an operation of the peeling apparatus 100 according to a modification. The peeling apparatus 100 includes a peeling unit 101, a support 102, and a stage 103, as in the first embodiment. The laminate 110 is placed on the upper surface 102a of the support 102 and the upper surface 103a of the stage 103. The structures of the laminate 110, the support 102, and the stage 103 are the same as those of the first embodiment, and therefore, detailed description thereof is omitted.

In the peeling apparatus 100 of the modification shown in fig. 15, the adhesive tape 101a is held in the peeling unit 101. When the protective film 111 is peeled off from the base 112, the peeling unit 101 is lowered to the vicinity of the end region 111a of the protective film 111, and the adhesive surface of the tape 101a is brought into contact with and adhered to the end region 111a of the protective film 111. Then, as shown in part (a) of FIG. 15, the peeling unit 101 moves in the x direction (positive direction: main body region 111b side). Next, as shown in fig. 15 (a), the height of the peeling unit 101 is raised and the peeling unit 101 is further moved in the x direction (positive direction). Thereby, the protective film 111 is peeled off from the wide region from the end region 112a to the main region 112b of the base material 112.

Claims

1. A peeling apparatus for peeling a film from a laminate composed of a substrate and the film bonded to the substrate, the peeling apparatus comprising:

a stage which is adjacent to the support member and supports a main body region, which is a region other than the end region, of the laminated body from below in a state where one side of the base material is directed downward, and

2. The peeling apparatus as claimed in claim 1,

a part of the cylindrical surface of the support member is formed by a second member having lower adhesiveness than the member has.

3. The peeling apparatus as claimed in claim 1,

the support member is provided so as to be rotatable around a central axis of the cylindrical shape.

4. The peeling apparatus as claimed in claim 3,

further comprising a retracting mechanism for retracting the support member in a direction away from the stage in a state where the support member and the stage support the base material from which the film has been peeled,

the retraction mechanism moves the support member while rotating the support member when retracting the support member.

5. The peeling apparatus as claimed in claim 4,

the retraction mechanism retracts the support member so that the support member moves upward as the support member moves away from the table.

6. The peeling apparatus as claimed in claim 5,

when retracting the support member, a trajectory along which the support member moves has any one of a linear shape, a curved shape that is convex downward, and an arc shape that is convex downward.

7. The peeling apparatus as claimed in claim 5,

when the support member is retracted, the trajectory along which the support member moves is a trajectory along which the deformation of the substrate supported by the support member is less than or equal to 0.1mm when the support member is retracted.

8. The peeling apparatus as claimed in any one of claims 3 to 7,

there is also a locking mechanism that limits rotation of the support member.

9. The peeling apparatus as claimed in any one of claims 1 to 7,

the adhesiveness of the cylindrical surface of the support member is greater than 1N/15mm and not more than 3N/15 mm.

10. The peeling apparatus as claimed in any one of claims 1 to 7,

the peeling mechanism includes:

a moving mechanism that moves the roller from the end region in a direction toward the body region, an

11. The peeling apparatus as claimed in claim 10,

the position at which the roller of the peeling mechanism abuts against the film of the end region is a position offset toward the main body region side with respect to a position at which the support member supports the laminated body.

12. A peeling method for peeling a film from a laminate composed of a substrate and the film bonded to the substrate, the peeling method comprising:

a supporting step of supporting an end region, which is a region of a leading end of the laminated body, from below by a supporting member in a state where one side of the base material is directed downward, and supporting a main body region, which is a region other than the end region, of the laminated body by a stage adjacent to the supporting member, and

13. The peeling method according to claim 12,

further comprises a back-off process for the optical fiber,

a retracting step of retracting the support member in a predetermined retracting direction while the support member and the stage support the substrate from which the film has been peeled;