CN112201474B - Pure palladium inner electrode slurry for radio frequency microwave ceramic dielectric capacitor and preparation method and application thereof - Google Patents

Pure palladium inner electrode slurry for radio frequency microwave ceramic dielectric capacitor and preparation method and application thereof Download PDF

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CN112201474B
CN112201474B CN202010631797.0A CN202010631797A CN112201474B CN 112201474 B CN112201474 B CN 112201474B CN 202010631797 A CN202010631797 A CN 202010631797A CN 112201474 B CN112201474 B CN 112201474B
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parts
palladium
radio frequency
ceramic dielectric
frequency microwave
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CN112201474A (en
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蒋悦清
李军
乔峰
罗道隆
张玲
冯清福
何良
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Chengdu Hongke Electronic Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/005Electrodes
    • H01G4/008Selection of materials
    • H01G4/0085Fried electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14Treatment of metallic powder
    • B22F1/142Thermal or thermo-mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14Treatment of metallic powder
    • B22F1/145Chemical treatment, e.g. passivation or decarburisation
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/14Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of noble metals or alloys based thereon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • H01G4/12Ceramic dielectrics

Abstract

The invention belongs to the technical field of radio frequency microwave ceramic dielectric capacitor materials, and provides pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, and a preparation method and application thereof. The electrode slurry comprises the raw materials of pretreated palladium powder, and the pretreated palladium powder is prepared by carrying out heat preservation treatment on metal powder. The electrode slurry can overcome the defects of the existing metal palladium in the background technology, has good printing continuity, small expansion degree of the inner electrode in the sintering process and good sintering shrinkage matching with a ceramic body. The preparation method comprises the following steps: carrying out heat preservation pretreatment on palladium powder; the preparation method is simple to operate, low in energy consumption and easy for industrial production.

Description

Pure palladium inner electrode slurry for radio frequency microwave ceramic dielectric capacitor and preparation method and application thereof
Technical Field
The invention belongs to the technical field of radio frequency microwave ceramic dielectric capacitor materials, and particularly relates to pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, and a preparation method and application thereof.
Background
The high-power radio frequency microwave ceramic dielectric capacitor needs to be sintered at the temperature of more than 1200 ℃, and meanwhile, the product of the type requires extremely low loss and requires good conductivity of the inner electrode. Therefore, the only material that can meet the process and performance requirements at this temperature range is metallic palladium.
However, since palladium metal undergoes an oxidative expansion process when heated in air, this type of product often suffers from delamination cracking during sintering due to expansion of the electrode.
Disclosure of Invention
In view of the above-mentioned deficiencies in the prior art, a first object of the present invention is to provide a pure palladium internal electrode paste for rf microwave ceramic dielectric capacitors, which can overcome the deficiencies of the existing metal palladium in the background art, and the electrode paste has a small degree of internal electrode expansion during sintering.
In view of the above-mentioned deficiencies in the prior art, a second object of the present invention is to provide a method for preparing a pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, wherein the method is simple to operate, low in energy consumption and easy for industrial production.
In view of the above-mentioned deficiencies in the prior art, a third objective of the present invention is to provide an application of the pure palladium internal electrode paste in a radio frequency microwave ceramic dielectric capacitor.
In order to achieve the above purpose, the solution adopted by the invention is as follows:
the pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor comprises pretreated palladium powder which is prepared by carrying out heat preservation treatment on metal powder.
The preparation method of the pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor comprises the following steps: and flatly paving the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 390 plus one of 500 ℃, preserving the heat for 2-4h, and naturally cooling the oven to obtain the pretreated palladium powder.
An application of the pure palladium inner electrode slurry in a radio frequency microwave ceramic dielectric capacitor.
The pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor, and the preparation method and the application thereof provided by the invention have the beneficial effects that:
(1) the pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor provided by the invention adopts pretreated palladium powder obtained by heat preservation pretreatment as a raw material. The pretreated palladium powder subjected to heat preservation pretreatment can slow down the temperature rise expansion degree of the electrode.
(2) The invention provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor. Wherein the pretreatment temperature of the palladium powder is adjusted to 390 ℃ and 500 ℃, and the temperature is kept for 2-4 h.
When the pure palladium slurry is used for the MLCC, the sintering temperature is between 1200-1250 ℃, the sintering process is carried out in the air environment, when the temperature is between 300-900 ℃, the palladium powder has the process of oxidation before reduction, the oxidation is started at 300 ℃, and the oxygen is completely reduced and lost at 900 ℃; in the process, oxygen atoms enter octahedral gaps formed by palladium atoms, so that crystal lattices are distorted, the mass is increased, the volume is expanded, extrusion stress is generated between an MLCC electrode layer and a medium layer, and finally layering cracking is caused in the MLCC sintering process; the surface layer of the palladium powder is firstly oxidized by pretreatment at the temperature of 390 plus one 500 ℃, so that the total expansion amount of the palladium slurry in the sintering process can be reduced, and the initial temperature of the palladium powder oxidation expansion is increased, thereby avoiding the problem of viscosity removal and delamination in the viscosity removal process in the MLCC preparation process. The preparation method is simple to operate, low in energy consumption and easy for industrial production.
Drawings
FIG. 1 is an SEM scanning electron micrograph of untreated palladium powder;
FIG. 2 is an SEM scanning electron micrograph of pretreated palladium powder prepared in example 3 of the present invention;
FIG. 3 is a TGA thermogravimetric analysis comparison of untreated palladium powder, and pretreated palladium powder prepared in Experimental example 3 of the present invention;
FIG. 4 is a graph comparing TMA sintering curves of an electrode paste prepared in example 3 of the present invention and an electrode paste prepared in comparative example 1;
FIG. 5 is a structural diagram of an MLCC product prepared using the electrode pastes prepared in Experimental examples 1-5 of the invention;
FIG. 6 is a block diagram of a MLCC product made directly using pure palladium.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below. The examples, in which specific conditions are not specified, were carried out according to conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products available commercially.
The pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor and the preparation method thereof provided by the embodiment of the invention are specifically described below.
The embodiment of the invention provides pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is prepared by mixing pretreated palladium powder obtained by carrying out heat preservation pretreatment on the palladium powder, an organic carrier and an inorganic additive. Wherein the organic carrier comprises ethyl cellulose, monomer resin, soybean lecithin, terpineol, medium chain unsaturated fatty acid and 2-ethyl-1-hexanol. The inorganic additive comprises nano barium titanate and nano zirconium oxide.
In the organic carrier, terpineol, medium-chain unsaturated fatty acid and 2-ethyl-1-hexanol are mixed for use, so that the slurry can be slowly dried in sections from room temperature to high temperature, and a printed electrode is continuously free of residual air holes; the ethyl cellulose is used as a thickening agent to adjust the viscosity of the slurry, so that the continuity of the slurry and the dispersibility of the slurry to the powder are ensured; the addition of the monomer resin can enhance the toughness and strength of the electrode film layer after the slurry is dried, and the monomer resin and the ethyl cellulose act together to play a role in supporting and filling the palladium powder gap in the lamination process; the soybean lecithin is added to play a role in defoaming and dispersing palladium powder simultaneously, so that the rapid discharge of gas and the leveling of the slurry in the printing process of the slurry are ensured.
The inorganic additive comprises nano barium titanate and nano zirconium oxide. The MLCC ceramic mainly uses barium titanate as a main phase material, the initial temperature of sintering shrinkage is approximately 1000 ℃, and an inorganic additive can enable slurry to have a sintering shrinkage curve similar to that of a medium ceramic as far as possible, so that the barium titanate similar to the main phase of the ceramic is adopted as one of additives, the slurry can obtain a curve similar to the main phase, the electrical properties of an electrode and a ceramic medium are not influenced, the zirconia has a sintering temperature higher than that of the barium titanate, and the nano zirconia can form a pinning effect to hinder grain boundary migration in the sintering process, so that the shrinkage temperature of palladium powder is greatly improved and is closer to the sintering temperature of the ceramic.
In this embodiment, the pretreated palladium powder is used to interact with the organic carrier and inorganic additive provided in this application, so that the printing continuity and the sintering shrinkage matching property with the porcelain body can be ensured.
In this example, the pretreated palladium powder is 44-50 parts, the organic vehicle is 35-47 parts, and the inorganic additive is 9-13 parts.
Specifically, in the organic carrier, by weight, 3-6 parts of ethyl cellulose, 3-5 parts of monomer resin, 1-2 parts of soybean lecithin, 9-11 parts of terpineol, 15-17 parts of medium-chain unsaturated fatty acid and 4-6 parts of 2-ethyl-1-hexanol; further, 4 parts of ethyl cellulose, 4 parts of monomer resin, 1.5 parts of soybean lecithin, 10 parts of terpineol, 16 parts of medium-chain unsaturated fatty acid and 5 parts of 2-ethyl-1-hexanol.
In the inorganic additive, 4-6 parts of nano barium titanate and 5-7 parts of nano zirconium oxide are counted by weight; further, 5 parts of nano barium titanate and 6 parts of nano zirconium oxide.
In the embodiment, the electrode slurry which has more excellent performance and is suitable for the radio frequency microwave ceramic dielectric capacitor can be obtained according to the mutual matching and synergistic effect of the raw materials within the proportioning range.
The embodiment of the invention also provides a preparation method of the pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor, which comprises the following steps: (1) and (3) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 390 plus materials at 500 ℃, preserving the heat for 2-4h, and naturally cooling the oven to obtain the pretreated palladium powder. It should be noted that the particle size of the palladium powder is 0.2-1.5 μm, which facilitates to increase the contact area with the organic carrier and the inert additive. (2) Dissolving ethyl cellulose, monomer resin and soybean lecithin in terpineol, medium-chain unsaturated fatty acid and 2-ethyl-1-hexanol to obtain an organic carrier; mixing the pretreated palladium powder with an inorganic additive, adding the mixture into an organic carrier, and rolling the mixture into paste slurry by using a three-roll mill.
The features and properties of the present invention are described in further detail below with reference to examples.
Example 1
The embodiment provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is characterized by comprising the following steps: the method comprises the following steps:
(1) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 450 ℃, preserving the heat for 3 hours, and naturally cooling the oven to obtain pretreated palladium powder;
(2) after 44 parts of pretreated palladium powder and 9 parts of inorganic additives (4 parts of nano barium titanate and 5 parts of nano zirconium oxide) are mixed, 35 parts of organic carrier (3 parts of ethyl cellulose, 3 parts of monomer resin, 1 part of soybean lecithin, 9 parts of terpineol, 15 parts of medium-chain unsaturated fatty acid and 4 parts of 2-ethyl-1-hexanol) is added, and the mixture is rolled into paste slurry by a three-roll rolling mill.
Example 2
The embodiment provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is characterized by comprising the following steps: the method comprises the following steps:
(1) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation, adjusting the temperature of the oven to 450 ℃, preserving heat for 3 hours, and naturally cooling the oven to obtain pretreated palladium powder;
(2) after 50 parts of pretreated palladium powder and 13 parts of inorganic additives (6 parts of nano barium titanate and 7 parts of nano zirconium oxide) are mixed, 47 parts of organic carrier (6 parts of ethyl cellulose, 5 parts of monomer resin, 2 parts of soybean lecithin, 11 parts of terpineol, 17 parts of medium-chain unsaturated fatty acid and 6 parts of 2-ethyl-1-hexanol) is added, and the mixture is rolled into paste slurry by using a three-roll mill.
Example 3
The embodiment provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is characterized by comprising the following steps: the method comprises the following steps:
(1) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation, adjusting the temperature of the oven to 450 ℃, preserving heat for 3 hours, and naturally cooling the oven to obtain pretreated palladium powder;
(2) 48 parts of pretreated palladium powder and 11 parts of inorganic additives (5 parts of nano barium titanate and 6 parts of nano zirconium oxide) are mixed, 40.5 parts of organic carrier (4 parts of ethyl cellulose, 4 parts of monomer resin, 1.5 parts of soybean lecithin, 10 parts of terpineol, 16 parts of medium-chain unsaturated fatty acid and 5 parts of 2-ethyl-1-hexanol) is added, and a three-roll mill is used for rolling to form paste slurry.
Example 4
The embodiment provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is characterized by comprising the following steps: the method comprises the following steps:
(1) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 390 ℃, preserving the heat for 4 hours, and naturally cooling the oven to obtain pretreated palladium powder;
(2) 48 parts of pretreated palladium powder and 11 parts of inorganic additives (5 parts of nano barium titanate and 6 parts of nano zirconium oxide) are mixed, 40.5 parts of organic carrier (4 parts of ethyl cellulose, 4 parts of monomer resin, 1.5 parts of soybean lecithin, 10 parts of terpineol, 16 parts of medium-chain unsaturated fatty acid and 5 parts of 2-ethyl-1-hexanol) is added, and a paste slurry is rolled by a three-roll mill.
Example 5
The embodiment provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is characterized by comprising the following steps: the method comprises the following steps:
(1) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 500 ℃, preserving the heat for 2 hours, and naturally cooling the oven to obtain pretreated palladium powder;
(2) 48 parts of pretreated palladium powder and 11 parts of inorganic additives (5 parts of nano barium titanate and 6 parts of nano zirconium oxide) are mixed, 40.5 parts of organic carrier (4 parts of ethyl cellulose, 4 parts of monomer resin, 1.5 parts of soybean lecithin, 10 parts of terpineol, 16 parts of medium-chain unsaturated fatty acid and 5 parts of 2-ethyl-1-hexanol) is added, and a three-roll mill is used for rolling to form paste slurry.
Comparative example 1
The embodiment provides a preparation method of pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor, which is characterized by comprising the following steps: the method comprises the following steps: 48 parts of palladium powder and 11 parts of inorganic additives (5 parts of nano barium titanate and 6 parts of nano zirconium oxide) are mixed, 40.5 parts of organic carrier (4 parts of ethyl cellulose, 4 parts of monomer resin, 1.5 parts of soybean lecithin, 10 parts of terpineol, 16 parts of medium-chain unsaturated fatty acid and 5 parts of 2-ethyl-1-hexanol) is added, and the mixture is rolled into paste slurry by using a three-roll mill.
Experimental example 1
The experimental method comprises the following steps: the untreated palladium powder and the pretreated palladium powder prepared in example 3 were subjected to electron microscope scanning to obtain fig. 1 and fig. 2, respectively.
Comparing fig. 1 and fig. 2, it can be seen that the pretreated palladium powder after pretreatment has clearer particle edges, better dispersibility, good shape retention, and no influence on the preparation and dispersion of the slurry, compared with untreated palladium powder.
Experimental example 2
The experimental method comprises the following steps: thermogravimetric analysis was performed on the untreated palladium powder and the pretreated palladium powder prepared in example 3, respectively, to obtain fig. 3.
The palladium powder is not completely oxidized after pretreatment, and the palladium oxide accounts for about 20 percent of the total weight of the palladium powder. As can be seen from fig. 3, after pretreatment, the oxidation temperature of the pretreated palladium powder is raised to 450 ℃, which can avoid the expansion cracking during the de-binding process at 300 ℃.
Experimental example 3
The experimental method comprises the following steps: thermomechanical analysis was performed on the electrode paste prepared in example 3 and the electrode paste prepared in comparative example 1, and fig. 4 was obtained, respectively.
As can be seen from the results of fig. 4, the sintering shrinkage characteristics of the slurry prepared using the palladium powder pretreated in example 3 are closer to those of the porcelain itself (final shrinkage and initial expansion temperature).
Experimental example 4
The experimental method comprises the following steps: the electrode pastes prepared in examples 1 to 5 were used to produce MLCC products, respectively, and the produced products were divided into 5 groups of 10 products each for a total of 50 products. The structure of 50 MLCC products is shown in FIG. 5.
Comparing fig. 5 and fig. 6, it can be seen that the MLCC product prepared by the electrode paste prepared by the method provided by the embodiment of the present invention has a good structure without delamination cracking, and the MLCC product prepared by pure palladium has delamination cracking inside.
In conclusion, the pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor provided by the invention can overcome the defects of the existing metal palladium in the background technology, and has the advantages of good printing continuity, small expansion degree of the inner electrode in the sintering process and good sintering shrinkage matching with a ceramic body; the preparation method of the pure palladium inner electrode slurry for the radio frequency microwave ceramic dielectric capacitor provided by the invention is simple to operate, low in energy consumption and easy for industrial production.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A pure palladium inner electrode slurry for a radio frequency microwave ceramic dielectric capacitor is characterized in that: the raw materials of the catalyst comprise pretreated palladium powder, wherein the pretreated palladium powder is prepared by carrying out heat preservation treatment on the palladium powder; the heat preservation treatment method comprises the following steps: and flatly paving the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 390-plus-one temperature of 500 ℃, preserving the heat for 2-4h to oxidize the surface of the palladium powder, and naturally cooling the oven to obtain the pretreated palladium powder.
2. The pure palladium internal electrode paste for a radio frequency microwave ceramic dielectric capacitor as claimed in claim 1, wherein: the raw materials also comprise an organic carrier and an inorganic additive; the raw materials of the organic carrier comprise ethyl cellulose, monomer resin, soybean lecithin, terpineol, medium-chain unsaturated fatty acid and 2-ethyl-1-hexanol; the inorganic additive comprises nano barium titanate and nano zirconium oxide.
3. The pure palladium inner electrode paste for a radio frequency microwave ceramic dielectric capacitor as claimed in claim 2, wherein: according to parts by weight, the pretreated palladium powder is 44-50 parts, the organic carrier is 35-47 parts, and the inorganic additive is 9-13 parts.
4. The pure palladium internal electrode paste for a radio frequency microwave ceramic dielectric capacitor as claimed in claim 3, wherein: according to parts by weight, 3-6 parts of ethyl cellulose, 3-5 parts of monomer resin, 1-2 parts of soybean lecithin, 9-11 parts of terpineol, 15-17 parts of medium-chain unsaturated fatty acid and 4-6 parts of 2-ethyl-1-hexanol.
5. The pure palladium internal electrode paste for a radio frequency microwave ceramic dielectric capacitor as claimed in claim 3, wherein: the method is characterized in that: according to the weight portion, 4-6 portions of nano barium titanate and 5-7 portions of nano zirconium oxide are used.
6. The pure palladium inner electrode paste for a radio frequency microwave ceramic dielectric capacitor as claimed in claim 5, wherein: according to the weight portion, the nano barium titanate is 5 portions and the nano zirconia is 6 portions.
7. The preparation method of pure palladium internal electrode slurry for radio frequency microwave ceramic dielectric capacitors as claimed in any one of claims 2 to 6, characterized by comprising the following steps: the method comprises the following steps:
(1) spreading the palladium powder in a stainless steel tray, placing the stainless steel tray in an oven for heat preservation treatment, adjusting the temperature of the oven to 390-5 ℃, preserving the heat for 2-4h, and naturally cooling the oven to obtain the pretreated palladium powder;
(2) dissolving said ethylcellulose, said monomer resin, and said soybean lecithin in said terpineol, said medium chain unsaturated fatty acid, and 2-ethyl-1-hexanol to provide said organic vehicle; and mixing the pretreated palladium powder and the inorganic additive, adding the mixture into the organic carrier, and rolling the mixture into paste slurry by using a three-high mill.
8. The preparation method of the pure palladium inner electrode slurry for the radio-frequency microwave ceramic dielectric capacitor as claimed in claim 7, wherein the preparation method comprises the following steps: the particle size of the palladium powder is 0.2-1.5 mu m.
9. Use of a pure palladium internal electrode paste according to any one of claims 1 to 6 in a radio frequency microwave ceramic dielectric capacitor.
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JPH04282809A (en) * 1991-03-11 1992-10-07 Matsushita Electric Ind Co Ltd Manufacture of laminated ceramic capacitor
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