CN112133210B - Micro LED ink-jet printing device, transferring method, display panel and display device - Google Patents
Micro LED ink-jet printing device, transferring method, display panel and display device Download PDFInfo
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- CN112133210B CN112133210B CN202011035311.3A CN202011035311A CN112133210B CN 112133210 B CN112133210 B CN 112133210B CN 202011035311 A CN202011035311 A CN 202011035311A CN 112133210 B CN112133210 B CN 112133210B
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- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
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- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/951—Supplying the plurality of semiconductor or solid-state bodies
- H01L2224/95101—Supplying the plurality of semiconductor or solid-state bodies in a liquid medium
Abstract
The invention discloses a Micro LED ink-jet printing device, a transferring method, a display panel and a display device. The miniature LED ink-jet printing device comprises at least one miniature LED ink-jet printing structure, the miniature LED ink-jet printing structure comprises an ink box, a spray pipe and a nozzle, an ink-jet printing solvent is arranged in the ink box, the spray pipe is communicated with the ink box, the diameter d1 of the spray pipe and the maximum size d2 of the miniature LED meet the requirement that d2< d1<2 x d2, and the nozzle is connected to one end, far away from the ink box, of the spray pipe. According to the Micro LED ink-jet printing device provided by the invention, the diameter d1 of the spray pipe and the maximum size d2 of the Micro light-emitting diode are set to meet the requirement that d2 is smaller than d1 and smaller than 2 x d2, so that one Micro LED is guaranteed to be printed by ink-jet at each time, the Micro LED can be orderly arranged in an ink-jet printing mode, the array arrangement of the Micro LEDs can be conveniently realized subsequently, the transfer cost is reduced in the subsequent Micro LED transfer process, and the transfer efficiency and the yield of the Micro LEDs are improved.
Description
Technical Field
The embodiment of the invention relates to the technical field of display, in particular to a Micro LED ink-jet printing device, a transferring method, a display panel and a display device.
Background
The Micro light emitting diode (Micro LED) is a Micro LED array structure, has self-luminous display characteristics, and has the technical advantages of full solid state, long service life, high brightness, low power consumption, small volume, ultrahigh resolution, and applicability to extreme environments such as high temperature or radiation. Compared with the OLED technology which is self-luminous, the Micro LED has the advantages of high efficiency, long service life, relative stability due to the fact that the material is not easily influenced by the environment, and the phenomenon of ghost shadow can be avoided.
At present, when a Micro LED display is prepared, a large number of Micro LEDs with Micro dimensions need to be transferred to an array substrate, and before the Micro LED monomers are transferred, the Micro LEDs need to be precisely and directionally arranged, but no effective means for directionally arranging Micro elements with large dimension and ensuring the arrangement yield exists at present, and particularly for a high-resolution display, millions of Micro LED chips need to be arranged, which is more difficult and time-consuming. Therefore, it is an object of the present invention to provide a device capable of performing rapid and precise directional arrangement on Micro LEDs with large size and ensuring the arrangement yield.
Disclosure of Invention
The invention provides a Micro LED ink-jet printing device, a transferring method, a display panel and a display device, which can realize the ordered arrangement of Micro LEDs in an ink-jet printing mode, facilitate the subsequent realization of array arrangement of the Micro LEDs, facilitate the reduction of transferring cost in the subsequent Micro LED transferring process and improve the transferring efficiency and yield of the Micro LEDs. In a first aspect, an embodiment of the present invention provides a micro led inkjet printing apparatus, including at least one micro led inkjet printing structure, where the micro led inkjet printing structure includes an ink cartridge, a nozzle, and a nozzle;
an ink-jet printing solvent is arranged in the ink box;
the nozzle is communicated with the ink box, and the diameter d1 of the nozzle and the maximum size d2 of the micro light-emitting diode meet the requirement that d2< d1<2 x d 2;
the nozzle is connected to one end of the spray pipe, which is far away from the ink box.
In a second aspect, an embodiment of the present invention further provides a method for transporting a micro light emitting diode, including:
ink-jet printing a plurality of micro light-emitting diodes on a substrate by using any one of the micro light-emitting diode ink-jet printing devices of the first aspect;
applying an electric field on the substrate to enable the micro light-emitting diodes to be arrayed on the substrate;
and transferring the micro light-emitting diodes arranged in the array to the array substrate.
In a third aspect, an embodiment of the present invention further provides a micro light emitting diode display panel, including:
an array substrate;
and the micro light-emitting diodes are positioned on one side of the array substrate and are obtained by transferring any one micro light-emitting diode according to the transferring method of the second aspect.
In a fourth aspect, an embodiment of the present invention further provides a micro light emitting diode display device, including the micro light emitting diode display panel according to the third aspect.
The miniature LED ink-jet printing device provided by the embodiment of the invention comprises at least one miniature LED ink-jet printing structure, wherein the miniature LED ink-jet printing structure is provided with an ink box, a spray pipe and a nozzle, an ink-jet printing solvent is arranged in an accommodating space of the ink box, and the miniature LEDs are dispersed in the ink-jet printing solvent. Through setting up spray tube and ink horn intercommunication, and diameter d1 of spray tube and miniature emitting diode's maximum dimension d2 satisfies d2< d1<2 x d2, make the spray tube once only can pass through single miniature emitting diode, guarantee to jet ink at every turn and print a Micro LED, guarantee to print the mode through the inkjet and can realize the orderly arrangement of Micro LED, be convenient for follow-up array that realizes Micro LED arranges, be convenient for in follow-up Micro LED transportation process, reduce the cost of transportation, promote Micro LED transportation efficiency and yield. .
Drawings
Fig. 1 is a schematic structural diagram of a micro led inkjet printing apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a micro led inkjet printing structure according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a micro led inkjet printing structure according to an embodiment of the present invention when a micro led passes through a first predetermined position;
FIG. 4 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention when a micro LED passes through a first predetermined position;
FIG. 6 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention when a micro LED passes through a first predetermined position;
FIG. 8 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention;
FIG. 11 is a schematic view of a portion of the first filter and the second filter of FIG. 9;
FIG. 12 is a schematic view of another partial configuration of the first filter and the second filter of FIG. 9;
FIG. 13 is a schematic structural diagram of another micro LED inkjet printing structure according to an embodiment of the present invention;
fig. 14 is a schematic structural diagram of a method for transporting a micro light emitting diode according to an embodiment of the present invention;
fig. 15 is a schematic structural diagram of a micro light emitting diode display panel according to an embodiment of the present invention;
fig. 16 is a schematic structural diagram of a micro light emitting diode display device according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings, not all of them.
Fig. 1 is a schematic structural diagram of a micro led inkjet printing apparatus according to an embodiment of the present invention, and as shown in fig. 1, the micro led inkjet printing apparatus according to the embodiment of the present invention includes at least one micro led inkjet printing structure 10, where the micro led inkjet printing structure 10 includes an ink cartridge 11, a nozzle 12, and a nozzle 13; the ink box 11 is provided with an ink-jet printing solvent; the nozzle 12 communicates with the cartridge 11, the diameter d1 of the nozzle 12 and the maximum dimension d2 of the micro light emitting diode 14 satisfy d2< d1<2 x d 2; the nozzle 13 is connected to the end of the nozzle 12 remote from the cartridge 11.
Specifically, the micro led inkjet printing apparatus provided in the embodiment of the present invention may include one micro led inkjet printing structure 10, and may also include a plurality of micro led inkjet printing structures 10, and when the micro led inkjet printing apparatus includes a plurality of micro led inkjet printing structures 10, each micro led inkjet printing structure 10 may print on a micro led 14 emitting light of a different color, so as to implement synchronous printing on the micro leds 14 emitting light of different colors, and improve printing efficiency.
As shown in fig. 1, taking a micro led inkjet printing structure 10 as an example, the micro led inkjet printing structure 10 includes an ink cartridge 11, a nozzle 12 and a nozzle 13, an ink-jet printing solvent is disposed in a receiving space of the ink cartridge 11, and micro leds 14 are dispersed in the ink-jet printing solvent. The nozzle 12 is communicated with the ink cartridge 11, wherein the nozzle 12 is a hollow tube, the inside of the nozzle 12 includes a receiving space, and the receiving space of the nozzle 12 is communicated with the receiving space of the ink cartridge 11, so that the inkjet printing solvent dispersed with the micro light emitting diode 14 in the ink cartridge 11 can flow into the nozzle 12. The diameter d1 of the nozzle 12 and the maximum dimension d2 of the micro light emitting diode 14 satisfy d2< d1<2 × d2, for example, the diameter d1 of the nozzle 12 is 1.1-1.9 times of the maximum dimension d2 of the micro light emitting diode 14, so that the nozzle 12 can only pass through a single micro light emitting diode 14 at a time, and the micro light emitting diode inkjet printing structure 10 can print the micro light emitting diodes 14 one by one on the corresponding position of the substrate, which is helpful for improving the printing precision. The nozzle 13 is connected to one end of the nozzle 12 far away from the ink box 11, and the ink-jet printing solvent of the single micro light-emitting diode 14 contained in the nozzle 12 forms stable printing liquid drops through the nozzle 13, so that uniform ink-jet printing operation is realized.
The micro light-emitting diode ink-jet printing device provided by the embodiment of the invention comprises at least one micro light-emitting diode ink-jet printing structure 10, wherein the micro light-emitting diode ink-jet printing structure 10 is provided with an ink box 11, a spray pipe 12 and a nozzle 13, an ink-jet printing solvent is arranged in an accommodating space of the ink box 11, and micro light-emitting diodes 14 are dispersed in the ink-jet printing solvent. Through setting up spray tube 12 and ink horn 11 intercommunication, and diameter d1 of spray tube 12 satisfies d2 with miniature emitting diode 14's maximum dimension d2 and d1<2 x d2, make spray tube 12 once only can pass through single miniature emitting diode 14, guarantee to realize the orderly arrangement of Micro LED through the mode that the inkjet was printed, be convenient for follow-up array that realizes Micro LED arranges, be convenient for in follow-up Micro LED transportation process, reduce the cost of transportation, promote Micro LED transportation efficiency and yield
Fig. 2 is a schematic structural diagram of a micro led inkjet printing structure according to an embodiment of the present invention, and optionally, the micro led inkjet printing structure 10 further includes an induction transmission control module 15, the induction transmission control module 15 is disposed in the nozzle 12, the induction transmission control module 15 includes an induction unit 151 and a transmission unit 152, the induction unit 151 is configured to induce the micro led 14 to pass through a first preset position in the nozzle 12, and the transmission unit 152 is configured to transmit one micro led 14 to the nozzle 13 and block another micro led 14 from moving toward the nozzle 13.
Specifically, as shown in FIG. 2, the induction transfer control module 15 is disposed within the nozzle 12, such as on an interior wall of the nozzle 12 at a lower end thereof. The sensing and transmitting control module 15 includes a sensing unit 151 and a transmitting unit 152, the sensing unit 151 is configured to sense that the micro light emitting diode 14 passes through the first preset position 20 in the nozzle 12, as shown in fig. 2, the first preset position 20 may be a position of the sensing unit 151 in the nozzle 12, and in other embodiments, a person skilled in the art may set the first preset position according to actual needs. The transmission unit 152 is used for transmitting one micro led 14 to the nozzle 13 and blocking another micro led 14 from moving to the nozzle 13.
Fig. 3 is a schematic structural diagram of a micro led inkjet printing structure when a micro led passes through a first preset position, for example, as shown in fig. 3, when the sensing unit 151 senses that a single micro led 14 passes through the first preset position 20 of the nozzle 12, the conveying unit 152 is started, as shown in fig. 3, the conveying unit 152 may be configured as a cover plate similar to a cover, and further presses the single micro led 14 passing through the first preset position 20 to the nozzle 13, and simultaneously blocks other micro leds 14 above from falling into the nozzle 13 to form a stable printing liquid drop, so that the micro led inkjet printing structure 10 can uniformly print one micro led 14 at a corresponding position of a substrate.
Fig. 4 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention, and fig. 5 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention when a micro led passes through a first preset position, as shown in fig. 4 and fig. 5, optionally, the conveying unit 152 includes a conveying cover 21 and a connecting rotating shaft 22, the conveying cover 21 is rotatably connected to an inner wall of the nozzle 12 through the connecting rotating shaft 22, when the sensing unit 151 senses that the micro led 14 passes through the first preset position 20 in the nozzle 12, the conveying cover 21 is rotated to a second preset position, an included angle θ between a plane of the second preset position and the first direction X satisfies an angle of 60 ° θ ≦ 90 °, and the first direction X is parallel to a direction in which the ink cartridge 11 points to the nozzle 13.
Specifically, as shown in fig. 4 and 5, the transmitting cover 21 is rotatably connected to the inner wall of the nozzle 12 through a connecting shaft 22, and the transmitting cover 21 is attached to the inner wall, so that the inkjet printing solvent can drive the micro light emitting diode 14 to flow. When the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 of the nozzle 12, the transmitting unit 152 is started, the transmitting cover plate 21 rotates around the connecting rotating shaft 22 to a second preset position, as shown in fig. 5, the transmitting cover plate 21 is located at the second preset position, an included angle theta between a plane where the second preset position is located and the first direction X satisfies 60 degrees or more and 90 degrees or less, at this time, the transmitting cover plate 21 is approximately horizontally arranged in the nozzle 12, the single micro light emitting diode 14 passing through the first preset position 20 is further pressed down to the nozzle 13, meanwhile, other micro light emitting diodes 14 above are prevented from falling into the nozzle 13, the single micro light emitting diode 14 falling into the nozzle 13 subsequently forms a stable printing liquid drop, after the printing liquid drop containing the single micro light emitting diode 14 falls, the transmitting cover plate 21 returns to the initial position, and then when the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 of the nozzle 12, the transfer unit 152 is activated again so that the micro light emitting diodes 14 are uniformly printed on the corresponding positions of the substrate one by one.
With continued reference to fig. 4 and 5, optionally, the sensing unit 151 is disposed on the transmitting cover 21, before the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 in the nozzle 12, the transmitting cover 21 is disposed parallel to the inner wall of the nozzle 12, the connecting rotation shaft 22 is disposed on a side of the transmitting cover 21 close to the nozzle 13, and when the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 in the nozzle 12, the transmitting cover 21 rotates around the connecting rotation shaft 22 to the second preset position.
Specifically, the sensing unit 151 is disposed on the transmitting cover 21, before the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 in the nozzle 12, the transmitting cover 21 is disposed parallel to the inner wall of the nozzle 12, and the transmitting cover 21 extends along the first direction X, at this time, the inkjet printing solvent may flow from the nozzle 12 to the nozzle 13, so as to drive the micro light emitting diode 14 dispersed in the inkjet printing solvent to flow. The connecting shaft 22 is located on one side of the transmitting cover 21 close to the nozzle 13, the transmitting cover 21 is rotatably connected to the inner wall of the nozzle 12 through the connecting shaft 22, when the inkjet printing solvent drives the micro light emitting diodes 14 to flow to the first preset position 20, the sensing unit 151 senses that the micro light emitting diodes 14 pass through the first preset position 20, the transmitting unit 152 is started, the transmitting cover 21 rotates to the second preset position around the connecting shaft 22, so as to further press the single micro light emitting diode 14 passing through the first preset position 20 to the nozzle 13, and simultaneously block other micro light emitting diodes 14 above from falling into the nozzle 13, the single micro light emitting diode 14 falling into the nozzle 13 forms a stable printing liquid drop, after the printing liquid drop containing the single micro light emitting diode 14 falls, the transmitting cover 21 returns to the initial position, and then when the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 of the nozzle 12 again, the transfer unit 152 is activated again so that the micro light emitting diodes 14 are uniformly printed on the corresponding positions of the substrate one by one.
With continued reference to fig. 4 and 5, optionally, the transferring unit 152 further includes a sliding rail 23, the sliding rail 23 is disposed on the inner wall of the nozzle 12, the transferring cover 21 is slidably connected to the sliding rail 23, and the transferring cover 21 is configured to slide along the sliding rail 23 to transfer a micro light emitting diode 14 to the nozzle 13.
Specifically, as shown in fig. 4, the sliding rail 23 is disposed on the inner wall of the nozzle 12, the sliding rail 23 extends along the first direction X, the transmitting cover 21 is slidably connected to the sliding rail 23, and the transmitting cover 21 is located on a side of the sliding rail 23 away from the nozzle 13 before the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20 in the nozzle 12.
When the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20, the conveying cover plate 21 rotates to the second preset position around the connecting rotating shaft 22 to prevent other micro light emitting diodes 14 above from falling into the nozzle 13, and simultaneously the connecting rotating shaft 22 and the conveying cover plate 21 slide to the direction of the nozzle 13 along the sliding track 23 together to convey a single micro light emitting diode 14 to the nozzle 13 and extrude the single micro light emitting diode 14 in the ink-jet printing solvent out of the nozzle 13 to form stable printing liquid drops, so that uniform printing is realized.
Fig. 6 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention, and fig. 7 is a schematic structural diagram of the micro led inkjet printing structure when a micro led passes through a first preset position according to the embodiment of the present invention, as shown in fig. 6 and 7, optionally, the micro led inkjet printing structure 10 further includes a solvent injection pipe 16, the solvent injection pipe 16 is disposed between the conveying cover 21 and the nozzle 13 along the first direction X, and the solvent injection pipe 16 is communicated with the nozzle 12, and the solvent injection pipe 16 is used for injecting an inkjet printing solvent into the nozzle 12.
Specifically, as shown in fig. 6 and 7, the solvent injection pipe 16 is disposed between the transfer cover 21 and the nozzle 13 along the first direction X, and the solvent injection pipe 16 is communicated with the nozzle 12, and the solvent injection pipe 16 can transfer the inkjet printing solvent without the micro light emitting diode 14. When the sensing unit 151 senses that the micro light emitting diode 14 passes through the first preset position 20, the conveying cover plate 21 rotates to the second preset position around the connecting rotating shaft 22 to prevent other micro light emitting diodes 14 above from falling into the nozzle 13, meanwhile, the solvent injection pipe 16 injects the ink jet printing solvent into the spray pipe 12, the spray pipe 12 is pressurized by injecting the ink jet printing solvent, the ink jet printing solvent containing the micro light emitting diode 14 is enabled to drop smoothly, the ink jet printing solvent in the spray pipe 12 is compensated, and printing of the micro light emitting diode 14 is achieved.
With continued reference to fig. 7, optionally, the diameter d3 of transfer deck 21 and the diameter d1 of nozzle 12 satisfy 0.8 × d1< d3< d 1.
The diameter d3 of the conveying cover plate 21 and the diameter d1 of the spray pipe 12 are set to meet the requirement that 0.8 x d1< d3< d1, so that the conveying cover plate 21 can prevent other micro light-emitting diodes 14 above from falling into the spray nozzle 13 when in the second preset position. Illustratively, the diameter d3 of the transfer cover 21 and the diameter d1 of the nozzle 12 are set to satisfy 0.9 × d1< d3<0.99 × d1, so that the transfer cover 21 is not stuck in the nozzle 12 and the smoothness of rotation of the transfer cover 21 is ensured while the transfer cover 21 is in the second preset position to block other micro light emitting diodes 14 above the transfer cover from falling into the nozzle 13. In other embodiments, the diameter d3 of the transfer deck 21 can be set by those skilled in the art according to actual requirements, and generally the diameter d3 of the transfer deck 21 is slightly smaller than the diameter d1 of the nozzle 12.
Fig. 8 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention, as shown in fig. 8, optionally, the micro led inkjet printing structure 10 further includes a first filter 17, the first filter 17 is disposed between the ink cartridge 11 and the nozzle 12 along a first direction X, and the first direction X is parallel to a direction in which the ink cartridge 11 points to the nozzle 13.
Specifically, as shown in fig. 8, the first filter 17 is disposed between the ink cartridge 11 and the nozzle 12, so as to slow down the flow velocity of the micro light emitting diode 14 and prevent the micro light emitting diode 14 from blocking the nozzle 12. The first filter 17 is provided with meshes, and the diameter of the meshes can be set to be larger than the maximum dimension d2 of the micro light-emitting diodes 14 and smaller than 2 times of the maximum dimension d2 of the micro light-emitting diodes 14, so that the single micro light-emitting diode 14 passes through the meshes, which helps to ensure the orderly printing of the micro light-emitting diodes 14. In other embodiments, the first filter 17 may be set by those skilled in the art according to practical requirements, and for example, the diameter of the mesh on the first filter 17 is set to be 1.1-1.9 times the maximum size d2 of the micro light emitting diode 14, which is not limited by the embodiment of the present invention.
Fig. 9 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention, and as shown in fig. 9, optionally, the micro led inkjet printing structure 10 further includes at least one stage of transition chamber 18, and the transition chamber 18 is disposed between the ink cartridge 11 and the nozzle 12 along the first direction X.
Specifically, as shown in fig. 9, the transition chamber 18 is disposed between the ink cartridge 11 and the nozzle 12, the diameter of the transition chamber 18 is smaller than the diameter of the ink cartridge 11, and the diameter of the transition chamber 18 is larger than the diameter of the nozzle 12, so that the number of the micro leds 14 in the ink cartridge 11 gradually decreases as the micro leds 14 flow through the transition chamber 18 and the nozzle 12, which helps to further prevent the micro leds 14 from blocking the nozzle 12.
Fig. 10 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention, as shown in fig. 10, optionally, the micro led inkjet printing structure 10 includes at least two stages of transition chambers 18, where the at least two stages of transition chambers 18 include a first stage transition chamber 181 and a second stage transition chamber 182, the first stage transition chamber 181 is located on a side of the ink cartridge 11 facing the nozzle 12, the second stage transition chamber 182 is located on a side of the first stage transition chamber 181 facing the nozzle 12, a diameter of the first stage transition chamber 181 is smaller than a diameter of the ink cartridge 11, a diameter of the second stage transition chamber 182 is smaller than a diameter of the first stage transition chamber 181, and a diameter of the nozzle 12 is smaller than a diameter of the second stage transition chamber 182.
Illustratively, as shown in fig. 10, the at least two stages of transition compartments 18 include a first stage transition compartment 181 and a second stage transition compartment 182 that are sequentially disposed along the ink cartridge 11 toward the nozzle 12, and the diameters of the first stage transition compartment 181 and the second stage transition compartment 182 are sequentially reduced such that the at least two stages of transition compartments 18 are narrowed in a stepped manner. The micro light emitting diodes 14 in the ink box 11 are partially filtered by the first filter screen 17 and then enter at least two stages of transition chambers 18, and the number of the micro light emitting diodes 14 contained in the first stage transition chamber 181 and the second stage transition chamber 182 is gradually reduced until one micro light emitting diode 14 enters the spray pipe 12, which is helpful for further preventing the micro light emitting diodes 14 from blocking the spray pipe 12.
In other embodiments, one skilled in the art can configure the number of transition compartments 18 to form multiple stages of transition compartments 18 as desired. The diameter of the multi-stage transition chamber 18 decreases in the direction of the ink cartridge 11 toward the nozzle 12, so that the multi-stage transition chamber 18 narrows in a step shape to further avoid the micro-leds 14 from blocking the nozzle 12.
Fig. 11 is a partial structure diagram of the first filter and the second filter in fig. 9, and as shown in fig. 9-11, optionally, a second filter 19 is disposed on a side of each stage of the transition chamber 18 facing the nozzle 12, a plurality of meshes 171 are disposed in the first filter 17, at least one mesh 191 is disposed in the second filter 19, and the number of meshes in the filters is gradually reduced along the first direction X.
As shown in fig. 9 to 11, a second filter 19 is disposed on one side of each stage of the transition compartment 18 facing the nozzle 12, so as to perform multi-stage filtering on the micro light emitting diodes 14, and the number of meshes in the first filter 17 and the second filter 19 is gradually reduced along the first direction X, so that the number of the micro light emitting diodes 14 included in each stage of the transition compartment 18 is gradually reduced until one micro light emitting diode enters the nozzle 12, which is helpful for further preventing the micro light emitting diodes 14 from blocking the nozzle 12.
Fig. 12 is another partial structure diagram of the first filter and the second filter in fig. 9, as shown in fig. 9, 10 and 12, optionally, a second filter 19 is disposed on a side of each stage of the transition chamber 18 facing the nozzle 12, at least one mesh 172 is disposed in the first filter 17, at least one mesh 192 is disposed in the second filter 19, and the mesh size in the filters gradually decreases along the first direction X.
As shown in fig. 9, 10 and 12, a second filter 19 is disposed on a side of each stage of the transition chamber 18 facing the nozzle 12, so as to perform multi-stage filtering on the micro leds 14, and the mesh size of the first filter 17 and the second filter 19 is gradually reduced along the first direction X, so that the number of the micro leds 14 contained in each stage of the transition chamber 18 is gradually reduced until one micro led enters the nozzle 12, which helps to further prevent the micro leds 14 from blocking the nozzle 12.
It should be noted that, the shape of the first filter 17 and the second filter 19 and the shape of the mesh holes may be set by those skilled in the art according to actual needs, for example, the shape is circular, oval, rectangular, and any other shapes, which is not limited by the embodiment of the present invention.
In other embodiments, the mesh density in the first filter 17 and the second filter 19 may be gradually decreased, so that the number of the micro leds 14 included in each stage of the transition chamber 18 is gradually decreased until one micro led enters the nozzle 12, thereby further preventing the micro leds 14 from blocking the nozzle 12, which is not limited in the embodiment of the present invention.
Optionally, the nozzle 13 comprises a piezo ceramic nozzle.
The piezoelectric ink-jet printing technology is characterized by that several small piezoelectric ceramics are placed near the nozzle of printing head, and under the action of pulse voltage signal change of two ends the piezoelectric ceramics have the characteristic of bending deformation, and when the pulse voltage signal is applied to the piezoelectric ceramics, the stretching vibration deformation of the piezoelectric ceramics can be changed along with the change of pulse voltage signal, and the ink in the nozzle can be uniformly and accurately jetted out under the stable state of normal temperature and normal pressure. The piezoelectric ink jet printing technology has stronger control capability on ink drops, the particle shapes of the ink drops are more regular, the positioning is more accurate, the printing resolution ratio is higher, and high-precision printing is easy to realize. As described above, the nozzle 13 may be a piezoelectric ceramic nozzle, and the piezoelectric ceramic is deformed by controlling a pulse voltage signal applied to the piezoelectric ceramic nozzle, specifically, before the micro light emitting diode 14 reaches the nozzle, the piezoelectric ceramic nozzle is slightly contracted under the control of the pulse voltage signal, and then, the piezoelectric ceramic nozzle generates a large extension for one time to push the inkjet printing solvent including the single micro light emitting diode 14 out of the piezoelectric ceramic nozzle, and at the instant when the inkjet printing solvent including the single micro light emitting diode 14 is about to fly away from the piezoelectric ceramic nozzle, the piezoelectric ceramic nozzle is contracted to cut off and extrude the inkjet printing solvent including the single micro light emitting diode 14 from the piezoelectric ceramic nozzle, thereby forming a stable printing liquid drop and realizing high-precision printing.
In other embodiments, the nozzle 13 may be configured by those skilled in the art according to actual needs, which is not limited by the embodiments of the present invention, for example, an electric field may be formed at the nozzle 13, the inkjet printing solvent droplet may have a positive charge, under the action of the electric field, the inkjet printing solvent droplet containing a single micro light emitting diode 14 is repelled and thus squeezed out of the nozzle 13, and then the direction of the electric field is changed, so that the inkjet printing solvent still located in the nozzle 13 is attracted, thereby disconnecting the inkjet printing solvent droplet containing a single micro light emitting diode 14 from the inkjet printing solvent located in the nozzle 13, forming a stable printing droplet, and realizing high-precision printing. The inkjet printing solvent droplets may also be negatively charged, and only by changing the direction of the external electric field, the inkjet printing solvent droplets containing a single micro light emitting diode 14 are extruded from the nozzle 13, and finally stable printing droplets are formed.
Optionally, the viscosity coefficient of the ink-jet printing solvent is eta, wherein eta is more than or equal to 5cPs and less than or equal to 500cPs, the mass density of the ink-jet printing solvent is rho 1, and the mass density of the micro light-emitting diode 14 is rho 2, wherein | rho 1-rho 2|<0.1g/cm3。
The viscosity coefficient eta of the ink-jet printing solvent is set to be more than or equal to 5cPs and less than or equal to 500cPs, so that the ink-jet printing solvent is easy to flow and not easy to block, and the ink-jet printing solvent containing a single micro light-emitting diode 14 can form stable printing liquid drops. By setting the mass density rho 1 of the ink-jet printing solvent and the mass density rho 2 of the micro light-emitting diode 14 to satisfy | rho 1-rho 2| <0.1g/cm3, the density difference between the ink-jet printing solvent and the micro light-emitting diode 14 is small, so that the micro light-emitting diode 14 can be uniformly dispersed in the ink-jet printing solvent, and the spray pipe 12 cannot be blocked due to quick floating or sinking.
Optionally, the inkjet printing solvent is a volatile solvent.
The ink-jet printing solvent is set to be a volatile solvent, and can be volatilized automatically after the micro light-emitting diode 14 is printed on the substrate, so that a process for removing the ink-jet printing solvent is not needed, and the process steps are simplified.
In other embodiments, a person skilled in the art can set the inkjet printing solvent according to actual needs, which is not limited in the embodiments of the present invention, and for example, the inkjet printing solvent can be set to be a transparent solvent, and the sensing unit 151 adopts a light sensing unit, so as to help the sensing unit 151 accurately sense whether the micro light emitting diode 14 passes through the first preset position 20.
Optionally, the volatilizable solvent comprises at least one of alkanes, benzene and its derivatives, alcohols, and ethers.
For example, the volatilizable solvent can be alkane with 6-12 carbons, the density is not too low or too high, the transparency is high and the volatilizable solvent is easy to volatilize, in other embodiments, the volatilizable solvent can be set by those skilled in the art according to actual needs, and the embodiments of the present invention are not limited thereto.
Fig. 13 is a schematic structural diagram of another micro led inkjet printing structure according to an embodiment of the present invention, and as shown in fig. 13, optionally, the micro led inkjet printing apparatus according to an embodiment of the present invention includes a first micro led inkjet printing structure 101, a second micro led inkjet printing structure 102, and a third micro led inkjet printing structure 103, where the first micro led inkjet printing structure 101 is used for inkjet printing red micro leds, the second micro led inkjet printing structure 102 is used for inkjet printing green micro leds, and the third micro led inkjet printing structure 103 is used for inkjet printing blue micro leds.
The traditional Micro LED display mode is generally monochrome display, colorization of the Micro LED display is a key technology for further expanding application of the Micro LED display, and an RGB three-color LED method is one of important technical directions for realizing colorization. The RGB three-color LED method full-color display is mainly based on the basic principle of three primary colors (red, green and blue) color mixing, realizes the combination of the three primary colors and achieves the effect of full-color display. The RGB three-color method of the Micro LED requires three types of red, green, and blue Micro LEDs 14, and three types of red, green, and blue Micro LEDs 14 need to be transported three times in the prior art, which increases the difficulty of the process and the technology, reduces the yield, and increases the production cost. The micro light-emitting diode ink-jet printing device provided by the embodiment of the invention is provided with the first micro light-emitting diode ink-jet printing structure 101, the second micro light-emitting diode ink-jet printing structure 102 and the third micro light-emitting diode ink-jet printing structure 103 to simultaneously print the red light micro light-emitting diode, the green light micro light-emitting diode and the blue light micro light-emitting diode to form a micro light-emitting diode array, and only one transfer is needed in the follow-up process, so that the efficiency is improved, and the production cost is reduced.
According to the micro light-emitting diode ink-jet printing device provided by the embodiment of the invention, the induction transmission control module 15 is arranged in the spray pipe 12, when a single micro light-emitting diode 14 passes through the first preset position 20 of the spray pipe 12, the single micro light-emitting diode 14 passing through the first preset position 20 is further pressed down to the nozzle 13, and other micro light-emitting diodes 14 above are prevented from falling into the nozzle 13 to form stable printing liquid drops, so that the micro light-emitting diode ink-jet printing structure 10 can uniformly print one micro light-emitting diode 14 at a corresponding position of a substrate. By arranging the multistage transition cabin and the filter screens, the flow speed of the micro light-emitting diodes 14 is reduced, and the micro light-emitting diodes 14 are prevented from blocking the spray pipe 12. Through setting up first miniature emitting diode ink jet printing structure 101, the miniature emitting diode ink jet printing structure of second 102 and the miniature emitting diode of third 103 to print the miniature emitting diode of ruddiness, the miniature emitting diode of green glow and the miniature emitting diode of blue light simultaneously, form miniature emitting diode array, follow-up only need once transport, raise the efficiency and reduced manufacturing cost.
Based on the same inventive concept, an embodiment of the present invention further provides a micro light emitting diode transfer method, and fig. 14 is a schematic structural diagram of the micro light emitting diode transfer method provided by the embodiment of the present invention, as shown in fig. 14, the micro light emitting diode transfer method provided by the embodiment of the present invention includes:
step 110, ink-jet printing a plurality of micro light-emitting diodes on a substrate by using the micro light-emitting diode ink-jet printing device provided in any of the above embodiments.
For example, the micro-led inkjet printing apparatus may be provided with a multi-stage transition chamber, an inductive transfer control module, and a solvent injection tube, and a small amount of inkjet printing solvent is first filled into the cartridge. If three micro light-emitting diodes of RGB (red, green and blue) need to be transferred, the micro light-emitting diode ink-jet printing device is provided with three groups of micro light-emitting diode ink-jet printing structures. And placing a substrate below the micro light-emitting diode ink-jet printing device, moving the nozzle to the initial position of the micro light-emitting diode array to be formed, starting printing, fully filling the ink-jet printing solvent in each spray pipe and each nozzle, and ensuring the size of liquid drops and the drop speed to be stable. And then putting the micro light-emitting diode into the ink box, wherein the micro light-emitting diode gradually flows into the multi-stage transition cabin along with the ink-jet printing solvent from the ink box and finally enters the spray pipe, when the sensing transmission control module senses that the micro light-emitting diode passes through the first preset position, the sensing transmission control module is started to further press the micro light-emitting diode down to the nozzle, and meanwhile, the solvent injection pipe is started to inject a certain amount of ink-jet printing solvent into the spray pipe, so that the ink-jet printing solvent at the nozzle forms a certain positive pressure, and the ink-jet printing solvent is favorable for carrying the micro light-emitting diode to be sprayed out of the nozzle. When one micro light-emitting diode smoothly falls to the appointed position of the substrate, the nozzle moves to the next position, and the process is repeated until the micro light-emitting diode array is printed.
And 120, applying an electric field on the substrate to enable the micro light-emitting diodes to be arrayed on the substrate.
Electric fields with certain shapes and waveforms are applied to the upper and lower parts of the substrate, so that the micro light-emitting diodes move to the designated positions under the action of the electric fields, and regular arrangement is realized.
And step 130, transferring the plurality of micro light-emitting diodes arranged in the array to the array substrate.
And transferring the plurality of micro light-emitting diodes in array arrangement to the array substrate in a centralized manner to finish the manufacture.
Optionally, the micro light emitting diode inkjet printing device includes a first micro light emitting diode inkjet printing structure, a second micro light emitting diode inkjet printing structure, and a second micro light emitting diode inkjet printing structure.
Ink-jet printing a plurality of micro light-emitting diodes on a substrate, comprising:
and ink-jet printing a plurality of red light micro light-emitting diodes on the substrate by adopting a first micro light-emitting diode ink-jet printing structure.
And ink-jet printing a plurality of green micro light-emitting diodes on the substrate by adopting a second micro light-emitting diode ink-jet printing structure.
And ink-jet printing a plurality of blue micro light-emitting diodes on the substrate by adopting a third micro light-emitting diode ink-jet printing structure.
If three types of miniature light emitting diodes of RGB (red, green and blue) need to be transferred, the miniature light emitting diode ink-jet printing device is provided with a first miniature light emitting diode ink-jet printing structure for ink-jet printing of a plurality of red-light miniature light emitting diodes on a substrate, a second miniature light emitting diode ink-jet printing structure for ink-jet printing of a plurality of green-light miniature light emitting diodes on the substrate, and a third miniature light emitting diode ink-jet printing structure for ink-jet printing of a plurality of blue-light miniature light emitting diodes on the substrate, so that the purpose of simultaneously printing the red-light miniature light emitting diodes, the green-light miniature light emitting diodes and the blue-light miniature light emitting diodes is realized, and the follow-up operation only needs one-time transfer, the efficiency is improved, and the production cost is reduced.
On the basis of the above embodiment, applying an electric field on the substrate to make the plurality of micro light emitting diodes arranged in an array on the substrate includes:
and applying a first electric field on the substrate to enable the plurality of red micro light-emitting diodes to be arrayed on the substrate.
And applying a second electric field on the substrate to enable the green micro light-emitting diodes to be arrayed on the substrate.
And applying a third electric field on the substrate to enable the plurality of blue micro light-emitting diodes to be arrayed on the substrate.
The first electric field, the second electric field and the third electric field are respectively applied to the substrate, so that the red light micro light-emitting diode, the green light micro light-emitting diode and the blue light micro light-emitting diode respectively move to the designated positions under the action of the electric fields, and regular arrangement is realized.
In other embodiments, applying an electric field to the substrate to arrange the micro light emitting diodes in an array on the substrate may further include:
and applying a fourth electric field on the substrate to enable the plurality of red light micro light-emitting diodes, the plurality of green light micro light-emitting diodes and the blue light micro light-emitting diodes to be arrayed on the substrate.
The fourth electric field is applied to the substrate, so that the red light micro light-emitting diodes, the green light micro light-emitting diodes and the blue light micro light-emitting diodes move to the specified positions under the action of the electric field, regular arrangement is realized, the process steps are simplified, and the reduction of the production cost is facilitated.
According to the method for transporting the micro light-emitting diode provided by the embodiment of the invention, the micro light-emitting diode ink-jet printing device described in any embodiment of the invention is adopted to print the micro light-emitting diode, so that the method for transporting the micro light-emitting diode provided by the embodiment of the invention has the technical effects of the technical scheme in any embodiment, and the explanations of the structures and the terms which are the same as or corresponding to the embodiments are not repeated herein.
Based on the same inventive concept, an embodiment of the present invention further provides a micro light emitting diode display panel, and fig. 15 is a schematic structural diagram of the micro light emitting diode display panel provided in the embodiment of the present invention, as shown in fig. 15, the micro light emitting diode display panel includes an array substrate 31 and a plurality of micro light emitting diodes 32 located on one side of the array substrate 31, the micro light emitting diodes 32 are obtained by transferring the micro light emitting diodes according to the transferring method of any of the embodiments, the production efficiency is high, the production cost is low, and the explanation of the structure and the terminology which are the same as or corresponding to the embodiments is not repeated herein.
Based on the same inventive concept, an embodiment of the present invention further provides a micro light emitting diode display device, fig. 16 is a schematic structural diagram of the micro light emitting diode display device provided in the embodiment of the present invention, and as shown in fig. 16, the micro light emitting diode display device 40 includes a micro light emitting diode display panel 41 according to any embodiment of the present invention, so that the micro light emitting diode display device 40 provided in the embodiment of the present invention has the technical effects of the technical solutions in any embodiment, and explanations of structures and terms that are the same as or corresponding to the embodiments are omitted here. The micro led display device 40 provided in the embodiment of the present invention may be a mobile phone shown in fig. 16, or any electronic product with a display function, including but not limited to the following categories: the touch screen display system comprises a television, a notebook computer, a desktop display, a tablet computer, a digital camera, an intelligent bracelet, intelligent glasses, a vehicle-mounted display, medical equipment, industrial control equipment, a touch interaction terminal and the like, and the embodiment of the invention is not particularly limited in this respect.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (20)
1. The miniature LED ink-jet printing device is characterized by comprising at least one miniature LED ink-jet printing structure, wherein the miniature LED ink-jet printing structure comprises an ink box, a spray pipe and a nozzle;
an ink-jet printing solvent is arranged in the ink box, and micro light-emitting diodes are dispersed in the ink-jet printing solvent;
the nozzle is communicated with the ink box, the diameter d1 of the nozzle and the maximum size d2 of the micro light-emitting diode satisfy d2< d1<2 x d 2;
the nozzle is connected to one end of the spray pipe, which is far away from the ink box;
the micro light-emitting diode ink-jet printing structure also comprises an induction transmission control module, and the induction transmission control module is arranged in the spray pipe;
the induction transmission control module comprises an induction unit and a transmission unit, the induction unit is used for inducing the micro light-emitting diode to pass through a first preset position in the spray pipe, and the transmission unit is used for transmitting one micro light-emitting diode to the nozzle and blocking the other micro light-emitting diode from moving to the nozzle;
when the sensing unit senses that the micro light-emitting diodes pass through the first preset position of the spray pipe, the conveying unit conveys the micro light-emitting diodes passing through the first preset position to the nozzle, and simultaneously stops other micro light-emitting diodes from falling into the nozzle.
2. The micro led inkjet printing apparatus according to claim 1, wherein the transfer unit includes a transfer cover plate and a connection shaft, the transfer cover plate being rotatably connected to the inner wall of the nozzle through the connection shaft;
when the sensing unit senses that the micro light-emitting diode passes through the first preset position in the spray pipe, the conveying cover plate rotates to a second preset position, and an included angle theta between a plane where the second preset position is located and the first direction is larger than or equal to 60 degrees and smaller than or equal to 90 degrees; the first direction is parallel to a direction in which the ink cartridge is directed toward the nozzle.
3. The micro led inkjet printing apparatus according to claim 2, wherein the sensing unit is disposed on the transfer cover plate;
before the sensing unit senses that the micro light-emitting diode passes through the first preset position in the spray pipe, the conveying cover plate is arranged in parallel to the inner wall of the spray pipe, and the connecting rotating shaft is positioned on one side, close to the nozzle, of the conveying cover plate;
when the sensing unit senses that the micro light-emitting diode passes through the first preset position in the spray pipe, the conveying cover plate rotates to the second preset position around the connecting rotating shaft.
4. The micro led inkjet printing apparatus according to claim 3, wherein the transfer unit further comprises a slide rail disposed on an inner wall of the nozzle;
the transmission cover plate is connected with the sliding rail in a sliding mode and used for sliding along the sliding rail so as to transmit the micro light-emitting diode to the nozzle.
5. The micro led inkjet printing apparatus of claim 4, wherein the micro led inkjet printing structure further comprises a solvent injection tube;
along the first direction, the solvent injection pipe is arranged between the conveying cover plate and the nozzle and communicated with the spray pipe, and the solvent injection pipe is used for injecting the ink-jet printing solvent into the spray pipe.
6. The micro led inkjet printing apparatus according to any one of claims 2 to 5, wherein a diameter d3 of the transfer deck and a diameter d1 of the nozzle satisfy 0.8 x d1< d3< d 1.
7. The micro led inkjet printing apparatus of claim 1, wherein the micro led inkjet printing structure further comprises a first filter;
along a first direction, the first filter screen is arranged between the ink box and the spray pipe; the first direction is parallel to a direction in which the ink cartridge is directed toward the nozzle.
8. The micro led inkjet printing apparatus of claim 7, wherein the micro led inkjet printing structure further comprises at least one stage of a transition chamber;
along the first direction, the transition compartment is disposed between the ink cartridge and the nozzle.
9. The micro led inkjet printing apparatus of claim 8, wherein the micro led inkjet printing structure comprises at least two stages of bays;
the at least two stages of transition cabins comprise a first stage transition cabin and a second stage transition cabin, the first stage transition cabin is positioned on one side of the ink box facing the spray pipe, and the second stage transition cabin is positioned on one side of the first stage transition cabin facing the spray pipe;
the diameter of the first-stage transition cabin is smaller than that of the ink box, the diameter of the second-stage transition cabin is smaller than that of the first-stage transition cabin, and the diameter of the spray pipe is smaller than that of the second-stage transition cabin.
10. The micro led inkjet printing apparatus according to claim 8, wherein each stage of the transition chamber is provided with a second filter screen on a side facing the nozzle;
the first filter screen is provided with a plurality of meshes, and the second filter screen is provided with at least one mesh;
along the first direction, the number of meshes in the filter screen gradually decreases.
11. The micro led inkjet printing apparatus according to claim 8, wherein each stage of the transition compartment is provided with a second filter screen on a side facing the nozzle;
the first filter screen is provided with at least one mesh, and the second filter screen is provided with at least one mesh;
along the first direction, the mesh size in the filter screen gradually decreases.
12. The micro led inkjet printing apparatus of claim 1, wherein the nozzle comprises a piezo ceramic nozzle.
13. The micro led inkjet printing apparatus of claim 1, wherein the inkjet printing solvent has a viscosity coefficient η, wherein η ≦ 5cPs ≦ 500 cPs;
the mass density of the ink-jet printing solvent is rho 1, the mass density of the micro light-emitting diode is rho 2, wherein | rho 1-rho 2<0.1g/cm3。
14. The micro led inkjet printing apparatus of claim 1, wherein the inkjet printing solvent is a volatile solvent.
15. The micro led inkjet printing apparatus of claim 14, wherein the volatilizable solvent comprises at least one of alkanes, benzene and its derivatives, alcohols, and ethers.
16. The micro led inkjet printing apparatus of claim 1, wherein the micro led inkjet printing apparatus comprises a first micro led inkjet printing structure, a second micro led inkjet printing structure, and a third micro led inkjet printing structure;
the first micro light-emitting diode ink-jet printing structure is used for ink-jet printing of red light micro light-emitting diodes, the second micro light-emitting diode ink-jet printing structure is used for ink-jet printing of green light micro light-emitting diodes, and the third micro light-emitting diode ink-jet printing structure is used for ink-jet printing of blue light micro light-emitting diodes.
17. A method for transporting a micro light-emitting diode (LED), comprising:
ink-jet printing a plurality of micro-leds on a substrate using the micro-led ink-jet printing apparatus of any one of claims 1-16;
applying an electric field on the substrate to enable the micro light-emitting diodes to be arrayed on the substrate;
and transferring the micro light-emitting diodes arranged in the array to the array substrate.
18. The method of claim 17, wherein the micro led inkjet printing device comprises a first micro led inkjet printing structure, a second micro led inkjet printing structure, and a second micro led inkjet printing structure;
ink-jet printing a plurality of micro light-emitting diodes on a substrate, comprising:
adopting a first micro light-emitting diode ink-jet printing structure to print a plurality of red light micro light-emitting diodes on the substrate in an ink-jet manner;
printing a plurality of green micro light-emitting diodes on the substrate by adopting a second micro light-emitting diode ink-jet printing structure;
adopting a third micro light-emitting diode ink-jet printing structure to print a plurality of blue micro light-emitting diodes on the substrate in an ink-jet manner;
applying an electric field on the substrate to array the micro light emitting diodes on the substrate, comprising:
applying a first electric field on the substrate to enable the plurality of red micro light-emitting diodes to be arrayed on the substrate;
applying a second electric field on the substrate to enable the plurality of green micro light-emitting diodes to be arrayed on the substrate;
applying a third electric field on the substrate to enable the plurality of blue micro light-emitting diodes to be arrayed on the substrate;
or, applying an electric field on the substrate to make the plurality of micro light emitting diodes arranged in an array on the substrate, includes:
and applying a fourth electric field on the substrate to enable the plurality of red light micro light-emitting diodes, the plurality of green light micro light-emitting diodes and the blue light micro light-emitting diodes to be arrayed on the substrate.
19. A micro light emitting diode display panel, comprising:
an array substrate;
a plurality of micro light emitting diodes on one side of the array substrate, the micro light emitting diodes being transported by the transporting method of the micro light emitting diodes of claim 17 or 18.
20. A micro light emitting diode display device, comprising the micro light emitting diode display panel of claim 19.
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| CN114103473B (en) * | 2021-11-22 | 2023-04-18 | Tcl华星光电技术有限公司 | Ink jet printing apparatus and ink jet printing method |
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