CN112747854A - Six-dimensional force sensor - Google Patents
Six-dimensional force sensor Download PDFInfo
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- CN112747854A CN112747854A CN202011399409.7A CN202011399409A CN112747854A CN 112747854 A CN112747854 A CN 112747854A CN 202011399409 A CN202011399409 A CN 202011399409A CN 112747854 A CN112747854 A CN 112747854A
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- outer ring
- inner ring
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- dimensional force
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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Abstract
The invention provides a six-dimensional force sensor which comprises an inner ring, an outer ring and an elastic beam. The inner ring is arranged in the outer ring, and the elastic beams are uniformly arranged between the inner ring and the outer ring at intervals along the circumferential direction. The side edges of the elastic beam, which are adjacent to each other and are respectively connected with the outer ring and the inner ring, are symmetrically arranged curves. And strain gauges are arranged on the side surface of the elastic beam corresponding to the top surface of the outer ring and the side surface of the elastic beam corresponding to the bottom surface of the inner ring. According to the six-dimensional force sensor provided by the invention, the elastic beam supported by the peripheral curved surface structure is arranged, the uniqueness of the positions where the strain is generated under the forces in different directions is realized by adjusting the curvature of the curved surface to control the stress distribution, and holes or grooves in different shapes and positions are not required to be manufactured on the elastic beam to realize the change of the positions where the strain is generated, so that the six-dimensional force sensor has the advantages of simple structure, lower requirements on the processing technology, better rigidity and stability, high dynamic force testing precision, large rigidity, small size and light weight under the same measuring range, and convenience in detecting the forces in different directions.
Description
Technical Field
The invention relates to the technical field of detection devices, in particular to a six-dimensional force sensor.
Background
The six-dimensional force sensor is a force sensor that detects forces in three XYZ directions in space and moments about the forces as axes. The intelligent robot is more and more widely applied.
The elastic beam structure of the existing six-dimensional force sensor is mostly in a straight structural form, strain gauges and the like are pasted on a plane, and due to the uniformity of the straight beam structure, the strain change position is generally uniform and constant when the strain sensor is stressed, so that the identification and detection of forces in different directions are difficult to realize, and the larger coupling error between dimensions is caused. To avoid this phenomenon, therefore, many patent proposals achieve a change in the location of the strain occurring by making holes or slots of different shapes and locations in the straight beam. However, as the number of slots increases, the rigidity, stability, etc. of the elastomer are affected, and the elastomer is difficult to apply to large-scale force measurement occasions with high frequency requirements. And the opening position of the hole groove is strict, and the requirement on the processing technology is higher, so that the cost of the sensor is higher.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides a six-dimensional force sensor, solves the problem that the traditional straight beam structure cannot conveniently detect forces in different directions because the difference of the positions of the strain generated under the forces in different directions is difficult to realize by depending on the shape of the straight beam structure, and solves the problems of poor rigidity and complex process caused by the slotted holes formed in the beam structure of the traditional force sensor.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a six-dimensional force sensor comprises an inner ring, an outer ring and an elastic beam. The inner ring is arranged in the outer ring, and the elastic beams are uniformly arranged between the inner ring and the outer ring at intervals along the circumferential direction. The side edges of the elastic beam, which are adjacent to each other and are respectively connected with the outer ring and the inner ring, are symmetrically arranged curves. And strain gauges are arranged on the side surface of the elastic beam corresponding to the top surface of the outer ring and the side surface of the elastic beam corresponding to the bottom surface of the inner ring.
According to the six-dimensional force sensor, the elastic beam supported by the peripheral curved surface structure is arranged, the uniqueness of the positions where the strain is generated under the forces in different directions is realized by adjusting the curvature of the curved surface to control the stress distribution, and holes or grooves in different shapes and positions are not required to be manufactured on the elastic beam to change the positions where the strain is generated, so that the six-dimensional force sensor is simple in structure, low in requirement on a machining process, good in rigidity and stability, high in dynamic force testing precision, large in rigidity, small in size, light in weight and convenient to detect the forces in different directions under the same measuring range.
With respect to the above technical solution, further improvements as described below can be made.
In a preferred embodiment of the six-dimensional force sensor according to the present invention, two adjacent side surfaces of the elastic beam are respectively in a horn shape having a small side close to the inner ring and a large side close to the outer ring, and a horn shape having a large side close to the inner ring and a small side close to the outer ring.
The elastic beam with the curved surface structure can adjust the curved surface curvature according to actual detection requirements to control stress distribution, so that the uniqueness of the position generated by strain under forces in different directions is realized.
Specifically, in another preferred embodiment, two adjacent side surfaces of the elastic beam are each in a horn shape having a small side close to the inner ring and a large side close to the outer ring.
Specifically, in another preferred embodiment, each of the adjacent two side surfaces of the elastic beam has a trumpet shape that is large on the side close to the inner ring and small on the side close to the outer ring.
Specifically, in another preferred embodiment, two adjacent side surfaces of the elastic beam are in a horn shape with the same size on the side close to the inner ring and the side close to the outer ring.
In the same way, the elastic beams with the curved surface structures in different structural forms can adjust the curvature of the curved surface to control the stress distribution according to actual detection requirements, so that the uniqueness of the positions generated by the strain under the forces in different directions is realized.
Further, in a preferred embodiment, the top surface of the outer ring is provided with sensor mounting counterbores which are uniformly arranged at intervals along the circumferential direction, and the bottom surface of the inner ring is provided with load mounting counterbores which are uniformly arranged at intervals along the circumferential direction.
The sensor mounting counter bore and the load mounting counter bore are respectively mounted from top to bottom and from bottom to top, the influence of the thread pretightening force on the force measurement of the sensor can be eliminated through the advantages of the bidirectional through hole connection and mounting, the coupling error is greatly reduced, and the sensor precision is improved.
Further, in a preferred embodiment, the sensor mounting counter bores are oppositely arranged on two sides of the elastic beam and close to the elastic beam.
The arrangement of the sensor mounting counter bore is not over against the bending elastic beam at the periphery, and the sensor mounting counter bore is in a state that two sides are close to each other, so that the uneven force distribution can be effectively avoided.
Further, in a preferred embodiment, the inner sides of the top and bottom surfaces of the outer ring are provided with a sink.
The top surface of the outer ring is provided with a sinking groove close to the inner side of the inner ring for avoiding the loading surface, and the bottom surface of the outer ring is provided with threaded holes which are uniformly distributed on the sinking groove close to the inner side of the inner ring and used for packaging and mounting the built-in circuit board.
Further, in a preferred embodiment, the center of the inner ring is provided with a through hole.
The central position of the sensor is provided with a through hole for uniformly distributing stress.
Specifically, in a preferred embodiment, the strain gauges on two opposite sides of the elastic beam form a wheatstone bridge, and an output signal of the wheatstone bridge is acquired, amplified, compensated and corrected, and then is subjected to a/D conversion to output a digital signal.
The sensor senses the action of a force F to cause the change of a voltage U of the strain bridge, the change is input into a processing chip after amplification processing, a calibration matrix parameter H is calculated to be F ([ U ], [ M ], [ F ]) according to the six-component matrix relation of an output force F, the voltage U, a force component M and the force F, the calculated value and an original parameter are subjected to difference processing and then returned to compensation correction, a final result is output after correction, and finally analog quantity is converted into digital quantity through A/D conversion (analog-to-digital conversion) and output to external application equipment. The digital quantity transmission has the advantages of effectively reducing signal interference and enabling the force measurement to be more accurate.
Compared with the prior art, the invention has the advantages that: through the elastic beam that sets up curved surface structure support all around, the control through adjustment curved surface camber to stress distribution realizes the uniqueness of the position that meets an emergency and produces under the not equidirectional power, need not to make the hole or the groove of different shapes and positions on the elastic beam and realize meeting an emergency and take place the change of position, consequently simple structure, it is lower to the processing technology requirement, rigidity and stability are all better, dynamic force measuring accuracy is high, rigidity big small light in weight under the same range, conveniently detect the power of equidirectional.
Drawings
The invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings. Wherein:
FIG. 1 schematically illustrates the overall structure of a six-dimensional force sensor of an embodiment of the present invention in one direction;
FIG. 2 schematically illustrates another orientation of the overall configuration of a six-dimensional force sensor in accordance with an embodiment of the present invention;
FIG. 3 schematically illustrates a front view configuration of a six-dimensional force sensor in accordance with an embodiment of the present invention;
FIG. 4 schematically illustrates a side view cross-sectional configuration of a six-dimensional force sensor of an embodiment of the invention;
fig. 5 schematically shows a partially enlarged structure of a portion a in fig. 3;
fig. 6 schematically shows a partially enlarged structure of a portion B in fig. 4;
fig. 7 schematically shows the circuit signal processing principle of a six-dimensional force sensor of an embodiment of the present invention.
Detailed Description
The invention will be further explained in detail with reference to the figures and the embodiments without thereby limiting the scope of protection of the invention.
FIG. 1 schematically shows the overall structure of a six-dimensional force sensor of an embodiment of the invention in one direction. Fig. 2 schematically shows the overall structure of another direction of the six-dimensional force sensor according to the embodiment of the present invention. Fig. 3 schematically shows a front view configuration of a six-dimensional force sensor according to an embodiment of the present invention. FIG. 4 schematically illustrates a side cross-sectional view of a six-dimensional force sensor according to an embodiment of the invention. Fig. 5 schematically shows a partially enlarged structure of a portion a in fig. 3. Fig. 6 schematically shows a partially enlarged structure of a portion B in fig. 4. Fig. 7 schematically shows the circuit signal processing principle of a six-dimensional force sensor of an embodiment of the present invention.
As shown in fig. 1 to 6, a six-dimensional force sensor 10 according to an embodiment of the present invention includes an inner ring 1, an outer ring 2, and an elastic beam 3. Wherein, the inner ring 1 is arranged in the outer ring 2, and the elastic beams 3 are uniformly arranged between the inner ring 1 and the outer ring 2 at intervals along the circumferential direction. The two adjacent sides 31 of the elastic beam 3, which are respectively connected with the outer ring 2 and the inner ring 1, are all symmetrically arranged curves. The side surfaces 32 of the elastic beams 3 corresponding to the top surface 21 of the outer ring 2 and the side surfaces 32 corresponding to the bottom surface 11 of the inner ring 1 are provided with strain gauges 4.
According to the six-dimensional force sensor provided by the embodiment of the invention, the elastic beam supported by the peripheral curved surface structure is arranged, the uniqueness of the positions generated by the strain under different directions of force is realized by adjusting the curvature of the curved surface to control the stress distribution, namely the stress concentration position is controlled by the curvature, the six-dimensional force distribution sensing is realized by depending on the curved surfaces of the upper surface and the lower surface of the elastic beam, a plurality of groups of Wheatstone bridges are formed by adopting oppositely arranged strain gages, the output signals of the bridges are acquired by a circuit, and digital signals are output by A/D conversion in the circuit, so that the signal interference is effectively reduced. The change of the strain generating position is realized without manufacturing holes or grooves with different shapes and positions on the elastic beam, so the structure is simple, the requirement on the processing technology is low, the rigidity and the stability are both good, the dynamic force testing precision is high, the rigidity is large, the size is small, the weight is light, and the detection of the forces in different directions is convenient.
As shown in fig. 1 and 2, and fig. 5 and 6, preferably, in the present embodiment, two adjacent side surfaces 32 of the elastic beam 3 are respectively in a shape of a horn which is small near the inner ring 1 and large near the outer ring 2, and in a shape of a horn which is large near the inner ring 1 and small near the outer ring 2. The elastic beam with the curved surface structure can adjust the curved surface curvature according to actual detection requirements to control stress distribution, so that the uniqueness of the position generated by strain under forces in different directions is realized.
In particular, in other embodiments, not shown, two adjacent lateral surfaces of the elastic beam 3 are flared, small near the inner ring and large near the outer ring. Specifically, two adjacent side surfaces of the elastic beam 3 may be in a horn shape having a larger side near the inner ring and a smaller side near the outer ring. Specifically, two adjacent side surfaces of the elastic beam 3 may be horn-shaped, and the two adjacent side surfaces are equal in size. In the same way, the elastic beams with the curved surface structures in different structural forms can adjust the curvature of the curved surface to control the stress distribution according to actual detection requirements, so that the uniqueness of the positions generated by the strain under the forces in different directions is realized.
Preferably, in the present embodiment, as shown in fig. 1 and 2, the number of the elastic beams 3 is 4, and the 4 elastic beams are uniformly and symmetrically arranged in a cross beam structure, so that uniform distribution of force can be well ensured. And 8 groups of strain gauges 4 are oppositely arranged on each elastic beam 3 to form 8 groups of Wheatstone bridges. Preferably, in some embodiments not shown, the flexible beam 3 may also be a three-beam structure, a six-beam structure, an eight-beam structure, etc., but it is not limited to the above-mentioned structure, and all combinations using the four-side bending type flexible beam structure are within the scope of the present invention.
Further, as shown in fig. 1 and 2, in the present embodiment, the top surface 21 of the outer ring 2 is provided with sensor mounting counterbores 22 uniformly spaced in the circumferential direction, and the bottom surface 11 of the inner ring 1 is provided with load mounting counterbores 12 uniformly spaced in the circumferential direction. The sensor mounting counter bore and the load mounting counter bore are respectively mounted from top to bottom and from bottom to top, the influence of the thread pretightening force on the force measurement of the sensor can be eliminated through the advantages of the bidirectional through hole connection and mounting, the coupling error is greatly reduced, and the sensor precision is improved. Further, in the present embodiment, the sensor mounting counterbores 22 are oppositely disposed on both sides of the elastic beam 3 and near the elastic beam. The arrangement of the sensor mounting counter bore is not over against the bending elastic beam at the periphery, and the sensor mounting counter bore is in a state that two sides are close to each other, so that the uneven force distribution can be effectively avoided. Preferably, in the present embodiment, the sensor mounting counterbore 22 comprises 8 and the load mounting counterbore 12 comprises 4.
Further, in the present embodiment, as shown in fig. 1 and 2, the inner sides of the top surface 21 and the bottom surface 23 of the outer ring 2 are provided with the sink grooves 24. The heavy groove that sets up on the top surface of outer loop near the inboard of inner ring is used for carrying out the loading face and dodges, and the heavy groove that sets up on the bottom surface of outer loop near the inboard of inner ring is equipped with evenly arranged's screw hole 25 for encapsulation and built-in circuit board installation.
Further, in the present embodiment, as shown in fig. 1 and 2, the center of the inner ring 1 is provided with a through hole 13. The central position of the sensor is provided with a through hole for uniformly distributing stress.
As shown in fig. 1 to 5 and fig. 7, in the present embodiment, specifically, the strain gauges 4 on two opposite sides of the elastic beam 3 form a wheatstone bridge, and an output signal of the wheatstone bridge is acquired, amplified, compensated, and corrected, and then a digital signal is output through a/D conversion. Specifically, the sensor 10 is subjected to a force F to cause a change in a voltage U of the strain bridge, the change is amplified and then input to a processing chip, a calibrated matrix parameter H ═ F ([ U ], [ M ], [ F ]) is calculated according to a six-component matrix relationship between an output force F and the voltage U, a force component M, and the force F, the calculated value and an original parameter are subjected to differential processing and then returned to compensation and correction, a final result is output after correction, and finally an analog quantity is converted into a digital quantity through a/D conversion (analog-to-digital conversion) and output to an external application device. The digital quantity transmission has the advantages of effectively reducing signal interference and enabling the force measurement to be more accurate.
According to the embodiments, it can be seen that the six-dimensional force sensor provided by the invention realizes the uniqueness of the positions where the strain is generated under the forces in different directions by arranging the elastic beam supported by the peripheral curved surface structure and adjusting the curvature of the curved surface to control the stress distribution, and does not need to manufacture holes or grooves in different shapes and positions on the elastic beam to change the positions where the strain is generated, so that the six-dimensional force sensor has the advantages of simple structure, lower requirements on the processing technology, better rigidity and stability, high dynamic force testing precision, large rigidity, small volume, light weight and convenience in detecting the forces in different directions under the same measuring range.
While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. It is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (10)
1. A six-dimensional force sensor is characterized by comprising an inner ring, an outer ring and an elastic beam; wherein the content of the first and second substances,
the inner ring is arranged in the outer ring, and the elastic beams are uniformly arranged between the inner ring and the outer ring at intervals along the circumferential direction;
the side edges of the elastic beam, which are adjacent to each other and are respectively connected with the outer ring and the inner ring, are symmetrically arranged curves;
and strain gauges are arranged on the side surface of the elastic beam corresponding to the top surface of the outer ring and the side surface of the elastic beam corresponding to the bottom surface of the inner ring.
2. The six-dimensional force sensor according to claim 1, wherein two adjacent side surfaces of the elastic beam are respectively in a shape of a horn which is small near the inner ring and large near the outer ring, and in a shape of a horn which is large near the inner ring and small near the outer ring.
3. The six-dimensional force sensor according to claim 1, wherein adjacent two sides of the spring beam each have a flared shape with a smaller side adjacent to the inner ring and a larger side adjacent to the outer ring.
4. The six-dimensional force sensor according to claim 1, wherein adjacent two sides of the spring beam each have a flared shape that is larger near the inner ring side and smaller near the outer ring side.
5. The six-dimensional force sensor according to claim 1, wherein adjacent two sides of the spring beam are flared with equal size on a side near the inner ring and on a side near the outer ring.
6. The six-dimensional force sensor according to any one of claims 1 to 5, wherein the top surface of the outer ring is provided with sensor mounting counterbores evenly spaced along a circumferential direction, and the bottom surface of the inner ring is provided with load mounting counterbores evenly spaced along the circumferential direction.
7. The six-dimensional force sensor of claim 6, wherein the sensor mounting counterbores are oppositely disposed on either side of and proximate to the spring beam.
8. The six-dimensional force sensor according to any one of claims 1 to 5, wherein the inner sides of the top and bottom surfaces of the outer ring are each provided with a sink.
9. The six-dimensional force sensor according to any one of claims 1 to 5, wherein the center of the inner ring is provided with a through hole.
10. The six-dimensional force sensor according to any one of claims 1 to 5, wherein the strain gauges on two opposite sides of the elastic beam form a Wheatstone bridge, and an output signal of the collected Wheatstone bridge is amplified and compensated and corrected to output a digital signal through A/D conversion.
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| CN113375852A (en) * | 2021-06-22 | 2021-09-10 | 华北水利水电大学 | Mechanical decoupling type six-dimensional force and torque sensor |
| CN114323397A (en) * | 2021-12-30 | 2022-04-12 | 航天南洋（浙江）科技有限公司 | Capacitive two-dimensional force sensor |
| CN114323394A (en) * | 2021-12-30 | 2022-04-12 | 航天南洋（浙江）科技有限公司 | Six-dimensional force sensor |
| CN116164873A (en) * | 2023-04-21 | 2023-05-26 | 深圳市鑫精诚传感技术有限公司 | Temperature compensation method and device for six-dimensional force sensor |
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