CN112496528A - Light path component, laser cutting head and laser cutting equipment - Google Patents

Light path component, laser cutting head and laser cutting equipment Download PDF

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Publication number
CN112496528A
CN112496528A CN202011207863.8A CN202011207863A CN112496528A CN 112496528 A CN112496528 A CN 112496528A CN 202011207863 A CN202011207863 A CN 202011207863A CN 112496528 A CN112496528 A CN 112496528A
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lens
concave
laser
laser beam
bessel
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Inventor
邹武兵
李璟
张德安
段家露
吴飞龙
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Shenzhen Inte Laser Technology Co ltd
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Shenzhen Inte Laser Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lenses (AREA)

Abstract

The invention provides a light path component, a laser cutting head and laser cutting equipment, wherein the light path component comprises a laser light path, a Bessel beam generator, a collimating mirror and a focusing mirror, the laser light path is provided with an incident end and an emergent end, the Bessel beam generator for converting a Gaussian laser beam into a Bessel laser beam comprises a first concave conical lens and outputs the first laser beam towards the emergent end, and the Bessel laser beam is positioned on one side far away from the emergent end of the first concave conical lens; the collimating lens is used for collimating the first laser beam and is arranged on one side far away from the incident end of the Bessel light beam generator; the focusing mirror is used for focusing the laser beam. The laser cutting equipment and the laser cutting head of this embodiment are through setting up the light path subassembly in above-mentioned embodiment, satisfying the output and can cutting for example under the prerequisite of the outgoing laser beam of transparent components such as glass, the optical total length of laser cutting head is irrelevant with the structural parameter of Bessel beam generator, and inner structure is simple simultaneously, the assembly of being convenient for, excellent in use effect.

Description

Light path component, laser cutting head and laser cutting equipment
Technical Field
The invention relates to the technical field of laser cutting, in particular to a light path component, a laser cutting head and laser cutting equipment.
Background
In the prior art, generally, a cutter wheel cutting and a laser cutting are adopted for cutting transparent materials such as glass, and the laser cutting has the advantages of high precision, high efficiency and the like, so that the occupation ratio of laser cutting equipment in the field of cutting of transparent materials is continuously improved.
The traditional laser cutting equipment mostly uses a convex conical lens with the cone apex angle ranging from 170 degrees to 180 degrees, and after a laser beam passes through the convex conical lens, a Bessel light beam generated by the convex conical lens is positioned in an area close to one side of a light beam emitted by the convex conical lens, and after the relay lens and the focusing lens are matched, the whole light path length is longer, so that the whole volume of the laser cutting equipment is larger, the integration of a laser cutting head in the laser cutting equipment is not facilitated, the difficulty of precision control of the laser cutting equipment is also improved on the other hand, and the using effect is poorer.
Therefore, a new laser cutting device is needed to be designed to change the current situation.
Disclosure of Invention
In view of this, the invention provides an optical path component, a laser cutting head and a laser cutting device, which are used for solving the problem that the overall size of the traditional laser cutting device is large.
The invention provides a light path component, comprising:
the laser light path is provided with an incident end and an emergent end, and laser beams enter the light path component from the incident end and are emitted from the emergent end;
the Bessel light beam generator comprises a first concave conical lens and is used for converting the Gaussian laser beam into a Bessel laser beam and outputting the first laser beam towards the emergent end; the Bessel light beam is positioned on one side of the first concave conical lens, which is far away from the emergent end;
the collimating mirror is arranged on one side far away from the incident end of the Bessel light beam generator and is used for collimating the first laser beam and outputting a second laser beam to the emergent end; and
and the focusing mirror is arranged on one side, far away from the collimating mirror, of the incident end and is used for focusing the second laser beam and outputting an emergent laser beam from the emergent end.
In some embodiments of the invention, the collimating mirror and the focusing mirror are both convex lenses.
In some embodiments of the present invention, the convex surface of the collimating lens and the convex surface of the focusing lens are both disposed toward a side away from the exit end, and the concave portion of the first concave conical lens is located at a side away from the exit end.
In some embodiments of the present invention, a distance from the first concave axicon to the collimator lens is less than a focal length of the collimator lens.
In some embodiments of the present invention, a line length of the bessel laser beam on the laser optical path is L, and the line length L is represented by the formula:
Figure BDA0002757698490000021
obtaining; wherein D is the beam diameter of the laser beam, theta is the cone apex angle of the first concave axicon lens, and n is the refractive index of the first concave axicon lens.
In some embodiments of the present invention, the bessel beam generator further comprises a second concave axicon, the second concave axicon is disposed on a side of the first concave axicon away from the exit end, and a concave portion of the second concave axicon is disposed on a side away from the entrance end, the bessel beam is at least partially disposed on a side of the second concave axicon away from the exit end; the distance from the second concave conical lens to the collimating mirror is smaller than the focal length of the collimating mirror.
In some embodiments of the present invention, a line length of the bessel beam on the laser light path is L, and the line length L is represented by the formula:
Figure BDA0002757698490000022
obtaining; wherein D is a beam diameter of the laser beam, θ1Is the cone apex angle, theta, of the first concave axicon lens2The vertex angle of the second concave axicon lens is shown, and n is the refractive index of the first concave axicon lens and the second concave axicon lens.
In some embodiments of the present invention, the bessel beam generator further includes a convex conical lens, the convex conical lens is disposed on a side of the first concave conical lens away from the incident end, and a convex portion of the convex conical lens is located on a side close to the first concave conical lens, and a cone vertex angle of the first concave conical lens is not equal to a cone vertex angle of the convex conical lens.
In some embodiments of the present invention, a line length of the bessel beam on the laser light path is L, and the line length L is represented by the formula:
Figure BDA0002757698490000031
obtaining; wherein D is the beam diameter of the laser beam, beta1Is the cone apex angle, beta, of the first concave axicon lens2The refractive index of the first concave conical lens is the conical vertex angle of the convex conical lens, and n is the refractive index of the first concave conical lens and the convex conical lens.
In some embodiments of the invention, the energy of the laser beam is IiThe energy I of the emergent beamoBy the formula:
Figure BDA0002757698490000032
and (6) obtaining.
In some embodiments of the invention, the depth of focus δ of the optical path component is determined by the formula:
Figure BDA0002757698490000033
obtaining; wherein M is the magnification of the optical path component, f1Is the focal length of the collimating mirror, f2Is the focal length of the focusing lens.
The invention also provides a laser cutting head comprising the optical path component.
The invention also provides laser cutting equipment which comprises the laser cutting head.
The embodiment of the invention has the following beneficial effects:
in the light path component of this example, a laser beam can enter a laser light path from an incident end, and in the process of transmitting the laser beam on the laser light path, a bessel beam generator with a first concave conical lens can form a bessel laser beam and a first beam output along the laser light path on one side of the first concave conical lens away from an exit end, a collimating mirror can collimate the first laser beam and output a second laser beam, and a focusing mirror can focus the second laser beam and output the exit laser beam, so that the laser cutting function is realized through the exit beam. The laser cutting equipment and the laser cutting head of this embodiment are through setting up the light path subassembly in above-mentioned embodiment, satisfying the output and can cutting for example glass and the like transparent component under the prerequisite of the outgoing beam, the optical total length of laser cutting head is irrelevant with Bessel beam generator's structural parameter, and inner structure is simple simultaneously, the assembly of being convenient for, excellent in use effect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Wherein:
fig. 1 is a schematic structural diagram of an optical path component in a first embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an optical circuit assembly according to a second embodiment of the present invention;
fig. 3 is a schematic structural diagram of an optical path component in a third embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention also provides a laser cutting apparatus comprising a laser cutting head having an optical path assembly 10. Referring to fig. 1, the optical path assembly 10 includes a laser path 100, a bessel beam generator, a collimating mirror 300, and a focusing mirror 400.
Referring to fig. 1, the laser light path 100 has an incident end 110 and an exit end 120, and a laser beam enters the light path assembly 10 from the incident end 110 and exits from the exit end 120; the bessel beam generator includes a first concave axicon lens 210 for converting the gaussian laser beam into a bessel laser beam 240 and outputting a first laser beam 250 towards the exit end 120; the bessel laser beam 240 is positioned on the side of the first concave conical lens 210 away from the exit end 120; the collimating mirror 300 is arranged at a side far away from the incident end 110 of the bessel beam generator, and the collimating mirror 300 is used for collimating the first laser beam 250 and outputting a second laser beam 310 towards the exit end 120; the focusing mirror 400 is disposed on a side of the collimating mirror 300 away from the incident end 110, and the focusing mirror 400 is configured to focus the second laser beam 310 and output an emergent laser beam 410 from the emergent end 120.
In the optical path component 10 of the present example, a laser beam may enter the laser optical path 100 from the incident end 110, and during the transmission of the laser beam on the laser optical path 100, the bessel beam generator having the first concave axicon 210 may be formed with a bessel laser beam 240 and a first laser beam 250 output along the laser optical path 100 on a side away from the exit end 120 of the first concave axicon 210, the collimating mirror 300 may collimate the first laser beam 250 and output a second laser beam 310, and the focusing mirror 400 may focus the second laser beam 310 and output an exit laser beam 410, so as to implement a laser cutting function by the exit laser beam 410. According to the laser cutting equipment and the laser cutting head in the embodiment, by arranging the light path component 10 in the embodiment, on the premise that the output of the emergent light beam 410 capable of cutting transparent elements such as glass is met, the total optical length of the laser cutting head is irrelevant to the structural parameters of the Bessel light beam generator, and meanwhile, the laser cutting equipment and the laser cutting head are simple in internal structure, convenient to assemble and good in using effect.
Specifically, in some embodiments, the collimating mirror 300 and the focusing mirror 400 are both convex lenses. In some other embodiments, the collimating lens 300 and the focusing lens 400 can be configured as a convex cone lens or the like according to requirements.
Further, in some embodiments, referring to fig. 1 to 3, the convex surface of the collimating lens 300 and the convex surface of the focusing lens 400 are both disposed toward the side away from the exit end 120, and the concave portion of the first concave conical lens 210 is disposed at the side away from the exit end 120.
Referring to fig. 1, in the first embodiment, the distance from the first concave conical lens 210 to the collimating mirror 300 is smaller than the focal length of the collimating mirror 300. The line length of the bessel laser beam 240 on the laser optical path 100 is L, and the line length L is expressed by the formula:
Figure BDA0002757698490000061
obtaining; where D is a beam diameter of the laser beam, θ is a cone vertex angle of the first concave axicon 210, and n is a refractive index of the first concave axicon 210. The focusing lens 400 may be an optical lens having a large relative aperture and a strictly corrected spherical aberration.
After the laser beam passes through the first concave conical lens 210, a virtual image is formed on the side of the first concave conical lens 210 close to the incident end 110, that is, a "virtual" bessel laser beam 240 is generated in the image space, and the front focal point of the collimating mirror 300 coincides with the end point of the bessel laser beam 240 on the side close to the exit end 120. The distance between the first concave axicon lens 210 and the collimating mirror 300 is determined by the focal length of the collimating mirror 300, and is independent of the size of the cone vertex angle of the first concave axicon lens 210.
During the transmission of the laser beam in the optical path assembly 10, the outgoing beam 410 forms a "filiform line" in the depth direction and has a focal spot with an extremely high peak power density; the collimating lens 300 and the focusing lens 400 form a beam-shrinking keplerian telescope system, which is used for compressing the line length L of the bessel laser beam 240 generated by the bessel beam generator on the one hand, and for expanding the aperture of the bessel laser beam 240 on the other hand, and all the purposes of achieving the purpose of obtaining energy as high as possible at the required focal depth are achieved.
In the second embodiment, referring to fig. 2, compared to the first embodiment, the bessel beam generator further includes a second concave axicon 220, the second concave axicon 220 is disposed on a side of the first concave axicon 210 away from the exit end 120, a concave portion of the second concave axicon 220 is disposed on a side away from the incident end 110, and the bessel beam 240 is at least partially disposed on a side of the second concave axicon 220 away from the exit end 120; the distance from the second concave conical lens 220 to the collimating mirror 300 is smaller than the focal length of the collimating mirror. The line length of the bessel laser beam 240 on the laser optical path 100 is L, and the line length L is expressed by the formula:
Figure BDA0002757698490000062
obtaining; where D is the beam diameter of the laser beam, θ1Is the vertex angle, θ, of the first concave axicon lens 2102Is the vertex angle of the second concave axicon lens 220, and n is the refractive index of the first concave axicon lens 210 and the second concave axicon lens 220.
It should be noted that, in the present embodiment, in some embodiments, the separation distance between the first concave axicon lens 210 and the second concave axicon lens 220 is greater than 5 mm. In other embodiments, since the size of the space between the first concave axicon 210 and the second concave axicon 220 does not affect the performance of the laser cutting head, the specific size can be selected according to the requirement, and is not limited herein.
In this embodiment, when the focal length of the collimating mirror 300 is longer, the front focal point of the collimating mirror 300 can be located at the left side of the first concave axicon lens 210, and the size of the space between the first concave axicon lens 210 and the collimating mirror 300 is smaller than the angle of the collimating mirror 300; the size of the space between the first concave axicon lens 210 and the collimating mirror 300 is determined by the focal length of the collimating mirror 300, and is independent of the size of the vertex angle of the first concave axicon lens 210 and the second concave axicon lens 220. And the line length of the bessel laser beam 240 formed in the present embodiment is longer than that in the first embodiment.
In the third embodiment, referring to fig. 3, compared to the first embodiment, the bessel beam generator further includes a convex axicon lens 230, the convex axicon lens 230 is disposed on a side of the first concave axicon lens 210 away from the incident end 110, a convex portion of the convex axicon lens 230 is disposed on a side close to the first concave axicon lens 210, and a cone vertex angle of the first concave axicon lens 210 is not equal to a cone vertex angle of the convex axicon lens 230. The line length of the bessel laser beam 240 on the laser optical path 100 is L, and the line length L is expressed by the formula:
Figure BDA0002757698490000071
obtaining; wherein D is the beam diameter of the laser beam, beta1Is the vertex angle, β, of the first concave axicon lens 2102Is the apex angle of the convex axicon lens 230, and n is the refractive index of the first concave axicon lens 210 and the convex axicon lens 230.
In the present embodiment, the size of the space between the first concave axicon 210 and the convex axicon 230 is preferably greater than 5 mm. In other embodiments, since the size of the space between the first concave axicon 210 and the convex axicon 230 does not affect the performance of the laser cutting head, the specific size can be selected according to the requirement, and is not limited herein.
It should be noted that, in this embodiment, when the cone vertex angle of the first concave conical lens 210 is greater than the cone vertex angle of the convex conical lens 230, the front focal point of the collimating mirror 300 is located between the first concave conical lens 210 and the convex conical lens 230, that is, the convex conical lens 230 is located in the front focal length interval of the collimating mirror 300; it is to be noted that when the vertex angle of the first concave axicon lens 210 is equal to the vertex angle of the convex axicon lens 230, the optical path component 10 does not generate the bessel laser beam 240.
In any of the above embodiments, the depth of focus δ of the optical path assembly 10 is determined by the formula:
Figure BDA0002757698490000081
obtaining; where M is the magnification of the optical path assembly 10, f1Is the focal length of the collimating mirror 300, f2Is the focal length of the focusing mirror 400.
In addition, the energy of the laser beam entering the optical path assembly 10 is IiThen the energy I of the outgoing laser beam 410 at the depth of focus δ is requiredoBy the formula:
Figure BDA0002757698490000082
and (6) obtaining.
It should be noted that, in the laser cutting apparatus provided by the present invention, the laser cutting head in each embodiment has the advantages of compact optical path structure, simple internal structure, etc., so that the laser cutting apparatus has smaller volume, is convenient for assembly, transportation and use, and is easy to integrate into a laser cutting head, the laser cutting head has light weight and good laser processing effect, the optical path length of the laser cutting head is independent of the cone apex angle of the conical lens in the bessel beam generator, and the components in the bessel beam generator can be directly replaced to realize the function of cutting at different focal depths.
The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention, and it is therefore to be understood that the invention is not limited by the scope of the appended claims.

Claims (13)

1. An optical circuit assembly, comprising:
the laser light path is provided with an incident end and an emergent end, and laser beams enter the light path component from the incident end and are emitted from the emergent end;
a Bessel beam generator including a first concave conical lens, the Bessel beam generator being configured to convert the laser beam into a Bessel laser beam and output the first laser beam toward the exit end; the Bessel laser beam is positioned on one side far away from the emergent end of the first concave conical lens;
the collimating mirror is arranged on one side of the incident end far away from the Bessel light beam generator and is used for collimating the first laser beam and outputting a second laser beam to the emergent end; and
and the focusing mirror is arranged on one side of the incident end far away from the collimating mirror and is used for focusing the second laser beam and outputting an emergent laser beam from the emergent end.
2. The optical path assembly of claim 1, wherein the collimating mirror and the focusing mirror are both convex lenses.
3. The optical path assembly according to claim 2, wherein the convex surface of the collimating lens and the convex surface of the focusing lens are both disposed toward a side away from the exit end, and the concave portion of the first concave tapered lens is located at a side away from the exit end.
4. The optical path assembly of claim 3, wherein the distance from the first concave conical lens to the collimating mirror is less than the focal length of the collimating mirror.
5. The optical path component according to claim 4, wherein a line length of the Bessel beam on the laser optical path is L, and the line length L is represented by the formula:
Figure FDA0002757698480000011
obtaining; wherein D is the beam diameter of the laser beam, theta is the cone apex angle of the first concave axicon lens, and n is the refractive index of the first concave axicon lens.
6. The optical path assembly according to claim 3, wherein the Bessel beam generator further comprises a second concave axicon lens disposed on a side of the first concave axicon lens away from the exit end, and a concave portion of the second concave axicon lens is disposed on a side away from the entrance end, and the Bessel laser beam is at least partially disposed on a side of the second concave axicon lens away from the exit end; the distance from the second concave conical lens to the collimating mirror is smaller than the focal length of the collimating mirror.
7. The optical path component according to claim 6, wherein a line length of the Bessel laser beam on the laser optical path is L, and the line length L is represented by the formula:
Figure FDA0002757698480000021
obtaining; wherein D is a beam diameter of the laser beam, θ1Is the cone apex angle, theta, of the first concave axicon lens2The vertex angle of the second concave axicon lens is shown, and n is the refractive index of the first concave axicon lens and the second concave axicon lens.
8. The optical path assembly according to claim 3, wherein the Bessel beam generator further comprises a convex conic lens disposed on a side of the first concave conic lens away from the incident end, and a convex portion of the convex conic lens is disposed on a side close to the first concave conic lens, and a vertex angle of the first concave conic lens is not equal to a vertex angle of the convex conic lens.
9. The optical path component according to claim 8, wherein a line length of the bessel beam on the laser optical path is L, and the line length L is represented by the formula:
Figure FDA0002757698480000022
obtaining; wherein D is the beam diameter of the laser beam, beta1Is the cone apex angle, beta, of the first concave axicon lens2The refractive index of the first concave conical lens is the conical vertex angle of the convex conical lens, and n is the refractive index of the first concave conical lens and the convex conical lens.
10. An optical circuit assembly according to any one of claims 1 to 9 wherein the energy of the laser beam is IiThe energy I of the emergent beamoBy the formula:
Figure FDA0002757698480000023
and (6) obtaining.
11. An optical circuit assembly according to claim 5, 7 or 9, wherein the depth of focus δ of the optical circuit assembly is determined by the formula:
Figure FDA0002757698480000031
obtaining; wherein M is the magnification of the optical path component, f1Is the focal length of the collimating mirror, f2Is the focal length of the focusing lens.
12. A laser cutting head comprising the optical path assembly of any one of claims 1 to 11.
13. A laser cutting apparatus comprising the laser cutting head of claim 12.
CN202011207863.8A 2020-11-03 2020-11-03 Light path component, laser cutting head and laser cutting equipment Pending CN112496528A (en)

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CN113828912A (en) * 2021-08-29 2021-12-24 深圳市鼎鑫盛光学科技有限公司 Bessel glass cutting lens capable of adjusting focal depth and spot size

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Application publication date: 20210316