CN111996586A - Semiconductor graphite thermal field of cylinder type single crystal furnace - Google Patents
Semiconductor graphite thermal field of cylinder type single crystal furnace Download PDFInfo
- Publication number
- CN111996586A CN111996586A CN202010685916.0A CN202010685916A CN111996586A CN 111996586 A CN111996586 A CN 111996586A CN 202010685916 A CN202010685916 A CN 202010685916A CN 111996586 A CN111996586 A CN 111996586A
- Authority
- CN
- China
- Prior art keywords
- installation
- crucible
- servo motor
- bin
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a semiconductor graphite thermal field of a barrel-type single crystal furnace, which comprises an installation bin A, wherein an installation bin B is arranged at the top inside the installation bin A, a guide cylinder is arranged at the top inside the installation bin B, an installation ring is arranged at the bottom of the guide cylinder, a servo motor B is arranged on one side of the bottom inside the installation bin B, the output end of the servo motor B penetrates through the inside of the installation ring and is provided with a rotating shaft, a circular baffle is arranged in the middle position of the outer side of the rotating shaft and is matched with the installation ring, and slide rails are symmetrically arranged on two sides of the top inside the installation bin A; the device can be conveniently opened by an operator through the mutual matching of the mounting block, the servo motor A, the threaded rod, the internal thread sleeve block, the mounting cover, the sliding block and the sliding rod, so that the operator can open and place materials only through one operation step, and the convenience of the device is improved.
Description
Technical Field
The invention relates to the technical field of semiconductor graphite thermal fields, in particular to a semiconductor graphite thermal field of a cylindrical single crystal furnace.
Background
The single crystal pulled by the common method has different crystal orientations and different resistivity uniformity (RRV) expressed by different doping sources, the existence of RRV is inevitable due to the existence of inherent segregation coefficient of boron and phosphorus in the silicon crystal, at present, the silicon single crystal pulling is generally carried out by adopting a single crystal furnace, polycrystalline raw materials are put into a quartz crucible inside the single crystal furnace, a thermal field is formed under the heating action of a heater arranged inside the single crystal furnace to melt the polycrystalline raw materials, and the polycrystalline raw materials are put into a seed crystal to grow into the silicon single crystal;
the prior device has the following problems:
1. when the existing device is used for placing materials, most of the existing devices are manually screwed by a plurality of groups of bolts to open the placed materials, so that the complexity of the device is increased;
2. the existing device has a single internal structure and can not obviously maintain the internal temperature, so that the energy consumption of the device is increased, and the material quality is reduced;
3. most of the internal structures of the existing devices are integrated, and the cleaning of the internal structures is inconvenient, so that the working time of operators is prolonged.
Disclosure of Invention
The invention aims to provide a semiconductor graphite thermal field of a barrel type single crystal furnace, which solves the following problems of the prior device in the background technology: 1. when the existing device is used for placing materials, most of the existing devices are manually screwed by a plurality of groups of bolts to open the placed materials, so that the complexity of the device is increased; 2. the existing device has a single internal structure and can not obviously maintain the internal temperature, so that the energy consumption of the device is increased, and the material quality is reduced; 3. most of the internal structures of the existing devices are integrated, and the cleaning of the internal structures is inconvenient, so that the working time of operators is prolonged.
In order to achieve the purpose, the invention provides the following technical scheme: a semiconductor graphite thermal field of a cylindrical single crystal furnace comprises an installation bin A, wherein an installation bin B is arranged at the top inside the installation bin A, a guide cylinder is arranged at the top inside the installation bin B, an installation ring is arranged at the bottom of the guide cylinder, a servo motor B is arranged on one side of the bottom inside the installation bin B, the output end of the servo motor B penetrates through the inside of the installation ring and is provided with a rotating shaft, a circular baffle is arranged at the middle position outside the rotating shaft and is matched with the installation ring, slide rails are symmetrically arranged on two sides of the top inside the installation bin A, slide blocks matched with the slide rails are arranged inside the two slide rails, a crucible is arranged on one side, close to each other, of the two slide blocks, a crucible shaft is arranged at the middle position of the bottom of the crucible, and extends to the outside of the installation bin A, the bilateral symmetry of crucible axle is provided with the bolt, and the mutual adaptation of bolt and crucible, installation storehouse A's top is provided with the installation lid, the top symmetry of installation storehouse A both sides is provided with the installation piece, and is a set of the top of installation piece is provided with servo motor A, servo motor A's output is provided with the threaded rod, the outside cover of threaded rod is equipped with the internal thread cover piece, and internal thread cover piece and installation lid interconnect, another group the top of installation piece is provided with the slide bar, the outside cover of slide bar is equipped with the sliding block, and sliding block and installation lid interconnect, the bottom of the positive one end of installation storehouse A is provided with control panel, control panel passes through the wire and is connected with servo motor A and installation piece electricity respectively.
Preferably, the top of threaded rod and slide bar all is provided with the dog, and the dog respectively with internal thread cover block and sliding block mutual adaptation.
Preferably, the four corners of the bottom of the installation bin A are provided with support columns, and the bottoms of the support columns are provided with anti-slip pads.
Preferably, the outer sides of the servo motor A and the servo motor B are both provided with a protection bin, and the inside of the protection bin is provided with damping and silencing cotton.
Preferably, the bottom inside the crucible is provided with an internal thread hole, and the internal thread hole is matched with the bolt.
Preferably, a bin door is arranged at one end of the back face of the installation bin A, and a handle is arranged at one end of the front face of the bin door.
Compared with the prior art, the invention has the beneficial effects that: the semiconductor graphite heat of the cylindrical single crystal furnace can be conveniently opened by an operator, the diffusion of the temperature in the crucible can be reduced, and the operator can conveniently clean the inside of the crucible;
1. the installation block, the servo motor A, the threaded rod, the internal thread sleeve block, the installation cover, the sliding block and the sliding rod are matched with each other, so that an operator can conveniently open the installation cover, the operator can open the installation cover and place materials only through one operation step, and convenience of the device is improved;
2. the guide cylinder, the mounting ring, the crucible, the servo motor B, the rotating shaft and the circular baffle are matched with each other, so that the diffusion of the temperature in the crucible can be reduced, the energy consumption of the device is reduced, and the quality of materials is improved to a certain extent;
3. through the mutual cooperation of installation storehouse A, bolt, crucible, slider and slide rail, can make things convenient for operating personnel to wash the inside of crucible to increase the device's travelling comfort.
Drawings
FIG. 1 is a front cross-sectional view of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a rear view of the present invention;
fig. 4 is a top view of the draft tube of the present invention.
In the figure: 1. installing a bin A; 2. a bolt; 3. a crucible shaft; 4. a crucible; 5. a slider; 6. mounting blocks; 7. a servo motor A; 8. an internal thread sleeve block; 9. a threaded rod; 10. installing a cover; 11. a draft tube; 12. a rotating shaft; 13. a slide bar; 14. a slider; 15. installing a bin B; 16. a servo motor B; 17. a circular baffle; 18. a mounting ring; 19. a slide rail; 20. a control panel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides an embodiment: a semiconductor graphite thermal field of a barrel type single crystal furnace comprises an installation bin A1, an installation bin B15 is arranged at the top inside an installation bin A1, a guide flow cylinder 11 is arranged at the top inside an installation bin B15, an installation ring 18 is arranged at the bottom of the guide flow cylinder 11, a servo motor B16 is arranged on one side of the bottom inside an installation bin B15, the output end of a servo motor B16 penetrates through the installation ring 18 and is provided with a rotating shaft 12, a circular baffle 17 is arranged at the middle position outside the rotating shaft 12, the circular baffle 17 is matched with the installation ring 18, the diffusion of the internal temperature of a crucible 4 can be reduced, the consumption energy of the device is reduced, meanwhile, the quality of materials is improved to a certain extent, slide rails 19 are symmetrically arranged on two sides of the top inside the installation bin A1, slide blocks 5 matched with the slide rails 19 are arranged inside the two slide rails, one side, which the two slide blocks 5 are close, the crucible shaft 3 is arranged in the middle of the bottom of the crucible 4, the crucible shaft 3 extends to the outside of the installation bin A1, the bolts 2 are symmetrically arranged on two sides of the crucible shaft 3, the bolts 2 and the crucible 4 are matched with each other, and an operator can conveniently clean the inside of the crucible 4, so that the comfort of the device is improved, the installation cover 10 is arranged at the top of the installation bin A1, the installation blocks 6 are symmetrically arranged at the tops of two sides of the installation bin A1, the servo motor A7 is arranged at the top of one group of the installation blocks 6, the threaded rod 9 is arranged at the output end of the servo motor A7, the internal thread sleeve block 8 is sleeved on the outer side of the threaded rod 9, the internal thread sleeve block 8 is connected with the installation cover 10, the sliding rod 13 is arranged at the top of the other group of the installation blocks 6, the sliding block 14 is sleeved on the outer side of the sliding rod 13, the sliding block 14 is connected with the installation cover 10, the, therefore, the convenience of the device is improved, the bottom of one end of the front face of the mounting bin A1 is provided with the control panel 20, and the control panel 20 is electrically connected with the servo motor A7 and the mounting block 6 through wires respectively.
Furthermore, the tops of the threaded rod 9 and the sliding rod 13 are provided with stop blocks, and the stop blocks are respectively matched with the internal thread sleeve block 8 and the sliding block 14, so that the positioning is facilitated.
Furthermore, the four corners of the bottom of the installation bin A1 are provided with support columns, and the bottoms of the support columns are provided with anti-slip pads to prevent sliding.
Furthermore, the outer sides of the servo motor A7 and the servo motor B16 are provided with a protection bin, and the inside of the protection bin is provided with damping and silencing cotton, so that the protection is facilitated.
Further, the bottom inside crucible 4 is provided with the internal thread hole, and the internal thread hole and 2 mutual adaptations of bolt, the fixed dismantlement of being convenient for.
Furthermore, a bin door is arranged at one end of the back face of the mounting bin A1, and a handle is arranged at one end of the front face of the bin door, so that the bin door is convenient to open.
The working principle is as follows: the electric parts of the device are all powered by an external power supply, firstly, the device is moved to a specified position, and the power supply is switched on to turn on the control panel 20;
when the device is used, the servo motor A7 arranged at the top of the mounting block 6 is opened through the control panel 20, the threaded rod 9 is driven to rotate through the work of the servo motor A7, the internal thread sleeve block 8 is driven to move up and down through the threaded rod 9, the mounting cover 10 is driven to move up and down through the internal thread sleeve block 8, the mounting cover 10 drives the sliding block 14 to slide on the outer side of the sliding rod 13, the mounting device can be conveniently opened by an operator through the matching of almost no parts, the operator can open and place materials only through one operation step, and therefore the convenience of the device is improved;
during operation, materials enter the inside of the mounting ring 18 through the guide cylinder 11, enter the inside of the crucible 4 through the mounting ring 18, after the materials are placed, the rotating shaft 12 is driven to rotate through the servo motor B16, the circular baffle 17 is driven to rotate through the rotating shaft 12, the circular baffle 17 forms a seal for the mounting ring 18, and the diffusion of the temperature inside the crucible 4 can be reduced through the matching of the components, so that the consumption energy of the device is reduced, and meanwhile, the quality of the materials is improved to a certain extent;
after the device finishes working, the bin door at one end of the back of the installation bin A1 is opened, the bolt 2 is screwed to remove the control on the crucible 4, the crucible 4 is pulled to drive the sliding block 5 to slide in the sliding rail 19, so that the crucible 4 is taken out, and an operator can conveniently clean the inside of the crucible 4 through the matching of the components, so that the comfort of the device is improved.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Claims (6)
1. A semiconductor graphite thermal field of a cylinder type single crystal furnace comprises an installation bin A (1), and is characterized in that: an installation bin B (15) is arranged at the top inside the installation bin A (1), a guide cylinder (11) is arranged at the top inside the installation bin B (15), an installation ring (18) is arranged at the bottom of the guide cylinder (11), a servo motor B (16) is arranged on one side of the bottom inside the installation bin B (15), the output end of the servo motor B (16) penetrates through the installation ring (18) and is provided with a rotating shaft (12), a circular baffle (17) is arranged at the middle position outside the rotating shaft (12), the circular baffle (17) is matched with the installation ring (18), slide rails (19) are symmetrically arranged on two sides of the top inside the installation bin A (1), slide blocks (5) matched with the slide rails are arranged inside the two sets of slide rails (19), and a crucible (4) is arranged on one side of the two sets of slide blocks (5) close to each other, the crucible is characterized in that a crucible shaft (3) is arranged at the middle position of the bottom of the crucible (4), the crucible shaft (3) extends to the outside of the installation bin A (1), bolts (2) are symmetrically arranged at two sides of the crucible shaft (3), the bolts (2) are matched with the crucible (4), an installation cover (10) is arranged at the top of the installation bin A (1), installation blocks (6) are symmetrically arranged at the tops of two sides of the installation bin A (1), a set of installation blocks (6) are provided with servo motors A (7), the output end of each servo motor A (7) is provided with a threaded rod (9), an internal thread sleeve block (8) is sleeved at the outer side of each threaded rod (9), the internal thread sleeve block (8) is connected with the installation cover (10) in an interconnecting manner, a sliding rod (13) is arranged at the top of the installation block (6) in another set, and a sliding block (14) is sleeved at the outer side of the sliding rod, and sliding block (14) and installation lid (10) interconnect, the bottom of the positive one end of installation storehouse A (1) is provided with control panel (20), control panel (20) are connected with servo motor A (7) and installation piece (6) electricity respectively through the wire.
2. The semiconductor graphite thermal field of a barrel-type single crystal furnace according to claim 1, characterized in that: the top of threaded rod (9) and slide bar (13) all is provided with the dog, and the dog respectively with internal thread set piece (8) and sliding block (14) mutual adaptation.
3. The semiconductor graphite thermal field of a barrel-type single crystal furnace according to claim 1, characterized in that: the four corners department of installation storehouse A (1) bottom all is provided with the support column, and the bottom of support column is provided with the slipmat.
4. The semiconductor graphite thermal field of a barrel-type single crystal furnace according to claim 1, characterized in that: the outside of servo motor A (7) and servo motor B (16) all is provided with the protection storehouse, and the inside in protection storehouse is provided with the shock attenuation amortization cotton.
5. The semiconductor graphite thermal field of a barrel-type single crystal furnace according to claim 1, characterized in that: the bottom inside the crucible (4) is provided with an internal thread hole, and the internal thread hole is matched with the bolt (2) mutually.
6. The semiconductor graphite thermal field of a barrel-type single crystal furnace according to claim 1, characterized in that: the back one end of installation storehouse A (1) is provided with the door, and the front one end of door is provided with the handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010685916.0A CN111996586A (en) | 2020-07-16 | 2020-07-16 | Semiconductor graphite thermal field of cylinder type single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010685916.0A CN111996586A (en) | 2020-07-16 | 2020-07-16 | Semiconductor graphite thermal field of cylinder type single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111996586A true CN111996586A (en) | 2020-11-27 |
Family
ID=73467418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010685916.0A Pending CN111996586A (en) | 2020-07-16 | 2020-07-16 | Semiconductor graphite thermal field of cylinder type single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111996586A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101935870A (en) * | 2010-10-18 | 2011-01-05 | 镇江辉煌电子有限公司 | Graphite thermal field of single crystal furnace |
| CN102181918A (en) * | 2011-05-23 | 2011-09-14 | 仪征市荣昌炭素材料有限公司 | Single crystal furnace heating device |
| CN102286775A (en) * | 2011-08-27 | 2011-12-21 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace capable of realizing fast material change and fast material change method of single crystal furnace |
| CN106917138A (en) * | 2017-04-23 | 2017-07-04 | 连云港清友新能源科技有限公司 | For the polycrystalline cast ingot furnace body of oversize silicon ingot |
| CN106987897A (en) * | 2017-04-28 | 2017-07-28 | 西安创联新能源设备有限公司 | A kind of improved single crystal furnace structure and its application |
| CN108360063A (en) * | 2018-05-04 | 2018-08-03 | 蒋国庆 | Continuous crystal-pulling single crystal growing furnace |
| CN110528074A (en) * | 2019-09-26 | 2019-12-03 | 南通晶耀新能源有限公司 | A kind of monocrystalline silicon refines production technology and its purifier |
| CN210163490U (en) * | 2019-04-28 | 2020-03-20 | 南京宝钻热处理有限公司 | Well type tempering furnace for heat treatment |
| CN210569990U (en) * | 2019-09-05 | 2020-05-19 | 洛阳鑫鑫铝业有限公司 | Cover opening device of smelting furnace cover |
| CN210657215U (en) * | 2019-08-28 | 2020-06-02 | 包头美科硅能源有限公司 | Single crystal furnace thermal field cooling device |
| CN210657218U (en) * | 2019-10-14 | 2020-06-02 | 兴山兴蓝光电科技有限公司 | Hanging plate assembly of optical crystal growth reaction kettle |
-
2020
- 2020-07-16 CN CN202010685916.0A patent/CN111996586A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101935870A (en) * | 2010-10-18 | 2011-01-05 | 镇江辉煌电子有限公司 | Graphite thermal field of single crystal furnace |
| CN102181918A (en) * | 2011-05-23 | 2011-09-14 | 仪征市荣昌炭素材料有限公司 | Single crystal furnace heating device |
| CN102286775A (en) * | 2011-08-27 | 2011-12-21 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace capable of realizing fast material change and fast material change method of single crystal furnace |
| CN106917138A (en) * | 2017-04-23 | 2017-07-04 | 连云港清友新能源科技有限公司 | For the polycrystalline cast ingot furnace body of oversize silicon ingot |
| CN106987897A (en) * | 2017-04-28 | 2017-07-28 | 西安创联新能源设备有限公司 | A kind of improved single crystal furnace structure and its application |
| CN108360063A (en) * | 2018-05-04 | 2018-08-03 | 蒋国庆 | Continuous crystal-pulling single crystal growing furnace |
| CN210163490U (en) * | 2019-04-28 | 2020-03-20 | 南京宝钻热处理有限公司 | Well type tempering furnace for heat treatment |
| CN210657215U (en) * | 2019-08-28 | 2020-06-02 | 包头美科硅能源有限公司 | Single crystal furnace thermal field cooling device |
| CN210569990U (en) * | 2019-09-05 | 2020-05-19 | 洛阳鑫鑫铝业有限公司 | Cover opening device of smelting furnace cover |
| CN110528074A (en) * | 2019-09-26 | 2019-12-03 | 南通晶耀新能源有限公司 | A kind of monocrystalline silicon refines production technology and its purifier |
| CN210657218U (en) * | 2019-10-14 | 2020-06-02 | 兴山兴蓝光电科技有限公司 | Hanging plate assembly of optical crystal growth reaction kettle |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111996586A (en) | Semiconductor graphite thermal field of cylinder type single crystal furnace | |
| CN209897495U (en) | Be used for open air heat dissipation type wire communication rack | |
| CN209412081U (en) | A kind of optical fiber preform bar stretching furnace | |
| CN206479016U (en) | A kind of Liftable and movable boron carbide refining furnace | |
| CN110574680A (en) | fruit tree pollination device for agricultural production | |
| CN111964444B (en) | Thermal field structure of semiconductor heat treatment vacuum furnace | |
| CN210916160U (en) | High ductility buffing stick thermal treatment spheroidizing furnace | |
| CN208049720U (en) | A kind of sintering preparing graphene doped and compounded carbon membrane and dismoulding system | |
| CN103696025B (en) | The two-way device for spinning of a kind of controlled superposing type | |
| CN208562806U (en) | A kind of dyeing apparatus of pure cotton Silk mercerized cotton | |
| CN220619185U (en) | Silicon carbide single crystal growth device | |
| CN207677686U (en) | One kind having support bracket fastened photovoltaic power generation apparatus | |
| CN110296604A (en) | A kind of aluminium alloy high temperature holding furnace adds silicon device and adds silicon method | |
| CN221077261U (en) | Auxiliary charging device of graphitizing furnace | |
| CN215113579U (en) | Raw material powder heating and drying device for silicon single crystal rod | |
| CN220201457U (en) | Photovoltaic material crystalline silicon purification device | |
| CN212563726U (en) | Outdoor cooling and heating fan | |
| CN208121238U (en) | A kind of lift monocrystaline silicon stove | |
| CN220224425U (en) | Device for improving machining efficiency | |
| CN202705218U (en) | Silica glass secondary forming machine with novel flame operation table | |
| CN109516687A (en) | A kind of optical fiber preform bar stretching furnace and its drawing process | |
| CN215735574U (en) | Electric power automation equipment heat sink | |
| CN211321847U (en) | Auxiliary device for manufacturing electric control equipment of instrument | |
| CN217351379U (en) | Constant temperature food fermentation system | |
| CN203969096U (en) | Tea carding machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20201127 |
|
| RJ01 | Rejection of invention patent application after publication |