CN112344213A - Device and method for recycling residual gas in gas cylinder - Google Patents
Device and method for recycling residual gas in gas cylinder Download PDFInfo
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- CN112344213A CN112344213A CN202011421035.4A CN202011421035A CN112344213A CN 112344213 A CN112344213 A CN 112344213A CN 202011421035 A CN202011421035 A CN 202011421035A CN 112344213 A CN112344213 A CN 112344213A
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- 238000000034 method Methods 0.000 title claims description 12
- 238000004064 recycling Methods 0.000 title claims description 5
- 230000006835 compression Effects 0.000 claims abstract description 87
- 238000007906 compression Methods 0.000 claims abstract description 87
- 238000010926 purge Methods 0.000 claims abstract description 72
- 238000007599 discharging Methods 0.000 claims abstract description 28
- 238000012360 testing method Methods 0.000 claims abstract description 21
- 239000007789 gas Substances 0.000 claims description 392
- 239000011261 inert gas Substances 0.000 claims description 48
- 239000003507 refrigerant Substances 0.000 claims description 14
- 238000005086 pumping Methods 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000007664 blowing Methods 0.000 abstract description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 43
- 238000011084 recovery Methods 0.000 description 25
- 229910052757 nitrogen Inorganic materials 0.000 description 19
- 230000001105 regulatory effect Effects 0.000 description 15
- 231100000331 toxic Toxicity 0.000 description 13
- 230000002588 toxic effect Effects 0.000 description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 12
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 12
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 12
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 12
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 12
- 229910052724 xenon Inorganic materials 0.000 description 9
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 9
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 231100000614 poison Toxicity 0.000 description 4
- 230000007096 poisonous effect Effects 0.000 description 4
- 239000012670 alkaline solution Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The device for recovering the residual gas in the gas cylinder comprises a gas inlet unit, a filling unit, a compression unit, a blowing and replacing unit, a pressure-bearing testing unit, a vacuumizing unit and a discharging unit which are connected in a technological way. The purging and replacing unit, the pressure-bearing testing unit, the vacuumizing unit and the discharging unit can perform purging and replacing, pressure-bearing testing and vacuumizing on the air inlet unit, the filling unit and the compression unit before residual gas in a plurality of air cylinders with residual gas in the air inlet unit is pressurized by a compressor of the compression unit and then filled into a plurality of air cylinders of the filling unit, so that the cleanness and the operation safety of the units are ensured, and the purity of the residual gas filled into the plurality of air cylinders is reliably guaranteed.
Description
Technical Field
The invention relates to waste gas treatment, in particular to a device and a method for recovering residual gas in a gas cylinder.
Background
For enterprises producing special electronic gas, a large amount of residual gas in the recovered gas cylinder needs to be recovered every day. The D2.6.3.2 clause in the national special equipment safety technical specification TSG 07-2019 requires that a filling device of a gas cylinder filling unit must be provided with a device for recovering or treating residual gas in a gas cylinder, and accordingly, a device and a method for recovering residual gas in a gas cylinder are developed through a great deal of creative labor
Disclosure of Invention
The invention provides a device and a method for recovering residual gas in a gas cylinder.
The invention relates to a device for recovering residual gas in a gas cylinder, which is characterized by comprising the following components:
the air inlet unit is provided with an air inlet main pipeline, a plurality of air inlet branch pipelines and a plurality of air cylinders in which residual air is stored, the air inlet ends of the plurality of air inlet branch pipelines are connected with the plurality of air cylinders in which the residual air is stored, and the air outlet ends of the plurality of air inlet branch pipelines are connected with the air inlet end of the air inlet main pipeline;
the charging unit is provided with an inflation main pipeline, a plurality of inflation branch pipelines and a plurality of air bottles, wherein the air inlet ends of the inflation branch pipelines are connected with the air outlet end of the inflation main pipeline, and the air outlet ends of the inflation branch pipelines are connected with the air bottles;
the air inlet end of the compressor inlet pipeline is connected with the air outlet end of the air inlet main pipeline of the air inlet unit, the air outlet end of the compressor inlet pipeline is connected with the inlet of the compressor, the air inlet end of the compressor outlet pipeline is connected with the outlet of the compressor, and the air outlet end of the compressor outlet pipeline is connected with the air charging main pipeline of the air charging unit;
the purging and replacing unit is provided with a purging gas main pipeline and a first purging gas branch pipeline, the gas outlet end of the purging gas main pipeline is connected with the gas inlet end of the first purging gas branch pipeline, and the gas outlet end of the first purging gas branch pipeline is connected with the gas inlet main pipeline of the gas inlet unit;
the pressure-bearing test unit is provided with a pressure-bearing gas main pipeline and a first pressure-bearing gas branch pipeline, the gas outlet end of the pressure-bearing gas main pipeline is connected with the gas inlet end of the first pressure-bearing gas branch pipeline, and the gas outlet end of the first pressure-bearing gas branch pipeline is connected with the gas inlet main pipeline of the gas inlet unit;
the vacuumizing unit is provided with a vacuum pump and a first air suction pipeline, the air inlet end of the first air suction pipeline is connected with the air inlet main pipeline of the air inlet unit, and the air outlet end of the first air suction pipeline is connected with the inlet of the vacuum pump;
the vacuum pump comprises a vacuum unit, a discharge unit and a control unit, wherein the discharge unit is provided with a first discharge branch pipeline, a second discharge branch pipeline and a discharge main pipeline, the air inlet end of the first discharge branch pipeline is connected with the outlet of the vacuum pump of the vacuum pumping unit, the air outlet end of the first discharge branch pipeline is connected with the air inlet end of the discharge main pipeline, the air inlet end of the second discharge branch pipeline is connected with the air inlet main pipeline of the air inlet unit, and the air outlet end of the second discharge branch pipeline is connected with the air inlet end of the discharge main pipeline.
The method for recovering the residual gas in the gas cylinder by the device for recovering the residual gas in the gas cylinder is characterized by comprising the following sequential steps of:
(1) checking the pressure of residual air in the air inlet unit, the compression unit and the filling unit, and if the pressure of the residual air is more than 2PSIG, then:
(2) discharging residual air in the air inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the residual air is less than 2 PSIG;
(3) filling low-pressure inert gas with the pressure of 35-50PSIG into the air inlet unit, the compression unit and the filling unit, continuing for a certain time, and stopping filling;
(4) discharging the low-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, checking the pressure of the low-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the low-pressure inert gas is less than 2 PSIG;
repeating the step (3) and the step (4) twice;
(5) filling high-pressure inert gas with the pressure of 1800-2100PSIG into the air inlet unit, the compression unit and the filling unit, so that the pressure of the high-pressure inert gas in the air inlet unit, the compression unit and the filling unit reaches not less than 1800PSIG, stopping filling the high-pressure inert gas after the pressure is stable, and ensuring that the pressure drop of the high-pressure inert gas is less than 10PSIG within 3 minutes;
(6) discharging the high-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, checking the pressure of the high-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the high-pressure inert gas is less than 2 PSIG;
(7) evacuating the air inlet unit, the compression unit and the filling unit, wherein the degree of vacuum in the air inlet unit, the compression unit and the filling unit reaches less than 50mtorr within 5 minutes, then the evacuation is stopped, and then when the degree of vacuum in the air inlet unit, the compression unit and the filling unit drops to less than 10mtorr within 1 minute, then:
(8) and starting a compressor of the compression unit, pressurizing residual gas in a plurality of gas cylinders with residual gas therein from the gas inlet unit, and filling the residual gas into a plurality of air cylinders of the filling unit.
The device for recovering the residual gas in the gas cylinder is provided with the purging and replacing unit, the pressure-bearing testing unit, the vacuumizing unit and the discharging unit, so that the purging and replacing, the pressure-bearing testing and the vacuumizing can be performed on the gas inlet unit, the filling unit and the compression unit before the residual gas in the gas cylinders with the residual gas in the gas inlet unit is pressurized by the compressor of the compression unit and then filled into the air cylinders of the filling unit, the cleanness and the operation safety of the units are ensured, and the purity of the residual gas filled into the air cylinders is reliably ensured.
According to the device for recovering the residual gas in the gas cylinder, the purging and replacing unit is also provided with a second purging branch pipeline, the gas outlet end of the purging main pipeline is connected with the gas inlet end of the second purging branch pipeline, and the gas outlet end of the second purging branch pipeline is connected with the gas charging main pipeline of the charging unit.
In this way, the speed of purging and replacing the air inlet unit, the filling unit and the compression unit can be improved by adding the second purging branch pipeline.
According to the device for recovering the residual gas in the gas cylinder, the pressure-bearing test unit is also provided with a second pressure-bearing gas branch pipeline, the gas outlet end of the pressure-bearing gas main pipeline is connected with the gas inlet end of the second pressure-bearing gas branch pipeline, and the gas outlet end of the second pressure-bearing gas branch pipeline is connected with the gas inlet end of the gas charging main pipeline of the charging unit.
Therefore, a second pressure-bearing gas branch pipeline is added, and the speed of pressure-bearing test of the air inlet unit, the filling unit and the compression unit can be improved.
According to the device for recovering the residual gas in the gas cylinder, the vacuumizing unit is also provided with a second air suction pipeline and a third air suction pipeline, the air inlet end of the second air suction pipeline is connected with the outlet pipeline of the compressor of the compression unit, the air outlet end of the second air suction pipeline is connected with the inlet of the vacuum pump of the vacuumizing unit, the air inlet end of the third air suction pipeline is connected with the air inflation main pipeline of the filling unit, and the air outlet end of the third air suction pipeline is connected with the inlet of the vacuum pump of the vacuumizing unit.
Therefore, the second air suction pipeline and the third air suction pipeline are added, so that the speed of vacuumizing the air inlet unit, the filling unit and the compression unit can be increased.
According to the device for recovering the residual gas in the gas cylinder, the discharge unit is also provided with a third discharge branch pipeline, the gas inlet end of the third discharge branch pipeline is connected with the gas charging main pipeline of the charging unit, and the gas outlet end of the third discharge branch pipeline is connected with the gas inlet end of the discharge main pipeline.
Thus, the speed of discharging the air inlet unit, the filling unit and the compression unit can be improved by adding the third discharge branch pipeline.
The device for recovering the residual gas in the gas cylinder also comprises a low-temperature recovery unit, wherein the low-temperature recovery unit comprises an aluminum air cylinder, a bypass inflation pipeline, an open Dewar tank and a refrigerant injection pipeline, the aluminum air cylinder is arranged in the open Dewar tank, the gas inlet end of the bypass inflation pipeline is connected with the main inflation pipeline of the filling unit, the gas outlet end of the bypass inflation pipeline is connected with the aluminum air cylinder, and the liquid outlet end of the refrigerant injection pipeline extends into the open Dewar tank.
In this way, the air-aluminum gas cylinder is subjected to low temperature cooling, the inner cavity forms high vacuum, and residual gas in the plurality of gas cylinders with residual gas in the air inlet unit and residual gas in the air inlet unit, the filling unit and the compression unit, especially high-value-added gas such as xenon, of the air inlet unit can be sucked and recovered to the maximum extent.
The device for recovering the residual gas in the gas cylinder is characterized in that the discharge unit is also provided with a high-point discharge pipeline and a bypass discharge pipeline, the gas inlet end of the high-point discharge pipeline is connected with the gas inlet main pipeline of the gas inlet unit, the gas inlet end of the bypass discharge pipeline is connected with the high-point discharge pipeline, and the gas outlet end of the bypass discharge pipeline is connected with the washing tower.
Therefore, when the pressure of residual combustible gas or inert gas in a plurality of gas cylinders with residual gas in the gas inlet unit is lower, the residual combustible gas or inert gas is not recovered and is directly discharged through a high-point discharge pipeline, so that the recovery cost can be saved; when the residual gas in the plurality of gas cylinders with residual gas therein is toxic and harmful gas, the toxicity is removed by the washing tower and then safely discharged.
According to the device for recovering the residual gas in the gas cylinder, the purging and replacing unit is also provided with a bypass pipeline, the gas inlet end of the bypass pipeline is connected with the first purging branch pipeline, and the gas outlet end of the bypass pipeline is connected with the gas inlet main pipeline of the gas inlet unit.
Therefore, when residual gas in a plurality of gas cylinders with residual gas therein is toxic and harmful gas, low-pressure inert gas, such as nitrogen, is conveyed to the main gas inlet pipeline of the gas inlet unit through the first purging gas branch pipeline and the bypass pipeline of the purging and replacing unit and is mixed with the toxic and harmful gas in the main gas inlet pipeline of the gas inlet unit, the toxic and harmful gas is diluted, and the corrosion of the toxic and harmful gas to the pipeline and equipment is reduced; when a plurality of air cylinders of the air inlet unit are replaced, low-pressure inert gas, such as nitrogen, is filled into the air inlet main pipeline and the air inlet branch pipelines of the air inlet unit, and air or other pollutants are prevented from entering the air inlet branch pipelines of the air inlet unit.
The method for recovering the residual gas in the gas cylinder further comprises the step (9) of pumping the small amount of residual gas in the plurality of gas cylinders with the residual gas therein of the gas inlet unit and the residual gas in the gas inlet unit, the compression unit and the filling unit into the aluminum air cylinder which is subjected to the low-temperature cooling after the step (8).
Drawings
Fig. 1 is a schematic view of the apparatus for recovering residual gas in a gas cylinder of the present invention.
Detailed Description
The features and advantages of the apparatus and method for recovering residual gas in a gas cylinder of the present invention will become more apparent from the following detailed description of the embodiments of the apparatus and method for recovering residual gas in a gas cylinder of the present invention, which is described with reference to the accompanying drawings.
The device for recovering the residual gas in the gas cylinder is shown in figure 1 and comprises a gas inlet unit 1, a compression unit 2, a filling unit 3, a blowing and replacing unit 4, a pressure-bearing testing unit 5, a vacuumizing unit 6, a low-temperature recovery unit 7 and a discharging unit 8.
The intake unit 1 has a plurality of gas cylinders 10 in which residual gas is stored, an intake main pipe 11, and a plurality of intake branch pipes 12.
The air inlet ends of the air inlet branch pipelines 12 are connected with the outlets of the bottle mouth air outlet valves of the corresponding air bottles 10, and the air outlet ends are connected with the air inlet end of the air inlet main pipeline 11. A manual diaphragm valve 111, a pneumatic switch valve 112 and a self-operated pressure regulating valve 114 are sequentially arranged on the air inlet main pipeline 11 from the air inlet end to the air outlet end.
The compression unit 2 has a compressor 20, a compressor inlet gas surge tank 23, a compressor inlet line 21 and a compressor outlet line 22. The compressor 20 is an L-type two-stage diaphragm compressor having an intercooler.
The inlet end of the compressor inlet line 21 is connected to the outlet of a compressor inlet gas surge tank 23. A pneumatic on-off valve 211 is mounted on the compressor inlet line 21. A pneumatic on-off valve 221 is mounted on the compressor outlet line 22.
The air outlet end of the air inlet main pipeline 11 of the air inlet unit 1 is connected with the inlet of a compressor inlet gas buffer tank 23 of the compression unit 2.
The filling unit 3 has a plurality of gas cylinders 30, a gas filling main pipe 31, and a plurality of gas filling branch pipes 32.
The air outlet ends of the plurality of inflation branch pipelines 32 are connected with the inlets of the bottle mouth air inlet valves of the corresponding plurality of air bottles 30, and the air inlet ends are connected with the air outlet ends of the inflation main pipelines 31. The charging main pipe 31 is provided with a pneumatic switch valve 311. The inner wall of the gas cylinder 30 is subjected to strict cleaning treatment.
The outlet end of the compressor outlet line 22 of the compression unit 2 is connected to the charging main line 31 of the charging unit 3 at a position upstream of the pneumatic switching valve 311.
The purge replacement unit 4 has a purge gas main line 40, a first purge gas branch line 41, a second purge gas branch line 42, and a bypass line 43.
The air inlet end of the first purge gas branch pipeline 41 is connected with the air outlet end of the purge gas main pipeline 40, the air outlet end is connected with the air inlet main pipeline 11 of the air inlet unit 1, and the connection position is between the pneumatic switch valve 112 and the self-operated pressure regulating valve 114. A manual diaphragm valve 411, a check valve 412 and a pneumatic switch valve 413 are sequentially installed on the first purge gas branch pipe 41 from the inlet end to the outlet end. The second purge gas branch piping 42 has an inlet end connected to the outlet end of the purge gas main piping 40, and an outlet end connected to the charge air main piping 31 of the charge unit 3, at a position upstream of a position where the outlet end of the compressor outlet piping 22 of the compression unit 2 is connected to the charge air main piping 31 of the charge unit 3. A manual diaphragm valve 421, a one-way valve 422 and a pneumatic switch valve 423 are sequentially installed on the second purge gas branch pipe 42 from the air inlet end to the air outlet end. The bypass pipe 43 has an inlet end connected to the first purge gas branch pipe 41 at a position between the check valve 412 and the pneumatic switch valve 413, and an outlet end connected to the intake main pipe 11 of the intake unit 1 at a position upstream of the manual diaphragm valve 111. A check valve 431 and a pneumatic switch valve 432 are installed on the bypass pipe 43 in sequence from the inlet end to the outlet end.
The pressure-bearing test unit 5 has a pressure-bearing gas main line 50, a first pressure-bearing gas branch line 51 and a second pressure-bearing gas branch line 52.
The air inlet end of the first pressure-bearing branch pipeline 51 is connected with the air outlet end of the pressure-bearing air main pipeline 50, the air outlet end is connected with the air inlet main pipeline 11 of the air inlet unit 1, and the connected part is located between the pneumatic switch valve 112 and the self-operated pressure regulating valve 114 and is located at the downstream of the part, connected with the air inlet main pipeline 11 of the air inlet unit 1, of the air outlet end of the first purging branch pipeline 41 of the purging and replacing unit 4. A manual diaphragm valve 511, a one-way valve 512, an orifice plate flowmeter 513 and a pneumatic switch valve 514 are sequentially installed on the first pressure-bearing gas branch pipeline 51 from the gas inlet end to the gas outlet end. The inlet end of the second pressure-bearing gas branch pipeline 52 is connected with the outlet end of the pressure-bearing gas main pipeline 50, the outlet end is connected with the inlet end of the charging main pipeline 31 of the charging unit 3, and the connection position is upstream of the connection position of the outlet end of the second purge gas branch pipeline 42 of the purge and replacement unit 4 and the charging main pipeline 31 of the charging unit 3. A manual diaphragm valve 521, a one-way valve 522, an orifice plate flowmeter 523 and a pneumatic switch valve 524 are sequentially installed on the second pressure-bearing branch pipeline 52 from the air inlet end to the air outlet end.
The evacuation unit 6 has a vacuum pump 60, a first suction line 61, a second suction line 62 and a third suction line 63.
The air inlet end of the first air suction pipeline 61 is connected with the air inlet main pipeline 11 of the air inlet unit 1, the connection position is between the pneumatic switch valve 112 and the self-operated pressure regulating valve 114, the connection position corresponds to the connection position of the air outlet end of the first purging branch pipeline 41 of the purging and replacing unit 4 and the air inlet main pipeline 11 of the air inlet unit 1, and the air outlet end is connected with the inlet of the vacuum pump 60. A pneumatic on-off valve 611 is installed on the first suction line 61.
The second suction line 62 has an inlet end connected to the compressor outlet line 22 of the compression unit 2 at a position upstream of the pneumatic switching valve 221, and an outlet end connected to an inlet of the vacuum pump 60. A pneumatic switch valve 621 is arranged on the second suction pipeline 62
The third suction line 63 has an inlet end connected to the charging main line 31 of the charging unit 3 at a position corresponding to a position where the outlet end of the compressor outlet line 22 of the compression unit 2 is connected to the charging main line 31 of the charging unit 3, and the outlet end is connected to the inlet of the vacuum pump 60. A pneumatic switch valve 631, a check valve 632 and a manual diaphragm valve 633 are sequentially installed on the third suction pipe 63 from the air inlet end to the air outlet end.
The cryogenic recovery unit 7 has a gas cylinder 70, a bypass gas charging line 71, an open dewar tank 76 and a refrigerant injection line 72.
The inlet end of the bypass inflation pipeline 71 is connected with the main inflation pipeline 31 of the filling unit 3, the connection position is between the pneumatic switch valve 311 and the connection position of the compressor outlet pipeline 22 of the compression unit 2 and the main inflation pipeline 31 of the filling unit 3, and the outlet end is connected with the inlet of the bottle mouth air inlet valve of the air bottle 70. The gas cylinder 70 is made of aluminum and its inner wall is subjected to a severe cleaning treatment. A pneumatic switch valve 711 is installed on the bypass inflation pipe 71. The refrigerant inlet end of the refrigerant inlet line 72 is connected to a refrigerant storage tank (not shown), and the refrigerant outlet end extends into the open dewar tank 76. An electromagnetic on-off valve 721 is installed on the refrigerant injection line 72.
The discharge unit 8 has a first discharge branch pipe 81, a second discharge branch pipe 82, a third discharge branch pipe 83, a discharge main pipe 86, a high point discharge pipe 84, and a bypass discharge pipe 85.
The inlet end of the first exhaust branch pipe 81 is connected to the outlet of the vacuum pump 60 of the vacuum pumping unit 6, and the outlet end is connected to the inlet end of the exhaust main pipe 86. A check valve 811 and a manual diaphragm valve 812 are installed in the first exhaust branch pipe 81 in order from the inlet end to the outlet end. The air inlet end of the second discharge branch pipeline 82 is connected with the air inlet main pipeline 11 of the air inlet unit 1, the connection position corresponds to the connection position of the air outlet end of the first pressure-bearing air branch pipeline 51 of the pressure-bearing test unit 5 and the air inlet main pipeline 11 of the air inlet unit 1, and the air outlet end is connected with the air inlet end of the discharge main pipeline 86. A pneumatic switch valve 821, a one-way valve 822 and a manual diaphragm valve 823 are sequentially installed on the second discharge branch pipe 82 from the air inlet end to the air outlet end. The air inlet end of the third discharge branch pipe 83 is connected to the inflation main pipe 31 of the charging unit 3 at a position corresponding to the position where the air outlet end of the second purge gas branch pipe 42 of the purge and replacement unit 4 is connected to the inflation main pipe 31 of the charging unit 3, and the air outlet end is connected to the air inlet end of the discharge main pipe 86. One is sequentially arranged on the third discharge branch pipeline 83 from the air inlet end to the air outlet end
. The intake end of the high-point discharge line 84 is connected to the intake manifold 11 of the intake unit 1 at a position upstream of the manual diaphragm valve 111. The high-point discharge pipeline 84 is provided with a first manual diaphragm valve 841, a pneumatic switch valve 842, a self-operated pressure regulating valve 843, a one-way valve 844 and a second manual diaphragm valve 845 in sequence from the air inlet end to the air outlet end. The inlet end of the bypass discharge line 85 is connected to a high point discharge line 84 at a point between the check valve 844 and the second manual diaphragm valve 845, and the outlet end is connected to the inlet of a scrubber tower (not shown). A manual diaphragm valve 851 is installed on the bypass discharge pipe 85.
The method for recovering the residual gas in the gas cylinder comprises the following steps:
firstly, the air inlet unit 1, the compression unit 2, the filling unit 3 and the low-temperature recovery unit 7 are purged and replaced by low-pressure nitrogen
1. Connecting outlets of bottleneck outlet valves of a plurality of gas cylinders 10 with residual gas in the gas cylinders with gas inlet ends of a plurality of corresponding gas inlet branch pipelines 12 of the gas inlet unit 1, and confirming that the bottleneck outlet valves of the plurality of gas cylinders 10 with residual gas in the gas cylinders are closed;
2. connecting inlets of the bottle opening air inlet valves of the plurality of air bottles 30 with the air outlet ends of a plurality of corresponding inflation branch pipelines 32 of the filling unit 3 to confirm that the bottle opening air inlet valves of the plurality of air bottles 30 are closed;
3. placing a gas cylinder 70 in an open Dewar tank 76, connecting the inlet of a cylinder opening gas inlet valve of the gas cylinder 70 with the gas outlet end of a bypass gas charging pipeline 71 of the low-temperature recovery unit 7, and confirming that the cylinder opening gas inlet valve of the gas cylinder 70 is closed;
4. closing the pneumatic on-off valve 432 on the bypass line 43 of the purge replacement unit 4;
5. closing the manual diaphragm valve 511 and the pneumatic switch valve 514 on the first pressure-bearing air branch pipeline 51 of the pressure-bearing test unit 5;
6. closing the manual diaphragm valve 521 and the pneumatic switch valve 524 on the second pressure-bearing air branch pipeline 52 of the pressure-bearing test unit 5;
7. the pneumatic switch valve 611 on the first suction line 61 of the vacuum unit 6 is closed;
8. the pneumatic switch valve 621 on the second suction line 62 of the vacuum pumping unit 6 is closed;
9. the pneumatic switch valve 631 and the manual diaphragm valve 633 on the third suction pipeline 63 of the vacuum pumping unit 6 are closed;
10. closing the manual diaphragm valve 812 on the first discharge branch pipe 81 of the discharge unit 8;
11. closing the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second discharge branch pipe 82 of the discharge unit 8;
12. closing the pneumatic switching valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8;
13. a first manual diaphragm valve 841, a pneumatic switch valve 842, a self-operated pressure regulating valve 843 and a second manual diaphragm valve 845 on the high-point discharge line 84 of the closed discharge unit 8;
14. closing the manual diaphragm valve 851 on the bypass drain line 85 of the drain unit 8;
15. opening a manual diaphragm valve 111, a pneumatic switch valve 112 and a self-operated pressure regulating valve 114 on an air inlet main pipeline 11 of the air inlet unit 1;
16. opening the pneumatic on-off valve 211 on the compressor inlet line 21 and the pneumatic on-off valve 221 on the compressor outlet line 22 of the compression unit 2;
17. opening the pneumatic switching valve 311 on the inflation main line 31 of the charging unit 3;
18. opening the pneumatic switch valve 711 on the bypass charging pipe 71 of the low-temperature recovery unit 7;
looking at the first pressure display 16 connected to the inlet main line 11 of the inlet unit 1 and the pressure display 36 connected to the charge main line 31 of the charging unit 3, if the indicated pressure is greater than 2PSIG then:
19. opening the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second drain branch pipe 82 and the pneumatic switch valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8;
the residual air in the intake unit 1, the compression unit 2, the charging unit 3, and the low-temperature recovery unit 7 is thus discharged into the discharge main line 86 of the discharge unit 8 through the second discharge branch line 82 and the third discharge branch line 83 of the discharge unit 8, and then discharged to the atmosphere. When the pressure indicated by the first pressure display 16 and the pressure display 36 is less than 2PSIG, then:
20. closing the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second drain branch pipe 82 and the pneumatic switch valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8; then:
21. opening a manual diaphragm valve 411 and a pneumatic switch valve 413 on a first purge gas branch pipeline 41 and a manual diaphragm valve 421 and a pneumatic switch valve 423 on a second purge gas branch pipeline 42 of the purge replacement unit 4, introducing low-pressure nitrogen of 35-50PSIG from a low-pressure nitrogen storage tank (not shown) into the air inlet unit 1, the compression unit 2, the charging unit 3 and the low-temperature recovery unit 7 through a purge gas main pipeline 40, the first purge gas branch pipeline 41 and the second purge gas branch pipeline 42 of the purge replacement unit 4 for 4-8 seconds, and then:
22. the manual diaphragm valve 411 and the pneumatic switch valve 413 on the first purge gas branch line 41 and the manual diaphragm valve 421 and the pneumatic switch valve 423 on the second purge gas branch line 42 of the purge replacement unit 4 are closed, and then:
23. opening the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second drain branch pipe 82 and the pneumatic switch valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8 for 5 to 10 seconds;
the low-pressure nitrogen gas in the intake unit 1, the compression unit 2, the charging unit 3, and the low-temperature recovery unit 7 is thus discharged into the discharge main line 86 of the discharge unit 8 through the second discharge branch line 82 and the third discharge branch line 83 of the discharge unit 8, and then discharged to the atmosphere. Then:
repeating steps 21 to 23 two more times, when the nitrogen gas in the air intake unit 1, the compression unit 2, the charging unit 3 and the low temperature recovery unit 7 is discharged into the discharge main line 86 of the discharge unit 8 through the second discharge branch line 82 and the third discharge branch line 83 of the discharge unit 8 for the third time and then discharged to the atmosphere, and the pressure indicated by the first pressure indicator 16 and the pressure indicator 36 is less than 2PSIG, then:
24. closing the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second drain branch pipe 82 and the pneumatic switch valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8; then:
secondly, carrying out pressure bearing test on the air inlet unit 1, the compression unit 2, the filling unit 3 and the low-temperature recovery unit 7 by using high-pressure nitrogen
25. Opening a manual diaphragm valve 511 and a pneumatic switch valve 514 on a first pressure-bearing air branch pipeline 51 and a manual diaphragm valve 521 and a pneumatic switch valve 524 on a second pressure-bearing air branch pipeline 52 of the pressure-bearing test unit 5, allowing high-pressure nitrogen of 1800-plus-2100 PSIG from a high-pressure nitrogen storage tank (not shown) to enter the air inlet unit 1, the compression unit 2, the charging unit 3 and the low-temperature recovery unit 7 through a pressure-bearing air main pipeline 50, the first pressure-bearing air branch pipeline 51 and the second pressure-bearing air branch pipeline 52 of the pressure-bearing test unit 5, stopping charging the high-pressure nitrogen after the pressure indicated by the first pressure indicator 16 and the pressure indicator 36 is not less than 1800PSIG, if the pressure drop is less than 10PSIG within 3 minutes, passing the pressure-bearing test, otherwise, stopping the pressure-bearing test, repeating the above steps after the leakage problem is solved until the pressure reaches the requirement, and then:
26. closing the manual diaphragm valve 511 and the pneumatic switch valve 514 on the first pressure-bearing air branch pipeline 51 and the manual diaphragm valve 521 and the pneumatic switch valve 524 on the second pressure-bearing air branch pipeline 52 of the pressure-bearing test unit 5; then:
27. opening the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second drain branch pipe 82 and the pneumatic switch valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8;
thus, when the nitrogen gas in the intake unit 1, the compression unit 2, the charging unit 3 and the low-temperature recovery unit 7 is discharged into the discharge main line 86 of the discharge unit 8 through the second discharge branch line 82 and the third discharge branch line 83 of the discharge unit 8 and then discharged to the atmosphere, and the pressure indicated by the first pressure indicator 16 and the pressure indicator 36 is less than 2PSIG, then:
28. closing the pneumatic switch valve 821 and the manual diaphragm valve 823 on the second drain branch pipe 82 and the pneumatic switch valve 831 and the manual diaphragm valve 833 on the third drain branch pipe 83 of the drain unit 8; then:
thirdly, the air inlet unit 1, the compression unit 2, the filling unit 3 and the low-temperature recovery unit 7 are vacuumized
29. Opening the pneumatic switch valve 611 on the first suction line 61 of the vacuum unit 6;
30. the pneumatic switch valve 621 on the second suction pipe 62 of the vacuum pumping unit 6 is opened;
31. opening a pneumatic switch valve 631 and a manual diaphragm valve 633 on the third suction pipeline 63 of the vacuumizing unit 6;
32. opening the manual diaphragm valve 812 on the first discharge branch pipe 81 of the discharge unit 8;
33. starting the vacuum pump 60, sucking the nitrogen in the gas inlet unit 1, the compression unit 2, the filling unit 3 and the low-temperature recovery unit 7 into the vacuum pump 60 through the first suction pipeline 61, the second suction pipeline 62 and the third suction pipeline 63 of the vacuumizing unit 6, discharging the nitrogen into the main discharge pipeline 86 of the discharging unit 8 through the first discharge branch pipeline 81 of the discharging unit 8 after being pressurized, then discharging the nitrogen into the atmosphere, checking a first vacuum degree display 66 connected with the first suction pipeline 61 of the vacuumizing unit 6, a second vacuum degree display 231 connected with the compressor inlet gas buffer tank 23 of the compression unit 2 and a third vacuum degree display 68 connected with the third suction pipeline 63 of the vacuumizing unit 6, and stopping vacuumizing if the vacuum degree is less than 50mtorr within 5 minutes, repeating the steps after the leakage problem is solved until the vacuum degree reaches the requirement, then:
34. the pneumatic switch valve 611 on the first suction line 61 of the vacuum unit 6 is closed;
35. the pneumatic switch valve 621 on the second suction line 62 of the vacuum pumping unit 6 is closed;
36. the pneumatic switch valve 631 and the manual diaphragm valve 633 on the third suction pipeline 63 of the vacuum pumping unit 6 are closed;
37. the vacuum pump 60 is stopped;
looking at the first vacuum level indicator 66 connected to the first suction line 61 of the evacuation unit 6, the second vacuum level indicator 231 connected to the compressor inlet gas buffer tank 23 of the compression unit 2 and the third vacuum level indicator 68 connected to the third suction line 63 of the evacuation unit 6, the vacuum level must drop less than 10mtorr within 1 minute, otherwise, the above steps are repeated until the vacuum level change meets the requirement after the leakage problem is solved, and then:
38. opening the pneumatic switch valve 611 on the first suction line 61 of the vacuum unit 6;
39. the pneumatic switch valve 621 on the second suction pipe 62 of the vacuum pumping unit 6 is opened;
40. opening a pneumatic switch valve 631 and a manual diaphragm valve 633 on the third suction pipeline 63 of the vacuumizing unit 6;
41. the vacuum pump 60 was started for 1 minute, and then:
42. the vacuum pump 60 is stopped;
43. the pneumatic switch valve 611 on the first suction line 61 of the vacuum unit 6 is closed;
44. the pneumatic switch valve 621 on the second suction line 62 of the vacuum pumping unit 6 is closed;
45. the pneumatic switch valve 631 and the manual diaphragm valve 633 on the third suction pipeline 63 of the vacuum pumping unit 6 are closed;
46. closing the manual diaphragm valve 812 on the first discharge branch pipe 81 of the discharge unit 8; then:
fourthly, filling
47. Closing the pneumatic switch valve 711 on the bypass charging pipe 71 of the low temperature recovery unit 7;
(1) when the residual gas in the gas cylinder 10 is a high value-added gas, such as xenon, then:
48. opening bottle mouth gas outlet valves of a plurality of gas bottles 10 with residual xenon gas in the gas inlet unit 1;
49. opening inlet valves of the plurality of gas cylinders 30 of the filling unit 3;
50. starting the compressor 20 of the compression unit 2;
residual xenon in the gas cylinders 10 enters the compressor 20 through the gas inlet main pipeline 11 of the gas inlet unit 1, the compressor inlet gas buffer tank 23 of the compression unit 2 and the compressor inlet pipeline 21, is pressurized to 2100PSIG, and then is filled into a plurality of corresponding gas cylinders 30 through the compressor outlet pipeline 22 of the compression unit 2, the gas filling main pipeline 31 of the filling unit 3 and a plurality of gas filling branch pipelines 32, when the pressure gauges of the plurality of gas cylinders 30 display that the pressure in the cylinders is 2100PSIG, then:
51. closing the mouth gas inlet valves of the plurality of gas cylinders 30 of the filling unit 3;
52. closing the pneumatic switching valve 311 on the charging main pipe 31 of the charging unit 3;
when the pressure gauge of the plurality of gas cylinders 10 of the gas intake unit 1 in which xenon gas is stored shows that the in-cylinder pressure is less than 50PSIG, then:
53. stopping the compressor 20 of the compression unit 2; then:
54. the electromagnetic switch valve 721 on the refrigerant injection pipeline 72 of the low temperature recovery unit 7 is opened, the liquid nitrogen with the pressure of 96-100PSIG temperature of-176 ℃ from the refrigerant storage tank (not shown) is injected into the open Dewar tank 76 through the refrigerant injection pipeline 72, when the temperature displayed by the thermocouple 78 in contact with the inner wall of the open Dewar tank 76 reaches-50 ℃, then:
55. opening a mouthpiece air intake valve of the air cylinder 70 of the low temperature recovery unit 7;
56. opening the pneumatic switch valve 711 on the bypass charging pipe 71 of the low-temperature recovery unit 7;
the gas in the gas cylinder 70 is liquefied by low-temperature cooling, a high vacuum is formed in the gas cylinder 70, xenon remaining in the gas cylinder 10 of the gas inlet unit 1 and xenon remaining in the related equipment and pipelines of the gas inlet unit 1, the compression unit 2 and the charging unit 3 enter the gas cylinder 70, xenon with high added value is recovered to the maximum extent, and when the temperature displayed by the thermocouple 78 is stabilized at about-170 ℃, and the pressure displayed by the pressure display 36 is reduced to 0PSIG, then:
57. closing the mouth inlet valve of the gas cylinder 70 of the low temperature recovery unit 7;
58. closing the electromagnetic on-off valve 721 on the refrigerant injection line 72;
59. closing the pneumatic switch valve 711 on the bypass charging pipe 71 of the low temperature recovery unit 7;
60. closing the pneumatic on-off valve 211 on the compressor inlet line 21 and the pneumatic on-off valve 221 on the compressor outlet line 22 of the compression unit 2;
61. a manual diaphragm valve 111, a pneumatic switch valve 112 and a self-operated pressure regulating valve 114 on an air inlet main pipeline 11 of the air inlet unit 1 are closed;
62. the port outlet valves of the plurality of gas cylinders 10 of the gas inlet unit 1, which have been substantially free of residual xenon therein, are closed.
(2) When the residual gas in the gas cylinder 10 is hydrogen fluoride or hydrogen chloride toxic and harmful gas, then:
48. a manual diaphragm valve 111, a pneumatic switch valve 112 and a self-operated pressure regulating valve 114 on an air inlet main pipeline 11 of the air inlet unit 1 are closed;
49. closing the pneumatic on-off valve 211 on the compressor inlet line 21 and the pneumatic on-off valve 221 on the compressor outlet line 22 of the compression unit 2;
50. closing the pneumatic switching valve 311 on the charging main pipe 31 of the charging unit 3;
51. closing the pneumatic switch valve 711 on the bypass charging conduit 71 of the cryogenic recovery unit 7
52. Opening a first manual diaphragm valve 841, a pneumatic switch valve 842 and a self-operated pressure regulating valve 843 on a high-point discharge pipeline 84 of the discharge unit 8;
53. opening a manual diaphragm valve 851 on the bypass drain line 85 of the drain unit 8;
54. opening the manual diaphragm valve 411 on the first purge gas branch pipe 41 of the replacement unit 4;
55. opening the pneumatic on-off valve 432 on the bypass conduit 43 of the substitution unit 4;
56. opening outlet valves at bottle mouths of a plurality of gas bottles 10 of the gas inlet unit 1, wherein the gas bottles contain residual hydrogen fluoride or hydrogen chloride toxic and harmful gases;
residual hydrogen fluoride or hydrogen chloride toxic and harmful gas in the gas cylinder 10 enters an air inlet main pipeline 11 of the air inlet unit 1 through a plurality of air inlet branch pipelines 12 of the air inlet unit 1, meanwhile, low-pressure nitrogen of 35-50PSIG from a low-pressure nitrogen storage tank (not shown) enters the air inlet main pipeline 11 of the air inlet unit 1 through a purge gas main pipeline 40, a first purge gas branch pipeline 41 and a bypass pipeline 43 of a purge replacement unit 4, the hydrogen fluoride or hydrogen chloride toxic and harmful gas are mixed in the air inlet main pipeline 11 of the air inlet unit 1, then the hydrogen fluoride or hydrogen chloride toxic and harmful gas and the low-pressure nitrogen enter a washing tower (not shown) through a high-point discharge pipeline 84 of a discharge unit 8 and a bypass discharge pipeline 85 of the discharge unit 8, an alkaline solution with a pH value of 12 in the washing tower is in reverse contact with mixed gas of the hydrogen fluoride or hydrogen chloride toxic and harmful gas and the low-pressure nitrogen, and alkali in the alkaline solution and the hydrogen fluoride or hydrogen chloride toxic and harmful gas in the mixed, after toxicity is eliminated, the mixture is discharged to the atmosphere together with low-pressure nitrogen;
therefore, the poisonous and harmful gas of hydrogen fluoride or hydrogen chloride with extremely strong corrosiveness is diluted before entering the high-point discharge pipeline 84 of the discharge unit 8, so that the corrosion of the poisonous and harmful gas of hydrogen fluoride or hydrogen chloride to the high-point discharge pipeline 84 of the discharge unit 8, the bypass discharge pipeline 85 and the washing tower contacted by the poisonous and harmful gas of hydrogen fluoride or hydrogen chloride is reduced;
when the pressure gauge of a plurality of gas cylinders 10 with residual hydrogen fluoride or hydrogen chloride poisonous and harmful gas in the gas inlet unit 1 displays that the pressure in the gas cylinder is 5PSIG, then:
57. and closing the outlet valves at the bottle mouths of a plurality of gas bottles 10 of the gas inlet unit 1, wherein only a small amount of toxic and harmful gases of the residual hydrogen fluoride or the hydrogen chloride exist in the gas bottles.
58. A first manual diaphragm valve 841, a pneumatic switch valve 842 and a self-operated pressure regulating valve 843 on the high point discharge pipeline 84 of the closing discharge unit 8;
59. the manual diaphragm valve 851 on the bypass drain line 85 of the drain unit 8 is closed.
(3) When the residual gas in the gas cylinder 10 is combustible gas or pure inert gas, then:
48. opening the outlet valves at the bottle mouths of a plurality of gas bottles 10 of the gas inlet unit 1, in which residual combustible gas or pure inert gas is present, and checking a second pressure display 18 connected with the gas inlet main pipeline 11 of the gas inlet unit 1:
if the pressure is less than 50PSIG, then:
49. a manual diaphragm valve 111, a pneumatic switch valve 112 and a self-operated pressure regulating valve 114 on an air inlet main pipeline 11 of the air inlet unit 1 are closed;
50. closing the pneumatic on-off valve 211 on the compressor inlet line 21 and the pneumatic on-off valve 221 on the compressor outlet line 22 of the compression unit 2;
51. closing the pneumatic switching valve 311 on the charging main pipe 31 of the charging unit 3;
52. closing the pneumatic switch valve 711 on the bypass charging conduit 71 of the cryogenic recovery unit 7
53. Opening a first manual diaphragm valve 841, a pneumatic switch valve 842, a self-operated pressure regulating valve 843 and a second manual diaphragm valve 845 on a high-point discharge pipeline 84 of the discharge unit 8, discharging residual combustible gas or pure inert gas in the gas cylinder 10 to the atmosphere through the high-point discharge pipeline 84 of the discharge unit 8, and when the pressure gauge of a plurality of gas cylinders 10 of the gas inlet unit 1 in which the residual combustible gas or the pure inert gas is present shows that the pressure in the cylinder is 5PSIG, then:
54. a first manual diaphragm valve 841, a pneumatic switch valve 842, a self-operated pressure regulating valve 843 and a second manual diaphragm valve 845 on the high-point discharge line 84 of the closed discharge unit 8;
55. the outlet valves at the mouths of a plurality of gas cylinders 10 of the gas inlet unit 1, in which only a small amount of residual combustible gas or pure inert gas is present, are closed.
② if the pressure is more than 50 PSIG:
49. starting a compressor 20 of the compression unit 2, allowing residual combustible gas or pure inert gas in the gas cylinders 10 to enter the compressor 20 through a main gas inlet pipeline 11 of the gas inlet unit 1, a compressor inlet gas buffer tank 23 and a compressor inlet pipeline 21 of the compression unit 2, pressurizing to 2100PSIG, and filling into a plurality of corresponding gas cylinders 30 through a compressor outlet pipeline 22 of the compression unit 2, a main gas filling pipeline 31 and a plurality of gas filling branch pipelines 32 of the filling unit 3, wherein when pressure gauges of the plurality of gas cylinders 30 indicate that the pressure in the gas cylinders is 2100PSIG, then:
50. closing the mouth gas inlet valves of the plurality of gas cylinders 30 of the filling unit 3;
51. closing the pneumatic switching valve 311 on the charging main pipe 31 of the charging unit 3;
when the pressure gauge of the plurality of gas cylinders 10 of the gas inlet unit 1 in which the combustible gas or the pure inert gas remains indicates that the in-cylinder pressure is 5PSIG, then:
52. stopping the compressor 20 of the compression unit 2; then:
53. a manual diaphragm valve 111, a pneumatic switch valve 112 and a self-operated pressure regulating valve 114 on an air inlet main pipeline 11 of the air inlet unit 1 are closed;
54. closing the pneumatic on-off valve 211 on the compressor inlet line 21 and the pneumatic on-off valve 221 on the compressor outlet line 22 of the compression unit 2;
55. the outlet valves at the mouths of a plurality of gas cylinders 10 of the gas inlet unit 1, in which only a small amount of residual combustible gas or pure inert gas is present, are closed.
When there are other cylinders 10 in which it is necessary to fill the cylinders 30 of the filling unit 3 with the combustible gas or pure inert gas remaining therein, then:
56. opening the manual diaphragm valve 411 on the first purge gas branch pipe 41 of the replacement unit 4;
57. opening the pneumatic on-off valve 432 on the bypass conduit 43 of the substitution unit 4;
low-pressure nitrogen gas from a low-pressure nitrogen storage tank (not shown) at 35-50PSIG enters the intake manifold 11 and the plurality of intake branch lines 12 of the intake unit 1 through the purge gas manifold 40, the first purge gas branch line 41 and the bypass line 43 of the purge replacement unit 4;
58. the bottle mouth outlet valves of a plurality of gas bottles 10 with only a small amount of residual combustible gas or pure inert gas therein are disconnected from a plurality of corresponding inlet branch pipelines 12 of the inlet unit 1;
59. the mouth gas outlet valves of other gas cylinders 10 which need to fill the gas cylinders 30 of the filling unit 3 with residual combustible gas or pure inert gas are connected with the corresponding gas inlet branch pipelines 12 of the gas inlet unit 1.
The low-pressure nitrogen gas is charged into the intake main line 11 and the plurality of intake branch lines 12 of the intake unit 1, so that air or other contaminants can be prevented from entering the plurality of intake branch lines 12 of the intake unit 1 when the plurality of gas cylinders 10 are replaced.
Claims (10)
1. A device for recovering residual gas in a gas cylinder is characterized by comprising:
the air inlet unit is provided with an air inlet main pipeline, a plurality of air inlet branch pipelines and a plurality of air cylinders in which residual air is stored, the air inlet ends of the plurality of air inlet branch pipelines are connected with the plurality of air cylinders in which the residual air is stored, and the air outlet ends of the plurality of air inlet branch pipelines are connected with the air inlet end of the air inlet main pipeline;
the charging unit is provided with an inflation main pipeline, a plurality of inflation branch pipelines and a plurality of air bottles, wherein the air inlet ends of the inflation branch pipelines are connected with the air outlet end of the inflation main pipeline, and the air outlet ends of the inflation branch pipelines are connected with the air bottles;
the air inlet end of the compressor inlet pipeline is connected with the air outlet end of the air inlet main pipeline of the air inlet unit, the air outlet end of the compressor inlet pipeline is connected with the inlet of the compressor, the air inlet end of the compressor outlet pipeline is connected with the outlet of the compressor, and the air outlet end of the compressor outlet pipeline is connected with the air charging main pipeline of the air charging unit;
the purging and replacing unit is provided with a purging gas main pipeline and a first purging gas branch pipeline, the gas outlet end of the purging gas main pipeline is connected with the gas inlet end of the first purging gas branch pipeline, and the gas outlet end of the first purging gas branch pipeline is connected with the gas inlet main pipeline of the gas inlet unit;
the pressure-bearing test unit is provided with a pressure-bearing gas main pipeline and a first pressure-bearing gas branch pipeline, the gas outlet end of the pressure-bearing gas main pipeline is connected with the gas inlet end of the first pressure-bearing gas branch pipeline, and the gas outlet end of the first pressure-bearing gas branch pipeline is connected with the gas inlet main pipeline of the gas inlet unit;
the vacuumizing unit is provided with a vacuum pump and a first air suction pipeline, the air inlet end of the first air suction pipeline is connected with the air inlet main pipeline of the air inlet unit, and the air outlet end of the first air suction pipeline is connected with the inlet of the vacuum pump;
the vacuum pump comprises a vacuum unit, a discharge unit and a control unit, wherein the discharge unit is provided with a first discharge branch pipeline, a second discharge branch pipeline and a discharge main pipeline, the air inlet end of the first discharge branch pipeline is connected with the outlet of the vacuum pump of the vacuum pumping unit, the air outlet end of the first discharge branch pipeline is connected with the air inlet end of the discharge main pipeline, the air inlet end of the second discharge branch pipeline is connected with the air inlet main pipeline of the air inlet unit, and the air outlet end of the second discharge branch pipeline is connected with the air inlet end of the discharge main pipeline.
2. The apparatus for recovering residual gas in a gas cylinder according to claim 1, wherein the purge replacement unit further comprises a second purge gas branch pipeline, the gas outlet end of the purge gas main pipeline is connected with the gas inlet end of the second purge gas branch pipeline, and the gas outlet end of the second purge gas branch pipeline is connected with the gas charging main pipeline of the charging unit.
3. The apparatus for recovering residual gas in a gas cylinder according to claim 1, wherein the purging and replacing unit further comprises a bypass pipeline, an air inlet end of the bypass pipeline is connected with the first purging branch pipeline, and an air outlet end of the bypass pipeline is connected with the air inlet main pipeline of the air inlet unit.
4. The device for recovering the residual gas in the gas cylinder according to claim 1, wherein the pressure-bearing test unit is further provided with a second pressure-bearing gas branch pipeline, the gas outlet end of the pressure-bearing gas main pipeline is connected with the gas inlet end of the second pressure-bearing gas branch pipeline, and the gas outlet end of the second pressure-bearing gas branch pipeline is connected with the gas inlet end of the gas charging main pipeline of the charging unit.
5. The apparatus of claim 1, wherein the evacuation unit further comprises a second suction line and a third suction line, an inlet end of the second suction line is connected to the compressor outlet line of the compression unit, an outlet end of the second suction line is connected to an inlet of the vacuum pump of the evacuation unit, an inlet end of the third suction line is connected to the air charging main line of the charging unit, and an outlet end of the third suction line is connected to an inlet of the vacuum pump of the evacuation unit.
6. The apparatus for recovering residual gas in a gas cylinder according to claim 1, wherein the discharge unit further has a third discharge branch conduit, an inlet end of the third discharge branch conduit is connected to the gas charging main conduit of the charging unit, and an outlet end of the third discharge branch conduit is connected to an inlet end of the discharge main conduit.
7. The apparatus of claim 1, wherein the discharge unit further comprises a high point discharge line and a bypass discharge line, the inlet end of the high point discharge line is connected to the inlet manifold of the inlet unit, the inlet end of the bypass discharge line is connected to the high point discharge line, and the outlet end of the bypass discharge line is connected to the scrubber tower.
8. The device for recycling residual gas in a gas cylinder according to any one of claims 1 to 7, further comprising a low-temperature recycling unit, wherein the low-temperature recycling unit comprises an aluminum air cylinder, a bypass inflation pipe, an open Dewar tank and a refrigerant injection pipe, the aluminum air cylinder is arranged in the open Dewar tank, the air inlet end of the bypass inflation pipe is connected with the main inflation pipe of the filling unit, the air outlet end of the bypass inflation pipe is connected with the aluminum air cylinder, and the liquid outlet end of the refrigerant injection pipe extends into the open Dewar tank.
9. A method of recovering residual gas in a gas cylinder by the apparatus for recovering residual gas in a gas cylinder according to claim 1, characterized by the following sequential steps:
(1) checking the pressure of residual air in the air inlet unit, the compression unit and the filling unit, and if the pressure of the residual air is more than 2PSIG, then:
(2) discharging residual air in the air inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the residual air is less than 2 PSIG;
(3) filling low-pressure inert gas with the pressure of 35-50PSIG into the air inlet unit, the compression unit and the filling unit, continuing for a certain time, and stopping filling;
(4) discharging the low-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, checking the pressure of the low-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the low-pressure inert gas is less than 2 PSIG;
repeating the step (3) and the step (4) twice;
(5) filling high-pressure inert gas with the pressure of 1800-2100PSIG into the air inlet unit, the compression unit and the filling unit, so that the pressure of the high-pressure inert gas in the air inlet unit, the compression unit and the filling unit reaches not less than 1800PSIG, stopping filling the high-pressure inert gas after the pressure is stable, and ensuring that the pressure drop of the high-pressure inert gas is less than 10PSIG within 3 minutes;
(6) discharging the high-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, checking the pressure of the high-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the high-pressure inert gas is less than 2 PSIG;
(7) evacuating the air inlet unit, the compression unit and the filling unit, wherein the degree of vacuum in the air inlet unit, the compression unit and the filling unit reaches less than 50mtorr within 5 minutes, then the evacuation is stopped, and then when the degree of vacuum in the air inlet unit, the compression unit and the filling unit drops to less than 10mtorr within 1 minute, then:
(8) and starting a compressor of the compression unit, pressurizing residual gas in a plurality of gas cylinders with residual gas therein from the gas inlet unit, and filling the residual gas into a plurality of air cylinders of the filling unit.
10. A method of recovering residual gas in a gas cylinder by the apparatus for recovering residual gas in a gas cylinder according to claim 8, characterized by the following sequential steps:
(1) checking the pressure of residual air in the air inlet unit, the compression unit and the filling unit, and if the pressure of the residual air is more than 2PSIG, then:
(2) discharging residual air in the air inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the residual air is less than 2 PSIG;
(3) filling low-pressure inert gas with the pressure of 35-50PSIG into the air inlet unit, the compression unit and the filling unit, continuing for a certain time, and stopping filling;
(4) discharging the low-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, checking the pressure of the low-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the low-pressure inert gas is less than 2 PSIG;
repeating the step (3) and the step (4) twice;
(5) filling high-pressure inert gas with the pressure of 1800-2100PSIG into the air inlet unit, the compression unit and the filling unit, so that the pressure of the high-pressure inert gas in the air inlet unit, the compression unit and the filling unit reaches not less than 1800PSIG, stopping filling the high-pressure inert gas after the pressure is stable, and ensuring that the pressure drop of the high-pressure inert gas is less than 10PSIG within 3 minutes;
(6) discharging the high-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, checking the pressure of the high-pressure inert gas in the gas inlet unit, the compression unit and the filling unit, and stopping discharging when the pressure of the high-pressure inert gas is less than 2 PSIG;
(7) evacuating the air inlet unit, the compression unit and the filling unit, wherein the degree of vacuum in the air inlet unit, the compression unit and the filling unit reaches less than 50mtorr within 5 minutes, then the evacuation is stopped, and then when the degree of vacuum in the air inlet unit, the compression unit and the filling unit drops to less than 10mtorr within 1 minute, then:
(8) and starting a compressor of the compression unit, pressurizing residual gas in a plurality of gas cylinders with residual gas therein from the gas inlet unit, and filling the residual gas into a plurality of air cylinders of the filling unit.
(9) And pumping a small amount of residual gas in the plurality of gas cylinders with residual gas in the gas inlet unit and residual gas in the gas inlet unit, the compression unit and the filling unit into the aluminum air cylinder which is subjected to low-temperature cooling.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113399393A (en) * | 2021-06-18 | 2021-09-17 | 沧州华宇特种气体科技有限公司 | Diborane gas cylinder residual gas recovery and gas cylinder cleaning device and using method thereof |
| CN115419825A (en) * | 2022-08-29 | 2022-12-02 | 欧中电子材料（重庆）有限公司 | Gas cylinder comprehensive treatment system and treatment method thereof |
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