CN111941192B - 一种芯片制造用晶圆加工装置 - Google Patents
一种芯片制造用晶圆加工装置 Download PDFInfo
- Publication number
- CN111941192B CN111941192B CN202010508311.4A CN202010508311A CN111941192B CN 111941192 B CN111941192 B CN 111941192B CN 202010508311 A CN202010508311 A CN 202010508311A CN 111941192 B CN111941192 B CN 111941192B
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- China
- Prior art keywords
- fixedly arranged
- workbench
- top end
- inner cavity
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/16—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces performing a reciprocating movement, e.g. during which the sense of rotation of the working-spindle is reversed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
- B24B5/04—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally
- B24B5/047—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally of workpieces turning about a vertical axis
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010508311.4A CN111941192B (zh) | 2020-06-06 | 2020-06-06 | 一种芯片制造用晶圆加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010508311.4A CN111941192B (zh) | 2020-06-06 | 2020-06-06 | 一种芯片制造用晶圆加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111941192A CN111941192A (zh) | 2020-11-17 |
CN111941192B true CN111941192B (zh) | 2021-08-20 |
Family
ID=73337732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010508311.4A Active CN111941192B (zh) | 2020-06-06 | 2020-06-06 | 一种芯片制造用晶圆加工装置 |
Country Status (1)
Country | Link |
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CN (1) | CN111941192B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112476129A (zh) * | 2020-11-26 | 2021-03-12 | 乌兰 | 一种半导体多规格研磨设备 |
CN113400131A (zh) * | 2021-05-28 | 2021-09-17 | 力成科技(苏州)有限公司 | 一种改善晶圆边缘碎裂的削边装置 |
CN114393468B (zh) * | 2021-12-29 | 2023-03-10 | 江苏威森美微电子有限公司 | 一种半导体晶圆磨边加工用磨边机 |
CN114918773A (zh) * | 2022-06-01 | 2022-08-19 | 安徽富乐德长江半导体材料股份有限公司 | 用于再生晶圆边角打磨设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0515036A2 (en) * | 1991-05-24 | 1992-11-25 | Shin-Etsu Handotai Company Limited | An apparatus for chamfering the peripheral edge of a wafer to specular finish |
JPH1133888A (ja) * | 1997-07-24 | 1999-02-09 | Super Silicon Kenkyusho:Kk | ウェーハの鏡面面取り装置 |
CN101413925B (zh) * | 2008-12-04 | 2011-10-05 | 东北电力科学研究院有限公司 | 螺栓内孔超声波探伤无损检测专用装置及检测方法 |
CN109318186A (zh) * | 2018-10-16 | 2019-02-12 | 中国矿业大学 | 一种可连续回转的四自由度工作平台 |
CN110587460A (zh) * | 2019-09-10 | 2019-12-20 | 合肥嘉东光学股份有限公司 | 一种角度可调式平面斜轴精磨机 |
CN209868266U (zh) * | 2019-05-21 | 2019-12-31 | 南阳凯鑫光电股份有限公司 | 一种玻璃晶圆毛坯的加工装置 |
-
2020
- 2020-06-06 CN CN202010508311.4A patent/CN111941192B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0515036A2 (en) * | 1991-05-24 | 1992-11-25 | Shin-Etsu Handotai Company Limited | An apparatus for chamfering the peripheral edge of a wafer to specular finish |
JPH1133888A (ja) * | 1997-07-24 | 1999-02-09 | Super Silicon Kenkyusho:Kk | ウェーハの鏡面面取り装置 |
CN101413925B (zh) * | 2008-12-04 | 2011-10-05 | 东北电力科学研究院有限公司 | 螺栓内孔超声波探伤无损检测专用装置及检测方法 |
CN109318186A (zh) * | 2018-10-16 | 2019-02-12 | 中国矿业大学 | 一种可连续回转的四自由度工作平台 |
CN209868266U (zh) * | 2019-05-21 | 2019-12-31 | 南阳凯鑫光电股份有限公司 | 一种玻璃晶圆毛坯的加工装置 |
CN110587460A (zh) * | 2019-09-10 | 2019-12-20 | 合肥嘉东光学股份有限公司 | 一种角度可调式平面斜轴精磨机 |
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Publication number | Publication date |
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CN111941192A (zh) | 2020-11-17 |
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PB01 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20210803 Address after: 518000 No. 1, FA FA Road, Nanshan District science and Technology Park, Guangdong, Shenzhen Applicant after: Zheng Junxiong Address before: 065900 No. 114, Lane 2, North Street, Niangniang village, Litan Town, Dacheng County, Langfang City, Hebei Province Applicant before: Chang Shimeng |
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TR01 | Transfer of patent right |
Effective date of registration: 20220825 Address after: 518000 workshop 101, No. 6, Baolong plant of Anbo technology, No. 2, Baolong Fourth Road, Baolong community, Baolong street, Longgang District, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhongke optical semiconductor technology Co.,Ltd. Address before: 518000 No. 1, FA FA Road, Nanshan District science and Technology Park, Guangdong, Shenzhen Patentee before: Zheng Junxiong |
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