CN111611765A - Clamp de-embedding method, system, storage medium, computer program and application - Google Patents

Clamp de-embedding method, system, storage medium, computer program and application Download PDF

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CN111611765A
CN111611765A CN202010249376.1A CN202010249376A CN111611765A CN 111611765 A CN111611765 A CN 111611765A CN 202010249376 A CN202010249376 A CN 202010249376A CN 111611765 A CN111611765 A CN 111611765A
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clamp
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CN111611765B (en
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詹劲松
孙璐
岳春宇
姜子涵
王家礼
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Xidian University
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    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
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    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract

The invention belongs to the technical field of microwave testing, and discloses a clamp de-embedding method, a system, a storage medium, a computer program and applicationt]I.e., [ S ]t1]And [ S ]t2](ii) a Calculating S parameter [ S ] of two different transmission lines clamped by the clamp according to a formulat01]And [ S ]t02](ii) a Set [ S ]]An appropriate initial value, approximating the S parameter [ S ] of the fixture]. The comparison of the simulation data and the calculation data of the clamp by adopting the method of the invention discovers that the S parameter data of the clamp at two ends of the tested piece can be accurately and effectively extracted by adopting the clamp de-embedding method of the double transmission lines, thereby laying a foundation for the subsequent semiconductor parameter test. Compared with the traditional calibration method, the calibration method has the characteristics of simple realization, simple processing and lower requirement on the processing precision of the standard component, and has better application value.

Description

Clamp de-embedding method, system, storage medium, computer program and application
Technical Field
The invention belongs to the technical field of microwave testing, and particularly relates to a clamp de-embedding method, a clamp de-embedding system, a storage medium, a computer program and application.
Background
At present, in the design and development process of microwave circuits, the testing of microwave devices is always emphasized. Due to the development of CAD technology, the measurement accuracy requirement of microwave devices is gradually increased. The port of the automatic network analyzer cannot be directly connected with the to-be-measured device, and the to-be-measured device can be measured only by a specific clamp, so that the parameters acquired by the microwave network analyzer contain information of the to-be-measured device and the clamp, and the embedding calculation is required to be carried out to eliminate the influence brought by the clamp only by acquiring the accurate parameters of the to-be-measured device.
The traditional de-embedding calibration method comprises a SOLT calibration method and a TRL calibration method. The SOLT calibration method realizes calibration and elimination of measurement errors brought to the clamp by respectively connecting the corresponding short circuit calibration piece, the open circuit calibration piece, the matched load calibration piece and the straight-through calibration piece to a measurement port. The TRL calibration technology is also called a through-reflection-transmission line technology, and is realized by utilizing four standard calibration pieces of through, reflection and time delay of a transmission line to calibrate and eliminate measurement errors brought by a clamp. The conventional method requires a plurality of calibration pieces and puts high demands on the precision of the design and processing of the calibration pieces.
In summary, the problems of the prior art are as follows: conventional de-embedding and calibration methods require multiple standard calibration pieces, which results in: 1. the calculation method is very complex and comprises 8 to 12 error models; 2. the measurement accuracy is directly related to the precision of the standard part, so that extremely high requirements are provided for the design and the processing precision of the calibration part; 3. open circuit, short circuit and load calibration pieces are difficult to process and high in cost, and larger parasitic parameters are often brought; 4. the calculation error is large and difficult to eliminate.
The difficulty of solving the technical problems is as follows: if the traditional de-embedding and calibrating method is still adopted, 1, the complexity of the calculation method cannot be solved; 2. the improvement of the measurement accuracy and the reduction of the error can only be realized by improving the processing technology and the processing precision, which puts higher requirements on processing instruments and cannot be realized in a short time. Therefore, to solve the above technical problem, only a new de-embedding and calibration method can be proposed.
The significance of solving the technical problems is as follows: 1. the complexity of the calculation method is reduced, and the precision is improved; 2. the design and processing difficulty of the calibration piece is reduced, and the calibration piece is convenient to process and realize; 3. the measurement accuracy is improved, and the calculation error is reduced.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a clamp de-embedding method, a clamp de-embedding system, a storage medium, a computer program and application.
The invention is realized in such a way that a clamp de-embedding method comprises the following steps:
first, two different transmission lines are respectively clamped by a clamp, and network parameters [ S ] are respectively measured by measuring equipmentt]I.e., [ S ]t1]And [ S ]t2]The parameters include information of the clamp and the transmission line;
second, the transmission line network parameter [ S ] is calculated according to theoryt01]And [ S ]t02]The theoretical formula is as follows:
Figure BDA0002434931910000021
Figure BDA0002434931910000022
wherein, the formula:
Figure BDA0002434931910000023
in the formula, Z0＝50Ω，Z2Is the characteristic impedance of the middle section of transmission line, gamma is the attenuation constant of the transmission line, l is the length of the transmission line, and Z2And gamma is found from the parameters of the transmission line.
Thirdly, setting the network parameter of the clamp as S]Obtaining its and [ S ]t]、[St0]The theoretical relationship is as follows:
Figure BDA0002434931910000024
Figure BDA0002434931910000031
Figure BDA0002434931910000032
Figure BDA0002434931910000033
fourthly, setting the network parameter of the fixture (S)]An appropriate initial value [ S ]0]Approximating and converging the accurate network parameters [ S ] of the fixture by an optimization algorithm]。
The clamp de-embedding method uses the clamps to respectively clamp two sections of different transmission lines to form a system, the scattering parameters of the system are measured, and the S parameters of the whole system are as follows:
Figure BDA0002434931910000034
the fixture is a reciprocal network, and the S parameters of the fixture are as follows:
Figure BDA0002434931910000035
the middle section of transmission line is a symmetrical reciprocal network, and S parameters are as follows:
Figure BDA0002434931910000036
the relation of the S parameters can utilize a signal flow diagram;
according to the Meisen formula, one can obtain:
Figure BDA0002434931910000037
Figure BDA0002434931910000038
wherein:
Figure BDA0002434931910000039
another object of the present invention includes providing a program storage medium for receiving user input, the stored computer program causing an electronic device to perform steps comprising:
first, two different transmission lines are respectively clamped by a clamp to respectively measure [ S ]t]I.e., [ S ]t1]And [ S ]t2](ii) a Calculating [ S ] according to a theoretical formulat01]And [ S ]t02]；
And secondly, setting a proper initial value of the S, and optimizing and approaching to the accurate S parameter S of the clamp.
It is another object of the present invention to provide a computer program product stored on a computer readable medium, comprising a computer readable program for providing a user input interface to implement the clip de-embedding method when executed on an electronic device.
Another object of the present invention is to provide a dual-segment transmission line based clip de-embedding system for implementing a clip de-embedding method, the dual-segment transmission line based clip de-embedding system comprising:
a first measuring module for respectively clamping two different transmission lines by using the clamp to respectively measure [ S ]t]I.e., [ S ]t1]And [ S ]t2](ii) a Calculate [ S ]t01]And [ S ]t02]；
And the parameter calculation module is used for setting a proper initial value of the [ S ] and optimizing and approaching the accurate S parameter [ S ] of the clamp.
The invention also aims to provide application of the clamp de-embedding method in microwave circuit design.
The invention also aims to provide application of the clamp de-embedding method in microwave device testing.
Another object of the present invention is to provide an application of the clip de-embedding method in microwave testing.
In summary, the advantages and positive effects of the invention are: the comparison of the simulation data and the calculation data of the clamp by adopting the method of the invention discovers that the S parameter data of the clamp at two ends of the tested piece can be accurately and effectively extracted by adopting the clamp de-embedding method of the double transmission lines, thereby laying a foundation for the subsequent semiconductor parameter test. Compared with the traditional calibration method, the calibration method has the characteristics of simple realization, simple processing and lower requirement on the processing precision of the standard component, and has better application value. The method of the present invention is compared with the conventional SOLT calibration method and the classical TRL calibration method. 1. The traditional SOLT calibration method needs four standard calibration pieces of short circuit, open circuit, matched load and through connection, wherein the manufacturing difficulty of the short circuit calibration piece and the open circuit calibration piece is higher, and ideal short circuit and open circuit are difficult to realize; 2. the classic TRL calibration method requires three standard calibration components, namely a through standard calibration component, a reflection standard calibration component and a time delay standard calibration component, wherein the manufacturing difficulty of the reflection calibration component is high, because the reflection calibration component is formed by connecting a load with a large reflection coefficient at one end of a half test fixture, ideally, the test fixture is a short circuit or an open circuit, but the ideal short circuit and the open circuit are difficult to realize. 3. The method can obtain the S parameter of the clamp only by clamping two sections of different transmission lines by the clamp, has low requirements on processing and manufacturing, and is more convenient to operate.
Drawings
Fig. 1 is a flowchart of a clip de-embedding method according to an embodiment of the present invention.
Fig. 2 is a schematic view of a transmission line clamp according to an embodiment of the present invention.
Fig. 3 is a signal flow diagram provided by an embodiment of the present invention.
FIG. 4 is a diagram of the pair S provided by the embodiment of the present inventiont]And (4) carrying out a simulation schematic diagram.
FIG. 5 is a diagram of the pair S provided by the embodiment of the present inventiont]And (4) carrying out a simulation schematic diagram.
FIG. 6 is a diagram of the pair S provided by the embodiment of the present inventiont0]And (4) carrying out a simulation schematic diagram.
Fig. 7 is a code diagram provided by an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In view of the problems in the prior art, the present invention provides a clip de-embedding method, system, storage medium, computer program and application thereof, which will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, the fixture de-embedding method provided by the embodiment of the invention includes the following steps:
s101: clamping two different transmission lines by a fixture to measure [ S ] respectivelyt]I.e., [ S ]t1]And [ S ]t2](ii) a Calculating [ S ] according to the formulat01]And [ S ]t02]；
S102: set [ S ]0]An appropriate initial value to optimize the exact S parameter [ S ] of the fixture]。
The technical solution of the present invention is further described below with reference to the accompanying drawings.
The clamp de-embedding method provided by the embodiment of the invention uses the clamps to respectively clamp two sections of different transmission lines to form a system as shown in figure 2, measures the scattering parameters of the whole system, and can calculate the scattering parameters of the clamps by using a related formula to finish de-embedding of the clamps.
Firstly, formula derivation is carried out: a length of transmission line is clamped with a clamp as shown in fig. 2.
Since the whole is a symmetric reciprocal network, the S parameters of the whole can be set as:
Figure BDA0002434931910000061
the fixture is a reciprocal network, and the S parameters of the fixture are set as follows:
Figure BDA0002434931910000062
the middle section of transmission line is a symmetrical reciprocal network, and S parameters of the transmission line are set as follows:
Figure BDA0002434931910000063
the above relationship of the S parameters can be represented by a signal flow diagram, as shown in fig. 3.
According to the Meisen formula, one can obtain:
Figure BDA0002434931910000064
Figure BDA0002434931910000065
wherein:
Figure BDA0002434931910000066
the technical effects of the present invention will be described in detail with reference to simulations.
Simulation 1:
the following simulation verification of equations (1) to (3) was performed using Advanced Design System software. The impedance gradient line is designed by using an impedance gradient line design control DA _ TLMatch1_ TEST in ADS software as a TEST fixture, the frequency is 2GHz, the length of the middle section of transmission line is 5, 10, 15, 20 and 25 millimeters respectively, and the width is 1.3 millimeters. To [ S ]t]The schematic diagram for the simulation is shown in fig. 4:
table 1 simulation results are as follows:
Figure BDA0002434931910000071
a schematic diagram of the simulation of [ S ] is shown in FIG. 5.
TABLE 2 simulation results
S11 S21 S22
-0.614+j0.298 -0.136-j0.718 -0.680-j0.053
To [ S ]t0]A schematic diagram of the simulation is shown in fig. 6.
Table 3 simulation results are as follows:
Figure BDA0002434931910000072
will [ S ]]And [ S ]t0]Substituting the simulated value of (A) into [ S ] calculated by formula (1) to formula (3)t]Compared with its simulated value, as shown in table 4.
TABLE 4
Figure BDA0002434931910000073
The above comparison proves that the formulas (1) to (3) are correct.
[St]Is directly measurable by the present invention, [ S ]]Is that the present invention requires calculation, so the present invention requires derivation of [ S ]t0]The calculation formula of (2).
According to the transmission line theory, the following can be obtained:
Figure BDA0002434931910000081
Figure BDA0002434931910000082
wherein, the formula:
Figure BDA0002434931910000083
in the formula, Z0＝50Ω，Z2The characteristic impedance of the middle section of transmission line, gamma is the attenuation constant of the transmission line, and l is the length of the transmission line. Z2And γ can be found from the parameters of the transmission line.
Simulation 2
The following simulation verification of equations (3) to (6) was performed using Advanced Design System software. Z2And γ l can be obtained by the LineClac tool in the Advanced Design System.
[St0]The calculated values and simulated values of (c) are shown in table 5.
TABLE 5[ S ]t0]Comparison of the calculated value with the simulated value
Figure BDA0002434931910000084
The above comparison proves that the formulas (3) to (6) are correct.
The technical solution of the present invention is further described with reference to the following specific examples.
In the embodiment of the invention, the clamps are used for clamping different transmission lines respectively to measure the [ S ] of the transmission lines respectivelyt]I.e., [ S ]t1]And [ S ]t2]According to the formula (4) to the formula (6), [ S ] can be calculatedt01]And [ S ]t02]Then, the following formula (7) -formula (10) can be followed:
Figure BDA0002434931910000091
Figure BDA0002434931910000092
Figure BDA0002434931910000093
Figure BDA0002434931910000094
since the formula (7) to the formula (10) is a ternary high-order equation system, an appropriate initial value of [ S ] needs to be set, and the S parameter [ S ] of the fixture can be approximated.
The simulation verification is as follows: two transmission lines with the width of 1.3mm and the lengths of 10mm and 20mm are used, the four modes are combined, an initial value which is closer to the simulation value is set, and the obtained [ S ] is compared with the simulation value and the initial value, such as the table 6.
TABLE 6[ S ] comparison with simulated values, initial values
S11 S21 S22
Initial value -0.4+j0.1 -0.5j -0.4
Simulation value -0.614+j0.298 -0.136-j0.718 -0.680-j0.053
Calculated value -0.6134+j0.2982 -0.1352-j0.7187 -0.6813-j0.0532
The comparison proves that the error between the calculated value and the simulated value is negligible, and the method is feasible. The code is as in figure 7. The comparison of the simulation data and the calculation data of the clamp by adopting the method of the invention discovers that the S parameter data of the clamp at two ends of the tested piece can be accurately and effectively extracted by adopting the clamp de-embedding method of the double transmission lines, thereby laying a foundation for the subsequent semiconductor parameter test. Compared with the traditional calibration method, the calibration method has the characteristics of simple realization and low requirement on the processing precision of the standard component, and has good application value.
It should be noted that the embodiments of the present invention can be realized by hardware, software, or a combination of software and hardware. The hardware portion may be implemented using dedicated logic; the software portions may be stored in a memory and executed by a suitable instruction execution system, such as a microprocessor or specially designed hardware. Those skilled in the art will appreciate that the apparatus and methods described above may be implemented using computer executable instructions and/or embodied in processor control code, such code being provided on a carrier medium such as a disk, CD-or DVD-ROM, programmable memory such as read only memory (firmware), or a data carrier such as an optical or electronic signal carrier, for example. The apparatus and its modules of the present invention may be implemented by hardware circuits such as very large scale integrated circuits or gate arrays, semiconductors such as logic chips, transistors, or programmable hardware devices such as field programmable gate arrays, programmable logic devices, etc., or by software executed by various types of processors, or by a combination of hardware circuits and software, e.g., firmware.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. A clip de-embedding method, comprising the steps of:
firstly, two sections of different transmission lines are respectively clamped by using a clamp, and S parameters [ S ] of the whole system are respectively measuredt]I.e., [ S ]t1]And [ S ]t2](ii) a Calculating S parameter [ S ] of two different transmission lines clamped by the clamp according to a formulat01]And [ S ]t02]；
And secondly, setting a proper initial value of [ S ] to approximate the S parameter [ S ] of the clamp.
2. The fixture de-embedding method of claim 1, wherein [ S ] is calculatedt01]And [ S ]t02]The formula of (1) is:
Figure FDA0002434931900000011
Figure FDA0002434931900000012
wherein, the formula:
Figure FDA0002434931900000013
in the formula, Z0＝50Ω，Z2Is the characteristic impedance of the middle section of transmission line, gamma is the attenuation constant of the transmission line, l is the length of the transmission line, and Z2And gamma is found from the parameters of the transmission line.
3. The clip denesting method according to claim 1, wherein the clip denesting method further comprises:
Figure FDA0002434931900000014
Figure FDA0002434931900000015
Figure FDA0002434931900000016
Figure FDA0002434931900000017
setting a proper initial value of [ S ] to approximate the S parameter [ S ] of the fixture.
4. The jig de-embedding method according to claim 1, wherein the jig de-embedding method uses jigs to clamp two different transmission lines, respectively, to form a system, and measures scattering parameters of the system, and S parameters of the whole system are:
Figure FDA0002434931900000021
the fixture is a reciprocal network, and the S parameters of the fixture are as follows:
Figure FDA0002434931900000022
the middle section of transmission line is a symmetrical reciprocal network, and S parameters are as follows:
Figure FDA0002434931900000023
the relation of the S parameters can utilize a signal flow diagram;
according to the Meisen formula, one can obtain:
Figure FDA0002434931900000024
Figure FDA0002434931900000025
wherein:
Figure FDA0002434931900000026
5. a program storage medium storing a computer program for causing an electronic device to perform steps comprising:
first, two different transmission lines are respectively clamped by a clamp to respectively measure [ S ]t]I.e., [ S ]t1]And [ S ]t2](ii) a Calculating [ S ] according to the formulat01]And [ S ]t02]；
And secondly, setting a proper initial value of [ S ] to approximate the S parameter [ S ] of the clamp.
6. A computer program product stored on a computer readable medium, comprising a computer readable program for providing a user input interface for implementing the clip de-embedding method of any one of claims 1-4 when executed on an electronic device.
7. A clamp de-embedding system based on a double-segment transmission line for implementing the clamp de-embedding method of any one of claims 1 to 4, wherein the clamp de-embedding system based on the double-segment transmission line comprises:
a first measuring module for respectively clamping two different transmission lines by using the clamp to respectively measure [ S ]t]I.e., [ S ]t1]And [ S ]t2](ii) a Calculate [ S ]t01]And [ S ]t02]；
And the parameter calculation module is used for setting a proper initial value of the [ S ] and approximating the S parameter [ S ] of the clamp.
8. Use of the method of claim 1 to 4 for de-embedding a fixture in microwave circuit design.
9. Use of the fixture de-embedding method of any one of claims 1 to 4 in microwave device testing.
10. Use of the method of de-embedding a fixture according to any one of claims 1 to 4 in microwave testing.
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CN111929558A (en) * 2020-09-28 2020-11-13 浙江铖昌科技有限公司 Self-calibration-based de-embedding method, system, storage medium and terminal
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CN113777547A (en) * 2021-07-29 2021-12-10 中国电子科技集团公司第十三研究所 Calibration judgment method and device for on-chip S parameter measurement system and terminal
CN113777547B (en) * 2021-07-29 2024-02-23 中国电子科技集团公司第十三研究所 Calibration judgment method, device and terminal of on-chip S parameter measurement system

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