CN111505478A - Core superconducting Josephson junction testing device and testing method - Google Patents
Core superconducting Josephson junction testing device and testing method Download PDFInfo
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- CN111505478A CN111505478A CN202010374997.2A CN202010374997A CN111505478A CN 111505478 A CN111505478 A CN 111505478A CN 202010374997 A CN202010374997 A CN 202010374997A CN 111505478 A CN111505478 A CN 111505478A
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Abstract
The invention belongs to the technical field of quantum chips, and particularly relates to a core superconducting Josephson junction testing device and a testing method, wherein a core superconducting Josephson junction is positioned on a substrate of a superconducting quantum chip and is used for forming a superconducting quantum bit; the test device includes: an auxiliary superconducting Josephson junction disposed on the substrate in the vicinity of the core superconducting Josephson junction and having a structure, dimensions and material identical to the core superconducting Josephson junction; a measuring device electrically connected to the auxiliary superconducting Josephson junction for measuring a performance parameter of the auxiliary superconducting Josephson junction. The device can reduce the test difficulty, improve the accuracy and reliability of the test result, and can not damage the integrity of the superconducting qubit where the core superconducting Josephson junction is located, thereby being beneficial to improving the production efficiency of the qubit and the quantum chip.
Description
Technical Field
The invention belongs to the technical field of quantum chips, and particularly relates to a core superconducting Josephson junction testing device and a testing method.
Background
The quantum chip is a core device for realizing quantum computation, and is provided with various components, wherein a superconducting Josephson junction (marked as a core superconducting Josephson junction) serving as a core component of the superconducting quantum chip is a three-layer structure of a superconducting material layer, an insulating layer and a superconducting material layer, and is used for being connected with a ground capacitor in parallel to form a superconducting qubit. The performance of the superconducting josephson junction directly affects the overall performance of the superconducting qubit, and therefore the prepared superconducting josephson junction must be examined to determine whether its performance parameters are acceptable.
The current device for detecting the core superconducting Josephson junction is usually limited to the test instrument itself, and does not consider the chip itself where the core superconducting Josephson junction is located. In order to realize the measurement of the performance parameters of the core superconductive Josephson junction by the test instrument, the existing test device which only limits the test instrument has limitation in use due to the structural limitation:
for example, the quantum chip is required to be taken as a whole, a test instrument is electrically connected with the quantum chip at the periphery of the quantum chip to test the overall performance of the quantum chip, and then the performance of the core superconducting josephson junction on the quantum chip is presumed, so that the test difficulty is increased, and the accuracy of a test result is reduced; for another example: the method comprises the steps of destroying a surface protection film layer of a core superconducting Josephson junction on a quantum chip, directly electrically connecting a test instrument with the core superconducting Josephson junction for performance parameter test, and repairing the core superconducting Josephson junction for surface protection film layer after test to obtain a quantum bit. In the whole process, the test difficulty is increased, the reliability of the test result is reduced, and the integrity of the superconducting qubit where the core superconducting Josephson junction is located is damaged, so that the performance of the superconducting qubit is affected irreversibly, and the production efficiency of the qubit and the quantum chip is affected.
Disclosure of Invention
Aiming at the defects and shortcomings of the prior art, the invention provides a core superconducting Josephson junction testing device and a testing method.
An embodiment of the present invention provides a core superconducting josephson junction test apparatus, wherein the core superconducting josephson junction is located on a substrate of a superconducting quantum chip for constituting a superconducting qubit; characterized in that, the testing device includes:
an auxiliary superconducting Josephson junction disposed on the substrate in the vicinity of the core superconducting Josephson junction and having a structure, dimensions and material identical to the core superconducting Josephson junction;
a measuring device electrically connected to the auxiliary superconducting Josephson junction for measuring a performance parameter of the auxiliary superconducting Josephson junction.
The core superconducting josephson junction testing device comprises a superconducting layer, a superconducting layer and a conductive electrode, wherein the superconducting layer is connected with the conductive electrode, and the conductive electrode and/or the auxiliary superconducting josephson junction is electrically connected with the measuring device.
The core superconducting Josephson junction testing device comprises a conductive electrode, an auxiliary superconducting Josephson junction, a superconducting layer and a conductive film layer, wherein the conductive electrode and/or the superconducting layer of the auxiliary superconducting Josephson junction are/is covered with the conductive film layer;
probes for electrically connecting the conductive electrode and/or the superconducting layer of the auxiliary superconducting Josephson junction with the measuring device can be inserted into the conductive film layer.
The core superconducting Josephson junction testing device comprises a conductive film layer, a first electrode layer, a second electrode layer and a third electrode layer, wherein the conductive film layer is a mixture layer of photoresist and graphite;
or the conductive film layer is an organic semiconductor material layer;
or the conductive film layer is a metal layer, and the chemical corrosion resistance of the metal layer is weaker than that of the superconducting layer.
The core superconducting josephson junction testing apparatus as described above, the auxiliary superconducting josephson junctions being provided at least two, each of the auxiliary superconducting josephson junctions being symmetrically distributed around the core superconducting josephson junction;
the measuring device is simultaneously and electrically connected with the auxiliary superconducting Josephson junctions and is used for measuring performance parameters of the auxiliary superconducting Josephson junctions under the same measuring condition.
The core superconducting josephson junction testing apparatus as described above, the performance parameter comprising one of a voltage-current relationship curve of the superconducting josephson junction, a resistance of the superconducting josephson junction.
The core superconducting josephson junction test apparatus as described above, wherein the core superconducting josephson junction and each of the auxiliary superconducting josephson junctions are prepared and formed simultaneously by the same preparation process.
The core superconducting Josephson junction test apparatus as described above, the auxiliary superconducting Josephson junctions, and the core superconducting Josephson junction and the auxiliary superconducting Josephson junctions are isolated from each other or connected by grounding the substrate,
or part of the auxiliary superconducting Josephson junctions, part of the auxiliary superconducting Josephson junctions and the core superconducting Josephson junction are connected by grounding the substrate.
The core superconducting josephson junction testing apparatus as described above, the measuring apparatus comprising:
measurement condition providing means for electrically connecting each of the auxiliary superconducting josephson junctions at the same time for providing the same measurement condition to each of the auxiliary superconducting josephson junctions;
the signal acquisition and processing device is simultaneously and electrically connected with each auxiliary superconducting Josephson junction and is used for acquiring measurement signals fed back from each auxiliary superconducting Josephson junction and processing each measurement signal to obtain performance parameters of each auxiliary superconducting Josephson junction; wherein the measurement signal comprises a measurement voltage signal and/or a measurement current signal.
The core superconducting josephson junction test apparatus as described above, the measurement condition providing means comprising:
and the measurement voltage providing device is electrically connected with each auxiliary superconducting Josephson junction and is used for simultaneously providing a test voltage for each auxiliary superconducting Josephson junction.
The core superconducting josephson junction test apparatus as described above, the measurement condition providing means further comprising:
one end of the test protection resistor is electrically connected with each auxiliary superconducting Josephson junction, and the other end of the test protection resistor is electrically connected with the measurement voltage supply device.
The core superconducting josephson junction testing apparatus as described above, the signal acquisition processing apparatus comprising a lock-in amplifier;
the measurement condition providing device is also electrically connected with the lock-in amplifier and is used for providing a reference signal for denoising the measurement signal for the lock-in amplifier;
the phase-locked amplifier is electrically connected with each auxiliary superconducting Josephson junction and used for acquiring the measurement signal and carrying out de-noising processing on the measurement signal based on the reference signal to obtain effective measurement signals respectively corresponding to each auxiliary superconducting Josephson junction.
The core superconducting josephson junction test apparatus as described above, the lock-in amplifier being a multichannel lock-in amplifier;
the number of channels of the multichannel lock-in amplifier is equal to the number of auxiliary superconducting Josephson junctions.
The core superconducting josephson junction testing device as described above, the signal acquisition and processing device further comprising a first signal data processing module;
the first signal data processing module is connected with the output end of the multichannel lock-in amplifier and used for processing each effective measurement signal to obtain the performance parameters of each auxiliary superconducting Josephson junction.
The core superconducting josephson junction testing device as described above, the signal acquisition and processing device further comprising a second signal data processing module;
the second signal data processing module is connected with the first signal data processing module and used for obtaining the performance parameters of the core superconducting Josephson junction according to the average performance of the performance parameters of each auxiliary superconducting Josephson junction.
The core superconducting josephson junction testing device as described above, the signal acquisition and processing device further comprising a third signal data processing module;
the third signal data processing module is connected with the first signal data processing module and used for carrying out consistency comparison processing on the performance parameters of the auxiliary superconducting Josephson junctions and judging the accuracy of the test result of each performance parameter according to the comparison result.
Yet another embodiment of the present invention provides a testing method for testing a core superconducting josephson junction using the above testing apparatus, wherein the core superconducting josephson junction is located on a substrate of a superconducting quantum chip for constituting a superconducting qubit; the test method comprises the following steps:
forming an auxiliary superconducting Josephson junction on the substrate, wherein the auxiliary superconducting Josephson junction is located in the vicinity of the core superconducting Josephson junction and has a structure, size and material identical to those of the core superconducting Josephson junction;
at least two auxiliary superconducting Josephson junctions are provided, each of the auxiliary superconducting Josephson junctions being symmetrically distributed around the core superconducting Josephson junction;
arranging a measuring device which is simultaneously and electrically connected with each auxiliary superconducting Josephson junction and measures the performance parameters of each auxiliary superconducting Josephson junction under the same measuring condition;
obtaining performance parameters of the core superconducting Josephson junction from an average performance of the performance parameters of each of the auxiliary superconducting Josephson junctions.
The testing method as described above, further comprising:
the method is used for carrying out consistency comparison processing on the performance parameters of the auxiliary superconducting Josephson junctions and judging the accuracy of the test result of each performance parameter according to the comparison result.
The testing method as described above, wherein the measuring device measures the performance parameters of each of the auxiliary superconducting josephson junctions under the same measurement conditions, comprises:
measuring performance parameters of the respective auxiliary superconducting josephson junctions under the same measurement conditions while the respective auxiliary superconducting josephson junctions are in the substrate connection state with each other through grounding, and the core superconducting josephson junctions and the auxiliary superconducting josephson junctions are in the substrate connection state with each other through grounding; and/or the presence of a gas in the gas,
measuring performance parameters of each of the auxiliary superconducting josephson junctions under the same measurement conditions when the auxiliary superconducting josephson junctions are in an isolated state from each other and the core superconducting josephson junction and the auxiliary superconducting josephson junction are in an isolated state from each other; and/or the presence of a gas in the gas,
measuring a performance parameter of each of the auxiliary superconducting josephson junctions under the same measurement conditions while a portion of the auxiliary superconducting josephson junctions are in an isolated state from each other and the core superconducting josephson junction and a portion of the auxiliary superconducting josephson junctions are in an isolated state from each other.
Compared with the prior art, the core superconducting Josephson junction testing device provided by the invention not only comprises the measuring device, but also comprises the auxiliary superconducting Josephson junction electrically connected with the measuring device, wherein the auxiliary superconducting Josephson junction is arranged on the substrate, is positioned near the core superconducting Josephson junction, and has a structure, a size and a material which are completely consistent with those of the core superconducting Josephson junction. The auxiliary superconducting Josephson junction and the core superconducting Josephson junction are located on the substrate, are located near the core superconducting Josephson junction and have completely consistent structures, sizes and materials with the core superconducting Josephson junction, so that the auxiliary superconducting Josephson junction and the core superconducting Josephson junction have the same performance parameters, and the performance parameters of the core superconducting Josephson junction can be indirectly represented by measuring the performance parameters of the auxiliary superconducting Josephson junction through a measuring device. Compared with the core superconducting Josephson junction detection device adopted in the prior art, the limit is greatly reduced, the test difficulty can be reduced, the accuracy and the reliability of a test result can be improved, the integrity of a superconducting qubit where the core superconducting Josephson junction is located cannot be damaged, the performance of a qubit base and a quantum chip is prevented from being affected by irreversible, and the improvement of the production efficiency of the qubit and the quantum chip is facilitated.
Drawings
Fig. 1 is a schematic diagram of a core superconducting josephson junction testing apparatus according to an embodiment of the present application;
fig. 2 is a schematic view of the auxiliary superconducting josephson junction of the present embodiment, in which a conductive electrode is connected to a superconducting layer and a conductive film layer is disposed;
FIG. 3 is a schematic diagram showing a connection circuit principle and data processing between the measurement apparatus of the present embodiment and an auxiliary superconductive Josephson junction;
fig. 4 is a diagram illustrating a core superconducting josephson junction testing method according to still another embodiment of the present application.
In the figure: 1. a substrate; 2. a core superconducting josephson junction; 3. auxiliary superconducting josephson junctions, 31, conductive electrodes; 32. a conductive film layer; 33. a probe; 4. a measuring device; 41. measurement condition providing means; 411. a measurement voltage supply device; 412. testing the protection resistance; 42. a signal acquisition processing device; 421. a phase-locked amplifier; 422. a first signal data processing module; 423. a second signal data processing module; 424. and the third signal data processing module.
Detailed Description
The quantum chip is a core device for realizing quantum computation, and is provided with various components, wherein a superconducting Josephson junction (marked as a core superconducting Josephson junction) serving as a core component of the superconducting quantum chip is a three-layer structure of a superconducting material layer, an insulating layer and a superconducting material layer, and is used for being connected with a ground capacitor in parallel to form a superconducting qubit. The performance of the superconducting josephson junction directly affects the overall performance of the superconducting qubit, and therefore the prepared superconducting josephson junction must be examined to determine whether its performance parameters are acceptable. How to simply, efficiently, accurately and nondestructively test the performance parameters of core superconducting josephson junctions is a constantly studied problem for those skilled in the art.
The current device for detecting the core superconducting Josephson junction is usually limited to the test instrument itself, and does not consider the chip itself where the core superconducting Josephson junction is located. In order to realize the measurement of the performance parameters of the core superconductive Josephson junction by the test instrument, the existing test device which only limits the test instrument has limitation in use due to the structural limitation:
for example, the quantum chip is required to be taken as a whole, a test instrument is electrically connected with the quantum chip at the periphery of the quantum chip to test the overall performance of the quantum chip, and then the performance of the core superconducting josephson junction on the quantum chip is presumed, so that the test difficulty is increased, and the accuracy of a test result is reduced; for another example: the method comprises the steps of destroying a surface protection film layer of a core superconducting Josephson junction on a quantum chip, directly electrically connecting a test instrument with the core superconducting Josephson junction for performance parameter test, and repairing the core superconducting Josephson junction for surface protection film layer after test to obtain a quantum bit. In the whole process, the reliability of the test result is reduced, and the integrity of the superconducting qubit where the core superconducting Josephson junction is located is damaged, so that the performance of the superconducting qubit is affected irreversibly, and the production efficiency of the qubit and the quantum chip is influenced.
Aiming at the troubles caused by the prior art, the applicant provides a core superconducting Josephson junction testing device and a core superconducting Josephson junction testing method which can solve the troubles through a great deal of work and verification.
As shown in particular in fig. 1, an embodiment of the present application provides a core superconducting josephson junction test device comprising an auxiliary superconducting josephson junction 3 and a measurement device 4.
Wherein, the core superconducting Josephson junction 2 is positioned on a substrate 1 of a superconducting quantum chip and is used for forming a superconducting quantum bit; the auxiliary superconducting Josephson junction 3 is arranged on the substrate 1, is positioned near the core superconducting Josephson junction 2, and has a structure, a size and a material which are completely consistent with those of the core superconducting Josephson junction 2; a measuring device 4 is electrically connected to the auxiliary superconducting josephson junction 3 for measuring a performance parameter of the auxiliary superconducting josephson junction 3.
Compared with the prior art, the core superconducting Josephson junction testing device provided by the invention not only comprises the measuring device 4, but also comprises the auxiliary superconducting Josephson junction 3 electrically connected with the measuring device 4, wherein the auxiliary superconducting Josephson junction 3 is arranged on the substrate 1, is positioned near the core superconducting Josephson junction 2, and has a structure, a size and a material which are completely consistent with those of the core superconducting Josephson junction 2. The auxiliary superconducting josephson junction 3 and the core superconducting josephson junction 2 are located on the substrate 1, are located near the core superconducting josephson junction 2 and have completely consistent structures, dimensions and materials with the core superconducting josephson junction 2, so that the auxiliary superconducting josephson junction 3 and the core superconducting josephson junction 2 have the same performance parameters, and the performance parameters of the core superconducting josephson junction 2 can be indirectly represented by measuring the performance parameters of the auxiliary superconducting josephson junction 3 by the measuring device 4. Compared with the core superconducting Josephson junction detection device adopted in the prior art, the core superconducting Josephson junction detection device has the advantages that the limitation is greatly reduced, the test difficulty can be reduced, the accuracy and the reliability of a test result can be improved, the integrity of a superconducting qubit where the core superconducting Josephson junction is located cannot be damaged, the performance is prevented from being affected by the irreversible influence, and the production efficiency of the qubit and a quantum chip is improved.
As an implementation of this embodiment, fig. 2 is a schematic diagram of a superconducting layer of an auxiliary superconducting josephson junction connected with a conductive electrode and a conductive film layer, a superconducting layer of the auxiliary superconducting josephson junction 3 is connected with a conductive electrode 31, and the conductive electrode 31 and/or the auxiliary superconducting josephson junction 3 is electrically connected with the measuring device 4. Because the auxiliary superconducting josephson junction 3 is limited by the small structure size, the conductive electrode 31 is connected to the superconducting layer of the auxiliary superconducting josephson junction 3, which is helpful for improving the convenience of connecting the measuring device 4 and the auxiliary superconducting josephson junction 3 and reducing the test difficulty.
In a specific configuration, the conductive electrode 31 may be directly made of a superconducting material, may directly cover the superconducting layer, or may be disposed side by side with the superconducting layer, and then the conductive electrode 31 and/or the auxiliary superconducting josephson junction 3 are electrically connected to the measuring device 4. In this embodiment, the conductive electrode 31 is preferably arranged side by side with the superconducting layer, and this can provide an effect of increasing the total available contact area to the outside.
As further shown in fig. 2, a conductive film layer 32 is disposed on the conductive electrode 31 and/or on the superconducting layer of the auxiliary superconducting josephson junction 3; a probe 33 for electrically connecting the conductive electrode 31 and/or the superconducting layer of the auxiliary superconducting josephson junction 3 with the measuring device 4 can be inserted into the conductive film layer 32.
When disposed, the area of the conductive film layer 32 may further cover the conductive electrode 31, the conductive electrode 31 and/or the auxiliary superconducting josephson junction 3. The probe 33 is inserted into the conductive film layer 32 to contact the conductive electrode 31 and/or the superconducting layer of the auxiliary superconducting josephson junction 3 to achieve electrical connection.
The conductive film can play a role in conducting and fixing in the process of realizing the electric connection between the probe 33 and the conductive electrode 31 and/or the superconducting layer of the auxiliary superconducting Josephson junction 3, so that the problems of unstable electric connection between the probe 33 and the conductive electrode 31 and/or the auxiliary superconducting Josephson junction 3 in direct contact and the like are solved.
The whole arrangement of the conductive film layer 32 further improves the convenience of connecting the measuring device 4 and the auxiliary superconducting Josephson junction 3, and reduces the testing difficulty. Meanwhile, the conductive film layer 32 realizes the electric contact between the superconducting Josephson junction and the probe 33 and protects the superconducting Josephson junction from being damaged by the probe 33, so that the nondestructive contact test is realized. The structure and the method are simple as a whole, low in cost and high in testing efficiency.
The conductive film layer 32 used above may be a mixture layer of photoresist and graphite, or an organic semiconductor material layer, or a metal layer. In the case of the metal layer, the metal layer has a chemical resistance weaker than that of the superconducting layer. The selection of the above materials not only ensures the convenient and smooth realization of the test process, but also considers that the subsequent treatment of the conductive film layer 32 does not influence the overall performance of the quantum chip after the test is completed, namely, the test setting is ensured not to influence the overall performance of the quantum chip.
Illustratively, when a mixture layer of photoresist and graphite is selected as the conductive film layer 32, after the test is completed, the photoresist may be removed with acetone, the graphite may be dispersed in ethanol and sonicated, the remaining graphite may be incinerated with oxygen, and cleaned, such that the quantum chip may be directly formed from the quantum chip test structure.
As another example, when the organic semiconductor material layer is selected as the conductive film layer 32, after the test is completed, the organic semiconductor material layer may be removed by using an organic solvent and washed, so that the quantum chip is directly formed by the quantum chip test structure.
In another example, when the metal layer is selected as the conductive film layer 32, the chemical resistance of the metal layer is required to be weaker than the chemical resistance of the superconducting layer, and after the test is completed, the metal layer may be stripped by using a wet etching process and cleaned, so that the quantum chip is directly formed by the quantum chip test structure.
As an implementation of this embodiment, the auxiliary superconducting josephson junctions 3 are provided with at least two, each of the auxiliary superconducting josephson junctions 3 being symmetrically distributed around the core superconducting josephson junction 2; the measuring device 4 is electrically connected with each auxiliary superconducting josephson junction 3 at the same time and is used for measuring performance parameters of each auxiliary superconducting josephson junction 3 under the same measuring condition.
The number of the auxiliary superconducting Josephson junctions 3 is at least two, the measuring device 4 is simultaneously electrically connected with each auxiliary superconducting Josephson junction 3, and the performance parameters of each auxiliary superconducting Josephson junction 3 under the same measuring condition are measured, so that the accuracy and the reliability of the performance parameter indirect representation result of the core superconducting Josephson junction 2 can be ensured. Meanwhile, the auxiliary superconducting josephson junctions 3 are symmetrically distributed around the core superconducting josephson junction 2, which helps to ensure the consistency of the parameter performance of the auxiliary superconducting josephson junctions 3.
It is understood that a superconducting josephson junction is a three-layer SIS (superconducting-insulating-superconducting) structure having a superconducting tunneling effect, and whether the superconducting tunneling effect is present or not is related to an applied voltage, so that measurement of the three-layer structure can be performed by selecting dynamic parameters, such as a voltage-current relationship curve of the superconducting josephson junction, and also by measuring fixed parameters, such as a resistance of the superconducting josephson junction. Those skilled in the art can set the setting according to their own needs, and the embodiment is not limited in particular.
Further, in order to ensure that the auxiliary superconducting josephson junction 3 and the core superconducting josephson junction 2 have completely consistent structure, size and material, and to ensure that the auxiliary superconducting josephson junction 3 and the core superconducting josephson junction 2 have consistent performance parameters, the core superconducting josephson junction 2 and each auxiliary superconducting josephson junction 3 of the present embodiment may be synchronously prepared and formed through the same preparation process.
It should be noted that, when the quantum chip is in operation, grounding of the substrate 1 of the quantum chip and interference of peripheral signals on the quantum chip as little as possible are a precondition for ensuring good operation of the quantum chip, and in order to make the measurement result reflect the performance of the core superconducting josephson junction 2 in the operating state as much as possible, the quantum chip portion may be set up in a targeted manner when the test device is set up.
Illustratively, the auxiliary superconducting josephson junctions 3, and the core superconducting josephson junction 2 and the auxiliary superconducting josephson junction 3 are isolated from each other or connected by grounding the substrate 1.
For example, the auxiliary superconducting josephson junctions 3, the core superconducting josephson junction 2 and the auxiliary superconducting josephson junction 3 are connected to each other by grounding the substrate 1, and at this time, the performance parameters of the auxiliary superconducting josephson junctions 3 are measured, and the core superconducting josephson junctions 2 are characterized by the measurement results; and/or, the auxiliary superconducting josephson junctions 3, the core superconducting josephson junction 2 and the auxiliary superconducting josephson junction 3 are arranged to be isolated from each other, and at the moment, the performance parameters of the auxiliary superconducting josephson junctions 3 are measured, and the core superconducting josephson junction 2 is represented by the measurement result; and/or arranging part of the auxiliary superconducting Josephson junction 3 and the core superconducting Josephson junction 2 to be connected through grounding the substrate 1, and at the moment, performing performance parameter measurement on the auxiliary superconducting Josephson junction 3 and representing the core superconducting Josephson junction 2 through a measurement result. Through the above thought, the fine measurement result representation is performed pertinently, and the effectiveness and reliability of the representation result are improved.
It should be noted that the above processes are all arranged based on isolation and/or ground connection through the substrate. The present embodiment is not particularly limited by the specific arrangement. The embodiment only protects the performance parameter measurement of the auxiliary superconducting josephson junction 3 based on isolation and/or through substrate connection, so as to improve the reliability and accuracy of the method for representing the core superconducting josephson junction 2 through the performance parameter measurement result of the auxiliary superconducting josephson junction 3.
It should be noted that, in order to realize the measurement of the performance parameters of at least two of the auxiliary superconducting josephson junctions 3 under the same measurement condition, the processing procedure from the structure to the measurement signal of the measurement apparatus 4 adopted in the present embodiment needs to be set specifically.
Further, referring to the connection circuit principle and the data processing schematic diagram of the measurement apparatus and an auxiliary superconducting josephson junction shown in fig. 3, the measurement apparatus 4 of the present embodiment includes: a measurement condition providing device 41 and a signal acquisition processing device 42.
Wherein the measurement condition providing means 41 electrically connects each of the auxiliary superconducting josephson junctions 3 at the same time for providing the same measurement condition to each of the auxiliary superconducting josephson junctions 3; the signal acquisition and processing device 42 is electrically connected with each auxiliary superconducting josephson junction 3 at the same time, and is used for acquiring measurement signals fed back from each auxiliary superconducting josephson junction 3 and processing each measurement signal to obtain performance parameters of each auxiliary superconducting josephson junction 3; wherein the measurement signal comprises a measurement voltage signal and/or a measurement current signal.
Specifically, as shown in fig. 3, the measurement condition providing device 41 includes a measurement voltage providing device 411, and the measurement voltage providing device 411 is electrically connected to each of the auxiliary superconducting josephson junctions 3, and is configured to provide a test voltage to each of the auxiliary superconducting josephson junctions 3 at the same time. In practice, the measurement voltage supply device 411 may be a voltage source device.
Further referring to fig. 3, the measurement condition providing device 41 further includes a test protection resistor 412, one end of the test protection resistor 412 is electrically connected to each of the auxiliary superconducting josephson junctions 3, and the other end is electrically connected to the measurement voltage providing device 411. The measurement voltage supply device 411, the auxiliary superconducting josephson junction 3, and the test protection resistor 412 form a loop, and the auxiliary superconducting josephson junction 3 can be protected by the test protection resistor 412.
Based on the characteristic that the performance parameter value of the superconducting josephson junction is usually small and is easily buried in a noise signal, in the embodiment, please refer to fig. 3, the signal acquisition and processing device 42 of the performance parameter testing device for the superconducting josephson junction may be an instrument including a lock-in amplifier 421. At this time, the measurement condition providing device 41 is further electrically connected to the signal acquisition processing device 42, and is configured to provide the signal acquisition processing device 42 with a reference signal for denoising the measurement signal; namely, a reference signal for denoising the measurement signal is provided to the lock-in amplifier 421 in the signal acquisition processing device 42; the lock-in amplifier 421 is electrically connected to each of the auxiliary superconducting josephson junctions 3, and is configured to acquire the measurement signal, and perform denoising processing on the measurement signal based on the reference signal to obtain effective measurement signals respectively corresponding to each of the auxiliary superconducting josephson junctions 3.
In a specific implementation, the lock-in amplifier 421 is a multi-channel lock-in amplifier 421; the number of channels of the multichannel lock-in amplifier 421 is equal to the number of the auxiliary superconducting josephson junctions 3, so as to ensure that the measurement signals of each auxiliary superconducting josephson junction 3 are separately collected and processed.
Further, as shown in fig. 3, the signal acquisition and processing device 42 further includes a first signal data processing module 422; the first signal data processing module 422 is connected to the output end of the multichannel lock-in amplifier 421, and is configured to process each effective measurement signal to obtain a performance parameter of each auxiliary superconducting josephson junction 3.
It should be noted that, the process of processing the effective measurement signal to obtain the performance parameter of each of the auxiliary superconducting josephson junctions 3 may be performed according to the performance parameter required for setting and the type of the measurement signal.
For example, the measurement signals are voltage signals and current signals, and the required performance parameters are voltage-current relation curves, and the curves are directly drawn. In another example, the measurement signals are voltage signals and current signals, and the required performance parameter is resistance, and then signal processing is performed according to the relationship between voltage, current and resistance.
Further, referring to fig. 3, the signal acquisition and processing device 42 further includes a second signal data processing module 423; the second signal data processing module 423 is connected to the first signal data processing module 422, and is configured to obtain the performance parameters of the core superconducting josephson junction 2 according to an average performance of the performance parameters of each of the auxiliary superconducting josephson junctions 3.
Due to the fact that performance parameters of at least two auxiliary superconducting josephson junctions 3 are set, the performance parameters of the core superconducting josephson junction 2 are obtained through the average performance of the performance parameters of each auxiliary superconducting josephson junction 3, measurement errors can be reduced through signal data averaging, and the unreliability of the performance parameters of the core superconducting josephson junction 2 obtained through the performance parameters of only one auxiliary superconducting josephson junction 3 is further reduced.
Further, referring to fig. 3, when at least three auxiliary superconducting josephson junctions 3 are provided, the signal acquisition processing device 42 may further include a third signal data processing module 424; the third signal data processing module 424 is connected to the first signal data processing module 422, and is configured to perform consistency comparison processing on the performance parameters of each of the auxiliary superconducting josephson junctions 3, and determine the accuracy of the test result of each of the performance parameters according to the comparison result. When at least three auxiliary superconducting josephson junctions 3 are provided, the accuracy of the test result of each performance parameter can be judged by performing consistency comparison processing on the performance parameter of each auxiliary superconducting josephson junction 3 and comparing the results. Illustratively, when the measured performance parameters of each of the auxiliary superconducting josephson junctions 3 are consistent or within a preset error range, the test result of each of the performance parameters is verified to be accurate, and the accuracy, the effectiveness and the reliability of the test device are also verified.
The core superconducting Josephson junction testing device provided by the embodiment can simply, efficiently, accurately and nondestructively test the performance parameters of the core superconducting Josephson junction 2, and ensure the performance of a quantum chip after testing,
in addition, as shown in fig. 4, a further embodiment of the present application provides a core superconducting josephson junction testing method, wherein the core superconducting josephson junction is located on a substrate of a superconducting quantum chip for constituting a superconducting qubit; the test method comprises the following steps:
step S1, forming an auxiliary superconducting josephson junction on the substrate, wherein the auxiliary superconducting josephson junction is located near the core superconducting josephson junction and has a structure, a size and a material completely consistent with those of the core superconducting josephson junction;
the auxiliary superconducting Josephson junctions are arranged in at least two, each of the auxiliary superconducting Josephson junctions being symmetrically distributed around the core superconducting Josephson junction.
Step S2, setting a measuring device, wherein the measuring device is simultaneously and electrically connected with each auxiliary superconducting Josephson junction, and measuring the performance parameters of each auxiliary superconducting Josephson junction under the same measuring conditions;
step S3, obtaining the performance parameters of the core superconductive Josephson junctions according to the average performance of the performance parameters of each auxiliary superconductive Josephson junction.
The invention provides a core superconducting Josephson junction test method, which comprises the steps of arranging a measuring device and an auxiliary superconducting Josephson junction electrically connected with the measuring device, wherein the auxiliary superconducting Josephson junction is arranged on a substrate and is positioned near the core superconducting Josephson junction, and the auxiliary superconducting Josephson junction and the core superconducting Josephson junction have completely consistent structure, size and material; and obtaining the performance parameters of the core superconducting Josephson junction according to the average performance of the performance parameters of each auxiliary superconducting Josephson junction. In the whole process, the provided auxiliary superconducting Josephson junction and the core superconducting Josephson junction are positioned on the substrate, are positioned near the core superconducting Josephson junction and have the structure, the size and the material which are completely consistent with those of the core superconducting Josephson junction, so that the auxiliary superconducting Josephson junction and the core superconducting Josephson junction have the same performance parameters, and the performance parameters of the core superconducting Josephson junction can be indirectly represented through the performance parameter measurement result obtained by measuring the auxiliary superconducting Josephson junction by using the measuring device. Meanwhile, at least two auxiliary superconducting Josephson junctions which are symmetrically distributed around the core superconducting Josephson junction are arranged, performance parameters of the auxiliary superconducting Josephson junctions are obtained, the performance parameters of the core superconducting Josephson junctions are obtained through the average performance of the performance parameters of the auxiliary superconducting Josephson junctions, and the reliability and the accuracy of test results are guaranteed from the source and the test process.
The whole testing process is low in difficulty, the accuracy and the reliability of the testing result are high, the integrity of the superconducting qubit where the core superconducting Josephson junction is located cannot be damaged, the performance of the superconducting qubit is prevented from being affected by the irreversible influence, and the production efficiency of the qubit and the quantum chip is improved.
Further, when at least three of the auxiliary superconducting josephson junctions are provided, the testing method further comprises:
step S4, the performance parameters of each auxiliary superconductive Josephson junction are compared in a consistent mode, and the accuracy of the test result of each performance parameter is judged according to the comparison result.
When at least three auxiliary superconducting Josephson junctions are arranged, consistency comparison processing can be carried out on performance parameters of each auxiliary superconducting Josephson junction, and the accuracy of the test result of each performance parameter is judged according to the comparison result. Illustratively, when the measured performance parameters of each auxiliary superconducting josephson junction are consistent or within a preset error range, the test result of each performance parameter is verified to be accurate, and the accuracy, the effectiveness and the reliability of the test method are also verified.
Further, the measuring device measures performance parameters of each of the auxiliary superconducting josephson junctions under the same measurement condition, including:
measuring performance parameters of the respective auxiliary superconducting josephson junctions under the same measurement conditions while the respective auxiliary superconducting josephson junctions are in the substrate connection state with each other through grounding, and the core superconducting josephson junctions and the auxiliary superconducting josephson junctions are in the substrate connection state with each other through grounding; and/or the presence of a gas in the gas,
measuring performance parameters of each of the auxiliary superconducting josephson junctions under the same measurement conditions when the auxiliary superconducting josephson junctions are in an isolated state from each other and the core superconducting josephson junction and the auxiliary superconducting josephson junction are in an isolated state from each other; and/or the presence of a gas in the gas,
measuring a performance parameter of each of the auxiliary superconducting josephson junctions under the same measurement conditions while a portion of the auxiliary superconducting josephson junctions are in an isolated state from each other and the core superconducting josephson junction and a portion of the auxiliary superconducting josephson junctions are in an isolated state from each other.
Through the above thought, the fine measurement result representation is performed pertinently, and the effectiveness and reliability of the representation result are improved. It should be noted that the above processes are all arranged based on isolation and/or ground connection through the substrate 1. The present embodiment is not particularly limited by the specific arrangement. The embodiment only protects the performance parameter measurement of the auxiliary superconducting josephson junction 3 based on isolation and/or through substrate connection, so as to improve the reliability and accuracy of the method for representing the core superconducting josephson junction 2 through the performance parameter measurement result of the auxiliary superconducting josephson junction 3. The construction, features and functions of the present invention are described in detail in the embodiments illustrated in the drawings, which are only preferred embodiments of the present invention, but the present invention is not limited by the drawings, and all equivalent embodiments modified or changed according to the idea of the present invention should fall within the protection scope of the present invention without departing from the spirit of the present invention covered by the description and the drawings.
Claims (19)
1. A core superconducting Josephson junction test device, wherein the core superconducting Josephson junction is located on a substrate of a superconducting quantum chip for constituting a superconducting qubit; characterized in that, the testing device includes:
an auxiliary superconducting Josephson junction disposed on the substrate in the vicinity of the core superconducting Josephson junction and having a structure, dimensions and material identical to the core superconducting Josephson junction;
a measuring device electrically connected to the auxiliary superconducting Josephson junction for measuring a performance parameter of the auxiliary superconducting Josephson junction.
2. The core superconducting Josephson junction test device of claim 1,
and a conductive electrode is connected on the superconducting layer of the auxiliary superconducting Josephson junction, and the conductive electrode and/or the auxiliary superconducting Josephson junction are/is electrically connected with the measuring device.
3. The core superconducting josephson junction test device of claim 2, wherein: a conductive film layer is covered on the conductive electrode and/or the superconducting layer of the auxiliary superconducting Josephson junction;
probes for electrically connecting the conductive electrode and/or the superconducting layer of the auxiliary superconducting Josephson junction with the measuring device can be inserted into the conductive film layer.
4. The core superconducting Josephson junction test device of claim 3,
the conductive film layer is a mixture layer of photoresist and graphite;
or the conductive film layer is an organic semiconductor material layer;
or the conductive film layer is a metal layer, and the chemical corrosion resistance of the metal layer is weaker than that of the superconducting layer.
5. The core superconducting josephson junction testing apparatus of any one of claims 1-4, wherein at least two of said auxiliary superconducting josephson junctions are provided, each of said auxiliary superconducting josephson junctions being symmetrically distributed around said core superconducting josephson junction;
the measuring device is simultaneously and electrically connected with the auxiliary superconducting Josephson junctions and is used for measuring performance parameters of the auxiliary superconducting Josephson junctions under the same measuring condition.
6. The core superconducting josephson junction testing apparatus of claim 5, wherein the performance parameter comprises one of a voltage-current relationship curve of the superconducting josephson junction, a resistance of the superconducting josephson junction.
7. The core superconducting josephson junction testing apparatus of claim 5, wherein the core superconducting josephson junction and each of the auxiliary superconducting josephson junctions are fabricated simultaneously via the same fabrication process.
8. The core superconducting Josephson junction testing apparatus of claim 5, wherein the auxiliary superconducting Josephson junctions, and the core and auxiliary superconducting Josephson junctions are isolated from each other or connected by grounding the substrate,
or part of the auxiliary superconducting Josephson junctions, part of the auxiliary superconducting Josephson junctions and the core superconducting Josephson junction are connected by grounding the substrate.
9. The core superconducting josephson junction testing device of claim 5, wherein the measuring device comprises:
measurement condition providing means for electrically connecting each of the auxiliary superconducting josephson junctions at the same time for providing the same measurement condition to each of the auxiliary superconducting josephson junctions;
the signal acquisition and processing device is simultaneously and electrically connected with each auxiliary superconducting Josephson junction and is used for acquiring measurement signals fed back from each auxiliary superconducting Josephson junction and processing each measurement signal to obtain performance parameters of each auxiliary superconducting Josephson junction; wherein the measurement signal comprises a measurement voltage signal and/or a measurement current signal.
10. The core superconducting josephson junction test apparatus of claim 9, wherein the measurement condition providing means comprises:
and the measurement voltage providing device is electrically connected with each auxiliary superconducting Josephson junction and is used for simultaneously providing a test voltage for each auxiliary superconducting Josephson junction.
11. The core superconducting josephson junction test apparatus of claim 10, wherein the measurement condition providing means further comprises:
one end of the test protection resistor is electrically connected with each auxiliary superconducting Josephson junction, and the other end of the test protection resistor is electrically connected with the measurement voltage supply device.
12. The core superconducting josephson junction testing device of claim 9, wherein the signal acquisition processing device comprises a lock-in amplifier;
the measurement condition providing device is also electrically connected with the lock-in amplifier and is used for providing a reference signal for denoising the measurement signal for the lock-in amplifier;
the phase-locked amplifier is electrically connected with each auxiliary superconducting Josephson junction and used for acquiring the measurement signal and carrying out de-noising processing on the measurement signal based on the reference signal to obtain effective measurement signals respectively corresponding to each auxiliary superconducting Josephson junction.
13. The core superconducting josephson junction testing device of claim 12, wherein the lock-in amplifier is a multichannel lock-in amplifier;
the number of channels of the multichannel lock-in amplifier is equal to the number of auxiliary superconducting Josephson junctions.
14. The core superconducting josephson junction testing device of claim 12, wherein the signal acquisition processing device further comprises a first signal data processing module;
the first signal data processing module is connected with the output end of the multichannel lock-in amplifier and used for processing each effective measurement signal to obtain the performance parameters of each auxiliary superconducting Josephson junction.
15. The core superconducting josephson junction testing device of claim 14, wherein the signal acquisition processing device further comprises a second signal data processing module;
the second signal data processing module is connected with the first signal data processing module and used for obtaining the performance parameters of the core superconducting Josephson junction according to the average performance of the performance parameters of each auxiliary superconducting Josephson junction.
16. The core superconducting josephson junction testing device of claim 14, wherein the signal acquisition processing device further comprises a third signal data processing module;
the third signal data processing module is connected with the first signal data processing module and used for carrying out consistency comparison processing on the performance parameters of the auxiliary superconducting Josephson junctions and judging the accuracy of the test result of each performance parameter according to the comparison result.
17. A method of testing a core superconducting josephson junction using a testing apparatus according to any one of claims 5 to 16, wherein the core superconducting josephson junction is located on a substrate of a superconducting quantum chip for constituting a superconducting qubit; the method is characterized by comprising the following steps:
forming an auxiliary superconducting Josephson junction on the substrate, wherein the auxiliary superconducting Josephson junction is located in the vicinity of the core superconducting Josephson junction and has a structure, size and material identical to those of the core superconducting Josephson junction;
at least two auxiliary superconducting Josephson junctions are provided, each of the auxiliary superconducting Josephson junctions being symmetrically distributed around the core superconducting Josephson junction;
arranging a measuring device which is simultaneously and electrically connected with each auxiliary superconducting Josephson junction and measures the performance parameters of each auxiliary superconducting Josephson junction under the same measuring condition;
obtaining performance parameters of the core superconducting Josephson junction from an average performance of the performance parameters of each of the auxiliary superconducting Josephson junctions.
18. The testing method of claim 17, further comprising:
the method is used for carrying out consistency comparison processing on the performance parameters of the auxiliary superconducting Josephson junctions and judging the accuracy of the test result of each performance parameter according to the comparison result.
19. The method of claim 17, wherein the measuring device measures performance parameters of each of the auxiliary superconducting josephson junctions under the same measurement conditions, comprising:
measuring performance parameters of the respective auxiliary superconducting josephson junctions under the same measurement conditions while the respective auxiliary superconducting josephson junctions are in the substrate connection state with each other through grounding, and the core superconducting josephson junctions and the auxiliary superconducting josephson junctions are in the substrate connection state with each other through grounding; and/or the presence of a gas in the gas,
measuring performance parameters of each of the auxiliary superconducting josephson junctions under the same measurement conditions when the auxiliary superconducting josephson junctions are in an isolated state from each other and the core superconducting josephson junction and the auxiliary superconducting josephson junction are in an isolated state from each other; and/or the presence of a gas in the gas,
measuring a performance parameter of each of the auxiliary superconducting josephson junctions under the same measurement conditions while a portion of the auxiliary superconducting josephson junctions are in an isolated state from each other and the core superconducting josephson junction and a portion of the auxiliary superconducting josephson junctions are in an isolated state from each other.
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