CN111693198A - Double-plate type six-dimensional force torque sensor - Google Patents
Double-plate type six-dimensional force torque sensor Download PDFInfo
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- CN111693198A CN111693198A CN202010411332.4A CN202010411332A CN111693198A CN 111693198 A CN111693198 A CN 111693198A CN 202010411332 A CN202010411332 A CN 202010411332A CN 111693198 A CN111693198 A CN 111693198A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 41
- 229920001971 elastomer Polymers 0.000 claims description 13
- 239000000806 elastomer Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 230000009977 dual effect Effects 0.000 claims 7
- 238000001514 detection method Methods 0.000 abstract description 17
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 238000009434 installation Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a double-plate type six-dimensional force torque sensor; relates to the field of sensors; comprises a first strained portion and a second strained portion; the first strain part comprises a loading disc, a first cover pressing ring, a supporting plate and a first disc-type elastic body; the second strain part comprises a second cover pressing ring, a second disc type elastic body and a fixed base, and the basic structure of the second strain part also comprises a semiconductor strain assembly, a circuit board and a fixed connecting piece; the first disc type elastic body is fixed on a bracket by a first cover pressing ring, and the bracket is fixed below the loading circular plate; the second disc type elastic body is fixed on the fixed base by a second cover pressing ring; the two-stage strain parts are connected through a boss at the center of the disc-type elastic body; the first disc-type elastic body and the second disc-type elastic body are respectively provided with six groups of bridge circuits consisting of semiconductor strain gauges for detecting force signals. The invention has two stages of strain groups, compact structure, high sensitivity, wide detection range, convenient installation and temperature compensation.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a double-plate type six-dimensional force torque sensor.
Background
Among many sensors, six-dimensional force/torque sensors are widely applied to the fields of force position control of intelligent robots such as grinding and polishing processing, intelligent grabbing and precision assembly and the detection of force information of various engineering equipment because the six-dimensional force/torque sensors can detect six external force components. The commonly used six-dimensional force/torque sensors are classified into piezoelectric type, strain type, electromagnetic type, photoelectric type and the like, wherein the strain type sensors are studied most deeply, and multi-dimensional force sensors in various forms such as cylindrical type, upright column type, cross beam type and other spoke type are generated.
Patent CN 107036754 a discloses a six-dimensional sensor capable of sensing contact force and traction force, which uses two elastic bodies to realize simultaneous measurement of contact force and traction force, but its structure is more complex and does not consider the influence of temperature; patent CN 108801531 a discloses a six-dimensional force sensor and a method for improving the temperature drift of the six-dimensional force sensor, the six-dimensional force sensor has a simple structure, and two temperature compensation strain gauges are adopted to reduce the influence of temperature on the performance of the sensor, but the compensation effect is limited, and the modularization effect is poor; patent CN 101419102A discloses an ultrathin six-dimensional force sensor and a method for measuring three-dimensional force and three-dimensional moment information by using the same; the six-dimensional force sensor disclosed by the patent has the advantages that the axial distance is small, an integrated sensitive element structure is adopted, the dynamic performance is good, the miniaturization of the sensor is realized, and the problem of insufficient measuring range exists; patent CN 1289917 a discloses a six-dimensional force sensor based on ceramic thick film technology, which can achieve the function of adjusting the detection range by adjusting the size, but the sensor is relatively complex to process and has no overload protection capability. Other typical integral beam structures use a strain beam as an elastic element, and can increase the measurement range of the sensor by increasing the cross-sectional area of the beam and improving the rigidity of the beam, but the measurement sensitivity of the sensor is influenced; meanwhile, under the condition of limited axial installation distance, the sensitivity is improved by reducing the thickness of the beam, the problems of insufficient rigidity, poor bearing capacity and the like are easily caused, and the detection of instantaneous overload signals such as collision and the like is difficult to realize.
Disclosure of Invention
The invention aims to provide a double-plate type six-dimensional force torque sensor, which solves the problems in the prior art, effectively reduces the cost, enhances the stability of the sensor, improves the sensitivity, increases the detection range, and can realize high-precision measurement of six-dimensional force signals and detection of overload signals in a small-range.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a double-plate type six-dimensional force torque sensor which comprises a first strain part and a second strain part, wherein the first strain part is connected with the second strain part; the first strain part comprises a loading disc, a first cover pressing ring, a supporting plate and a first disc-type elastic body, and a first semiconductor strain assembly is arranged on the first disc-type elastic body; the second strain part comprises a second cover pressing ring, a second disc type elastic body, a circuit board and a fixed base, and a second semiconductor strain assembly is arranged on the second disc type elastic body; the first semiconductor strain assembly and the second semiconductor strain assembly respectively comprise six groups of bridge circuits, and each group of bridge circuits respectively comprises seven strain gauges; the supporting plate comprises an edge with an annular structure and a bottom plate with an annular structure, the inner diameter of the bottom plate is smaller than that of the edge, and the loading disc is connected with the edge of the carriage through a first bolt group; eight first disc-type elastomer fixing through holes are uniformly distributed at the outer edge of the first disc-type elastomer, the first disc-type elastomer is arranged on the bottom plate, the first cover pressing ring is arranged above the first disc-type elastomer and fixedly connected with the bottom plate through a second bolt group; the loading disc is arranged above the first cover pressing ring, a plurality of loading disc inner ring holes are uniformly formed in the loading disc, and the loading disc is connected with an external load through the loading disc inner ring holes; a first boss is arranged at the center of the first disc type elastic body, and a second boss is arranged on the outer edge of the first boss; the first boss is provided with a first connecting hole, the center of the second disc type elastic body is provided with a third boss, the bottom of the third boss is sequentially provided with a fourth boss and a first limiting boss, the third boss is provided with a second connecting hole, and the first connecting hole and the second connecting hole are fixedly connected through a third bolt group; eight second disc type elastic body fixing through holes are uniformly distributed at the outer edge of the second disc type elastic body; the second disc type elastic body is fixedly connected to the fixed base through a second cover pressing ring and a fourth bolt group; the circuit board is located below the second disc type elastic body and fixedly connected to the fixing base through a fifth bolt group.
Optionally, each strain gauge of each set of bridge circuit includes a semiconductor strain gauge disposed in a stress concentration region and a compensation gauge disposed in a non-stress concentration region; the semiconductor strain sheet comprises a silicon strip, a substrate, terminals and leads, wherein the substrate is provided with uniformly distributed grooves; and the strain bridge arm of the bridge circuit consists of the semiconductor strain gauge.
Optionally, the first disc-type elastic body is a high-sensitivity elastic body, and the stress concentration region of the first disc-type elastic body includes linear and arc-shaped staggered grooves distributed on the surface; the second disc type elastic body is a high-sensitivity elastic body, and the stress concentration area of the second disc type elastic body comprises linear grooves distributed on the surface.
Optionally, a first flange is disposed between the outer side of the stress concentration region of the first disc-type elastic body and the first disc-type elastic body fixing through hole, and a second flange is disposed between the outer side of the stress concentration region of the second disc-type elastic body and the second disc-type elastic body fixing through hole.
Optionally, the first cover pressing ring is clamped at the first flange, and the second cover pressing ring is clamped at the second flange.
Optionally, the non-stress concentration region of the first disc-type elastic body includes a first boss and a second boss which are cylindrical, and the non-stress concentration region of the second disc-type elastic body includes a third boss and a fourth boss which are cylindrical.
Optionally, a baffle with a circular cross section is arranged on the fixed base, and a first-stage step surface is arranged on the inner side of the baffle; a second-stage step surface is arranged on the inner side of the first-stage step surface, a groove is arranged between the first-stage step surface and the second-stage step surface, a second limiting boss is connected to the inner side of the second-stage step surface, and the height of the second limiting boss is greater than that of the second-stage step surface; the first-stage step surface is used for fixing the second disc-type elastic body, and the second-stage step surface is used for fixing the circuit board.
Optionally, a wire outlet hole is formed in the baffle on the side wall of the fixed base; a plurality of fixing holes are formed in the position, located on the outer edge of the baffle, of the fixing base.
Compared with the prior art, the invention has the following technical effects:
the double-plate type six-dimensional force torque sensor provided by the invention adopts an assembled structure, does not need too high assembly precision, is convenient to install and replace elements, is easy to machine and form single parts, and can effectively reduce the cost; the sensitive element adopts a semiconductor strain gauge, and the substrate of the sensitive element is provided with uniformly distributed grooves, so that the stress concentration effect can be enhanced under the condition of not influencing the elastic element, and the sensitivity is improved; the strain gauge bridge circuit is provided with a compensation strain gauge, so that temperature compensation and nonlinear compensation can be realized, and the stability of the circuit is enhanced; the double-disc type elastomer is adopted, so that the whole structure is compact; the two elastic bodies are provided with overload protection bosses, so that overload protection of the sensor can be realized; the combination of the high-sensitivity disc type elastic body and the high-rigidity disc type elastic body can improve the sensitivity and can detect load changes caused by severe working conditions such as collision and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive labor.
FIG. 1 is an exploded schematic view of the overall structure of the present invention;
FIG. 2 is an exploded view of a first strained portion structure composition of the present invention;
FIG. 3 is a schematic view of a first disc-type elastomer structure of the present invention;
FIG. 4 is an exploded view of a second strained partial structure composition of the present invention;
FIG. 5 is a schematic structural view of a second disc elastomer of the present invention;
FIG. 6 is a schematic diagram of a semiconductor strain gage structure of the present invention;
FIG. 7 is a schematic view of a first disc-type elastomeric patch of the present invention;
FIG. 8 is a schematic view of the structure of the fixed base of the present invention;
wherein, 1 is a first strain part, 2 is a second strain part, 11 is a first bolt group, 12 is a loading disc, 121 is a loading disc inner ring hole, 13 is a second bolt group, 14 is a first cover ring, 15 is a third bolt group, 16 is a first semiconductor strain component, 161 is a semiconductor strain gauge, 1611 is a substrate, 1612 is a terminal, 1613 is a lead wire, 1614 is a silicon strip, 1615 is a groove, 162 is a constant value strain gauge for temperature compensation, 163 is a strain gauge for non-linear compensation, 17 is a first disc type elastic body, 171 is a first disc type elastic body fixing through hole, 172 is a linear groove, 173 is an arc groove, 174 is a first boss, 175 is a second boss, 176 is a first connecting hole, 177 is a first flange, 18 is a supporting plate, 21 is a fourth bolt group, 22 is a second cover ring elastic body, 23 is a second disc type elastic body, 231 is a second disc type elastic body fixing through hole, 232 is a third boss, 233 is a second connecting hole, 234 is a second disc type elastic body linear groove, 235 is a fourth boss, 236 is a first limit boss, 237 is a second flange, 24 is a second semiconductor strain component, 25 is a fifth bolt group, 26 is a circuit board, 27 is a fixed base, 271 is an outer ring connecting hole, 272 is a first-stage step surface, 273 is a second limit boss, 274 is a second-stage step surface, 275 is an inner ring connecting hole, 276 is a fixed hole, and 277 is a fixed base outlet hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a double-plate type six-dimensional force torque sensor, which solves the problems in the prior art, effectively reduces the cost, enhances the stability of the sensor, improves the sensitivity, increases the detection range, and can realize high-precision measurement of six-dimensional force signals and detection of overload signals in a small-range.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The invention provides a double-plate type six-dimensional force torque sensor, which comprises a first strain part 1 and a second strain part 2, as shown in figures 1-8; the first strain part 1 comprises a loading disc 12, a first capping ring 14, a supporting plate 18, a first disc type elastic body 17, a first semiconductor strain assembly 16, a first bolt group 11, a second bolt group 13 and a third bolt group 15; the second strain portion 2 includes a second capping ring 22, a second disc-shaped elastic body 23, a second semiconductor strain element 24, a circuit board 26, a fixing base 27, and fourth and fifth bolt groups 21 and 25; 42 strain foils are respectively attached to the first strain part 1 and the second strain part 2 to form 12 groups of bridge circuits; when the sensor works, the loading disc 12 is connected with an external load through the loading disc inner ring hole 121 and is connected with the carriage 18 through the first bolt group 11; eight first disc-type elastomer fixing through holes 171 are uniformly distributed at the outer edge of the first disc-type elastomer 17, and the outer surface of the first flange 177 is connected with the first cover pressing ring 14; the first disc type elastic body 17 is fixedly connected to the bottom plate on the inner side of the supporting plate 18 after the first cover pressing ring 14 passes through the first disc type elastic body fixing through hole 171 through the second bolt group 13; a first semiconductor strain component 16 is attached to the surface stress concentration area of the first disc-type elastic body 17; the first semiconductor strain assembly 16 comprises a semiconductor strain gauge 161 and a compensation gauge adhered to the non-stress concentration region to form a bridge circuit; the surface of the first disc-type elastic body 17 is provided with six groups of bridge circuits for detecting force signals; a first boss 174 and a second boss 175 are arranged at the center of the first disc type elastic body 17; the first boss 174 is provided with a first connection hole 176; a third boss 232 and a fourth boss 235 are arranged at the center of the second disc-type elastic body 17, and a first limiting boss 236 is arranged at the bottom of the fourth boss 235; the third boss 232 is provided with a second connecting hole 233, the first disc-type elastic body 17 and the second disc-type elastic body 23 are connected with each other through the first connecting hole 176, the second connecting hole 233 and the third bolt group 15, eight second disc-type elastic body fixing through holes 231 are uniformly distributed on the outer edge of the second disc-type elastic body 23, and the surface of the second flange 237 is combined with the second cover pressing ring 22; the second disc-shaped elastic body 23 is fixedly connected to the fixing base 27 by the second cover ring 22 through the fourth bolt group 21; a second semiconductor strain component 24 is attached to the surface stress concentration area of the second disc type elastic body 23, and the arrangement mode of the second semiconductor strain component is the same as that of the first semiconductor strain component 16; the circuit board 26 is fixedly attached to the inner ring attachment hole 275 on the second-stage stepped surface 274 of the fixed base 27 by the fifth bolt group 25.
Further preferably, each of the first semiconductor strain assembly 16 and the second semiconductor strain assembly 24 includes a semiconductor strain gauge 161 and a compensation gauge, the compensation gauge includes a temperature compensated constant strain gauge 162 and a nonlinear compensated strain gauge 163, the semiconductor strain gauge 161 is assembled by a silicon strip 1614, a substrate 1611, a terminal 1612, a lead 1613, and the like, the substrate 1611 of the semiconductor strain gauge 161 is provided with uniformly distributed trenches 1615, and the detection sensitivity can be improved without affecting the physical characteristics of the silicon strip 1614 by the stress concentration phenomenon of the trenches 1615; the 12 groups of bridge circuits consisting of the first semiconductor strain assemblies 16 are all provided with compensation sheets, and strain bridge arms of the bridge circuits consist of semiconductor strain sheets 161, so that temperature compensation and nonlinear compensation can be realized, and the stability of the sensor is improved; the second semiconductor strain element 24 is identical in composition and arrangement to the first semiconductor strain element 16; the first disc-type elastic body 17 is a high-sensitivity elastic body, and the surface of the first disc-type elastic body is distributed with a linear groove 172 and an arc-shaped groove 173 to form a stress concentration area, so that the rigidity of the first disc-type elastic body 17 is reduced, and the detection sensitivity is improved; the second disc type elastic body 23 is a high-rigidity elastic body, linear grooves 234 of the second disc type elastic body are distributed on the surface of the second disc type elastic body to form a stress concentration area, the rigidity of the second disc type elastic body 23 is higher than that of the first disc type elastic body 17, supplementary work can be carried out under the condition that the performance of the first strain part 1 is insufficient, and meanwhile, the detection range of the sensor can be improved; the second boss of the first disc-type elastic body 17 and the fourth boss of the second disc-type elastic body 23 are non-stress concentration areas for sticking a compensation sheet.
The first disc-type elastic body 17 is a high-sensitivity elastic body, and is provided with 42 strain gauges for detecting six-dimensional force signals; seven strain gages of R1-R7, R8-R14, R15-R21, R22-R28, R29-R35 and R36-R42 form a group to form 6 bridge circuits, and four semiconductor strain gages 161 for strain sensing in each bridge circuit are arranged in a stress concentration detection area; the constant value strain gauge 162 for temperature compensation has two pieces, and the strain gauge 163 for nonlinear compensation has one piece, arranged in the non-stress concentration detection region; a coordinate system is established by taking the disc surface of the first disc-type elastic body 17 as a coordinate plane, taking the symmetry axis as a coordinate axis X, Y and taking the disc surface perpendicular to the disc surface as a Z axis, wherein R1-R7 is used for detecting Fx; R8-R14 for detecting Fy; R15-R21 for detecting Fz; R22-R28 for detecting Mx; R29-R35 for detecting My; R36-R42 for Mz detection; strain gauges R1 '-R7', R8 '-R14', R15 '-R21', R22 '-R28', R29 '-R35' and R36 '-R42' are distributed at corresponding positions on the second disc-type elastic body 23 in the same sticking mode as the first disc-type elastic body 17.
A first flange 177 and a second flange 237 are respectively arranged on the outer side of the first disc-type elastic body 17 and the outer side of the second disc-type elastic body 23, and a gap is formed between the two flanges to play a role in limiting and protecting; a second limiting boss 273 is arranged in the center of the fixed base 27, and is used for limiting when the applied force exceeds the detection range of the second disc type elastic body 23, so that the overload protection effect is achieved; a fixed base wire outlet hole 277 is formed in the side wall of the fixed base 23 and used for leading out lead wires such as a bridge circuit; the fixed base 27 is provided with a three-stage step surface, and the first-stage step surface 272 is provided with an outer ring connecting hole 271 for fixing the second disc-type elastic body 23; the second-stage stepped surface 274 is used to fix the circuit board 26; the third-stage step surface is the upper surface of the second limit boss 273, when the sensor is heavily overloaded, the second limit boss 273 contacts with the first limit boss 236 for limit protection, and the position of the fixing base 27 on the outer edge of the baffle is provided with a plurality of fixing holes 276.
The double-plate type six-dimensional force moment sensor provided by the invention adopts two elastic bodies, wherein the first disc type elastic body 17 is a high-sensitivity elastic body, the rigidity is small, and the stress concentration effect is obvious; the second disc type elastic body is a high-range elastic body, the rigidity is large, the detection range is high, and the detection signal of the first disc type elastic body can be compensated; by adjusting the structural parameters of the elastic body, such as the structural size and the slotting mode, and adjusting the sheet distribution positions of the first semiconductor strain assembly 16 and the second semiconductor strain assembly 24 and the resistance value of the compensation sheet, the output sensitivity of the sensor in all directions can be adjusted, the measuring range is changed, and the six-dimensional force torque sensor with different performance requirements can be met.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; also, it is obvious to those skilled in the art that various changes and modifications can be made in the embodiments and applications of the invention. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. The utility model provides a six-dimensional force torque sensor of double plate-type which characterized in that: comprises a first strained portion and a second strained portion; the first strain part comprises a loading disc, a first cover pressing ring, a supporting plate and a first disc-type elastic body, and a first semiconductor strain assembly is arranged on the first disc-type elastic body; the second strain part comprises a second cover pressing ring, a second disc type elastic body, a circuit board and a fixed base, and a second semiconductor strain assembly is arranged on the second disc type elastic body; the first semiconductor strain assembly and the second semiconductor strain assembly respectively comprise six groups of bridge circuits, and each group of bridge circuits respectively comprises seven strain gauges; the supporting plate comprises an edge with an annular structure and a bottom plate with an annular structure, the inner diameter of the bottom plate is smaller than that of the edge, and the loading disc is connected with the edge of the carriage through a first bolt group; eight first disc-type elastomer fixing through holes are uniformly distributed at the outer edge of the first disc-type elastomer, the first disc-type elastomer is arranged on the bottom plate, the first cover pressing ring is arranged above the first disc-type elastomer, and the first cover pressing ring is fixedly connected with the bottom plate through a second bolt group; the loading disc is arranged above the first cover pressing ring, a plurality of loading disc inner ring holes are uniformly formed in the loading disc, and the loading disc is connected with an external load through the loading disc inner ring holes; a first boss is arranged at the center of the first disc-type elastic body, and a second boss is arranged on the outer edge of the first boss; the first boss is provided with a first connecting hole, the center of the second disc type elastic body is provided with a third boss, the bottom of the third boss is sequentially provided with a fourth boss and a first limiting boss, the third boss is provided with a second connecting hole, and the first connecting hole and the second connecting hole are fixedly connected through a third bolt group; eight second disc type elastic body fixing through holes are uniformly distributed at the outer edge of the second disc type elastic body; the second disc type elastic body is fixedly connected to the fixed base through a second cover pressing ring and a fourth bolt group; the circuit board is located below the second disc type elastic body and fixedly connected to the fixed base through a fifth bolt group.
2. The dual plate six-dimensional force torque sensor according to claim 1, wherein: each strain gauge of each bridge circuit comprises a semiconductor strain gauge arranged in a stress concentration area and a compensation gauge arranged in a non-stress concentration area; the semiconductor strain sheet comprises a silicon strip, a substrate, terminals and leads, wherein the substrate is provided with uniformly distributed grooves; and the strain bridge arm of the bridge circuit is composed of the semiconductor strain gauge.
3. The dual plate six-dimensional force torque sensor according to claim 1, wherein: the first disc-type elastic body is a high-sensitivity elastic body, and the stress concentration area of the first disc-type elastic body comprises linear and circular-arc-shaped staggered grooves distributed on the surface; the second disc type elastic body is a high-rigidity elastic body, and the stress concentration area of the second disc type elastic body comprises linear grooves distributed on the surface.
4. The dual plate six-dimensional force torque sensor according to claim 3, wherein: a first flange is arranged between the outer side of the stress concentration area of the first disc type elastic body and the first disc type elastic body fixing through hole, and a second flange is arranged between the outer side of the stress concentration area of the second disc type elastic body and the second disc type elastic body fixing through hole.
5. The dual plate six-dimensional force torque sensor according to claim 4, wherein: the first cover pressing ring is clamped at the first flange, and the second cover pressing ring is clamped at the second flange.
6. The dual plate six-dimensional force torque sensor according to claim 3, wherein: the non-stress concentration area of the first disc type elastic body comprises a first boss and a second boss which are cylindrical, and the non-stress concentration area of the second disc type elastic body comprises a third boss and a fourth boss which are cylindrical.
7. The dual plate six-dimensional force torque sensor according to claim 1, wherein: a baffle with a circular section is arranged on the fixed base, and a first-stage step surface is arranged on the inner side of the baffle; a second-stage step surface is arranged on the inner side of the first-stage step surface, a groove is formed between the first-stage step surface and the second-stage step surface, a second limiting boss is connected to the inner side of the second-stage step surface, and the height of the second limiting boss is larger than that of the second-stage step surface; the first-stage step surface is used for fixing the second disc-type elastic body, and the second-stage step surface is used for fixing the circuit board.
8. The dual plate six-dimensional force torque sensor according to claim 7, wherein: a wire outlet hole is formed in the baffle on the side wall of the fixed base; a plurality of fixing holes are formed in the position, located on the outer edge of the baffle, of the fixing base.
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| CN202010411332.4A CN111693198B (en) | 2020-05-15 | 2020-05-15 | Double-plate type six-dimensional force torque sensor |
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| CN202010411332.4A CN111693198B (en) | 2020-05-15 | 2020-05-15 | Double-plate type six-dimensional force torque sensor |
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