CN111637992A - Error compensation method of high-precision pressure sensor - Google Patents
Error compensation method of high-precision pressure sensor Download PDFInfo
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- CN111637992A CN111637992A CN202010426448.5A CN202010426448A CN111637992A CN 111637992 A CN111637992 A CN 111637992A CN 202010426448 A CN202010426448 A CN 202010426448A CN 111637992 A CN111637992 A CN 111637992A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Abstract
The invention relates to the technical field of sensors, in particular to an error compensation method of a high-precision pressure sensor, which comprises the steps of calibration, fine adjustment, measurement and compensation, wherein the pressure sensor comprises a shell, a substrate, a strain film and an induction resistor; a base body is arranged in the shell, and a foundation pit is arranged in the center of the upper part of the base body; a strain film is arranged on the foundation pit; the pressure sensor is interfered by errors in measurement, so that the accuracy of the measured pressure value is damaged, and the offset error, the sensitivity error and the linearity error of the pressure sensor are difficult to completely eliminate, so that the application effect of the high-precision pressure sensor is hindered; therefore, the invention analyzes the related compensation function by using the generated sample data through the set calibration fine adjustment and measurement compensation method, feeds back the related compensation function to the pressure sensor in actual use, controls the standing step in the measurement process, and compensates the data after the measurement state is stabilized, thereby improving the application effect of the high-precision pressure sensor.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to an error compensation method of a high-precision pressure sensor.
Background
The pressure sensor is generally composed of a pressure sensing element and a signal processing unit, and is a device or a device which converts sensed pressure signals into electric signals which can be output according to a certain rule; when the pressure sensor is selected, the comprehensive precision of the pressure sensor needs to be considered, and a corresponding error compensation method is adopted to improve the measurement precision of the pressure sensor so as to improve the improvement effect of the measurement data on the subsequent debugging process; for a description of the error compensation method of the pressure sensor, see: high-precision error compensation algorithm [ J ] of the Zhulongjun, diffused silicon pressure sensor, automated and instrument 2012(No.3), 53-56.
When the existing pressure sensor is used, offset error, sensitivity error, linearity error and hysteresis error exist; the errors of the types are simultaneously accompanied by the action of temperature and air pressure in an application environment, so that the error interference in the use of the sensor is increased, corresponding error compensation is required, the influence of environmental factors on the pressure sensor is eliminated, and the application effect of the high-precision pressure sensor is maintained.
Some technical schemes related to an error compensation method of a high-precision pressure sensor also appear in the prior art, for example, a chinese patent with application number 2006101613003 discloses an error compensation method of a high-precision pressure sensor, which uses an oven and a standard pressure source to collect output data of sensors at N temperature points and M pressure points to form an N × M order matrix; establishing a mathematical model of sensor output, fitting the temperature compensation coefficients a (T), b (T), c (T) of the sensor output function according to the acquired data, and zero position output U of the sensor at different temperatures0(T) ═ f (T), and write the parameters to the microprocessor; when in use, the pressure sensor is clicked to reset at zero pressure, and the zero position output U of the sensor is recorded0By collecting temperature information T and calculating U0(T) and calculating the time drift amount delta of the sensor in the using and compensating section as U0-U0(T); the microprocessor collects temperature information T and output signal U of the pressure sensor according to a compensation formula P ═ a (T) (U-delta)2+ b (T) (U-delta) + c (T) calculating the output of the microprocessor after conditioning, and the design and production technology of the pressure sensitive element, the signal conditioning technology and the computer technology are combined in the technical scheme to realize the correction of the pressure sensor in the wide temperature area; the pressure signal characteristic effect is excellent; but the technical proposal focuses on compensating the generated error through the calculation of data on algorithm, neglects the error generated between the self structural relationship of the pressure sensor in application,the problem of the effective application effect of the error compensation is limited.
In view of this, in order to overcome the above technical problems, the present inventors have designed and developed an error compensation method for a high-precision pressure sensor, and have adopted a special sensor error compensation method to solve the above technical problems.
Disclosure of Invention
In order to make up for the defects of the prior art, the invention provides an error compensation method of a high-precision pressure sensor, which analyzes a related compensation function by using sample data generated by the method through the set calibration adjustment and measurement compensation method, feeds back the pressure sensor applied to actual use, controls a standing step in the measurement process, and compensates the data after the measurement state is stabilized, thereby improving the application effect of the high-precision pressure sensor.
The invention relates to an error compensation method of a high-precision pressure sensor, which comprises the following steps:
s1, calibration: applying standard stress with different values to the pressure sensor under normal temperature and normal pressure, wherein the stress value meets the measuring range of the pressure sensor, recording the measured data of the pressure sensor to obtain samples of the applied stress and the measured data, correspondingly arranging the sample data, analyzing the data deviation when the pressure sensor is not under the stress action, and performing zero calibration; the initial offset of the pressure sensor can cause deviation on the whole read measured value, calibration is carried out at normal temperature and normal pressure, interference of external factors is eliminated, high-accuracy calibration data is obtained, and the measurement precision of the pressure sensor is improved;
s2, adjustment: after the pressure sensor is calibrated in S1, applying dynamic stress action to the pressure sensor, observing the smoothness of the recording waveform of the measured data of the pressure sensor, controlling the dynamic stress action to stop for 2S instantaneously, recording the measured data before and after the instantaneous stop for 2S, comparing the measured data with the static stress in change, fitting the data into a functional relation, and adjusting the data result in measurement; the timeliness of the measuring effect of the pressure sensor under the compression effect can be reflected through the measurement of the dynamic stress value, the effective measuring sensitivity of the pressure sensor is increased, and when the pressure sensor is subjected to slight pressure change in the using process, the measuring accuracy of the pressure sensor is improved by utilizing the adjustment of the related function to the measuring data.
S3, measurement: measuring the pressure sensor adjusted in the step S2, controlling the applied stress value to gradually increase the level of the measured value and the applied stress value to decrease from large to the level of the measured value, recording the difference between the measured value data under the two ways, and summarizing the correlation function of the data samples under the two conditions; because the pressure sensor has linear error and interferes with the stability of the measured data, the interference quantity of the linear error of the measuring system is fed back by changing the applied stress into the same value along opposite directions respectively, thereby utilizing the correlation function to compensate the measured value and improving the accuracy of the data,
s4, compensation: comprehensively applying the sample data rule obtained by the calibration, adjustment and measurement operations to the use process, standing for 5-10s in the measurement, and processing the measured data by a compensation algorithm to obtain the final effective high-precision measurement data; after the related data measured by the pressure sensor is compensated by the processor, the data lags relative to the original measured value, so that the accuracy of the final data is influenced, and the influence of the lags in the change of the measured data on the measurement precision is effectively reduced by carrying out error compensation on the data after standing in the measurement process;
the pressure sensor described in S1-S3 comprises a shell, a base body, a strain film and a sensing resistor; a base body is arranged in the shell, and a foundation pit is arranged in the center of the upper part of the base body; the foundation pit is provided with a strain film, the strain film is connected to the base body through four edges, and the strain film is provided with an induction resistor; the induction resistors are connected by a lead wire, and the resistance value of the induction resistors can be changed under deformation; an insulating protective sheet is arranged at the connecting position of the strain film and the substrate, the insulating protective sheet is fixed on the substrate, and the insulating protective sheet is in sliding contact with the strain film; the strain film deforms under the action of stress, so that the resistance value of the induction resistor on the strain film changes; transmitting the electrical signal to a processor through an electrically connected lead; when the pressure sensor is used, the pressure sensor is acted by force, so that the deformation generated by the strain film drives the induction resistor to deform, the electric signal detected in the processor is changed, and the electric signal is converted into pressure value data through a preset algorithm to be output; the pressure sensor is interfered by errors in measurement, so that the accuracy of the measured pressure value is damaged, and the offset error, the sensitivity error and the linearity error of the pressure sensor are difficult to completely eliminate, so that the application effect of the high-precision pressure sensor is hindered; therefore, the invention applies standard stress to the pressure sensor under normal temperature and normal pressure by the arranged pressure sensor compensation method, and measures different stress values for many times by controlling the application mode of the standard stress, the instantaneous stress in the dynamic stress value, the stress in two directions with variable size and the difference of data values respectively detected by the pressure sensor, so as to conclude the data compensation method of the related function; the invention utilizes the set calibration adjustment and measurement compensation method, analyzes the related compensation function by using the generated sample data, feeds back and applies the related compensation function to the pressure sensor in actual use, controls the standing step in the measurement process, and compensates the data after the measurement state is stabilized, thereby improving the application effect of the high-precision pressure sensor.
Preferably, the sensing resistors are embedded in the strain film, the upper surfaces of the sensing resistors protrude out of the strain film, and lead wires connected among the sensing resistors are arranged on the surface of the strain film in a surrounding mode; the strain film in measurement deforms under the action of stress to drive the sensing resistor to generate corresponding shape change, and the change of the resistance value of the sensing resistor enables the change of an electric signal to be transmitted to the processor and is output as a measured pressure value by the processor; the electric signal received by the processor is excited by the deformation of the induction resistor, and the induction resistor arranged in the strain membrane makes the deformation generated by the stress of the strain membrane difficult to completely drive the induction resistor to generate corresponding deformation; the sensing resistor is embedded into the strain film through the setting, and the surface of the sensing resistor protrudes out of the strain film, so that the deformation generated by the stress extrusion on the surface of the strain film corresponds to the deformation of the sensing resistor, and meanwhile, the lead wire arranged on the surface of the strain film is surrounded, and under the stress deformation of the strain film, the lead wire is attached to the relative position on the surface of the strain film and is not interfered, so that the stability of the lead wire is ensured, and the using effect of the high-precision pressure sensor is improved.
Preferably, a pressure plate is arranged above the strain membrane, and the lower surface of the pressure plate is an arc-shaped bulge; the pressure plate is positioned above the center of the strain membrane, a pressure rod is arranged above the pressure plate, and the pressure rod transmits the deformation of the shell subjected to pressure to the pressure plate; the pressure applied to the pressure sensor needs to be accurately transmitted to the strain film, so that a processor can calculate a measured value, the point effect of the strain film receiving stress is difficult to completely feed back to the deformation of the surface of the strain film, the transmission effect of a pressure signal is reduced, and the measurement precision of the pressure sensor is damaged; through setting up the pressure disk in the membrane top of meeting an emergency for the atress effect transmits to the pressure disk on the deformation that pressure sensor produced, utilizes the arc of pressure disk lower surface protruding, wholly applys even effort to the membrane surface of meeting an emergency, makes under less pressure fluctuation circumstances, still can accurately feed back to producing deformation on the membrane of meeting an emergency through the pressure disk, drives the change of sense resistor and treater data, ensures the accuracy of measured pressure data, thereby has maintained high accuracy pressure sensor's result of use.
Preferably, a loop bar is arranged between the pressure lever and the pressure plate, and a spring is arranged inside the pressure lever; the top end of the spring is fixed on the inner wall of the shell, and the bottom end of the spring is fixed on the pressure rod; when the pressure is suddenly changed, the transmitted force can generate an additional impact effect on the pressure sensor under the action of inertia, so that the normal action of the strain membrane is influenced, and particularly, when the impact force exceeds the detection range of the pressure sensor, the strain membrane can be permanently damaged; through setting up the spring in the depression bar inside, the loop bar between cooperation depression bar and the pressure disk is detecting the pressure of impact nature, and the buffering offsets extra impact force wherein, and the pressure effect that the protection membrane of meeting an emergency received is in stable scope to high accuracy pressure sensor's life has been promoted.
Preferably, the foundation pit is internally provided with filled electronic fluorination liquid, and the electronic fluorination liquid conducts heat generated in the deformation process of the strain film and the induction resistor; the pressure change in the application of the pressure sensor is reflected in the deformation process of the strain film and the induction resistor, and meanwhile, heat is generated at the deformation parts of the strain film and the induction resistor, so that the imbalance of the heat affects the performance of the strain film and the induction resistor, the accuracy of electric signal transmission is further reduced, and the measurement effect of the pressure sensor is damaged; the electronic fluorination liquid is arranged inside the foundation pit, the element is isolated from the external environment by utilizing the stability of the electronic fluorination liquid, the heat generated by the element is guided, the stable service temperature of a strain film and an induction resistor in the pressure detection element is maintained, the effect of the strain film and the induction resistor on pressure value detection is further stabilized, and the application effect of the high-precision pressure sensor is maintained.
Preferably, the bottom of the foundation pit is provided with a pair of refrigerating sheets; a temperature difference is maintained between the two refrigeration sheets during operation; the electron in the foundation ditch fluoridizes the liquid after using, the temperature liquid of its body rises thereupon, the influence maintains the service temperature of pressure measurement component, then reduced pressure measurement data's accuracy, through the refrigeration piece that sets up in the foundation ditch, fluoridize the too high heat guide out in the liquid with the electron, the difference in temperature between a pair of refrigeration piece simultaneously, make the heat circulation in the electron fluoridizes the liquid circulate, maintain its radiating effect's stability, utilize the characteristic of generating heat of refrigeration piece self, maintain the temperature of electron fluoridizing the liquid in the cold environment, the use of protection pressure measurement component performance, thereby high accuracy pressure sensor's range of application has been promoted.
The invention has the following beneficial effects:
1. according to the method, through the set calibration adjustment and measurement compensation method, the generated sample data is utilized to analyze a related compensation function, and the data is compensated after the measurement state is stabilized; the arranged sensing resistor is embedded into the strain film and surrounds the lead wires arranged on the surface of the strain film, so that the use effect of the high-precision pressure sensor is improved; the pressure plate arranged above the strain film can still accurately feed back the strain film to generate deformation, so that the accuracy of pressure data measurement is ensured.
2. According to the invention, through the spring arranged in the pressure rod, the extra impact force in the pressure rod is counteracted by matching with the loop bar between the pressure rod and the pressure plate, so that the pressure effect on the strain membrane is protected in a stable range; the electronic fluoridizing liquid arranged in the foundation pit maintains the stable use temperature of a strain film and an induction resistor in the pressure detection element, so that the effect of the electronic fluoridizing liquid on the pressure value detection is stabilized; the refrigeration piece that sets up in the foundation ditch maintains its radiating effect's stability to utilize the characteristic of generating heat of refrigeration piece self, maintain the temperature of electron fluorinated liquid in the cold environment, the use of protection pressure detection component performance has promoted high accuracy pressure sensor's range of application.
Drawings
The invention is further described with reference to the following figures and embodiments.
FIG. 1 is a flow chart of a method of error compensation of a high precision pressure sensor in accordance with the present invention;
FIG. 2 is a perspective view of a high precision pressure sensor assembly of the present invention;
FIG. 3 is a cross-sectional view of a high-precision pressure sensor component of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3 at A;
FIG. 5 is a partial enlarged view at B in FIG. 3;
in the figure: the device comprises a shell 1, a base body 2, a foundation pit 21, an electronic fluorinated liquid 211, a refrigerating sheet 22, a strain film 3, an induction resistor 4, a lead 41, an insulating protection sheet 5, a pressure plate 6, a pressure rod 7, a loop bar 71 and a spring 72.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As shown in fig. 1 to 5, the method for compensating the error of the high-precision pressure sensor according to the present invention comprises the following steps:
s1, calibration: applying standard stress with different values to the pressure sensor under normal temperature and normal pressure, wherein the stress value meets the measuring range of the pressure sensor, recording the measured data of the pressure sensor to obtain samples of the applied stress and the measured data, correspondingly arranging the sample data, analyzing the data deviation when the pressure sensor is not under the stress action, and performing zero calibration; the initial offset of the pressure sensor can cause deviation on the whole read measured value, calibration is carried out at normal temperature and normal pressure, interference of external factors is eliminated, high-accuracy calibration data is obtained, and the measurement precision of the pressure sensor is improved;
s2, adjustment: after the pressure sensor is calibrated in S1, applying dynamic stress action to the pressure sensor, observing the smoothness of the recording waveform of the measured data of the pressure sensor, controlling the dynamic stress action to stop for 2S instantaneously, recording the measured data before and after the instantaneous stop for 2S, comparing the measured data with the static stress in change, fitting the data into a functional relation, and adjusting the data result in measurement; the timeliness of the measuring effect of the pressure sensor under the compression effect can be reflected through the measurement of the dynamic stress value, the effective measuring sensitivity of the pressure sensor is increased, and when the pressure sensor is subjected to slight pressure change in the using process, the measuring accuracy of the pressure sensor is improved by utilizing the adjustment of the related function to the measuring data.
S3, measurement: measuring the pressure sensor adjusted in the step S2, controlling the applied stress value to gradually increase the level of the measured value and the applied stress value to decrease from large to the level of the measured value, recording the difference between the measured value data under the two ways, and summarizing the correlation function of the data samples under the two conditions; because the pressure sensor has linear error and interferes with the stability of the measured data, the interference quantity of the linear error of the measuring system is fed back by changing the applied stress into the same value along opposite directions respectively, thereby utilizing the correlation function to compensate the measured value and improving the accuracy of the data,
s4, compensation: comprehensively applying the sample data rule obtained by the calibration, adjustment and measurement operations to the use process, standing for 5-10s in the measurement, and processing the measured data by a compensation algorithm to obtain the final effective high-precision measurement data; after the related data measured by the pressure sensor is compensated by the processor, the data lags relative to the original measured value, so that the accuracy of the final data is influenced, and the influence of the lags in the change of the measured data on the measurement precision is effectively reduced by carrying out error compensation on the data after standing in the measurement process;
the pressure sensor described in S1-S3 comprises a shell 1, a base body 2, a strain film 3 and a sensing resistor 4; a base body 2 is arranged in the shell 1, and a foundation pit 21 is arranged in the center of the upper part of the base body 2; the foundation pit 21 is provided with a strain film 3, the strain film 3 is connected to the base body 2 through four edges, and the strain film 3 is provided with an induction resistor 4; the induction resistors 4 are connected through a lead 41, and the resistance value of the induction resistor 4 can be changed under deformation; an insulating protective sheet 5 is arranged at the connecting position of the strain film 3 and the substrate 2, the insulating protective sheet 5 is fixed on the substrate 2, and the insulating protective sheet 5 is in sliding contact with the strain film 3; the strain film 3 deforms under the action of stress, so that the resistance value of the induction resistor 4 on the strain film changes; transmitting the electrical signal to the processor through the electrically connected lead 41; when the pressure sensor is used, the pressure sensor is acted by force, so that the deformation generated by the strain film 3 drives the induction resistor 4 to deform, the electric signal detected in the processor is changed, and the electric signal is converted into pressure value data through a preset algorithm to be output; the pressure sensor is interfered by errors in measurement, so that the accuracy of the measured pressure value is damaged, and the offset error, the sensitivity error and the linearity error of the pressure sensor are difficult to completely eliminate, so that the application effect of the high-precision pressure sensor is hindered; therefore, the invention applies standard stress to the pressure sensor under normal temperature and normal pressure by the arranged pressure sensor compensation method, and measures different stress values for many times by controlling the application mode of the standard stress, the instantaneous stress in the dynamic stress value, the stress in two directions with variable size and the difference of data values respectively detected by the pressure sensor, so as to conclude the data compensation method of the related function; the invention utilizes the set calibration adjustment and measurement compensation method, analyzes the related compensation function by using the generated sample data, feeds back and applies the related compensation function to the pressure sensor in actual use, controls the standing step in the measurement process, and compensates the data after the measurement state is stabilized, thereby improving the application effect of the high-precision pressure sensor.
As an embodiment of the present invention, the sensing resistors 4 are embedded in the strain film 3, the upper surfaces of the sensing resistors 4 protrude from the strain film 3, and the leads 41 connected between the sensing resistors 4 are arranged around the surface of the strain film 3; the strain film 3 in measurement deforms under the action of stress to drive the sensing resistor 4 to generate corresponding shape change, the resistance value change of the sensing resistor 4 enables the change of an electric signal to be transmitted to the processor, and the electric signal is output as a measured pressure value by the processor; the electric signal received by the processor is excited by the deformation of the induction resistor 4, and the induction resistor 4 arranged in the strain membrane 3 ensures that the deformation generated by the stress of the strain membrane 3 is difficult to completely drive the induction resistor 4 to generate corresponding deformation; through the sense resistor 4 embedding to the membrane of meeting an emergency 3 that sets up, and make sense resistor 4's surface protrusion in membrane of meeting an emergency 3, make the deformation that 3 surperficial atress extrusion of membrane of meeting an emergency produced correspond the deformation of sense resistor 4, encircle the lead wire 41 who arranges on the membrane of meeting an emergency 3 surface simultaneously, under the atress deformation of membrane of meeting an emergency 3, the relative position that lead wire 41 adheres to on the membrane of meeting an emergency 3 surface is not disturbed, the stability of lead wire 41 has been ensured, thereby high accuracy pressure sensor's result of use has been promoted.
As an embodiment of the invention, a pressure plate 6 is arranged above the strain film 3, and the lower surface of the pressure plate 6 is an arc-shaped bulge; the pressure plate 6 is positioned above the center of the strain membrane 3, a pressure rod 7 is arranged above the pressure plate 6, and the pressure rod 7 transmits the deformation of the shell 1 under pressure to the pressure plate 6; the pressure applied to the pressure sensor needs to be accurately transmitted to the strain film 3, so that a processor can calculate a measured value, and the point action of the strain film 3 receiving the stress is difficult to completely feed back to the deformation of the surface of the strain film 3, thereby reducing the transmission effect of a pressure signal and destroying the measurement precision of the pressure sensor; through setting up pressure disk 6 in the membrane of meeting an emergency 3 top, make the atress effect transmit to pressure disk 6 on the deformation that pressure sensor produced, utilize the arc arch of pressure disk 6 lower surface, 3 surperficial whole even effort of applying of membrane of meeting an emergency, make under less pressure fluctuation circumstances, still can accurate feedback produce deformation to membrane of meeting an emergency 3 through pressure disk 6, drive the change of sense resistor 4 and treater data, ensure the accuracy of measurement pressure data, thereby high accuracy pressure sensor's result of use has been maintained.
As an embodiment of the present invention, a sleeve rod 71 is disposed between the pressure rod 7 and the pressure plate 6, and a spring 72 is disposed inside the pressure rod 7; the top end of the spring 72 is fixed on the inner wall of the shell 1, and the bottom end of the spring 72 is fixed on the pressure lever 7; when the pressure is suddenly changed, the transmitted force can generate an additional impact effect on the pressure sensor under the action of inertia, so that the normal action of the strain membrane 3 is influenced, and particularly, when the impact force exceeds the detection range of the pressure sensor, the strain membrane can be permanently damaged; through setting up the spring 72 in the depression bar 7 inside, cooperate the loop bar 71 between depression bar 7 and the pressure disk 6, when examining impact nature's pressure, the buffering offsets extra impact force wherein, and the pressure effect that the protection membrane of meeting an emergency 3 received is in stable scope to high accuracy pressure sensor's life has been promoted.
As an embodiment of the present invention, the foundation pit 21 is provided with a filled electronic fluorinated liquid 211, and the electronic fluorinated liquid 211 conducts heat generated in the deformation process of the strain film 3 and the induction resistor 4; the pressure change in the application of the pressure sensor is reflected in the deformation process of the strain membrane 3 and the induction resistor 4, and meanwhile, heat is generated at the deformation parts of the strain membrane 3 and the induction resistor 4, so that the imbalance of the heat affects the performance of the strain membrane 3 and the induction resistor 4, the accuracy of electric signal transmission is further reduced, and the measurement effect of the pressure sensor is damaged; through the electron of setting in foundation ditch 21 inside fluoride liquid 211, utilize the electron to fluoridize the stability ability of liquid 211, isolate component and external environment to guide the heat that it produced, maintain the stable service temperature of membrane 3 and induction resistance 4 of meeting an emergency in the pressure measurement component, and then stabilize its effect to the pressure value detection, thereby maintained high accuracy pressure sensor's application effect.
As an embodiment of the present invention, a pair of refrigeration sheets 22 is disposed at the bottom of the foundation pit 21; a temperature difference is maintained between the two refrigeration sheets 22 during operation; the electron in the foundation ditch 21 fluoridizes liquid 211 after using, the temperature liquid of its body rises thereupon, the influence is to maintaining the service temperature of pressure measurement component, then the accuracy of pressure measurement data has been reduced, through the refrigeration piece 22 that sets up in foundation ditch 21, the too high heat guide out in the electron fluoridizes liquid 211, the difference in temperature between a pair of refrigeration piece 22 simultaneously, make the heat circulation among the electron fluoridizes liquid 211 circulate, maintain the stability of its radiating effect, utilize the heating characteristic of refrigeration piece 22 self, the temperature of electron fluoridize liquid 211 among the cold environment is maintained, the use of protection pressure measurement component performance, thereby high accuracy pressure sensor's range of application has been promoted.
When the pressure sensor is used, the pressure sensor is acted by force, so that the deformation generated by the strain film 3 drives the induction resistor 4 to deform, the electric signal detected in the processor is changed, and the electric signal is converted into pressure value data through a preset algorithm to be output; applying standard stress to the pressure sensor under normal temperature and pressure by the arranged pressure sensor compensation method, measuring different stress values for multiple times by controlling the standard stress application mode, inducing instantaneous stress in dynamic stress values, stress in two directions with variable sizes and difference of data values respectively detected by the pressure sensor to obtain a data compensation method of a related function; the arranged sensing resistor 4 is embedded into the strain film 3, the surface of the sensing resistor 4 protrudes out of the strain film 3, so that the deformation generated by the stress extrusion on the surface of the strain film 3 corresponds to the deformation of the sensing resistor 4, and the lead wires 41 distributed on the surface of the strain film 3 are surrounded, and under the stress deformation of the strain film 3, the relative positions of the lead wires 41 attached to the surface of the strain film 3 are not interfered, so that the stability of the lead wires 41 is ensured; the pressure plate 6 is arranged above the strain membrane 3, so that the deformation of the pressure sensor caused by stress is transmitted to the pressure plate 6, the arc-shaped bulge on the lower surface of the pressure plate 6 is utilized to apply uniform acting force on the whole surface of the strain membrane 3, the strain membrane 3 can still be accurately fed back by the pressure plate 6 to generate deformation under the condition of small pressure fluctuation, the data change of the sensing resistor 4 and the processor is driven, and the accuracy of pressure data measurement is ensured; the spring 72 arranged in the pressure lever 7 is matched with the loop bar 71 between the pressure lever 7 and the pressure plate 6, so that when impact pressure is detected, extra impact force in the impact force is buffered and counteracted, and the pressure action on the strain membrane 3 is protected to be in a stable range; the electronic fluorination liquid 211 arranged in the foundation pit 21 isolates the element from the external environment by utilizing the stability of the electronic fluorination liquid 211, guides the heat generated by the element, maintains the stable service temperature of the strain film 3 and the induction resistor 4 in the pressure detection element, and further stabilizes the effect of the pressure detection element on the pressure value; the refrigeration piece 22 of setting in foundation ditch 21, the too high heat guide comes out in fluoridizing liquid 211 with the electron, and the difference in temperature between a pair of refrigeration piece 22 simultaneously for the heat circulation among the liquid 211 is fluoridized to the electron circulates, maintains its radiating effect's stability, utilizes the characteristic of generating heat of refrigeration piece 22 self, maintains the temperature of the liquid 211 is fluoridized to electron in the cold environment, and the use of protection pressure detection component performance.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. An error compensation method of a high-precision pressure sensor is characterized by comprising the following steps:
s1, calibration: applying standard stress with different values to the pressure sensor under normal temperature and normal pressure, wherein the stress value meets the measuring range of the pressure sensor, recording the measured data of the pressure sensor to obtain samples of the applied stress and the measured data, correspondingly arranging the sample data, analyzing the data deviation when the pressure sensor is not under the stress action, and performing zero calibration;
s2, fine adjustment: after the pressure sensor is calibrated in S1, applying dynamic stress action to the pressure sensor, observing the smoothness of the recording waveform of the measured data of the pressure sensor, controlling the dynamic stress action to stop for 2S instantaneously, recording the measured data before and after the instantaneous stop for 2S, comparing the measured data with the static stress in change, fitting the data into a functional relation, and adjusting the data result in measurement;
s3, measurement: measuring the pressure sensor which is finely adjusted in the step S2, controlling the applied stress value to gradually increase the level of the measured value and the applied stress value to decrease from large to the level of the measured value, recording the difference between the measured value data under the two ways, and summarizing the correlation function of the data samples under the two conditions;
s4, compensation: comprehensively applying the sample data rule obtained by the calibration, fine adjustment and measurement operations to the use process, standing for 5-10s in the measurement, and processing the measured data by a compensation algorithm to obtain the final effective high-precision measurement data;
the pressure sensor comprises a shell (1), a base body (2), a strain film (3) and a sensing resistor (4), wherein the pressure sensor comprises a pressure sensor S1-S3; a base body (2) is arranged in the shell (1), and a foundation pit (21) is arranged in the center of the upper part of the base body (2); the foundation pit (21) is provided with a strain film (3), the strain film (3) is connected to the base body (2) through four edges, and the strain film (3) is provided with an induction resistor (4); the induction resistors (4) are connected through a lead (41), and the resistance of the induction resistors (4) can be changed under deformation; an insulating protective sheet (5) is arranged at the connecting position of the strain film (3) and the base body (2), the insulating protective sheet (5) is fixed on the base body (2), and the insulating protective sheet (5) is in sliding contact with the strain film (3); the strain film (3) deforms under the action of stress, so that the resistance value of the induction resistor (4) on the strain film changes; the electrical signals are transmitted to the processor through electrically connected leads (41).
2. The method of claim 1, wherein the method further comprises: the sensing resistors (4) are embedded in the strain film (3), the upper surfaces of the sensing resistors (4) protrude out of the strain film (3), and lead wires (41) connected among the sensing resistors (4) are arranged on the surface of the strain film (3) in a surrounding mode.
3. The method of claim 2, wherein the method further comprises: a pressure plate (6) is arranged above the strain film (3), and the lower surface of the pressure plate (6) is an arc-shaped bulge; pressure disk (6) are located the top at straining film (3) center, and the top of pressure disk (6) is equipped with depression bar (7), and on depression bar (7) transmitted pressure's deformation to pressure disk (6) on with casing (1).
4. A method for compensating an error of a high accuracy pressure sensor according to claim 3, wherein: a loop bar (71) is arranged between the pressure bar (7) and the pressure plate (6), and a spring (72) is arranged in the pressure bar (7); the top end of the spring (72) is fixed on the inner wall of the shell (1), and the bottom end of the spring (72) is fixed on the pressure lever (7).
5. The method of claim 1, wherein the method further comprises: and the foundation pit (21) is internally provided with filled electronic fluorinated liquid (211), and the electronic fluorinated liquid (211) conducts heat generated in the deformation process of the strain film (3) and the induction resistor (4).
6. The method of claim 5, wherein the method further comprises: a pair of refrigerating sheets (22) is arranged at the bottom of the foundation pit (21); a temperature difference is maintained between the two refrigeration sheets (22) during operation.
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| CN202010426448.5A CN111637992A (en) | 2020-05-19 | 2020-05-19 | Error compensation method of high-precision pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113188715A (en) * | 2021-03-17 | 2021-07-30 | 重庆大学 | Multi-dimensional force sensor static calibration data processing method based on machine learning |
| CN114136537A (en) * | 2021-11-04 | 2022-03-04 | 歌尔微电子股份有限公司 | Pressure sensor |
-
2020
- 2020-05-19 CN CN202010426448.5A patent/CN111637992A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113188715A (en) * | 2021-03-17 | 2021-07-30 | 重庆大学 | Multi-dimensional force sensor static calibration data processing method based on machine learning |
| CN114136537A (en) * | 2021-11-04 | 2022-03-04 | 歌尔微电子股份有限公司 | Pressure sensor |
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Application publication date: 20200908 |