CN111678540A - 一种基于游标效应和并联式f-p干涉仪的应变光纤传感器 - Google Patents

一种基于游标效应和并联式f-p干涉仪的应变光纤传感器 Download PDF

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CN111678540A
CN111678540A CN202010523619.6A CN202010523619A CN111678540A CN 111678540 A CN111678540 A CN 111678540A CN 202010523619 A CN202010523619 A CN 202010523619A CN 111678540 A CN111678540 A CN 111678540A
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王东宁
崔鑫磊
张华�
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Hangzhou Guangfeimiao Technology Co ltd
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    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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Abstract

本发明提供了一种基于游标效应和并联式F‑P干涉仪的应变光纤传感器，是一种使用飞秒激光在光纤纤芯内刻蚀并联平行反射镜的并联式法布里‑珀罗干涉仪，包括宽带光源，环形器，传感头，光谱分析仪。其特征在于：飞秒激光在单模光纤纤芯内刻蚀四条平行反射镜，组成两组互相平行、相互独立、不同尺寸且尺寸得到准确控制、分别位于纤芯内的上下两侧且存在一定间距的法布里‑珀罗腔。宽带光源的入射光在纤芯中传播进入传感头，分别经过传感头内的两组法布里‑珀罗腔产生干涉。再由环形器接收传感头内干涉腔的反射光，并传输至光谱分析仪，形成并联式法布里‑珀罗干涉仪。本发明具有制造简单、机械强度高、成本低、极高的应变灵敏度和极低的温度敏感度等优点。

Description

一种基于游标效应和并联式F-P干涉仪的应变光纤传感器
技术领域
本发明提供了一种基于游标效应的超灵敏应变光纤传感器，是一种光纤内平行反射镜的并联式法布里-珀罗干涉仪，属于光纤传感技术领域。
背景技术
光纤应变传感器在土木工程，航空航天和国防工业等许多领域具有广泛的应用。光纤应变传感器的主要类型通常基于光纤布拉格光栅（FBG）和干涉仪。基于FBG的光纤应变传感器紧凑且制备方便。但是，获得的灵敏度却很低，通常约为1 pm/me。通过使用基于干涉仪的光纤传感器可以实现相对较大的应变灵敏度。在已探索用于应变传感的各种类型的光纤干涉仪中，法布里-珀罗干涉仪（FPI）具有高度紧凑和简单的反射模式。但是，所获得的应变敏感性仍然受到限制，通常也在pm/me的数量级上。为了进一步提高应变灵敏度，采用了两个级联的光纤线上FPI，并且两个级联的FP腔具有较小的光程差（OPD），因而可以通过游标效应提高灵敏度。大部分FPI设备，利用游标效应是由使用不同类型的两个腔，不同的光纤或光纤材料，这将使得设备的制造困难和比较高的成本使用。更重要的是比较精确的控制两个FP的光程差是很难做到的，这将导致放大系数的不稳定性和设备制造的低重复性。最近，飞秒激光在光纤内刻写的反射镜已经用在基于游标效应的高灵敏度应变传感器的构造上，并且由于采用了飞秒激光微加工***的高精度移动平台，可以精确控制两个FPI之间的OPD。但是，由于必须将两个FPI分开较长的距离以避免任何相互干扰，因此设备的尺寸会变大，并且获得的应变灵敏度为28pm/me左右。
在这里，我们提出并演示了一种飞秒激光制造的具有超高灵敏度的紧凑型光纤应变传感器。该***由两个并联连接的FP腔组成，这些腔级联连接，腔长度的差异得到精确控制。传感器头的尺寸小于7000μm，实现的应变灵敏度为235.14pm/me，实现了应用游标效应达到300倍的放大效果。这种设备坚固，操作方便，并且在需要极高应变敏感性的领域中发挥重要作用。
发明内容
本发明针对现有技术不足，提供一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，本发明具有结构紧凑、制造简单、机械强度高和成本低等优点，可用于应变传感。
本发明解决技术问题所采取的技术方案为：一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，是一种光纤内平行反射镜的并联式法布里-珀罗干涉仪，包括宽带光源，环形器，传感头，光谱分析仪。其特征在于：用飞秒激光在单模光纤纤芯内刻蚀四条平行反射镜，组成两组互相平行、相互独立、不同尺寸且尺寸得到准确控制、分别位于纤芯内的上下两侧且间距为1μm的法布里-珀罗腔。宽带光源的入射光在纤芯中传播进入传感头，分别经过传感头内的两组法布里-珀罗腔产生干涉。再由环形器接收来自传感头内干涉腔的反射光，并传输至光谱分析仪，形成并联式法布里-珀罗干涉仪。
所述的单模光纤的纤芯直径和光纤直径分别为9μm和125μm。
本发明与现有技术相比的有益效果是：
1、传感头对于应力具有极高的敏感性，实验结果达到了235.14pm/me。
2、传感头尺寸得到准确控制，可灵活设计调节传感灵敏度放大倍数。
3、选用价格低廉的普通单模光纤制备，具有成本低，制作简单的优点。
4、传感头为反射式结构，可以用于狭窄空间的传感测量。
5、对温度具有低灵敏度，实验结果为6.89 pm/℃。
附图说明
为了更清楚地说明本发明实施例或技术方案，下面结合附图和实施例对本发明作进一步说明。
图1为本发明的实施应用***示意图。
图2为本发明传感头示意图。
图3为本发明的传感器反射光谱图。
图4为本发明传感器进行应力传感实验测量示意图，表示光谱的上包络的一个指定波谷的波长与应力的关系。
图5为本发明传感器进行温度传感实验测量示意图，为光谱的上包络的一个指定波谷的波长与温度的关系。
图中, 1.宽带光源，2.环形器，3.传感头，4.光谱分析仪，5.单模光纤，5a. 单模光纤纤芯，5b. 单模光纤包层，6、7、8、9.反射镜。
具体实施方式
下面结合附图及实施实例对本发明作进一步描述：
图1所示为本发明的实施应用***示意图，包括宽带光源1、环形器2、传感头3、光谱分析仪4。其连接方式为：环形器2有三个接口端，分别为：光源进口端，光源出口端，反馈端。进口端与宽带光源1连接，出口端与传感头3连接，反馈端和光谱分析仪4相连接。
图2所示为本发明传感头3的结构示意图，所述的传感头3，由单模光纤5、反射镜6、7、8、9构成，单模光纤5包括单模光纤纤芯5a，单模光纤包层5b。
所述传感头的制作方法及步骤是：利用飞秒激光在单模光纤纤芯内刻蚀出四条垂直于光轴的高、宽分别为3μm和1 μm的反射镜6、7、8、9，其中6、7组成A法布里-珀罗谐振腔，8、9组成B法布里-珀罗谐振腔，两个谐振腔互相平行、相互独立、不同尺寸且尺寸得到准确控制、分别位于纤芯内的上下两侧且间距为1μm。飞秒激光刻蚀的能量为500nJ，扫描速度为2μm/s。
结合图1，2，介绍具体的工作原理：由宽带光源1发出的光经环形器2到达传感头3，该光束在3中经过四条平行反射镜6、7、8、9组成两组平行、相互独立、不同尺寸的法布里-珀罗腔，使得在纤芯中传播的入射光分别经过两组法布里-珀罗腔产生干涉。再将光返回至环形器，经由环形器传输至光谱分析仪，形成并联式法布里-珀罗干涉仪。观测到如图3所示的该结构的反射光谱图，而我们捕捉和观测的是反射光谱的上包络。
将传感器放置于应力***中，对B法布里-珀罗谐振腔施加应力，且对A法布里-珀罗谐振腔不产生影响。实验中，我们记录了0-400me的应力变化范围，且每40me对反射光谱进行一次记录，随着应力的施加光谱仪上反射光谱的上包络产生飘移，记录包络指定波谷的波长与应力大小的关系，得到如图4所示的应力传感示意图，可得应力灵敏度为235.14pm/me。同理，将传感器放置于温控装置中，温控装置同时作用于A、B两个法布里-珀罗谐振腔，实验中，我们记录了0-80℃的温度变化范围，观测波长与温度的关系如图5所示，可得温度灵敏度为6.89 pm/℃。
以上所述的具体实施例，对本发明的目的、技术方案和有益效果进行了进一步详细说明，应被理解的是，以上所述仅为本发明的具体实施例而已，并不用于限制本发明，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围。

Claims (5)

1.一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，其组成包括宽带光源，环形器，传感头，光谱分析仪，其连接方式为：环形器输入端连接宽带光源，环形器反馈端连接光谱分析仪，环形器输出端连接传感头；其特征在于：所述的传感头，由飞秒激光在单模光纤纤芯内刻写四条平行反射镜形成的两组互相平行、相互独立、不同尺寸且尺寸得到准确控制、分别位于纤芯内的上下两侧且存在一定间距的法布里-珀罗腔组成。
2.根据权利要求1所述的一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，其特征为：所述的单模光纤的纤芯直径和光纤直径分别为9μm和125μm。
3.根据权利要求1所述的一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，其特征为：所述的四条反射镜反射镜每一镜片的长度和宽度分别为3μm和1μm。
4.根据权利要求1所述的一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，其特征为：所述的两组分别位于纤芯内的上下两侧且存在一定间距的法布里-珀罗腔首尾错位相接，且平行间距为1μm。
5.根据权利要求1所述的一种基于游标效应和并联式F-P干涉仪的应变光纤传感器，其特征为：所述的两组互相平行、相互独立、不同尺寸且尺寸得到准确控制、分别位于纤芯内的上下两侧且存在一定间距的法布里-珀罗腔长度分别为3000μm和3010μm。
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CN110887515A (zh) * 2019-11-28 2020-03-17 杭州光飞秒科技有限公司 一种基于光纤内平行反射镜的并联式法布里-珀罗干涉仪

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WO2022156298A1 (zh) * 2021-01-25 2022-07-28 广东海洋大学 一种基于悬浮芯光纤和边孔光纤的高灵敏度气压传感器
CN113790678A (zh) * 2021-09-10 2021-12-14 广东工业大学 一种具有光学游标效应的多芯光纤矢量弯曲传感器
CN114705349A (zh) * 2022-03-31 2022-07-05 黑龙江大学 结合镀膜技术的游标增敏光纤气压传感器及其制备方法
CN116972890A (zh) * 2023-09-22 2023-10-31 之江实验室 光纤传感器及其调制方法
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Application publication date: 20200918