CN111486931A - Measuring circuit and device of constant-frequency piezoelectric micro-mass sensor - Google Patents

Measuring circuit and device of constant-frequency piezoelectric micro-mass sensor Download PDF

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CN111486931A
CN111486931A CN202010296618.2A CN202010296618A CN111486931A CN 111486931 A CN111486931 A CN 111486931A CN 202010296618 A CN202010296618 A CN 202010296618A CN 111486931 A CN111486931 A CN 111486931A
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module
frequency
mass sensor
micro
constant
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刘蓬勃
赵剑
吕明
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Dalian University of Technology
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Dalian University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G3/00Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G01G3/165Constructional details

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Abstract

The invention provides a measuring circuit and a device of a constant-frequency piezoelectric micro-mass sensor, comprising: the device comprises a fixed-frequency impedance analysis module, an ARM microprocessor module, a data storage module, a Bluetooth communication module, a display module, a key module and a power module. The constant-frequency impedance analysis module is connected with an external piezoelectric micro-mass sensor, detects the impedance amplitude change of the sensor in a constant-frequency mode, and transmits the data of the piezoelectric micro-mass sensor to the ARM microprocessor module; the ARM microprocessor module calculates the acquired impedance amplitude change into a micro-quality detection value, and is connected with the data storage module, the Bluetooth communication module, the display module and the key module to realize data storage and man-machine interaction; the power module provides stable electric energy for other modules. The piezoelectric micro mass sensor is special equipment for the piezoelectric micro mass sensor, has simple structure, small volume, light weight and low price, and can be tightly integrated with the piezoelectric micro mass sensor.

Description

Measuring circuit and device of constant-frequency piezoelectric micro-mass sensor
Technical Field
The invention relates to the technical field of micro-nano quality detection, in particular to a measuring circuit and a measuring device of a constant-frequency piezoelectric micro-mass sensor.
Background
The piezoelectric micro-mass sensor is a novel sensor integrating excitation and sensing, and is widely applied to the fields of detection and identification of air dust and microbial germs and the like. The working principle of the piezoelectric micro-mass sensor is that the micro-mass change absorbed by the detection area is converted into impedance or phase angle resonance frequency or amplitude change, and then the micro-mass change is deduced.
Changes in impedance or phase angle may be detected using an impedance analyzer. However, as a general-purpose device, the impedance analyzer can only reflect the frequency or amplitude difference of impedance or phase angle, but cannot reflect the specific quality change situation, and is inconvenient for micro-quality detection. Although the impedance analyzer has the advantages of fast response and wide measurement frequency range, for a specific piezoelectric micro-mass sensor, the impedance or phase angle resonant frequency resonant point is relatively stable, and fixed frequency detection can be used for replacing large-range frequency sweep detection, thereby shortening the detection period. In addition, the impedance analyzer has the disadvantages of high price, bulkiness and heaviness, and cannot be well integrated with the piezoelectric micro-mass sensor. Therefore, the impedance analyzer is not suitable as a dedicated measuring device of the piezoelectric type micro mass sensor.
Disclosure of Invention
In view of the above-mentioned technical problems, a measuring circuit and a measuring device for a constant frequency piezoelectric micro mass sensor are provided. The invention mainly utilizes a measuring circuit and a device of a constant-frequency piezoelectric micro-mass sensor, which is characterized by comprising the following components: the device comprises a fixed-frequency impedance analysis module 1, an ARM microprocessor module 2, a data storage module 3, a Bluetooth communication module 4, a display module 5, a key module 6 and a power module 7;
the constant-frequency impedance analysis module 1 is connected with an external piezoelectric micro-mass sensor, detects the impedance amplitude change of the sensor in a constant-frequency mode, and transmits the data of the piezoelectric micro-mass sensor to the ARM microprocessor module 2; the ARM microprocessor module 2 calculates the acquired impedance amplitude change into a micro-quality detection value, and is connected with the data storage module 3, the Bluetooth communication module 4, the display module 5 and the key module 6 to realize data storage and man-machine interaction; the power module 7 provides stable power for the other modules.
Further, the fixed-frequency impedance analysis module 1 detects the loaded quality through the change of the fixed-frequency impedance amplitude of the external piezoelectric micro-mass sensor based on the AD59XX chip.
Further, the ARM microprocessor module 2 employs an STM32 chip.
Further, the display module 5 and the key module 6 are used for displaying and adjusting the micro-quality detection value, the impedance value, the configuration parameter and the calibration parameter.
Furthermore, the Bluetooth communication module 4 is connected to a PC and a mobile terminal device, and micro-quality detection values can be displayed and stored on the PC and the mobile terminal in real time through upper computer software.
Compared with the prior art, the invention has the following advantages:
1. the measuring circuit and the measuring device designed by the invention are optimized aiming at the detection usability of the piezoelectric micro-mass sensor. Compared with the independent impedance value output of an impedance analyzer, the design integrates a large amount of complicated conversion processes into an ARM microprocessor module of the equipment, and finally, the micro-quality detection value can be directly output, so that the method is simpler and easier to use.
2. The measuring circuit and the measuring device designed by the invention are optimized according to the resonant frequency and the impedance characteristics of the piezoelectric micro-mass sensor. In the detection process, the fixed frequency is used for detection instead of frequency sweeping, so that the detection flow can be greatly optimized, and the detection time is saved.
3. The measuring circuit and the measuring device designed by the invention are special equipment for the piezoelectric micro-mass sensor. The piezoelectric micro mass sensor has the advantages of simple structure, small volume, light weight, low price and the like, and can be tightly integrated with the piezoelectric micro mass sensor.
4. The measuring circuit and the device designed by the invention can be connected with a PC or a mobile terminal, and have the advantage of on-line monitoring.
Based on the above reasons, the invention has wide application prospect and value in the field of micro-quality detection such as air dust, microbial disease detection and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a measuring circuit and a measuring device of a constant-frequency piezoelectric micro-mass sensor provided by the invention.
Fig. 2 is a schematic diagram (1) of a measuring circuit of the constant-frequency piezoelectric micro-mass sensor provided by the invention.
Fig. 3 is a schematic diagram (2) of a measuring circuit of the constant-frequency piezoelectric micro-mass sensor provided by the invention.
Fig. 4 is a schematic diagram (3) of a measuring circuit of the constant-frequency piezoelectric micro-mass sensor provided by the invention.
Fig. 5 is a panel diagram of a measuring device of the constant-frequency piezoelectric micro-mass sensor provided by the invention.
In the figure: 1. a fixed frequency impedance analysis module; 2. an ARM microprocessor module; 3. a data storage module; 4. a Bluetooth communication module; 5. a display module; 6. a key module; 7. and a power supply module.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
As shown in fig. 1, the present invention provides a circuit and a device for measuring a constant-frequency piezoelectric micro-mass sensor, which can calculate the micro-mass change by using the constant-frequency impedance amplitude difference before and after the piezoelectric micro-mass sensor adsorbs the mass, and solve the problems that the sensor cannot directly output the mass value when being matched with an impedance analyzer, the usability is poor, the detection speed is slow, the size is large, the price is high, the on-line detection cannot be performed, and the like. Specifically, the fixed-frequency impedance analysis module 1 is connected with an external piezoelectric micro-mass sensor, detects the impedance amplitude of the sensor in a fixed-frequency mode, and transmits data to the ARM microprocessor module 2; the ARM microprocessor module 2 is a control core of the whole system, calculates the acquired impedance change value into a micro-quality detection value, and is also connected with the data storage module 3, the Bluetooth communication module 4, the display module 5 and the key module 6 to store data and perform human-computer interaction; the power supply module 7 supplies power to the whole system.
The fixed frequency impedance analysis module 1 is based on an AD59XX chip, and an impedance detection terminal of the fixed frequency impedance analysis module is directly connected with an external piezoelectric micro mass sensor. Measuring the difference between impedance output values before and after loading mass by taking a certain specific frequency in a certain range before and after the impedance resonance frequency of the equivalent circuit of the micro mass sensor as a detection frequency; and calculating to obtain the loading mass according to the linear relation between the impedance and the loading mass under the detection frequency. Wherein the equivalent impedance of the micro mass sensor has a resonance frequency of each order
Figure BDA0002452424780000041
Wherein phi isn1(x) Obtaining an amplitude function of the composite section of the cantilever beam and the piezoelectric sheet; φ n2(x) is a function of the cantilever extension amplitude; l1 is the length of the composite section of the cantilever beam and the piezoelectric sheet; l2 is the length of the cantilever beam extension;
Figure BDA0002452424780000042
Figure BDA0002452424780000043
m1=(ρptpnptnp)w;
m2=ρnptnpw;
wherein E ispIs the elastic modulus of the piezoelectric sheet; t is tpIs the thickness of the piezoelectric sheet; rhopIs the density of the piezoelectric sheet; enpIs the modulus of elasticity of the cantilever beam; t is tnpIs the thickness of the cantilever beam; rhonpIs the density of the cantilever beam; and w is the width of the piezoelectric sheet and the cantilever beam.
As shown in fig. 2-4, the ARM microprocessor module in the schematic diagram of the measurement circuit is formed by using an STM32F469 chip as a core, and its accessory parts further include an 8MHz crystal oscillator circuit, a 32.768kHz crystal oscillator circuit, a download interface circuit, a reset circuit, and a capacitance filter circuit.
The internal storage module is composed of a 128M F L ASH chip N25Q512, and the storage content comprises equipment configuration information, calibration information, micro-quality historical measurement data and the like which are stored in the chip.
The Bluetooth communication module is formed by taking a CC2640 chip of Ti company as a core, transmits detected micro-quality data to a PC (personal computer) and a mobile terminal in real time, and simultaneously transmits verification information and configuration information back to detection equipment from an upper computer.
The power supply part is used for supplying power to the fixed-frequency impedance analysis module, the ARM microprocessor module, the data storage module, the Bluetooth communication module and the display module respectively. Because the fixed-frequency impedance analysis module has higher requirement on the stability of the power supply, each part adopts a mode of respectively supplying power, so that the power supply ripple and high-frequency interference can be inhibited. The whole system can be powered by an external power supply and can also be powered by a battery, the battery can be charged simultaneously when the external power supply supplies power, and the charging chip adopts TP 4054.
As shown in fig. 5, the front control panel of the detection device is divided into an impedance-quality display area and a fixed-frequency adjustment area. The display screen of the impedance-quality display area is used for displaying the measured quality value, similarly, information such as the impedance value, the configuration parameter, the calibration parameter and the like can be displayed here, and the display of different values can be adjusted through keys. The fixed-frequency adjusting area is used for adjusting fixed-frequency detection frequency, real-time frequency can be displayed on a small screen, and frequency values can be adjusted through keys. As a preferred choice of the present application, in the present application, the display module is mainly a display screen, and is used for displaying the detected micro-quality value, the detected frequency value and the real-time impedance value; the input of a specific detection frequency value is realized by setting keys comprising number keys 1-9, numerical values, confirmation and other functional keys.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
In the above embodiments of the present invention, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the embodiments provided in the present application, it should be understood that the disclosed technology can be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units may be a logical division, and in actual implementation, there may be another division, for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, units or modules, and may be in an electrical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic or optical disk, and other various media capable of storing program codes.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (5)

1. A measuring circuit and a device of a constant-frequency piezoelectric micro-mass sensor are characterized by comprising: the device comprises a fixed-frequency impedance analysis module (1), an ARM microprocessor module (2), a data storage module (3), a Bluetooth communication module (4), a display module (5), a key module (6) and a power module (7);
the constant-frequency impedance analysis module (1) is connected with an external piezoelectric micro-mass sensor, detects the impedance amplitude change of the sensor in a constant-frequency mode, and transmits the data of the piezoelectric micro-mass sensor to the ARM microprocessor module (2); the ARM microprocessor module (2) calculates the acquired impedance amplitude change into a micro-quality detection value, and is connected with the data storage module (3), the Bluetooth communication module (4), the display module (5) and the key module (6) to realize data storage and human-computer interaction; the power supply module (7) provides stable electric energy for other modules.
2. The circuit and the device for measuring the constant-frequency piezoelectric micro-mass sensor according to claim 1, wherein the constant-frequency impedance analysis module (1) detects the loaded quality through the change of the amplitude of the constant-frequency impedance of the external piezoelectric micro-mass sensor based on an AD59XX chip.
3. The measuring circuit and device of the fixed-frequency piezoelectric micro-mass sensor as claimed in claim 1, wherein the ARM microprocessor module (2) adopts STM32 chip.
4. The fixed-frequency micro-mass sensor-based measurement circuit and device as claimed in claim 1, wherein the display module (5) and the key module (6) are used for displaying and adjusting micro-mass detection values, impedance values, configuration parameters and calibration parameters.
5. The circuit and the device for measuring the constant-frequency piezoelectric micro-mass sensor according to claim 1, wherein the Bluetooth communication module (4) is connected to a PC (personal computer) and a mobile terminal device, and micro-mass detection values can be displayed and stored on the PC and the mobile terminal in real time through upper computer software.
CN202010296618.2A 2020-04-15 2020-04-15 Measuring circuit and device of constant-frequency piezoelectric micro-mass sensor Pending CN111486931A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101769938A (en) * 2010-01-21 2010-07-07 中国科学院力学研究所 Direct pulling type acceleration transducer based on fiber Bragg grating
CN106918380A (en) * 2017-02-17 2017-07-04 大连理工大学 A kind of micro- quality detecting method of high sensitivity and portable quality test device
CN109374729A (en) * 2018-09-25 2019-02-22 深圳大学 A kind of acoustics micro-mass sensor and detection method
CN110073301A (en) * 2017-08-02 2019-07-30 强力物联网投资组合2016有限公司 The detection method and system under data collection environment in industrial Internet of Things with large data sets
CN110702555A (en) * 2019-09-10 2020-01-17 大连理工大学 Adjustable micro-mass sensor based on modal localization effect

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101769938A (en) * 2010-01-21 2010-07-07 中国科学院力学研究所 Direct pulling type acceleration transducer based on fiber Bragg grating
CN106918380A (en) * 2017-02-17 2017-07-04 大连理工大学 A kind of micro- quality detecting method of high sensitivity and portable quality test device
CN110073301A (en) * 2017-08-02 2019-07-30 强力物联网投资组合2016有限公司 The detection method and system under data collection environment in industrial Internet of Things with large data sets
CN109374729A (en) * 2018-09-25 2019-02-22 深圳大学 A kind of acoustics micro-mass sensor and detection method
CN110702555A (en) * 2019-09-10 2020-01-17 大连理工大学 Adjustable micro-mass sensor based on modal localization effect

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
"《传感器世界》全年摘要", 《传感器世界》 *
张淑敏: "基于阻抗变化的高灵敏度微质量传感器的机电耦合分析与设计", 《中国优秀硕士学位论文全文数据库信息科技辑》 *
赵剑 等: "基于构型优化的高阶模态微质量传感器灵敏度提升方法", 《光学精密工程》 *
高仁璟 等: "梯形变截面悬臂梁式微质量传感器设计与分析", 《传感器技术学报》 *
黄智伟 等: "《全国大学生电子设计竞赛 常用电路模块制作 第2版》", 30 September 2016 *

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