CN111879460A - Vernier effect based cascade capillary optical fiber pressure sensor and preparation method thereof - Google Patents

Vernier effect based cascade capillary optical fiber pressure sensor and preparation method thereof Download PDF

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CN111879460A
CN111879460A CN202010651378.3A CN202010651378A CN111879460A CN 111879460 A CN111879460 A CN 111879460A CN 202010651378 A CN202010651378 A CN 202010651378A CN 111879460 A CN111879460 A CN 111879460A
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optical fiber
capillary
inner diameter
capillary optical
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吴舜
杨雪梅
程海皓
马建文
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Wuhan Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G01L11/025Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention provides a vernier effect-based cascade capillary optical fiber air pressure sensor and a preparation method thereof. The invention has simple manufacture, low cost and high sensitivity in a low-voltage range.

Description

Vernier effect based cascade capillary optical fiber pressure sensor and preparation method thereof
Technical Field
The invention belongs to the technical field of optical fiber sensing, and particularly relates to a vernier effect-based cascade capillary optical fiber pressure sensor and a preparation method thereof.
Background
Air pressure measurement is widely applied to industrial equipment such as medical treatment and health, instruments and meters, barometers and the like. The optical fiber air pressure sensor, as a novel air pressure sensor, has the advantages of small volume, no electromagnetic interference, corrosion resistance, high measurement precision, suitability for various extreme environments and the like, which are not possessed by electronic air pressure sensors, and is receiving more and more attention.
At present, a plurality of types of commonly used air pressure sensors are available, and the FPI optical fiber air pressure sensor receives more and more attention due to the characteristics of small volume, high sensitivity, simple preparation process and the like. The FPI optical fiber pressure sensor can be divided into two categories according to the working principle, one category is based on the change of the FP cavity length to measure the air pressure, and the measured air pressure value can be obtained by demodulating the change of the cavity length; the other type is based on the full-optical-fiber structure sensor to measure the air pressure, and can be divided into two types, one type realizes the air pressure measurement according to the deformation of the optical fiber, the air pressure sensitivity of the sensor is generally low because the optical fiber material has larger Young modulus and smaller elasto-optical coefficient, the other type realizes the air pressure measurement according to the change of the gas refractive index in the FP cavity, and the air pressure sensitivity of the sensor is higher because the change of the gas refractive index caused by the air pressure change is obvious. However, in the known publications, such sensors mostly use expensive optical fibers, are expensive, and most work is performed around high voltage, while low voltage field is rarely studied.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a vernier effect based cascaded capillary optical fiber pressure sensor and a manufacturing method thereof, wherein when the sensor is in a low pressure environment, the size of the ambient pressure is changed, and the change of the spectral envelope trough position under different pressure conditions is demodulated to achieve the purpose of pressure detection.
The technical scheme adopted by the invention for solving the technical problems is as follows: the cascade capillary optical fiber pressure sensor based on the vernier effect is characterized by comprising a single mode optical fiber, a large inner diameter capillary optical fiber and a small inner diameter capillary optical fiber, wherein two ends of the large inner diameter capillary optical fiber are respectively connected with the single mode optical fiber and the small inner diameter capillary optical fiber, the large inner diameter capillary optical fiber and the small inner diameter capillary optical fiber form two cascade FP cavities with the vernier effect, and the single mode optical fiber is an input optical fiber.
According to the scheme, the lengths of the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber meet the optical path ratio ncladL2/nairL1Is 2.1 to 2.4, wherein n isair,,nclad,L1,L2Respectively, the refractive index of air, the refractive index of the capillary cladding, the length of the capillary fiber with large inner diameter and the length of the capillary fiber with small inner diameter, ncladL2,nairL1Two optical paths for transmitting interference light in the FP cavity are respectively arranged.
According to the scheme, the single-mode optical fiber, the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber have the same outer diameter, the length of the large-inner-diameter capillary optical fiber is 300-350 micrometers, and the length of the small-inner-diameter capillary optical fiber is 230-560 micrometers.
According to the scheme, the outer diameters of the single-mode optical fiber, the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber are 125 micrometers, the inner diameter of the large-inner-diameter capillary optical fiber is 75 micrometers, and the inner diameter of the small-inner-diameter capillary optical fiber is 5 micrometers.
According to the scheme, two ends of the capillary optical fiber with the large inner diameter are respectively connected with the single-mode optical fiber and the capillary optical fiber with the small inner diameter in a welding mode.
A preparation method of a cascade capillary optical fiber air pressure sensor based on vernier effect is characterized by comprising the following steps:
s1) single-mode fiber pretreatment: selecting a single-mode optical fiber, removing a coating protective layer of the single-mode optical fiber by using a wire stripper or a blade, and wiping the surface of the optical fiber by using alcohol to remove residues of the optical fiber; cutting one end of the optical fiber flatly by using an optical fiber cutter;
s2) capillary fiber pretreatment: selecting two large-inner-diameter capillary optical fibers and two small-inner-diameter capillary optical fibers respectively, peeling off coating layers outside the two capillary optical fibers by using a blade, wiping the surfaces of the optical fibers by using alcohol to remove residues of the coating layers, and placing the optical fibers on a cutting knife to cut one end of a glass tube flat;
s3) fusion splicing of the single-mode optical fiber and the large-inner-diameter capillary optical fiber: welding the single-mode optical fiber processed by the S1 and the large-inner-diameter capillary optical fiber processed by the S2 together by using an optical fiber fusion splicer; the fusion parameters of the optical fiber fusion splicer are set as follows: adopting a cladding to align the cores, wherein the overlapping amount is 10 mu m, the discharge intensity is-70 bit, the discharge time is 500ms, taking down the optical fiber after welding, and cutting off a section of capillary optical fiber at a distance of 300-350 mu m from a welding surface by using a precise micro-processing platform and an optical fiber cutter;
s4) fusion splicing of the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber: placing the flat end of the other capillary optical fiber with the small inner diameter processed by the S2 on a fusion splicer, and then fusing the capillary optical fiber with the capillary optical fiber processed by the S3; the parameters for setting the welding machine are as follows: and (3) aligning the cores by adopting a cladding, wherein the overlapping amount is 15 mu m, the discharge intensity is-80 bit, the discharge time is 600ms, taking down the optical fiber after the welding is finished, and then cutting off the optical fiber cutter at a proper distance from one end of the 560 mu m capillary tube on the welding surface on a precise micro-processing platform to finish the manufacturing of the sensor.
The invention has the beneficial effects that: compared with the traditional vernier effect optical fiber sensor, the vernier effect optical fiber sensor manufactured by the invention has the advantages that under the condition that the cutting errors are the same, the length design meets the condition that the optical path ratio is 2.1 compared with the optical path ratio which is about 1.1, the design can double the sensitivity of the sensor for measuring the air pressure, and the vernier effect optical fiber sensor can be applied to high-sensitivity air pressure measurement within one atmosphere; the sensor can be completed only by welding and cutting steps, only single-mode optical fibers and capillary optical fibers with different inner diameters are needed, the cost is low, the manufacture is simple, high-sensitivity air pressure detection can be realized, and the large-scale manufacture and use are facilitated.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
FIG. 2 is a raw reflectance spectrum of a sensor at atmospheric pressure according to one embodiment of the present invention.
Fig. 3 is a diagram of an experimental apparatus for measuring air pressure according to an embodiment of the present invention.
FIG. 4 is a graph showing the drift of the spectral envelope at different barometric pressures in accordance with an embodiment of the present invention.
FIG. 5 is a plot of a linear fit of air pressure to wavelength for a spectral envelope according to one embodiment of the present invention.
Detailed Description
For a better understanding of the present invention, reference is made to the following description taken in conjunction with the accompanying drawings and examples.
As shown in fig. 1, the present invention provides a vernier effect based cascade capillary optical fiber air pressure sensor, which includes a single mode optical fiber 1, a large inner diameter capillary optical fiber 2 and a small inner diameter capillary optical fiber 3, wherein two ends of the large inner diameter capillary optical fiber are respectively connected to the single mode optical fiber and the small inner diameter capillary optical fiber, the large inner diameter capillary optical fiber and the small inner diameter capillary optical fiber form two cascade FP cavities having a vernier effect, and the single mode optical fiber is an input optical fiber.
The optical fiber connection is completed by a commercial fusion splicer, and each fusion spliced surface is flat and has no collapse. When the air pressure in the detection area changes, air enters the capillary optical fiber with the small inner diameter through the capillary optical fiber with the small inner diameter to change the refractive index of air in the capillary optical fiber with the large inner diameter, so that the envelope wavelength position of the cascade spectrum can drift, and the real-time monitoring of the sensor on the air pressure is realized after the spectrum acquired by the spectrometer tracks the variation of the drift of the envelope wavelength.
The lengths of the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber satisfy the optical path ratio ncladL2/nairL1Is 2.1 to 2.4, wherein n isair,,nclad,L1,L2Respectively, the refractive index of air, the refractive index of the capillary cladding, the length of the capillary fiber with large inner diameter and the length of the capillary fiber with small inner diameter, ncladL2,nairL1Two optical paths for transmitting interference light in the FP cavity are respectively arranged.
The outer diameters of the single-mode optical fiber, the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber are the same, the length of the large-inner-diameter capillary optical fiber is 300-350 mu m, and the length of the small-inner-diameter capillary optical fiber is 230-560 mu m.
Example one
The outer diameters of the single-mode optical fiber, the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber are 125 micrometers, the inner diameter of the large-inner-diameter capillary optical fiber is 75 micrometers, and the inner diameter of the small-inner-diameter capillary optical fiber is 5 micrometers. The large inner diameter capillary fiber has a length of 333.64 μm, the small inner diameter capillary fiber has a length of 485.84 μm, and the optical path ratio is about 2.1.
The application process of using the optical fiber sensor with the structure to measure the air pressure is as follows:
as shown in fig. 2, the single mode fiber (input fiber) of the sensor is connected to two ports of the circulator, the light source is connected to one port of the circulator, and the spectrometer is connected to three ports of the circulator. The original reflection spectrogram (solid line) of the sensor under the atmospheric pressure can be obtained in the spectrometer, and the upper edge part and the lower edge part (dotted line) of the spectrum can be seen to have obvious periodic envelope spectrums and obvious vernier effect.
When the sensor is used to measure gas pressure, as shown in fig. 3, the sensor head portion is placed in a closed environment (gas chamber) in which the gas pressure changes. Light emitted by the broadband light source enters the circulator through one port of the circulator, reaches the two ports and enters the sensing head, and the reflection spectrum of the sensor reaches the spectrometer through the three ports of the circulator. The gas pressure value in the gas cavity is changed, and the spectrum under different gas pressures is displayed on the spectrometer. When gas enters the gas cavity, the gas enters the large-inner-diameter capillary optical fiber through the gas inlet of the small-inner-diameter capillary optical fiber, and the refractive index of the air in the cavity is changed through air pressure, so that the characteristics of the interference spectrum are changed.
As shown in FIG. 4, each curve corresponds to the reflection spectrum of five different air pressure values within 11.8kPa to 100.0 kPa. It can be clearly seen that in the wavelength range of 1500nm to 1520nm, the spectral envelope undergoes blue shift with the increase of the air pressure, and the change is obvious. All the collected different air pressure values and corresponding wavelengths are subjected to linear fitting to obtain the air pressure sensitivity shown in fig. 5, the air pressure sensitivity with the measured optical path ratio of 2.1 is 74.7nm/MPa, and the air pressure sensitivities with different optical path ratios are as shown in the following table.
As can be seen from Table I, the air pressure sensitivity with the optical path ratio of 1.1 is reduced by about half for the ratio of 2.1, and the sensitivity is 37.6 nm/MPa.
Watch 1
Ratio of 1.1 2.1 2.2 2.3 2.4
Sensitivity (nm/MPa) 37.6 74.7 43.2 28.8 21.6
The sensor has the following advantages: when incident light is on the first connecting surface, the refractive index of air in the single-mode optical fiber core and the large-inner-diameter capillary optical fiber is not matched to generate primary reflection, when light is on the second connecting surface, the refractive index of air in the cavity and the refractive index of a cladding of the small-inner-diameter capillary optical fiber are not matched to generate secondary reflection, and at the tail end of the small-inner-diameter capillary optical fiber, the refractive index of the cladding is not matched with the refractive index of outside air to generate tertiary reflection. The three reflected lights interfere with each other, the optical path ratio of the two interfered lights is about 2 through setting the length of the optical fiber, and the cascade interference spectrum presents a vernier envelope spectrum. The gas enters and exits the large-inner-diameter capillary optical fiber to change the refractive index of the air so as to influence the spectral change, and the air pressure detection can be realized by monitoring the drift amount of the envelope wavelength. Under the same cutting precision, the sensitivity of the optical path ratio of 2.1 is about 2 times of the sensitivity of the sensor with the ratio of 1.1, and the sensitivity of the vernier effect sensor is improved. The optical fiber adopted by the invention is a capillary tube, optical fibers with complex structures such as photonic crystal fibers and complex large-scale processing equipment are not needed, the manufacture is simple, and the practicability is strong. The sensor has potential application in the aspects of environmental monitoring, industrial safety and the like
A preparation method of a cascade capillary optical fiber air pressure sensor based on vernier effect is characterized by comprising the following steps:
s1) single-mode fiber pretreatment: selecting a single-mode optical fiber, removing a coating protective layer of the single-mode optical fiber by using a wire stripper or a blade, and wiping the surface of the optical fiber by using alcohol to remove residues of the optical fiber; cutting one end of the optical fiber flatly by using an optical fiber cutter;
s2) capillary fiber pretreatment: selecting two large-inner-diameter capillary optical fibers and two small-inner-diameter capillary optical fibers respectively, peeling off coating layers outside the two capillary optical fibers by using a blade, wiping the surfaces of the optical fibers by using alcohol to remove residues of the coating layers, and placing the optical fibers on a cutting knife to cut one end of a glass tube flat;
s3) fusion splicing of the single-mode optical fiber and the large-inner-diameter capillary optical fiber: welding the single-mode optical fiber processed by the S1 and the large-inner-diameter capillary optical fiber processed by the S2 together by using an optical fiber fusion splicer; the fusion parameters of the optical fiber fusion splicer are set as follows: adopting a cladding to align the cores, wherein the overlapping amount is 10 mu m, the discharge intensity is-70 bit, the discharge time is 500ms, taking down the optical fiber after welding, and cutting off a section of capillary optical fiber at a distance of 300-350 mu m from a welding surface by using a precise micro-processing platform and an optical fiber cutter;
s4) fusion splicing of the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber: placing the flat end of the other capillary optical fiber with the small inner diameter processed by the S2 on a fusion splicer, and then fusing the capillary optical fiber with the capillary optical fiber processed by the S3; the parameters for setting the welding machine are as follows: and (3) aligning the cores by adopting a cladding, wherein the overlapping amount is 15 mu m, the discharge intensity is-80 bit, the discharge time is 600ms, taking down the optical fiber after the welding is finished, and then cutting off the optical fiber cutter at a proper distance from one end of the 560 mu m capillary tube on the welding surface on a precise micro-processing platform to finish the manufacturing of the sensor.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (6)

1. The cascade capillary optical fiber pressure sensor based on the vernier effect is characterized by comprising a single mode optical fiber, a large inner diameter capillary optical fiber and a small inner diameter capillary optical fiber, wherein two ends of the large inner diameter capillary optical fiber are respectively connected with the single mode optical fiber and the small inner diameter capillary optical fiber, the large inner diameter capillary optical fiber and the small inner diameter capillary optical fiber form two cascade FP cavities with the vernier effect, and the single mode optical fiber is an input optical fiber.
2. The vernier effect based cascade capillary optical fiber air pressure sensor as claimed in claim 1, wherein the lengths of the large inner diameter capillary optical fiber and the small inner diameter capillary optical fiber satisfy an optical path ratio ncladL2/nairL1Is 2.1 to 2.4, wherein n isair,,nclad,L1,L2Respectively, the refractive index of air, the refractive index of the capillary cladding, the length of the capillary fiber with large inner diameter and the length of the capillary fiber with small inner diameter, ncladL2,nairL1Two optical paths for transmitting interference light in the FP cavity are respectively arranged.
3. The vernier effect based cascade capillary optical fiber air pressure sensor is characterized in that the single mode optical fiber, the large inner diameter capillary optical fiber and the small inner diameter capillary optical fiber have the same outer diameter, the length of the large inner diameter capillary optical fiber is 300-350 μm, and the length of the small inner diameter capillary optical fiber is 230-560 μm.
4. The vernier effect based cascade capillary optical fiber air pressure sensor as claimed in claim 3, wherein the outer diameters of the single mode optical fiber, the large inner diameter capillary optical fiber and the small inner diameter capillary optical fiber are all 125 μm, the inner diameter of the large inner diameter capillary optical fiber is 75 μm, and the inner diameter of the small inner diameter capillary optical fiber is 5 μm.
5. The vernier effect based cascade capillary optical fiber air pressure sensor as claimed in claim 3, wherein two ends of the capillary optical fiber with large inner diameter are respectively connected with the single mode optical fiber and the capillary optical fiber with small inner diameter by fusion welding.
6. A preparation method of a cascade capillary optical fiber air pressure sensor based on vernier effect is characterized by comprising the following steps:
s1) single-mode fiber pretreatment: selecting a single-mode optical fiber, removing a coating protective layer of the single-mode optical fiber by using a wire stripper or a blade, and wiping the surface of the optical fiber by using alcohol to remove residues of the optical fiber; cutting one end of the optical fiber flatly by using an optical fiber cutter;
s2) capillary fiber pretreatment: selecting two large-inner-diameter capillary optical fibers and two small-inner-diameter capillary optical fibers respectively, peeling off coating layers outside the two capillary optical fibers by using a blade, wiping the surfaces of the optical fibers by using alcohol to remove residues of the coating layers, and placing the optical fibers on a cutting knife to cut one end of a glass tube flat;
s3) fusion splicing of the single-mode optical fiber and the large-inner-diameter capillary optical fiber: welding the single-mode optical fiber processed by the S1 and the large-inner-diameter capillary optical fiber processed by the S2 together by using an optical fiber fusion splicer; the fusion parameters of the optical fiber fusion splicer are set as follows: adopting a cladding to align the cores, wherein the overlapping amount is 10 mu m, the discharge intensity is-70 bit, the discharge time is 500ms, taking down the optical fiber after welding, and cutting off a section of capillary optical fiber at a distance of 300-350 mu m from a welding surface by using a precise micro-processing platform and an optical fiber cutter;
s4) fusion splicing of the large-inner-diameter capillary optical fiber and the small-inner-diameter capillary optical fiber: placing the flat end of the other capillary optical fiber with the small inner diameter processed by the S2 on a fusion splicer, and then fusing the capillary optical fiber with the capillary optical fiber processed by the S3; the parameters for setting the welding machine are as follows: and (3) aligning the cores by adopting a cladding, wherein the overlapping amount is 15 mu m, the discharge intensity is-80 bit, the discharge time is 600ms, taking down the optical fiber after the welding is finished, and then cutting off the optical fiber cutter at a proper distance from one end of the 560 mu m capillary tube on the welding surface on a precise micro-processing platform to finish the manufacturing of the sensor.
CN202010651378.3A 2020-07-08 2020-07-08 Vernier effect based cascade capillary optical fiber pressure sensor and preparation method thereof Pending CN111879460A (en)

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CN112857611A (en) * 2020-12-04 2021-05-28 北京信息科技大学 Optical fiber temperature enhancement sensor based on vernier effect
CN113029428A (en) * 2021-03-30 2021-06-25 武汉理工大学 FP (Fabry-Perot) air pressure sensor based on gas-sensitive film in optical fiber and preparation method thereof
CN113375844A (en) * 2021-05-28 2021-09-10 北京航空航天大学 FP pressure sensor based on low-temperature coupling effect of photonic crystal fiber
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CN112629744A (en) * 2020-12-03 2021-04-09 国网黑龙江省电力有限公司电力科学研究院 Atmospheric pressure sensor based on cascade fiber Fabry-Perot interferometer
CN112857611A (en) * 2020-12-04 2021-05-28 北京信息科技大学 Optical fiber temperature enhancement sensor based on vernier effect
CN112857611B (en) * 2020-12-04 2023-04-07 北京信息科技大学 Optical fiber temperature enhancement sensor based on vernier effect
CN113029428A (en) * 2021-03-30 2021-06-25 武汉理工大学 FP (Fabry-Perot) air pressure sensor based on gas-sensitive film in optical fiber and preparation method thereof
CN113029428B (en) * 2021-03-30 2022-07-08 武汉理工大学 FP (Fabry-Perot) air pressure sensor based on gas-sensitive film in optical fiber and preparation method thereof
CN113375844A (en) * 2021-05-28 2021-09-10 北京航空航天大学 FP pressure sensor based on low-temperature coupling effect of photonic crystal fiber
CN113607332A (en) * 2021-07-30 2021-11-05 深圳技术大学 Manufacturing method of static pressure sensor
CN114659684A (en) * 2022-02-28 2022-06-24 北京航空航天大学 Low-temperature sensitive FP pressure sensor based on double-layer capillary
CN114659684B (en) * 2022-02-28 2023-06-20 北京航空航天大学 Low-temperature sensitive FP pressure sensor based on double-layer capillary tube
CN114705348A (en) * 2022-03-31 2022-07-05 黑龙江大学 Vernier-sensitized parallel capillary structure optical fiber pressure sensor and preparation method thereof
CN114894245A (en) * 2022-04-18 2022-08-12 南京信息工程大学 Sensor and sensing device based on hollow optical fiber
CN114894245B (en) * 2022-04-18 2023-12-01 南京信息工程大学 Sensor and sensing device based on hollow optical fiber

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Application publication date: 20201103