CN112511128A - 一种具有poi结构的兰姆波谐振器及其制造方法 - Google Patents
一种具有poi结构的兰姆波谐振器及其制造方法 Download PDFInfo
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- CN112511128A CN112511128A CN202011374849.7A CN202011374849A CN112511128A CN 112511128 A CN112511128 A CN 112511128A CN 202011374849 A CN202011374849 A CN 202011374849A CN 112511128 A CN112511128 A CN 112511128A
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN202011374849.7A CN112511128A (zh) | 2020-11-30 | 2020-11-30 | 一种具有poi结构的兰姆波谐振器及其制造方法 |
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CN202011374849.7A CN112511128A (zh) | 2020-11-30 | 2020-11-30 | 一种具有poi结构的兰姆波谐振器及其制造方法 |
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CN202011374849.7A Pending CN112511128A (zh) | 2020-11-30 | 2020-11-30 | 一种具有poi结构的兰姆波谐振器及其制造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114726334A (zh) * | 2022-04-28 | 2022-07-08 | 重庆大学 | 一种声波谐振器及其制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008070669A2 (en) * | 2006-12-05 | 2008-06-12 | Miradia Inc. | Method and apparatus for mems oscillator |
WO2016047255A1 (ja) * | 2014-09-26 | 2016-03-31 | 国立大学法人東北大学 | 弾性波装置 |
CN111416590A (zh) * | 2020-03-31 | 2020-07-14 | 中国科学院上海微***与信息技术研究所 | 一种高频声波谐振器及其制备方法 |
-
2020
- 2020-11-30 CN CN202011374849.7A patent/CN112511128A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008070669A2 (en) * | 2006-12-05 | 2008-06-12 | Miradia Inc. | Method and apparatus for mems oscillator |
WO2016047255A1 (ja) * | 2014-09-26 | 2016-03-31 | 国立大学法人東北大学 | 弾性波装置 |
CN111416590A (zh) * | 2020-03-31 | 2020-07-14 | 中国科学院上海微***与信息技术研究所 | 一种高频声波谐振器及其制备方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114726334A (zh) * | 2022-04-28 | 2022-07-08 | 重庆大学 | 一种声波谐振器及其制造方法 |
CN114726334B (zh) * | 2022-04-28 | 2023-08-08 | 重庆大学 | 一种声波谐振器及其制造方法 |
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Effective date of registration: 20210707 Address after: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangna Technology Development Co.,Ltd. Address before: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong guangnaixin Technology Co.,Ltd. |
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Effective date of registration: 20210812 Address after: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute Address before: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangna Technology Development Co.,Ltd. |
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Effective date of registration: 20210909 Address after: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong guangnaixin Technology Co.,Ltd. Address before: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute |