CN111872579A

CN111872579A - Laser drilling equipment

Info

Publication number: CN111872579A
Application number: CN202010548543.2A
Authority: CN
Inventors: 凌步军; 朱鹏程; 袁明峰; 吕金鹏; 赵有伟; 滕宇; 孙月飞; 冷志斌; 冯高俊
Original assignee: Jiangsu Yawei Aosi Laser Technology Co ltd
Current assignee: Jiangsu Yawei Aosi Laser Technology Co ltd
Priority date: 2020-06-16
Filing date: 2020-06-16
Publication date: 2020-11-03
Anticipated expiration: 2040-06-16
Also published as: CN111872579B

Abstract

The invention provides laser drilling equipment which is sequentially provided with a laser lens and a focusing lens which are arranged in a lens barrel, wherein the second surface of the laser lens is obliquely arranged relative to the first surface, and the thickness from the first end of the second surface to the second end of the second surface is increased; the focusing mirror and the laser lens are arranged on the same rotating axis, and the laser beam emitted by the laser lens is focused at a position far away from the rotating axis on a workpiece; the laser lens and the focusing lens rotate by using a first rotating device and taking a rotating axis as a rotating center, and meanwhile, the lens barrel, the focusing lens and the first rotating device are all arranged on an installation plate which is driven by a lifting device to linearly reciprocate relative to the workpiece along the advancing direction of the laser beam. The laser drilling equipment can process micropores with various cross-sectional shapes.

Description

Laser drilling equipment

Technical Field

The invention belongs to the technical field of laser processing equipment, and relates to laser drilling equipment.

Background

In the prior art, a mechanical drilling method is generally adopted for processing a through hole of a printed circuit board, but the size of the through hole becomes very small along with the fine circuit, and the mechanical processing of a micropore has limitation, so a processing method by using laser is adopted.

However, in recent years, while heavy weight and fine processing are increasingly important in various fields, laser processing cannot form micro holes having a uniform width as a whole.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a laser drilling apparatus for solving the problem of the prior art in which the cross-sectional shape of the micro-hole is fixed.

To achieve the above and other related objects, the present invention provides a laser drilling apparatus, comprising,

the laser lens is arranged in the lens barrel and comprises a first surface and a second surface arranged opposite to the first surface, wherein the second surface is obliquely arranged opposite to the first surface and thickened from a first end of the second surface to a second end of the second surface;

the focusing mirror is arranged opposite to the second surface of the laser lens, is arranged on the same rotating axis with the laser lens, and focuses the laser beam emitted by the laser lens at a position on a workpiece, which is far away from the rotating axis;

a first rotating device that rotates the laser lens and the focusing mirror about the rotation axis as a rotation center, thereby rotating the laser beam condensed on the workpiece with respect to the rotation axis;

the lens cone, the focusing mirror and the first rotating device are arranged on a mounting plate, and the mounting plate is driven by a lifting device to linearly reciprocate relative to the workpiece along the advancing direction of the laser beam.

In an embodiment of the invention, a mirror is further rotatably connected to the mounting plate, and the mirror is disposed opposite to the first surface.

In an embodiment of the present invention, a rotating motor is mounted on the mounting plate, and the rotating motor is connected to the reflecting mirror through a rotating shaft.

In an embodiment of the present invention, a linear driving device is mounted on the mounting plate, an output end of the linear driving device is connected to a mirror, the mirror is disposed opposite to the first surface, and the linear driving device drives the mirror to linearly reciprocate along a direction crossing the rotation axis.

In an embodiment of the invention, a plurality of laser lenses are disposed in the lens barrel, the laser lenses are disposed at intervals along the rotation axis, and the inclination directions of the second surfaces between adjacent laser lenses are opposite.

In an embodiment of the invention, a gasket is sandwiched between the adjacent laser lenses.

In an embodiment of the present invention, the opening of the lens barrel is sealed by a sealing cover, and a sealing ring is interposed between the sealing cover and a gasket adjacent to the sealing cover.

In an embodiment of the present invention, the lens barrel includes a barrel body, openings at two axial sides of the barrel body are respectively sealed by a panel and a sealing cover,

an annular boss is arranged in the cylinder body and divides the cylinder body into a first cavity and a second cavity, a laser lens is respectively arranged in the first cavity and the second cavity, a first shell is wrapped outside a first laser lens arranged in the first cavity,

the panel is connected to a first rotating shaft of the first rotating apparatus,

the laser drilling equipment further comprises second rotating equipment, wherein a second rotating shaft of the second rotating equipment is inserted into the first rotating shaft and penetrates through the panel to be connected with the first shell.

In an embodiment of the invention, a vibration suppressing member is sleeved outside the first housing.

In one embodiment of the present invention, the vibration suppressing member includes a ring member and a second ring member disposed inside the first ring member,

the inner wall of the first annular piece is connected with the outer wall of the second annular piece by an elastic piece,

and damping parts are respectively arranged on the axial sides of the outer wall of the first annular part, and the first shell is placed between the damping parts.

As described above, the laser drilling apparatus of the present invention can process micro holes having various cross-sectional shapes.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of a laser drilling apparatus according to the present invention.

Fig. 2 is a schematic cross-sectional view of the lens barrel of the laser drilling apparatus of fig. 1.

Fig. 3 shows a schematic overview of the laser drilling apparatus of fig. 2.

Fig. 4 is a schematic structural view of another embodiment of the laser drilling apparatus of the present invention.

Fig. 5 is a schematic diagram of the laser drilling apparatus of fig. 4.

Fig. 6 shows a schematic overview of a further embodiment of the laser drilling apparatus of the present invention.

Fig. 7 shows a schematic overview of a further embodiment of the laser drilling apparatus of the present invention.

Fig. 8 is a schematic structural view of the laser drilling apparatus of fig. 7 according to the present invention.

Fig. 9 is a schematic cross-sectional view of the lens barrel of fig. 8 according to the present invention.

Fig. 10 is another schematic cross-sectional view of the lens barrel of fig. 8.

Fig. 11 is a top view of the vibration suppression element of fig. 10.

Fig. 12 is a schematic sectional view taken along line a-a of fig. 11.

Detailed Description

The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.

It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.

Referring to fig. 1 to 3, the laser drilling apparatus in this embodiment emits a laser beam toward a workpiece 6, forms micro holes having various cross-sectional shapes,

in one embodiment, the laser drilling apparatus includes a lens barrel 1 and a first rotating apparatus 2.

As shown in fig. 2 and 3, the lens barrel 1 is provided with a laser lens 11 therein, the laser lens 11 includes a first surface 111 formed horizontally after being perpendicular to the rotation axis O, and a second surface 112 disposed opposite to the first surface 111, wherein the second surface 112 is disposed obliquely with respect to the first surface 111, and a first end 113a of the second surface 112 is gradually thickened toward a second end 113b of the second surface 112 to form a substantially wedge shape. The laser beam L enters from the first surface 111, and is bent from the second surface 112 toward the second end 113b to be emitted as a laser beam L ', and at this time, the emitted laser beam L' is inclined at an angle with respect to the rotation axis O.

As shown in fig. 2 and 3, the focusing lens 3 may be disposed inside the lens barrel 1 or outside the lens barrel 1. The focusing mirror 3 is disposed opposite to the second surface 112 of the laser lens 11 while being positioned along the advancing direction of the laser beam L with the center of the focusing mirror 3 falling on the rotation axis O. The focusing mirror 3 focuses the laser beam L' on the workpiece 6 to form a focused beam L ". The laser beam L' enters the focusing mirror 3 at a position offset from the center thereof, and the laser beam L ″ emitted from the focusing mirror 3 is condensed at a position on the workpiece 6 away from the rotation axis O.

As shown in fig. 1, the first rotating device 2 rotates the lens barrel 1, so that the laser lens 11 and the focusing lens 3 in the lens barrel 1 rotate around the rotation axis O. In an embodiment, the first rotating device 2 includes a first motor 21, a first pulley 22 and a second pulley 23, an output shaft of the first motor 21 is axially connected to the first pulley 22, the first pulley 22 is connected to the second pulley 23 by a synchronous belt, the lens barrel 1 is axially connected to the second pulley 23 by a first rotating shaft 231, and a hollow portion of the first rotating shaft 231 is used for the laser beam L to enter the laser lens 11 in the lens barrel 1.

After the first motor 21 is started, the first rotating shaft 231 is driven to rotate by the first belt pulley 22 and the second belt pulley 23, and at this time, the lens barrel 1 rotates together with the first rotating shaft 231. During the rotation, the second end 113b of the laser lens 11 rotates with reference to the rotation axis O, and the laser beam L ″ focused by the focusing mirror 3 also rotates with reference to the rotation axis O. The laser beam L "is thus rotated along the outer surface of the workpiece 6 to machine a micro-hole.

The first rotating device 2 may also be configured to rotate the laser lens 11 and the focusing mirror 3 by using a gear meshing rotation, for example, so that the laser lens 11 and the focusing mirror 3 rotate around the rotation axis O as a rotation center.

In an embodiment, as shown in fig. 4, a reflecting mirror 7 may be further disposed in front of the laser mirror 11, the reflecting mirror 7 is rotatably connected to the mounting plate 4, the incident position of the laser beam L on the first surface 111 of the laser mirror 11 is changed by rotating the reflecting mirror 7, and in addition, the reflecting mirror 7 may be connected to a rotating motor (not shown) through a rotating shaft, and the rotating radius of the laser beam L ″ when rotating with respect to the rotating axis O is changed by rotating the reflecting mirror 7.

As shown in fig. 4 and 5, in the present embodiment, when the mirror 7 rotates clockwise, the laser beam L ″ is condensed at a position relatively close to the rotation axis O, and when the mirror 7 rotates counterclockwise, the laser beam L ″ is condensed at a position relatively far from the rotation axis O, thereby changing the rotation radius of the laser beam L ″.

If the radius of rotation of the laser beam L "is fixed, the aperture of the micro-holes that can be machined is limited. When the diameter of the micro-hole to be processed is small, the laser beam L is rotated along the outer surface of the micro-hole, whereby the inside of the micro-hole can be completely removed to form a complete micro-hole. However, when the diameter of the micro-hole to be processed is large, the laser beam L is simply rotated along the outer surface of the micro-hole, and thus a complete micro-hole cannot be formed. The chips of the workpiece 6 remain inside the minute holes because the chips cannot be sufficiently drilled.

Further, the radius of rotation of the laser beam L is changed by the mirror 7, and the laser beam L moves not only to the outer surface but also to the inside of the micro hole, so that the debris inside the micro hole can be removed, thereby completing the hole machining. The laser drilling equipment in the embodiment utilizes the reflecting mirror 7 to change the rotating radius of the laser beam, and micropores with various apertures can be formed, so that the interchangeability of the device is improved.

In one embodiment, as shown in fig. 1, the lens barrel 1 and the first rotating device 2 may be provided to the lifting device 5 through a mounting plate 4, and the laser lens 11 and the focusing lens 3 are lifted along the rotation axis O by the lifting device 5 so as to be close to the workpiece 6 or away from the workpiece 6.

For a workpiece 6 with a relatively thick thickness, the micro-holes can be processed by changing the height of the laser beam L ″ at the focal point of the workpiece 6 from the surface to the inside of the workpiece 6 or from the inside to the surface of the workpiece 6. When the inside of the workpiece 6 is to be machined, the laser lens 11 and the focusing mirror 3 are positioned close to the workpiece 6, and the laser beam L is condensed inside the workpiece 6. When the surface of the workpiece 6 is to be machined, the laser lens 11 and the focusing mirror 3 are positioned at positions away from the workpiece 6, and the laser beam L is condensed on the surface of the workpiece 6. Therefore, by lifting the laser lens 11 and the focusing mirror 3 by the lifting device 5, the processing depth of the minute hole formed in the workpiece 6 can be controlled.

As shown in fig. 1, the lifting device 5 may be configured to drive the laser lens 11 and the focusing lens 3 to move back and forth along the advancing direction of the laser beam L. In an embodiment, the lifting device 5 may be a combination of a rotary motor and a ball screw, or a combination of a rotary motor and a linear motor, wherein a nut of the ball screw is fixed to the mounting plate 4, and the rotary motor is started to drive the laser lens 11 and the focusing lens 3 in the lens barrel 1 on the mounting plate 4 to move back and forth along the rotation axis O. The lifting device 5 may also be of other construction known to those skilled in the art, and a detailed description thereof is omitted here.

With the laser drilling apparatus in the present embodiment, the laser beam is rotated along the outer surface of the micro-hole to form the micro-hole having a variety of sectional shapes. The cross section may be a conical shape, may be gradually widened from the upper surface to the lower surface of the workpiece 6, may be gradually widened from the upper surface to the middle of the workpiece 6 and then gradually narrowed from the middle to the lower surface, or may be gradually narrowed from the upper surface to the middle of the workpiece 6 and then gradually widened from the middle to the lower surface.

In one embodiment, as shown in fig. 6, the mirror 7 reflects the incident laser beam L to advance toward the laser mirror 11, and the output end of the linear driving device 8 is connected to the mirror 7 to linearly reciprocate the mirror 7 in a direction intersecting the rotation axis O. By linearly reciprocating the mirror 7 in the direction intersecting the rotation axis O by the linear driving device 8, the incident position of the laser beam L on the first surface 111 of the laser mirror 11 can be changed according to the changed position of the mirror 7.

The linear driving device 8 may employ a combination of a rotary motor and a ball screw, or a linear motor, etc., and a structure for linearly reciprocating the optical element is known to those skilled in the art, and thus a detailed description thereof will be omitted.

On the other hand, fig. 7 is a schematic view of a laser drilling apparatus in another embodiment of the present invention.

As shown in fig. 7 and 9, the laser drilling apparatus in the present embodiment has a plurality of

laser lenses

11, 120.

As shown in fig. 7, the laser drilling apparatus in the present embodiment has a plurality of

laser lenses

11, 120, for example, two

laser lenses

11, 120, and when two

laser lenses

11, 120 are used, the aperture of the micro-hole may be relatively small.

The two

laser optics

11, 120 are arranged at a distance apart along the rotation axis O, the second surfaces 112 of both

laser optics

11, 120 being inclined in opposite directions to each other. In the state thus arranged, the laser beam L passing through the upper laser mirror 11 advances in a direction away from the rotation axis O, and then is redirected again by the lower laser mirror 120 to advance in a direction close to the rotation axis O, with the result that the position of the laser beam L condensed on the workpiece 6 is relatively close to the rotation axis O. Therefore, the radius of rotation of the laser beam L can be reduced, so that the aperture of the micro-hole can be made relatively small.

In an embodiment, in order to have a plurality of

laser lenses

11, 120, the laser drilling apparatus in the present embodiment includes a lens barrel 1, a gasket 12, and a sealing cover 13. In the lens barrel 1, a plurality of

laser lenses

11 and 120 are stacked along the rotation axis O, and a washer 12 for fixing the distance between the

laser lenses

11 and 120 is provided between the

laser lenses

11 and 120. The sealing cover 13 is combined with the opening of the lens barrel 1 by a fastening member such as a bolt or a screw, and is used for preventing the plurality of

laser lenses

11 and 120 from being exposed out of the lens barrel 1.

In addition, a sealing ring made of elastic material is disposed between the sealing cover 13 and the gasket 12 disposed at the upper portion of the sealing cover 13, and is used to block the vibration generated when the

laser lens

11, 120 is repeatedly rotated from being transmitted to the sealing cover 13, absorb the vibration, and prevent the sealing cover 13 from being loosened.

In an embodiment, as shown in fig. 7, the laser drilling apparatus in the present embodiment has a plurality of

laser lenses

11, 120. The two

laser optics

11, 120 are arranged at a distance apart along the rotation axis O, the inclination directions of the second surfaces 112 of the respective laser optics being opposite to each other, with a deviation angle α. In the state thus arranged, the laser beam L passing through the upper laser mirror 11 advances in a direction away from the rotation axis O, and then is redirected again by the lower laser mirror 120 to advance in a direction close to the rotation axis O, with the result that the position of the laser beam L condensed on the workpiece 6 is relatively close to the rotation axis O. Therefore, the radius of rotation of the laser beam L can be reduced, so that the aperture (d2) of the microhole can be made relatively small. However, if the off-angle α existing between the

laser lenses

11 and 120 is not changed, the aperture of the micro-hole processed in the same barrel 1 is not changed.

In one embodiment, as shown in fig. 8 and 9, the lens barrel 1 includes a face plate 15, a seal cover 13, and a barrel 14, and both axial side openings of the barrel 14 are respectively sealed by the face plate 15 and the seal cover 13.

As shown in fig. 9, an annular boss is disposed inside the barrel 14, the barrel 14 is divided into a first chamber and a second chamber through the annular boss, the first chamber and the second chamber are used for placing the

laser lenses

11 and 120, in this embodiment, a first housing is wrapped outside the laser lens 11 in the first chamber, and a second housing is wrapped outside the laser lens 120 in the second chamber, wherein the first housing may be composed of an upper independent unit and a lower independent unit, and the two independent units are combined to form a cavity for placing the laser lens 11. The second shell can adopt the same structural form as the first shell, and can also be only applied to one independent unit.

The first rotating device 2 and the second rotating device are stacked, wherein one end of the first rotating shaft 231 of the first rotating device 2 is directly and fixedly connected with the panel 15 of the lens barrel 1, the first motor 21 of the first rotating device 2 can drive the first rotating shaft 231 to rotate through the first belt pulley 22 and the second belt pulley 23, and at this time, the whole lens barrel 1 can rotate along with the first rotating shaft 231.

The second rotating device may include a second motor 91, a third pulley 92 and a fourth pulley 93, an output shaft of the second motor 91 is axially connected to the third pulley 92, the third pulley 92 and the fourth pulley 93 are connected by a timing belt, and the fourth pulley 93 is axially sleeved on the second rotating shaft 931. The second rotating shaft 931 is inserted into the hollow portion of the first rotating shaft 231 and is connected to the first housing in the lens barrel 1 after passing through the panel 15 of the lens barrel 1, and meanwhile, the second rotating shaft 931 also has a hollow portion. When the first rotating device 2 is not changed and the second motor 91 of the second rotating device drives the second rotating shaft 931 to rotate through the third belt pulley 92 and the fourth belt pulley 93, the second rotating device drives the first housing in the lens barrel 1 to rotate, so that the deflection angle α between the

laser lenses

11 and 120 is changed, and the laser beam L is changed to rotate along the outer surface of the workpiece 6 to machine the micro-hole.

Meanwhile, in order to reduce the vibration of the lens barrel 1 caused by the vibration generated during the rotation of the first housing, a vibration suppressing member 16 may be sleeved outside the first housing.

The vibration suppressing member 16 includes a first annular member 161 and a second annular member 162 disposed inside the first annular member 161, an inner wall of the first annular member 161 and an outer wall of the second annular member 162 are connected by an elastic member 163, and both the first annular member 161 and the second annular member 162 are made of an elastic material. Meanwhile, a damping member 164 is provided at each axial side of the outer wall of the first ring member 161,

the damping member 164 is connected to the first ring member 161 through a connecting member 165, and a groove for inserting the connecting member 165 is formed in the damping member 164, so that the damping member 164 and the connecting member 165 can be conveniently installed. The first casing is axially disposed between the two damping members 164, and the first casing disposed in the vibration suppressing member 16 is suspended in the first cavity of the lens barrel 1 and does not directly contact with the barrel 14 and the faceplate 15, so that the vibration generated by the first casing during the rotation process is absorbed by the vibration suppressing member 16, thereby achieving the purpose of damping.

In conclusion, the present invention effectively overcomes various disadvantages of the prior art and has high industrial utilization value.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. A laser drilling apparatus, comprising,

the lens cone, the focusing mirror and the first rotating device are arranged on a mounting plate, and the mounting plate is driven by a lifting device to linearly reciprocate relative to the workpiece along the advancing direction of the laser beam;

the mounting plate is provided with a linear driving device, the output end of the linear driving device is connected with a reflector, the reflector is arranged relative to the first surface, and the linear driving device drives the reflector to linearly reciprocate along the direction crossed with the rotation axis.

2. The laser drilling apparatus of claim 1, wherein a mirror is further rotatably coupled to the mounting plate, the mirror being disposed relative to the first surface.

3. The laser drilling apparatus of claim 2, wherein a rotating motor is mounted on the mounting plate, the rotating motor being connected to the mirror by a rotating shaft.

4. The laser drilling apparatus according to claim 1, wherein a plurality of laser lenses are provided in the lens barrel, the plurality of laser lenses are spaced apart along the rotation axis, and the inclination directions of the second surfaces between adjacent laser lenses are opposite.

5. The laser drilling apparatus of claim 4, wherein a gasket is sandwiched between adjacent laser mirrors.

6. The laser drilling apparatus according to claim 5, wherein the opening of the lens barrel is closed by a sealing cap, and a sealing ring is interposed between the sealing cap and a gasket adjacent to the sealing cap.

7. The laser drilling apparatus according to claim 1, wherein the lens barrel includes a barrel body, openings at both axial sides of the barrel body are respectively blocked by a face plate and a sealing cover,

8. The laser drilling apparatus of claim 7, wherein a vibration inhibitor is provided outside the first housing.

9. The laser drilling apparatus according to claim 8, wherein the vibration suppressing member includes a ring member and a second ring member disposed inside the first ring member,