CN111580288B - Tunable thermo-optical filter, adjusting method and manufacturing method thereof - Google Patents
Tunable thermo-optical filter, adjusting method and manufacturing method thereof Download PDFInfo
- Publication number
- CN111580288B CN111580288B CN202010528229.8A CN202010528229A CN111580288B CN 111580288 B CN111580288 B CN 111580288B CN 202010528229 A CN202010528229 A CN 202010528229A CN 111580288 B CN111580288 B CN 111580288B
- Authority
- CN
- China
- Prior art keywords
- thermo
- tunable
- optic
- dielectric layer
- microstructures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention provides a tunable thermo-optical filter, a regulating method and a manufacturing method thereof, wherein the tunable thermo-optical filter comprises the following components: the device comprises a substrate, a first reflector, a super-surface structure and a second reflector, wherein the first reflector, the super-surface structure and the second reflector are sequentially arranged away from the substrate; the super-surface structure comprises a plurality of microstructures which are periodically arranged, a heating structure which surrounds the microstructures, and a thermo-optical effect structure which covers the microstructures and the heating structure, wherein the heating structure is used for heating the thermo-optical effect structure, when the thermo-optical effect structure is at a first temperature value, the central wavelength of the tunable thermo-optical filter is a first numerical value, and when the thermo-optical effect structure is at a second temperature value which is different from the first temperature value, the central wavelength of the tunable thermo-optical filter is a second numerical value which is different from the first numerical value. For achieving high performance tunable filtering.
Description
Technical Field
The invention relates to the technical field of communication, in particular to a tunable thermo-optical filter, and an adjusting method and a manufacturing method thereof.
Background
Currently, integration and miniaturization have become the trend of future device design. There are many methods of integrated optics that have been used to design filter structures such as micro-ring based chip frequency filters, integrated diffraction gratings, and arrayed waveguide gratings. However, for these devices, the optical signal is based on free space transmission, and the coupling efficiency is low, resulting in poor filter performance.
How to realize high-performance tunable filtering becomes an extremely important issue.
Disclosure of Invention
The invention provides a tunable thermo-optic filter, a regulating method and a manufacturing method thereof, which are used for realizing high-performance tunable filtering.
In a first aspect, an embodiment of the present invention provides a tunable thermo-optical filter, including:
the device comprises a substrate, a first reflector, a super-surface structure and a second reflector, wherein the first reflector, the super-surface structure and the second reflector are sequentially arranged away from the substrate;
the super-surface structure comprises a plurality of microstructures which are periodically arranged, a heating structure which surrounds the microstructures, and a thermo-optical effect structure which covers the microstructures and the heating structure, wherein the heating structure is used for heating the thermo-optical effect structure, when the thermo-optical effect structure is at a first temperature value, the central wavelength of the tunable thermo-optical filter is a first numerical value, and when the thermo-optical effect structure is at a second temperature value which is different from the first temperature value, the central wavelength of the tunable thermo-optical filter is a second numerical value which is different from the first numerical value.
In one possible implementation, the thickness of the thermo-optical effect structure is greater than the thickness of the microstructure.
In a possible implementation manner, the first reflector and the second reflector are both distributed bragg reflection gratings, the first reflector includes at least one first combined structure, each of the first combined structures includes a first dielectric layer and a second dielectric layer which deviate from the substrate in sequence, the second reflector includes at least one second combined structure, each of the second combined structures deviates from a third dielectric layer and a fourth dielectric layer of the substrate in sequence, and the thickness of the first combined structure and the thickness of the second combined structure are one fourth of the central wavelength of the tunable thermo-optical filter.
In a possible implementation manner, the first dielectric layer and the third dielectric layer are made of the same material, the first dielectric layer and the third dielectric layer are made of the same thickness, the second dielectric layer and the fourth dielectric layer are made of the same material, and the second dielectric layer and the fourth dielectric layer are made of the same thickness.
In a possible implementation manner, the orthographic projection of the microstructure on the substrate is in any one of a circular shape, a square shape and a rectangular shape.
In one possible implementation, the material of the microstructure is any one of a-Si, p-Si, si3N4, siO 2.
In a possible implementation manner, the material of the thermo-optical effect structure comprises SU8 glue and PMMA.
In one possible implementation, the thermo-optic effect structure has a thermo-optic coefficient of-3.5
10 -4 K -1 。
In a second aspect, an embodiment of the present invention further provides an adjusting method of the tunable thermo-optical filter, including:
heating the thermo-optical effect structure to the first temperature value through an external power supply electrically connected with the heating structure, and determining that the central wavelength of the tunable thermo-optical filter is the first numerical value;
and heating the thermo-optical effect structure to the second temperature value through the external power supply, and adjusting the central wavelength of the tunable thermo-optical filter to the second value.
In a third aspect, an embodiment of the present invention further provides a method for manufacturing a tunable thermo-optical filter, where the method includes:
depositing the first mirror on the substrate;
depositing a whole dielectric layer on the first reflector;
etching the dielectric layer to form the plurality of microstructures;
plating the heating structure around the plurality of microstructures;
coating the thermo-optic effect structure covering the plurality of microstructures and the heating structure to form the super-surface structure comprising the plurality of microstructures, the heating structure, and the thermo-optic effect structure;
and attaching the second reflector to the thermo-optic effect structure.
The invention has the following beneficial effects:
the embodiment of the invention provides a tunable thermo-optic filter, a regulating method and a manufacturing method thereof, wherein the tunable thermo-optic filter comprises a substrate, a first reflecting mirror, a super-surface structure and a second reflecting mirror, wherein the first reflecting mirror, the super-surface structure and the second reflecting mirror are sequentially arranged away from the substrate, the super-surface structure comprises a plurality of microstructures which are periodically arranged, a heating structure which surrounds the plurality of microstructures, and a thermo-optic effect structure which covers the plurality of microstructures and the heating structure, the heating structure is used for heating the thermo-optic effect structure, when the thermo-optic effect structure is at a first temperature value, the central wavelength of the tunable thermo-optic filter is a first numerical value, and when the thermo-optic effect structure is at a second temperature value different from the first temperature value, the central wavelength of the tunable thermo-optic filter is a second numerical value different from the first numerical value. That is to say, the center wavelength of the tunable thermo-optic filter can be changed by only arranging the super-surface structure between the first reflector and the second reflector and heating the thermo-optic effect structure in the super-surface structure through the heating structure, so that the tunable thermo-optic filter can be tuned to different center wavelengths, namely, high-performance tunable filtering is realized.
Drawings
Fig. 1 is a schematic structural diagram of a tunable thermo-optic filter according to an embodiment of the present invention;
fig. 2 is a schematic top view of a tunable thermo-optic filter according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a tunable thermo-optic filter according to an embodiment of the present invention;
fig. 4 is a schematic diagram illustrating a simulation result of a tunable thermo-optic filter according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a simulation result of a thermal effect structure in a tunable thermo-optical filter at different temperatures according to an embodiment of the present invention;
fig. 6 is a flowchart of a method for adjusting a tunable thermo-optic filter according to an embodiment of the present invention;
fig. 7 is a flowchart of a method for manufacturing a tunable thermo-optic filter according to an embodiment of the present invention.
Description of reference numerals:
10-a substrate; 20-a first mirror; 30-a super-surface structure; 40-a second mirror; 50-microstructure; 60-a heating structure; 70-a thermo-optical effect structure; 80-a first composite structure; 801-a first dielectric layer; 802-a second dielectric layer; 90-a second composite structure; 901-a third dielectric layer; 902-fourth dielectric layer.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It should be apparent that the described embodiments are only some of the embodiments of the present invention, and not all of them. And the embodiments and features of the embodiments may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of the word "comprise" or "comprises", and the like, in the context of this application, is intended to mean that the elements or items listed before that word, in addition to those listed after that word, do not exclude other elements or items.
It should be noted that the sizes and shapes of the figures in the drawings are not to be considered true scale, but are merely intended to schematically illustrate the present invention. And the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.
In the prior art, an array band-pass filter based on an FP microcavity is often adopted to improve the filtering effect. Specifically, the filter consists of a pair of broadband high efficiency mirrors. The cavity length of the FP microcavity can be formed by multi-step etching or an inclined surface with a gradient angle, and the optical filter with the inclined angle has different central wavelengths due to the cavity length of the linearly changed FP microcavity. However, the quality factor of the FP microcavity is limited by the tilt angle, and the non-vertical reflection of the tilt angle also reduces the resolution of the filter, and in addition, the slope etching process with the tilt angle is complex and has low precision, thereby causing the reduction of the filtering performance.
In view of this, embodiments of the present invention provide a tunable thermo-optical filter, a tuning method thereof, and a manufacturing method thereof, which are used to implement high-performance tunable filtering.
Fig. 1 is a schematic cross-sectional structure diagram of a tunable thermo-optical filter according to an embodiment of the present invention, specifically, the tunable thermo-optical filter includes:
a substrate 10, a first mirror 20, a super-surface structure 30 and a second mirror 40 arranged in this order away from the substrate 10;
the super-surface structure 30 includes a plurality of microstructures 50 periodically arranged, a heating structure 60 surrounding the plurality of microstructures 50, and a thermo-optical effect structure 70 covering the plurality of microstructures 50 and the heating structure 60, where the heating structure 60 is configured to heat the thermo-optical effect structure 70, a center wavelength of the tunable thermo-optical filter is a first value when the thermo-optical effect structure 70 is at a first temperature value, and a center wavelength of the tunable thermo-optical filter is a second value different from the first value when the thermo-optical effect structure 70 is at a second temperature value different from the first temperature value.
In the embodiment of the present invention, the substrate 10 may be a glass substrate, a silicon-based substrate, or the like, and is not limited herein. In the implementation where the first mirror 20 and the second mirror 40 are arranged in pairs, those skilled in the art can select the first mirror 20 and the second mirror 40 designed by the specific device according to the actual requirement of the optical performance of the tunable thermo-optic filter.
In the embodiment of the present invention, the super-surface structure 30 includes a plurality of microstructures 50 arranged periodically, the microstructures 50 may be super-surface units, and may be used as independent scattering poles, and the phase, amplitude, and polarization of light may be controlled by the microstructures 50 arranged periodically. In a specific implementation, the arrangement period between the plurality of microstructures 50 may be set according to the resonant wavelength of the tunable thermo-optic filter. As shown in fig. 2, which is a schematic top view structure of a tunable thermo-optic filter, the microstructures 50 may be arranged along a first direction X and a second direction Y, and two adjacent microstructures 50 are disposed at equal intervals, an arrangement period between the plurality of microstructures 50 is a distance between centers of two adjacent microstructures 50, as shown in p in fig. 2, the arrangement period p is specifically 600nm, for example, as shown in L in fig. 2, a diameter of a shape of a forward projection of a microstructure 50 on a substrate is shown.
In a specific implementation process, the super-surface structure 30 further includes a heating structure 60 surrounding the plurality of microstructures 50, and a thermo-optical effect structure 70 covering the plurality of microstructures 50 and the heating structure 60, and the thermo-optical effect structure 70 can be heated by the heating structure 60, so that the thermo-optical effect of the thermo-optical effect structure 70 is utilized to adjust the optical performance of the tunable thermo-optical filter. Specifically, when the thermo-optical effect structure 70 is heated to a first temperature value by the heating structure 60, the center wavelength of the tunable thermo-optical filter is a first value, and when the thermo-optical effect structure 70 is heated to a second temperature value different from the first temperature value by the heating structure 60, the center wavelength of the tunable thermo-optical filter is adjusted from the first value to the second value, so that the tunable thermo-optical filter can be tuned to different center wavelengths. As the whole tuning process of the tunable thermo-optical filter, the value of the center wavelength of the tunable thermo-optical filter can be adjusted only by heating the heat effect structure in the super-surface structure 30 through the heating structure 60, and the filtering performance is good, so that high-performance tunable filtering is realized. In addition, in the specific implementation process, the modulation of the center wavelength can be directly realized in a heating frequency selection mode, so that the ultra-narrow bandwidth modulation of the tunable thermo-optical filter can be realized.
In the embodiment of the invention, the tunable performance of the tunable thermo-optical filter can be realized by adjusting the phase change of the tunable thermo-optical filter. Specifically, the phase of the tunable thermo-optic filter depends mainly on three aspects, namely, the phase generated between the first mirror 20 and the second mirror 40, the phase generated by the microstructure 50, and the phase generated by the thermal effect structure 70, for example, when the thickness of the thermo-optic effect structure 70 is H, the refractive index is n, the central wavelength in the whole modulation range is λ, and the phase generated by the thermo-optic effect structure 70 is 4 π nH/λ; in the implementation process, the first mirror 20, the second mirror 40, the microstructure 50, and the thermo-optical effect structure 70 may be adjusted accordingly according to the actual requirement of the modulation range of the tunable thermo-optical filter, for example, the thickness or material of the stack of the first mirror 20 and the second mirror 40 is changed, for example, the radius of the super-surface unit corresponding to the microstructure 50 is changed, for example, the thermo-optical effect structure 70 is heated, and so on. Therefore, the phase of the tunable thermo-optical filter can be adjusted, and the filtering performance of the tunable thermo-optical filter can be adjusted.
In the specific implementation process, the heating structure 60 can be a NiCr micro-heater, the heating structure 60 is arranged on the periphery of the plurality of microstructures 50, and the open-loop design is adopted, the corresponding metal electrodes can be respectively designed at the two ends of the heating structure 60, in this way, in the process of tuning the tunable thermo-optic filter, an external power supply can be directly and electrically connected with the metal electrodes, the heating structure 60 can be used for heating the thermal effect structure, the adjustment of the central wavelength of the tunable thermo-optic filter is realized, and the efficiency of the whole tuning process is high.
In a specific implementation process, the thickness of the thermo-optical effect structure 70 is greater than the thickness of the microstructure 50, so that, on one hand, the thermo-optical effect structure 70 can protect the microstructure 50, and on the other hand, when the self structural parameters of the microstructure 50, such as length, width, thickness, period, etc., are fixed, the optical performance of the thermo-optical effect structure 70 can be adjusted in a larger wavelength range through the heating structure 60, thereby improving the filtering performance of the tunable thermo-optical filter. In addition, the thermo-optical effect structure 70 covers the plurality of micro-structures 50 and the heating structure 60, and when the thickness of the thermo-optical effect structure 70 is greater than that of the micro-structures 50, the volume of the thermo-optical effect structure is much greater than that of the micro-structures 50, so that the thermo-optical effect of the tunable thermo-optical filter mainly comes from the thermo-optical effect structure, thereby ensuring the precise adjustment of the tunable thermo-optical filter.
In the embodiment of the present invention, as shown in fig. 3, there is a schematic structural diagram of a tunable thermo-optic filter, specifically, the first mirror 20 and the second mirror 40 are both distributed bragg reflection gratings, the first mirror 20 includes at least one first combined structure 80, each first combined structure 80 includes a first dielectric layer 801 and a second dielectric layer 802 sequentially facing away from the substrate 10, the second mirror 40 includes at least one second combined structure 90, each second combined structure 90 sequentially faces away from a third dielectric layer 901 and a fourth dielectric layer 902 of the substrate 10, and thicknesses of the first combined structure 80 and the second combined structure 90 are both quarter of a center wavelength of the tunable thermo-optic filter.
In a specific implementation process, the first reflector 20 and the second reflector 40 are arranged in pairs, and the number of the first combined structures 80 and the number of the second combined structures 90 arranged in a stacked manner are equal, for example, two first combined structures 80 are arranged, and two second combined structures 90 are also arranged; for another example, as shown in fig. 3, three first combination structures 80 are provided, and three second combination structures 90 are provided. In the practical application process, the larger the number of the first combined structures 80 and the second combined structures 90 stacked together, the narrower the half-wave bandwidth of the resonant peak of the tunable thermo-optical filter is, and accordingly, the narrow-band filtering effect of the tunable thermo-optical filter can be achieved. In a specific implementation process, the number of stacked first combined structures 80 and second combined structures 90 may be set according to specific requirements of the narrow-band or wide-band filtering performance of the tunable thermo-optical filter, and is not limited herein.
In a specific implementation process, each first combination structure 80 includes a first dielectric layer 801 and a second dielectric layer 802 that sequentially depart from the substrate 10, and each second combination structure 90 includes a third dielectric layer 901 and a fourth dielectric layer 902 that sequentially depart from the substrate 10, where a refractive index of the first dielectric layer 801 is greater than a refractive index of the second dielectric layer 802, and a refractive index of the third dielectric layer 901 is greater than the refractive index of the fourth dielectric layer 902, so that when light propagates to the second mirror 40 via the first mirror 20, the light can be fully utilized. In a specific implementation, the thickness of each dielectric layer in the first combination structure 80 and the second combination structure 90 is one quarter of the center wavelength of the tunable thermo-optical filter, where the center wavelength of the tunable thermo-optical filter is generally the center wavelength in the whole modulation bandwidth range. For example, the thickness of the first dielectric layer 801 is h1, the refractive index thereof is n1, the thickness of the second dielectric layer 802 is h2, the refractive index thereof is n2, and the central wavelength in the entire modulation bandwidth range is λ, in a specific setting, the thickness h1 of the first dielectric layer 801 may be set to λ/4n1, and the thickness h2 of the second dielectric layer 802 may be set to λ/4n2. Therefore, the filtering performance of the tunable thermo-optic filter can be effectively improved.
In the embodiment of the present invention, the materials of the first dielectric layer 801 and the third dielectric layer 901 are the same, and the thicknesses of the first dielectric layer 801 and the third dielectric layer 901 are the same, for example, the thicknesses are both h1; the second dielectric layer 802 and the fourth dielectric layer 902 are made of the same material, and the second dielectric layer 802 and the fourth dielectric layer 902 have the same thickness, for example, the thicknesses are both h2; in this way, the first mirror 20 and the second mirror 40 can be fabricated only by a simple stack design, and then the tunable thermo-optic filter can be fabricated, thereby improving the filtering performance of the tunable thermo-optic filter.
In a specific implementation process, the material of the first dielectric layer 801 and the third dielectric layer 901 may be a-Si, P-Si, si 3 N 4 、TiO 2 Any of the materials of the second dielectric layer 802 and the fourth dielectric layer 902 may be SiO 2 、MgF 2 、CaF 2 Any one of the above. In practical applications, the materials of the dielectric layers in the first mirror 20 and the second mirror 40 may be selected according to the wavelength range in which the center wavelength of the tunable thermo-optical filter is located.
In the embodiment of the present invention, the shape of the orthographic projection of the microstructure 50 on the substrate 10 is any one of a circle, a square, and a rectangle. Fig. 2 is a schematic structural diagram showing an orthographic projection of the microstructure 50 on the substrate 10 in a square shape. In a specific implementation process, the shape of the microstructure 50 may be a sphere, a cylinder, or a square column, which is not limited herein, so that the diversified design of the tunable thermo-optical filter is realized while the diversified design of the super-surface structure 30 is realized.
In the embodiment of the present invention, the material of the microstructure 50 is a-Si, p-Si, si 3 N 4 、SiO 2 Any one of the above. In the specific implementation process, the material of the microstructure 50 may be selected according to the wavelength range in which the center wavelength of the tunable thermo-optical filter to be designed is located, for example, when the center wavelength of the tunable thermo-optical filter is in the visible light band of 405nm to 750nm, the material of the microstructure 50 may be selected to be TiO 2 Or Si 3 N 4 (ii) a For another example, when the center wavelength of the tunable thermo-optic filter is in the near-infrared band of 800nm to 2 μm, the material of the microstructure 50 may be selected to be a-Si or p-Si; as another example, in tunable thermo-optic filteringWhen the center wavelength of the device is in the mid-infrared band of 2 μm to 25 μm, the material of the microstructure 50 may be Ge or Si. Of course, it will be apparent to those skilled in the art that other materials may be selected to fabricate the microstructure 50 according to the wavelength range of the center wavelength of the tunable thermo-optic filter to be designed, and will not be described in detail herein.
In the embodiment of the present invention, the material of the thermo-optical effect structure 70 is SU8 glue, PMMA, and may also be other polymers, such as TZ-001. The thermo-optical coefficients of the SU8 glue, the PMMA and the TZ-001 are high, and the thermo-optical effect structure 70 can be directly manufactured by spin coating and then cured, so that the manufacturing process is simple, and the manufacturing cost of the tunable thermo-optical filter is reduced.
In the embodiment of the present invention, the thermo-optic coefficient of the thermo-optic effect structure 70 is-3.5
10 -4 K -1 When the microstructure 50 made of a-Si is used, its thermo-optic coefficient is 1.8
10 -4 K -1 Since the volume of the microstructure 50 is much smaller than the volume of the thermo-optical effect, the thermo-optical effect of the tunable thermo-optical filter mainly comes from the thermo-optical effect structure 70; when the microstructure 50 made of SiO2 is used, the thermo-optic coefficient is 1.0
10 -5 K -1 The thermo-optic coefficient of the microstructure 50 is smaller than the thermo-optic effect, so that the thermo-optic effect of the tunable thermo-optic filter is mainly from the thermo-optic effect structure 70. Therefore, in the tuning process of the tunable thermo-optic filter, only the thermo-optic effect structure 70 needs to be heated by the heating structure 60 at different temperature values, the whole tuning process is simpler, and the tuning accuracy is higher.
In the process of practical research on the tunable thermo-optical filter, the inventor carries out the model corresponding to the tunable thermo-optical filter in the mid-infrared bandAnd (6) simulation. Wherein the thickness of the first dielectric layer 801 and the thickness h1 of the third dielectric layer 901 are 112nm, and the materials are both SiO 2 The refractive index is 1.45, the thickness of the second dielectric layer 802 and the thickness h2 of the fourth dielectric layer 902 are 258nm, the materials are all alpha-Si, the refractive index is 3.4, and the number of the first combined structure 80 and the second combined structure 90 which are stacked is four; the thickness 3 of the thermo-optical effect structure 70 is 1200nm, the thickness h4 of the microstructure 50 is 400nm, and the period is 600nm; the orthographic projection shape of the microstructure 50 on the substrate is square, the side length L of the microstructure is 230nm, the material is a-Si, the corresponding refractive index is 3.4, the material of the thermo-optical effect structure 70 is SU8 glue, the refractive index is 1.57, and the thermo-optical coefficient is-3.5
10 -4 K -1 The substrate 10 is made of quartz glass, the refractive index is 1.45, and the thickness is 258nm; the light source incident on the first reflector 20 is of plane wave type and has a light source area size of 600nm
The simulation area size is 600nm
The corresponding simulation results are shown in fig. 4.
Based on the tunable thermo-optic filter, the center wavelength of the tunable thermo-optic filter is in the near infrared band, and the position of the tunable wavelength can be freely changed by adjusting corresponding structural parameters.
Tunable thermo-optical filters typically satisfy the following formula:
wherein D represents the diameter of the microstructure 50 in the orthographic projection shape of the substrate 10, neff represents the equivalent refractive index of the microstructure 50,
which represents the thermo-optic coefficient of the light,
respectively, the thermal expansion coefficients are small and almost negligible in the tunable thermo-optic filter, so that only the effect caused by the thermo-optic coefficients is considered. The thermo-optical effect structures 70 were adjusted to 25 deg.C, 28 deg.C, 31 deg.C, and 34 deg.C, respectively, by heating the structure 60, and the simulation results are shown in FIG. 5. As can be seen from fig. 5, since the thermo-optic coefficient of the SU8 glue is negative, when the temperature rises, the resonant wavelength shifts to a low wavelength, thereby achieving the tunable effect of the tunable thermo-optic filter. In other words, the tunable thermo-optic filter provided by the embodiment of the invention has better filtering performance.
Based on the same inventive concept, as shown in fig. 6, an embodiment of the present invention further provides a method for adjusting a tunable thermo-optical filter, including:
s101: heating the thermo-optical effect structure to the first temperature value through an external power supply electrically connected with the heating structure, and determining that the central wavelength of the tunable thermo-optical filter is the first numerical value;
in the specific implementation process, the external power supply can be a direct current power supply or an alternating current power supply. The external power supply is electrically connected with the heating structure, so that the thermo-optical effect structure can be directly heated to a first temperature value through the external power supply, and the central wavelength of the tunable thermo-optical filter is determined to be a first numerical value.
S102: and heating the thermo-optical effect structure to the second temperature value through the external power supply, and adjusting the central wavelength of the tunable thermo-optical filter to the second value.
In the tuning process of the tunable thermo-optical filter, the thermo-optical effect structure can be heated to a second temperature value through an external power supply, so that the central wavelength of the tunable thermo-optical filter is adjusted to a second value. In the whole tuning process, the central wavelength of the tunable thermo-optic filter can be adjusted only by adjusting the current temperature value of the thermo-optic effect structure through the heating structure, the whole tuning process is simple and efficient, and the filtering performance of the tunable thermo-optic filter is good.
In the embodiment of the present invention, the principle of solving the problem of the adjusting method of the tunable thermo-optical filter is similar to that of the tunable thermo-optical filter, so the implementation of the adjusting method of the tunable thermo-optical filter can refer to the implementation of the tunable thermo-optical filter, and the repeated parts are not described again.
Based on the same inventive concept, as shown in fig. 7, an embodiment of the present invention further provides a method for manufacturing a tunable thermo-optical filter, including:
s201: depositing the first mirror on the substrate;
s202: depositing a whole dielectric layer on the first reflector;
s203: etching the dielectric layer to form the plurality of microstructures;
s204: plating the heating structure around the plurality of microstructures;
s205: coating the thermo-optic effect structure covering the plurality of microstructures and the heating structure to form the super-surface structure comprising the plurality of microstructures, the heating structure, and the thermo-optic effect structure;
s206: and attaching the second reflector to the thermo-optic effect structure.
In the implementation process, the implementation process of step S201 to step S206 is as follows:
first, depositing a first reflector on a substrate, for example, when the first reflector includes a first combined structure, sequentially depositing a first dielectric layer and a second dielectric layer on the substrate; then, depositing an entire dielectric layer, e.g., an entire a-Si layer, on the first mirror; then, etching the dielectric layer to form a plurality of microstructures; then, plating a heating structure around the plurality of microstructures, specifically plating a circle of heating structure around the plurality of microstructures; and then coating a thermo-optical effect structure covering the plurality of micro-structures and the heating structure to form a super-surface structure comprising the plurality of micro-structures, the heating structure and the thermo-optical effect structure, so that an integrated structure comprising the super-surface structure and the first reflecting mirror is formed. And then, attaching the second reflecting mirror to the thermo-optical effect structure. In the specific implementation process, the first reflector and the second reflector are independently manufactured, and after the integrated structure comprising the super-surface structure and the first reflector is arranged, the second reflector and the integrated structure are aligned to form the tunable thermo-optic filter.
In the embodiment of the present invention, the principle of the method for manufacturing the tunable thermo-optical filter to solve the problem is similar to that of the tunable thermo-optical filter, so the implementation of the method for manufacturing the tunable thermo-optical filter can refer to the implementation of the tunable thermo-optical filter, and the repeated parts are not described again.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (9)
1. A tunable thermo-optic filter, comprising:
the device comprises a substrate, a first reflector, a super-surface structure and a second reflector, wherein the first reflector, the super-surface structure and the second reflector are sequentially arranged away from the substrate;
the super-surface structure comprises a plurality of microstructures which are periodically arranged, a heating structure which surrounds the microstructures, and a thermo-optical effect structure which covers the microstructures and the heating structure, wherein the microstructures and the heating structure are both positioned on one side, away from the substrate, of the first reflector, and the thickness of the thermo-optical effect structure is larger than that of the microstructures; the heating structure is used for heating the thermo-optical effect structure, when the thermo-optical effect structure is at a first temperature value, the central wavelength of the tunable thermo-optical filter is a first numerical value, and when the thermo-optical effect structure is at a second temperature value different from the first temperature value, the central wavelength of the tunable thermo-optical filter is a second numerical value different from the first numerical value.
2. The tunable thermo-optic filter of claim 1, wherein the first mirror and the second mirror are both distributed bragg gratings, the first mirror includes at least one first combined structure, each first combined structure includes a first dielectric layer and a second dielectric layer that sequentially face away from the substrate, the second mirror includes at least one second combined structure, each second combined structure sequentially faces away from a third dielectric layer and a fourth dielectric layer of the substrate, and the thickness of the first combined structure and the thickness of the second combined structure are both one quarter of the center wavelength of the tunable thermo-optic filter.
3. The tunable thermo-optic filter of claim 2, wherein the first dielectric layer and the third dielectric layer are the same material and have the same thickness, the second dielectric layer and the fourth dielectric layer are the same material and have the same thickness.
4. The tunable thermo-optic filter of claim 1, wherein an orthographic projection of the microstructure on the substrate is any one of a circle, a square, and a rectangle.
5. The tunable thermo-optic filter of claim 1, wherein the material of the microstructure is a-Si, p-Si, si 3 N 4 、SiO 2 Any one of the above.
6. The tunable thermo-optic filter of claim 1, wherein the material of the thermo-optic effect structure comprises SU8 glue, PMMA.
7. The tunable thermo-optic filter of claim 1, wherein the thermo-optic effect structure has a thermo-optic coefficient of-3.5
10 -4 K -1 。
8. A method of tuning a tunable thermo-optic filter according to any of claims 1-7, comprising:
heating the thermo-optic effect structure to the first temperature value through an external power supply electrically connected with the heating structure, and determining the central wavelength of the tunable thermo-optic filter to be the first numerical value;
and heating the thermo-optical effect structure to the second temperature value through the external power supply, and adjusting the central wavelength of the tunable thermo-optical filter to the second value.
9. A method of fabricating a tunable thermo-optic filter according to any of claims 1 to 7, comprising:
depositing the first mirror on the substrate;
depositing a whole dielectric layer on the first reflector;
etching the dielectric layer to form a plurality of microstructures;
plating the heating structure around the plurality of microstructures;
coating the thermo-optic effect structure covering the plurality of microstructures and the heating structure to form the super-surface structure comprising the plurality of microstructures, the heating structure and the thermo-optic effect structure;
and attaching the second reflector to the thermo-optic effect structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010528229.8A CN111580288B (en) | 2020-06-11 | 2020-06-11 | Tunable thermo-optical filter, adjusting method and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010528229.8A CN111580288B (en) | 2020-06-11 | 2020-06-11 | Tunable thermo-optical filter, adjusting method and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111580288A CN111580288A (en) | 2020-08-25 |
| CN111580288B true CN111580288B (en) | 2023-02-28 |
Family
ID=72121908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010528229.8A Active CN111580288B (en) | 2020-06-11 | 2020-06-11 | Tunable thermo-optical filter, adjusting method and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111580288B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115793342B (en) * | 2022-12-07 | 2024-03-26 | 西北工业大学宁波研究院 | All-solid-state multichannel dynamic adjustable spectrum filter device and preparation method thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3031394B2 (en) * | 1992-03-09 | 2000-04-10 | 日本電信電話株式会社 | Transmission wavelength control method |
| US20030087121A1 (en) * | 2001-06-18 | 2003-05-08 | Lawrence Domash | Index tunable thin film interference coatings |
| US7049004B2 (en) * | 2001-06-18 | 2006-05-23 | Aegis Semiconductor, Inc. | Index tunable thin film interference coatings |
| US7564612B2 (en) * | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
| CN102087371A (en) * | 2010-12-10 | 2011-06-08 | 福州高意通讯有限公司 | Optical slice heating method and tunable FP (Fabry-Perot) filter |
| WO2014208892A1 (en) * | 2013-06-26 | 2014-12-31 | 주식회사 포벨 | Optical receiver using wavelength tunable filter |
| CN104714311B (en) * | 2015-04-09 | 2018-07-31 | 上海新微技术研发中心有限公司 | MEMS thermo-optic tunable filter with low optical loss |
| CN110146949B (en) * | 2019-05-29 | 2022-06-14 | 西北工业大学深圳研究院 | Narrow-band spectrum filtering structure and manufacturing method thereof |
-
2020
- 2020-06-11 CN CN202010528229.8A patent/CN111580288B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN111580288A (en) | 2020-08-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11543653B2 (en) | Device components formed of geometric structures | |
| US7139459B2 (en) | Spectral filter for green and longer wavelengths | |
| US20110085232A1 (en) | Multi-spectral filters, mirrors and anti-reflective coatings with subwavelength periodic features for optical devices | |
| CN110146949B (en) | Narrow-band spectrum filtering structure and manufacturing method thereof | |
| CN104570184B (en) | One can the miniature light filter in integrated arrowband | |
| CN102621714A (en) | Silicon on insulator (SOI) and polymer mixture integrated Fabry-Perot (F-P) resonant cavity tunable optical filter and preparation method thereof | |
| CN115421295A (en) | Design method of super lens, super lens and processing technology | |
| CN111580288B (en) | Tunable thermo-optical filter, adjusting method and manufacturing method thereof | |
| KR102096682B1 (en) | Device for controlling the phase of an optical wavefront | |
| CN109270626B (en) | Adjustable grating filter based on SOI wafer and preparation method | |
| US20220268995A1 (en) | Thin film optical waveguide and preparation method therefor | |
| EP3227750B1 (en) | Stress-tuned planar lightwave circuit and method therefor | |
| US20210181542A1 (en) | Tunable Spectral Filters | |
| US11543571B2 (en) | Angle- and polarization-insensitive narrow-band optical filters using resonant cavities | |
| KR100860558B1 (en) | Wavelength changing device and manufacturing method thereof | |
| KR101891912B1 (en) | Structural color filter and method of maunfacturing the structural color filter | |
| TW455702B (en) | Tunable fabry-perot filter having a movable tuning element | |
| CN207440323U (en) | A kind of polarization uncorrelated broadband reflection grating of 1550 nano wavebands of optic communication | |
| CN113866879B (en) | Bragg grating-based reflector, manufacturing method thereof and photoelectric device | |
| CN115032746B (en) | Runway-type micro-ring cavity capable of realizing self-accurate phase matching frequency conversion | |
| WO2016181895A1 (en) | Optical element | |
| CN114935789B (en) | Narrow-band optical filter and preparation method thereof | |
| Park et al. | Wavelength tunable thermo-optic filter using buckling effect of etalon composed poly-Si/SiO2 multi-layers | |
| Liu et al. | Liquid Crystal Tunable Narrow Linewidth Filter Based On Subwavelength Gratings Reflector | |
| CN117191190A (en) | Integrated broadband micro-optical electro-mechanical Fabry-Perot filter chip array and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |